JP2510589Y2 - 圧電ポンプ - Google Patents

圧電ポンプ

Info

Publication number
JP2510589Y2
JP2510589Y2 JP7687490U JP7687490U JP2510589Y2 JP 2510589 Y2 JP2510589 Y2 JP 2510589Y2 JP 7687490 U JP7687490 U JP 7687490U JP 7687490 U JP7687490 U JP 7687490U JP 2510589 Y2 JP2510589 Y2 JP 2510589Y2
Authority
JP
Japan
Prior art keywords
piezoelectric
check valve
sheet
pump
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP7687490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0434478U (enExample
Inventor
進 相川
暎二 田原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Priority to JP7687490U priority Critical patent/JP2510589Y2/ja
Publication of JPH0434478U publication Critical patent/JPH0434478U/ja
Application granted granted Critical
Publication of JP2510589Y2 publication Critical patent/JP2510589Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP7687490U 1990-07-19 1990-07-19 圧電ポンプ Expired - Fee Related JP2510589Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7687490U JP2510589Y2 (ja) 1990-07-19 1990-07-19 圧電ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7687490U JP2510589Y2 (ja) 1990-07-19 1990-07-19 圧電ポンプ

Publications (2)

Publication Number Publication Date
JPH0434478U JPH0434478U (enExample) 1992-03-23
JP2510589Y2 true JP2510589Y2 (ja) 1996-09-11

Family

ID=31618735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7687490U Expired - Fee Related JP2510589Y2 (ja) 1990-07-19 1990-07-19 圧電ポンプ

Country Status (1)

Country Link
JP (1) JP2510589Y2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4501517B2 (ja) * 2004-04-21 2010-07-14 パナソニック電工株式会社 圧電ダイヤフラムポンプ
JP2006220056A (ja) * 2005-02-10 2006-08-24 Nec Tokin Corp 流体搬送装置
CN103906923A (zh) * 2011-09-27 2014-07-02 株式会社菊池制作所 微型隔膜泵
JP6424012B2 (ja) * 2014-04-11 2018-11-14 東京理化器械株式会社 ダイヤフラム真空ポンプ
CN109162902B (zh) * 2018-09-20 2023-12-15 长春工业大学 一种浮动式工字型阀压电泵

Also Published As

Publication number Publication date
JPH0434478U (enExample) 1992-03-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees