JP2024070153A - Spinner table and second frame unit support member - Google Patents

Abstract

To provide a spinner table capable of suppressing the complication of work corresponding to a change in size of a workpiece to be cleaned.SOLUTION: A spinner table 1 includes a base 2, and a first support portion 10 that is fixed to the central region of the upper surface of the base 2 and has a suction holding portion 11 that suction-holds a workpiece 201, and is provided with a plurality of first pendulum clamps 15 on its outer periphery that hold a first ring frame of a first frame unit, and the first support portion 10 has an opening 22 into which the first support portion 10 is inserted, and a plurality of second pendulum clamps 23 on its outer periphery that hold a second ring frame 203-2 of a second frame unit 200-2 by centrifugal force when the spinner table 1 is rotating, and is inserted into the opening 22 of a ring-shaped second frame unit support member 20 that is fixed to the base 2, and exposes the suction holding portion 11.SELECTED DRAWING: Figure 10

Description

The present invention relates to a spinner table and a second frame unit support member.

Wafers with multiple IC (Integrated Circuit) and LSI (Large Scale Integration) devices formed on their front surface are ground on the back surface to a specified thickness, and then cut into individual devices by a cutting machine for use in electrical equipment such as mobile phones and personal computers.

In the cutting device, for example, a cassette containing multiple wafers (hereinafter simply referred to as workpieces) attached to an adhesive tape with an annular frame attached to the outer periphery is placed on the cutting device's mounting table, and the workpieces are placed on the chuck table by a first transport mechanism and cutting is performed. The workpieces are then transferred from the chuck table by a second transport mechanism and placed on the spinner table of the cleaning means, where they are cleaned. After cleaning, the workpieces are stored in the cassette (see, for example, Patent Document 1).

On the other hand, cleaning devices for cleaning machined workpieces using cutting machines that are not equipped with cleaning means have also been developed and put into practical use (see, for example, Patent Document 2).

The cleaning means includes a spinner table that holds the workpiece, and while the workpiece is held on the spinner table and rotated, cleaning water is supplied to the workpiece to clean it. The outer periphery of the spinner table is equipped with a pendulum clamp that holds the frame down using centrifugal force when the spinner table is rotating. The spinner table and pendulum clamp are fixed with screws.

JP 2003-229382 A JP 2009-188296 A

Currently, wafer sizes are 8 inches (outer diameter 200 mm) and 12 inches (outer diameter 300 mm).

As a result, currently, cleaning means require the spinner table to be replaced for each size of workpiece to be cleaned, making the work of changing the size of the workpiece to be cleaned cumbersome.

The object of the present invention is to provide a spinner table that can reduce the complexity of the work required to change the size of the workpiece to be cleaned.

In order to solve the above-mentioned problems and achieve the object, the spinner table of the present invention is a spinner table that can rotate while holding a first frame unit in which a workpiece is supported by a first ring frame having a first outer diameter via an adhesive tape, or a second frame unit in which a workpiece is supported by a second ring frame having a second outer diameter larger than the first outer diameter of the first ring frame via an adhesive tape, and is provided with a disk-shaped base and a disk-shaped first support part that is fixed to the central region of the upper surface of the disk-shaped base and has a suction holding part that suction-holds the workpiece via the adhesive tape, and has a plurality of first pendulum clamps at equal intervals in the circumferential direction on its outer periphery that hold the first frame unit by centrifugal force when the spinner table is rotating, and the first support part The first support part is inserted into the central opening of a ring-shaped second frame unit support member that has a plurality of second pendulum clamps at equal intervals around its outer periphery to hold the second frame unit by centrifugal force when the spinner table is rotating, and the suction holding part can be exposed, and the base can be attached to the opening of the second frame unit support member with the first support part inserted therein, and when holding the first frame unit, the second frame unit support member is removed from the base and the first frame unit is held by the suction holding part of the first support part, and when holding the second frame unit, the second frame unit support member is attached to the base and the second frame unit is held by the suction holding part.

In the spinner table, when the first support part is inserted into the opening of the second frame unit support member and attached, a countersunk portion may be formed in the opening area of the second frame unit support member to accommodate the first pendulum clamp of the first support part so that the first pendulum clamp on the outer periphery of the first support part does not interfere with the opening of the second frame unit support member.

The second frame unit support member of the present invention is a second frame unit support member that is detachable from a spinner table and includes a disk-shaped base and a disk-shaped first support portion that is fixed to the central region of the upper surface of the disk-shaped base and that holds a first frame unit, in which a workpiece is supported by a first ring frame having a first outer diameter via an adhesive tape, in a suction holding portion that suction-holds the workpiece via the adhesive tape, and that holds a second frame unit, in which a workpiece is supported by a second ring frame having a second outer diameter larger than the first outer diameter of the first ring frame, in the suction holding portion. The second frame unit support member is characterized in that it includes an opening in the center into which the first support portion can be inserted, and a plurality of second pendulum clamps that are provided on the outer periphery at equal intervals in the circumferential direction and that hold the second frame unit by centrifugal force when the spinner table is rotating, and that is attached to the base by inserting the first support portion into the opening to expose the suction holding portion.

The present invention has the advantage of being able to reduce the complexity of the work involved in changing the size of the workpiece to be cleaned.

FIG. 1 is a perspective view, partially in section, that illustrates a schematic configuration example of a cleaning device including a spinner table according to a first embodiment. FIG. 2 is a perspective view that illustrates an example of a workpiece to be cleaned by the cleaning method according to the first embodiment. FIG. 3 is a side view, partially in section, of the cleaning apparatus shown in FIG. FIG. 4 is a side view, partially in section, showing a schematic view of a state in which the spinner table of the cleaning apparatus shown in FIG. 1 holds a first frame unit. 5 is a plan view showing a second frame unit support member attached to the spinner table shown in FIG. 1. FIG. FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 7 is a perspective view showing a state in which the second frame unit supporting member is attached to the spinner table of the cleaning apparatus shown in FIG. 1. FIG. 8 is a side view, partially in section, showing a state in which a second frame unit support member is attached to the spinner table of the cleaning apparatus shown in FIG. 1. FIG. 9 is a side view, partially in section, showing a state in which a second frame unit support member is attached to the spinner table of the cleaning apparatus shown in FIG. 1. FIG. 10 is a side view, partially in section, typically showing a state in which the spinner table of the cleaning apparatus shown in FIG. 1 holds a second frame unit.

The following describes in detail the form (embodiment) for carrying out the present invention with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. The components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Various omissions, substitutions, or modifications of the configuration can be made without departing from the spirit of the present invention.

[Embodiment 1]
A spinner table 1 according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view, partially in section, that typically shows an example of the configuration of a cleaning device including a spinner table according to the first embodiment. Fig. 2 is a perspective view that typically shows an example of a workpiece to be cleaned by the cleaning method according to the first embodiment. Fig. 3 is a side view, partially in section, that typically shows the cleaning device shown in Fig. 1.

(Frame unit)
The cleaning apparatus 100 according to the first embodiment shown in Fig. 1 is an apparatus for cleaning a workpiece 201 of a frame unit 200 shown in Fig. 2. The frame unit 200 to be cleaned by the cleaning apparatus 100 has the workpiece 201, an adhesive tape 202, and a ring frame 203, as shown in Fig. 2.

In the first embodiment, the workpiece 201 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, with a substrate of silicon, sapphire, gallium arsenide, or SiC (silicon carbide). As shown in FIG. 2, the workpiece 201 has a surface 204 divided by a plurality of mutually intersecting planned division lines 205, and devices 206 are formed in each of the regions. The devices 206 are, for example, integrated circuits such as ICs (Integrated Circuits) or LSIs (Large Scale Integration), image sensors such as CCDs (Charge Coupled Devices) or CMOSs (Complementary Metal Oxide Semiconductors), MEMS (Micro Electro Mechanical Systems), or memories (semiconductor memory devices).

The workpiece 201 has a dividing groove 207 formed along the dividing line 205. In the first embodiment, the dividing groove 207 is formed along the dividing line 205 at the center of the width of the dividing line 205, and penetrates the workpiece 201 to divide the workpiece 201 into chips 210. The dividing groove 207 is formed by cutting the workpiece 201 with a cutting blade or ablation irradiating the workpiece 201 with an absorbent laser beam. That is, the workpiece 201 is divided into individual chips 210 by cutting or ablation. The chip 210 includes a part of the substrate divided along the dividing line 205 and a device 206 formed on the surface of the substrate.

The adhesive tape 202 is attached to the back surface 208 of the workpiece 201, opposite the front surface 204. The adhesive tape 202 is an adhesive tape having a flexible and non-adhesive base layer and a flexible and adhesive adhesive layer laminated on the base layer. The adhesive tape 202 is formed into a disk shape with a larger diameter than the workpiece 201, with the back surface 208 of the workpiece 201 attached to the center and an annular ring frame 203 attached to the outer edge.

The ring frame 203 is formed in a circular shape with an inner diameter larger than the outer diameter of the workpiece 201, and is made of hard resin or metal. The ring frame 203 supports the workpiece 201 within its inner opening via an adhesive tape 202 attached to the back surface 208 of the workpiece 201.

The frame unit 200 having the above-mentioned configuration is configured by adhering the back surface 208 of the workpiece 201 to the adhesive tape 202, and adhering the ring frame 203 to the outer edge of the adhesive tape 202. In the first embodiment, the adhesive tape 202 is an adhesive tape having a base layer and an adhesive layer laminated on the base layer, but the present invention is not limited to an adhesive tape, and may be a sheet made of a thermoplastic resin without an adhesive layer. In the case of a sheet without adhesive properties, the adhesive tape 202 is preferably made of polyolefin, polyethylene, polypropylene, or polystyrene, and is attached to the ring frame 203 and the workpiece 201 by thermocompression bonding.

The workpieces 201 include an 8-inch workpiece 201 (hereinafter, designated by reference numeral 201-1) with an outer diameter of 200 mm, and a 12-inch workpiece 201 (hereinafter, designated by reference numeral 201-2) with an outer diameter of 300 mm. For this reason, the outer diameter 209-2 (corresponding to the second outer diameter) of the ring frame 203 (hereinafter, designated by reference numeral 203-2) of the frame unit 200 (hereinafter, designated by reference numeral 200-2) having the workpiece 201-2 is larger than the outer diameter 209-1 (corresponding to the first outer diameter) of the ring frame 203 (hereinafter, designated by reference numeral 203-1) of the frame unit 200 (hereinafter, designated by reference numeral 200-1) having the workpiece 201-1.

In this way, the workpiece 201-1 is supported by the first ring frame 203-1 having the outer diameter 209-1 via the adhesive tape 202 to form the first frame unit 200-1. The workpiece 201-2 is supported by the second ring frame 203-2 having the outer diameter 209-2 larger than the outer diameter 209-1 of the first ring frame 203-1 via the adhesive tape 202 to form the second frame unit 200-2.

(Cleaning device)
1 is an apparatus that holds a first frame unit 200-1 or a second frame unit 200-2 and cleans a front surface 204 side of workpieces 201-1 and 201-2 of the frame units 200-1 and 200-2. As shown in FIG. 1, the cleaning apparatus 100 includes a spinner table 1, a rotating shaft 101, a rotary drive source 102, a lifting unit 103, a case 104, a cover member 105, a cleaning nozzle 106, and an air nozzle 107.

The spinner table 1 is formed in a disk shape and is capable of rotating the first frame unit 200-1 or the second frame unit 200-2 by suction and holding it on the flat holding surface 12 along the horizontal direction of the suction holding section 11. The structure of the spinner table 1 will be explained later.

The rotating shaft 101 is formed in a cylindrical shape and is attached to the center of the underside of the spinner table 1, and is arranged coaxially with the spinner table 1. The axis of the rotating shaft 101 is parallel to the vertical direction.

The rotary drive source 102 rotates the rotary shaft 101 about its axis, thereby rotating the spinner table 1 about its axis. In the first embodiment, the rotary drive source 102 includes a motor whose output is attached to the rotary shaft 101.

The lifting unit 103 raises and lowers the spinner table 1 in the vertical direction. The lifting unit 103 is an actuator that is driven to expand and contract by hydraulic pressure, air pressure, or other fluid pressure, or by electricity. In embodiment 1, multiple lifting units 103 (three in embodiment 1) are provided, and each is an air cylinder having a cylinder 108 and a rod 109 that can be expanded and contracted from the cylinder 108.

The cylinder 108 is attached to the outer periphery of the housing of the rotary drive source 102. The lifting unit 103 extends the rod 109 to raise the spinner table 1 via the rotary drive source 102, and positions the spinner table 1 at the loading/unloading position shown in FIG. 3 where the holding surface 12 is above the top end of the case 104. The lifting unit 103 contracts the rod 109 to lower the spinner table 1 via the rotary drive source 102, and positions the spinner table 1 at the cleaning position where the holding surface 12 is below the top end of the case 104.

In this way, the lifting unit 103 raises and lowers the spinner table 1 vertically between the loading/unloading position and the cleaning position. The loading/unloading position is the position of the spinner table 1 where the frame units 200-1, 200-2 are loaded onto the holding surface 12 of the spinner table 1 and where the frame units 200-1, 200-2 are unloaded from the holding surface 12. The cleaning position is the position of the spinner table 1 where the workpieces 201-1, 201-2 of the frame units 200-1, 200-2 held by suction on the holding surface 12 of the spinner table 1 are cleaned.

The case 104 is formed in a cylindrical shape that houses the spinner table 1 and is open at the top. The case 104 has a through hole 111 in the center of the bottom plate 110 through which the rotating shaft 101 passes inside, and an erected wall 112 erects from the inner edge of the through hole 111. The case 104 has a drain port 113 in the bottom plate 110 for draining used cleaning liquid. A drain duct 114 is connected to the drain port 113. The case 104 drains used cleaning liquid to the outside via the drain port 113 and the drain duct 114.

The cover member 105 is attached to the center of the axis of the rotating shaft 101, and has a flat surface formed along the horizontal direction. The cover member 105 is attached to the outer peripheral surface of the rotating shaft 101 and moves up and down along the vertical direction together with the spinner table 1. When the spinner table 1 is positioned at the cleaning position, the cover member 105 blocks the through hole 111, preventing the cleaning liquid from leaking out of the case 104 through the through hole 111.

The cleaning nozzle 106 supplies cleaning liquid to the workpieces 201-1, 201-2 of the frame units 200-1, 200-2 held on the spinner table 1. The cleaning nozzle 106 is attached to the outer edge of the case 104 so that its base end can swing freely around an axis parallel to the vertical direction, and supplies cleaning liquid from its tip to the workpieces 201-1, 201-2 of the frame units 200-1, 200-2 held on the spinner table 41. While swinging around its base end, the cleaning nozzle 106 supplies cleaning liquid to the workpieces 201-1, 201-2 of the frame units 200-1, 200-2 held on the spinner table 1, thereby cleaning the workpieces 201-1, 201-2.

The air nozzle 107 supplies air (pressurized gas) to the workpieces 201-1, 201-2 of the frame units 200-1, 200-2 held on the spinner table 1. The base end of the air nozzle 107 is attached to the outer edge of the case 104 so as to be freely swingable around an axis parallel to the vertical direction, and supplies air from the tip to the workpieces 201-1, 201-2 of the frame units 200-1, 200-2 held on the spinner table 41. While swinging around the base end, the air nozzle 107 supplies air to the workpieces 201-1, 201-2 of the frame units 200-1, 200-2 held on the spinner table 1, thereby removing cleaning liquid from the workpieces 201-1, 201-2 and drying the workpieces 201-1, 201-2.

(Spinner table)
Next, the spinner table 1 according to the embodiment 1 will be described with reference to the drawings. Fig. 4 is a side view, partially in section, showing a state in which the spinner table of the cleaning apparatus shown in Fig. 1 holds a first frame unit.

As shown in Figures 3 and 4, the spinner table 1 includes a disk-shaped base 2 and a first support portion 10. In the first embodiment, the base 2 is made of a metal such as stainless steel, formed into a disk shape, and attached to the upper end of the rotating shaft 101, arranged coaxially with the rotating shaft 101. In the first embodiment, the outer diameter of the base 2 is larger than the outer diameter 209-1 of the first ring frame 203-1 of the first frame unit 200-1 and is equal to the outer diameter 209-2 of the second ring frame 203-2 of the second frame unit 200-2.

The first support 10 is formed in a disk shape, fixed to the central region of the upper surface of the base 2, and arranged coaxially with the base 2. In the first embodiment, the outer diameter of the first support 10 is smaller than the outer diameter 209-1 of the first ring frame 203-1 of the first frame unit 200-1, and is larger than the outer diameter of the workpiece 201-1. The first support 10 includes a disk-shaped suction-holding part 11 made of a porous material such as porous ceramics, and a frame 13 made of stainless steel or the like that surrounds the entire circumference of the holding surface 12, which is the upper surface of the suction-holding part 11. The frame 13 includes a recess 14 that is formed concave from the upper surface and into which the suction-holding part 11 is fitted. When the suction-holding part 11 is fitted in the recess 14, the holding surface 12 of the suction-holding part 11 and the upper surface of the frame 13 are arranged on the same plane. The suction-holding part 11 is connected to a suction source (not shown).

The first support section 10 has the workpieces 201-1 and 201-2 of the frame units 200-1 and 200-2 placed on the holding surface 12 via the adhesive tape 202, and the suction holding section 11 is sucked by the suction source, thereby suction-holding the workpieces 201-1 and 201-2 of the frame units 200-1 and 200-2 on the holding surface 12 via the adhesive tape 202. The first support section 10 also has a plurality of first pendulum clamps 15 that rotate by centrifugal force when the spinner table 1 rotates around its axis, and are provided on the outer circumferential surface of the frame body 13 at equal intervals in the circumferential direction to clamp and hold the first ring frame 203-1 of the first frame unit 200-1. The base 2 of the spinner table 1 also has a notch 3 formed on the outer edge to allow the first pendulum clamps 15 to rotate by centrifugal force.

When the first support section 10 holds the first frame unit 200-1, it suction-holds the workpiece 201-1 via the adhesive tape 202 of the first frame unit 200-1 on the holding surface 12 of the suction holding section 11, and clamps the first ring frame 203-1 with the first pendulum clamp 15 due to the centrifugal force of rotation around the axis of the spinner table 1.

(Second frame unit support member)
Next, the second frame unit support member 20 attached to the spinner table 1 will be described with reference to the drawings. FIG. 5 is a plan view showing the second frame unit support member attached to the spinner table shown in FIG. 1. FIG. 6 is a cross-sectional view taken along the line VI-VI in FIG. 5. FIG. 7 is a perspective view showing a state in which the second frame unit support member is attached to the spinner table of the cleaning device shown in FIG. 1. FIG. 8 is a side view showing a state in which the second frame unit support member is attached to the spinner table of the cleaning device shown in FIG. 1, with a partial cross section. FIG. 9 is a side view showing a state in which the second frame unit support member is attached to the spinner table of the cleaning device shown in FIG. 1, with a partial cross section. FIG. 10 is a side view showing a state in which the spinner table of the cleaning device shown in FIG. 1 holds the second frame unit, with a partial cross section.

When the second frame unit 200-2 is held by suction on the spinner table 1 configured as described above, the second frame unit support member 20 shown in Figs. 5 and 6 is attached. The second frame unit support member 20 is detachable from the spinner table 1 and is attached to the spinner table 1 and is used to hold by suction on the suction holding section 11 the second frame unit 200-2, in which the workpiece 201-2 is supported by the second ring frame 203-2 via the adhesive tape 202.

As shown in Figures 5 and 6, the second frame unit support member 20 comprises a ring-shaped support member body 21, an opening 22, and a plurality of second pendulum clamps 23. The support member body 21 is made of a metal such as stainless steel, and has an inner diameter equal to the outer diameter of the first support part 10 and an outer diameter equal to the outer diameter of the base 2, i.e., it is larger than the outer diameter 209-1 of the first ring frame 203-1 and equal to the outer diameter 209-2 of the second ring frame 203-2. In addition, in the first embodiment, the support member body 21 has a thickness equal to the thickness of the first support part 10.

The opening 22 is a hole provided in the center of the support member main body 21, into which the first support part 10 can be inserted. The second frame unit support member 20 is fixed onto the base 2 with the first support part 10 inserted into the opening 22. In the first embodiment, the second frame unit support member 20 is fixed to the base 2 by bolts (not shown), exposing the holding surface 12 of the suction holding part 11 to the inner circumference of the opening 22. For this reason, the second frame unit support member 20 with the first support part 10 inserted into the opening 22 can be attached to the base 2.

The second pendulum clamps 23 are provided at equal intervals in the circumferential direction on the outer peripheral surface of the support member body 21, and rotate due to centrifugal force when the spinner table 1 to which the second frame unit support member 20 is fixed is rotating, clamping and holding the second ring frame 203-2 of the second frame unit 200-2.

As shown in Figures 5, 6, 7, 8 and 9, the second frame unit support member 20 is formed with a countersunk portion 24. The countersunk portion 24 is formed in the area surrounding the opening 22 of the second frame unit support member 20 to accommodate the first pendulum clamp 15 of the first support part 10 so that the first pendulum clamp 15 on the outer periphery of the first support part 10 does not interfere with the opening 22 of the second frame unit support member 20 when the first support part 10 is inserted into the opening 22 of the second frame unit support member 20 for attachment.

The countersunk portion 24 is formed as a recess in the surface of the support member body 21 of the second frame unit support member 20 that is placed on the base 2, and is formed in a position that faces the first pendulum clamp 15 when the second frame unit support member 20 is attached to the spinner table 1. In the first embodiment, the countersunk portion 24 is connected to the opening 22. The countersunk portion 24 is formed in the area surrounding the opening 22 of the second frame unit support member 20 by communicating with the opening 22. The countersunk portion 24 corresponds one-to-one with the first pendulum clamp 15, and is formed to a size that can accommodate the corresponding first pendulum clamp 15 when the support member body 21 is placed on the base 2.

When the spinner table 1 holds the second frame unit 200-2, as shown in Figures 9 and 10, the first pendulum clamp 15 is housed in the countersunk portion 24, the support member body 21 is placed on the base 2, and the support member body 21 is fixed to the base 2 with bolts or the like to attach the second frame unit support member 20 to the spinner table 1. When the second frame unit support member 20 is attached to the spinner table 1, the holding surface 12 of the suction holding portion 11 is exposed to the inner periphery of the opening 22, and the upper surface of the support member body 21 is positioned on the same plane as the holding surface 12.

When the spinner table 1 holds the second frame unit 200-2, the second frame unit support member 20 is attached, and the workpiece 201-2 is suction-held by the holding surface 12 of the suction holding part 11 via the adhesive tape 202 of the second frame unit 200-2, and the second ring frame 203-2 is clamped by the second pendulum clamp 23 by the centrifugal force of rotation around the axis of the spinner table 1. In this way, the first support part 10 of the spinner table 1 has an opening 22 in the center into which the first support part 10 is inserted, and a plurality of second pendulum clamps 23 that hold the second frame unit 200-2 by the centrifugal force when the spinner table 1 is rotating, and is inserted into the opening 22 of the ring-shaped second frame unit support member 20 fixed to the base 2, exposing the suction holding part 11.

The cleaning device 100 having the above-described configuration is installed independently of various processing devices, such as a cutting device that cuts the workpieces 201-1 and 201-2 and a laser processing device that performs ablation processing. However, in the present invention, the cleaning device 100 may be incorporated into various processing devices, such as a cutting device that cuts the workpieces 201-1 and 201-2 and a laser processing device that performs ablation processing.

When the cleaning device 100 having the above-mentioned configuration holds the first frame unit 200-1 by suction and cleans the workpiece 201-1, the second frame unit support member 20 is removed from the base 2, and the workpiece 201-1 is placed on the holding surface 12 of the suction holding section 11 positioned at the carry-in/out position via the adhesive tape 202 of the first frame unit 200-1, and the workpiece 201-1 of the first frame unit 200-1 is suction-held on the holding surface 12 of the suction holding section 11. When the first frame unit 200-1 is placed on the holding surface 12 and held by suction, the cleaning device 100 positions the spinner table 1 at the cleaning position, and supplies cleaning liquid from the tip of the cleaning nozzle 106, which is oscillated while rotating the spinner table 1 around its axis by the rotary drive source 102 for a predetermined time, to clean the workpiece 201-1 of the first frame unit 200-1.

After cleaning the workpiece 201-1 of the first frame unit 200-1, the cleaning device 100 dries the workpiece 201-1 of the first frame unit 200-1 by supplying air from the tip of the air nozzle 107, which is oscillated while rotating the spinner table 1 about its axis by the rotary drive source 102, without supplying any cleaning liquid for a predetermined time. After drying the workpiece 201-1, the cleaning device 100 positions the spinner table 1 at the carry-in/out position, stops suction holding of the workpiece 201-1, and carries out the first frame unit 200-1 with the cleaned and dried workpiece 201-1.

When the cleaning device 100 holds the second frame unit 200-2 by suction and cleans the workpiece 201-2, the second frame unit support member 20 is attached to the base 2 of the spinner table 1, and the workpiece 201-2 is placed on the holding surface 12 of the suction holding section 11 positioned at the carry-in/out position via the adhesive tape 202 of the second frame unit 200-2, and the workpiece 201-2 of the second frame unit 200-1 is suction-held on the holding surface 12 of the suction holding section 11. When the second frame unit 200-2 is placed on the holding surface 12 and held by suction, the cleaning device 100 positions the spinner table 1 at the cleaning position, and supplies cleaning liquid from the tip of the cleaning nozzle 106, which is oscillated while rotating the spinner table 1 around its axis by the rotary drive source 102 for a predetermined time, to clean the workpiece 201-2 of the second frame unit 200-2.

After cleaning the workpiece 201-2 of the second frame unit 200-2, the cleaning device 100 supplies air from the tip of the air nozzle 107, which is oscillated while rotating the spinner table 1 around its axis by the rotary drive source 102, for a predetermined time without supplying cleaning liquid, to dry the workpiece 201-2 of the second frame unit 200-2. After drying the workpiece 201-2, the cleaning device 100 positions the spinner table 1 at the loading/unloading position, stops suction holding of the workpiece 201-2, and unloads the second frame unit 200-2 with the cleaned and dried workpiece 201-2. When the spinner table 1 is moved between the loading/unloading position and the cleaning position, the cleaning device 100 retracts the tips of the nozzles 106 and 107 from above the spinner table 1.

As described above, in the spinner table 1 and second frame unit support member 20 according to the first embodiment, the first support portion 10 can be inserted into the opening 22 of the second frame unit support member 20. Therefore, when holding the first frame unit 200-1, the second frame unit support member 20 is removed and the first frame unit 200-1 is held by the suction holding portion 11 of the first support portion 10. When holding the second frame unit 200-2, the first support portion 10 is inserted into the opening 22 of the second frame unit support member 20 to expose the suction holding portion 11, and the second frame unit support member 20 is attached to the base 2 and held by the suction holding portion 11.

For this reason, the spinner table 1 and second frame unit support member 20 according to the first embodiment can hold frame units 200-1, 200-2 equipped with ring frames 203-1, 203-2 having different outer diameters 209-1, 209-2 depending on whether or not the second frame unit support member 20 is attached. For this reason, the spinner table 1 and second frame unit support member 20 according to the first embodiment do not require replacement of the spinner table 1 every time the outer diameter of the workpieces 201-1, 201-2 to be cleaned is changed.

As a result, the spinner table 1 and second frame unit support member 20 according to the first embodiment have the advantage of being able to reduce the complexity of the work required to accommodate changes in the outer diameter of the workpieces 201-1 and 201-2 to be cleaned.

In addition, in the spinner table 1 and second frame unit support member 20 according to the first embodiment, the second frame unit support member 20 has a countersunk portion 24 that accommodates the first pendulum clamp 15 of the first support portion 10, so that the same suction holding portion 11 can hold the frame units 200-1 and 200-2 that have ring frames 203-1 and 203-2 with different outer diameters 209-1 and 209-2.

The present invention is not limited to the above embodiment. In other words, various modifications can be made without departing from the gist of the present invention. For example, in the present invention, the spinner table 1 may include a second frame unit support member 20.

REFERENCE SIGNS LIST 1 spinner table 2 base 10 first support portion 11 suction holding portion 15 first pendulum clamp 20 second frame unit support member 22 opening 23 second pendulum clamp 24 counterbore portion 200-1 first frame unit 200-2 second frame unit 201, 201-1, 201-2 workpiece 202 adhesive tape 203-1 first ring frame 203-2 second ring frame 209-1 outer diameter (first outer diameter)
209-2 Outer diameter (second outer diameter)

Claims (3)

a spinner table capable of rotating while holding a first frame unit in which a workpiece is supported by a first ring frame having a first outer diameter via an adhesive tape, or a second frame unit in which a workpiece is supported by a second ring frame having a second outer diameter larger than the first outer diameter of the first ring frame via an adhesive tape,
A disk-shaped base and
a disk-shaped first support portion that is fixed to a central region of an upper surface of the disk-shaped base and has a suction holding portion that suction-holds the workpiece via the adhesive tape, and has a plurality of first pendulum clamps that are equally spaced in the circumferential direction on its outer periphery and that hold a first frame unit by centrifugal force when the spinner table is rotating;
The first support portion is inserted into a central opening of a ring-shaped second frame unit support member having a plurality of second pendulum clamps at equal intervals in a circumferential direction on its outer periphery for holding the second frame unit by centrifugal force when the spinner table is rotating, and is capable of exposing the suction holder,
the base is capable of mounting the second frame unit support member with the first support portion inserted into the opening,
When holding the first frame unit, the second frame unit support member is removed from the base, and the first frame unit is held by the suction holding portion of the first support portion;
When the second frame unit is to be held, the second frame unit support member is attached to the base, and the second frame unit is held by the suction holding portion.
Spinner table. a countersunk portion for accommodating the first pendulum clamp of the first support portion is formed in the opening region of the second frame unit support member so that the first pendulum clamp on the outer periphery of the first support portion does not interfere with the opening of the second frame unit support member when the first support portion is inserted into the opening of the second frame unit support member and attached;
2. The spinner table according to claim 1. A disk-shaped base and
a disk-shaped first support portion that is fixed to a central region of an upper surface of the disk-shaped base and that holds a first frame unit, in which a workpiece is supported by a first ring frame having a first outer diameter via an adhesive tape, on a suction holding portion that suction-holds the workpiece via the adhesive tape;
It can be attached and detached freely to the spinner table equipped with
and a second frame unit support member for holding, on the suction holder, a second frame unit supported by a second ring frame having a second outer diameter larger than the first outer diameter of the first ring frame via an adhesive tape,
an opening in the center into which the first support portion can be inserted;
a plurality of second pendulum clamps provided at equal intervals in the circumferential direction on the outer periphery and configured to hold the second frame unit by centrifugal force generated when the spinner table is rotating;
The first support part is inserted into the opening to expose the suction-holding part, and is attached to the base.
A second frame unit support member.

Images