JP2024544616A5 - - Google Patents

Info

Publication number
JP2024544616A5
JP2024544616A5 JP2024531442A JP2024531442A JP2024544616A5 JP 2024544616 A5 JP2024544616 A5 JP 2024544616A5 JP 2024531442 A JP2024531442 A JP 2024531442A JP 2024531442 A JP2024531442 A JP 2024531442A JP 2024544616 A5 JP2024544616 A5 JP 2024544616A5
Authority
JP
Japan
Prior art keywords
mfc2
station
mfcs
manifold
reaction gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024531442A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024544616A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2022/080198 external-priority patent/WO2023102325A1/en
Publication of JP2024544616A publication Critical patent/JP2024544616A/ja
Publication of JP2024544616A5 publication Critical patent/JP2024544616A5/ja
Pending legal-status Critical Current

Links

JP2024531442A 2021-12-01 2022-11-19 調節可能なフローバルブをもつドライプロセスツール Pending JP2024544616A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163264780P 2021-12-01 2021-12-01
US63/264,780 2021-12-01
PCT/US2022/080198 WO2023102325A1 (en) 2021-12-01 2022-11-19 Dry process tool with adjustable flow valve

Publications (2)

Publication Number Publication Date
JP2024544616A JP2024544616A (ja) 2024-12-03
JP2024544616A5 true JP2024544616A5 (https=) 2025-11-14

Family

ID=86613139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024531442A Pending JP2024544616A (ja) 2021-12-01 2022-11-19 調節可能なフローバルブをもつドライプロセスツール

Country Status (6)

Country Link
US (1) US20250003069A1 (https=)
JP (1) JP2024544616A (https=)
KR (1) KR20240108802A (https=)
CN (1) CN118339643A (https=)
TW (1) TW202340519A (https=)
WO (1) WO2023102325A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202518632A (zh) * 2023-07-12 2025-05-01 美商蘭姆研究公司 具有前驅物分配系統的多站處理工具
KR102952480B1 (ko) * 2023-07-24 2026-04-14 주식회사 유진테크 기판 처리 장치 및 기판 처리 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7169231B2 (en) * 2002-12-13 2007-01-30 Lam Research Corporation Gas distribution system with tuning gas
JP6789932B2 (ja) * 2014-10-17 2020-11-25 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ 調整可能ガスフロー制御のためのガス分離器を含むガス供給配送配置
KR20250005539A (ko) * 2015-08-17 2025-01-09 아이커 시스템즈, 인크. 유체 제어 시스템
US20220228263A1 (en) * 2019-06-07 2022-07-21 Lam Research Corporation Independently adjustable flowpath conductance in multi-station semiconductor processing
US11869754B2 (en) * 2019-09-06 2024-01-09 Applied Materials, Inc. Dynamic pressure control for processing chambers implementing real-time learning

Similar Documents

Publication Publication Date Title
JP2024544616A5 (https=)
JP2024026218A5 (https=)
ATE313705T1 (de) Baugruppe bestehend aus abgas-wärmetauscher und bypass
CN102455139A (zh) 一种带真空绝热的双股流低温螺旋缠绕管式换热器
CN103605837B (zh) 多热源环状管网可及性分析判定方法及其改善方法
JP2020533164A5 (https=)
TWD208036S (zh) 摩托車排氣管
CN107965380A (zh) 一种分腔分流式排气管总成以及发动机
ZA201906993B (en) "oxygenator of organic fluids"
CN111788730A (zh) 燃料电池及其电池单元和电堆结构体
SE7904402L (sv) Avgasrenare
CN212179653U (zh) 一种烟气余热回收利用装置
JP2024515418A5 (https=)
RU2004111778A (ru) Смеситель двухконтурного турбореактивного двигателя (трдд)
US1426352A (en) Muffler
JP2021110030A5 (https=)
Fernández-Bretón et al. Ends of non-metrizable manifolds: a generalized bagpipe theorem
JP1766685S (ja) 自転車用ヘルメット
RU120719U1 (ru) Коллектор подвода компонентов топлива в каналы регенеративного охлаждения камеры жидкостного-ракетного двигателя
JP2022039581A5 (https=)
WO2008156087A1 (ja) 排ガス浄化用触媒
CN206330437U (zh) 一种用于辊道炉的气氛置换室
CN104006386A (zh) 非预混式中心供风多管气体补燃器
CN222702638U (zh) 多级密封高压旋转阀
JP2025539145A5 (https=)