JP2023130812A5 - - Google Patents
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- JP2023130812A5 JP2023130812A5 JP2022035318A JP2022035318A JP2023130812A5 JP 2023130812 A5 JP2023130812 A5 JP 2023130812A5 JP 2022035318 A JP2022035318 A JP 2022035318A JP 2022035318 A JP2022035318 A JP 2022035318A JP 2023130812 A5 JP2023130812 A5 JP 2023130812A5
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022035318A JP7673671B2 (ja) | 2022-03-08 | 2022-03-08 | 微小振動体の実装構造 |
| US18/169,438 US12287203B2 (en) | 2022-03-08 | 2023-02-15 | Mounting structure of micro vibrator |
| CN202310202688.0A CN116730274A (zh) | 2022-03-08 | 2023-03-06 | 微振动器的安装结构 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022035318A JP7673671B2 (ja) | 2022-03-08 | 2022-03-08 | 微小振動体の実装構造 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023130812A JP2023130812A (ja) | 2023-09-21 |
| JP2023130812A5 true JP2023130812A5 (enExample) | 2024-05-29 |
| JP7673671B2 JP7673671B2 (ja) | 2025-05-09 |
Family
ID=87908570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022035318A Active JP7673671B2 (ja) | 2022-03-08 | 2022-03-08 | 微小振動体の実装構造 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US12287203B2 (enExample) |
| JP (1) | JP7673671B2 (enExample) |
| CN (1) | CN116730274A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4594706A1 (en) | 2022-10-04 | 2025-08-06 | Enertia Microsystems Inc. | Vibratory gyroscopes with resonator attachments |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4157041A (en) * | 1978-05-22 | 1979-06-05 | General Motors Corporation | Sonic vibrating bell gyro |
| JP4591000B2 (ja) | 2004-09-16 | 2010-12-01 | 株式会社デンソー | 半導体力学量センサおよびその製造方法 |
| US10527422B2 (en) | 2015-12-18 | 2020-01-07 | Southeast University | Micro three-dimensional shell resonator gyroscope |
| US10612925B2 (en) | 2016-02-29 | 2020-04-07 | The Regents Of The University Of Michigan | Assembly processes for three-dimensional microstructures |
| US11703330B2 (en) | 2019-04-01 | 2023-07-18 | The Regents Of The University Of California | Fused quartz dual shell resonator and method of fabrication |
| JP7533193B2 (ja) * | 2020-12-16 | 2024-08-14 | 株式会社デンソー | 微小振動体の把持構造、慣性センサの製造方法 |
| JP7456412B2 (ja) * | 2021-03-30 | 2024-03-27 | 株式会社デンソー | 慣性センサ |
| JP7452492B2 (ja) * | 2021-05-21 | 2024-03-19 | 株式会社デンソー | 慣性センサおよびその製造方法 |
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2022
- 2022-03-08 JP JP2022035318A patent/JP7673671B2/ja active Active
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2023
- 2023-02-15 US US18/169,438 patent/US12287203B2/en active Active
- 2023-03-06 CN CN202310202688.0A patent/CN116730274A/zh active Pending