JP2507905Y2 - 輻射導入加熱装置 - Google Patents

輻射導入加熱装置

Info

Publication number
JP2507905Y2
JP2507905Y2 JP1990000556U JP55690U JP2507905Y2 JP 2507905 Y2 JP2507905 Y2 JP 2507905Y2 JP 1990000556 U JP1990000556 U JP 1990000556U JP 55690 U JP55690 U JP 55690U JP 2507905 Y2 JP2507905 Y2 JP 2507905Y2
Authority
JP
Japan
Prior art keywords
light guide
guide member
vacuum
vacuum chamber
heating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990000556U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0392392U (enExample
Inventor
智義 遠藤
Original Assignee
株式会社サーモ理工
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社サーモ理工 filed Critical 株式会社サーモ理工
Priority to JP1990000556U priority Critical patent/JP2507905Y2/ja
Publication of JPH0392392U publication Critical patent/JPH0392392U/ja
Application granted granted Critical
Publication of JP2507905Y2 publication Critical patent/JP2507905Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)
  • Physical Vapour Deposition (AREA)
JP1990000556U 1990-01-10 1990-01-10 輻射導入加熱装置 Expired - Lifetime JP2507905Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990000556U JP2507905Y2 (ja) 1990-01-10 1990-01-10 輻射導入加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990000556U JP2507905Y2 (ja) 1990-01-10 1990-01-10 輻射導入加熱装置

Publications (2)

Publication Number Publication Date
JPH0392392U JPH0392392U (enExample) 1991-09-19
JP2507905Y2 true JP2507905Y2 (ja) 1996-08-21

Family

ID=31504498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990000556U Expired - Lifetime JP2507905Y2 (ja) 1990-01-10 1990-01-10 輻射導入加熱装置

Country Status (1)

Country Link
JP (1) JP2507905Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012043548A (ja) * 2010-08-13 2012-03-01 Thermo Riko:Kk 高効率赤外線導入加熱装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225572A (en) * 1975-08-22 1977-02-25 Hitachi Ltd Resin-seal type semiconductor device
JP2517218B2 (ja) * 1985-03-15 1996-07-24 株式会社サーモ理工 輻射加熱装置

Also Published As

Publication number Publication date
JPH0392392U (enExample) 1991-09-19

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