JP2508898Y2 - 真空弁の開弁保持構造 - Google Patents

真空弁の開弁保持構造

Info

Publication number
JP2508898Y2
JP2508898Y2 JP40653790U JP40653790U JP2508898Y2 JP 2508898 Y2 JP2508898 Y2 JP 2508898Y2 JP 40653790 U JP40653790 U JP 40653790U JP 40653790 U JP40653790 U JP 40653790U JP 2508898 Y2 JP2508898 Y2 JP 2508898Y2
Authority
JP
Japan
Prior art keywords
pressure chamber
valve
vacuum
side pressure
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP40653790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0488581U (US06312121-20011106-C00033.png
Inventor
潤一 山中
Original Assignee
株式会社イナックス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社イナックス filed Critical 株式会社イナックス
Priority to JP40653790U priority Critical patent/JP2508898Y2/ja
Publication of JPH0488581U publication Critical patent/JPH0488581U/ja
Application granted granted Critical
Publication of JP2508898Y2 publication Critical patent/JP2508898Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Preventing Unauthorised Actuation Of Valves (AREA)
JP40653790U 1990-12-18 1990-12-18 真空弁の開弁保持構造 Expired - Lifetime JP2508898Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40653790U JP2508898Y2 (ja) 1990-12-18 1990-12-18 真空弁の開弁保持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40653790U JP2508898Y2 (ja) 1990-12-18 1990-12-18 真空弁の開弁保持構造

Publications (2)

Publication Number Publication Date
JPH0488581U JPH0488581U (US06312121-20011106-C00033.png) 1992-07-31
JP2508898Y2 true JP2508898Y2 (ja) 1996-08-28

Family

ID=31883740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40653790U Expired - Lifetime JP2508898Y2 (ja) 1990-12-18 1990-12-18 真空弁の開弁保持構造

Country Status (1)

Country Link
JP (1) JP2508898Y2 (US06312121-20011106-C00033.png)

Also Published As

Publication number Publication date
JPH0488581U (US06312121-20011106-C00033.png) 1992-07-31

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