JP2024056440A - How to cut the strip sheet - Google Patents

Abstract

[Problem] To provide a cutting method capable of preventing the cutting edge of a blade cutting a strip-shaped sheet from becoming dull. [Solution] A sheet cutting method for batch-cutting a sheet (30) pulled out from the outer periphery of a roll sheet (1711) into a predetermined length, comprising a holding step of suction-holding the sheet on a suction surface (82) of a table, a cutting step of penetrating the sheet from above the sheet held by suction on the suction surface with a blade (801) having a sharp blade tip (811) at the lower end, and entering the blade tip (811) into a cutter relief groove (803) formed on the suction surface, and a cutting step of moving the blade forward so as to cut the strip-shaped sheet after the cutting step, with the cutting edge (812) of the blade in front. [Selected Figure] Figure 4

Description

The present invention relates to a method for cutting a strip-shaped sheet.

When the wafer is subjected to grinding or other processing, a protective member is formed to protect one entire surface of the wafer. The protective member forming device that forms the protective member supplies liquid resin onto a sheet placed on a table, lowers a holder that holds the wafer above the table, spreads the liquid resin with the wafer held by the holder, and then hardens the liquid resin to form a protective member made of resin and sheet over one entire surface of the wafer.

The protective member forming device spreads liquid resin between one side of the wafer and a rectangular sheet with an area covering one side of the wafer. For example, as in Patent Document 1, this sheet is cut to a specified length from a strip-shaped sheet pulled out from the end of a roll sheet. The sheet cut to the specified length is transported to a table where the protective member is formed.

For example, as in Patent Documents 2 and 3, the strip sheet is cut by moving the blade horizontally in the width direction from the outside of the strip sheet to the inside of the strip sheet.

JP 2022-020286 A JP 2022-041494 A JP 2019-102769 A

In conventional technology, when the cutting edge of the blade comes into contact with the end of the strip sheet, the end of the strip sheet rolls up, and the rolled-up end is then cut, which places a large load on the cutting blade, causing the blade to lose its sharpness. This necessitates frequent blade replacement. Therefore, a cutting method for cutting strip sheets has the challenge of reducing the frequency of blade replacement.

The present invention was made in consideration of these points, and aims to provide a cutting method that can prevent the cutting edge of the blade that cuts the strip-shaped sheet from becoming dull.

The cutting method of the present invention is a method for cutting a strip sheet by batch cutting a strip sheet pulled out from the outer periphery of a roll sheet to a predetermined length, and includes a holding step in which the strip sheet is suction-held on the suction surface of a table, a cutting step in which a blade with a sharp cutting edge at the lower end penetrates the strip sheet from above the strip sheet held on the suction surface and the cutting edge enters a groove formed on the suction surface, and a cutting step in which, after the cutting step, the blade is advanced so that the cutting edge of the blade is in front and cuts the strip sheet across the width.

In one aspect of the present invention, the blade is V-shaped with cutting edges formed on both slopes, and in the cutting process, when the blade penetrates the strip sheet, one end of the strip sheet is cut, and in the cutting process, the blade is moved to the other end side to cut the strip sheet.

In one aspect of the present invention, the blade is V-shaped and cutting edges are formed on both slopes, and in the incision process, the blade is inserted through the center of the width of the strip sheet, and in the cutting process, the blade that has been incised in the incision process is moved widthwise toward one end to cut the strip sheet from the center to one end in a first cutting process, and the blade is returned to the position where it was incised in the incision process, and then moved widthwise toward the other end to cut the strip sheet from the center to the other end in a second cutting process.

With the above configuration, the blade advances horizontally from the outside of the edge of the strip sheet and does not come into contact with the edge. This means that the strip sheet can be cut in the width direction without the cutting blade coming into contact with the edge of the strip sheet, which prevents the edge of the strip sheet from curling up, reduces the burden on the cutting blade, prevents the cutting blade from becoming dull, and reduces the frequency of blade replacement.

The cutting method of the present invention can prevent the cutting edge of the blade that cuts the strip-shaped sheet from becoming dull.

1 is a perspective view showing an entire protective member forming apparatus for performing a cutting method according to an embodiment of the present invention; 1 is a cross-sectional view of a portion of a protective member forming apparatus for performing a cutting method according to an embodiment of the present invention. FIG. 2 is an explanatory diagram showing a part of a cutting mechanism for performing the cutting method according to the embodiment. 1A to 1C are explanatory diagrams illustrating an outline of a cutting method according to the present embodiment. 10A to 10C are explanatory diagrams illustrating an outline of a cutting method according to Modification 1. 13 is an explanatory diagram showing a part of a cutting mechanism for performing a cutting method according to Modification 2. FIG. FIG. 11 is an explanatory diagram showing an outline for explaining a cutting method according to Modification 2.

The protective member forming device for carrying out the cutting method according to this embodiment will be described below with reference to the attached drawings. Figs. 1 and 2 show the whole and part of the protective member forming device for carrying out the cutting method according to this embodiment. Fig. 3 shows part of the cutting mechanism for carrying out the cutting method according to this embodiment. Fig. 4 shows a schematic diagram for explaining the cutting method according to this embodiment.

The X-axis, Y-axis, and Z-axis directions shown in each figure are perpendicular to each other. The X-axis and Y-axis directions are approximately horizontal, and the Z-axis direction is up-down (vertical). In each figure, of the two arrows indicating the X-axis direction, the +X side is the left, and the -X side is the right. Of the two arrows indicating the Y-axis direction, the +Y side is the front, and the -Y side is the rear. Of the two arrows indicating the Z-axis direction, the +Z side is the top, and the -Z side is the bottom.

The protective member forming device 1 shown in Figure 1 is an example of a device that forms a protective member by applying an external stimulus to liquid resin that has been spread over the entire surface of one side of a wafer W, causing it to harden. In Figure 1, the external housing 10 of the protective member forming device 1 is shown with a dashed line, and the components inside the external housing 10 are shown in a see-through state. The surface of the wafer W that faces upward during processing in the protective member forming device 1 is referred to as the upper surface Wa, and the surface that faces downward is referred to as the lower surface Wb.

The details will be described later, but a holding process is performed in which the strip sheet is suction-held on the suction surface of the table. Then, a cutting process is performed in which a blade with a sharp cutting edge penetrates the strip sheet from above the strip sheet suction-held on the suction surface, and the cutting edge of the blade enters a groove formed on the suction surface. After the cutting process, a cutting process is performed in which the blade advances with the cutting edge of the blade in front so as to cut the strip sheet across the strip sheet. In this embodiment, the strip sheet is configured as sheet 30 (see FIG. 1). In this embodiment, the table is configured as sheet support surface 161 (see FIG. 1 and FIG. 3). In this embodiment, the suction surface is configured as suction surface 82 (see FIG. 1 and FIG. 3). In this embodiment, the blade is configured as blade 801 (see FIG. 3). In this embodiment, the cutting edge is configured as cutting edge 811 (see FIG. 3). In this embodiment, the groove is configured as cutter escape groove 803 (see FIG. 3).

This series of operations for the cutting method is performed under the control of the control unit 40 (Figure 1), which provides overall control of the protective member forming device 1. In the following description of the operations of each part, unless a controlling entity is specified, it is assumed that the operations are controlled by control signals sent from the control unit 40.

The wafer W is, for example, a disk-shaped as-sliced wafer cut from a cylindrical ingot of silicon or the like. Note that the wafer W is not limited to an as-sliced wafer before devices are formed, and may be a device wafer after devices are formed, etc.

The protective member forming device 1 is provided with a cassette storage section 11 on the front side in the Y-axis direction (+Y direction side) of the external housing 10. The cassette storage section 11 has two upper and lower storage spaces 111, 112. The upper storage space 111 is used to place an input cassette C1 that stores multiple wafers W before the protective member 32 is formed. The lower storage space 112 is used to place an output cassette C2 that stores wafers W after the protective member 32 has been formed. Cassettes C1 and C2 can each store multiple wafers W.

A temporary placement table 13 and a sheet cutting table 14 are provided in the -Y direction of the cassette storage section 11. The temporary placement table 13 is located on the upper side, and the sheet cutting table 14 is located on the lower side. The temporary placement table 13 is provided with a wafer detection section 131 that detects the center position and orientation of the wafer W before the protective member 32 is formed. The sheet cutting table 14 is provided with a sheet cutter 141 that cuts the sheet 30 attached to the wafer W along the outline of the wafer W.

A first transport mechanism 12 is provided to load and unload wafers W onto and from the temporary placement table 13, the sheet cutting table 14, and each of the cassettes C1 and C2 in the cassette storage section 11. The first transport mechanism 12 includes a robot hand 122 supported on a pedestal 121, and the pedestal 121 is supported so as to be movable along a pair of guide rails 123 extending in the X-axis direction. The pedestal 121 includes a screwing portion (not shown) that screws into a ball screw 124 that extends in the X-axis direction. When the ball screw 124 is rotated by the driving force of a motor, the pedestal 121 moves in the X-axis direction.

The first transport mechanism 12 transports the wafer W between the cassette storage section 11 and the temporary placement table 13 and the sheet cutting table 14 by moving the base 121 in the X-axis direction and operating the robot hand 122. More specifically, the first transport mechanism 12 can transport the wafer W before the protective member 32 is formed from the cassette C1 in the storage space 111 and place it on the temporary placement table 13. The first transport mechanism 12 can also transport the wafer W after the protective member 32 is formed from the sheet cutting table 14 and load it into the cassette C2 in the storage space 112.

The protective member forming device 1 is provided with a base 15 on the rear side in the Y-axis direction (-Y direction side) relative to the temporary placement table 13 and the sheet cutting table 14. A protective member forming stage 16 is provided on the base 15. The protective member forming stage 16 is made of a light-transmitting material such as quartz glass and is formed in a circular plate shape. The upper surface of the protective member forming stage 16 is a flat sheet support surface 161 on which the sheet 30 is placed.

The sheet conveying mechanism 17 conveys and places the sheet 30 on the sheet support surface 161 of the protective member forming stage 16. The sheet conveying mechanism 17 comprises a sheet supply unit 171 on which a rolled-up rolled sheet 1711 is supported, an arm 172 movable in the Y-axis direction, and a clamp unit 173 attached to the side of the arm 172. In the sheet conveying mechanism 17, the belt-shaped sheet 30 supplied from the rolled-up rolled sheet 1711 supported by the sheet supply unit 171 is held by the clamp unit 173, and the arm 172 is moved in the +Y direction to pull the sheet 30, thereby placing the sheet 30 on the sheet support surface 161 of the protective member forming stage 16.

The sheet 30 is made of a light-transmitting material. For example, a film made of polyethylene terephthalate or the like can be used as the sheet 30. Note that a sheet 30 made of a material other than this may also be used.

The sheet support surface 161 of the protective member forming stage 16 has a plurality of suction holes (not shown). The suction holes are connected to a suction source 162 (see FIG. 2). By operating the suction source 162 to apply suction force to the suction holes, the sheet 30 placed on the sheet support surface 161 is sucked and held on the sheet support surface 161.

The middle position of the sheet support surface 161 is a suction surface 82 on which the sheet 30 sent from the sheet supply unit 171 in the +Y direction is placed during cutting. In the area of the suction surface 82 close to the sheet supply unit 171, a cutter escape groove 803 (see FIG. 3) extending in the width direction of the sheet 30 and a plurality of sheet suction holes (not shown) formed on both sides of the cutter escape groove 803 along the cutter escape groove 803 are formed, for example, in two rows at equal intervals in the X-axis direction. The sheet suction holes are connected to a suction source 162 such as a vacuum generator. By operating the suction source 162 to apply suction force to the sheet suction holes, the sheet 30 placed on the suction surface 82 is sucked and held on the suction surface 82. This process of suction and holding the sheet 30 is executed as a holding process. By performing this holding process, the sheet 30 is prevented from shifting during cutting.

The protective member forming device 1 is equipped with, for example, a cutting mechanism 80 that cuts (batch cuts) the sheet 30 held and pulled out by the clamp section 173.

The cutting mechanism 80 is disposed, for example, near the front of the sheet supply unit 171. The cutting mechanism 80 includes a blade 801 (see FIGS. 3 and 4) that cuts the sheet 30, a lifting guide 802 (see FIGS. 3 and 4) that raises and lowers the blade 801 in the Z-axis direction, and a moving unit 804 (see FIGS. 3 and 4) that moves the blade 801 in the X-axis direction after the blade tip 811 has entered the cutter clearance groove 803.

The blade 801 is held by the lifting guide 802 so that it can be raised and lowered in the vertical direction (Z-axis direction). The lifting guide 802 is lowered in the vertical direction (-Z direction), and the blade 801, which has a sharp cutting edge 811 at its lower end, penetrates the sheet 30 held on the suction surface 82 in the vertical direction (Z-axis direction) from above to below. This executes a cutting process in which the cutting edge 811 of the blade 801 enters the cutter escape groove 803 formed in the suction surface 82. This cutting process prevents the edge of the sheet 30 from rolling up, reduces the burden on the cutting blade 812, suppresses the cutting blade 812 from becoming dull, and reduces the frequency of blade replacement.

The moving unit 804 can move the lift guide 802 holding the blade 801 in the width direction (X-axis direction) of the sheet 30. After the cutting process, the moving unit 804 moves the blade 801 arranged on the lift guide 802 in the width direction (X-axis direction) of the sheet 30. Specifically, the moving unit 804 advances the blade 801 in the width direction (-X direction) of the sheet 30 with the cutting edge 812 (FIGS. 3 and 4) of the blade 801 in front so as to cross the width direction (X-axis direction) of the sheet 30. This cuts the sheet 30 in the width direction (X-axis direction). With the cutting edge 812 (FIGS. 3 and 4) of the blade 801 in front, a cutting process is performed in which the sheet 30 is cut in the width direction (X-axis direction). This makes it possible to prevent the edge of the sheet 30 from rolling up due to the blade 801 coming into contact with the edge of the sheet 30. As a result, the load on the cutting edge 812 of the blade 801 is reduced, and the cutting edge 812 is prevented from becoming dull.

In this embodiment, the blade 801 is formed in a V-shape. The blade 801 has double-edged cutting edges 812, 813 (Figures 3 and 4) that have acute angles on both slopes in the width direction (X-axis direction) of the sheet 30.

A resin supply mechanism 18 is provided near the protective member forming stage 16, which supplies a predetermined amount of liquid resin 31 to the upper surface of the sheet 30 on the sheet support surface 161. The resin supply mechanism 18 includes a dispenser 181 that connects to a tank 184 provided in the base 15, and a resin supply nozzle 183 to which a connection pipe 182 extending from the dispenser 181 is connected. The resin supply nozzle 183 rotates about an axis facing the Z-axis direction, and can be moved between a central position above the protective member forming stage 16 and a retracted position on the outside above the protective member forming stage 16.

The liquid resin 31 stored in the tank 184 is sent by the dispenser 181 via the connection pipe 182, and the liquid resin 31 is supplied downward from the resin supply nozzle 183. The supply amount of the liquid resin 31 can be adjusted by the dispenser 181.

The liquid resin 31 has the property of being hardened by an external stimulus. In this embodiment, an ultraviolet-curable resin that is hardened by exposure to ultraviolet light is used.

A column 19 is provided that protrudes upward from the base 15. The column 19 is provided with a lifting mechanism 21 that moves the wafer holder 20 in the Z-axis direction to approach and move away from the protective member forming stage 16. The lifting mechanism 21 includes a pair of guide rails 211 extending in the Z-axis direction, a lifting table 212 supported on the pair of guide rails 211 so as to be movable in the Z-axis direction, and a ball screw 213 (see FIG. 2) that extends in the Z-axis direction and screws into a screwing portion 215 (see FIG. 2) of the lifting table 212. When the ball screw 213 is rotated by the driving force of the motor 214, the lifting table 212 moves in the Z-axis direction along the pair of guide rails 211. When the ball screw 213 is rotated in a first direction, the lifting table 212 moves downward, and when the ball screw 213 is rotated in a second direction, the lifting table 212 moves upward.

The wafer holding part 20 is supported by a lift table 212, and the wafer holding part 20 is moved in the Z-axis direction along with the lift table 212. The wafer holding part 20 is provided with a disk-shaped holding table 201. As shown in FIG. 2, a disk-shaped porous member 202 is provided on the lower surface side of the holding table 201. The lower surface of the porous member 202 is a wafer holding surface 203 located above the protective member forming stage 16. The wafer holding surface 203 is a surface approximately parallel to the sheet support surface 161 of the protective member forming stage 16.

The wafer holding part 20 may be made of a dense material rather than a porous material, and may be configured to have multiple suction ports (not shown) on the wafer holding surface 203 and form suction paths 204 inside that connect the suction ports to a suction source.

As shown in FIG. 2, the porous member 202 is connected to a suction source 205 via a suction path 204. By operating the suction source 205 to apply a suction force to the porous member 202, the upper surface Wa of the wafer W can be suction-held by the wafer holding surface 203.

When the upper surface Wa of the wafer W is held by suction on the wafer holding surface 203 of the wafer holding part 20 (Figure 2), and the wafer holding part 20 is lowered by the lifting mechanism 21, the lower surface Wb of the wafer W comes into contact with the liquid resin 31 supplied onto the sheet 30, and the liquid resin 31 is spread out by the force of lowering the wafer W.

The wafer holding unit 20 is equipped with a load detection unit 22. A plurality of load sensors 221 are provided at different positions on the upper surface side of the holding table 201, and these load sensors 221 constitute the load detection unit 22 (Figure 2). The load detection unit 22 can detect the load in the vertical direction (Z-axis direction) applied to the underside Wb of the wafer W by the output of the plurality of load sensors 221, and judge the spreading state of the liquid resin 31.

A curing mechanism 23 is provided below the protective member forming stage 16, which applies an external stimulus to the liquid resin 31 dropped onto the sheet 30 on the sheet support surface 161 to cause it to harden. The curing mechanism 23 has a plurality of ultraviolet ray irradiation units 231 capable of emitting ultraviolet rays UV, and irradiates the liquid resin 31 with ultraviolet rays UV through the protective member forming stage 16 and the sheet 30, which have translucency, to cause it to harden. The light source used for the ultraviolet ray irradiation units 231 may be an LED.

A camera 24 is provided below the protective member forming stage 16 to capture images in the direction of the sheet support surface 161. The camera 24 is composed of a lens and an imaging element, and has an imaging range that can capture images from below the sheet support surface 161 of the entire area of the liquid resin 31 being spread by the sheet 30 on the sheet support surface 161, and the entire underside Wb of the wafer W when the liquid resin 31 is being spread.

As shown in FIG. 1, the second transport mechanism 25 is provided on the base 15. The second transport mechanism 25 includes a robot hand 252 supported on a pedestal 251, and the pedestal 251 is supported so as to be movable along a pair of guide rails 253 extending in the Y-axis direction. The pedestal 251 includes a screw portion (not shown) that screws into a ball screw 254 extending in the Y-axis direction. When the ball screw 254 is rotated by the driving force of a motor, the pedestal 251 moves in the Y-axis direction.

The second transport mechanism 25 transports the wafer W between the temporary placement table 13 and the sheet cutting table 14 and the wafer holding unit 20 by moving the pedestal 251 in the Y-axis direction and by operating the robot hand 252. More specifically, the second transport mechanism 25 receives the wafer W before the protective member 32 is formed from the temporary placement table 13 and transports it to the holding table 201 of the wafer holding unit 20. The second transport mechanism 25 also receives the wafer W after the protective member 32 is formed from the protective member forming stage 16 and transports it to the sheet cutting table 14.

The protective member forming device 1 is controlled by a control unit 40 (Fig. 1). The control unit 40 is composed of a processor that executes various processes and a storage unit (memory) that stores various parameters, programs, etc. The storage unit of the control unit 40 stores, as part of the control program for the protective member forming device 1, a program for executing a cutting process for the sheet 30, which cuts the strip-shaped sheet to a predetermined length (batch cutting).

Among the steps constituting the method for cutting the strip-shaped sheet 30 by the protective member forming device 1 configured as described above, in which the strip-shaped sheet pulled out from the outer periphery of the roll sheet is cut to a predetermined length (batch cut), the incision step and the cutting step performed by the V-shaped double-edged cutting blades 812 and 813 will be described with reference to FIG. 4.

Figure 4 is a schematic diagram of the cutting method according to this embodiment. Figure 4 shows the incision process and the cutting process of the cutting method according to this embodiment. Figures 4(a) to (c) show the incision process, and Figure 4(d) shows the cutting process. The incision process is performed after the holding process.

In the cutting process, first, as shown in FIG. 4(a), under the control of the control unit 40, the moving unit 804 moves the lift guide 802 in the width direction (X-axis direction) of the sheet 30, thereby moving the cutting edge 811 of the blade 801 in the -X direction at a predetermined distance da from one end 301 in the width direction (+X direction) of the sheet 30, and makes the cutting edge 811 of the blade 801 wait above the sheet 30. For example, the distance da is set to a value equal to or less than half the dimension of the blade 801 in the width direction.

Next, as shown in FIG. 4(b), the lift guide 802 is lowered vertically (-Z direction) under the control of the control unit 40, so that the cutting edge 811 of the blade 801, which has a sharp lower end, enters the cutter clearance groove 803 formed in the suction surface 82 and penetrates the sheet 30.

In this embodiment, when the cutting edge 811 of the blade 801 penetrates the inside of one end 301 of the sheet 30, the one end 301 of the sheet 30 is cut by the cutting edges 812, 813 of the blade 801. By performing this cutting process, it is possible to prevent the end of the sheet 30 from rolling up due to the cutting edge 812 of the blade 801 abutting against the one end 301 of the sheet 30 as in the conventional method, reduce the burden on the cutting edge 812, and suppress the cutting edge 812 from becoming dull. Note that if the blade 801 does not have the cutting edge 813, a portion of the one end 301 of the sheet 30 may remain uncut. The remaining portion on the one end 301 side of the sheet 30 may be torn off and cut by pulling the sheet 30 with the clamp unit 173.

As shown in FIG. 4(c), the control unit 40 controls the lift guide 802 to move up in the vertical direction (Z-axis direction) after the cutting step in FIG. 4(b), thereby changing the location where the cutting edge 812 of the blade 801 contacts the sheet 30. This makes it possible to prevent the cutting edge 812 from being partially worn down by the sheet 30.

The position to which the lift guide 802 is raised in the vertical direction (Z-axis direction) can be changed as desired. The position to which the lift guide 802 is raised in the vertical direction (Z-axis direction) can also be changed as appropriate based on a predetermined pattern. This makes it possible to prevent only a specific position of the cutting blade 812 from wearing down.

In this embodiment, the lift guide 802 is raised in the vertical direction (Z-axis direction) by the process shown in FIG. 4(c), but this is not limited to the above. The cutting process shown in FIG. 4(c) may be omitted. This can shorten the work process and improve work efficiency.

Next, after the incision process, the cutting process is executed under the control of the control unit 40. In the cutting process, as shown in FIG. 4(d), under the control of the control unit 40, the moving unit 804 is moved in the width direction (-X direction) of the sheet 30, so that the cutting edge 812 of the blade 801 is brought forward and the blade 801 is advanced so as to cut the sheet 30 across the width direction of the sheet 30.

Specifically, as shown in FIG. 4(d), with the cutting edge 811 of the blade 801 inserted into the sheet 30, the blade 801 is moved in the width direction (-X direction) of the sheet 30 from one end 301 side to the other end 302 side. This allows the cutting edges 812 and 813 of the blade 801 to cut the sheet 30 in the width direction (X axis direction).

As described above, by performing the cutting method of this embodiment, the cutting edge 812 of the blade 801 can cut the sheet 30 in the width direction (X-axis direction) without contacting one end 301 of the sheet 30, which prevents the end of the sheet 30 from curling up, reduces the burden on the cutting edge 812 of the blade 801, and suppresses the cutting edge 812 from becoming dull.

[Modification 1]
In the above embodiment, the lift guide 802 is lowered based on the control of the control unit 40 to cut one end 301, and the blade 801 is moved to the other end 302 to cut the sheet 30 in the width direction (X-axis direction), but this is not limited to the above. For example, as shown in Fig. 5, the cutting process may be configured to include a first cutting process in which the cutting blade 813 cuts the sheet 30 from the center to one end 301, and a second cutting process in which the blade 801 is returned to the upper center of the sheet 30 at the position where the first cutting process starts, and the blade 801 is moved across the sheet 30 toward the other end 302 to cut the sheet 30 from the center to the other end 302 with the cutting blade 812. Fig. 5 shows an outline of the cutting method according to the first modification.

Of the various steps constituting the cutting method of modified example 1, the incision step performed by the V-shaped double-edged cutting blades 812 and 813 and the cutting step performed by the first cutting step and the second cutting step will be described with reference to FIG. 5. FIG. 5 is a diagram showing an example of the incision step and the cutting step of modified example 1. The holding step of modified example 1 is almost the same as the above-mentioned embodiment, so a description thereof will be omitted.

Figure 5(a) shows the cutting process of modified example 1, Figure 5(b) shows the cutting process and part of the cutting process of modified example 1, and Figure 5(c) shows the cutting process of modified example 1. The cutting process of modified example 1 is performed after the holding process.

In the cutting process of variant 1, first, as shown in FIG. 5(a), based on the control of the control unit 40, the moving unit 804 moves the lift guide 802 to the center c in the width direction (X-axis direction) of the sheet 30, thereby causing the cutting edge 811 of the blade 801 to wait above the center c in the width direction (X-axis direction) of the sheet 30.

Next, as shown in FIG. 5(b), the lift guide 802 is lowered in the vertical direction (Z-axis direction) under the control of the control unit 40, so that the cutting edge 811 of the blade 801, which has a sharp lower end, enters the cutter escape groove 803 formed in the suction surface 82, and the blade 801 penetrates the center c of the sheet 30.

Next, after the incision process, the cutting process is executed under the control of the control unit 40. In the cutting process, as shown in FIG. 5(b), the moving unit 804 advances the blade 801 in the width direction (+X direction) of the sheet 30, i.e., toward one end 301 of the sheet 30, with the cutting edge 813 of the blade 801 in front, to cut from the center c of the sheet 30 to one end 301. This results in a portion 303 of the sheet 30 being cut off.

Next, as shown in FIG. 5(c), the lift guide 802 is raised in the vertical direction (+Z-axis direction) under the control of the control unit 40, thereby moving the cutting edge 811 of the blade 801 away from the sheet 30. Then, under the control of the control unit 40, the moving unit 804 moves the lift guide 802 again to the center c of the sheet 30, thereby causing the cutting edge 811 of the blade 801 to wait above the cut portion 303 at the center of the sheet 30.

Next, based on the control of the control unit 40, the lift guide 802 is lowered in the vertical direction (-Z axis direction) to cause the cutting edge 811 of the blade 801, which has a sharp lower end, to enter the cut portion 303 and the cutter clearance groove 803, and the blade 801 penetrates the center c of the sheet 30.

Next, after the cutting process, under the control of the control unit 40, as shown in FIG. 5(c), the moving unit 804 advances the blade 801 in the width direction (-X direction) of the sheet 30, i.e., toward the other end 302 of the sheet 30, with the cutting edge 812 of the blade 801 in front, to cut from the center c of the sheet 30 to the other end 302. This completely cuts the sheet 30 from one end 301 to the other end 302.

As described above, by performing the incision process and cutting process according to modified example 1, the cutting edges 812, 813 of the blade 801 cut the sheet 30 in the width direction (X-axis direction) without contacting one end 301 and the other end 302 of the sheet 30, which prevents the end of the sheet 30 from curling up, reduces the burden on the cutting edges 812, 813 of the blade 801, prevents the cutting edge 812 from becoming dull, and reduces the frequency of blade replacement.

In the above embodiment, the blade 801 is cut into the center c of the sheet 30, but this is not limited to the center c. For example, the blade 801 may be cut into the sheet 30 at a position 50 mm from one end 301 toward the other end 302 in the X-axis direction, and the cutting blade 813 may cut the one end 301 side from the position where the blade 801 is cut, and the cutting blade 812 may cut the other end 302 side.

[Modification 2]
In the above embodiment, the blade 801 is formed in a V-shape, and the cutting edges 812, 813 are formed on both slopes, but this is not limited to the above. For example, the blade 801 may be only the cutting edge 812. A cutting method according to Modification 2, which is performed by the blade 801 on which the cutting edge 812 is formed, will be described with reference to Figs. 6 and 7. Fig. 6 shows a part of a cutting mechanism 80 for performing the cutting method according to Modification 2. Fig. 7 shows a schematic diagram for explaining the cutting method according to Modification 2.

As shown in Figures 6 and 7, the blade 801 of the second modified example is formed with only a cutting edge 812. In the second modified example, only the parts that are different from the above-mentioned embodiment will be described, and the same reference numerals will be used for the common parts, and the description will be omitted.

As shown in FIG. 7, the cutting mechanism 80 of the second modification further includes a cutting guide 805. The cutting guide 805 extends in the width direction (X-axis direction) of the sheet 30 below the moving part 804 (-Z direction). The cutting guide 805 has an inclined surface 8051 formed on one end 301 side, which inclines downward (-Z direction) from the one end 301 side toward the other end 302 side. The lifting guide 802 of the second modification is provided with a roller 8021. The roller 8021 is provided on the other end 302 side of the lifting guide 802. The lifting guide 802 biases the blade 801 upward (+Z direction) by a spring or the like (not shown).

Among the steps constituting the cutting method for the strip-shaped sheet 30, in which the protective member forming device 1 of the modified example 2 configured as described above cuts (batch cuts) the strip-shaped sheet pulled out from the outer periphery of the roll sheet to a predetermined length, the incision step and the cutting step performed by the single-edged cutting blade 812 will be described with reference to FIG. 7.

Figure 7 shows the incision process and the cutting process of variant 2. Figures 7(a) to (c) show the incision process, and Figure 7(d) shows the cutting process. The incision process is performed after the holding process. The holding process is the same as in the above embodiment, so a description of it will be omitted.

In the cutting process, as shown in FIG. 7(a), first, based on the control of the control unit 40, the moving unit 804 moves the lift guide 802 in the width direction (X-axis direction) of the sheet 30, thereby moving the cutting edge 811 of the blade 801 to one end 301 in the width direction (-X direction) of the sheet 30, and keeps the blade 801 waiting above the sheet 30.

Next, as shown in Figures 4(b) and (c), the moving unit 804 is moved in the width direction (-X direction) of the sheet 30 under the control of the control unit 40. In this case, the roller 8021 on the lift guide 802 comes into contact with the inclined surface 8051 on the cut guide 805, and the lift guide 802, which has been biased upward (+Z direction), is guided downward (-Z direction). As a result, the cutting edge 811 of the blade 801 held by the lift guide 802 cuts one end 301 side while penetrating the sheet 30 along a trajectory 8111 similar to the inclination with the inclined surface 8051.

Specifically, as shown in Fig. 7(b) and Fig. 7(c), the blade 801 is moved in the width direction (-X direction) of the sheet 30 from one end 301 side to the other end 302 side. This allows the cutting edge 812 of the blade 801 to penetrate the sheet 30 and cut the sheet 30 in the width direction (-X direction) along a trajectory 8111.

By performing this cutting process, the cutting blade 812 does not come into contact with one end 301 of the sheet 30, which prevents the end of the sheet 30 from curling up, reduces the burden on the cutting blade 812 from the blade 801, prevents the cutting blade 812 from becoming dull, and reduces the frequency of blade replacement.

Next, after the incision process, the cutting process of modified example 2 is executed under the control of the control unit 40. In the cutting process of modified example 2, as shown in FIG. 7(d), under the control of the control unit 40, the moving unit 804 is moved in the width direction (+X direction) of the sheet 30, so that the cutting edge 812 of the blade 801 is brought forward to cut the sheet 30 by moving the blade 801 across the sheet 30.

Specifically, as shown in FIG. 7(d), with the cutting edge 812 of the blade 801 inserted into the sheet 30, the blade 801 is moved in the width direction (+X direction) of the sheet 30 from one end 301 side to the other end 302 side. This allows the cutting edge 812 of the blade 801 to cut the sheet 30 in the width direction (X axis direction).

As described above, by performing the cutting method according to variant 2, the blade 801 can penetrate the sheet 30 without raising and lowering the lift guide 802 using a power source such as a motor. This allows for simplification of the device.

The embodiments of the present invention are not limited to the above-mentioned embodiments and modifications, and may be modified, substituted, or altered in various ways without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in a different way due to technological advances or derived other technologies, it may be implemented using that method. Therefore, the claims cover all embodiments that may fall within the scope of the technical idea of the present invention.

As described above, the method of cutting sheet 30 using the protective member forming device of the present invention can reduce the frequency of replacing the blade 801 that cuts sheet 30. Therefore, it is particularly useful in the manufacturing field of semiconductors and the like, which includes a process of batch cutting a strip of sheet pulled out from the outer periphery of a roll sheet to a predetermined length.

1: protective member forming device, 17: sheet conveying mechanism, 30: sheet, 40: control unit,
80: cutting mechanism, 82: suction surface, 161: sheet support surface, 162: suction source,
171: sheet supply unit, 173: clamp unit, 301: one end, 302: other end,
303: part, 801: blade, 802: lift guide, 803: cutter escape groove,
804: moving part, 805: cutting guide, 811: cutting edge, 812: cutting blade,
813: cutting blade, 1711: roll sheet, 8021: roller, 8051: inclined surface,
8111: trajectory, W: wafer, Wa: upper surface, Wb: lower surface, c: center

Claims (3)

A method for cutting a strip sheet, which comprises batch cutting a strip sheet pulled out from an outer periphery of a roll sheet into a predetermined length, comprising the steps of:
a holding step of suction-holding the belt-like sheet on a suction surface of a table;
a cutting step in which a blade having a sharp cutting edge at a lower end is inserted through the belt-shaped sheet from above the belt-shaped sheet held by suction on the suction surface, so that the cutting edge enters a groove formed on the suction surface;
the cutting step of cutting the strip-shaped sheet by moving the blade forward so as to cut the strip-shaped sheet after the cutting step, and the cutting edge of the blade is moved forward so as to cut the strip-shaped sheet. The blade is V-shaped, with cutting edges formed on both slopes,
In the cutting step, when the strip sheet is pierced, one end of the strip sheet is cut,
2. The method for cutting a strip-shaped sheet according to claim 1, wherein in the cutting step, the blade is moved toward the other end side to cut the strip-shaped sheet. The blade is V-shaped, with cutting edges formed on both slopes,
In the cutting step, the blade is inserted through the center of the width of the belt-shaped sheet,
The method for cutting a strip sheet as described in claim 1, wherein the cutting process includes a first cutting process in which the blade that was cut in the cutting process is moved widthwise toward one end of the strip sheet to cut from the center to one end of the strip sheet, and a second cutting process in which the blade is returned to the position where it was cut in the cutting process and then moved widthwise toward the other end to cut from the center to the other end of the strip sheet.