JP2511996B2 - Substrate transfer device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device that transfers substrates and the like.

2. Related Art A conventional example will be described below with reference to the drawings. Conventionally,
As shown in FIG. 2, guide rails 102 and 103 for holding the substrate 101 at right angles to the transfer direction A are fixed to the respective support brackets 104 and 105. The support bracket 104 is fixed to a base plate (not shown), and the support bracket 105
Is a plate with a guide groove fixed to the base plate
It is fastened to 106 with bolts (not shown) and moves along with the guide grooved plate in the direction B along with the guide rail 103 by changing the size of the substrate.

A cylinder 107 for transferring the substrate 101 in the A direction is fixed to a cylinder holding plate 108.
Is fastened with a bolt (not shown) to a guide grooved plate 109 fixed to the base plate (not shown), and moves in the C direction along the guide grooved plate by changing the size of the substrate.

Further, as shown in FIG. 3, guide rails 102 and 103 for holding the substrate 101 at right angles to the transfer direction A direction are fixed to the respective support brackets 104 and 105.
Is fixed to a base plate (not shown), and the support bracket 105 is fastened to the guide grooved plate 106 fixed to the base plate with bolts (not shown). Along with it, it moves in the B direction together with the guide rail 103.

A cylinder 107 for transferring the substrate 101 in the A direction is fixed to a cylinder holding plate 108.
Is fixed to the base plate (not shown).
When changing the substrate size, the substrate pushers 110 and 111 attached to the tip of the cylinder 107 are replaced. Therefore, the cylinder 107 maintains a fixed position.

However, in such a structure, the size of the substrate 101 is changed and the guide rail 103 holding the substrate 101 is manually moved. Regarding the position of the cylinder 107 for transferring the substrate 101 to another facility (not shown),
It is suitable to press the half part of the width of the substrate 101 for reliable transfer. Therefore, the position of the cylinder 107 must be changed manually. The same applies to replacement of the substrate pushers 110 and 111. It takes a long time to switch manually. In addition, a certain level of quality assurance (accuracy) cannot be obtained due to individual differences. There was such a problem.

Therefore, the present invention can automatically cope with the position change of the transfer device due to the change of the substrate size.

Means for Solving the Problems In order to solve the above problems, a substrate transfer apparatus according to the present invention comprises a holding means for supporting both ends of a substrate at right angles to the transfer direction, and a drive for moving the substrate supporting movable side. Means, driving means for moving the substrate in the transfer direction, driving means for holding the driving means and moving at a right angle to the substrate transfer direction, and driving for moving the driving means and the substrate supporting movable side The connecting means for connecting the means and the control device for moving and stopping the driving means are provided.

Operation The present invention can automatically change the position of the transfer device according to the change in the substrate size by the above-described configuration. There is no need to manually change the guide rail position, change the cylinder position, or replace the substrate pusher, and the switching work time can be shortened and consistent quality can be ensured.

Embodiment An embodiment of the present invention will be described below with reference to FIG.

A guide rail 2 for holding the substrate 1 at right angles to the transfer direction A
Is fixed to a base plate (not shown), and the guide rail 3 is incorporated in a support bracket 4 and a guide shaft 5 held by the guide rail 2. A feed screw 6 is installed between the guide shafts and is connected to the female screw 3a of the guide rail 3.

A cylinder 7 for transferring the substrate 1 in the A direction is fixed to a cylinder holding plate 8, and the cylinder holding plate 8 is incorporated in a guide shaft 10 held by the guide rail 2 and a support bracket 9. A feed screw 11 is installed in parallel with the guide shaft 10 and is connected to the female screw 8a of the cylinder holding plate 8.

A timing pulley 12 is attached to the tip of the feed screw 6.
However, a timing pulley 13 is installed at the tip of the feed screw 11, and the timing pulleys are connected by a timing belt 14. Further, a motor 15 is connected to the tip of the feed screw 6 and a controller 16 for controlling the motor 15 is installed.

The operation of the substrate transfer device configured as described above will be described below.

An operation signal is output from the controller 16 to the motor 15, the motor 15 rotates, and the timing pulley 12 and the feed screw 6 rotate. As a result, the guide rail 3 moves in the B direction. In addition, the timing belt 14 allows the motor 15
Is transmitted to the timing pulley 13 and the feed screw 11, and the cylinder holding plate 8 moves in the C direction. Further, a stop signal is output from the controller to the motor 15 to stop each of the above.

As described above, according to this embodiment, the position change of the transfer device associated with the change of the substrate size can be automatically handled. There is no need to manually change the guide rail position, change the cylinder position, or replace the substrate pusher, and the switching work time can be shortened and consistent quality can be ensured.

EFFECTS OF THE INVENTION As described above, according to the present invention, holding means for supporting both ends of a substrate at right angles to the transfer direction, drive means for moving the substrate support movable side, and drive means for moving the substrate in the transfer direction. And a means for holding the driving means and connecting the driving means for moving the substrate at a right angle to the substrate transfer direction, and providing a control device for moving and stopping the driving means, thereby changing the substrate size. It is possible to automatically change the position of the transfer device. There is no need to manually change the guide rail position, change the cylinder position, or replace the substrate pusher, and the switching work time can be shortened and consistent quality can be ensured.

[Brief description of drawings]

FIG. 1 is a plan view of a substrate transfer device according to an embodiment of the present invention, and FIGS. 2 and 3 are plan views of a conventional substrate transfer device. 1 ... Board, 6 ... Feed screw, 9 ... Feed screw, 12, 13
...... Timing pulley, 14 …… Timing belt, 15
...... Motor, 16 …… Control controller.

Claims (2)

(57) [Claims] 1. A pair of holding means for supporting both ends of a substrate at right angles to a transfer direction, a holding means for moving at least one of the supporting means, a driving means, and the substrate. Substrate driving means for moving in the transfer direction,
Driving means for holding the substrate driving means and moving it at right angles to the substrate transfer direction, connecting means for connecting the driving means to the holding means, driving means, and holding means for driving the holding means by a predetermined pitch depending on the width of the substrate. A substrate transfer device provided with a control device for moving or stopping the driving means or the driving means. 2. The substrate transfer device according to claim 1, wherein the holding means, the driving means, and the driving means are driven at the same time, and each pitch is 2: 1.