JP2530738B2 - Method of manufacturing core slider of thin film magnetic head - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a core slider of a thin film magnetic head, and more particularly to a thin film magnetic head capable of precisely positioning the core slider of the thin film magnetic head to improve the yield. The present invention relates to a method for manufacturing a core slider.

[Prior Art] Generally, in a core slider of a thin film magnetic head, a large number of elements formed by thin film technology on a wafer are cut out into a rectangular block slider, and the block slider is temporarily fixed to a high-precision jig for processing with wax. In the state
It is manufactured by carrying out grinding, grooving and lapping.

In the temporary fixing of the block slider according to the prior art, after the hot melt wax is melted by heating, the positioning is manually performed, and then the block slider is fixed for a long time by cooling for a long time. .

As a technique related to the method of manufacturing the core slider of this thin film magnetic head, for example, the technique described in JP-A-63-191309 can be cited.

[Problems to be Solved by the Invention] In the method for manufacturing the core slider of the thin-film magnetic head according to the above-mentioned conventional technique, the wax is kept at a melting temperature of about 120 ° C. to perform the positioning by the manual work, and the safety is low. Due to the work, the positioning accuracy of the block slider, the wax coating thickness, the adhesive strength, and other variations were generated, leading to the problem of poor yield.

Further, in the conventional manufacturing method, there is a tendency that extra wax is attached to the jig and the block slider in order to secure the adhesive strength by manual work, and therefore, an extra step of removing the excess wax from the end of the block slider is required. It also caused the problem that it was necessary. In the prior art, positioning temporary fixing could not be automated because the temporary fixing wax was naturally cooled to prevent distortion, so that the common jig and block slider after positioning could be moved. It was difficult.

An object of the present invention is to solve the above-mentioned problems of the prior art. By temporarily fixing a block slider precisely positioned on a common jig and making it movable, the manufacturing apparatus is automated and the yield is improved. A method of manufacturing a core slider of a thin film magnetic head is provided.

[Means for Solving the Problem] In order to achieve the above object, a method of manufacturing a core slider of a thin film magnetic head according to the present invention comprises a coating step of coating a common jig with a predetermined amount of wax heated to a melting temperature, A transfer step of mounting a block slider in a melting temperature state on a common jig coated with wax, a positioning step of performing relative positioning of the common jig and the block slider in the melting temperature state, and a common jig after the positioning is completed. And a rapid cooling step of rapidly cooling the wax between the block sliders to a solidification temperature or lower, and a reheating and cooling step of heating the wax cooled by the rapid cooling step to a melting temperature and then naturally cooling the wax. And

Further, in the method of manufacturing the core slider of the thin film magnetic head according to the present invention, the coating step of applying a predetermined amount of wax heated to the melting temperature to the common jig and the block slider to the common jig coated with the wax at the melting temperature are performed. A transfer process to be mounted, a positioning process for performing relative positioning of the common jig and the block slider in the melting temperature state, and a rapid cooling for rapidly cooling the wax between the common jig and the block slider after the positioning to below the solidification temperature. The second feature is that the block slider is temporarily fixed on a common jig depending on the process.

[Operation] In the method of manufacturing the core slider of the thin-film magnetic head having the first characteristic, the common jig and the block slider are relatively positioned in a state of being melted by the positioning process, and then rapid cooling is performed by the rapid cooling process to move. By making it possible, the manufacturing can be automated and the yield can be improved. Further, according to the present invention, the strain of the wax can be reduced as much as possible by performing the rapid cooling in the rapid cooling process and then the reheating or natural cooling in the reheating and cooling process.

In the method for manufacturing the core slider of the thin film magnetic head having the second characteristic, the block slider is a common jig without performing the above-mentioned reheating and cooling step by the coating step, the transfer step positioning step and the quenching step. By temporarily fixing the block slider on the top, it is possible to manufacture a block slider in which wax distortion is prevented from occurring in a smaller number of steps.

[Embodiment] An embodiment of a method of manufacturing a core slider of a thin film magnetic head according to the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a view for explaining the outline of the method of manufacturing the core slider of the thin film magnetic head according to the present embodiment.
FIG. 1 is a diagram showing an entire manufacturing apparatus of a core slider of a thin film magnetic head for realizing the method, and FIG. 3 is a diagram for explaining a positioning rapid cooling ASSY (assembly) part.

As shown in FIG. 1, the manufacturing method according to this embodiment applies a wax 3 melted by heating to about 120 ° C. to a common jig 2 which is processed with high precision for mounting components, and the wax 3 is applied to this wax 3. Thin-film magnetic head (hereinafter referred to as TFH: Thin Film He
The block slider 1 of ad) is precisely positioned and mounted, and the wax 3 is solidified by forced cooling to temporarily fix the slider 1. Transfer the block slider 1 that is movable by this temporary fixing to a predetermined independent furnace,
After heating up to the melting temperature or natural cooling, grinding, grooving, lapping, and cutting work
The H core slider 4 is manufactured. The wax 3 is, for example, what is called a hot melt type wax, and has a characteristic that it melts at 120 ° C. and begins to solidify at 76 ° C. when cooled.

Since the adhered state of the wax serves as a reference during processing such as the above-mentioned grinding, it is necessary to prevent deformation due to adhesive distortion. For this reason, the wax 3 according to the prior art is cooled by natural cooling for a long time, but in this embodiment, the melted wax 3 is rapidly cooled below the solidification temperature as described above, and is blocked by this rapid cooling. Since the slider 1 can be moved without causing a positional deviation, the manufacturing apparatus can be automated and the yield can be improved.

In the prior art, it was the accepted theory that the wax would be strained and could not be precisely positioned unless it was naturally cooled. However, as a result of experiments, the inventors have found that the wax in a molten state has a solidification point (76 ° C.). ) The present invention has been made by discovering that even if it is rapidly cooled to the temperature below, for example, 50 ° C., the strain falls within an allowable range.

In this embodiment, the method of manufacturing the core slider of this thin film magnetic head is realized by the manufacturing apparatus shown in FIGS.

The manufacturing apparatus of the core slider of the thin film magnetic head shown in FIG. 2 is such that the block slider 1 and the common jig 2 are mounted on the heating transfer pallet 9 and transferred, and the wax 3 is heated (about 120 ° C.). The wax-dissolving section 5 that has been melted, the wax stamp section 6 that takes out the melted wax 3 from the melting section 5 by the stamper 11 and stamps it on the surface of the common jig 2, and the block that is conveyed by the conveyor section 10. The transfer scrub ASSY part 7 that moves the slider 1 and the common jig 2 to the positioning cooling ASSY part 8 described later by the transfer scrub hand 12, and the block slider 1 and the common jig 2 that are moved by the ASSY part 7 The positioning cooling ASSY portion 8 is provided for performing rapid cooling after positioning, and the control circuit 100 for controlling each of these mechanisms.

The heating and transporting pallet 9 is configured so that only the portion on which the block slider 1 and the common jig 2 are mounted is heated, and the portion on which a finished product after bonding, which will be described later, is mounted is not heated. Also, the transfer scrub assembly section 7 is a scrub hand.
The common jig 2 is transferred onto the positioning base 16 of the positioning and cooling ASSY portion 8 by the 12 and then the block slider 1 is mounted on the common jig 2, and the slider 1 and the common jig after cooling are operated. 2 again heating transport pallet 9
It operates so as to return to the upper non-heated part.

As shown in FIG. 3, the positioning quenching ASSY portion 8 has a positioning reference portion 14 which is a reference position for the common jig 2 and the block slider 1, and the common jig 2 and the block slider 1 are pressed against the reference portion 14. A common jig clamp portion 13 for precisely positioning them at a reference position, a quenching nozzle 15 for cooling them by blowing cool air to the common jig 2 and the block slider 1 held by the clamp portion 13, and these. Positioning stand 17 that holds the mechanism
And a heater 18 disposed on the lower surface of the positioning table 17 so as to be vertically movable by an air cylinder 19. Therefore, the ASSY portion 8 is for performing precise positioning of the block slider 1 mounted on the common jig 2 and temporary fixing with cold air.

Now, the manufacturing apparatus of the core slider of the thin film magnetic head configured as described above operates as follows.

First, the block slider 1 and the common jig 2 which are cut out in a rectangular shape from the wafer for the thin film magnetic head are moved to the wax stamp part 6 by the conveyor part 10 while being heated to the wax melting temperature by the heating transfer pallet part 9. To do. The wax stamp section 6 takes out a predetermined amount of wax from the wax melting section 5 by the stamper 11 and applies the stamp on the common jig 2.

Next, this device is composed of a block slider 1 and a common jig 2.
While being heated by the heating and conveying pallet unit 9, it is moved to the transfer scrub ASSY unit 7 by the conveyor unit 10. As shown in FIG. 3, the transfer scrub ASSY section 7 chucks the common jig 2 coated with the wax 3 by the transfer scrub hand 12 and moves onto the positioning base 16 of the positioning quench ASSY section 8. Next, the common jig 2 of the block slider 1
Put it on top. At this time, the heater 18 of the rapid cooling ASSY portion 8 moves upward by the air cylinder 19 to heat the positioning base 16, so that the wax 3 on the common jig 2 is kept in a molten state.

Further, the quenching ASSY part 8 moves the common jig clamp part 13 to the right in the drawing to move the block slider 1 and the common jig 2 to each other.
The slider 1 and the common jig 2 are precisely positioned by pressing against the positioning reference portion 14 and sliding them back and forth and left and right. Thereafter, the ASSY portion 8 lowers the heater 18 by driving the air cylinder 19 to stop heating to the common jig 2 and the like, and sprays cool air from the quenching nozzle 15 to quench the wax 3. Do. The wax 3 starts to solidify at about 76 ° C and is cooled to about 50 ° C. Therefore, when the wax 3 is solidified by rapid cooling, the block slider 1 can be transferred without causing positional displacement.

After that, the common jig 2 and the like are released from the clamping by the common jig clamp portion 13 of the quenching ASSY portion 8 and transferred scrubbing.
It is chucked by the moving scrubbing hand 12 of the ASSY unit 7, mounted on a non-heated portion on the heating pallet 9 and transferred to the next step by driving the conveyor 10. Although not shown in the next step, the wax is re-melted at a temperature (120
℃), and then naturally cooled for a certain period of time to cool it down to 76 ℃.
It is fixed so that it solidifies and fits within the prescribed strain. The series of operations are controlled by the control unit 100.

As described above, in the method of manufacturing the core slider of the thin film magnetic head according to the present embodiment, the block slider 1 and the common jig 2 are precisely positioned by the common jig clamp portion 13 and the positioning reference portion 14 on the positioning quench ASSY portion 8. When the wax 3 is solidified, the wax 3 is rapidly cooled to a temperature below the solidification temperature by the cool air jet from the quenching nozzle 16 and temporarily fixed, and then reheated to the melting temperature of the wax 3 or naturally cooled. It is possible to position the block slider 1 on the common jig 2 with high precision by preventing the distortion of the block. Therefore, the manufacturing method of the present core slider can improve the safety as compared with the conventional manual work, can prevent the excessive wax coating, and can improve the yield of the magnetic head manufacturing.

In this embodiment, an example in which the rapidly cooled wax is reheated and naturally cooled to temporarily fix the block slider has been described.
Temporary fixing with reduced strain can also be performed by rapid cooling to (° C) and then natural cooling.

As described above, in the method of manufacturing the core slider of the thin film magnetic head according to the first feature of the present invention, the melted wax is rapidly cooled and temporarily fixed to allow the movable wax to be freely conveyed and automated. In addition, it is possible to improve safety and yield in a high temperature environment.

Also, in the method of manufacturing the core slider of the thin film magnetic head according to the second aspect of the present invention, the block slider is commonly used without performing the above-mentioned reheating and cooling step by the coating step, the transfer step positioning step and the quenching step. By temporarily fixing the block slider on the jig, it is possible to manufacture a block slider in which wax distortion is prevented from occurring in a smaller number of steps.

[Brief description of drawings]

FIG. 1 is a diagram for explaining the principle of a method of manufacturing a core slider of a thin film magnetic head according to an embodiment of the present invention, and FIG.
FIG. 3 is a diagram showing the entire manufacturing apparatus for realizing the method of manufacturing the core slider of the thin film magnetic head according to the present embodiment, and FIG. 3 is a view for explaining the positioning cooling assembly part according to the present embodiment. 1: Block slider, 2: Common jig, 3: Wax, 4: TFH core slider, 5: Wax melting part, 6: Wax stamp part, 7: Transfer scrub ASSY part, 8: Positioning cooling ASSY part, 9 : Heat transfer pallet part, 10: Conveyor part, 11: Stamper, 12: Moving scrub hand, 13: Common jig clamp part, 14: Positioning reference part, 15: Quenching nozzle, 16: Positioning base, 17: Positioning table , 18: heater, 19: air cylinder.

Front Page Continuation (72) Inventor Koji Takeshita 2880 Kozu, Odawara City, Kanagawa Prefecture Odawara Plant, Hitachi, Ltd. (56) Reference JP-A-1-289657 (JP, A)

Claims (2)

(57) [Claims] 1. A method of manufacturing a core slider of a thin-film magnetic head, wherein a block slider is temporarily fixed to a common jig with wax, and the block slider is processed. A coating step of coating, a transfer step of mounting a block slider on a common jig coated with wax in the melting temperature state, a positioning step of performing relative positioning of the common jig and the block slider in the melting temperature state, A rapid cooling step of rapidly cooling the wax between the common jig and the block slider, which has been positioned, to a solidification temperature or lower, and a reheating and cooling step of heating the wax cooled by the rapid cooling step to the melting temperature and then naturally cooling the wax. A method of manufacturing a core slider of a thin-film magnetic head, comprising: 2. A method of manufacturing a core slider of a thin-film magnetic head, wherein a block slider is temporarily fixed on a common jig with a wax while the block slider is moved, and a predetermined amount of wax heated to a melting temperature is applied to the common jig. A coating step of coating, a transfer step of mounting a block slider on a common jig coated with the wax in a melting temperature state, a positioning step of performing relative positioning of the common jig and the block slider in the melting temperature state, Manufacture of a core slider for a thin-film magnetic head characterized in that the block slider is temporarily fixed on the common jig by a rapid cooling process for rapidly cooling the wax between the common jig and the block slider after positioning to a solidification temperature or lower. Method.