JP2529233B2 - Ultrasonic rotary oscillator - Google Patents

Ultrasonic rotary oscillator

Info

Publication number
JP2529233B2
JP2529233B2 JP62011373A JP1137387A JP2529233B2 JP 2529233 B2 JP2529233 B2 JP 2529233B2 JP 62011373 A JP62011373 A JP 62011373A JP 1137387 A JP1137387 A JP 1137387A JP 2529233 B2 JP2529233 B2 JP 2529233B2
Authority
JP
Japan
Prior art keywords
oscillator
center
regions
ultrasonic rotary
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62011373A
Other languages
Japanese (ja)
Other versions
JPS63181676A (en
Inventor
明生 熊田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Maxell Energy Ltd
Original Assignee
Hitachi Maxell Energy Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Energy Ltd filed Critical Hitachi Maxell Energy Ltd
Priority to JP62011373A priority Critical patent/JP2529233B2/en
Priority to US07/174,413 priority patent/US4868446A/en
Publication of JPS63181676A publication Critical patent/JPS63181676A/en
Application granted granted Critical
Publication of JP2529233B2 publication Critical patent/JP2529233B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は超音波振動子に係わり、さらに詳しくは超音
波モータの固定子などに用いる超音波振動子の改良に関
する。
Description: TECHNICAL FIELD The present invention relates to an ultrasonic vibrator, and more particularly to improvement of an ultrasonic vibrator used for a stator of an ultrasonic motor or the like.

〔従来の技術〕[Conventional technology]

従来の超音波モータは、楕円振動をするステータに圧
着されたロータが受ける回転トルクを利用した装置であ
つた。ステータは超音波楕円振動子からなり、回転では
なく振動をしており、ロータは絶えず一方向に回転し続
けている。ステータが停止しており、ロータが回転して
いるにもかかわらず、両者間のトルクの伝達が速度差の
無い静止摩擦を利用できるのは、ステータの楕円振動の
たて振動成分がロータに浮力を与え、ねじり振動の半周
期だけロータと圧接して一方向の回転トルクを伝達し、
残る半周期はロータから離れ、回転と逆方向に戻るため
であり、この原理が満足されたとき摩耗が回避できる。
A conventional ultrasonic motor is a device that utilizes the rotational torque received by a rotor that is crimped to an elliptical vibration stator. The stator consists of an ultrasonic elliptical oscillator, vibrates instead of rotating, and the rotor is constantly rotating in one direction. Even if the stator is stopped and the rotor is rotating, the static friction with no speed difference can be used for torque transmission between the two because the vertical vibration component of the elliptical vibration of the stator causes the buoyant force on the rotor. Is applied to the rotor for a half cycle of torsional vibration to transmit the rotational torque in one direction,
This is because the remaining half cycle leaves the rotor and returns in the direction opposite to the rotation, and when this principle is satisfied, wear can be avoided.

しかし、この原理を満足するには複雑な機構を要し、
例えば薄い偏平モータを作ることはできなかつた。すな
わち、ステータが回転できないことが全ての問題点の根
源であつた。
However, to satisfy this principle requires a complicated mechanism,
For example, it was impossible to make a thin flat motor. That is, the inability of the stator to rotate was the root of all problems.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

この発明は、従来の超音波振動子が持つていた回転で
きないという欠点を解決し、以つて超音波モータのステ
ータなどに好都合な超音波振動子を提供することを目的
とする。
SUMMARY OF THE INVENTION It is an object of the present invention to solve the drawback of the conventional ultrasonic vibrator that it cannot rotate, and to provide an ultrasonic vibrator suitable for a stator of an ultrasonic motor.

〔問題点を解決するための手段〕[Means for solving problems]

前記目的を達成するため、本発明は、例えば円板状,
円環状あるいは円筒状などの円形の振動子からなり、複
数対の電極を介してその振動子の厚さ方向の同じ向きに
分極された振動子の複数対の領域が振動子の中心に対し
て非対称でかつ分極方向に対して垂直な面で変形するよ
うに振動子を励振することにより、振動子の重心位置が
当該振動子の中心の回りを回転することを特徴とするも
ので、励えばフラフープを回している人の胴の動きと同
様の回転を数10KHzの回転数で実現するものである。
In order to achieve the above object, the present invention provides, for example, a disc shape,
It consists of a circular oscillator such as an annular or cylindrical shape, and multiple pairs of regions of the oscillator that are polarized in the same direction in the thickness direction of the oscillator through multiple pairs of electrodes are It is characterized in that the center of gravity of the oscillator is rotated around the center of the oscillator by exciting the oscillator so that it is asymmetric and deformed in a plane perpendicular to the polarization direction. It realizes rotation similar to the movement of the body of a person who is turning a hula hoop at a rotation speed of several tens KHz.

円を等分割する複数本の直径と、それぞれの直径を構
成する一対の半径を想定し、一方の半径を伸ばした分だ
け他方を縮めると、円周は直径に沿つて平行移動する。
このとき円周の形状が元の真円からくずれないように保
つには、他の半径も対になつて伸縮するものとしよう。
次に隣の直径を構成する一対の半径が最初の直径の伸び
縮みと同じ量に変化し、他の径も円周が変形しないよう
に伸縮し直したとしよう。新しい円の中心は、二番目の
直径の中心に移る。このように隣の直径が順次伸縮する
ごとに円の中心は、最初の半径の伸びの長さを半径とす
る円周上を移動する。即ち円の中心が回転する。
Assuming a plurality of diameters that divide the circle into equal parts and a pair of radii that make up each diameter, and by contracting the radius by extending one radius, the circumference translates along the diameter.
At this time, in order to keep the shape of the circumference so as not to collapse from the original perfect circle, let the other radii also expand and contract in pairs.
Now suppose that a pair of radii that make up the adjacent diameters change to the same extent as the first diameter expands and contracts, and the other diameters expand and contract again so that the circumference does not deform. The center of the new circle moves to the center of the second diameter. In this way, the center of the circle moves on the circumference having the radius of the extension length of the first radius every time the adjacent diameters are expanded and contracted sequentially. That is, the center of the circle rotates.

円板をその固有振動数で励振すると共振現象が現れ、
大振幅の振動状態が得られる。このとき円板の振動に伴
う変形は、面内で一様な伸縮変形であり、呼吸モードと
も言われる。この状態を基本共振状態あるいはO次共振
と言う。励振周波数を変えると振幅は激減するが、基本
周波数の2倍,3倍…の周波数でも共振状態が得られ、そ
れらを1次,2次…の共振状態という。1次の共振状態で
は、円周はほぼ真円のままその中心(又は重心)が公転
する。
When a disk is excited with its natural frequency, a resonance phenomenon appears,
A large amplitude vibration state is obtained. At this time, the deformation caused by the vibration of the disk is a uniform expansion / contraction deformation in the plane, which is also called a breathing mode. This state is called a basic resonance state or O-order resonance. Although the amplitude decreases drastically when the excitation frequency is changed, resonance states can be obtained even at frequencies twice or three times the fundamental frequency, which are called primary, secondary ... Resonance states. In the first-order resonance state, the center (or the center of gravity) of the circle revolves while the circle is almost a perfect circle.

〔実施例〕〔Example〕

以下、本発明に係る超音波回転振動子の動作原理を実
施例にもとづいて具体的に述べる。
Hereinafter, the operating principle of the ultrasonic rotary oscillator according to the present invention will be specifically described based on Examples.

第1図は本発明になる超音波回転振動子の一実施例を
示す概略平面図、第2図はそれの概略側面図である。Pb
(Zr−Ti)O3系圧電セラミツクの外径40mm,内径15mm,圧
さ2mmのドーナツ状円板の上下両主面に当分割銀焼付電
極を施した。
FIG. 1 is a schematic plan view showing an embodiment of an ultrasonic rotary oscillator according to the present invention, and FIG. 2 is a schematic side view thereof. Pb
A (Zr-Ti) O 3 -based piezoelectric ceramic with a 40 mm outer diameter, a 15 mm inner diameter, and a pressure of 2 mm of a doughnut-shaped disk was coated with silver-baked electrodes on the upper and lower sides.

本実施例では4等分割とし、隣接電極との間に0.5mm
幅の絶縁溝9を設けた。上面電極1,2,3,4を共通に結
び、それぞれに対向する裏面電極同志も共通に接続し、
これら4つの表電極と対向する4つの裏電極との間に直
流高電圧を印加して分極処理した。素子全体は同じ向き
にほぼ一様に分極できた。
In this embodiment, it is divided into four equal parts, and the distance between adjacent electrodes is 0.5 mm.
An insulating groove 9 having a width is provided. Connect the top surface electrodes 1, 2, 3, 4 in common, and connect the back surface electrodes that face each other in common.
A direct current high voltage was applied between these four front electrodes and the four back electrodes facing each other to perform polarization treatment. The entire device could be polarized almost uniformly in the same direction.

次にこれらの電極のうちの電極1の表と電極4の裏、
電極1の裏と電極4の表、電極2の表と電極3の裏、電
極2の裏と電極3の表をそれぞれ接続し、これら4つの
グループにリード線5,6,7,8を接続した。リード線5と
6の間には100ボルト40KHzの交流電圧を印加し、リード
線7と8の間には同一電圧,同一周波数で位相が90゜遅
れた電圧を印加した。印加電圧の周波数をわずかに変え
たところ、38.8KHzで強い共鳴振動が生じた。
Next, of these electrodes, the front of electrode 1 and the back of electrode 4,
Connect the back of electrode 1 to the front of electrode 4, the front of electrode 2 to the back of electrode 3, the back of electrode 2 to the front of electrode 3, and connect the lead wires 5, 6, 7, 8 to these 4 groups. did. An alternating voltage of 100 V and 40 KHz was applied between the lead wires 5 and 6, and the same voltage was applied between the lead wires 7 and 8 and the voltage of which phase was delayed by 90 ° at the same frequency. When the frequency of the applied voltage was changed slightly, strong resonance vibration occurred at 38.8 KHz.

この振動に伴う素子の変形の説明が第3図に示されて
いる。第3図(a)〜(d)は、正弦波電圧の1周期の
間の素子の変化を表わしている。(a)は領域1aと3aと
にそれぞれ+100V,−100V、領域2aと4aには0ボルトが
印加された瞬間の素子の変形1′a,3′aを示してい
る。(b)は領域2aと4aとにそれぞれ+100V,−100V、
領域1aと3aには0ボルトが印加された瞬間の素子の変形
2′a,4′aを表わす。(c)および(d)は同様にそ
れぞれ(a)の時刻から1/2周期および3/4周期後の変形
1″a,3″a,2″a,4″aを示したものである。(a)か
ら(d)への経過に伴つて弧の凸部が時計まわりに円周
を一周し、それにつれて素子の重心Gが5,6,7,8に示す
如く時計回りに円運動をしている。
An explanation of the deformation of the element due to this vibration is shown in FIG. FIGS. 3A to 3D show changes in the element during one cycle of the sine wave voltage. (A) shows the deformations 1'a, 3'a of the element at the moment when +100 V and -100 V are applied to the regions 1a and 3a, respectively, and 0 volt is applied to the regions 2a and 4a. (B) is + 100V, -100V in regions 2a and 4a,
Regions 1a and 3a represent the deformations 2'a, 4'a of the element at the moment when 0 volt is applied. Similarly, (c) and (d) show deformations 1 ″ a, 3 ″ a, 2 ″ a, 4 ″ a 1/2 cycle and 3/4 cycle after the time of (a), respectively. . With the progress from (a) to (d), the convex portion of the arc makes a full circle in the clockwise direction, and the center of gravity G of the element makes a circular movement in the clockwise direction as shown by 5,6,7,8. are doing.

以上述べた実施例は4等分割素子であるが、6,10……
等分割が可能なことは言うまでもないが、分割数が多く
なると位相関係が複雑になり、駆動電圧も多相になるの
で、2〜6分割が最も実用的と考えられる。
Although the embodiment described above is a four-divided element, 6,10 ...
Needless to say, even division is possible, but if the number of divisions increases, the phase relationship becomes complicated and the driving voltage also becomes multiphase, so division of 2 to 6 is considered to be the most practical.

本発明の円形の振動子を、圧電素子と、その圧電素子
に嵌合した円板状,円環状あるいは円筒状の弾性体で構
成することもできる。
The circular vibrator of the present invention may be composed of a piezoelectric element and a disk-shaped, ring-shaped, or cylindrical elastic body fitted to the piezoelectric element.

〔発明の効果〕〔The invention's effect〕

以上説明したように、本発明は、放射状に等分割され
た独立に変形し得る偶数個の領域を有する円板,円環あ
るいは円筒状圧電素子において、中心対称に配置されて
いる領域同志は互いに逆極性の振動が生じるごとく、隣
接配置されている領域同志は互いに異なる位相の振動が
生じるごとく、超音波帯域の電気信号を用いて励振する
ように構成した。
As described above, according to the present invention, in a disk, an annulus, or a cylindrical piezoelectric element having an even number of independently equally deformable regions that are radially equally divided, the regions that are arranged in central symmetry are mutually The regions adjacent to each other were excited by using electric signals in the ultrasonic band so that vibrations of opposite polarities and vibrations of mutually different phases would occur.

そのため本発明の超音波回転振動子では、振動による
変形状態が順次隣接する領域に伝搬する結果、中心が固
定されている圧電素子の重心が右まわり又は左まわりの
円運動をすることから、中心を固定されている素子が実
効的には偏心回転をする効果がある。
Therefore, in the ultrasonic rotary oscillator of the present invention, the deformation state due to vibration is sequentially propagated to the adjacent regions, and as a result, the center of gravity of the piezoelectric element whose center is fixed makes a clockwise or counterclockwise circular motion. The element that is fixed is effectively eccentrically rotated.

【図面の簡単な説明】[Brief description of drawings]

第1図及び第2図は本発明による超音波回転振動子の一
実施例の平面図及び側面図、第3図は本発明による超音
波回転振動子の原理説明図である。 1,2,3,4,……電極、1a,2a,3a,4a……圧電素子の等分割
された領域、5,6,7,8……リード線、9……絶縁溝、10
……圧電素子。
1 and 2 are a plan view and a side view of an embodiment of an ultrasonic rotary oscillator according to the present invention, and FIG. 3 is a principle explanatory view of the ultrasonic rotary oscillator according to the present invention. 1,2,3,4, ... Electrodes, 1a, 2a, 3a, 4a ... Divided areas of piezoelectric element, 5,6,7,8 ... Lead wire, 9 ... Insulation groove, 10
……Piezoelectric element.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】円形の振動子からなり、複数対の電極を介
してその振動子の厚さ方向の同じ向きに分極された振動
子の複数対の領域が振動子の中心に対して非対称でかつ
分極方向に対して垂直な面で変形するように振動子を励
振することにより、振動子の重心位置が当該振動子の中
心の回りを回転することを特徴とする超音波回転振動
子。
1. A plurality of pairs of regions, which are composed of circular vibrators and are polarized in the same direction in the thickness direction of the vibrators via a plurality of pairs of electrodes, are asymmetric with respect to the center of the vibrator. An ultrasonic rotary oscillator characterized in that the position of the center of gravity of the oscillator is rotated around the center of the oscillator by exciting the oscillator so as to deform in a plane perpendicular to the polarization direction.
【請求項2】特許請求の範囲第(1)項記載の円形の振
動子を、放射状に等分割された独立に変形し得る偶数個
の領域を有する円板,円環あるいは円筒状圧電素子と
し、その中心対称に配置されている領域同志が互いに逆
位相で励振するごとく非対称に励振したことを特徴とす
る超音波回転振動子。
2. The circular vibrator according to claim 1 is a disk, an annulus or a cylindrical piezoelectric element having an even number of independently radially deformable regions which are evenly divided. , An ultrasonic rotary oscillator characterized in that the centrally symmetric regions are excited asymmetrically so that they are excited in opposite phases.
JP62011373A 1987-01-22 1987-01-22 Ultrasonic rotary oscillator Expired - Lifetime JP2529233B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62011373A JP2529233B2 (en) 1987-01-22 1987-01-22 Ultrasonic rotary oscillator
US07/174,413 US4868446A (en) 1987-01-22 1988-03-28 Piezoelectric revolving resonator and ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62011373A JP2529233B2 (en) 1987-01-22 1987-01-22 Ultrasonic rotary oscillator

Publications (2)

Publication Number Publication Date
JPS63181676A JPS63181676A (en) 1988-07-26
JP2529233B2 true JP2529233B2 (en) 1996-08-28

Family

ID=11776209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62011373A Expired - Lifetime JP2529233B2 (en) 1987-01-22 1987-01-22 Ultrasonic rotary oscillator

Country Status (1)

Country Link
JP (1) JP2529233B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2614635B2 (en) * 1988-04-12 1997-05-28 日立マクセル株式会社 Electrostrictive rotor and single-phase ultrasonic motor
JPH0421371A (en) * 1990-05-15 1992-01-24 Canon Inc Oscillation wave motor
US5631517A (en) * 1994-05-23 1997-05-20 Hitachi, Ltd. Ultrasonic motor and driving for the ultrasonic motor
JP6702482B2 (en) * 2019-04-11 2020-06-03 セイコーエプソン株式会社 Piezoelectric driving device and driving method thereof, robot and driving method thereof
CN110333060A (en) * 2019-08-08 2019-10-15 中国船舶重工集团公司第七0三研究所 A kind of oscillation of rotary machine rotor wireless measuring system based on piezoelectric self-power supplied

Also Published As

Publication number Publication date
JPS63181676A (en) 1988-07-26

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