JP2529360Y2 - 半導体レーザ装置 - Google Patents
半導体レーザ装置Info
- Publication number
- JP2529360Y2 JP2529360Y2 JP1986160974U JP16097486U JP2529360Y2 JP 2529360 Y2 JP2529360 Y2 JP 2529360Y2 JP 1986160974 U JP1986160974 U JP 1986160974U JP 16097486 U JP16097486 U JP 16097486U JP 2529360 Y2 JP2529360 Y2 JP 2529360Y2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- light
- receiving elements
- light receiving
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title description 21
- 239000000758 substrate Substances 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986160974U JP2529360Y2 (ja) | 1986-10-20 | 1986-10-20 | 半導体レーザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986160974U JP2529360Y2 (ja) | 1986-10-20 | 1986-10-20 | 半導体レーザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6365260U JPS6365260U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-04-30 |
| JP2529360Y2 true JP2529360Y2 (ja) | 1997-03-19 |
Family
ID=31086862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986160974U Expired - Lifetime JP2529360Y2 (ja) | 1986-10-20 | 1986-10-20 | 半導体レーザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2529360Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830183A (ja) * | 1981-08-15 | 1983-02-22 | Hitachi Ltd | 半導体レ−ザアレイ光検知方法 |
-
1986
- 1986-10-20 JP JP1986160974U patent/JP2529360Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6365260U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-04-30 |
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