JP2024071205A - Inspection device and method for identifying needle tip position - Google Patents

Abstract

To provide a technique that improves the accuracy of identifying the position of the needle tips of probes of various shapes.SOLUTION: An inspection device that inspects an object to be inspected through the tips of multiple probes attached to a probe card includes an illumination unit that can move to a position facing the probe card and irradiates the probe with light, an imaging unit that takes an image of the probe irradiated with light, and an identification unit that identifies the position of the probe tip on the basis of the image taken, and the illumination unit includes one or more light source holding units in which multiple light sources that irradiate the probe with light are arranged, a driving unit that rotates the light source holding unit around a single rotation axis, and an adjustment unit that adjusts the angle of the light source holding unit relative to the probe card.SELECTED DRAWING: Figure 5

Description

This disclosure relates to an inspection device and a method for identifying a needle tip position.

For example, the electrical characteristics of semiconductor devices are inspected using an inspection device while they are still in the form of a semiconductor wafer before they are divided into individual semiconductor devices. The inspection device has a probe card on which multiple probes are provided. The inspection device inspects the semiconductor device by bringing the tips of the probes on the probe card into contact with test pads provided on the semiconductor device, supplying electrical signals to the semiconductor device via the probes, and acquiring the electrical signals output from the semiconductor device via the probes. In order to bring the tips of the probes on the probe card into contact with the test pads provided on the semiconductor device, it is necessary to accurately identify the positions of the tips of the probes, which have a variety of shapes.

Technology for capturing an image of the tip of a probe using a camera and identifying the position of the probe tip based on the position of the camera that captured the image and the position of the probe tip in the image has been known for some time (see, for example, Patent Document 1).

JP 2019-102640 A

This disclosure provides technology that improves the accuracy of identifying the position of the needle tip of probes of various shapes.

One aspect of the present disclosure is an inspection device that inspects an object to be inspected through the tips of multiple probes provided on a probe card, and is movable to a position facing the probe card and has an illumination unit that irradiates light onto the probes, an imaging unit that images the probes irradiated with light, and an identification unit that identifies the position of the probe tips based on the captured image, and the illumination unit has one or more light source holding units in which multiple light sources that irradiate light onto the probes are arranged, a drive unit that rotates the light source holding unit around a single rotation axis, and an adjustment unit that adjusts the angle of the light source holding unit relative to the probe card.

This disclosure can improve the accuracy of identifying the position of the needle tip of probes of various shapes.

FIG. 2 is a cross-sectional view of an example of an inspection device according to the present embodiment. 3A and 3B are explanatory diagrams illustrating an example of an illumination unit and an imaging unit according to the present embodiment. 3A and 3B are explanatory diagrams illustrating an example of an illumination unit and an imaging unit according to the present embodiment. FIG. 2 is a diagram illustrating a hardware configuration of an example of a computer. FIG. 2 is a functional configuration diagram of an example of a control device according to the present embodiment. 1A and 1B are diagrams illustrating an example of the shape of a probe provided on a probe card. 5A to 5C are diagrams illustrating an example of different lighting conditions according to the present embodiment. 5A to 5C are diagrams illustrating an example of different lighting conditions according to the present embodiment. 5A to 5C are diagrams illustrating an example of different lighting conditions according to the present embodiment. 5 is a flowchart illustrating an example of a processing procedure of a control device according to the present embodiment. 5 is a flowchart illustrating an example of a processing procedure of a control device according to the present embodiment. 5 is a flowchart illustrating an example of a processing procedure of a control device according to the present embodiment. FIG. 1 is an image diagram of an example of an HDR image. FIG. 1 is an explanatory diagram of an example of creating an HDR image. FIG. 1 is an explanatory diagram of an example of creating an HDR image.

Below, we will explain the form for implementing the present invention with reference to the drawings.

Figure 1 is a cross-sectional view of an example of an inspection device according to this embodiment. The inspection device 10 in Figure 1 has an inspection device main body 20 and a control device 50. The inspection device main body 20 has a hollow housing 21. Approximately in the center of the housing 21, a moving mechanism 23 is provided that moves a mounting table 25 in the vertical direction (the z-axis direction shown in Figure 1) and the horizontal direction (directions in the xy plane parallel to the x-axis and y-axis shown in Figure 1). A semiconductor wafer (hereinafter referred to as wafer W), which is an example of an object to be inspected, is placed on the upper surface of the mounting table 25. The mounting table 25 holds the wafer W placed on its upper surface by suction using a vacuum chuck or the like.

An illumination unit 100 and an imaging unit 120 are provided on the side of the mounting table 25. The illumination unit 100 and the imaging unit 120 can be moved to a position facing the probe card 36 described below. For example, the mounting table 25 is moved by the movement mechanism 23, whereby the illumination unit 100 and the imaging unit 120 provided on the side of the mounting table 25 move. The movement mechanism 23 is controlled by the control device 50. The amount of movement of the movement mechanism 23 is managed by the control device 50. The positions of the illumination unit 100 and the imaging unit 120 within the housing 21 are managed by the control device 50.

The illumination unit 100 is provided so as to face upward. The illumination unit 100 irradiates light in the direction of the probe card 36 described below. The imaging unit 120 is provided so as to face the imaging direction upward. The imaging unit 120 images the direction of the probe card 36 described below through an opening 110 provided in the illumination unit 100 described below.

The housing 21 has a substantially circular opening at the top. A test head 30 is provided in the opening of the housing 21. The test head 30 is fixed to a frame 22 that is provided along the periphery of the opening. A plurality of tilt adjustment units 32 are provided at the position of the frame 22 within the test head 30. The tilt adjustment units 32 are arranged at predetermined intervals around the opening along the frame 22. The tilt adjustment units 32 hold a substantially cylindrical holder 34 from above via a shaft 33 below the frame 22.

The holder 34 removably holds a probe card 36 on the lower part, on which multiple probes 38 are provided. The multiple probes 38 provided on the probe card 36 are provided on the probe card 36 so that their needle tips face downward. The probe card 36 in FIG. 1 is an example of a cantilever type probe 38, but other shapes of probes, such as a vertical needle type, may also be used.

The probe card 36 has a number of probes 38 arranged so that when the wafer W placed on the mounting table 25 is moved to a position for testing, the needle tips of the probes 38 come into contact with test pads provided on the wafer W. The probes 38 are connected to wiring provided on the probe card 36. The wiring provided on the probe card 36 is connected to the test head 30 via wiring provided on the holder 34. The test head 30 is connected to an external tester 31.

Due to mounting errors when mounting the probe card 36 to the holder 34, the position of the needle tip of the probe 38 of the probe card 36 may be shifted from the position corresponding to the test pad provided on the wafer W.

In this embodiment, before the start of the inspection, the position of the tip of the probe 38 is identified using the illumination unit 100 and the imaging unit 120 as described below, and the position of the wafer W is adjusted so that the position of the tip of the probe 38 contacts the position of the test pad on the wafer W.

When inspecting the wafer W placed on the mounting table 25, the control device 50 controls the movement mechanism 23 so that the illumination unit 100 and the imaging unit 120 are positioned below the probe 38. The control device 50 controls the movement mechanism 23 to bring the illumination unit 100 and the imaging unit 120 closer to the probe 38, and then controls the light emitted by the illumination unit 100 and the imaging performed by the imaging unit 120 as described below. The control device 50 identifies the position of the tip of the probe 38 based on the image captured by the imaging unit 120 as described below.

Based on the identified tip position of the probe 38, the control device 50 controls the moving mechanism 23 to correct the deviation between the tip position and the position of the test pad on the wafer W, thereby making it possible to bring the tip of the probe 38 into contact with each test pad on the wafer W placed on the placement table 25. The control device 50 then controls the external tester 31 to output a predetermined electrical signal to the test head 30. The test head 30 outputs the electrical signal output from the external tester 31 to the probe card 36 via wiring in the holder 34. The electrical signal output to the probe card 36 is supplied to the probe 38 via wiring in the probe card 36. The electrical signal supplied to the probe 38 is output to the test pad on the wafer W via the probe 38.

The electrical signal output from the test pad on the wafer W is output to the probe 38. The electrical signal output to the probe 38 is output to the test head 30 via the wiring in the probe card 36 and the wiring in the holder 34. The electrical signal output to the test head 30 is output to the external tester 31.

The external tester 31 evaluates the electrical characteristics of the wafer W based on the electrical signals output to the test head 30 and the electrical signals output from the test head 30, and outputs the evaluation results to the control device 50.

The illumination unit 100 and the image capture unit 120 are configured, for example, as shown in Figs. 2 and 3. Figs. 2 and 3 are explanatory diagrams of an example of the illumination unit and image capture unit according to this embodiment. Fig. 2 shows a cross-sectional view for explaining the illumination unit 100 and the image capture unit 120. Also, Fig. 3 shows a plan view for explaining the illumination unit 100.

As shown in FIG. 2, the illumination unit 100 has a light source holding unit 102, a drive unit 104, and an adjustment unit 106. Also, as shown in FIG. 2, a plurality of light sources 108 are arranged in the light source holding unit 102 of the illumination unit 100. For example, the plurality of light sources 108 are arranged in the light source holding unit 102 as shown in FIG. 3.

Figure 3 shows an example in which the types of light sources 108 arranged in the light source holding unit 102 are a broadband LED 108b, a shortwave infrared LED 108s, and a full-color LED 108c. As shown in Figure 3, the broadband LED 108b, the shortwave infrared LED 108s, and the full-color LED 108c are arranged in the light source holding unit 102 so as to irradiate light in a well-balanced manner. As long as light can be irradiated in a well-balanced manner, an arrangement other than that shown in Figure 3 may be used.

The broadband LED 108b is an example of a light source 108 that can handle light with wavelengths of, for example, 400 nm to 1000 nm. The shortwave infrared LED 108s is an example of a light source 108 that can handle light with wavelengths of, for example, 1000 nm or more. The full-color LED 108c is an example of a light source 108 that includes LED chips that emit red, green, and blue light, and emits light of a color that corresponds to the amount of current flowing through each LED chip.

The driving unit 104 rotates the light source holding unit 102 around a rotation axis 112, which is a straight line that is the center of the rotational movement of the light source holding unit 102. An opening 110 is formed at the center of rotation of the light source holding unit 102. The photographing unit 120 photographs the direction of the probe card 36 through the opening 110.

The adjustment unit 106 adjusts the angle of the light source holding unit 102 relative to the probe card 36. The adjustment unit 106 is composed of, for example, a rotation axis pin, an actuator, and an encoder or potentiometer (variable resistor) for reading the rotation relative to the rotation axis. As shown in FIG. 2, the adjustment unit 106 can gradually change the shape of the illumination unit 100 from a state in which the light source holding unit 102 is perpendicular to the rotation axis 112 to a state in which the light source holding unit 102 is closer to or parallel to the rotation axis 112 so that the direction of the light emitted by the light source holding unit 102 changes. The state in which the light source holding unit 102 is perpendicular to the rotation axis 112 may be called, for example, a flat shape. Also, the state in which the light source holding unit 102 is closer to or parallel to the rotation axis 112 may be called a low-angle shape. The adjustment unit 106 can adjust the angle of the light source holding unit 102 shown by the arrow 114 in FIG. 2.

According to the illumination unit 100 shown in Figs. 2 and 3, the type, position, and irradiation angle of the light source 108 that irradiates the probe of the probe card 36 can be easily adjusted by the control of the control device 50. The control device 50 is realized by a computer having the hardware configuration shown in Fig. 4, for example. Fig. 4 is a diagram showing the hardware configuration of an example of a computer.

The computer 500 in FIG. 4 includes an input device 501, an output device 502, an external I/F (interface) 503, a RAM (Random Access Memory) 504, a ROM (Read Only Memory) 505, a CPU (Central Processing Unit) 506, a communication I/F 507, and a HDD (Hard Disk Drive) 508, all of which are interconnected by a bus B. Note that the input device 501 and the output device 502 may be connected and used when necessary.

The input device 501 is a keyboard, mouse, touch panel, etc., and is used by an operator to input various operation signals. The output device 502 is a display, etc., and displays the results of processing by the computer 500. The communication I/F 507 is an interface that connects the computer 500 to a network. The HDD 508 is an example of a non-volatile storage device that stores programs and data.

The external I/F 503 is an interface with an external device. The computer 500 can read and/or write data from a recording medium 503a such as a Secure Digital (SD) memory card via the external I/F 503. The ROM 505 is an example of a non-volatile semiconductor memory (storage device) in which programs and data are stored. The RAM 504 is an example of a volatile semiconductor memory (storage device) that temporarily holds programs and data.

The CPU 506 is a calculation device that reads programs and data from storage devices such as the ROM 505 and the HDD 508 onto the RAM 504 and executes processing to realize the overall control and functions of the computer 500. The control device 50 in FIG. 1 can realize various functions shown in FIG. 5, for example, by executing programs on the computer 500.

Figure 5 is a functional configuration diagram of an example of a control device according to this embodiment. Note that the functional configuration diagram of Figure 5 omits illustration of configurations that are not necessary for explaining this embodiment. The control device 50 executes a program to realize an imaging control unit 200, a memory unit 202, an illumination control unit 204, an image creation unit 206, an identification unit 208, a needle tip position adjustment unit 210, and an inspection execution unit 212.

The imaging control unit 200 controls the position of the moving mechanism 23 to move the mounting table 25 so that the illumination unit 100 and the imaging unit 120 are positioned below the probe 38 provided on the probe card 36. The imaging control unit 200 also causes the imaging unit 120 to capture an image of the probe 38 in the moved position. The imaging control unit 200 stores the image captured by the imaging unit 120 in the memory unit 202 in association with the position of the imaging unit 120.

The illumination control unit 204 controls the illumination unit 100 so that the light required for photographing the probe 38 is irradiated from the illumination unit 100. Specifically, the illumination control unit 204 controls the type of light source 108 to be turned on, the rotation of the light source holding unit 102 around the rotation axis 112, and the angle of the light source holding unit 102 relative to the probe card 36.

The image creation unit 206 refers to the storage unit 202 and creates a single image, a high dynamic range (HDR) image, from multiple images taken under different lighting conditions. The lighting conditions are the type of light source 108 that is turned on, the lighting position of the light source 108 while rotating around the rotation axis 112, and the angle of the light source holding unit 102 indicated by the arrow 114 in FIG. 2. The created HDR image is a single image created by combining images taken under different lighting conditions, and is an image in which the light of the light source 108 is uniformly irradiated to each pixel.

The identification unit 208 identifies the position of the tip of the probe 38 based on the HDR image created by the image creation unit 206. For example, the identification unit 208 can identify the position of the tip of the probe 38 shown in the HDR image by using existing image processing technology and deep learning algorithms, etc.

The tip position adjustment unit 210 adjusts the destination of the moving mechanism 23 based on the information on the tip position of the probe 38 identified by the identification unit 208 so that when the wafer W placed on the mounting table 25 moves to a position for inspection, the tip of the probe 38 comes into contact with a test pad provided on the wafer W. The inspection execution unit 212 controls the moving mechanism 23 so that the wafer W moves to the destination adjusted by the tip position adjustment unit 210, thereby allowing the tip of the probe 38 to come into contact with the corresponding test pad on the wafer W.

The probe 38, whose tip position is identified by the identification unit 208, has a variety of shapes as shown in FIG. 6. FIG. 6 is a diagram illustrating an example of the shape of a probe provided on a probe card. FIG. 6(A) shows an example of the shape of the tip of the probe 38. FIG. 6(B) shows an example of the shape of the probe 38.

As shown in FIG. 6A, the shape of the needle tip of the probe 38 is diverse. Therefore, in order to identify with high accuracy the position (contact point) of the needle tip of the probe 38 that contacts the test pad on the wafer W, it is necessary to irradiate the probe 38 with light from the illumination unit 100 so that the edge of the probe 38 becomes clear.

However, when using conventional lighting units, images of closely packed probes 38 would show the shadows of adjacent probes 38, making the edges of the probes 38 unclear.

In this embodiment, light is irradiated under different lighting conditions from the illumination unit 100 shown in Figs. 2 and 3, and the imaging unit 120 images the probe 38. In this embodiment, an HDR image is created from the images of the probe 38 captured under different lighting conditions shown in Figs. 7 to 9, and the edges of the probe 38 are detected from the created HDR image. In this embodiment, a deep learning algorithm or the like may be used to automatically detect various probes 38 with variations in size, shape, surface finish, color, etc. from the HDR image, and the position (contact point) of the needle tip of the probe 38 may be accurately predicted from the HDR image.

Figures 7 to 9 are diagrams for explaining examples of different lighting conditions according to this embodiment. Figure 7 shows an example in which the light source holding part 102 of the illumination part 100 has a flat shape. As shown in Figure 7 (A), the light source holding part 102 of the illumination part 100 rotates by the drive part 104. The multiple types of light sources 108 arranged in the rotating light source holding part 102 can be switched on and off for each type.

The illumination unit 100 is moved by the movement mechanism 23 to a position shown in FIG. 7(B), for example, and the light source holding unit 102 rotates with the light source 108 turned on. The position shown in FIG. 7(B) is an example of a position below the probe 38, which is the target for identifying the needle tip position. FIG. 7 shows an example in which the light source 108 arranged on the light source holding unit 102 continues to be turned on during rotation (an example of full lighting).

The light source 108 in FIG. 7, which is disposed on the rotating light source holding unit 102, can be controlled to light up (partially lighted) at a predetermined position, for example as shown in positions (1) to (5) in FIG. 8(A).

Figure 8 shows an example in which the light source holding part 102 of the illumination unit 100 has a low-angle shape that is closer to the rotation axis 112 than a flat shape. As shown in Figure 8 (A), the light source holding part 102 of the illumination unit 100 rotates by the drive part 104. The multiple types of light sources 108 arranged on the rotating light source holding part 102 can be switched on and off for each type. Furthermore, the light sources 108 in Figure 8 arranged on the rotating light source holding part 102 can be controlled to light up at specified positions, for example as shown in positions (1) to (5) in Figure 8 (A).

Figure 9 shows that the light source holding part 102 of the illumination unit 100 has a low-angle shape closer to the rotation axis 112 than a flat shape, and the angle of the light source holding part 102 indicated by the arrow 114 in Figure 2 is variable. The adjustment part 106 can control the light source holding part 102 to be at a predetermined angle, for example, as shown in positions (1) to (4) in Figure 9 (B).

As shown in Figures 7 to 9, the illumination unit 100 according to this embodiment can realize different lighting conditions, such as the type of light source 108 that irradiates light onto the probe 38 whose needle tip position is to be identified, and the direction of light irradiation.

The inspection device 10 detects the edges of the probe 38 of various shapes from images captured, for example, according to the procedure shown in Figures 10 to 12. Figures 10 to 12 are flowcharts showing an example of the processing procedure of the control device according to this embodiment.

In step S10, the control device 50 controls the light source holding unit 102 to assume the flat shape shown in FIG. 7. In step S12, the control device 50 controls the broadband LED 108b and shortwave infrared LED 108s to be turned on (all on), and starts rotating the light source holding unit 102. In step S14, the control device 50 controls the photographing unit 120 to photograph the direction of the target probe 38 through the opening 110 provided in the illumination unit 100. In step S16, the control device 50 confirms the inspection area (workplace) from the image photographed by the photographing unit 120.

For example, the control device 50 uses OpenCV (Open Source Computer Vision Library) to decompose the captured image into RGB channels (red channel, green channel, and blue channel). From the images of each channel, the control device 50 selects the channel in which the inspection area is most identifiable. From the result of selecting the channel in which the inspection area is most identifiable, the control device 50 can select the image of the required channel by adjusting the RGB current value of the full-color LED 108c. In addition, the control device 50 may optimize the histogram of the image of each channel so that the inspection area is most identifiable.

The control device 50 may also adjust the brightness of the full-color LED 108c to reduce the influence of the spectral sensitivity of the image capture unit 120. For example, if the spectral sensitivity of the red wavelength of 610 nm is about 100%, the spectral sensitivity of the green wavelength of 540 nm is about 90%, and the spectral sensitivity of the blue wavelength of 460 nm is about 65%, the control device 50 adjusts the RGB current values of the full-color LED 108c so that the brightness of the red wavelength of 610 nm is about 100%, the brightness of the green wavelength of 540 nm is about 110%, and the brightness of the blue wavelength of 460 nm is about 154%.

In step S18, the control device 50 performs a process to identify the tip position of the probe 38, as shown in Figures 11 and 12.

In step S20, the control device 50 controls the full-color LEDs 108c to be fully lit in the color required for inspecting the inspection area, and to be partially lit as described with reference to FIG. 8(A) based on the result of the processing in step S16. For example, if the image in the red channel makes it easier to confirm the inspection area in the processing in step S20, the control device 50 controls the LEDs 108c to be lit in red, which is the color required for inspecting the inspection area.

In step S22, the control device 50 controls the imaging unit 120 to capture an image in the direction of the target probe 38 that is being irradiated with full or partial light from the illumination unit 100 through the opening 110 provided in the illumination unit 100. The control device 50 also creates an HDR image by combining multiple images captured under different lighting conditions, for example as shown in FIG. 14. In the HDR image created in step S22, areas other than the inspection area may be corrected to the color of the surfaces not requiring inspection.

Figure 14 is an explanatory diagram of an example of creating an HDR image. As shown in Figure 14, the control device 50 creates an HDR image by combining multiple images taken under different lighting conditions, namely, full lighting, partial lighting at position (1) to partial lighting at position (n). Note that the number of partial lighting positions can be determined appropriately.

In step S24, the control device 50 uses image processing to determine whether the edge of the target probe 38 shown in the HDR image created in step S22 can be detected with high accuracy. For example, the control device 50 may enlarge the HDR image as shown in FIG. 13, and determine whether the edge of the needle tip of the target probe 38 can be detected with high accuracy. FIG. 13 is an image diagram of an example of an HDR image.

If the edge of the needle tip of the target probe 38 can be detected with high accuracy, the identification unit 208 can identify the item of the probe 38 and use the profile of that item's probe 38 to identify the position (contact point) of the needle tip.

If the edge of the probe 38 of the target shown in the HDR image created in step S22 can be detected with high accuracy, the control device 50 ends the processing of the flowchart. If the edge of the probe 38 of the target shown in the HDR image created in step S22 cannot be detected with high accuracy, the process proceeds to step S26.

In step S26, the control device 50 controls the light source holding unit 102 so that it assumes the low-angle shape shown in FIG. 9. For example, as shown in FIG. 9(B), the control device 50 controls the light source holding unit 102 so that it assumes a predetermined angle, and controls the photographing unit 120 so that it photographs the direction of the target probe 38 being irradiated with light from the illumination unit 100. In addition, in step S28, the control device 50 creates an HDR image by combining multiple images photographed under different lighting conditions, for example, as shown in FIG. 15.

Figure 15 is an explanatory diagram of an example of creating an HDR image. As shown in Figure 15, the control device 50 creates an HDR image by combining multiple images taken under different lighting conditions, from partial lighting at angle (1) to partial lighting at angle (n). Note that the number of angles of partial lighting can be determined appropriately.

In step S30, the control device 50 uses image processing to determine whether the edge of the target probe 38 shown in the HDR image created in step S28 can be detected with high accuracy. For example, the control device 50 may enlarge the HDR image as shown in FIG. 13 and determine whether the edge of the needle tip of the target probe 38 can be detected with high accuracy.

If the edge of the needle tip of the target probe 38 can be detected with high accuracy, the identification unit 208 can identify the item of the probe 38 and use the profile of that item's probe 38 to identify the position (contact point) of the needle tip.

If the edge of the probe 38 of the target shown in the HDR image created in step S28 can be detected with high accuracy, the control device 50 ends the processing of the flowchart. If the edge of the probe 38 of the target shown in the HDR image created in step S28 cannot be detected with high accuracy, the process proceeds to step S32.

In step S32, the control device 50 controls the light source holding unit 102 so that it assumes the flat shape shown in FIG. 7. In step S34, the control device 50 turns on the shortwave infrared LEDs 108s that were fully lit in step S12 again to capture a more detailed image. The control device 50 controls the shortwave infrared LEDs 108s so that they are fully lit or partially lit as described with reference to FIG. 8(A). The partial lighting of the shortwave infrared LEDs 108s is performed by strobe lighting based on feedback regarding the position of the rotation axis 112.

In step S36, the control device 50 controls the photographing unit 120 to photograph the direction of the target probe 38 that is being irradiated with full or partial light from the illumination unit 100 through an opening 110 provided in the illumination unit 100. Partial illumination is performed by strobe lighting based on feedback regarding the position of the rotation axis 112. The control device 50 also creates an HDR image by combining multiple images photographed under different lighting conditions, for example as shown in FIG. 14.

In step S38, the control device 50 uses image processing to determine whether the edge of the probe 38 of the target shown in the HDR image created in step S36 can be detected with high accuracy. If the edge of the probe 38 of the target shown in the HDR image created in step S36 can be detected with high accuracy, the control device 50 ends the processing of the flowchart. If the edge of the probe 38 of the target shown in the HDR image created in step S36 cannot be detected with high accuracy, the process proceeds to step S40.

In step S40, the control device 50 controls the light source holding unit 102 so that it assumes the low-angle shape shown in FIG. 9. For example, as shown in FIG. 9(B), the control device 50 controls the light source holding unit 102 so that it assumes a predetermined angle, and controls the photographing unit 120 so that it photographs the direction of the target probe 38 being irradiated with light from the illumination unit 100. In addition, in step S42, the control device 50 creates an HDR image by combining multiple images photographed under different lighting conditions, for example, as shown in FIG. 15.

In step S44, the control device 50 detects the edge of the target probe 38 shown in the HDR image created in step S42 by image processing. For example, the control device 50 can enlarge the HDR image as shown in FIG. 13 and detect the edge of the needle tip of the target probe 38 by image processing. In step S44, the user may be prompted to specify the edge of the needle tip of the target probe 38 and the type of probe 38 from the enlarged HDR image shown in FIG. 13.

According to the processing of the flowcharts shown in Figures 10 to 12, the inspection device 10 can create a single HDR image from multiple images taken under lighting conditions with different types of light source 108 irradiating the probe and different angles of irradiation. The inspection device 10 can pinpoint the position of the needle tip of the probe 38 with high accuracy from the HDR image that can accurately detect the edge of the target probe 38.

The control device 50 can also determine the lighting conditions of the illumination unit 100 that allow for accurate detection of the edge of the target probe 38 from an HDR image in which the edge of the target probe 38 can be detected with high accuracy.

The configuration of the inspection device 10 in the above embodiment is just an example, and at least a part of the processing performed by the control device 50 may be executed by another information processing device connected to the control device 50 so as to be capable of data communication. For example, the other information processing device connected to the control device 50 so as to be capable of data communication may be a computer that provides a cloud service.

Note that the inspection device 10 in FIG. 1 is just one example, and it goes without saying that there are various configuration examples depending on the application and purpose. Also, the functional divisions shown in the functional configuration diagram in FIG. 5 are just one example.

The above describes in detail preferred embodiments of the present invention, but the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the present invention.

REFERENCE SIGNS LIST 10 Inspection device 36 Probe card 38 Probe 50 Control device 100 Illumination unit 102 Light source holding unit 104 Driving unit 106 Adjustment unit 108 Light source 120 Photography unit 200 Photography control unit 202 Storage unit 204 Illumination control unit 206 Image creation unit 208 Identification unit 210 Tip position adjustment unit 212 Inspection execution unit

Claims (9)

1. A testing apparatus for testing a test subject via needle tips of a plurality of probes provided on a probe card, comprising:
an illumination unit that is movable to a position facing the probe card and irradiates the probe with light;
An imaging unit that images the probe irradiated with light;
an identification unit that identifies the position of the tip of the probe based on the captured image;
having
The illumination unit includes:
one or more light source holders in which a plurality of light sources for irradiating the probe with light are arranged;
A drive unit that rotates the light source holding unit about one rotation axis;
an adjustment unit for adjusting an angle of the light source holding unit with respect to the probe card;
An inspection device having the above structure. The illumination unit has an opening formed at a rotation center of the light source holding unit,
2. The inspection apparatus according to claim 1, wherein the imaging unit images the probe through the opening. 3. The inspection device according to claim 1, wherein the adjustment unit is capable of gradually changing a shape of the illumination unit from a state in which the light source holding unit is perpendicular to the one rotation axis to a state in which the light source holding unit is closer to or parallel to the one rotation axis, so that a direction of light that the light source holding unit irradiates to the probe during rotation changes. 3. The inspection device according to claim 1, wherein the light source holder is provided with a broadband LED, a shortwave infrared LED, and a full-color LED as the types of light source. 3. The inspection device according to claim 1, wherein the identifying unit identifies the position of the tip of the probe based on one image created from a plurality of images taken under different lighting conditions. A method for identifying tip positions of a testing apparatus that tests a test subject through tips of a plurality of probes provided on a probe card, comprising the steps of:
a step of irradiating light to the probes using an illumination unit that has one or more light source holding units in which a plurality of light sources that irradiate light to the probes are arranged, a drive unit that rotates the light source holding unit about one rotation axis, and an adjustment unit that adjusts the angle of the light source holding unit with respect to the probe card, the illumination unit being movable to a position facing the probe card;
A step of imaging the probe irradiated with light by an imaging unit;
a step of identifying the position of the tip of the probe based on the captured image by an identifying unit;
having
A method for identifying a needle tip position, characterized in that the position of the probe tip is identified based on the image while adjusting the type of light source that irradiates light to the probe and the angle of the light source holding part until the position of the probe tip can be identified in the identification process. a step of irradiating light onto the probe using the illumination unit, the angle of which is adjusted so that the light source holding unit is perpendicular to the one rotation axis, and having the identification unit identify the position of the tip of the probe based on an image of the probe being irradiated with light;
a step of irradiating light to the probe using the illumination unit, the angle of which is adjusted stepwise so that the light source holding unit changes from a state perpendicular to the one rotation axis to a state closer to or parallel to the one rotation axis, and the identification unit identifies the position of the tip of the probe based on an image of the probe being irradiated with light;
The method for identifying a needle tip position according to claim 6, further comprising: a step of irradiating the probe with broadband LED and shortwave infrared LED light by the illumination unit, the angle of which is adjusted stepwise so that the light source holding unit changes from a state perpendicular to the one rotation axis to a state closer to or parallel to the one rotation axis, and the identification unit identifies the position of the needle tip of the probe based on an image of the probe irradiated with the broadband LED and shortwave infrared LED light;
a step of irradiating the probe with light from a shortwave infrared LED using the illumination unit whose angle is gradually adjusted so that the light source holding unit moves from a state perpendicular to the one rotation axis to a state closer to or parallel to the one rotation axis when the identification unit cannot identify the position of the tip of the probe based on an image of the probe irradiated with light from a broadband LED and a shortwave infrared LED, and the identification unit identifies the position of the tip of the probe based on an image of the probe irradiated with light from the shortwave infrared LED;
The method for identifying a needle tip position according to claim 7, further comprising: 9. The method for identifying a needle tip position according to claim 8, further comprising the steps of: irradiating the probe with full-color LED light from the illumination unit, the angle of which is adjusted so that the light source holding unit is perpendicular to the one rotation axis; and identifying the position of a surface that does not need to be inspected in an image of the probe being irradiated with the full-color LED light.

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