JP2023146890A5 - - Google Patents

Download PDF

Info

Publication number
JP2023146890A5
JP2023146890A5 JP2022054319A JP2022054319A JP2023146890A5 JP 2023146890 A5 JP2023146890 A5 JP 2023146890A5 JP 2022054319 A JP2022054319 A JP 2022054319A JP 2022054319 A JP2022054319 A JP 2022054319A JP 2023146890 A5 JP2023146890 A5 JP 2023146890A5
Authority
JP
Japan
Prior art keywords
temperature
heaters
temperature control
control
control unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022054319A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023146890A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022054319A priority Critical patent/JP2023146890A/ja
Priority claimed from JP2022054319A external-priority patent/JP2023146890A/ja
Priority to TW112105489A priority patent/TW202405572A/zh
Priority to KR1020230021122A priority patent/KR20230140363A/ko
Priority to CN202310303376.9A priority patent/CN116893704A/zh
Publication of JP2023146890A publication Critical patent/JP2023146890A/ja
Publication of JP2023146890A5 publication Critical patent/JP2023146890A5/ja
Pending legal-status Critical Current

Links

Images

JP2022054319A 2022-03-29 2022-03-29 温調装置、温調方法、デバイス製造装置、および物品製造方法 Pending JP2023146890A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022054319A JP2023146890A (ja) 2022-03-29 2022-03-29 温調装置、温調方法、デバイス製造装置、および物品製造方法
TW112105489A TW202405572A (zh) 2022-03-29 2023-02-16 調溫裝置，調溫方法，設備製造裝置及物品製造方法
KR1020230021122A KR20230140363A (ko) 2022-03-29 2023-02-17 온도 조절장치, 온도 조절방법, 디바이스 제조장치, 및 물품 제조방법
CN202310303376.9A CN116893704A (zh) 2022-03-29 2023-03-24 调温装置、调温方法、器件制造装置及物品制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022054319A JP2023146890A (ja) 2022-03-29 2022-03-29 温調装置、温調方法、デバイス製造装置、および物品製造方法

Publications (2)

Publication Number Publication Date
JP2023146890A JP2023146890A (ja) 2023-10-12
JP2023146890A5 true JP2023146890A5 (enrdf_load_stackoverflow) 2024-10-10

Family

ID=88286782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022054319A Pending JP2023146890A (ja) 2022-03-29 2022-03-29 温調装置、温調方法、デバイス製造装置、および物品製造方法

Country Status (4)

Country Link
JP (1) JP2023146890A (enrdf_load_stackoverflow)
KR (1) KR20230140363A (enrdf_load_stackoverflow)
CN (1) CN116893704A (enrdf_load_stackoverflow)
TW (1) TW202405572A (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641709U (enrdf_load_stackoverflow) 1979-09-01 1981-04-17
JP2006005135A (ja) * 2004-06-17 2006-01-05 Canon Inc 温度調節装置およびデバイス製造装置
JP5641709B2 (ja) * 2009-04-23 2014-12-17 キヤノン株式会社 デバイス製造装置およびデバイス製造方法

Similar Documents

Publication Publication Date Title
KR101443281B1 (ko) 가열로 연소의 노 온도를 제어하는 방법 및 장치
JP2023067998A5 (enrdf_load_stackoverflow)
JP6345801B2 (ja) 温度制御方法、及び、温度制御装置
CN103397171B (zh) 一种确定钢坯加热炉炉温设定值的方法
JP7128958B2 (ja) ヘアケア電気器具を制御する方法
WO2001079942A1 (fr) Unite de commande, regulateur de temperature et appareil de traitement thermique
JP6844938B1 (ja) 金型温度制御システム
JP6409876B2 (ja) 制御装置
KR100944660B1 (ko) 열매체 유체를 이용해서 대상물의 온도를 조절하기 위한장치 및 방법
US8812168B2 (en) Temperature measuring method and temperature measuring device of steel plate, and temperature control method of steel plate
JP3231601B2 (ja) 電気炉の温度制御方法および装置
CN111486492B (zh) 一种用于吸油烟机自动热清洗过程中的加热器的控制方法
JP2023146890A5 (enrdf_load_stackoverflow)
JP5117236B2 (ja) 平板状部材の均熱制御装置及び同装置の制御方法
JP7109728B2 (ja) 電力制御装置及び電力制御方法
JP3757809B2 (ja) 温度調節器
JP5668301B2 (ja) 加熱対象物の温度制御方法および温度制御装置
JP6500976B2 (ja) 温度制御システム及び温度制御方法
JPWO2023013637A5 (enrdf_load_stackoverflow)
IL309710A (en) A device for producing a spray and a system that includes an inductive heating device and a method for operating them
JPH07180904A (ja) 給湯装置
KR100809490B1 (ko) 미세 유량 제어가 가능한 밸브 시스템 및 그의 미세 유량제어방법
JP2001265448A (ja) 温度調節器および熱処理装置
JP2006155169A (ja) 温度制御方法、温度調節器および熱処理システム
JP2009116721A (ja) 制御装置、温度調節器およびゲイン調整装置