JP2023148502A - Charged particle beam deflection device - Google Patents

Abstract

To provide a charged particle beam deflection device that can cool a coil more efficiently.SOLUTION: A charged particle beam deflection device includes; a hollow member having a hollow shape through which a charged particle beam passes; a laminated structure having a plurality of layers that cover the outer peripheral surface of the hollow member and are laminated in a direction from the inside to the outside of the hollow member; a first coil that deflects the charged particle beam in a first direction different from a traveling direction of the charged particle beam; and a second coil that deflects the charged particle beam in a second direction different from the first direction. The plurality of layers include a first coil support layer that supports the first coil and a second coil support layer that supports the second coil. The hollow member is disposed to form a gap between the inner peripheral surface of the laminated structure and the outer peripheral surface of the hollow member so that the outer peripheral surface of the hollow member does not come into contact with the first coil and the second coil.SELECTED DRAWING: Figure 13

Description

The present invention relates to a charged particle beam deflection device.

Conventionally, particle beam therapy has been performed in which a charged particle beam accelerated to high energy is irradiated onto an affected area of a patient, such as cancer.

Patent Document 1 discloses a technology in which a charged particle beam generated using a beam generator is accelerated by a beam accelerator, the trajectory of the charged particle beam is adjusted by a beam scanning device, and the charged particle beam is irradiated to the affected area of a patient. is listed. The beam scanning device described in Patent Document 1 includes a plurality of coils that deflect a charged particle beam, and a structural member configured by laminating a plurality of layers that supports the plurality of coils. Patent Document 1 describes flowing a cooling solvent into gaps between structural members in order to cool the coil.

JP2021-32611A

However, the present inventors have come to recognize the following problems. That is, the present inventors believe that in the technique described in Patent Document 1, a flow path through which a cooling solvent flows is formed in a gap between structural members, but there is room for cooling the coil with a cooling solvent more efficiently. Thought.

The present invention has been made in view of these circumstances, and one exemplary purpose thereof is to provide a charged particle beam deflection device that can cool a coil more efficiently.

In order to solve the above problems, a charged particle beam deflection device according to an aspect of the present invention includes a hollow member having a hollow shape through which a charged particle beam passes, and a device that covers the outer circumferential surface of the hollow member and allows the charged particle beam to pass through the inside of the hollow member. a laminated structure having a plurality of layers laminated in an outward direction; a first coil that deflects a charged particle beam in a first direction different from the traveling direction of the charged particle beam; and a second coil different from the first direction. and a second coil that deflects the charged particle beam in the direction. The plurality of layers include a first coil support layer that supports the first coil and a second coil support layer that supports the second coil, and the hollow member has an inner peripheral surface of the laminated structure and an outer peripheral surface of the hollow member. The hollow member is arranged to form a gap between the first coil and the second coil so that the outer circumferential surface of the hollow member does not come into contact with the first coil and the second coil.

Note that arbitrary combinations of the above components and expressions of the present invention converted between methods, devices, systems, etc. are also effective as aspects of the present invention.

According to the present invention, it is possible to provide a charged particle beam deflection device that can cool a coil more efficiently.

1 is a schematic configuration diagram of a charged particle beam irradiation device according to an embodiment of the present invention. FIG. 2 is a perspective view of a charged particle beam deflection device according to the same embodiment. FIG. 3 is a cross-sectional view of the charged particle beam deflection device according to the same embodiment. 4 is an enlarged view of area A shown in FIG. 3. FIG. FIG. 5 is a diagram showing a case where a hole having a different form from the example shown in FIG. 4 is formed in the inflow member. 4 is an enlarged view of region B shown in FIG. 3. FIG. FIG. 3 is a cross-sectional view of the structure perpendicular to the X-axis direction. FIG. 2 is a perspective view of an inner cylinder according to an embodiment of the present invention. It is a perspective view of the 1st winding frame layer arrange|positioned in an inner cylinder. FIG. 2 is a perspective view showing a water channel member of a first water channel layer according to an embodiment of the present invention. It is a perspective view of the 2nd winding frame layer based on the same embodiment. It is a perspective view of the outer cylinder concerning the same embodiment. It is an enlarged view which shows a part of cross section perpendicular|vertical to the X-axis of an inner cylinder and a structure. It is an enlarged view which shows a part of cross section perpendicular|vertical to the X-axis of the inner cylinder and structure based on a 1st modification. It is an enlarged view which shows a part of cross section perpendicular|vertical to the X-axis of the inner cylinder and structure based on a 2nd modification. FIG. 2 is a schematic configuration diagram of a charged particle beam deflection device according to a second embodiment. FIG. 3 is a diagram of aligned structures viewed from the charged particle beam exit side. FIG. 3 is an enlarged view showing how structures are aligned by positioning pins.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In addition, in the description of the drawings, the same elements are given the same reference numerals, and redundant description will be omitted as appropriate. Further, the configuration described below is an example and does not limit the scope of the present invention in any way.

[background]
A scanning electromagnet, which is an electromagnet that scans a charged particle beam, has the role of ultimately controlling the position of the charged particle beam irradiated onto the human body. Therefore, high accuracy is required for the installation position of the scanning electromagnet. If this requirement cannot be met, the position at which the charged particle beam is irradiated will shift, reducing the accuracy of treatment. In fact, in the field of treatment using a scanning electromagnet, if a deviation occurs in the position where the charged particle beam is irradiated, the deviation is corrected by the irradiation control system, thereby increasing the accuracy of the treatment. Therefore, although the deviation of the irradiation position is eventually eliminated, the work load required to correct it is large. Installing the scanning electromagnet at an appropriate position to reduce this work burden has become a major challenge.

Furthermore, from the viewpoint of facility management, recovery of investment in treatment equipment is of great concern to operators of treatment facilities. After introducing a treatment device, it is necessary to put the treatment device into operation as soon as possible to recover the investment. Simply installing a treatment device does not allow the device to be used for treatment. Treatment devices need to be tuned in terms of hardware and software to obtain a charged particle beam of precision that can be used for treatment. At this time, physically placing the components of the treatment device accurately leads to a reduction in the time required for this adjustment, which naturally leads to an increase in the number of patients who can receive treatment.

In one embodiment of the present invention described below, two pairs of scanning electromagnets are arranged in parallel, and the diameters of the scanning electromagnets are inclined, thereby reducing the size of the charged particle beam deflection device. Miniaturization of charged particle beam deflection devices is directly linked to ease of handling. If the charged particle beam deflection device can be miniaturized, the workability in adjusting the irradiation of the charged particle beam will improve. In particular, when installing (introducing) a device, the downsizing of the device has a large impact on work efficiency.

However, in general, when the diameter is made smaller, the number of turns in the coil decreases, and the magnetic field generated from the scanning electromagnet becomes smaller. Similarly, when the magnetic field is reduced in the axial direction as described above, the magnetic field generated by the scanning electromagnet becomes weaker. When the magnetic field becomes weaker, the force that bends the charged particle beam becomes weaker. When this force weakens, it is necessary to increase the distance between the scanning electromagnet and the isocenter to compensate for the weakened magnetic field in order to maintain the width of the irradiation field. When irradiating charged particle beams from multiple directions by moving a scanning electromagnet in a circumferential manner around the isocenter, the size of the device increases as the distance between the scanning electromagnet and the isocenter increases. This is because the distance between the scanning electromagnet and the isocenter is the radius of the circle in which the scanning electromagnet moves, and as the circle in which the scanning electromagnet moves becomes larger, the device must be made larger accordingly.

Therefore, it is conceivable to keep the device compact by increasing the current value used in the scanning electromagnet higher than usual to generate a magnetic field with the strength necessary to scan the charged particle beam. However, with high currents, cooling of the scanning electromagnet becomes more important. Therefore, effective cooling of scanning electromagnets has become a major challenge. Accordingly, one embodiment of the present invention provides a charged particle beam deflection device that allows a cooling solvent for cooling a scanning electromagnet to flow smoothly.

[First embodiment]
FIG. 1 is a schematic configuration diagram of a charged particle beam irradiation apparatus 1 according to an embodiment of the present invention. The charged particle beam irradiation device 1 includes an accelerator 10, a charged particle beam transport system 12, a bending electromagnet 14, and an irradiation nozzle 16. The irradiation nozzle 16 is arranged in a treatment room 18 equipped with a treatment table on which a patient is placed.

The accelerator 10 is a device that generates a charged particle beam, and is, for example, a synchrotron, a cyclotron, or a linear accelerator. A charged particle beam generated by the accelerator 10 is guided to a bending electromagnet 14 through a charged particle beam transport system 12. Here, the charged particle beam may be a beam of various known charged particles, and the charged particles may be, for example, proton beams, alpha particles, heavy particles, or electrons.

The charged particle beam transport system 12 includes one or more charged particle beam conditioning means 122, a vacuum duct 124, a distribution electromagnet 126, a fan-shaped vacuum duct 128, and the like. The accelerator 10, the charged particle beam adjustment means 122, and the distribution electromagnet 126 are connected by a vacuum duct 124, and the distribution electromagnet 126 and the bending electromagnet 14 are connected by a fan-shaped vacuum duct 128.

The charged particle beam is generated in the upstream accelerator 10, travels within the vacuum duct 124 and the fan-shaped vacuum duct 128 to avoid (or reduce) attenuation, and is adjusted downstream by the charged particle beam adjustment means 122. It is guided by the bending electromagnet 14 on the side.

The charged particle beam adjusting means 122 includes a beam slit for adjusting the beam shape and/or dose of the charged particle beam, an electromagnet for adjusting the traveling direction of the charged particle beam, and a beam shape for adjusting the beam shape of the charged particle beam. A quadrupole electromagnet, a steering electromagnet for finely adjusting the beam position of the charged particle beam, and the like may be provided as appropriate depending on the specifications.

The irradiation nozzle 16 is located in a treatment room 18 where treatment using a charged particle beam is performed, and emits a charged particle beam. Treatment is performed by irradiating the affected area with a charged particle beam emitted from the irradiation nozzle 16. The irradiation nozzle 16 according to this embodiment can scan within a predetermined range by finely adjusting the traveling direction of the charged particle beam emitted from the irradiation nozzle 100 by adjusting the amount of current flowing and the direction of the current. Equipped with a charged particle beam deflection device for Thereby, the irradiation nozzle 16 can scan the charged particle beam two-dimensionally.

FIG. 2 is a perspective view of the charged particle beam deflection device 20 according to this embodiment. FIG. 3 is a cross-sectional view of the charged particle beam deflection device 20 according to this embodiment. The charged particle beam deflection device 20 according to this embodiment includes an outflow member 22, an inflow member 24, a yoke 26, an inner cylinder 30, an outer cylinder 32, and a structure 40.

The inner cylinder 30 (hollow member) has a hollow shape through which the charged particle beam passes. An entrance port 230 is provided at one end of the inner cylinder 30, and an exit port 250 is provided at the other end. The charged particle beam enters from the entrance 230, passes through the internal space 300 of the inner tube 30, and exits from the exit 250. Further, the inner cylinder 30 is configured such that its inner diameter and outer diameter increase nonlinearly or linearly from the incident side toward the output side.

Here, the X axis shown in FIG. 3 is an axis passing through the central axis of the inner cylinder 30, and its direction is from the entrance port 230 to the exit port 250. Furthermore, hereinafter, the "incidence side" shall mean the entrance port 230 side on the X-axis, and the "output side" shall mean the exit port 250 side on the X-axis. Further, the Y-axis shown in FIG. 3 is a direction perpendicular to the X-axis, and is a radial direction of the inner cylinder 30. Note that in this specification, the Y-axis direction may mean a direction from the inside to the outside, and the opposite direction may mean a direction from the outside to the inside.

The structure 40 is fixed to the inner cylinder 30 so as to cover the outer peripheral surface of the inner cylinder 30. In other words, the inner cylinder 30 is fixed to the structure 40 such that its outer peripheral surface covers the inner peripheral surface of the structure 40. The structure 40 includes a laminated structure and a coil, which will be described later. This coil is configured to function as a scanning electromagnet that deflects the charged particle beam passing through the interior space 300 of the inner cylinder 30. The structure 40 is configured such that its inner diameter and outer diameter increase linearly or nonlinearly from the incident side toward the output side.

The outer cylinder 32 is fixed to the structure 40 so as to cover the outer peripheral surface of the structure 40. Further, the yoke 26 is fixed to the inflow member 24 by a fixing member 249 so as to be located outside the outer peripheral surface of the structure 40. In this embodiment, the yoke 26 is not provided over the entire length of the structure 40. More specifically, the yoke 26 covers the central region of the outer circumferential surface of the structure 40 and is arranged so as not to be located at the end on the incident side and the end on the output side of the outer circumferential surface of the structure 40.

The outflow member 22 is a member that is fixed to the inner cylinder 30 and the outer cylinder 32 and forms part of a path through which a cooling solvent for cooling the coil included in the structure 40 passes. Further, the inflow member 24 is a member that is fixed to the inner cylinder 30 and the outer cylinder 32 and forms part of a path through which the cooling solvent passes. The outflow member 22 and the inflow member 24 may be made of an insulator such as FRP (Fiber Reinforced Plastics), for example. In this embodiment, a current introduction terminal (not shown) for passing a current through the coil is arranged near the inflow member 24, and by configuring the inflow member 24 with an insulator, the inflow member 24 can be It can be insulated from the structure 40 and the current introduction terminal. Further, the outflow member 22 and the inflow member 24 may be configured by a combination of a plurality of members including a non-magnetic material such as SUS. This facilitates the assembly process, such as threading and welding.

The cooling solvent may be any known cooling liquid, and in this embodiment, the cooling solvent is water. In FIG. 3, arrows shown on the outflow member 22, inflow member 24, and structure 40 indicate the direction in which the cooling solvent flows. That is, the cooling solvent flows in from the inlet member 24, passes through the gap in the structure 40, and is discharged from the outlet member 22 through the outlet 221.

FIG. 4 is an enlarged view of area A shown in FIG. As shown in FIG. 4, the inflow member 24 includes an exit side end portion 240 and an exit side pressing portion 241. The output side end portion 240 is arranged to cover the output side end surface 43 of the structure 40 and has a function as a covering member. Thereby, the coil of the structure 40 and the like are protected by the emission side end 240.

The structure 40 has an end surface 43 on the side from which the charged particle beam exits. In addition, the inner cylinder 30 has an inner cylinder protrusion 310 that protrudes outward from the end surface 43 (direction from the incident side to the output side). By fixing this inner cylinder protrusion 310 to another member, the arrangement of the inner cylinder 30 can be made more stable. As a result, the position of the coil arranged in the structure 40 becomes more stable, and the workability related to adjusting the control of the charged particle beam can be improved.

Further, in this embodiment, the inner cylinder protrusion 310 is fixed to the inflow member 24, and the inflow member 24 is fixed to the yoke 26 by a fixing member 249. In this way, the inner cylinder 30 is fixed to the yoke 26 via the inflow member 24 and the fixture. This prevents the positional relationship between the inner cylinder 30 and the yoke 26 from shifting, so that the inner cylinder 30 can be more reliably arranged at an appropriate position. As a result, the coil of the structure 40 that is integrated with the inner cylinder 30 is more reliably placed at an appropriate position.

Further, in this embodiment, a space 246 is formed that is surrounded by the inner cylinder protrusion 310 (specifically, the outer peripheral surface thereof), the end surface 43, and the output side end 240. In this embodiment, the coil arranged in the structure 40 is made of a Litz wire. For example, litz wires connecting a plurality of coils arranged in the structure 40 can be fixed together, and the space 246 can be used to cool the assembled litz wires with a cooling solvent. Note that a litz wire is a wire made by twisting together a plurality of thin conductors insulated with an insulating material such as enamel.

Furthermore, in this embodiment, the space 246 communicates with the gap in the structure 40 and forms part of the flow path for the cooling solvent. By utilizing the space 246 that communicates with the gap in the structure 40, the coil of the structure 40 can be cooled by flowing the cooling solvent more smoothly with a simple structure.

The emission side pressing portion 241 is configured to press the outer tube 32 from the outside toward the inside. Thereby, the structure 40 is pressed from the outside toward the inside. The structure 40 according to this embodiment has a laminated structure having a plurality of layers laminated in a direction from the inside to the outside. This laminated structure is pressed by the output side pressing part 241 via the outer cylinder 32, so that when the cooling solvent flows through the gap in the laminated structure, each layer constituting the laminated structure is prevented from shifting. .

Further, in the present embodiment, the emission side pressing portion 241 is an annular member that goes around the structure 40 in the circumferential direction and is located on the outer peripheral surface of the structure 40 . Therefore, the output-side pressing portion 241 can press the entire circumference of the structure 40, so that the displacement of layers in the laminated structure of the structure 40 can be suppressed more reliably.

In this embodiment, the emission side pressing part 241 has a hollow part 242 in which a hole 244 is formed, and an emission side protrusion 243 that protrudes from the end surface 43 of the structure 40 toward the emission side. The output side pressing portion 241 is coupled to the output side end portion 240 via the output side protrusion 243 .

Further, the hollow portion 242 has a hole 244 that is open in a direction from the end surface 43 of the structure 40 toward the center of the structure 40 and communicates with a space 246 . In this embodiment, the holes 244 form part of the cooling solvent flow path. Cooling solvent enters through holes 244 and flows through spaces 246 into the interstices of structure 40 .

Further, in this embodiment, the output side end portion 240 is arranged apart from the end surface 43 of the structure 40. The inner cylinder 30 functions as a closing part that closes the opening 247 on the inside of the structure 40, which is formed between the emission side end 240 and the end surface 43 included in the space 246. This prevents the cooling solvent from flowing from the space 246 in an unintended direction.

In this embodiment, the hole 244 is open in the exit side pressing part 241 in a direction parallel to the traveling direction of the charged particle beam. With reference to FIG. 5, a case where holes are formed in another form will be described. In the example shown in FIG. 5, the inflow member 25 has a space 252 therein, and this space 252 has a hole 253 extending from the space 252 in the X-axis direction (direction from the incident side to the exit side). The space 252 communicates with a hole 254 extending in the Y-axis direction. At this time, connection portions 256 and 257 for connecting hoses 258 and 259 are provided at each end of hole 253 and hole 254, respectively. A cooling solvent flows inside the hoses 258, 259, the direction of which is indicated by an arrow. Although FIG. 5 shows an example in which two holes, hole 253 and hole 254, are formed, it is also possible that either one of the holes is formed.

As shown in FIG. 5, the holes 253 and 254 formed in the inflow member 25 need to be connected to hoses 258 and 259 for flowing the cooling solvent into the holes 253 and 254. At this time, a space is required for the width of the connecting portions 256, 257 for connecting the hoses 258, 259 and the widths of the hoses 258, 259 themselves. For example, it is necessary to take a space in the X-axis direction by the width d1 taken by the connection part 256 and the hose 258, and it is necessary to take a space in the Y-axis direction by the width d2 taken by the connection part 257 and the hose 259. On the other hand, according to the present embodiment, in the emission side pressing part 241, the hole 244 is formed in the opposite direction of the X-axis to the hole 253, so that the device can be Alternatively, the charged particle beam deflection device can be made smaller without increasing the size in the radial direction of the X-axis direction.

FIG. 6 is an enlarged view of region B shown in FIG. As shown in FIG. 6, the outflow member 22 includes an entrance side end portion 220 and an entrance side pressing portion 226. The incident side end portion 220 includes an incident side protruding portion 222 provided to protrude from the incident side pressing portion 226 in the incident side direction, and an incident side covering portion disposed to cover the incident side end surface 44 of the structure 40. 224. The incident-side covering section 224 functions as a covering member, and the coils of the structure 40 are protected by the incident-side covering section 224 .

The structure 40 has an end surface 44 on the side where the charged particle beam is incident. In addition, the inner cylinder 30 has an inner cylinder protrusion 320 that protrudes outward from the end surface 44 (direction from the output side to the input side). By fixing this inner cylinder protrusion 320 to another member, the arrangement of the inner cylinder 30 can be made more stable. This makes it possible to further stabilize the position of the scanning electromagnet and improve workability in adjusting the control of the charged particle beam.

Further, in this embodiment, a space 232 is formed that is surrounded by the inner cylinder protrusion 320 (more specifically, its outer peripheral surface), the end surface 44, and the incident side end 220. For example, litz wires connecting a plurality of coils arranged in the structure 40 can be fixed together, and the space 232 can be used to cool the assembled litz wires with a cooling solvent.

Further, the space 232 communicates with a gap in the structure 40 and forms part of a flow path for the cooling solvent. In this embodiment, the cooling solvent can flow more smoothly with a simple structure by utilizing the spaces 232 communicating with the gaps in the laminated structure. The cooling solvent that has flowed from the structure 40 into the space 232 is discharged from the outlet 221 shown in FIG. 2 through a hole (not shown).

The entrance side pressing section 226 is configured to press the outer tube 32 from the outside toward the inside. The structure 40 is pressed from the outside toward the inside by the entrance-side pressing section 226 . Therefore, when the cooling solvent flows through the structure 40, displacement of each layer constituting the laminated structure of the structure 40 is suppressed.

Further, in this embodiment, the incident side pressing portion 226 is an annular member that goes around the structure 40 in the circumferential direction and is located on the outer peripheral surface of the structure 40 . For this reason, the incident-side pressing portion 226 can press the entire circumference of the structure 40, so that displacement of layers in the laminated structure of the structure 40 can be suppressed more reliably.

Furthermore, the incident-side covering section 224 is arranged apart from the end surface 44 of the structure 40, and forms an opening 233 between the incident-side covering section 224 included in the space 232 and the end surface 44. In this embodiment, the inner cylinder 30 functions as a closing part that closes the opening 233 on the inside of the structure 40. This prevents the cooling solvent flowing into the space 232 from flowing in an unintended direction.

FIG. 7 is a cross-sectional view of the structure 40 perpendicular to the X-axis. In FIG. 7, the Z axis is an axis perpendicular to the X and Y axes. The structure 40 according to the present embodiment includes a laminated structure 42, a first coil 50 that deflects the charged particle beam in a first direction different from the traveling direction of the charged particle beam, and a first coil 50 that deflects the charged particle beam in a first direction different from the traveling direction of the charged particle beam. and a second coil 52 that deflects the charged particle beam in a second direction different from the first direction.

Each of the first coil 50 and the second coil 52 is arranged to form a pair facing each other with the internal space 300 interposed therebetween. Moreover, each pair of the first coil 50 and the second coil 52 may be arranged in parallel. That is, as shown in FIG. 7, the first coil 50 and the second coil 52 may be arranged so that a cross section of the structure 40 perpendicular to the X-axis that includes both coils exists. When current flows through the first coil 50 and the second coil 52, the first coil 50 and the second coil 52 generate a magnetic field that deflects the charged particle beam.

The laminated structure 42 covers the outer peripheral surface of the inner tube 30 and includes a plurality of layers stacked in a direction from the inside of the inner tube 30 to the outside. In other words, the inner circumferential surface of the laminated structure 42 is covered by the outer circumferential surface of the inner cylinder 30. Each of the plurality of layers included in the laminated structure 42 may be made of, for example, various synthetic resins. Furthermore, the laminated structure 42 has a gap between two adjacent layers through which a cooling solvent can flow. Each of these layers has a hollow shape, and is configured such that its inner diameter and outer diameter increase linearly or nonlinearly from the incident side to the exit side.

The laminated structure 42 according to the present embodiment includes a plurality of winding frame layers (coil support layers) in which coils are arranged, and a plurality of winding frame layers that form a cooling solvent path and are arranged between two adjacent winding frame layers. It has a channel layer of. In this embodiment, the coils arranged on two adjacent winding frame layers are connected to each other. The first coils 50 arranged on each winding frame layer are electrically connected to each other, and similarly, the second coils 52 on each winding frame layer are also electrically connected to each other.

The structure 40 according to this embodiment has nine winding frame layers and nine channel layers. More specifically, the structure 40 includes, in order from the inside, a first spool layer 400, a first channel layer 420, a second spool layer 440, ..., a ninth spool layer 460, and a ninth channel layer 480. has. The structure 40 according to this embodiment has nine winding frame layers, of which three winding frame layers are shown in FIG. 6 . Note that the number of winding frame layers may be 8 or less, or 10 or more. Further, the laminated structure 42 according to the present embodiment has nine water channel layers, of which three winding frame layers are shown in FIG. Note that the number of water channel layers may be 8 or less, or 10 or more.

The first winding frame layer 400 is arranged so as to cover the outer peripheral surface of the inner tube 30, and is a coil support layer (first coil support layer) that supports a coil 502 (first coil) that deflects the charged particle beam. be. The coil 502 according to this embodiment generates a magnetic field in the Z-axis direction and deflects the charged particle beam by this magnetic field.

The first water channel layer 420 is a layer that is arranged to cover the outer circumferential surface of the first reel layer 400 and forms part of a path through which the cooling solvent passes.

The second winding frame layer 440 is a layer in which a coil 504 (first coil) for deflecting the charged particle beam is arranged. Like the coil 502, the coil 504 generates a magnetic field in the Z-axis direction, and the charged particle beam is deflected by this magnetic field.

Although not shown in FIG. 7, the third to eighth winding frame layers and the second to eighth channel layers are arranged on the outer peripheral surface of the second winding frame layer 440 so that the winding frame layers and the channel layers alternately overlap. are laminated on. Further, each of the third to fifth winding frame layers is a coil support layer (first coil support layer) that supports a coil (first coil), and each coil, like the coils 502 and 504, has a Z It is configured to generate a magnetic field in the axial direction.

The ninth winding frame layer 460 is arranged to cover the outer peripheral surface of the eighth water channel layer (not shown), and includes the coils (for example, coils 502, 504, etc.) arranged in the first to fifth winding frames. is a coil support layer (second coil support layer) that supports a coil 522 (second coil) that deflects the charged particle beam in a direction (second direction) different from the direction in which the charged particle beam is deflected (first direction). be.

A coil 522 is arranged on the ninth winding frame layer 460. The coil 522 generates a magnetic field in the Y-axis direction and deflects the charged particle beam traveling in the X-axis direction in the Z-axis direction. Further, a coil (second coil) is arranged in each of the sixth to eighth reel layers described above, and each coil is configured to generate a magnetic field in the Y-axis direction, similarly to the coil 522. has been done.

The ninth water channel layer 480 is a layer that is arranged to cover the outer circumferential surface of the ninth reel layer 460 and forms part of a path through which the cooling solvent passes. The outer cylinder 32 is arranged on the outer peripheral surface of the ninth water channel layer 480. The outer cylinder 32 is arranged so that its inner circumferential surface covers the outer circumferential surface of the ninth water channel layer 480.

FIG. 8 is a perspective view of the inner cylinder 30 according to this embodiment. As shown in FIG. 8, a groove 302 is formed in the outer peripheral surface of the inner cylinder 30 along the longitudinal direction. This groove 302 forms part of the path for the cooling solvent.

FIG. 9 is a perspective view of the first winding frame layer 400 disposed in the inner cylinder 30. A groove 402 is formed in the first reel layer 400 . A litz wire is embedded in this groove 402 and hardened with resin, thereby forming a coil (first coil).

FIG. 10 is a perspective view showing the water channel member 422 of the first water channel layer 420 according to this embodiment. The water channel member 422 shown in FIG. 10 constitutes a half circumference of the first water channel layer 420. There is another channel member having the same configuration as the channel member 422 shown in FIG. 10, and by combining these two channel members, a first channel layer 420 that goes around the outer peripheral surface of the first winding frame layer 400 is formed. be done. The water channel member 422 has a groove 424 on its outer circumferential surface, and this groove 424 forms a part of the path through which the cooling solvent passes. Note that, like the first water channel layer, each water channel layer included in the laminated structure 42 is constructed by combining two water channel members to form a water channel layer that goes around the entire circumference. In this embodiment, an example will be described in which each water channel layer is constituted by a water channel member, but each water channel layer may be formed as a mere space without using any water channel member.

FIG. 11 is a perspective view of the second reel layer 440 according to this embodiment. FIG. 11 shows a second reel layer 440 disposed on the surface of the first channel layer 420. A groove 444 is formed on the surface of the second winding frame layer 440, a litz wire is embedded in the groove 444, and the litz wire constitutes the coil 504. The groove 444 may be formed as a hole that penetrates the second winding frame layer 440 from the front surface to the back surface, or may be formed so as not to penetrate the second winding frame layer 440 from the front surface to the back surface. Further, a second channel layer is disposed on the outer surface of the second winding frame layer 440 so as to cover the outer surface. A groove is provided on the inner circumferential surface of the second channel layer, and the groove and the outer surface of the second spool layer 440 form a part of the path through which the cooling solvent passes. In this way, the winding frame layer and the channel layer are laminated on the outer circumferential surface of the inner tube 30, and the outer tube 32 shown in FIG. 12 is arranged on the outer circumferential surface of the outermost channel layer so as to cover the outer circumferential surface. be done.

FIG. 13 is an enlarged view showing a part of the cross section of the inner cylinder 30 and the structure 40 perpendicular to the X axis. In this embodiment, the inner tube 30 has a gap 304 between the inner circumferential surface of the laminated structure 42 and the outer circumferential surface of the inner tube 30 so that the outer circumferential surface of the inner tube 30 does not come into contact with the first coil and the second coil. arranged to form a Specifically, between the groove 302 provided on the outer surface of the inner cylinder 30 and the coil 502 disposed on the first winding frame layer 400, a groove is formed so that the groove 302 of the inner cylinder 30 does not come into contact with the coil 502. , a path is formed through which the cooling solvent flows.

Further, between the groove 423 formed on the inner surface of the first water channel layer 420 and the coil 502, and between the groove 424 formed on the outer surface of the first water channel layer 420 and the coil disposed on the second winding frame layer 440. 504, a path through which the cooling solvent flows is formed. Further, a path through which the cooling solvent flows is formed between the groove 454 formed on the inner surface of the second water channel layer 450 and the coil 504. Similarly, the grooves formed in the outer surface of the second channel layer 450 and the grooves formed in the surface of each channel layer form a path for cooling solvent to flow between adjacent bobbin layers or coils. .

In treatment using a charged particle beam, it is required to accurately arrange a coil at a desired position in order to improve the accuracy of the position where the charged particle beam is irradiated. In the charged particle beam deflection device 20 according to this embodiment, the laminated structure 42 in which the coil is arranged is fixed to the inner cylinder 30. For this reason, if the inner tube 30 is placed at an appropriate position, the coils are automatically placed at an appropriate position by appropriately installing the laminated structure 42 on the inner tube 30. In other words, since the laminated structure 42 and the inner cylinder 30 are integrated, the coil can be installed at an appropriate position by adjusting the position of the inner cylinder 30. In this manner, in this embodiment, by fixing the laminated structure 42 to the inner cylinder 30, the accuracy of the position of the scanning electromagnet can be improved. As a result, it becomes possible to make the work for adjusting the irradiation position of the charged particle beam more efficient.

Further, as described above, in the charged particle beam deflection device 20 according to the present embodiment, the inner cylinder 30 (hollow member) has a space between the inner peripheral surface of the laminated structure 42 and the outer peripheral surface 332 of the inner cylinder 30 The outer peripheral surface 332 of the inner cylinder 30 is arranged so as to form a gap where the outer peripheral surface 332 does not come into contact with the first coil and the second coil. Therefore, in the gap 306 between the inner circumferential surface of the laminated structure 42 and the outer circumferential surface 332 of the inner tube 30, the inner tube 30 does not directly contact the litz wire forming the first coil or the second coil. Therefore, compared to the case where the inner cylinder 30 is in contact with the coil in the gap, the area where the coil can come into contact with the cooling solvent becomes larger. As a result, the coils arranged in the laminated structure 42 (particularly the coils 502 arranged in the first winding frame layer 400) can be cooled more efficiently by the cooling solvent.

Furthermore, in this embodiment, the outer circumferential surface of the inner cylinder 30 is provided with a groove that forms a part of the flow path for the cooling solvent. Therefore, in this embodiment, since the cooling solvent can be brought into direct contact with the innermost coil, the coil can be cooled more efficiently.

As described above, in the charged particle beam deflection device according to this embodiment, a large current flows through the coil. Therefore, it is necessary to cool the coil more reliably using a cooling solvent. If the cooling solvent flows through the interstices between the layers of the laminated structure, the layers may become misaligned. If the layers shift, the flow of the cooling solvent may become stagnant and cooling may not be performed smoothly. Without proper cooling, the high current can cause the coil to become very hot.

In this embodiment, the entrance-side pressing section 226 and the exit-side pressing section 241 press the laminated structure 42 from the outside to the inside. For this reason, each layer included in the laminated structure 42 is pressed by these pressing parts, so that displacement of the position of each layer is suppressed. As a result, it becomes possible to smoothly flow the cooling solvent into the gaps in the laminated structure 42 and cool the coil smoothly.

Furthermore, in this embodiment, the outflow member 22, the inflow member 24, the inner cylinder 30, and the structure 40 form spaces 232 and 246 that communicate with the gap in the structure 40, and these spaces are used as waterways through which the cooling solvent flows. I took advantage of it. As a result, a water channel can be realized with a simple structure, and the cooling solvent can flow smoothly. Further, in these spaces, litz wires and the like that connect the respective layers of the winding frame layer can be fixed together. In this case, it is possible to cool the litz wire all at once.

[First modification]
FIG. 14 is an enlarged view showing a part of the cross section perpendicular to the X axis of the inner cylinder 30 and the structure 40 according to the first modification. In the example shown in FIG. 14, the cooling solvent flows in the X-axis direction (direction from the back side to the front side of the paper) in the gap formed between the inner tube 30, the first winding frame layer 400, and the coil 502. shall be taken as a thing.

In the first modification, as shown in FIG. 14, the inner cylinder 30 is arranged so as to form a gap that does not come into contact with the coil 502 arranged on the first winding frame layer 400. More specifically, the inner cylinder 30 is arranged such that the outer peripheral surface 332 forms a gap 306 that does not contact the inner surface 404 of the first spool layer 400 and the inner surface 510 of the coil 502. In the first modification, a gap 306 is formed so that the cooling solvent comes into contact with the first winding frame layer 400, and even in such a configuration, it is possible to efficiently cool the coil 502 with the cooling solvent. .

Therefore, in the charged particle beam deflection device according to the present embodiment, compared to the case where the inner cylinder 30 is in contact with the coil 502, the cooling solvent can flow into the gap where the inner cylinder 30 is not in contact with the coil 502, so that the cooling solvent can be used more efficiently. It becomes possible to cool the coil 502.

[Second modification]
FIG. 15 is an enlarged view showing a part of the cross section perpendicular to the X axis of the inner cylinder 30 and the structure 40 according to a modification. In the second modification, the first winding frame layer 410 includes a support portion 412 that supports the coil 503 on both sides, and a bottom portion 414 that covers the inner cylinder 30 side of the coil 503. It is assumed that the cooling solvent flows in the X-axis direction (direction from the back side to the front side of the paper) in the gap formed between the inner cylinder 30 and the bottom part 414. In a second variant, the coil 503 is cooled by a cooling solvent through the bottom 414.

The outer circumferential surface 334 of the inner tube 30 contacts the coil 503 between the inner circumferential surface of the laminated structure (more specifically, the bottom surface 416 of the bottom portion 414) and the outer circumferential surface 334 of the inner tube 30. They are arranged so as to form a gap 308 in which there is no gap. This allows the cooling solvent to flow into the gap where the inner cylinder 30 and the coil do not come into contact with each other, so that the coil 502 can be cooled more efficiently with the cooling solvent.

[Second embodiment]
In the first embodiment, the first coil and the second coil are arranged in parallel. However, the present invention is not limited to this, and the first coil and the second coil may be arranged in series. That is, the first coil and the second coil may be arranged at positions shifted from each other in a direction parallel to the X-axis.

With reference to FIG. 16, a charged particle beam deflection device 60 according to a second embodiment in which a first coil and a second coil are arranged in series will be described. The charged particle beam deflection device 60 according to the second embodiment mainly includes a first deflection device 62, a second deflection device 64, and a connection member 66 that connects the first deflection device 62 and the second deflection device 64. The first deflection device 62 and the second deflection device 64 may each have various configurations included in the charged particle beam deflection device 20 according to the first embodiment.

Inside the charged particle beam deflection device 60, an internal space 72 is formed which has an entrance port 74 at one end and an exit port 76 at the other end. The charged particle beam enters the internal space 72 from the entrance port 74 in the D-axis direction shown in FIG. .

The first deflection device 62 is a device that deflects the charged particle beam in a direction perpendicular to the D-axis direction and causes the deflected charged particle beam to enter the second deflection device 64 . The first deflection device 62 includes a first structure 620 , a first yoke 622 , a first inflow member 624 , a first outflow member 630 and an inner cylinder 70 .

The inner cylinder 70 has a hollow shape and is configured so that the charged particle beam passes through the inside thereof. In this embodiment, the inner cylinder 70 is shared by the first deflection device 62 and the second deflection device 64. However, the present invention is not limited to this, and the inner cylinder may be configured independently of the first deflection device 62 and the second deflection device 64. An entrance port 74 is formed at one end of the inner cylinder 70, and an output port 76 is formed at the other end of the inner cylinder 70. Further, the inner cylinder 70 according to the second embodiment has a cylindrical shape. Note that the outer diameter and inner diameter may have a linear or non-linear slope.

The first structure 620 is configured to deflect a charged particle beam passing through the interior space 72 by means of a magnetic field. Although not shown, the first structure 620 includes a first laminated structure and a first coil. The first coil deflects the charged particle beam in a direction different from the D-axis direction using the generated magnetic field. For example, the first coil may deflect the charged particle beam in a direction perpendicular to the D-axis direction.

The first laminated structure has a hollow shape through which the charged particle beam passes, and has a plurality of layers stacked in a direction from the inside to the outside. Among these multiple layers, there is a gap between two adjacent layers through which a cooling solvent can flow. Further, the plurality of layers included in the first laminated structure include a first coil support layer that supports the first coil.

The first inflow member 624 is a member for allowing the cooling solvent to flow into the first structure 620. The first inflow member 624 is connected to the coupling member 66 . Further, the first inflow member 624 has a pressing portion 625 that presses the first structure 620 from the outside to the inside. Further, a space 628 is formed inside the first inflow member 624, and is surrounded by the end surface of the first structure 620, the first inflow member 624, the connecting member 66, and the outer peripheral surface of the inner cylinder 70. 628 communicates with a gap in the first structure 620. Furthermore, the first inflow member 624 has a hole 626 that is open in the D-axis direction, and this hole 626 communicates with a space 628.

The first outflow member 630 is a member that allows the cooling solvent to flow out. The first outflow member 630 includes a pressing part 634 that presses the first structure 620 from the outside to the inside, and a covering member 632 that covers the end surface of the first structure 620. In the second embodiment, a space 633 is defined by the end surface of the first structure 620, the covering member 632, and the outer peripheral surface of the inner cylinder 70. This space 633 communicates with a gap in the first structure 620 and a discharge port (not shown).

In the first deflection device 62, the cooling solvent flows in the direction of the arrow shown in FIG. The coil is cooled. Specifically, the cooling solvent flows into the space 628 from the hole 626 of the first inlet member 624 and is discharged from the outlet via the first structure 620 and the space 633 of the first outflow member 630. . At this time, the first coil is cooled by the cooling solvent flowing through the gap in the first structure 620.

The second deflection device 64 is a device that deflects the charged particle beam in a direction different from the D-axis direction and the direction in which the first deflection device 62 deflects the charged particle beam, and emits the deflected charged particle beam from the exit port 76. It is. The second deflection device 64 includes a second structure 640 , a second yoke 642 , a second inflow member 644 , a second outflow member 650 and an inner cylinder 70 .

The second structure 640 is configured to deflect the charged particle beam passing through the interior space 72 with a magnetic field. Although not shown, the second structure 640 according to the second embodiment includes a second laminated structure and a second coil. The second coil uses the generated magnetic field to deflect the charged particle beam deflected by the first deflection device 62 in a direction different from the D-axis direction and the direction in which the first deflection device 62 deflects the charged particle beam. The second coil may, for example, deflect the charged particle beam in a direction perpendicular to the D-axis direction and perpendicular to the direction in which the first deflection device 62 deflects the charged particle beam.

The second laminated structure has a hollow shape through which the charged particle beam passes, and has a plurality of layers stacked in a direction from the inside to the outside. Among these multiple layers, there is a gap between two adjacent layers through which a cooling solvent can flow. Further, the plurality of layers included in the second laminated structure include a second coil support layer that supports the second coil.

The second inflow member 644 is a member for allowing the cooling solvent to flow into the second structure 640. The second inflow member 644 includes a covering member 646 that covers the end surface of the second structure 640, and a pressing portion 647 that presses the second structure 640 from the outside to the inside. In the second embodiment, a space 649 is defined by the end surface of the second structure 640, the covering member 646, and the outer peripheral surface of the inner cylinder 70. This space 649 communicates with a gap in the second structure 640. Further, the second inflow member 644 has a hole 648 that is open in the D-axis direction, and this hole 648 communicates with a space 649.

The second outflow member 650 is a member that allows the cooling solvent to flow out. The second outflow member 650 is connected to the connection member 66. Further, the second outflow member 650 may function as a pressing portion that presses the second structure 640 from the outside to the inside. Furthermore, a space 652 is defined by the end surface of the second structure 640, the second outflow member 650, the connecting member 66, and the outer peripheral surface of the inner cylinder 70. This space 652 communicates with a gap in the second structure 640 and an outlet (not shown).

In the second deflection device 64, the cooling solvent flows in the direction of the arrow shown in FIG. The coil is cooled. Specifically, the cooling solvent flows into the space 649 from the hole 648 of the second inflow member 644, and is discharged from the outlet via the second structure 640 and the space 652. At this time, the second coil is cooled by the cooling solvent flowing through the gap in the second structure 640.

The charged particle beam deflection device 60 according to the second embodiment has been described above. In the second embodiment, an example has been described in which the first yoke 622 of the first deflection device 62 and the second yoke 642 of the second deflection device 64 are separate bodies, but the present invention is not limited to this. The yokes included in the second deflection device 64 may be integrally coupled to each other.

Furthermore, the path through which the cooling solvent flows is not limited to the example described above. For example, a hole may be provided in the connecting member 66 to communicate the space 628 and the space 652. In this case, the cooling solvent that has flowed into the second deflection device 64 passes through the hole provided in the connecting member 66, flows into the first deflection device 62, and is discharged from the space 633 to the outside.

Further, both of the two spaces formed by the connecting member 66 (ie, the space 628 of the first deflection device 62 and the space 652 of the second deflection device 64) may be used for the inflow of the cooling solvent. In this case, the cooling solvent that has entered the space 652 of the second deflection device 64 may pass through the space 649 and be discharged from the hole 648 to the outside.

[Alignment of laminated structure]
When aligning structure 40 with respect to the isocenter, the reference point for aligning structure 40 may be inlet member 24 . Therefore, the structure 40 can be aligned with the inflow member 24 as a reference. An example of a method for aligning the structures 40 will be described below with reference to FIGS. 17 and 18. FIG. 17 is a diagram of the aligned structure 40 viewed from the charged particle beam exit side. FIG. 18 is an enlarged view showing how the inner tube 30, the outer tube 32, and the structure 40 are aligned with the emission side pressing part 241 by the positioning pin 28.

As shown in FIG. 17, the structure 40 and the inner cylinder 30 are fixed to the emission side pressing part 241 by four positioning pins 28. Note that the number of positioning pins 28 may be three or less, or may be five or more.

Each layer 491 to 498 of the structure 40 is provided with a notch portion formed along the radial direction. The inner cylinder 30 has a screw hole for fixing the positioning pin 28 to the inner cylinder 30. As shown in FIG. 18, by engaging the positioning pin 28 with the notch and aligning all the screw holes of the notch and the inner cylinder 30 in the radial direction, each layer of the structure 40 (each reel layer and Each channel layer) is laminated with high precision.

Since the positioning pin 28 is engaged with the structure 40 , the inner cylinder 30 , the structure 40 , and the outer cylinder 32 that is in close contact with the structure 40 are aligned with the emission side pressing part 241 . Furthermore, when a plurality of winding frame layers provided with coils are stacked as in this embodiment, the arrangement of the positioning pins 28 ensures an appropriate relative positional relationship between the first coil and the second coil.

The configuration of the positioning pin 28 will be described in more detail with reference to FIG. 18. As shown in FIG. 18, the positioning pin 28 includes a first fixed portion 280, a fixed portion 286, and a second fixed portion 288. These first fixed portion 280, fixed portion 286, and second fixed portion 288 are integrated.

The first fixed part 280 has screw holes 282 and 284, and by passing screws through these screw holes 282 and 284, the first fixed part 280 is moved to the desired position of the output side pressing part 241. Fixed in position. Further, the second fixed portion 288 has a screw hole (not shown), and by passing a screw through the screw hole, the second fixed portion 288 is fixed to the inner cylinder 30. The fixing part 286 is a plate-shaped member that connects the first fixed part 280 and the second fixed part 288.

Each of the layers 491 to 498 of the structure 40 is provided with a notch, and the fixing portion 286 engages with the notch. As the structure 40 engages with the four positioning pins 28 in this manner, the structure 40 and the outer cylinder 32 that is in close contact with the structure 40 are aligned with the emission side pressing portion 241. By using the positioning pins 28 in this way, it becomes easy to assemble the laminated structures 42 to stack them with high positional accuracy.

An example of the flow of aligning the outer cylinder 32, the structure 40, the output side pressing part 241, etc. will be described. Here, an example will be described in which a simulating member simulating the inflow member 24 and a locating pin for a simulating member simulating the locating pin 28 are used.

First, with respect to the positioning pin for the simulated member that is fixed to the simulated member, the inner cylinder 30 is connected to the simulated second fixed part (the part corresponding to the second fixed part 288 of the positioning pin for the simulated member). It is engaged and fixed with a simulated screw. Thereafter, each layer of the structure 40 (each spool layer and each waterway layer) is fixed or engaged layer by layer, and the layers are bonded and fixed. After the structure 40 is aligned with the simulated member in this way, the positioning pin for the simulated member is removed from the simulated member. Thereafter, the dummy member is replaced with the inflow member 24, and the inner cylinder 30 is coupled to the second fixed portion 288 by the positioning pin 28 through the screw hole, thereby easily forming the structure 40. And the outer cylinder 32 can be fixed to the emission side pressing part 241 along the notch part. Thereby, the structure 40 and the like are placed at appropriate positions with high accuracy with respect to the inflow member 24. The coils of structure 40 are thus secured in position relative to inflow member 24. By assembling in this way, each layer can be easily and reliably arranged with high positional accuracy with respect to the inflow member 24.

[supplement]
The present invention has been described above based on the embodiments. Those skilled in the art will understand that this embodiment is merely an example, and that various modifications can be made to the combinations of the constituent elements and processing processes, and that such modifications are also within the scope of the present invention. be.

In the embodiments described above, an example in which the charged particle beam deflection device 20 is provided in the irradiation nozzle 16 has been described. The invention is not limited thereto, and the charged particle beam deflection device may be provided in a device for deflecting various charged particle beams, such as the charged particle beam adjusting means 122.

In the above-described embodiment, an example has been described in which the entrance-side pressing section 226 and the exit-side pressing section 241 press the entrance-side end and the exit-side end of the outer peripheral surface of the laminated structure, respectively. The position of the laminated structure pressed by the pressing part is not limited to these ends. For example, the pressing portion may press the central region of the outer circumferential surface of the laminated structure.

In the embodiments described above, an example has been described in which the first coil and the second coil generate magnetic fields in directions substantially orthogonal to each other. However, the present invention is not limited thereto, and the first coil and the second coil may generate magnetic fields in directions that are deviated from orthogonal directions within a range that allows the charged particle beam to be scanned.

In the above-described embodiment, an example has been described in which the shapes of the inner tube 30, each layer constituting the laminated structure 42, and the outer tube 32 are circular in the cross section perpendicular to the X-axis. These shapes are not limited to circular shapes, but may be various shapes such as elliptical shapes or rectangular shapes.

In the above-described embodiment, an example has been described in which the total length of the outer cylinder 32 in the X-axis direction is approximately the same as the total length of the structure 40 in the X-axis direction. The present invention is not limited to this, and the total length of the outer cylinder in the X-axis direction may be different from the total length of the structure in the X-axis direction. For example, the total length of the outer cylinder in the X-axis direction may be longer than the total length of the structure in the X-axis direction, and the outer cylinder may protrude outward from the end surface of the structure. In this case, it is also possible to press the structure 40 by pressing the protruding portion of the outer cylinder from the outside inward using the pressing section.

Furthermore, in the above-described embodiment, an example has been described in which each of the outflow member 22 and the inflow member 24 is configured by a combination of a plurality of members. However, the present invention is not limited to this, and each of the outflow member 22 and the inflow member 24 may be configured by one member.

Reference Signs List 1 charged particle beam irradiation device, 14 deflection electromagnet, 16 irradiation nozzle, 20 charged particle beam deflection device, 22 outflow member, 24 inflow member, 30 inner cylinder, 32 outer cylinder, 40 structure, 42 laminated structure, 43 end face, 44 end face, 50 first coil, 52 second coil, 222 entrance side protrusion, 224 entrance side covering part, 226 entrance side pressing part, 240 output side end, 241 output side pressing part, 243 output side protrusion, 244 Hole, 300 Internal space, 310, 320 Inner cylinder protrusion

Claims (6)

a hollow member having a hollow shape through which the charged particle beam passes;
a laminated structure that covers the outer peripheral surface of the hollow member and has a plurality of layers laminated in a direction from the inside to the outside of the hollow member;
a first coil that deflects the charged particle beam in a first direction different from a traveling direction of the charged particle beam;
a second coil that deflects the charged particle beam in a second direction different from the first direction,
The plurality of layers include a first coil support layer that supports the first coil, and a second coil support layer that supports the second coil,
The hollow member is configured to form a gap between the inner circumferential surface of the laminated structure and the outer circumferential surface of the hollow member so that the outer circumferential surface of the hollow member does not come into contact with the first coil and the second coil. is placed,
Charged particle beam deflection device. The laminated structure has an end face on the side where the charged particle beam enters and an end face on the side from which the charged particle beam exits,
The hollow member has a protrusion that protrudes outward from one end surface of the laminated structure.
Charged particle beam deflection device according to claim 1. further comprising a yoke located outside the outer peripheral surface of the laminated structure,
the protrusion is fixed to the yoke;
Charged particle beam deflection device according to claim 2. further comprising a covering member disposed on the protrusion and covering the one end surface of the laminated structure;
A space surrounded by the protrusion, the one end surface, and the covering member is formed;
Charged particle beam deflection device according to claim 2 or 3. A groove is provided on the outer circumferential surface of the hollow member to form a flow path for the cooling solvent,
the groove forms the gap;
Charged particle beam deflection device according to claim 4. The cooling solvent flow path communicates with the space,
Charged particle beam deflection device according to claim 5.

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