JPH0452734U - - Google Patents

Info

Publication number
JPH0452734U
JPH0452734U JP9524390U JP9524390U JPH0452734U JP H0452734 U JPH0452734 U JP H0452734U JP 9524390 U JP9524390 U JP 9524390U JP 9524390 U JP9524390 U JP 9524390U JP H0452734 U JPH0452734 U JP H0452734U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9524390U
Other languages
Japanese (ja)
Other versions
JP2536859Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990095243U priority Critical patent/JP2536859Y2/ja
Publication of JPH0452734U publication Critical patent/JPH0452734U/ja
Application granted granted Critical
Publication of JP2536859Y2 publication Critical patent/JP2536859Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1990095243U 1990-09-11 1990-09-11 プラズマ処理装置の蓋体支持構造 Expired - Lifetime JP2536859Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990095243U JP2536859Y2 (ja) 1990-09-11 1990-09-11 プラズマ処理装置の蓋体支持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990095243U JP2536859Y2 (ja) 1990-09-11 1990-09-11 プラズマ処理装置の蓋体支持構造

Publications (2)

Publication Number Publication Date
JPH0452734U true JPH0452734U (cs) 1992-05-06
JP2536859Y2 JP2536859Y2 (ja) 1997-05-28

Family

ID=31833825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990095243U Expired - Lifetime JP2536859Y2 (ja) 1990-09-11 1990-09-11 プラズマ処理装置の蓋体支持構造

Country Status (1)

Country Link
JP (1) JP2536859Y2 (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519872A (en) * 1978-07-28 1980-02-12 Mitsubishi Electric Corp Heat treating device
JPS59103345A (ja) * 1982-12-03 1984-06-14 Mitsubishi Electric Corp プラズマ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5519872A (en) * 1978-07-28 1980-02-12 Mitsubishi Electric Corp Heat treating device
JPS59103345A (ja) * 1982-12-03 1984-06-14 Mitsubishi Electric Corp プラズマ処理装置

Also Published As

Publication number Publication date
JP2536859Y2 (ja) 1997-05-28

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