JP2024509238A - Mask plate and mask device - Google Patents

Abstract

Embodiments of the present application provide a mask plate for depositing a substrate to be deposited, the mask plate includes a panel region, the panel region includes a deposition portion and a non-deposition portion, and at least some of the non-deposition portion is located on one side of the vapor deposition section in the first direction, the non-evaporation section includes a first section and at least one second section, and the first section and the vapor deposition section are adjacent to each other. A non-evaporation area is formed surrounded by a boundary line, and the at least one second section is located within the non-evaporation area, and the boundaries of the vapor deposition part, the first section, and the second section are adjacent to each other. The mass-space ratio of the two is different, and the mass-space ratio is the ratio of the mass of each member itself to the total volume of space it occupies. Due to the difference in mass space ratio between the first section and the vapor deposition section, sudden material change boundaries are also formed between the first section and the vapor deposition section, and these sudden material change boundaries improve the deformation resistance of the mask plate. By doing so, it is possible to improve the problem of poor vapor deposition due to the inability of effective contact between the mask plate and the substrate to be vaporized during product vapor deposition. [Selection diagram] Figure 3

Description

This application claims priority to China Patent Application No. 202111434210.8 entitled "Mask Plate" filed on November 29, 2021, the entire content of which is incorporated herein by reference. It will be done.

TECHNICAL FIELD The present application relates to the technical field of manufacturing display devices, and in particular to mask plates and mask devices.

With the development of display technology, more and more display panels and display devices are being applied in people's daily life and work. To improve the user experience, conventional display panel structures typically integrate sensor modules, such as cameras, infrared sensors, and the like.

Currently, in order to meet a relatively high screen occupancy rate, a transparent perforated area is usually provided in the middle area of one end of the display panel, and a sensor module is provided within the perforated area. In the current state of display panel manufacturing, a metal mask plate is usually used to deposit organic light emitting materials. Due to the change in the shape of the display panel, the complexity of the mask plate design for some special forms of products gradually increases, and the mask plate is very easy to deform and wrinkle, and when the product is deposited, the mask plate and the deposited object are Effective contact with the substrate is not possible, resulting in a phenomenon of poor deposition.

Embodiments of the present application provide a mask plate and a mask apparatus aimed at improving deposition yield.

An embodiment of the first aspect of the present application provides a mask plate for depositing a substrate to be deposited, the mask plate including a panel region, the panel region including a deposited portion and a non-deposited portion, and at least one The non-vapor deposited part of the part is located on one side of the deposited part in the first direction, the non-deposited part includes a first section and at least one second section, and the non-deposited part includes the first section and the deposited part. A non-evaporation area is formed by surrounding the adjacent boundary lines, and at least one second section is located within the non-evaporation area, and the boundary between the vapor deposition part, the first section, and the second section is formed. The mass-space ratio of two adjacent members is different, and the mass-space ratio is the ratio of the mass of each member itself to the total volume of the space it occupies.

According to the embodiment of the first aspect of the present application, any two of the vapor deposition section, the first section, and the second section whose boundaries are adjacent to each other have different mass space ratios, and the first section and the vapor deposition section A first boundary line is formed at a location adjacent to the boundary between The extending direction and the first direction are parallel, or the included angle between the two forms an acute angle.

According to any of the embodiments of the first aspect of the present application, the second boundary line is formed adjacent to the boundary between the first section and the second section, and at least part of the second boundary The line extends in a straight line or a curve, and at least a part of the second boundary line extends in the extending direction or the tangent line thereof extends, and at least a part of the first boundary line extends in the extending direction or the tangent line thereof extends in the extending direction. or the extending direction of at least some of the second boundary lines or the extending direction of the tangent lines thereof and the extending direction of at least some of the first boundary lines or the extending direction of the tangent lines thereof. The included angle with the extending direction is an acute angle.

According to any of the above embodiments of the first aspect of the present application, the first boundary line further includes a second sudden change line extending in a straight line or a curve, and the second sudden change line extends in the extending direction or The extending direction of the tangent line is perpendicular to the first direction, the second boundary line includes a second sub-line adjacent to the second abrupt line, and the second sub-line is a straight line or a curved line. and the extending direction of the second sub-line or the extending direction of the tangent line thereof and the extending direction of the second sudden change line or the tangent line of the second sudden change line are parallel to each other, or The angle between the extending direction of the second sub-line or the extending direction of the tangent thereof and the extending direction of the second sudden change line or the tangent to the second sudden change line is an acute angle.

According to any of the above embodiments of the first aspect of the present application, the second sub-line comprises a plurality of short lines distributed at intervals.

According to any of the above embodiments of the first aspect of the present application, the second boundary line includes a first sub-line adjacent to the first sudden change line, and the first sub-line is a straight line or a curved line. and the extending direction of the first sub-line or the extending direction of the tangent thereof and the extending direction of the first sudden change line or the tangent to the first sudden change line are parallel to each other, or The angle between the extending direction of the first sub-line or the extending direction of the tangent thereof and the extending direction of the first sudden change line or the tangent to the first sudden change line is an acute angle.

According to any of the above embodiments of the first aspect of the present application, the at least one second section includes a plurality of second sections, the plurality of second sections being spaced apart within the non-deposited region. It is widely distributed.

According to any of the above embodiments of the first aspect of the present application, the plurality of second sections are distributed symmetrically with respect to a center line that extends along the first direction and bisects the deposition area. .

According to any of the above embodiments of the first aspect of the present application, the second section itself is provided axially symmetrically with respect to the axis extending along the first direction.

According to any of the above embodiments of the first aspect of the present application, the adjacent boundary lines of two adjacent second sections are provided parallel to each other, or the included angles form an acute angle.

According to any of the above embodiments of the first aspect of the present application, the second section includes a plurality of openings, the openings are provided through the second section along the thickness direction of the mask plate, Alternatively, the opening is formed by recessing the surface of the second section.

The present application further provides a mask device including a frame and a mask plate according to any of the embodiments of the first aspect provided on the frame.

In a mask plate according to an embodiment of the present application, the mask plate includes a panel area for depositing a complete display panel. The panel area includes a vapor deposition part for vapor depositing the normal display area of the display panel and a non-evaporation part for vapor depositing the perforation area in the display panel. The non-evaporated portion includes a first section and a second section, at least one second section is located within a non-evaporated region surrounded by the first section, and the first section The first section and the second section have different mass-space ratios such that an abrupt material transition boundary can be formed between the first section and the second section. Due to the difference in the mass-space ratio between the first section and the vapor deposition section, it is possible to form an abrupt material change boundary between the first section and the vapor deposition section, and these sudden material change boundaries allow the mask plate to Deformation resistance can be improved. In addition, the force applied to different positions of the mask plate is made more uniform, wrinkles are less likely to occur, and the problem of poor deposition due to the inability of effective contact between the mask plate and the substrate to be deposited during product deposition can be improved. .

Other features, objects and advantages of the present application will become apparent from the following detailed description of non-limiting embodiments taken in conjunction with the drawings. Here, the same or similar symbols indicate the same or similar features.

FIG. 2 is a schematic structural diagram of a display panel. FIG. 2 is a structural schematic diagram of a mask plate according to an example of the first aspect of the present application. FIG. 3 is a partially enlarged structural schematic diagram of location I in FIG. 2; FIG. 3 is a partially enlarged structural schematic diagram of location I in FIG. 2 according to another embodiment of the first aspect of the present application. FIG. 3 is a partially enlarged structural schematic diagram of location I in FIG. 2 according to still another embodiment of the first aspect of the present application. FIG. 2 is a schematic structural diagram of a mask device according to an example of a second aspect of the present application.

10 Mask plate 20 Frame 30 Display panel 31 Display area 32 Non-display area 100 Vapor deposition part 200 Non-evaporation part 210 First section 220 Second section 211 Opening 300 First boundary line 310 First abrupt line 320 Second Sudden change line 400 Second boundary line 410 First sub-line 420 Second sub-line 421 Short line MA Panel area P Center line

Features and exemplary embodiments of aspects of the present application are described in detail below. In the detailed description that follows, many specific details are put forward in order to provide a comprehensive understanding of the present application. However, as will be apparent to those skilled in the art, the present application may be practiced without the need for some of these specific details. The following description of the examples is provided merely to illustrate the present application and to provide a better understanding of the present application. In the drawings and the following description, at least some well-known structures and techniques are not shown to avoid unnecessary obscurity in this application, and dimensions of some structures are shown for clarity. May be exaggerated. Additionally, the features, structures, or characteristics described below may be combined in any suitable manner in one or more embodiments.

FIG. 1 is a schematic structural diagram of the display panel 30. The display panel 30 includes a display area 31 and a non-display area 32. The non-display area 32 may be, for example, a hole punching area, and the non-display area 32 is used for arranging parts such as a camera and an earpiece. used for.

In the process of vapor depositing and forming the display panel 30 using a mask plate, it is usually necessary to provide a vapor deposition area and a non-evaporation area within the panel area MA of the mask plate for vapor depositing the display panel 30. . The non-evaporation area usually has a shielding plate structure, and when the mask plate is pulled, it will deform and wrinkle due to the difference in the force received between the evaporation area and the non-evaporation area, and the mask plate and the substrate to be evaporated will be separated when the product is evaporated. and cannot be effectively contacted, resulting in the phenomenon of poor evaporation.

This application is made to solve the above technical problem. In order to better understand the present application, mask plates and mask devices according to embodiments of the present application will be described in detail below with reference to FIGS. 2 to 5.

Referring to FIGS. 2 and 3, FIG. 2 is a structural schematic diagram of a mask plate 10 according to an embodiment of the first aspect of the present application. FIG. 3 is a partially enlarged schematic diagram of the structure of location I in FIG.

As shown in FIGS. 2 and 3, the mask plate 10 according to the embodiment of the present application is used to deposit a substrate to be deposited, and the mask plate 10 includes a panel area MA. This panel area MA includes a vapor deposition section 100 and a non-evaporation section 200 provided in the vapor deposition section 100. At least a part of the non-evaporation part 200 is provided on one side of the vapor deposition part 100 in the first direction, that is, at least a part of the non-evaporation part 200 is provided on one side of the vapor deposition part 100 in the first direction. To position. The first direction may be, for example, the vertical direction shown in FIG. 1 or the horizontal direction shown in FIGS. 2 and 3. A part of the non-evaporation part 200, a main part of the non-evaporation part 200, or the whole non-evaporation part 200 may be located on one side of the non-evaporation part 100 in the vertical direction in FIG. A part, a main part of the non-evaporation part 200, or the entire non-evaporation part 200 may be located on one side of the deposition part 100 in the lateral direction in FIGS. 2 and 3.

The non-evaporation region 200 includes a first section 210 and a second section 220, and a non-evaporation region is formed by being surrounded by the adjacent border between the first section 210 and the deposition region 100, and includes at least one A second section 220 is located within the non-deposited region. The vapor deposition unit 100, the first section 210, and the second section 220 include at least one pair of two sections that have adjacent boundaries and different mass-space ratios. In other words, at least one set of elements of the deposition unit 100, the first section 210, and the second section 220 is provided. For example, the vapor deposition section 100 and the first section 210 may be provided, and the vapor deposition section 100 and the first section 210 are adjacent to each other and have different mass/space ratios. Alternatively, it may include at least one set of elements, such as a first section 210 and a second section 220, the first section 210 and the second section 220 being adjacent and having a mass-space ratio. are different.

Preferably, in the vapor deposition section 100, the first section 210, and the second section 220, any two adjacent boundaries have different mass-space ratios. That is, the vapor deposition section 100 and the first section 210 are adjacent to each other and have different mass/space ratios, and the first section 210 and the second section 220 are adjacent to each other and have different mass/space ratios. The mass-to-space ratio is the ratio of the mass of each member to the total volume of space it occupies. The total volume of the occupied space includes the volume of the real part and the volume of the hollow part provided in the real part.

Panel area MA is an area on mask plate 10 for forming a single display panel 30 by vapor deposition. The vapor deposition section 100 is for forming the display area 31 of the display panel 30 by vapor deposition, and the non-evaporation area is for forming the non-display area 32 of the display panel 30. Only one panel area MA may be provided on the mask plate 10, or a plurality of panel areas MA may be provided on the mask plate 10. For example, the plurality of panel areas MA may be arranged in a matrix on the mask plate 10. It is distributed in

The difference in mass space ratio between any two adjacent boundaries among the vapor deposition section 100, the first section 210, and the second section 220 means that the boundaries between the vapor deposition section 100 and the first section 210 are adjacent to each other. In this case, if the mass space ratio of the vapor deposition part 100 and the first section 210 is different and the boundaries of the first section 210 and the second section 220 are adjacent to each other, the first section 210 and the second section 220 are different from each other. This means that the mass-to-space ratios of the two are different. The vapor deposition section 100 is used to form the display area 31 of the display panel 30 by vapor deposition. For example, when the mask plate 10 is a precision mask plate, the vapor deposition section 100 has a plurality of vapor deposition openings (not shown). However, sub-pixels of the display panel 30 can be formed by the vapor deposition openings.

The mass-to-space ratio of the vapor deposition section 100 is the total mass of the vapor deposition section 100 divided by the total volume of the space occupied by the outer shell of the vapor deposition section 100. For example, when the vapor deposition section 100 is provided with a vapor deposition opening, the total dimension of the space occupied by the outer shell of the vapor deposition section 100 includes the volume of the space occupied by the vapor deposition opening in the vapor deposition section 100.

Similarly, the mass-to-space ratio of the first section 210 is the total mass of the first section 210 divided by the total volume of space occupied by the contour of the first section 210. The mass-to-space ratio of the second section 220 is the total mass of the second section 220 divided by the total volume of space occupied by the contour of the second section 220.

In the mask plate 10 according to the embodiment of the present application, the mask plate 10 includes a panel area MA for depositing a complete display panel 30. Panel area MA includes a vapor-deposited part 100 and a non-deposited part 200, the vapor-deposited part 100 is used to vapor-deposit the normal display area 31 of the display panel 30, and the non-deposited part 200 is used to deposit the hole-opening area in the display panel 30. Used for vapor deposition. The non-evaporated portion 200 includes a first section 210 and a second section 220, and at least one second section 220 is located within a non-evaporated region surrounded by the first section 210. , the different mass-space ratios of the first section 210 and the second section 220 create an abrupt material boundary between the first section 210 and the second section 220. Due to the difference in mass-space ratio between the first section 210 and the vapor deposition section 100, sudden material change boundaries are also formed between the first section 210 and the vapor deposition section 100, and these sudden material change boundaries are similar to those of the mask plate 10. It is possible to improve the deformation resistance of the mask plate 10, and to make the force applied to different positions of the mask plate 10 more even, so that wrinkles are less likely to occur, and the mask plate 10 and the substrate to be evaporated can effectively contact each other during product deposition. It is possible to improve the problem of poor evaporation due to failure.

Preferably, the material of the vapor deposition section 100, the first section 210, and the second section 220 may be the same, and the mass space ratio of the vapor deposition section 100 can be increased by providing a vapor deposition opening, a groove, etc. in the vapor deposition section 100. Alternatively, the mass space ratio of the second section 220 may be reduced by providing a through hole or a groove in the second section 220.

Referring to FIGS. 3 to 5, FIG. 4 is a partially enlarged structural schematic diagram of location I in FIG. 2 according to another embodiment of the first aspect of the present application. FIG. 5 is a partially enlarged structural schematic diagram of location I in FIG. 2, according to yet another embodiment of the first aspect of the present application.

In some preferred embodiments, a first boundary line 300 is formed adjacent to the boundary between the first section 210 and the vapor deposition section 100, and the first boundary line 300 is a first boundary line extending in a straight line or a curved line. 1, and the extending direction of the first sudden change line 310 or the extending direction of its tangent line is parallel to the first direction, or the angle between the two forms an acute angle. For example, the included angle between the extending direction of the first sudden change line 310 or the extending direction of its tangent line and the first direction may be an acute angle of less than 45 degrees. The included angle between the extending direction or the extending direction of a tangential line thereof and the first direction is an acute angle of less than 30 degrees, and preferably 0 degrees. The smaller the included angle, the higher the stress dispersion effect and the better the deformation resistance.

Preferably, still referring to FIG. 4, when the first sudden change line 310 is a straight line, the included angle between the extending direction of the first sudden change line 310 and the first direction is an acute angle. In another embodiment, when the first sudden change line 310 is a straight line, the extending direction of the first sudden change line 310 and the first direction may be parallel to each other. FIG. 4 illustrates an example in which the first sudden change line 310 is a straight line, but in other embodiments, the first sudden change line 310 may be a curved line.

When the first sudden change line 310 is a curve, the angle between the extending direction of the tangent of the first sudden change line 310 and the first direction is an acute angle. Alternatively, with continued reference to FIG. 5, when the first sudden change line 310 is a curve, the extending direction of the tangent to the first sudden change line 310 is parallel to the first direction.

At least a portion of the non-evaporation part 100 is provided on one side of the vapor deposition part 200 in the first direction. Further, the extending direction of the first sudden change line 310 or the extending direction of its tangent line is parallel to the first direction, or the included angle thereof is an acute angle. When the mask plate 10 is pulled along the first direction, that is, when the pulling direction is the first direction, the non-deposited part 100 and the deposited part 200 tend to separate along the pulling direction. . Since the included angle between the first sudden change line 310 and the first direction is small, installing the first sudden change line 310 in this manner reduces the stress strain experienced thereon, and the mask plate 10 The deformation resistance in the first direction is improved, and the mask plate 10 is less likely to wrinkle.

In some preferred embodiments, with continued reference to FIGS. 3 and 4, a second border 400 is formed adjacent the border between the first section 210 and the second section 220, and includes at least a portion of the border. The second boundary line 400 extends in a straight line or a curve, and the extending direction of at least a part of the second boundary line 400 or the extending direction of a tangent thereof and the extending direction of at least a part of the first boundary line 300 The existing direction or the extending direction of the tangential line thereof are parallel to each other. or the included angle between the extending direction of at least some of the second boundary lines 400 or the extending direction of their tangent lines and the extending direction of at least some of the first boundary lines 300 or the extending direction of their tangent lines is an acute angle. It is. For example, the angle between the extending direction of at least some of the second boundary lines 400 or the extending direction of their tangent lines and the extending direction of at least some of the first boundary lines 300 or the extending direction of their tangent lines is , may be an acute angle of less than 45 degrees. For example, the angle between the extending direction of at least some of the second boundary lines 400 or the extending direction of their tangent lines and the extending direction of at least some of the first boundary lines 300 or the extending direction of their tangent lines is , an acute angle of less than 30 degrees. The smaller the included angle, the better the stress dispersion effect and the better the deformation resistance. The included angle between the extending direction of at least some of the second boundary lines 400 or the extending direction of their tangent lines and the extending direction of at least some of the first boundary lines 300 or the extending direction of their tangent lines is 0 degrees. In other words, the extending direction of at least some of the second boundary lines 400 or the extending direction of their tangent lines and the extending direction of at least some of the first boundary lines 300 or the extending direction of their tangent lines are mutually Parallel is the best implementation.

When both the first boundary line 300 and the second boundary line 400 are straight lines, the extending direction of at least some of the second boundary lines 400 is the same as the extension direction of at least some of the first boundary lines 300. The angle between the extending direction of at least some of the second boundary lines 400 and the extending direction of at least some of the first boundary lines 300 is an acute angle. When some of the first border lines 300 and some of the second border lines 400 are parallel to each other, the second border line of the part is obtained from a different position of the first border line 300 of the part. The distances to the 400 different locations are equal.

When both the first boundary line 300 and the second boundary line 400 are curved lines, the extending direction of the tangent line of at least some of the second boundary lines 400 is the same as that of at least some of the first boundary lines 300. It is parallel to the extending direction of the tangent line, or the included angle between the extending direction of the tangent line of at least some of the second boundary lines 400 and the extending direction of the tangent line of at least some of the first boundary lines 300 is an acute angle. It is. When the extending direction of the tangent line of some of the first boundary lines 300 and the extending direction of the tangent line of some of the second boundary lines 400 are parallel to each other, the extending direction of the tangent line of some of the first boundary lines 300 is parallel to each other. The distances from different positions to different positions of the second boundary line 400 of the part are equal.

In these preferred embodiments, when the mask plate 10 is pulled along the first direction, at least some of the second boundaries 40 can share the tension experienced by the first boundaries 30. Therefore, the deformation resistance of the mask plate 10 in the first direction is improved, and wrinkles in the mask plate 10 are further less likely to occur.

Continuing to refer to FIGS. 3 and 4, in some preferred embodiments, the first boundary line 300 further includes a second break line 320 extending in a straight line or a curve; The extending direction or the tangential direction thereof is perpendicular to the first direction. The second boundary line 400 further includes a second sub-line 420 adjacent to the second abrupt change line 320, and the second sub-line 420 extends in a straight line or a curve, and the second sub-line 420 The extending direction or the extending direction of the tangent line thereof and the extending direction of the second sudden change line 320 or the tangent line of the second sudden change line 320 are parallel to each other, or the extension direction of the second sub-line 420 The included angle between the direction or the extending direction of the tangent thereof and the second abrupt change line 320 or the extending direction of the tangent of the second sudden change line 320 is an acute angle.

When the second sudden change line 320 and the second sub-line 420 are both straight lines, the extending direction of the second sub-line 420 is parallel to the extending direction of the second sudden change line 320, or The angle between the extending direction of the second sub-line 420 and the extending direction of the second sudden change line 320 is an acute angle.

When both the second sudden change line 320 and the second sub-line 420 are curved lines, the extending direction of the tangent to the second sub-line 420 is parallel to the extending direction of the tangent to the second sudden change line 320. Or, the angle between the extending direction of the tangent of the second sub-line 420 and the extending direction of the tangent of the second sudden change line 320 is an acute angle.

In these preferred embodiments, the second sub-line 420 can share the force experienced by the second abrupt line 320, further improving the problem of deformation/wrinkling of the mask plate 10.

Preferably, the second sub-line 420 includes a plurality of short lines 421 distributed at intervals from each other. The situation where stress is concentrated on the same second sub-line 420 can be dispersed, and the problem of deformation/wrinkling of the mask plate 10 can be further improved.

There are various installation schemes in which the second sub-lines 420 include a plurality of spaced short lines 421, e.g., a plurality of second sections 220 are spaced apart in the non-deposited area and a second Section 220 includes edges to form short lines 421 , and the plurality of spaced edges can form second sub-lines 420 that include a plurality of short lines 421 .

With continued reference to FIGS. 3-5, in some preferred embodiments, the second boundary line 400 includes a first sub-line 410 adjacent to the first break line 310; extends in a straight line or a curve, and the extending direction of the first sub-line 410 or the extending direction of its tangent line and the extending direction of the first sudden change line 310 or the tangent line of the first sudden change line 310 are , are parallel to each other, or the included angle between the extending direction of the first sub-line 410 or the extending direction of the tangent line thereof and the extending direction of the first sudden change line 310 or the tangent line of the first sudden change line 310 is , is an acute angle. For example, the included angle between the extending direction of the first sub-line 410 or the extending direction of its tangent and the extending direction of the first sudden change line 310 or the tangent to the first sudden change line 310 is an acute angle of less than 45 degrees. It may be. For example, the included angle between the extending direction of the first sub-line 410 or the extending direction of its tangent and the extending direction of the first sudden change line 310 or the tangent to the first sudden change line 310 is an acute angle of less than 30 degrees. It is. The smaller the included angle, the better the stress dispersion effect and the better the deformation resistance. The included angle between the extending direction of the first sub-line 410 or the extending direction of its tangent and the extending direction of the first sudden change line 310 or the tangent to the first sudden change line 310 is 0 degrees, that is, the first In an optimal embodiment, the extending direction of the first sub-line 410 or the extending direction of the tangential line thereof and the extending direction of the first sudden change line 310 or the tangential line of the first sudden change line 310 are parallel to each other. It is.

As shown in FIGS. 3 and 4, when the first sudden change line 310 and the first sub-line 410 are both straight lines, the extending direction of the first sub-line 410 is the same as that of the first sudden change line 310. parallel to the extending direction. Alternatively, in another embodiment, the angle between the extending direction of the first sub-line 410 and the extending direction of the first abrupt change line 310 is an acute angle.

As shown in FIG. 5, when both the first sudden change line 310 and the first sub-line 410 are curved lines, the extending direction of the tangent to the first sub-line 410 is the tangent to the first sudden change line 310. parallel to the direction of extension. Alternatively, in another embodiment, the angle between the extending direction of the tangent of the first sub-line 410 and the extending direction of the tangent of the first sudden change line 310 is an acute angle.

In these preferred embodiments, the first sub-line 410 can share the force experienced by the first abrupt line 310, further improving the problem of deformation/wrinkling of the mask plate 10.

In some preferred embodiments, with continued reference to FIGS. 3 and 4, the at least one second section 220 includes a plurality of second sections 220, i.e., the second section 220 has a plurality of , a plurality of second sections 220 are spaced apart within the non-deposited region.

In these preferred embodiments, by providing the plurality of second sections 220, on the one hand, the plurality of materials forms a break line between the plurality of second sections 220 and the first section 210; Furthermore, deformation/wrinkling of the mask plate 10 can be improved. On the other hand, a plurality of second sections 220 can be distributed at intervals within the non-deposited region to improve the forces experienced by the non-deposited region when the mask plate 10 is pulled.

In some preferred embodiments, with continued reference to FIGS. 3 and 4, the mask plate 10 includes a centerline P that extends along a first direction and bisects the deposition region 100, and includes a plurality of second The sections 220 are distributed symmetrically about the center line P so that the structural strength of different regions of the mask plate 10 is matched. When the mask plate 10 is pulled along the first direction, the forces received by the mask plate 10 are more balanced, and the mask plate 10 is prevented from being deformed and wrinkled due to the accumulation of stress due to unbalanced forces. . In FIGS. 3 and 4, the position of the center line P is indicated by a chain line, and the chain line does not limit the structure of the mask plate 10 according to the embodiment of the present application.

In some preferred embodiments, with continued reference to FIGS. 3 and 4, the axis of the second section 220 itself extending along the first direction is axially symmetrical. When the mask plate 10 is pulled along the first direction, the forces received by the mask plate 10 are more balanced, and the mask plate 10 is prevented from deforming into wrinkles due to stress accumulation due to force imbalance.

In some preferred embodiments, when the number of second sections 220 is plural, the included angles of adjacent boundary lines of two adjacent second sections 220 are acute angles, e.g. Adjacent boundaries of the sections 220 may be parallel to each other. Adjacent boundary lines of two adjacent second sections 220 are two boundary lines where two adjacent second sections 220 are close to each other, for example, the first second section 220 in FIG. and the upper boundary line of the second section 220. The adjacent boundaries of the two adjacent second sections 220 are installed parallel to each other, thereby balancing the forces received by the two boundary lines, improving the deformation resistance of the mask plate 10, and further improving the mask plate 10. 10 deformation/wrinkle problems can be improved.

In some preferred embodiments, as shown in FIG. 4, second section 220 includes a plurality of apertures 211 therethrough. The openings 211 reduce the mass-to-space ratio of the second section 220, thereby creating an abrupt material boundary between the second section 220 and the first section 10, and further reducing the deformation resistance of the mask plate 10. This makes it possible to further improve wrinkles on the mask plate 10. The shape of the opening 211 is various, and the opening 211 may be a circular hole, an elliptical hole, a polygonal hole, a combination thereof, or the like.

Preferably, the opening 211 is installed in various ways, for example, the opening 211 is installed through the second section 220 along the thickness direction of the mask plate, or the opening 211 is installed on the surface of the second section 220. is formed in a concave manner.

Further, in these preferred embodiments, the vapor deposition section 100 has a vapor deposition opening in order to form the display area 31 of the display panel 30 by vapor deposition, and the mass space ratio of the vapor deposition section 100 is reduced. An abrupt boundary of material can be formed between the vapor deposition part 100 and the first section 210 without performing a patterning process on the section 210 of the first section 210 . After the opening 211 is provided in the second section 220, an abrupt transition boundary of material can be created between the first section 210 and the second section 220 without performing any patterning process on the first section 210. can be formed. Therefore, two adjacent ones of the vapor deposition section 100, the first section 210, and the second section 220, for example, two adjacent ones of the vapor deposition section 100, the first section 210, and the second section 220. The mass space ratio between them is different, and the manufacturing method is simple and convenient.

Preferably, with continued reference to FIGS. 3 and 4, the first section 210 and the second section 220 are both polygonal so that a number of the first boundary lines 300 and the second boundary lines 400 are separated from each other. Can be installed in parallel. The shapes of the first section 210 and the second section 220 may be the same or different, for example, the second section 220 may be triangular and the first section 210 may be square. The first section 210 and the second section 220 may both have a polygonal shape, so that the first section 210 and the second section 220 both have a linear outer edge line, More first boundary lines 300 and second boundary lines 400 may be installed parallel to each other.

In another preferred embodiment, the first section 210 and the second section 220 both have arcuate sides, so that many of the first boundary lines 300 and second boundary lines 400 are parallel to each other. It can be done.

Preferably, with continued reference to FIGS. 3 and 4, the shape of the non-deposited region is trapezoidal, the shape of the second sections 220 is triangular, and the plurality of second sections 220 are spaced apart within the non-deposited region. One side of the second section 220, which is spaced apart and placed close to the first boundary line 300, is placed parallel to the first boundary line 300, and when the mask plate 10 is pulled, the second section 220 The sides of the section 220 can share the force exerted by the first boundary line 300, and the force exerted by the mask plate 10 can be more balanced. In other embodiments, the shape of the non-deposited region may be rectangular or the like, and the shape of the first section 210 may be square, pentagonal, or the like. Preferably, the shape of the second section 220 may be a trapezoid, a polygon, an arc, or other shape.

Preferably, some sides of the second section 220 are installed parallel to the second boundary line 400, and when the mask plate 10 is pulled, the sides share the force exerted by the second boundary line 400. This allows the force applied to the mask plate 10 to be more balanced.

Preferably, the edges of the two or more second sections 220 are arranged parallel to the second border line 400, i.e. the second sub-lines 420 include a plurality of short lines 421, in each second section 220 A side parallel to the second boundary line 400 forms a short line 421 , and a plurality of short lines 421 form a second sub-line 420 .

Preferably, the plurality of second sections 220 are distributed in a line along the second direction. In other embodiments, the plurality of second sections 220 may be distributed in multiple rows and multiple columns. Preferably, the second direction intersects the first direction, for example the second direction is perpendicular to the first direction.

Preferably, the second section 220 is an isosceles triangle, and the plurality of second sections 220 have the same shape, so that the second section 220 is uniformly distributed in the non-deposited region and The two opposing sides of the section 220 can be placed parallel.

Preferably, the number of second sections 220 is an odd number, and the second sections 220 at intermediate positions in the row in the second direction are provided symmetrically with respect to the center line P. Alternatively, the number of second sections 220 is an even number, and the plurality of second sections 220 are provided symmetrically with respect to the center line P.

Preferably, the first section 210, the second section 220, and the deposition section 100 are made of different materials, that is, the first section 210, the second section 220, and the deposition section 100 are made of different materials. Each material is different. Here, the expression that the materials of any two of the first section 210, the second section 220, and the vapor deposition section 100 are different means that the materials of the first section 210, the second section 220, and the vapor deposition section 100 are different. The types of materials may be the same in the first section 210, the second section 220, and the vapor deposition section 100 may have different compounding ratios, or the first section 210 and the second section 210 and the second section 220 may have different compounding ratios. It is only necessary to form a sudden material change line between the second section 220 and the vapor deposition section 100.

Referring to FIG. 6, FIG. 6 is a structural schematic diagram of a mask device according to an embodiment of the second aspect of the present application.

As shown in FIG. 6, the mask device according to the embodiment of the second aspect of the present application includes a frame 20 and a mask plate 10 provided on the frame 20. The mask plate 10 may be the mask plate 10 in any of the embodiments of the first aspect described above. Since the vapor deposition apparatus according to the embodiment of the second aspect of the present application includes the mask plate 10 according to any of the embodiments of the first aspect, the mask apparatus according to the embodiment of the second aspect of the present application: The mask plate 10 according to any of the embodiments of the first aspect described above has beneficial effects, and the explanation thereof will be omitted here.

Preferably, one mask plate 10 may be provided within the frame 20 of the mask device, or two or more mask plates 10 may be provided within the frame 20 of the mask device.

Although the present application has been described with reference to preferred embodiments, various changes may be made thereto and elements thereof may be replaced by equivalents without departing from the scope of the present application. In particular, the technical features described in each embodiment can be arbitrarily combined as long as there is no structural contradiction. This application is not limited to the particular embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

At least a portion of the non-evaporation part 200 is provided on one side of the vapor deposition part 100 in the first direction. Further, the extending direction of the first sudden change line 310 or the extending direction of its tangent line is parallel to the first direction, or the included angle thereof is an acute angle. When the mask plate 10 is pulled along the first direction, that is, when the pulling direction is the first direction, the non-deposited part 200 and the deposited part 100 tend to separate along the pulling direction. . Since the included angle between the first sudden change line 310 and the first direction is small, installing the first sudden change line 310 in this manner reduces the stress strain experienced thereon, and the mask plate 10 The deformation resistance in the first direction is improved, and the mask plate 10 is less likely to wrinkle.

In these preferred embodiments, when the mask plate 10 is pulled along the first direction, at least some of the second borders 400 can share the tension experienced by the first borders 300 . Therefore, the deformation resistance of the mask plate 10 in the first direction is improved, and wrinkles in the mask plate 10 are further less likely to occur.

In some preferred embodiments, as shown in FIG. 4, second section 220 includes a plurality of apertures 211 therethrough. The openings 211 reduce the mass-to-space ratio of the second section 220, thereby creating an abrupt material boundary between the second section 220 and the first section 210 , and further improving the deformation resistance of the mask plate 10. The wrinkles of the mask plate 10 can be further improved. The shape of the opening 211 is various, and the opening 211 may be a circular hole, an elliptical hole, a polygonal hole, a combination thereof, or the like.

Preferably, the first section 210, the second section 220, and the deposition section 100 are made of different materials, that is, the first section 210, the second section 220, and the deposition section 100 are made of different materials. Each material is different. Here, the expression that the materials of any two of the first section 210, the second section 220, and the vapor deposition section 100 are different means that the materials of the first section 210, the second section 220, and the vapor deposition section 100 are different. The types of materials may be the same in the first section 210, the second section 220, and the vapor deposition section 100 may have different compounding ratios, or the first section 210 and the second section 210 and the second section 220 may have different compounding ratios. It is only necessary that a sudden material change line can be formed between the second section 220 and the vapor deposition section 100.

As shown in FIG. 6, the mask device according to the embodiment of the second aspect of the present application includes a frame 20 and a mask plate 10 provided on the frame 20. The mask plate 10 may be the mask plate 10 in any of the embodiments of the first aspect described above. Since the mask device according to the embodiment of the second aspect of the present application includes the mask plate 10 according to any of the embodiments of the first aspect, the mask device according to the embodiment of the second aspect of the present application includes: The mask plate 10 according to any of the embodiments of the first aspect described above has beneficial effects, and the explanation thereof will be omitted here.

Claims (20)

A mask plate for evaporating a substrate to be evaporated,
The mask plate includes a panel region, the panel region includes a vapor deposition part and a non-evaporation part, and at least some of the non-evaporation part is located on one side of the vapor deposition part in a first direction, The non-evaporation region includes a first section and at least one second section, and a non-evaporation region is formed by being surrounded by a boundary line where the first section and the deposition region are adjacent to each other. At least one of the second sections is located in the non-evaporation region, and the mass-space ratios of adjacent two sections of the deposition section, the first section, and the second section are different; The mass-to-space ratio is the ratio of the mass of each member to the total volume of the space occupied by the mask plate. Any two of the vapor deposition section, the first section, and the second section whose boundaries are adjacent to each other have different mass space ratios, and a second section is located adjacent to the boundary between the first section and the vapor deposition section. 1 boundary line is formed, the first boundary line includes a first sudden change line extending in a straight line or a curve, and the extending direction of the first sudden change line or the extending direction of a tangent thereof and the The mask plate according to claim 1, wherein the first direction is parallel to the first direction or an included angle therebetween is an acute angle. The shape of the non-deposited region is trapezoidal, the shape of the second section is triangular, and the plurality of second sections are distributed at intervals within the non-deposited region, and 3. The mask plate according to claim 2, wherein one side of the second section provided close to the boundary line is parallel to the first boundary line. The mask plate according to claim 3, wherein the second section is an isosceles triangle, and the plurality of second sections have the same shape. A second boundary line is formed adjacent to the boundary between the first section and the second section, and at least part of the second boundary line extends in a straight line or a curve, and at least part of the second boundary line extends in a straight line or a curved line. The extending direction of the second boundary line or the extending direction of the tangential line thereof and the extending direction of at least some of the first boundary lines or the extending direction of the tangential line thereof are parallel to each other, or at least The included angle between the extending direction of some of the second boundary lines or the extending direction of the tangent lines thereof and the extending direction of at least some of the first boundary lines or the extending direction of the tangent lines thereof is an acute angle. , the mask plate according to claim 2. The mask plate according to claim 5, wherein some sides of the second section are provided parallel to the second boundary line. The mask plate according to claim 6, wherein at least some sides of the two or more second sections are provided parallel to the second boundary line. The first boundary line further includes a second sudden change line extending in a straight line or a curve, and the extending direction of the second sudden change line or the extending direction of a tangent thereof is perpendicular to the first direction. , the second boundary line includes a second sub-line adjacent to the second sudden change line, the second sub-line extends in a straight line or a curve, and the second sub-line or the extending direction of the tangent thereof and the extending direction of the second sudden change line or the tangent to the second sudden change line are parallel to each other, or 6. The mask plate according to claim 5, wherein the included angle between the existing direction or the extending direction of the tangent thereof and the second sudden change line or the extending direction of the tangent to the second sudden change line is an acute angle. 9. The mask plate of claim 8, wherein the second sub-lines include a plurality of short lines distributed at intervals. a plurality of the second sections are spaced apart in the non-deposited region, the second sections include edges for forming the short lines, the plurality of spaced edges are , the mask plate used to form the second sub-line including a plurality of the short lines. The second boundary line includes a first sub-line adjacent to the first sudden change line, the first sub-line extends in a straight line or a curve, and the extension of the first sub-line The direction or the extending direction of the tangent thereof and the extending direction of the first sudden change line or the tangent to the first sudden change line are parallel to each other, or the extending direction of the first sub-line or 6. The mask plate according to claim 5, wherein the included angle between the extending direction of the tangent and the extending direction of the first sudden change line or the tangent to the first sudden change line is an acute angle. 6. The at least one second section includes a plurality of second sections, the plurality of second sections being spaced apart within the non-deposited region. mask plate. 13. The mask plate of claim 12, wherein the plurality of second sections are symmetrically distributed about a centerline extending in the first direction and bisecting the deposition area. 13. The mask plate according to claim 12, wherein the second section itself is provided axially symmetrically with respect to an axis extending in the first direction. 13. The mask plate according to claim 12, wherein adjacent boundary lines of two adjacent second sections are provided parallel to each other or have an acute included angle. The second section includes a plurality of openings, and the openings are provided through the second section along the thickness direction of the mask plate, or the openings are provided on a surface of the second section. The mask plate according to claim 1, wherein the mask plate is formed with a recess. The mask plate according to claim 1, wherein the first section and the second section are both polygonal. The mask plate according to claim 1, wherein at least two materials in the vapor deposition section, the first section, and the second section are the same. The mask plate according to claim 1, wherein the plurality of second sections are distributed in a line along the second direction. A mask device comprising a frame and a mask plate provided on the frame, the mask plate being the mask plate according to any one of claims 1 to 19.

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