JP2024062583A - How to fasten the seat - Google Patents

Abstract

[Problem] To provide a method for fixing a sheet that can improve the fixing strength of the sheet. [Solution] This method for fixing a sheet that does not have an adhesive layer to a workpiece includes an ultraviolet irradiation step 1001 in which ultraviolet rays are irradiated onto at least one of the fixing surface of the sheet or the fixing surface of the workpiece to modify it to a state with high adhesion, and a fixing step 1002 in which, after the ultraviolet irradiation step 1001, the workpiece and the sheet are brought into close contact with each other and fixed by applying heat. [Selected Figure] Figure 1

Description

The present invention relates to a method for fixing a sheet.

After attaching a sheet with an adhesive layer to a workpiece with a device formed on its surface, there is a risk that residues of the adhesive layer will remain on the device when the workpiece is processed, cleaned, inspected, transported, or otherwise treated before being peeled off. As an alternative, a method has been proposed in which a sheet without an adhesive layer is fixed to the workpiece (see, for example, Patent Documents 1 and 2).

JP 2019-201016 A JP 2019-201049 A

However, if the sheet is not firmly attached to the workpiece, there is a risk that the sheet will peel off from the workpiece when the workpiece is processed, washed, inspected, transported, etc. Also, when the workpiece is fixed to an opening in a frame using the sheet, there is also the problem of the sheet peeling off from the frame.

The present invention was made in consideration of these problems, and its purpose is to provide a sheet fixing method that can improve the sheet fixing force.

In order to solve the above-mentioned problems and achieve the object, the sheet fixing method of the present invention is a method for fixing a sheet without an adhesive layer to a workpiece, and is characterized by comprising an ultraviolet irradiation step of irradiating ultraviolet light onto at least one of the fixing surface of the sheet or the fixing surface of the workpiece, and a fixing step of bringing the workpiece and the sheet into close contact with each other and applying heat to fix them after the ultraviolet irradiation step is performed.

In order to solve the above-mentioned problems and achieve the object, the sheet fixing method of the present invention is a method for fixing a sheet without an adhesive layer to a workpiece, and is characterized by comprising an ultraviolet irradiation step of irradiating ultraviolet light onto at least one of the fixing surface of the sheet, the fixing surface of the workpiece, or the fixing surface of a frame having an opening in the center, and a fixing step of positioning the workpiece in the opening of the frame and applying heat to fix the sheet to the workpiece and the frame after the ultraviolet irradiation step is performed.

The ultraviolet irradiation step may involve partially irradiating ultraviolet light onto at least one of the workpiece or the sheet.

The ultraviolet irradiation step may involve partially irradiating ultraviolet light onto at least one of the workpiece, the sheet, or the frame.

In the present invention, in the ultraviolet irradiation step, the fixing surface of the sheet or the fixing surface of the workpiece is modified to a state with high adhesion to the workpiece or sheet by irradiation with ultraviolet light, so by performing the fixing step after the ultraviolet irradiation step, the modified fixing surface of the sheet or the fixing surface of the workpiece adheres closely to the fixing surface of the workpiece or the fixing surface of the sheet, respectively, and the adhesion between the fixing surface of the sheet and the fixing surface of the workpiece is increased, thereby improving the fixing force of the sheet to the workpiece.

FIG. 1 is a flowchart showing a processing procedure of a sheet fixing method according to the first embodiment. FIG. 2 is a perspective view showing an example of a sheet and a workpiece to which the sheet is fixed in the sheet fixing method according to the first embodiment. FIG. 3 is a cross-sectional view for explaining the ultraviolet ray irradiation step in FIG. FIG. 4 is a cross-sectional view illustrating a first example of the fixing step of FIG. FIG. 5 is a cross-sectional view illustrating a second example of the fixing step of FIG. FIG. 6 is a cross-sectional view illustrating a third example of the fixing step of FIG. FIG. 7 is a cross-sectional view illustrating a fourth example of the fixing step of FIG. FIG. 8 is a cross-sectional view illustrating a fifth example of the fixing step of FIG. FIG. 9 is a cross-sectional view illustrating a fifth example of the fixing step of FIG. FIG. 10 is a cross-sectional view illustrating the redundant region cutting process. FIG. 11 is a cross-sectional view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the first modified example. FIG. 12 is a plan view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the second modified example. FIG. 13 is a cross-sectional view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the second modification. FIG. 14 is a plan view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the third modified example. FIG. 15 is a cross-sectional view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the third modified example. FIG. 16 is a perspective view showing an example of a seat, a workpiece to which the seat is fixed, and a frame in a seat fixing method according to the second embodiment. FIG. 17 is a cross-sectional view illustrating a fixing step of the sheet fixing method according to the second embodiment. FIG. 18 is a plan view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the fourth modified example. FIG. 19 is a plan view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the fifth modified example. FIG. 20 is a plan view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the sixth modified example. FIG. 21 is a cross-sectional view illustrating an ultraviolet ray irradiation step in the sheet fixing method according to the sixth modified example.

The following describes in detail the form (embodiment) for carrying out the present invention with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. The components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Various omissions, substitutions, or modifications of the configuration can be made without departing from the spirit of the present invention.

[Embodiment 1]
A sheet fixing method according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a flowchart showing a processing procedure of the sheet fixing method according to the first embodiment. Fig. 2 is a perspective view showing an example of a sheet 100 and a workpiece 1 to which the sheet 100 is fixed in the sheet fixing method according to the first embodiment. As shown in Fig. 2, the sheet fixing method according to the first embodiment is a method of fixing the sheet 100 to one surface of the workpiece 1, and includes an ultraviolet ray irradiation step 1001 and a fixing step 1002 as shown in Fig. 1.

In the first embodiment, the work 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, sapphire, gallium arsenide, SiC, GaN, LT (lithium tantalate), or single crystal diamond. In the first embodiment, as shown in FIG. 2, the work 1 has a surface 2, and chip-shaped devices 4 are formed in each region defined by a plurality of planned division lines 3 that intersect with each other (in this embodiment, they are perpendicular). The work 1 is divided along each planned division line 3 and divided into individual devices 4 (chips). In the first embodiment, the surface 2 of the work 1 is divided into a device region 6 having a roughly circular shape in which the device 4 is formed, and an outer peripheral excess region 7 having a roughly annular shape in which the device 4 is not formed and which surrounds the device region 6. Note that the work 1 is not limited to this in the present invention, and may or may not have a device 4 formed thereon. Also, the work 1 is not limited to a disk shape in the present invention, and may be a plate-like shape such as a resin package substrate or a metal substrate.

The sheet 100 does not have a glue layer. The sheet 100 does not have a glue layer, and is made of a synthetic resin that does not harden when exposed to ultraviolet light, formed into a sheet of a certain thickness. In other words, the sheet 100 does not contain ultraviolet-curable resin that hardens when exposed to ultraviolet light. Note that not containing ultraviolet-curable resin means that the ultraviolet-curable resin component is contained in an amount below the detection limit of known detection means. In the first embodiment, the sheet 100 is formed into a size and shape that covers the entire surface of the workpiece 1 in the planar direction, and may be formed into a sheet of the same size and shape as the planar shape of the workpiece 1.

The synthetic resin constituting the sheet 100 may be composed of one type of synthetic resin component, or may be composed of a mixture of two or more types of synthetic resin components. The synthetic resin constituting the sheet 100 is preferably composed of a thermoplastic resin that softens and becomes sticky when heat is applied, and is more preferably composed of a thermoplastic resin. The thermoplastic resin constituting the sheet 100 is preferably, for example, a polyolefin sheet, a polyethylene sheet, a polypropylene sheet, or a polystyrene sheet.

The method of fixing the sheet according to the first embodiment is a method of fixing the sheet 100 to the front surface 2 of the workpiece 1 as shown in FIG. 2, but the present invention is not limited to this, and the sheet 100 may be fixed to the back surface 5 behind the front surface 2 of the workpiece 1. Hereinafter, the surface of the sheet 100 fixed to the workpiece 1 is referred to as the fixing surface 109 of the sheet 100 (see FIG. 3, etc.), and the surface of the workpiece 1 to which the sheet 100 is fixed is referred to as the fixing surface 9 of the workpiece 1 (see FIG. 4, etc.).

Figure 3 is a cross-sectional view illustrating the ultraviolet irradiation step 1001 in Figure 1. In the sheet fixing method according to the first embodiment, the ultraviolet irradiation step 1001 is a step of irradiating the fixed surface 109 of the sheet 100 with ultraviolet rays. In the first embodiment, the ultraviolet irradiation step 1001 is performed using the ultraviolet irradiation device 10 shown in Figure 3. Specifically, as shown in Figure 3, in the ultraviolet irradiation step 1001, the sheet 100 is held by the holding table 11 of the ultraviolet irradiation device 10 from the side opposite to the fixed surface 109 with the fixed surface 109 facing upward, and the irradiator 12 of the ultraviolet irradiation device 10 is lowered from above to approach the fixed surface 109 of the sheet 100 on the holding table 11, and then the irradiator 12 irradiates ultraviolet rays from above over the entire fixed surface 109 of the sheet 100 on the holding table 11.

The ultraviolet irradiation step 1001 includes a first ultraviolet irradiation step and a second ultraviolet irradiation step. The first ultraviolet irradiation step is a step of irradiating the first ultraviolet light having a wavelength that decomposes oxygen molecules in the air and also decomposes chemical bonds (covalent bonds) of the synthetic resin components on the fixing surface 109 of the sheet 100. By carrying out the first ultraviolet irradiation step, oxygen molecules in the air are decomposed to generate oxygen atoms, and the generated oxygen atoms combine with the oxygen molecules to generate ozone. In addition, by carrying out the first ultraviolet irradiation step, chemical bonds (covalent bonds) between, for example, C-H of the synthetic resin components on the fixing surface 109 of the sheet 100 are decomposed, making the fixing surface 109 of the sheet 100 chemically unstable. In the first embodiment, the first ultraviolet light is, for example, ultraviolet light having a wavelength of 184.9 nm.

The second ultraviolet irradiation step is a step of irradiating the second ultraviolet light having a wavelength that decomposes the ozone generated in the first ultraviolet irradiation step to generate excited active oxygen. By carrying out the second ultraviolet irradiation step, the ozone generated in the first ultraviolet irradiation step is decomposed to generate excited active oxygen, and the generated active oxygen bonds with the surface of the fixing surface 109 of the sheet 100 that has been chemically destabilized in the first ultraviolet irradiation step, thereby forming functional groups such as OH groups, CHO groups, and COOH groups on the surface of the fixing surface 109 of the sheet 100. As a result, the surface of the fixing surface 109 of the sheet 100 has functional groups such as OH groups, CHO groups, and COOH groups, and is modified to a state with high adhesion to the workpiece 1. In the first embodiment, the second ultraviolet light is, for example, ultraviolet light having a wavelength of 253.7 nm.

In the ultraviolet irradiation step 1001, the wavelength of the ultraviolet light irradiated by the irradiator 12 is set to the wavelength of the first ultraviolet light to perform the first ultraviolet light irradiation step, and the wavelength of the ultraviolet light irradiated by the irradiator 12 is switched to the wavelength of the second ultraviolet light to perform the second ultraviolet light irradiation step. In the ultraviolet light irradiation step 1001, the first ultraviolet light irradiation step and the second ultraviolet light irradiation step may be performed once each in this order, or the first ultraviolet light irradiation step and the second ultraviolet light irradiation step may be performed multiple times. The irradiator 12 is, for example, an irradiator in which a first ultraviolet light irradiation lamp that irradiates the first ultraviolet light and a second ultraviolet light irradiation lamp that irradiates the second ultraviolet light are alternately arranged, and a state in which the first ultraviolet light is irradiated only from the first ultraviolet light irradiation lamp and a state in which the second ultraviolet light is irradiated only from the second ultraviolet light irradiation lamp are switched.

Figure 4 is a cross-sectional view for explaining a first example of the fixing step 1002 in Figure 1. Figure 5 is a cross-sectional view for explaining a second example of the fixing step 1002 in Figure 1. Figure 6 is a cross-sectional view for explaining a third example of the fixing step 1002 in Figure 1. Figure 7 is a cross-sectional view for explaining a fourth example of the fixing step 1002 in Figure 1. Figure 8 is a cross-sectional view for explaining a fifth example of the fixing step 1002 in Figure 1. Figure 9 is a cross-sectional view for explaining a fifth example of the fixing step 1002 in Figure 1. The fixing step 1002 is a step in which the work 1 and the sheet 100 are brought into close contact with each other and fixed by applying heat after the ultraviolet irradiation step 1001 is performed. In the first embodiment, the fixing step 1002 is performed using the fixing device 20 shown in Figure 4 in the first example, using the fixing device 20-2 shown in Figure 5 in the second example, using the fixing device 30 shown in Figure 6 in the third example, using the fixing device 40 shown in Figure 7 in the fourth example, and using the fixing device 50 shown in Figures 8 and 9 in the fifth example.

In the first example of the fixing step 1002, as shown in FIG. 4, the holding table 21 of the fixing device 20 holds the workpiece 1 from the side opposite the fixed surface 9 with the fixed surface 9 facing upward, and the sheet 100 is placed on the fixed surface 9 of the workpiece 1 so that the fixed surface 109 of the sheet 100 faces the fixed surface 9 of the workpiece 1. Then, the sheet 100 is heated to a predetermined temperature (e.g., 80 to 100°C or higher) from the holding table 21 side through the workpiece 1 by a heating means 22 such as a heater provided in the holding table 21 of the fixing device 20, while the pressing roller 23 of the fixing device 20 is rotated from one end of the workpiece 1 to the other end through the sheet 100, so that the fixed surface 109 of the sheet 100 is brought into close contact with the fixed surface 9 of the workpiece 1, the sheet 100 is fixed to the workpiece 1, and the sheet 100 and the workpiece 1 are integrated.

In the second example of the fixing step 1002, as shown in FIG. 5, the sheet 100 is placed on the fixing surface 9 of the workpiece 1 by the holding table 21 of the fixing device 20-2 in the same manner as in the first example, and then the heated pressure roller 23-2 of the fixing device 20-2 is rotated and moved from one end of the workpiece 1 to the other end via the sheet 100, thereby bringing the fixing surface 109 of the sheet 100 into close contact with the fixing surface 9 of the workpiece 1, fixing the sheet 100 to the workpiece 1, and integrating the sheet 100 and the workpiece 1.

In the third example of the fixing step 1002, as shown in FIG. 6, the sheet 100 is placed on the fixed surface 9 of the workpiece 1 by the holding table 31 of the fixing device 30 in the same manner as in the first and second examples, and then the sheet 100 is heated to a predetermined temperature (e.g., 80 to 100°C or higher) from the holding table 31 side through the workpiece 1 by a heating means 32 such as a heater provided in the holding table 31 of the fixing device 30, while the pressing member 34 having a flat pressing surface 33 of the fixing device 30 presses the sheet 100 against the fixed surface 9 side of the workpiece 1 with a predetermined pressing force (e.g., 0.3 MPa or more) for a predetermined time (e.g., 30 seconds) or more with the pressing member 34, with the pressing surface 33 of the pressing member 34 parallel to the holding surface of the holding table 31, thereby bringing the fixing surface 109 of the sheet 100 into close contact with the fixed surface 9 of the workpiece 1, fixing the sheet 100 to the workpiece 1, and integrating the sheet 100 and the workpiece 1.

In the fourth example of the fixing step 1002, as shown in FIG. 7, the sheet 100 is placed on the fixing surface 9 of the workpiece 1 by the holding table 41 of the fixing device 40 as in the first, second and third examples, and then the sheet 100 is heated by blowing hot air of a predetermined temperature (e.g., 80 to 100°C or higher) from the sheet 100 side by the hot air blowing means 42, such as an industrial dryer, of the fixing device 40, thereby fixing the sheet 100 to the workpiece 1 and integrating the sheet 100 and the workpiece 1 by bringing the fixing surface 109 of the sheet 100 into close contact with the fixing surface 9 of the workpiece 1 without pressing the sheet 100 against the workpiece 1, i.e., under a pressing force of 0 MPa.

In the fifth example of the fixing step 1002, as shown in FIG. 8, first, the workpiece 1 is placed on the support table 52 installed in the lower central area of the vacuum chamber 51 of the fixing device 50 with the fixing surface 9 facing upward. In the fifth example of the fixing step 1002, the fixing surface 109 of the sheet 100 is then faced downward, and the end of the sheet 100 is sandwiched and fixed between the upper cover and the main body that divide the housing forming the vacuum chamber 51 into upper and lower parts. In this way, in the fifth example of the fixing step 1002, the fixing surface 109 of the sheet 100 is arranged to face the fixing surface 9 side of the workpiece 1 on the support table 52 and cover the upper part of the fixing surface 9.

In a fifth example of the fixing step 1002, after the sheet 100 is placed above the workpiece 1, the atmosphere in the vacuum chamber 51 is exhausted and depressurized through the first communication passage 54 provided in the central region above the vacuum chamber 51 and the second communication passage 55 provided outside the support base 52 below the vacuum chamber 51, as shown in Fig. 8. In the fifth example of the fixing step 1002, this depressurization process reduces and prevents air from being trapped between the fixing surface 9 of the workpiece 1 and the fixing surface 109 of the sheet 100. In the fifth example of the fixing step 1002, in the first embodiment, for example, the vacuum chamber 51 is depressurized to about 10 ⁵ Pa to 10 ¹ Pa in absolute pressure by a dry pump, an oil rotary pump, or the like provided in communication with the first communication passage 54 and the second communication passage 55.

In the fifth example of the fixing step 1002, the vacuum chamber 51 is evacuated from the first communication passage 54 and the second communication passage 55 to reduce the pressure, and then the sheet 100, which is in close contact with the workpiece 1 from the support table 52 side, is heated to a predetermined temperature (e.g., 80 to 100°C or higher) by a heating means 53 such as a heater provided in the support table 52 of the fixing device 50, while the air pressure of the main body of the vacuum chamber 51 is maintained as shown in FIG. 9. In this manner, in the fifth example of the fixing step 1002, the air pressure above the sheet 100 is made higher than the air pressure below the sheet 100, so that the fixing surface 109 of the sheet 100 is in close contact with the fixing surface 9 of the workpiece 1 below the sheet 100, as shown in FIG. 9.

In the fifth example of the fixing step 1002, the vertical positional relationship between the sheet 100 and the workpiece 1 may be swapped, and the workpiece 1 may be pressed from above to bring the fixing surface 9 of the workpiece 1 into close contact with the fixing surface 109 of the sheet 100 below the workpiece 1.

In addition, in a fifth example of the fixing step 1002, the support table 52 supporting the workpiece 1 may be raised to bring the fixing surface 9 of the workpiece 1 into close contact with the fixing surface 109 of the sheet 100 above the workpiece 1. In this case, it is preferable that the fixing surface 109 side of the sheet 100 is pressed down from above by the supporting surface of a predetermined supporting member. Also, a heating means similar to the heating means 53 may be provided inside the support table 52 supporting the workpiece 1 and inside the supporting member supporting the fixing surface 109 side of the sheet 100.

In the fixing step 1002, in the first embodiment, the sheet 100 is positioned on the upper side and the workpiece 1 is positioned on the lower side, and the fixing surface 109 of the sheet 100 is brought into close contact with the fixing surface 9 of the workpiece 1, fixing the sheet 100 to the workpiece 1, and integrating the sheet 100 and the workpiece 1; however, the present invention is not limited to this, and the vertical positional relationship between the sheet 100 and the workpiece 1 may be swapped, and the fixing surface 109 of the sheet 100 may be brought into close contact with the fixing surface 9 of the workpiece 1, fixing the sheet 100 to the workpiece 1, and integrating the sheet 100 and the workpiece 1.

The fixing step 1002 may also be an appropriate combination of the first to fifth examples described above, in which the fixing surface 109 of the sheet 100 is brought into close contact with the fixing surface 9 of the workpiece 1, fixing the sheet 100 to the workpiece 1, and integrating the sheet 100 and the workpiece 1.

Figure 10 is a cross-sectional view illustrating an example of the excess area cutting process. In the method of fixing the sheet, if the sheet 100 fixed to the workpiece 1 protrudes beyond the outer edge of the workpiece 1 after the fixing step 1002 is performed, the excess area cutting process may be performed to cut off the excess area 110, which is the protruding portion.

In the excess area removal process, as shown in FIG. 10, the side of the workpiece 1 opposite the fixed surface 9 to which the sheet 100 is fixed is held by the holding table 61 of the excess area processing device 60, and the cutting edge of the cutter 62 of the excess area processing device 60 is caused to cut into the sheet 100 along the outer edge of the workpiece 1 from the side opposite the holding table 61, and the disc 63 holding the cutter 62 is rotated about its axis by a rotary drive source (not shown), thereby rotating the cutter 62 along the outer edge of the workpiece 1 and removing the excess area 110 of the sheet 100 fixed to the workpiece 1.

The sheet fixing method according to embodiment 1 having the above-mentioned configuration has the ultraviolet irradiation step 1001, in which the surface of the fixing surface 109 of the sheet 100 is modified to have a high adhesion to the workpiece 1 by irradiation with ultraviolet light. By performing the fixing step 1002 after performing the ultraviolet irradiation step 1001, the modified surface of the fixing surface 109 of the sheet 100 adheres closely to the fixing surface 9 of the workpiece 1, and the adhesion between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 is increased, thereby achieving the effect of improving the fixing force of the sheet 100 to the workpiece 1.

[Modification 1]
The sheet fixing method according to the modified example 1 of the present invention will be described with reference to the drawings. Fig. 11 is a cross-sectional view for explaining the ultraviolet ray irradiation step 1001 of the sheet fixing method according to the modified example 1. In Fig. 11, the same parts as those in the embodiment 1 are given the same reference numerals, and the description thereof will be omitted.

The method of fixing the sheet according to the modified example 1 is a modification of the ultraviolet ray irradiation step 1001 in the first embodiment. As shown in FIG. 11, the ultraviolet ray irradiation step 1001 in the modified example 1 is a modification of the first embodiment in which ultraviolet rays are irradiated onto the fixing surface 9 of the workpiece 1 instead of the fixing surface 109 of the sheet 100.

The ultraviolet irradiation step 1001 of the first modification is performed using the ultraviolet irradiation device 10 shown in FIG. 11, as in the first embodiment. Specifically, in the ultraviolet irradiation step 1001 of the first modification, as shown in FIG. 11, the workpiece 1 is held by the holding table 11 from the side opposite the fixed surface 9 with the fixed surface 9 facing upward, and the irradiator 12 is lowered from above to approach the fixed surface 9 of the workpiece 1 on the holding table 11, and then the irradiator 12 irradiates the entire fixed surface 9 of the workpiece 1 on the holding table 11 with ultraviolet light from above.

The ultraviolet irradiation step 1001 of the first modification includes a first ultraviolet irradiation step similar to that of the first embodiment, and a second ultraviolet irradiation step similar to that of the first embodiment. By carrying out the first ultraviolet irradiation step of the first modification, the chemical bonds (covalent bonds) between, for example, C-H of the organic components of the foreign matter on the fixing surface 9 of the workpiece 1 are decomposed. By carrying out the second ultraviolet irradiation step of the first modification, the ozone generated in the first ultraviolet irradiation step of the first modification is decomposed to generate excited active oxygen, and the generated active oxygen becomes carbon dioxide or water vapor by bonding with unstable carbon atoms and hydrogen atoms generated by decomposing the organic components of the foreign matter on the fixing surface 9 of the workpiece 1 in the first ultraviolet irradiation step. As a result, the surface of the fixing surface 9 of the workpiece 1 is cleaned by removing the organic components of the foreign matter, and is modified to a state with high adhesion to the sheet 100.

The method of fixing a sheet according to variant 1 having the above-mentioned configuration has the ultraviolet irradiation step 1001, in which the surface of the fixing surface 9 of the workpiece 1 is modified to a state with high adhesion to the sheet 100 by irradiation with ultraviolet light. By performing the fixing step 1002 after the ultraviolet irradiation step 1001, the modified surface of the fixing surface 9 of the workpiece 1 adheres closely to the fixing surface 109 of the sheet 100, and the adhesion between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 is increased, thereby achieving the effect of improving the fixing force of the sheet 100 to the workpiece 1.

In the ultraviolet irradiation step 1001 of the sheet fixing method according to the first embodiment and the first modification, ultraviolet rays are irradiated to at least one of the fixing surface 109 of the sheet 100 or the fixing surface 9 of the workpiece 1. In the present invention, the first embodiment and the first modification may be combined, and ultraviolet rays may be irradiated to both the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 in the ultraviolet irradiation step 1001. When ultraviolet rays are irradiated to both surfaces in this way, the surface of the fixing surface 109 of the sheet 100 is modified to a state with high adhesion to the workpiece 1 by irradiation with ultraviolet rays in the ultraviolet irradiation step 1001, and the surface of the fixing surface 9 of the workpiece 1 is modified to a state with high adhesion to the sheet 100 by irradiation with ultraviolet rays, so that the adhesion between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 is further increased, and the fixing force of the sheet 100 to the workpiece 1 can be further improved.

[Modification 2]
The sheet fixing method according to the second modified example of the present invention will be described with reference to the drawings. Fig. 12 is a plan view for explaining the ultraviolet ray irradiation step 1001 of the sheet fixing method according to the second modified example. Fig. 13 is a cross-sectional view for explaining the ultraviolet ray irradiation step 1001 of the sheet fixing method according to the second modified example. In Figs. 12 and 13, the same reference numerals are used for the same parts as those in the first embodiment, and the description thereof will be omitted.

The method of fixing the sheet according to the second modification is a modification of the ultraviolet irradiation step 1001 in the first embodiment. The ultraviolet irradiation step 1001 in the second modification is a modification in which, instead of irradiating the entire surface of the fixing surface 109 of the sheet 100 with ultraviolet rays as shown in FIG. 12(A) in the first embodiment, ultraviolet rays are irradiated only partially, that is, a part of the fixing surface 109 of the sheet 100, as shown in FIG. 12(B) and FIG. 12(C) to modify the surface to have a high adhesion to the workpiece 1. In the first example of the ultraviolet irradiation step 1001 in the second modification, as shown in FIG. 12(B), ultraviolet rays are irradiated to a portion of the fixing surface 109 of the sheet 100 that corresponds to the peripheral excess area 7 of the fixing surface 9 of the workpiece 1 to be fixed (irradiation area 101-2 shown in FIG. 12(B)) to modify the surface to have a high adhesion to the workpiece 1. In a second example of the ultraviolet ray irradiation step 1001 of the second modification, as shown in FIG. 12(C), ultraviolet rays are irradiated onto the fixing surface 109 of the sheet 100, which corresponds to the remaining area (including the peripheral excess area 7 as well as the planned division line 3 in the device area 6) excluding the area where the device 4 is provided on the fixing surface 9 of the workpiece 1 to be fixed (irradiation area 101-3 shown in FIG. 12(C)), thereby modifying the sheet 1 to have a high adhesion to the workpiece 1.

13, in the ultraviolet irradiation step 1001 of the second modification, the sheet 100 is held by the holding table 11 from the side opposite the fixed surface 109 with the fixed surface 109 facing upward, the mask member 13 of the ultraviolet irradiation device 10 is placed above the fixed surface 109 of the sheet 100, the irradiator 12 is lowered from above to approach the mask member 13, and then the irradiator 12 irradiates ultraviolet light from above the fixed surface 109 of the sheet 100 on the holding table 11 through the mask member 13. Here, the mask member 13 is formed in a plate shape from a material that blocks the ultraviolet light irradiated by the irradiator 12, and an opening 14 that allows ultraviolet light to pass through is formed in a portion of the fixed surface 109 of the sheet 100 that corresponds to the area (irradiation areas 101-2, 101-3) to be irradiated with ultraviolet light. As a result, in the ultraviolet ray irradiation step 1001 of the second modified example, ultraviolet rays are selectively irradiated to the portions of the fixed surface 109 of the sheet 100 that correspond to the openings 14 formed in the mask member 13, for example, the irradiation areas 101-2 and 101-3.

In a first example of the ultraviolet irradiation step 1001 of the second modification, a mask member 13 is provided in which an opening 14 is formed corresponding to the irradiation area 101-2 of the fixed surface 109 of the sheet 100. In a second example of the ultraviolet irradiation step 1001 of the second modification, a mask member 13 is provided in which an opening 14 is formed corresponding to the portion of the fixed surface 109 of the sheet 100 that corresponds to the irradiation area 101-3.

The fixing method of the sheet according to the modified example 2 having the above-mentioned configuration has the following effect: in the ultraviolet irradiation step 1001, ultraviolet light is irradiated to the irradiation areas 101-2, 101-3 of the surface of the fixing surface 109 of the sheet 100 through the mask member 13, thereby modifying the relevant portion to a state with high adhesion to the workpiece 1; therefore, by performing the fixing step 1002 after performing the ultraviolet irradiation step 1001, the relevant portion of the modified surface of the fixing surface 109 of the sheet 100 adheres to the fixing surface 9 of the workpiece 1, and the adhesion between the relevant portion of the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 is increased, thereby improving the fixing force of the sheet 100 to the workpiece 1.

In addition, the method of fixing the sheet according to the second modification can easily change the portion where the adhesive force between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 is increased by changing the portion where the opening 14 is formed in the mask member 13. In addition, the method of fixing the sheet according to the second modification can selectively avoid the sheet 100 from adhering strongly to the device 4 by, for example, setting the portion corresponding to the peripheral excess area 7 of the fixing surface 9 of the workpiece 1 as the portion in question as in the first example, or setting the portion corresponding to the other area of the fixing surface 9 of the workpiece 1 excluding the area where the device 4 is provided as in the second example.

[Modification 3]
A sheet fixing method according to Modification 3 of the present invention will be described with reference to the drawings. Fig. 14 is a plan view for explaining ultraviolet ray irradiation step 1001 of the sheet fixing method according to Modification 3. Fig. 15 is a cross-sectional view for explaining ultraviolet ray irradiation step 1001 of the sheet fixing method according to Modification 3. In Figs. 14 and 15, the same parts as those in the first embodiment and Modifications 1 and 2 are denoted by the same reference numerals, and the description thereof will be omitted.

The method of fixing the sheet according to the modified example 3 is a modification of the ultraviolet irradiation step 1001 in the modified example 1. The ultraviolet irradiation step 1001 in the modified example 3 is a modification in which, instead of irradiating the entire surface of the fixing surface 9 of the workpiece 1 with ultraviolet rays as shown in FIG. 14(A) in the modified example 1, ultraviolet rays are irradiated partially to the fixing surface 9 of the workpiece 1, that is, a part of the fixing surface 9 of the workpiece 1, as shown in FIG. 14(B) and FIG. 14(C) to modify the surface to have a high adhesion to the sheet 100. In the first example of the ultraviolet irradiation step 1001 in the modified example 3, as shown in FIG. 14(B), ultraviolet rays are irradiated to the peripheral excess area 7 of the fixing surface 9 of the workpiece 1 to modify the surface to have a high adhesion to the sheet 100. In the second example of the ultraviolet irradiation step 1001 in the modified example 3, as shown in FIG. 14(C), ultraviolet rays are irradiated to the other areas of the fixing surface 9 of the workpiece 1 except the area where the device 4 is provided, to modify the surface to have a high adhesion to the sheet 100.

Specifically, in the ultraviolet irradiation step 1001 of the modified example 3, as shown in FIG. 15, the holding table 11 of the ultraviolet irradiation device 10 holds the workpiece 1 from the side opposite to the fixed surface 9 with the fixed surface 9 facing upward, and the mask member 13 is placed above the fixed surface 9 of the workpiece 1. The irradiator 12 is lowered from above to approach the mask member 13, and then the irradiator 12 irradiates ultraviolet rays from above the fixed surface 9 of the workpiece 1 on the holding table 11 through the mask member 13. Here, the mask member 13 is formed in a plate shape from a material that blocks the ultraviolet rays irradiated by the irradiator 12, and an opening 14 that allows ultraviolet rays to pass is formed in a portion of the fixed surface 9 of the workpiece 1 corresponding to the area to be irradiated with ultraviolet rays. As a result, in the ultraviolet irradiation step 1001 of the modified example 3, ultraviolet rays are selectively irradiated to the portion of the fixed surface 9 of the workpiece 1 corresponding to the opening 14 formed in the mask member 13.

In a first example of the ultraviolet irradiation step 1001 of the modified example 3, a mask member 13 is provided in which an opening 14 is formed corresponding to the peripheral excess area 7 of the fixing surface 9 of the workpiece 1. In a second example of the ultraviolet irradiation step 1001 of the modified example 3, a mask member 13 is provided in which an opening 14 is formed corresponding to the remaining area of the fixing surface 9 of the workpiece 1 except for the area where the device 4 is provided.

In the method of fixing a sheet according to the modified example 3 having the above-mentioned configuration, in the ultraviolet irradiation step 1001, the surface of the fixing surface 9 of the workpiece 1 is partially irradiated with ultraviolet light through the mask member 13, thereby modifying the portion to have a high adhesion to the sheet 100. By performing the fixing step 1002 after the ultraviolet irradiation step 1001, the portion of the modified surface of the fixing surface 9 of the workpiece 1 adheres closely to the fixing surface 109 of the sheet 100, and the adhesion between the portion of the fixing surface 9 of the workpiece 1 and the fixing surface 109 of the sheet 100 is increased, thereby achieving the effect of improving the fixing force of the sheet 100 to the workpiece 1.

In addition, the method of fixing the sheet according to the third modification can easily change the portion where the adhesive force between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 is increased by changing the portion where the opening 14 is formed in the mask member 13. In addition, the method of fixing the sheet according to the second modification can selectively avoid the sheet 100 from being strongly adhesive to the device 4 by, for example, using the peripheral excess area 7 of the fixing surface 9 of the workpiece 1 as the portion in question as in the first example, or using the other area of the fixing surface 9 of the workpiece 1 excluding the area where the device 4 is provided as the portion in question as in the second example.

In the ultraviolet irradiation step 1001 of the sheet fixing method according to the modified examples 2 and 3, ultraviolet rays are partially irradiated to at least one of the fixing surface 109 of the sheet 100 or the fixing surface 9 of the workpiece 1. In the present invention, the modified examples 2 and 3 may be combined, and ultraviolet rays may be partially irradiated to both the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 in the ultraviolet irradiation step 1001. When ultraviolet rays are partially irradiated to both surfaces in this manner, in the ultraviolet irradiation step 1001, the surface of the fixing surface 109 of the sheet 100 is partially modified to a state with high adhesion to the workpiece 1 by irradiation with ultraviolet rays, and the surface of the fixing surface 9 of the workpiece 1 is partially modified to a state with high adhesion to the sheet 100 by irradiation with ultraviolet rays. Therefore, the adhesion between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 is partially further increased, and the fixing force of the sheet 100 to the workpiece 1 can be partially further improved.

[Embodiment 2]
A method for fixing a sheet according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 16 is a perspective view showing an example of a sheet 100, a workpiece 1 to be fixed to the sheet 100, and a frame 8 in the method for fixing a sheet according to the second embodiment. Fig. 17 is a cross-sectional view explaining a fixing step 1002 of the method for fixing a sheet according to the second embodiment. In Figs. 16 and 17, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

The sheet fixing method according to the second embodiment is a method of fixing a sheet 100 to one side of the workpiece 1 and one side of the frame 8, as shown in FIG. 16. That is, the sheet fixing method according to the second embodiment is a modification of the sheet fixing method according to the first embodiment, in which the sheet 100 is fixed to one side of the frame 8 in addition to one side of the workpiece 1, and the other configurations are the same as those of the first embodiment. In the second embodiment, the frame 8 is, for example, a flat plate with flat surfaces on both sides, is formed in a ring shape, and has an opening 8-2 in the center whose inner diameter is larger than the outer diameter of the workpiece 1. The frame 8 is, for example, made of stainless steel.

In the second embodiment, the sheet 100 may be formed in a size and shape that covers the opening 8-2 of the frame 8 in the planar direction, and may be formed in a sheet shape that does not extend beyond the outer periphery of the frame 8 in the planar direction. Hereinafter, the surface of the frame 8 to which the sheet 100 is fixed is referred to as the fixing surface 9-2 of the frame 8 (see FIG. 17).

The ultraviolet ray irradiation step 1001 of the sheet fixing method according to the second embodiment is the same as that of the first embodiment, and ultraviolet rays are irradiated onto the fixing surface 109 of the sheet 100 to modify the fixing surface 109 of the sheet 100 to have a high adhesion not only to the workpiece 1 but also to the frame 8.

In the fixing step 1002 of the sheet fixing method according to the second embodiment, after the ultraviolet irradiation step 1001 is performed, as shown in FIG. 17, the workpiece 1 is positioned in the opening 8-2 of the frame 8, and the sheet 100 is fixed to the workpiece 1 and the frame 8 by applying heat. That is, in addition to the fixing step 1002 of the sheet fixing method according to the first embodiment, in which the workpiece 1 and the sheet 100 are brought into close contact with each other and fixed by applying heat, the fixing step 1002 of the sheet fixing method according to the second embodiment is modified so that the frame 8 with the workpiece 1 positioned in the opening 8-2 and the sheet 100 are brought into close contact with each other and fixed by applying heat.

In the fixing step 1002 of the sheet fixing method according to the second embodiment, when the fixing step is performed using the fixing device 20 as in the first example of the fixing step 1002 of the first embodiment, as shown in FIG. 17, the frame 8 and the workpiece 1 positioned on the opening 8-2 of the frame 8 are held by the holding table 21 of the fixing device 20 from the side opposite the fixing surfaces 9-2, 9 with the fixing surfaces 9-2, 9 facing upward, and the sheet 100 is placed on the fixing surface 9-2 of the frame 8 and the fixing surface 9 of the workpiece 1 so that the fixing surface 109 of the sheet 100 faces the fixing surface 9-2 of the frame 8 and the fixing surface 9 of the workpiece 1. , the sheet 100 is heated to a predetermined temperature (e.g., 80 to 100°C or higher) from the holding table 21 side through the frame 8 and workpiece 1 by a heating means 22 such as a heater provided in the holding table 21 of the fixing device 20, while the pressing roller 23 of the fixing device 20 is rotated from one end of the frame 8 to the other end through the sheet 100, thereby bringing the fixing surface 109 of the sheet 100 into close contact with the fixing surface 9-2 of the frame 8 and the fixing surface 9 of the workpiece 1, fixing the sheet 100 to the frame 8 and the workpiece 1, and integrating the sheet 100 with the frame 8 and the workpiece 1.

In the fixing step 1002 of the sheet fixing method according to this embodiment 2, since the workpiece 1 and the frame 8 have the same thickness, by placing the workpiece 1 and the frame 8 on the flat holding surface of the holding table 21, the fixing surface 9 of the workpiece 1 and the fixing surface 9-2 of the frame 8 are on the same plane. However, this invention is not limited to this, and the height of the workpiece 1 and the frame 8 held by the holding table 21 may be appropriately adjusted depending on the difference in thickness between the workpiece 1 and the frame 8 so that the fixing surface 9 of the workpiece 1 and the fixing surface 9-2 of the frame 8 are on the same plane.

Furthermore, the fixing step 1002 of the sheet fixing method according to the second embodiment is not limited to a method similar to the first example of the fixing step 1002 of the first embodiment, but may be a method similar to the second to fifth examples of the fixing step 1002 of the first embodiment, or an appropriate combination of the methods similar to the first to fifth examples.

The sheet fixing method according to the second embodiment having the above-mentioned configuration has the effect of improving the fixing force of the sheet 100 to the workpiece 1 and the frame 8 by irradiating the fixing surface 109 of the sheet 100 with ultraviolet light in the ultraviolet light irradiation step 1001, and by performing the fixing step 1002 after the ultraviolet light irradiation step 1001, the modified surface of the fixing surface 109 of the sheet 100 adheres closely to the fixing surface 9 of the workpiece 1 and the fixing surface 9-2 of the frame 8, and the adhesion between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 and the fixing surface 9-2 of the frame 8 is increased, thereby improving the fixing force of the sheet 100 to the workpiece 1 and the frame 8.

[Modification 4]
The sheet fixing method according to the fourth modified example of the present invention will be described with reference to the drawings. Fig. 18 is a plan view for explaining the ultraviolet ray irradiation step 1001 of the sheet fixing method according to the fourth modified example. In Fig. 18, the same parts as those in the first and second embodiments are given the same reference numerals and the description thereof will be omitted.

The method of fixing the sheet according to the fourth modification is a modification of the ultraviolet irradiation step 1001 in the second embodiment. The ultraviolet irradiation step 1001 in the fourth modification is a modification in which, instead of irradiating the entire surface of the fixing surface 109 of the sheet 100 with ultraviolet rays as shown in FIG. 18(A) in the second embodiment, ultraviolet rays are irradiated only partially, that is, a part of the fixing surface 109 of the sheet 100, as shown in FIG. 18(B) and FIG. 18(C) to modify the surface 109 of the sheet 100 to have a high adhesion to the workpiece 1. In the first example of the ultraviolet irradiation step 1001 in the fourth modification, as shown in FIG. 18(B), ultraviolet rays are irradiated to a portion of the fixing surface 109 of the sheet 100 including a portion corresponding to the peripheral excess area 7 of the fixing surface 9 of the workpiece 1 to be fixed and a portion corresponding to the fixing surface 9-2 of the frame 8 (irradiation area 101-4 shown in FIG. 18(B)) to modify the surface 109 of the sheet 100 to have a high adhesion to the workpiece 1 and the frame 8. In a second example of the ultraviolet ray irradiation step 1001 of the fourth modified example, as shown in FIG. 18(C), ultraviolet rays are irradiated onto the fixing surface 109 of the sheet 100, which corresponds to an area including a portion corresponding to the peripheral excess area 7 of the fixing surface 9 of the workpiece 1 to be fixed (irradiation area 101-5 shown in FIG. 18(C)), thereby modifying the sheet 1 to have a high adhesion to the workpiece 1.

The ultraviolet irradiation step 1001 of the fourth modification is a step of irradiating ultraviolet rays onto the fixed surface 109 of the sheet 100 through the mask member 13 using the ultraviolet irradiation device 10, similar to the ultraviolet irradiation step 1001 of the second modification, except that the irradiation areas 101-2 and 101-3 in the ultraviolet irradiation step 1001 of the second modification are changed to irradiation areas 101-4 and 101-5, and the other configurations are the same as those of the ultraviolet irradiation step 1001 of the second modification. In the fourth modification, the mask member 13 has openings 14 formed therein that allow ultraviolet rays to pass through, in portions that correspond to the irradiation area 101-4 of the first example and the irradiation area 101-5 of the second example, respectively.

The fixing method of the sheet according to the modified example 4 having the above-mentioned configuration has the following effect: in the ultraviolet irradiation step 1001, ultraviolet light is irradiated to the irradiation areas 101-4, 101-5 of the fixing surface 109 of the sheet 100 through the mask member 13, thereby modifying the surface of the fixing surface 109 of the sheet 100 to a state in which the surface has a high adhesion to the workpiece 1 (and the frame 8). By performing the fixing step 1002 after the ultraviolet irradiation step 1001, the surface of the fixing surface 109 of the modified sheet 100 adheres to the fixing surface 9 of the workpiece 1 (and the fixing surface 9-2 of the frame 8), and the adhesion between the surface of the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 (and the fixing surface 9-2 of the frame 8) is increased, thereby improving the fixing force of the sheet 100 to the workpiece 1 (and the frame 8).

The sheet fixing method according to the fourth modification can easily change the portion where the adhesive force between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 (and the fixing surface 9-2 of the frame 8) is increased by changing the portion where the opening 14 is formed in the mask member 13. The sheet fixing method according to the fourth modification can selectively prevent the sheet 100 from being strongly adhesive to the device 4, similar to the second modification.

[Modification 5]
The sheet fixing method according to the modified example 5 of the present invention will be described with reference to the drawings. Fig. 19 is a plan view for explaining the ultraviolet ray irradiation step 1001 of the sheet fixing method according to the modified example 5. In Fig. 19, the same parts as those in the first and second embodiments are given the same reference numerals, and the description thereof will be omitted.

The method of fixing the sheet according to the modified example 5 is a modification of the ultraviolet irradiation step 1001 in the embodiment 2. The ultraviolet irradiation step 1001 in the modified example 5 is a modification in which, instead of irradiating the entire surface of the fixing surface 109 of the sheet 100 with ultraviolet rays in the embodiment 2, ultraviolet rays are irradiated only partially to the fixing surface 9 of the workpiece 1, i.e., a part of the fixing surface 9 of the workpiece 1, to modify the sheet 100 to a state with high adhesion to the sheet 100, as shown in FIG. 19(A) and FIG. 19(B). The first example of the ultraviolet irradiation step 1001 in the modified example 5 is similar to the first example of the ultraviolet irradiation step 1001 in the modified example 3, as shown in FIG. 19(A). The second example of the ultraviolet irradiation step 1001 in the modified example 5 is similar to the second example of the ultraviolet irradiation step 1001 in the modified example 3, as shown in FIG. 19(B).

The method of fixing the sheet according to the modified example 5 having the above-mentioned configuration is similar to the modified example 3 in that in the ultraviolet irradiation step 1001, the surface of the fixing surface 9 of the workpiece 1 is partially irradiated with ultraviolet light through the mask member 13, thereby modifying the portion to have a high adhesion to the sheet 100. By performing the fixing step 1002 after performing the ultraviolet irradiation step 1001, the portion of the modified surface of the fixing surface 9 of the workpiece 1 adheres to the fixing surface 109 of the sheet 100, and the adhesion between the portion of the fixing surface 9 of the workpiece 1 and the fixing surface 109 of the sheet 100 is increased, thereby achieving the effect of improving the fixing force of the sheet 100 to the workpiece 1.

The sheet fixing method according to the modified example 5 can easily change the portion where the adhesive force between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 is increased by changing the portion where the opening 14 is formed in the mask member 13. The sheet fixing method according to the modified example 5 can selectively prevent the sheet 100 from being strongly adhesive to the device 4, similar to the modified example 3.

[Modification 6]
A sheet fixing method according to Modification 6 of the present invention will be described with reference to the drawings. Fig. 20 is a plan view for explaining ultraviolet ray irradiation step 1001 of the sheet fixing method according to Modification 6. Fig. 21 is a cross-sectional view for explaining ultraviolet ray irradiation step 1001 of the sheet fixing method according to Modification 6. In Figs. 20 and 21, the same parts as those in the first and second embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

The method of fixing the sheet according to the sixth modification is a modification of the ultraviolet ray irradiation step 1001 in the second embodiment. Instead of irradiating the entire surface of the fixing surface 109 of the sheet 100 with ultraviolet rays in the second embodiment, the ultraviolet ray irradiation step 1001 in the sixth modification is a modification in which ultraviolet rays are irradiated to the entire surface of the fixing surface 9-2 of the frame 8, etc., as shown in Figures 20(A), 20(B) and 20(C), to modify the surface to have a high adhesive strength to the sheet 100.

In a first example of the ultraviolet irradiation step 1001 of the modified example 6, as shown in FIG. 20(A), the fixing surface 9 of the workpiece 1 is not irradiated with ultraviolet rays, but the entire fixing surface 9-2 of the frame 8 is irradiated with ultraviolet rays to modify the surface to have a high adhesion to the sheet 100. In a second example of the ultraviolet irradiation step 1001 of the modified example 6, as shown in FIG. 20(B), the entire fixing surface 9-2 of the frame 8 and the peripheral excess area 7 of the fixing surface 9 of the workpiece 1 are irradiated with ultraviolet rays to modify the surface to have a high adhesion to the sheet 100. In a third example of the ultraviolet irradiation step 1001 of the modified example 6, as shown in FIG. 20(C), the entire fixing surface 9-2 of the frame 8 and the entire fixing surface 9 of the workpiece 1 are irradiated with ultraviolet rays to modify the surface to have a high adhesion to the sheet 100.

The ultraviolet irradiation step 1001 of the sixth modification includes a first ultraviolet irradiation step similar to that of the first modification, and a second ultraviolet irradiation step similar to that of the first modification. By carrying out the first ultraviolet irradiation step of the sixth modification, the chemical bonds (covalent bonds) between, for example, C-H of the organic components of the foreign matter on the fixing surface 9-2 surface of the frame 8 are decomposed. By carrying out the second ultraviolet irradiation step of the sixth modification, the ozone generated in the first ultraviolet irradiation step of the sixth modification is decomposed to generate active oxygen in an excited state, and the generated active oxygen becomes carbon dioxide or water vapor by bonding with unstable carbon atoms and hydrogen atoms generated by decomposing the organic components of the foreign matter on the fixing surface 9-2 surface of the frame 8 in the first ultraviolet irradiation step. As a result, the surface of the fixing surface 9-2 of the frame 8 is cleaned by removing the organic components of the foreign matter, and is modified to a state with high adhesion to the sheet 100.

21, in the first and second examples of the ultraviolet irradiation step 1001 of the modified example 6, the holding table 11 of the ultraviolet irradiation device 10 holds the frame 8 and the workpiece 1 positioned on the opening 8-2 of the frame 8 from the side opposite the fixing surfaces 9-2, 9 with the fixing surfaces 9-2, 9 facing upward, and installs a mask member 13 above the fixing surface 9-2 of the frame 8 and the fixing surface 9 of the workpiece 1. The irradiator 12 is lowered from above to approach the mask member 13, and then the irradiator 12 irradiates ultraviolet rays from above the fixing surface 9-2 of the frame 8 and the fixing surface 9 of the workpiece 1 on the holding table 11 through the mask member 13. Here, the mask member 13 is formed in a plate shape from a material that blocks the ultraviolet rays irradiated by the irradiator 12, and an opening 14 that allows ultraviolet rays to pass is formed in a portion corresponding to the area to be irradiated with ultraviolet rays on the fixing surface 9-2 of the frame 8 and the fixing surface 9 of the workpiece 1. As a result, in the first and second examples of the ultraviolet ray irradiation step 1001 of modified example 6, ultraviolet rays are selectively irradiated onto the fixing surface 9-2 of the frame 8 and the fixing surface 9 of the workpiece 1, at the portions corresponding to the openings 14 formed in the mask member 13.

In a first example of the ultraviolet irradiation step 1001 of the modified example 6, a mask member 13 is provided in which an opening 14 is formed corresponding to the entire surface of the fixing surface 9-2 of the frame 8. In a second example of the ultraviolet irradiation step 1001 of the modified example 6, a mask member 13 is provided in which an opening 14 is formed corresponding to the entire surface of the fixing surface 9-2 of the frame 8 and the peripheral excess area 7 of the fixing surface 9 of the workpiece 1.

In the third example of the ultraviolet ray irradiation step 1001 of the modified example 6, the installation of the mask member 13 in the first and second examples is omitted. As a result, in the third example of the ultraviolet ray irradiation step 1001 of the modified example 6, ultraviolet rays are irradiated onto the entire surface of the fixing surface 9-2 of the frame 8 and the fixing surface 9 of the workpiece 1.

In the ultraviolet ray irradiation step 1001 of the sixth modified example, in all of the first to third examples, the entire fixed surface 9-2 of the frame 8 is irradiated with ultraviolet rays, but the present invention is not limited to this, and ultraviolet rays may be irradiated partially onto the fixed surface 9-2 of the frame 8 by covering a portion corresponding to at least a part of the fixed surface 9-2 of the frame 8 with the mask member 13.

In the method for fixing a sheet according to the sixth modified example having the above-mentioned configuration, in the ultraviolet irradiation step 1001, the fixing surface 9-2 surface of the frame 8 and the fixing surface 9 surface of the workpiece 1 are irradiated with ultraviolet light either entirely or partially through the mask member 13, thereby modifying the relevant portions to have a high adhesion to the sheet 100. By performing the fixing step 1002 after the ultraviolet irradiation step 1001, the relevant portions of the modified fixing surface 9-2 surface of the frame 8 and the fixing surface 9 surface of the workpiece 1 are brought into close contact with the fixing surface 109 of the sheet 100, and the adhesion between the relevant portions of the fixing surface 9-2 surface of the frame 8 and the fixing surface 9 of the workpiece 1 and the fixing surface 109 of the sheet 100 is increased, thereby achieving the effect of improving the fixing force of the sheet 100 to the workpiece 1 and the frame 8.

The method of fixing the sheet according to the sixth modification can easily change the portion where the adhesive force between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 and the fixing surface 9-2 of the frame 8 is high by changing the portion where the opening 14 is formed in the mask member 13. The method of fixing the sheet according to the sixth modification can selectively avoid the sheet 100 from being strongly adhesive to the device 4 by, for example, making only the entire surface of the fixing surface 9-2 of the frame 8 the portion in question as in the first example, or making the entire surface of the fixing surface 9-2 of the frame 8 and the peripheral excess area 7 of the fixing surface 9 of the workpiece 1 the portion in question as in the second example.

In the ultraviolet ray irradiation step 1001 of the sheet fixing method according to the modified examples 4, 5, and 6, ultraviolet rays are partially irradiated onto at least one of the fixing surface 109 of the sheet 100, the fixing surface 9 of the workpiece 1, and the fixing surface 9-2 of the frame 8. In the present invention, the modified examples 4, 5, and 6 may be combined to partially irradiate ultraviolet rays onto both the fixing surface 109 of the sheet 100, the fixing surface 9 of the workpiece 1, and the fixing surface 9-2 of the frame 8 in the ultraviolet ray irradiation step 1001. When ultraviolet rays are partially irradiated on both sides in this way, in the ultraviolet ray irradiation step 1001, the surface of the fixing surface 109 of the sheet 100 is partially modified by ultraviolet irradiation to have a high adhesion to the workpiece 1 and the frame 8, and further, the surface of the fixing surface 9 of the workpiece 1 and the surface of the fixing surface 9-2 of the frame 8 are partially modified by ultraviolet irradiation to have a high adhesion to the sheet 100. Therefore, the adhesion between the fixing surface 109 of the sheet 100 and the fixing surface 9 of the workpiece 1 and the fixing surface 9-2 of the frame 8 is partially further increased, and the fixing force of the sheet 100 to the workpiece 1 and the frame 8 can be partially further improved.

The present invention is not limited to the above-described embodiment. In other words, various modifications can be made without departing from the gist of the present invention. For example, the first and second embodiments and the first to sixth modifications merely show examples of the ultraviolet ray irradiation areas (irradiated portions) on the fixing surface 109 of the sheet 100, the fixing surface 9 of the workpiece 1, and the fixing surface 9-2 of the frame 8, and the ultraviolet ray irradiation areas (irradiated portions) can be changed as appropriate depending on the areas (portions) where it is desired to increase the adhesion and improve the fixing strength.

1 Work 8 Frame 8-2 Opening 9, 9-2, 109 Fixing surface 100 Sheet

Claims (4)

A method for fixing a sheet having no adhesive layer to a workpiece, comprising the steps of:
An ultraviolet ray irradiation step of irradiating ultraviolet rays onto at least one of the fixing surface of the sheet or the fixing surface of the workpiece;
After the ultraviolet irradiation step, a fixing step of closely contacting the workpiece and the sheet and applying heat to fix them;
The method for fixing a sheet is characterized by comprising: A method for fixing a sheet having no adhesive layer to a workpiece, comprising the steps of:
An ultraviolet irradiation step of irradiating ultraviolet rays onto at least one of the fixing surface of the sheet, the fixing surface of the work, and the fixing surface of a frame having an opening in the center;
a fixing step of positioning a workpiece in the opening of the frame after the ultraviolet irradiation step, and fixing the sheet to the workpiece and the frame by applying heat;
The method for fixing a sheet is characterized by comprising: The method for fixing a sheet according to claim 1, characterized in that the ultraviolet ray irradiation step irradiates ultraviolet rays partially onto at least one of the workpiece or the sheet. The method for fixing a sheet according to claim 2, characterized in that the ultraviolet ray irradiation step irradiates ultraviolet rays partially onto at least one of the workpiece, the sheet, or the frame.

Images