JP2507905Y2 - 輻射導入加熱装置 - Google Patents
輻射導入加熱装置Info
- Publication number
- JP2507905Y2 JP2507905Y2 JP1990000556U JP55690U JP2507905Y2 JP 2507905 Y2 JP2507905 Y2 JP 2507905Y2 JP 1990000556 U JP1990000556 U JP 1990000556U JP 55690 U JP55690 U JP 55690U JP 2507905 Y2 JP2507905 Y2 JP 2507905Y2
- Authority
- JP
- Japan
- Prior art keywords
- light guide
- guide member
- vacuum
- vacuum chamber
- heating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Control Of Resistance Heating (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990000556U JP2507905Y2 (ja) | 1990-01-10 | 1990-01-10 | 輻射導入加熱装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990000556U JP2507905Y2 (ja) | 1990-01-10 | 1990-01-10 | 輻射導入加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0392392U JPH0392392U (US06330241-20011211-M00004.png) | 1991-09-19 |
JP2507905Y2 true JP2507905Y2 (ja) | 1996-08-21 |
Family
ID=31504498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990000556U Expired - Lifetime JP2507905Y2 (ja) | 1990-01-10 | 1990-01-10 | 輻射導入加熱装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2507905Y2 (US06330241-20011211-M00004.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012043548A (ja) * | 2010-08-13 | 2012-03-01 | Thermo Riko:Kk | 高効率赤外線導入加熱装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5225572A (en) * | 1975-08-22 | 1977-02-25 | Hitachi Ltd | Resin-seal type semiconductor device |
JP2517218B2 (ja) * | 1985-03-15 | 1996-07-24 | 株式会社サーモ理工 | 輻射加熱装置 |
-
1990
- 1990-01-10 JP JP1990000556U patent/JP2507905Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0392392U (US06330241-20011211-M00004.png) | 1991-09-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |