JP2024126498A5 - - Google Patents
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- JP2024126498A5 JP2024126498A5 JP2023034897A JP2023034897A JP2024126498A5 JP 2024126498 A5 JP2024126498 A5 JP 2024126498A5 JP 2023034897 A JP2023034897 A JP 2023034897A JP 2023034897 A JP2023034897 A JP 2023034897A JP 2024126498 A5 JP2024126498 A5 JP 2024126498A5
- Authority
- JP
- Japan
- Prior art keywords
- state
- distance
- base
- shorter
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023034897A JP2024126498A (ja) | 2023-03-07 | 2023-03-07 | センサ及びキャパシタ装置 |
| US18/350,695 US12535447B2 (en) | 2023-03-07 | 2023-07-11 | Sensor and capacitor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023034897A JP2024126498A (ja) | 2023-03-07 | 2023-03-07 | センサ及びキャパシタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024126498A JP2024126498A (ja) | 2024-09-20 |
| JP2024126498A5 true JP2024126498A5 (https=) | 2025-07-08 |
Family
ID=92636299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023034897A Pending JP2024126498A (ja) | 2023-03-07 | 2023-03-07 | センサ及びキャパシタ装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US12535447B2 (https=) |
| JP (1) | JP2024126498A (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5951344B2 (ja) * | 2012-04-27 | 2016-07-13 | 株式会社東芝 | Ｍｅｍｓデバイスおよびその製造方法 |
| WO2014080444A1 (ja) * | 2012-11-26 | 2014-05-30 | パイオニア株式会社 | 静電アクチュエーターおよび可変容量デバイス |
| JP6896576B2 (ja) | 2017-09-20 | 2021-06-30 | 株式会社東芝 | ガスセンサおよびその製造方法 |
| JP7362557B2 (ja) * | 2020-07-17 | 2023-10-17 | 株式会社東芝 | センサ及びセンサモジュール |
| JP7456988B2 (ja) * | 2021-09-15 | 2024-03-27 | 株式会社東芝 | センサ及び電気装置 |
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2023
- 2023-03-07 JP JP2023034897A patent/JP2024126498A/ja active Pending
- 2023-07-11 US US18/350,695 patent/US12535447B2/en active Active