JP2503599Y2 - 高周波４重極型線形加速器 - Google Patents

高周波４重極型線形加速器

Info

Publication number
JP2503599Y2
JP2503599Y2 JP1990105082U JP10508290U JP2503599Y2 JP 2503599 Y2 JP2503599 Y2 JP 2503599Y2 JP 1990105082 U JP1990105082 U JP 1990105082U JP 10508290 U JP10508290 U JP 10508290U JP 2503599 Y2 JP2503599 Y2 JP 2503599Y2
Authority
JP
Japan
Prior art keywords
cooling liquid
post
counter electrode
liquid passage
electrode pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990105082U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0461900U (enrdf_load_stackoverflow
Inventor
博 藤澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1990105082U priority Critical patent/JP2503599Y2/ja
Publication of JPH0461900U publication Critical patent/JPH0461900U/ja
Application granted granted Critical
Publication of JP2503599Y2 publication Critical patent/JP2503599Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1990105082U 1990-10-04 1990-10-04 高周波４重極型線形加速器 Expired - Fee Related JP2503599Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990105082U JP2503599Y2 (ja) 1990-10-04 1990-10-04 高周波４重極型線形加速器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990105082U JP2503599Y2 (ja) 1990-10-04 1990-10-04 高周波４重極型線形加速器

Publications (2)

Publication Number Publication Date
JPH0461900U JPH0461900U (enrdf_load_stackoverflow) 1992-05-27
JP2503599Y2 true JP2503599Y2 (ja) 1996-07-03

Family

ID=31850635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990105082U Expired - Fee Related JP2503599Y2 (ja) 1990-10-04 1990-10-04 高周波４重極型線形加速器

Country Status (1)

Country Link
JP (1) JP2503599Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084797A (enrdf_load_stackoverflow) * 1973-12-03 1975-07-08
JPH0728719Y2 (ja) * 1987-09-29 1995-06-28 株式会社島津製作所 高周波多重極線形加速器

Also Published As

Publication number Publication date
JPH0461900U (enrdf_load_stackoverflow) 1992-05-27

Similar Documents

Publication Publication Date Title
KR100295627B1 (ko) 이온주입기에서 이온비임을 형성하는 방법 및 장치
US6423976B1 (en) Ion implanter and a method of implanting ions
CN100552865C (zh) 离子注入装置
KR900008793B1 (ko) 마스크형 이온 비임 석판인쇄 시스템 및 방법
JP5351932B2 (ja) イオン注入器電極
JPH11505058A (ja) 閉鎖電子ドリフトによるプラズマ加速器
JPH10144499A (ja) 粒子加速器
US6422825B2 (en) Plasma vacuum pumping cell
US3259790A (en) Beam tube and magnetic circuit therefor
JP2503599Y2 (ja) 高周波４重極型線形加速器
JP2920993B2 (ja) 高周波４重極型線形加速器
JPH08335447A (ja) イオン源
JP3016285B2 (ja) 高周波４重極型線形加速器
EP1147691A1 (en) Plasma vacuum pump
JP4754684B2 (ja) イオン注入装置
RU2772169C1 (ru) Магниторезонансный плазменный двигатель
KR20040015708A (ko) 대전 입자 가속기용 전하 교환 장치
JP2009540529A (ja) イオン注入のための磁気解析装置および方法
US3330901A (en) Electron bombardment melting furnace
JPH0543500U (ja) 高周波４重極型線形加速器
JPH0716351U (ja) 被処理物保持装置
JP3047548B2 (ja) 高周波４重極型線形加速器
JP2000164398A (ja) タンデム加速装置
JPH1041095A (ja) プラズマ処理装置
JPH0773999A (ja) 高周波四重極装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees