JP2509949Y2 - Vacuum furnace - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a vacuum furnace comprising a heating part and a transfer part.

[Conventional technology]

A multi-chamber type, in which the inside of the vacuum chamber is composed of a heating part and a transfer part, and a mechanism for transferring an object to be heated to the heating part is provided in the transfer part, and an object to be heated is transferred from another preparation room, A so-called in-line conventional vacuum furnace is shown in FIGS. 3 and 4. FIG. 4 is a sectional view taken along the line BB of FIG.
In the figure, the vacuum furnace is indicated by (25) as a whole, but the heating section (16) is provided inside the vacuum chamber (10) and the furnace wall (1
5) The upper wall section (15a) allows the transfer section ( 2
7 ) is separated. (3) is a heater panel for heating. The carrier frame (1) on which the work (2) to be heat-treated is loaded is carried into the heating section (16) from the adjoining preparation chamber ( 26 ) through the carrier frame carry-in door (14), and after the heat treatment, the carrier It is carried out to the post-treatment room ( 28 ) of the next room through the frame carry-out door (29). First, the transport mechanism transfers the rotational movement of the motor (7) outside the vacuum chamber (10) to the vacuum chamber (10) via the drive transmission chain (6), the drive shaft (17) and the drive wheel (21). Transfer to the chain with dock (12) in the transport section ( 27 ). (5) is the shaft seal, (2
2) is the driven wheel. By pushing each pin (13) attached to the pin-equipped transport plate (8) while each dock (12a) of the docked chain (12) is rotating in the direction of arrow a, the pin-equipped transport plate (8) is moved to the arrow b. Move forward in the direction. Accordingly, the hanger (1) connected to the pin-equipped carrier plate (8)
8) also advances in the direction of arrow b, and carries the carrier frame (1) suspended from the hanger (18). Prop (23)
The roller (19) moving on the rail (9) fixed by the shaft (20) is connected to the pin-equipped carrier plate (8) via the hanger (18), whereby the pin-equipped carrier plate (8) is provided. (8) is supported.

[Problems to be solved by the device]

As described above, the in-line vacuum furnace in which the chain (12) with a dock is used as the transfer mechanism has the following various problems.

1) The chain with dock (12) and the carrier plate with pin (8) are installed inside the vacuum chamber (10) in the carrier part ( 27 ) outside the heating part (16), but the heat insulation is not perfect. Therefore, it is affected by the heat from the heating section (16). Generally, the chain grows by about 3% even at room temperature, but it also grows due to the influence of heat. Therefore, a take-up mechanism for absorbing the elongation is required, and the structure becomes complicated. Also, if this take-up mechanism does not function completely, the chain will sag, which will result in poor conveyance.

2) When the chain (12) with dock hooks and pushes the pin (13), the pin (13) may not catch on the dock (12a), which may result in transport failure.

3) Since the distance between the dock (12a) and the dock (12a) of the docked chain (12) is 40 to 50mm, even if the docked chain (12) is stopped, the pin, that is, the carrier plate with pin (8). However, the stop position of the carrier frame (1) includes an error of 40 to 50 mm, resulting in poor accuracy.

4) When this vacuum furnace is used as an aluminum brazing furnace, for example, magnesium generated during brazing adheres to the docked chain (12), the pinned carrier plate (8), the pin (13), etc. Since it causes poor transportation, maintenance is required to remove magnesium. In this case, since maintenance cannot be performed unless the upper heater (3a) and the upper wall (15a) of the furnace are removed, it takes 5 to 6 hours and the maintainability is poor.

The present invention has been made in view of the above problems, and an object thereof is to provide a vacuum furnace having a simple structure, capable of reliably and accurately transporting a carrier frame, and easily maintained.

[Means for solving the problem]

For the above-mentioned purpose, the inside of the vacuum chamber is composed of a heating part and a transfer part, and a transfer means for transferring an object to be heated in the heating part is provided in the transfer part, and at least one for transferring the object to be transferred in and out. In a vacuum furnace provided with two airtight doors, the conveying means is provided with at least one drive gear having teeth on its outer periphery, and pins are provided in a straight line at the same intervals as the intervals between the teeth, and the pins are the same as the drive gear. An engaging carrier plate, and at least three rollers connected to the carrier plate via a rotary shaft and configured to move on a fixed rail;
The distance between the drive gear and another drive gear having the same structure as the drive gear provided in the adjoining chamber connected to the transport section or the airtight door is determined by the length of the pin provided on the transport plate. And a vacuum furnace characterized in that the object to be heated is transferred by the transfer plate.

[Action]

In the vacuum furnace configured as described above, it is possible to accurately stop the transfer means, for example, the carrier frame on which the object to be heated is placed, without causing a transfer failure.

〔Example〕

 Next, examples will be described with reference to the drawings.

FIG. 1 shows a sectional view of the vacuum furnace according to the present embodiment, and FIG. 2 shows a sectional view taken along the line AA of FIG. In both figures, the same parts as those in FIGS. 3 and 4 are designated by the same reference numerals.

The transfer mechanism will be described. First, the transfer part () of the vacuum chamber (10) is transferred via the drive transmission chain (6) and the drive shaft (17) to the rotational movement of the motor (7) outside the vacuum chamber (10). 27 ) Send to the drive gear, pinion (4a). (5)
Is a shaft seal. The rotational movement of the pinion (4a) in the direction of the arrow a is decelerated by the gear meshing with the pinion (4b) and turned into the rotational movement in the direction of the arrow b. By rotating the pinion (4b) gear by pushing the pin (13) of the pin-equipped carrier plate (8) provided with the pin (13) at the same interval as this gear, the rotary motion is converted into the linear motion, and the pin-equipped carrier plate (8)
Moves forward in the direction of arrow c. Along with this, the hanger (18) connected to the pin-equipped carrier plate (8) also advances in the direction of arrow c, and carries the carrier frame (1) suspended from the hanger (18). (4c) is a support frame that supports the pinion (4a) and the pinion (4b). Prop (23)
Four rollers (19) moving on rails (9) fixed by means of shafts (20) respectively
8) connected to. One end of the shaft (20) has a hanger (1
It is fixed to 8) and the other end is fitted in the center of the roller (19) and is rotatable. As a result, the hanger (18) is supported and at the same time moves with the movement of the pin-equipped carrier plate (8).

In this embodiment, as shown in FIG. 2, two sets of pinions (4a) and (4b), which are drive gears, are provided in the conveying section ( 27 ). They are indicated by I and II.

A large number of pins are evenly spaced over the entire length of the carrier plate with pin (8), and the length of the carrier plate with pin (8) is the distance between the pinion (4b) of part I and the pinion (4b ') of part II. Longer than. When opening the carrier frame loading door (14) and loading the carrier frame (1) into the heating section (16),
The pin-equipped transport plate (8) moving on the rail (9) of the preparation room ( 26 ) first reaches the pinion (4b) of section I, which pushes the pin (13) to transport it with pin. The plate (8) advances. The transport plate with pin (8) is the pinion (4
When it reaches b '), the pin (13) is also pushed by it and further advances, and the carrier frame (1) is transported to a desired position. Next, when opening the carrier frame carry-out door (29) and moving to the post-treatment chamber ( 28 ) of the next chamber, first, I
Pin (1) and pin II (4b) (4b ')
3) is pushed, but as the pin-equipped carrier plate (8) moves forward, it is disengaged from the piston (4b) of the I part and is pushed only by the pinion (4b ') of the II part. While the carrier plate with pin (8) does not come off from the pinion (4b ') in the II section, the tip reaches the pinion (4b ″) of the same structure provided in the III section in the post-treatment chamber ( 28 ), and When the pin (13) is pushed and comes off from the II part, the pinion (4
Driven only by b ″), the carrier frame (1) moves to the post-treatment chamber ( 28 ).

The pinion (4a) (4b) provided in the transfer section ( 27 ) may be one set.

The distance L between the rollers (19) attached to the pin-equipped transport plate (8) via the hanger (18) is equal to that of the vacuum chamber (1
End of rail (9) fixed in 0) and preparation room ( 26 )
Alternatively, it is longer than the distance 1 between the end of the rail (9) fixed in the post-treatment chamber ( 28 ). Therefore, when the transport plate (8) with pins moves forward and moves to another room, the rail (9)
Only one roller (19) separates between (9) and is securely supported by the other roller (19) of the pin-equipped transport plate (8), and will not be derailed. Although four rollers are used in this embodiment, at least three rollers are sufficient.

An airtight maintenance door (11) is provided on the pinion side of the vacuum chamber (10). The drive shaft (17) to which the pinion (4a) is connected is removable at the shaft seal (5) and the support portion (24) at the other end. When maintenance such as cleaning of the pinion part is required, open the maintenance door (11) and move the pinion (4) together with the drive shaft (17).
Since the pinion part composed of a), the pinion (4b), and the support frame (4c) can be collectively removed, the pinion part can be easily cleaned. Further, when the pinion portion is removed, there is no obstacle to cleaning the pin-equipped carrier plate (8), and the pin-equipped carrier plate (8) can be cleaned very easily. The time required to maintain the transportation means has been reduced to about 30 minutes, which is extremely short.

Further, during the transportation, since the pinion and the pin are securely meshed with each other, it does not occur due to poor transportation. In addition, the clearance at the meshing part is reduced to about 1/10 of that when using the chain with dock, so the stopping accuracy is improved. In addition, the combination of pinion and pin has a simple structure and the heating part (16)
Not greatly affected by heat from.

Although the embodiment of the present invention has been described above, the present invention is not limited to this, and various modifications can be made based on the technical idea of the present invention.

For example, although the vacuum furnace of this embodiment was used as a vacuum brazing furnace, it can also be used in other in-line type vacuum heat treatment furnaces and sputtering devices. It is also used in a batch type vacuum furnace equipped with only one loading / unloading door.

Further, in the embodiment, the transport mechanism of the pinion and the transport plate with the pin is provided in the upper part of the vacuum chamber, but they may be provided in the lower part of the vacuum chamber. Alternatively, although the transport unit and the heating unit are arranged vertically in the embodiment, they may be arranged horizontally.

 The number and size of pinions can be changed as needed.

Normally, a geared motor is used as the motor,
If smooth transport is required, it may be fitted with an inverter, or a variable speed motor may be used instead.

[Effect of device]

Since the present invention is configured as described above, it has the following effects, and particularly exhibits the effects in a multi-chamber type (in-line type) vacuum furnace.

That is, there is no conveyance failure of the carrier frame that conveys the object to be heated, and the stopping accuracy is improved.

Further, the maintenance can be easily performed in a short time, and moreover, the adverse effect of heat is small, so that the maintenance cycle can be lengthened. Therefore, the operating rate of the vacuum furnace is improved, and the running cost is reduced.

[Brief description of drawings]

1 is a sectional view of an embodiment of a vacuum furnace according to the present invention, FIG. 2 is a sectional view taken along the line AA of FIG. 1, FIG. 3 is a sectional view of a conventional vacuum furnace, and FIG. The drawing is a sectional view taken along the line BB of FIG. In the figure, (1) …… Carrier frame (4a) (4b) …… Pinion (8) …… Conveyor plate with pin (10) …… Vacuum chamber (11) …… Maintenance door (16) …… Heating Section (19) …… Roller ( 27 ) …… Transport section

Claims (2)

(57) [Scope of utility model registration request] 1. A vacuum chamber comprises a heating section and a transfer section, and a transfer means for transferring an object to be heated in the heating section is provided in the transfer section, and at least the object to be heated is carried in and out. In a vacuum furnace provided with one hermetic door, the conveying means is provided with at least one drive gear having teeth on its outer periphery, and pins are provided in a straight line at the same intervals as the teeth, and the pins are provided with the drive gear. A transport plate engaging with the transport plate, and at least three rollers connected to the transport plate via a rotary shaft and configured to move on a fixed rail,
The distance between the drive gear and another drive gear having the same structure as that of the drive gear provided in the adjoining chamber connected via the transport unit or the airtight door is determined by the length at which the pin of the transport plate is provided. A vacuum furnace characterized in that the object to be heated is transported by the transport plate, which is shorter than the above. 2. The vacuum furnace according to claim 1, wherein an opening / closing mechanism is provided on a wall surface of the vacuum chamber facing the driving gear, and the driving gear is detachable via the opening / closing mechanism.