JP2023151491A - Metal structure and cooler - Google Patents

Abstract

To provide a metal structure having a flow path through which working fluid is easy to flow, capable of adjusting a thickness to a desired one, and having a cavity structure for promoting boiling of the working fluid, and a cooler using the metal structure.SOLUTION: A metal structure 1 comprises: a first metal part 2 having a heat transfer surface 2a to which heat generated from a heat source is transferred; a second metal part 3 having heat radiation surfaces 3a, 3b facing the first metal part 2; a plurality of columnar metal parts 5 arranged at intervals between the first metal part 2 and the second metal part 3, having a cavity 51 formed therein, and having on a surface an opening 52 communicating with the cavity 51; a plurality of communication grooves 6 formed between the plurality of columnar metal parts 5; and a plurality of metal fin portions 7 extending along the communication grooves 6 in the communication grooves 6.SELECTED DRAWING: Figure 1

Description

The present invention relates to metal structures and cooling devices.

With the increasing functionality of electronic devices in recent years, heating elements such as electrical and electronic components (hereinafter simply referred to as "heating elements") are mounted in a high density inside electronic devices. The amount of heat generated tends to increase. If the temperature of the heating element rises above a predetermined permissible temperature, it may cause the heating element to malfunction, so it is necessary to maintain the temperature of the heating element at or below the permissible temperature at all times. Therefore, a cooling device for cooling a heat generating element is usually installed inside an electronic device. Examples of such cooling devices include vapor chambers, heat pipes, and boiling type cooling devices that utilize latent heat (heat of vaporization) by changing the phase of the working fluid from the liquid phase to the gas phase. It is being

Among these, vapor chambers and heat pipes generally include a tubular container having an internal space filled with a working fluid. Here, the tubular container has an evaporation section provided with an evaporation surface that evaporates a liquid-phase working fluid to change its phase to a gas-phase working fluid at one end, and a gas-phase working fluid at the other end. Examples include those having a condensing section that condenses the working fluid to change the phase to a liquid working fluid. At this time, the working fluid whose phase has been changed from a liquid phase to a gas phase in the evaporation section flows from the evaporation section to the condensation section. Further, the working fluid whose phase has changed from a gas phase to a liquid phase in the condensing section flows from the condensing section to the evaporating section. A vapor chamber or a heat pipe transports heat from the evaporating section to the condensing section within a tubular container by circulating a working fluid between the evaporating section and the condensing section.

In addition, a boiling type cooling device (CVC) has a structure in which a fluid is sealed in a substantially rectangular parallelepiped or flat container, and the inner surface corresponds to the outer surface of the container to which a heating element such as an electronic component is attached. Examples include those that serve as the evaporation surface of the evaporation section. Here, the sealed fluid is evaporated by the heat received from the heating element in the evaporation section, and the fluid that has become a gas phase is heated through a cooling pipe or heat exchanger that is installed through the condensation section located above the evaporation section. It is cooled by the pipe and undergoes a phase change to the liquid phase.

The evaporation surface in the cooling device may include, for example, a structure including a porous metal structure (heat transfer member) made of a sintered body of metal powder. Among these, as a porous metal, for example, Patent Document 1 includes a metal ligament and a first pore, a second pore smaller than the first pore is formed in the metal ligament, and the surface area of the metal ligament is A porous metal having an area of 65 m ² /g or more is described. This porous metal is produced by a process of attaching metal to a network structure having a plurality of fibers, forming an alloy having first pores from the metal, and selectively removing a part of the metal from the alloy. The porous metal is formed by a method including forming a porous metal including first pores and second pores smaller than the first pores.

Japanese Patent Application Publication No. 2016-169429

However, porous metal structures made of sintered metal powder have complicated flow paths for working fluid, making it difficult for gas or liquid phase working fluids to flow. It is also difficult to form a cavity structure inside which promotes boiling of the working fluid. Furthermore, in a porous metal in which a metal layer is attached to the surface of a network structure, as described in Patent Document 1, if an attempt is made to increase the thickness of the resulting porous metal, the first pores will be closed. It is also difficult to adjust the thickness of the quality metal to a desired thickness.

The present invention provides a metal structure that has a flow path through which a working fluid can easily flow, can be adjusted to a desired thickness, and has a cavity structure that promotes boiling of the working fluid, and a metal structure using the same. The purpose is to provide a cooling device.

In order to achieve the above object, the gist of the present invention is as follows.

(1) a first metal part having a heat transfer surface to which heat generated from a heat source is transferred; a second metal part having a heat dissipation surface facing the first metal part; A plurality of columnar metal parts arranged at intervals between the metal parts, each having a cavity formed therein and an opening communicating with the cavity on the surface, and a plurality of columnar metal parts formed between the plurality of columnar metal parts. A metal structure comprising: a plurality of communication grooves; and a plurality of metal fin portions extending within the communication groove and along the communication groove.

(2) At least one of the first metal part, the second metal part, the columnar metal part, and the metal fin part is selected from the group of copper-based materials, iron-based materials, aluminum-based materials, and titanium-based materials. The metal structure according to (1) above, which is made of a sintered body of metal powder containing at least one kind of material.

(3) The plurality of communicating grooves have intersecting portions that intersect with each other, and the intersecting portions are configured with a three-dimensional intersection structure in which the intersecting communicating grooves are arranged at different heights. The metal structure according to (1) or (2) above.

(4) The metal structure according to (3), wherein the second metal part has a first heat radiation surface opening on the heat radiation surface corresponding to the intersection of the communication grooves.

(5) The cavity of the columnar metal part communicates with a second heat radiation surface opening provided on the heat radiation surface of the second metal part through an opening of the columnar metal part facing the second metal part. The metal structure according to (4) above.

(6) The metal structure according to any one of (1) to (5) above, wherein the cavity of the columnar metal part communicates with the communication groove through the opening of the columnar metal part.

(7) The columnar metal part has at least one specific cavity among the cavities whose maximum cross-sectional dimension is larger than the opening size of the columnar metal part, from (1) to (6) above. ) The metal structure according to any one of the above.

(8) The metal structure according to any one of (1) to (7), wherein the metal fin portion is thermally connected to the first metal portion.

(9) A cooling device comprising the metal structure according to any one of (1) to (8) above.

(10) The cooling device according to (9) above, wherein the cooling device is a vapor chamber, a boiling type cooling device, or a heat pipe.

According to the present invention, there is provided a metal structure that has a flow path through which a working fluid can easily flow, can be adjusted to a desired thickness, and has a cavity structure that promotes boiling of the working fluid; The cooling device used can be provided.

FIG. 1 is a perspective view schematically showing a metal structure according to an embodiment of the present invention. FIG. 2 is a diagram showing the metal structure according to the embodiment of the present invention with the second metal part removed so that the states of the columnar metal part, the communication groove, and the metal fin part can be seen. FIG. 3 is a side view of a metal structure according to an embodiment of the invention. FIG. 4 is an enlarged view for explaining the size (dimensions) of a cavity and an opening formed in one columnar metal part constituting the metal structure shown in FIG. 3. FIG. FIG. 5 is a diagram for explaining the positional relationship of a columnar metal part having a cavity and an opening, a communication groove having an intersection, and a metal fin, which constitute a metal structure according to another embodiment. 5(a) shows a case where a plurality of communicating grooves intersect with each other at about 60 degrees, and FIG. 6(b) shows a case where curved portions of the plurality of communicating grooves intersect with each other. FIG. 6 is a side view of a metal structure according to another embodiment. FIG. 7 is a perspective view showing the inside of a boiling type cooling device, which is an example of a cooling device having a metal structure according to the present invention.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the following embodiments, and various changes can be made without changing the gist of the present invention.

FIG. 1 is a perspective view schematically showing a metal structure according to an embodiment of the present invention, and FIG. 3 is a side view of the metal structure according to the embodiment of the present invention, and FIG. 4 is a side view of the metal structure shown in FIG. 3. FIG. 3 is an enlarged view for explaining the size (dimensions) of a cavity and an opening formed in one of the constituent columnar metal parts.

As shown in FIGS. 1 to 3, the metal structure 1 includes a first metal part 2 having a heat transfer surface 2a to which heat generated from a heat source is transferred, a heat radiation surface 3a facing the first metal part 2, 3b, the second metal part 3 is disposed at a distance between the first metal part 2 and the second metal part 3, has a cavity 51 formed therein, and has an opening 52 communicating with the cavity 51 on its surface. A plurality of columnar metal parts 5 having a plurality of columnar metal parts 5, a plurality of communication grooves 6 formed between the plurality of columnar metal parts 5, and a plurality of metal columns extending along the communication grooves 6 in these communication grooves 6. A fin portion 7 is provided.

As a result, the communication groove 6 is formed between the plurality of columnar metal parts 5, and by having the metal fin part 7 extending along the communication groove in the communication groove 6, the communication groove 6 and the metal fin are formed. Since the portion 7 forms a flow path for the working fluid, the flow of the working fluid inside the metal structure 1 can be promoted. In addition, since the thickness of the first metal part 2 and the second metal part 3 facing the first metal part 2 can be adjusted, even though they have a flow path for the working fluid by the communication groove 6, The thickness of the metal structure 1 can be adjusted to a desired thickness. Further, by forming a cavity 51 inside the columnar metal part 5 and having an opening 52 communicating with this cavity 51, the working fluid supplied into the cavity 51 through the opening 52 can be transferred from the first metal part 2 to the columnar metal part 5. The heat transmitted to the metal part 5 can be efficiently heated to promote the phase change of the working fluid from the liquid phase to the gas phase. Therefore, the metal structure has a flow path through which the working fluid can easily flow, the thickness of the metal structure 1 can be adjusted to a desired thickness, and a cavity structure that promotes boiling of the working fluid. And a cooling device using the same can be provided.

As shown in FIG. 1, the metal structure 1 includes at least a first metal part 2, a second metal part 3, a columnar metal part 5, a communication groove 6, and a metal fin part 7.

Here, at least one of the first metal part 2, the second metal part 3, the columnar metal part 5, and the metal fin part 7 is selected from the group of copper-based materials, iron-based materials, aluminum-based materials, and titanium-based materials. It is preferable to consist of a sintered body of metal powder containing at least one kind of material (metal material), more preferably a sintered body of metal powder containing at least one kind of metal material. As a result, the thermal conductivity of the parts made of sintered metal powder is increased, so the latent heat generated from the heat source can quickly change the phase of the liquid phase working fluid to the gas phase. Can be done. Further, in the communication groove 6, which will be described later, etc., the liquid phase working fluid is more likely to flow due to capillary phenomenon, so the working fluid can be made to flow more easily.

(1st metal part)
The first metal part 2 has a heat transfer surface 2a to which heat generated from a heat source is transferred. Thereby, when the heat source is thermally connected to the first metal part 2, the heat generated from the heat source is transmitted to the first metal part 2 via the heat transfer surface 2a.

The first metal part 2 transmits heat from a heat source to a columnar metal part 5 and a communication groove 6, which will be described later. At this time, a part of the heat transferred to the columnar metal part 5 is transferred to the second metal part 3, which will be described later, and is radiated through the heat radiation surfaces 3a and 3b of the second metal part 3. Due to these heat flows, the working fluid flowing through the communication groove 6 hits the columnar metal part 5 forming the groove side surface of the communication groove 6, the upper surface 2b of the first metal part forming the bottom surface of the communication groove 6, and the first metal part 2b forming the bottom surface of the communication groove 6. 2 and the heat radiation surface 3a of the metal part 3.

(Second metal part)
The second metal part 3 is provided so as to face the first metal part 2 with the columnar metal part 5 in between. More specifically, the second metal part 3 is provided facing the first metal part 2, and has heat radiation surfaces 3a and 3b on its surface. Thereby, the heat transferred from the columnar metal part 5 to the second metal part 3 is transferred to the heat radiation surfaces 3a, 3b, so that the working fluid can be heated near the heat radiation surfaces 3a, 3b.

It is preferable that the second metal part 3 has one or both of a first heat dissipation surface opening 81 and a second heat dissipation surface opening 82, which will be described later, on the heat dissipation surface 3b. Here, it is preferable that the first heat radiation surface opening 81 communicate with the communication groove 6 and the second heat radiation surface opening 82 communicate with the cavity 51, respectively.

The thickness t ₁ of the first metal part 2 and the thickness t ₂ of the second metal part 3 can be adjusted depending on the desired thickness of the metal structure 1. Therefore, the metal structure 1 can be made to a desired thickness by adjusting the thicknesses of the first metal part 2 and the second metal part 3 while the communication groove 6 ensures a flow path for the working fluid. can be configured.

(Columnar metal part)
A plurality of columnar metal parts 5 are arranged at intervals between the first metal part 2 and the second metal part 3.
As a result, communication grooves 6, which will be described later, are formed between the plurality of columnar metal parts 5, so that a flow of working fluid can be formed along the communication grooves 6. That is, the columnar metal part 5 is located in the facing part 4, which is a part surrounded by the communication groove 6 and sandwiched between the first metal part 2 and the second metal part 3.

The columnar metal part 5 has a cavity 51 formed therein, and has an opening 52 communicating with the cavity 51 on the surface 5a. As a result, the liquid phase working fluid that has flowed in from the opening 52 accumulates in the cavity 51 formed in the columnar metal part 5, and this working fluid is heated by the heat transferred to the columnar metal part 5 and changes its phase to a gas phase. Therefore, the phase change of the working fluid from the liquid phase to the gas phase can be promoted.

Here, as shown in FIG. 4, the columnar metal part 5 is a cavity in which the maximum cross-sectional dimension _d1 of the cavity 51 is larger than the dimension of the opening 52 (opening dimension _d2 ) of the columnar metal part 5. It is preferable to have at least one specific cavity 51a. Thereby, the specific cavity 51a has a reentrant structure, and the working fluid that has flowed from the opening 52 can easily accumulate in the specific cavity 51a.

The cavity 51 of the columnar metal part 5 preferably communicates with the communication groove 6 through the opening 52 of the columnar metal part 5, as shown in FIGS. 1 to 3. This makes it easier for the liquid-phase working fluid flowing through the communication groove 6 to be supplied to the cavity 51 through the opening 52, so that the efficiency of transferring latent heat to the liquid-phase working fluid in the cavity 51 can be improved.

Further, the cavity 51 of the columnar metal part 5 is connected to the second heat radiation surface opening 82 provided in the heat radiation surface 3a of the second metal part 3 via the opening 53 facing the second metal part 3 of the columnar metal part 5. It is preferable to communicate with. As a result, the working fluid that has become a gas phase in the cavity 51 is discharged to the outside of the metal structure 1 from the second heat radiation surface opening 82 via the opening 53, so that the gas phase inside the opening 52 and the communication groove 6 is released. Also, by reducing the number of opposing flows of the liquid-phase working fluid, the working fluid can be more efficiently circulated inside the metal structure 1.

The interval at which the columnar metal parts 5 are arranged (arrangement pitch) is not particularly limited, but can be, for example, in a range of 2 mm or less. Further, the sum of the height h of the columnar metal part 5, the thickness _t1 of the first metal part 2, and the thickness _t2 of the second metal part 3 can be, for example, in a range of 0.2 mm or less. .

(Communication groove)
A plurality of communication grooves 6 are provided in the metal structure 1, and each communication groove 6 is formed between a plurality of columnar metal parts 5. This defines a rough flow path for the working fluid, and also facilitates the flow of the working fluid due to capillary action on the groove surface of the communication groove 6, so that the liquid and gas inside the metal structure 1 are The flow of working fluid can be promoted.

The groove side surface of the communication groove 6 is constituted by the surface 5a of the columnar metal part 5. Thereby, the working fluid flowing through the communication groove 6 can be heated by the heat transferred to the columnar metal part 5 and can be changed into a gas phase. Further, the working fluid can be caused to flow into the cavity 51 from the opening 52 provided in the surface 5a of the columnar metal part, so that the phase of the working fluid can be changed into a gas phase in the cavity 51.

The communication groove 6 may include only the communication groove 61 along one direction, or may include the communication groove 61 along one direction and the communication groove 62 along the other direction. These plurality of communication grooves 6 have intersecting portions 6a that intersect with each other, and the intersecting portions 6a are constructed with a three-dimensional intersection structure in which the intersecting communication grooves 6 are arranged at different heights. Preferably. As a result, at the intersection 6a, the flow of working fluid flowing through the communication groove 61 along one direction and the flow of working fluid flowing through the communication groove 62 along the other direction are formed at different height positions. Therefore, the working fluids flowing through the intersecting communication grooves 6 are less likely to collide with each other at the intersection 6a and cause turbulence, so that the working fluid can flow smoothly in each of the communication grooves 61.

At this time, it is preferable that the second metal part 3 has a first heat dissipation surface opening 81 in the heat dissipation surface 3b on the upper surface, corresponding to the intersection 6a of the communication groove 6. Thereby, the working fluids flowing through the intersecting communication grooves 6 can flow even more smoothly in the respective communication grooves 61.

In the metal structure 1 of FIGS. 1 to 3, the communication groove 61 along one direction and the communication groove 62 along the other direction intersect at right angles, but the present invention is not limited to this. For example, as in the metal structure 1A shown in FIG. A communication groove 63 may be provided along the direction. Furthermore, as in the metal structure 1B shown in FIG. 4(b), at least one of the communication grooves 6 may be at least partially bent. Furthermore, the communication grooves 6 can be formed to have a shape such as plain weave, twill weave, or satin weave, for example.

(Metal fin part)
A plurality of metal fin portions 7 are formed in the communication groove 6 so as to extend along the communication groove 6 . As a result, the flow of the working fluid within the communication groove 6 is guided in the direction along the communication groove 6, and the surface area of the communication groove 6 is increased by the metal fin portion 7, so that the flow of the working fluid within the communication groove 6 is The efficiency of latent heat transfer can be increased. Furthermore, in areas where a plurality of metal fin parts 7 face each other, or in parts where the groove wall surface of the communication groove 6 and the metal fin parts 7 face each other, the flow of the working fluid tends to become turbulent. Also from the viewpoint of stirring the working fluid, the efficiency of transferring latent heat to the working fluid can be improved.

Preferably, the metal fin portion 7 is thermally connected to the first metal portion 2. Here, the metal fin part 7 may be directly connected to the first metal part 2, as shown in FIGS. They may be connected via a member. For example, the metal fin portion 7C may be thermally connected to one or both of the columnar metal portion 5 and the second metal portion 3, as shown in FIG. At this time, the metal fin portions 7C are provided not only on the bottom surface of the communication groove 6 but also on the side surfaces and the top surface of the groove.

As shown in FIGS. 1 to 3, the metal fin portion 7 may be formed to extend along the communication groove 6, and may be at least partially inclined with respect to the extending direction of the communication groove 6. It may be formed as follows.

(Method for manufacturing metal structure)
The method for manufacturing the metal structure 1 is not particularly limited, but for example, fiber impregnation is performed by impregnating a cloth with a small coverage rate, such as gauze, with a slurry containing metal powder and a solvent on a copper plate that will become the first metal part 2. The laminate obtained by laminating the bodies and further laminating the slurry on top of the slurry to form the part that will become the second metal part 3 is processed from above using a plate made of a material that does not bond with metal powder. By firing at a temperature that vaporizes and burns out the solvent and the cloth while pressing, it is possible to produce the metal structure 1 having the columnar metal parts 5 and the communication grooves 6 in the portion where the cloth was.

(Applications of metal structures)
The metal structure 1 has a configuration capable of contacting a liquid-phase working fluid sealed in an internal space of a container and transferring heat through the working fluid, and can be preferably used in a cooling device. Here, examples of the cooling device include a vapor chamber, a heat pipe, and a boiling type cooling device.

FIG. 7 is a perspective view showing the inside of a boiling type cooling device, which is an example of the cooling device 10 having the metal structure 1 according to the present invention.

The metal structure 1 is an inner surface 11a of a container 11 having an internal space S filled with a working fluid F1, and includes at least one heating element (not shown) thermally connected to an outer surface 11b of the container 11. It is installed at a position corresponding to the mounting position P, and transmits heat from the heating element to the liquid phase working fluid F1 (L) sealed in the lower part of the internal space S of the container 11. L) is heated and boiled to cause a phase change of the working fluid F1 from the liquid phase to the gas phase. At this time, the metal structure 1 transfers heat from the heating element to the liquid-phase working fluid F1 (L), evaporates the liquid-phase working fluid F1 (L), and converts the liquid-phase working fluid F1 (L) into a gas-phase working fluid F1 (g). It acts as an evaporator that changes the phase.

The container 11 of the cooling device 10 in which the metal structure 1 is provided has a condensing pipe 14 extending through the container 11 with a through hole 13 and through which a refrigerant flows, at an upper position of the internal space S. Be prepared for more.

The internal space S of the container 11 in which the metal structure 1 is provided is a space that is sealed from the outside environment, and is depressurized by a degassing process. This prevents the liquid-phase working fluid F1 (L) and gas-phase working fluid F1 (g) from leaking from the container 11, and adjusts the pressure in the internal space S to operate at a desired operating temperature. It is composed of

In this cooling device 10, when the heating element generates heat, the heat is transferred to the metal structure 1 through the bottom 12 of the container 11, and the liquid phase working fluid F1 (L) is heated in the metal structure 1, and the gas phase is activated. By changing the phase to fluid F1 (g), heat from the heating element is absorbed as latent heat. Next, the working fluid F1 (g) that has changed into the gas phase moves upward through the internal space S of the container 11 and comes into thermal contact with a cooling mechanism such as the condensing pipe 14. For example, when the condensing pipe 14 is used as the cooling mechanism, another low-temperature working fluid F2 flows inside the condensing pipe 14. Therefore, when the working fluid F1 (g) that has changed to the gas phase comes into contact with or approaches the outer surface of the condensing tube 14, it releases latent heat due to the heat exchange action of the condensing tube 14, and changes from the gas phase to the liquid phase. Phase change. During the phase change from the gas phase to the liquid phase, the latent heat released from the gas phase working fluid F1 (g) is transferred to the other working fluid F2 flowing through the condensing pipe 14. Thereby, the working fluid F1 (L) whose phase has changed to a liquid phase flows back through the internal space S of the container 11 from the upper part to the lower part under the action of gravity. The working fluid F1 repeats a phase change from a liquid phase to a gas phase and a phase change from a gas phase to a liquid phase in the sealed internal space S of the container 11. Then, the other working fluid F2 that has received heat from the gas phase working fluid F1 (g) flows from the inside of the cooling device 10 to the outside along the extending direction of the condensing pipe 14, so that the heat generated by the heating element is is transported to the outside of the boiling type cooling device, which is the cooling device 10.

(others)
In the metal structure 1 of FIGS. 1 to 3, the first metal part 2 is plate-shaped, but the present invention is not limited thereto. For example, a fin may be provided in the thickness direction of the first metal portion 2, and the columnar metal portion 5 and the second metal portion 3 may be provided on the surface of this fin.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and includes all aspects included in the concept of the present invention and the scope of the claims. It can be modified to .

1 Metal structure 10 Cooling device 11 Container 12 Bottom of container 13 Through hole 14 Condensing pipe 2 First metal part 2a Heat transfer surface (lower surface of first metal part)
2b Upper surface of first metal part 3 Second metal part 3a Heat dissipation surface (lower surface of second metal part)
3b Heat dissipation surface (top surface of second metal part)
4 Opposing part 5 Columnar metal part 5a Surface of columnar metal part 51 Cavity 51a Specific cavity 52 Opening facing the communication groove of the columnar metal part 53 Opening facing the second metal part of the columnar metal part 6 Communication groove 6a Intersection part 61 - Communication groove along the direction 62, 63 Communication groove along the other direction 7 Metal fin part 81 First heat radiation surface opening 82 Second heat radiation surface opening d Maximum cross-sectional dimension of ₁ cavity d ₂ Opening dimension h Column metal part height t ₁ Thickness of the first metal part t ₂ Thickness of the second metal part F1 Working fluid F1 (L) Working fluid in liquid phase F1 (g) Working fluid in gas phase

Claims (10)

a first metal part having a heat transfer surface to which heat generated from the heat source is transferred;
a second metal part having a heat dissipation surface facing the first metal part;
a plurality of columnar metal parts disposed at intervals between the first metal part and the second metal part, each having a cavity formed therein and an opening communicating with the cavity on the surface;
a plurality of communication grooves formed between the plurality of columnar metal parts;
A metal structure comprising: a plurality of metal fin portions extending within the communication groove and extending along the communication groove. At least one of the first metal part, the second metal part, the columnar metal part, and the metal fin part is made of at least one selected from the group of copper-based materials, iron-based materials, aluminum-based materials, and titanium-based materials. The metal structure according to claim 1, comprising a sintered body of metal powder containing one type of material. The plurality of communication grooves have intersections that intersect with each other,
3. The metal structure according to claim 1, wherein the intersection portion has a three-dimensional intersection structure in which the intersecting communication grooves are arranged at different heights. The metal structure according to claim 3, wherein the second metal part has a first heat dissipation surface opening on the heat dissipation surface corresponding to the intersection of the communication grooves. Claim 4: The cavity of the columnar metal part communicates with a second heat radiation surface opening provided in a heat radiation surface of the second metal part through an opening of the columnar metal part facing the second metal part. Metal structure described in. The metal structure according to any one of claims 1 to 5, wherein the cavity of the columnar metal part communicates with the communication groove through the opening of the columnar metal part. 7. The columnar metal part has at least one specific cavity among the cavities in which the maximum cross-sectional dimension of the cavity is larger than the opening size of the columnar metal part. Metal structure described in. The metal structure according to claim 1 , wherein the metal fin portion is thermally connected to the first metal portion. A cooling device comprising the metal structure according to any one of claims 1 to 8. The cooling device according to claim 9, wherein the cooling device is a vapor chamber, a boiling type cooling device or a heat pipe.

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