JP2024066688A - 収差推定方法、収差推定装置、演算装置、プログラム、および記憶媒体 - Google Patents

収差推定方法、収差推定装置、演算装置、プログラム、および記憶媒体 Download PDF

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JP2024066688A
JP2024066688A JP2022176264A JP2022176264A JP2024066688A JP 2024066688 A JP2024066688 A JP 2024066688A JP 2022176264 A JP2022176264 A JP 2022176264A JP 2022176264 A JP2022176264 A JP 2022176264A JP 2024066688 A JP2024066688 A JP 2024066688A
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light intensity
aberration
intensity distributions
optical system
test optical
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JP2024066688A5 (https=
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輝 江口
Akira Eguchi
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Canon Inc
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Canon Inc
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JP2022176264A 2022-11-02 2022-11-02 収差推定方法、収差推定装置、演算装置、プログラム、および記憶媒体 Pending JP2024066688A (ja)

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JP2022176264A JP2024066688A (ja) 2022-11-02 2022-11-02 収差推定方法、収差推定装置、演算装置、プログラム、および記憶媒体

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JP2024066688A true JP2024066688A (ja) 2024-05-16
JP2024066688A5 JP2024066688A5 (https=) 2025-11-06

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