JP2023130812A5 - - Google Patents

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JP2023130812A5
JP2023130812A5 JP2022035318A JP2022035318A JP2023130812A5 JP 2023130812 A5 JP2023130812 A5 JP 2023130812A5 JP 2022035318 A JP2022035318 A JP 2022035318A JP 2022035318 A JP2022035318 A JP 2022035318A JP 2023130812 A5 JP2023130812 A5 JP 2023130812A5
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Japan
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JP2022035318A
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JP2023130812A (ja
JP7673671B2 (ja
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Priority to JP2022035318A priority Critical patent/JP7673671B2/ja
Priority claimed from JP2022035318A external-priority patent/JP7673671B2/ja
Priority to US18/169,438 priority patent/US12287203B2/en
Priority to CN202310202688.0A priority patent/CN116730274A/zh
Publication of JP2023130812A publication Critical patent/JP2023130812A/ja
Publication of JP2023130812A5 publication Critical patent/JP2023130812A5/ja
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JP2022035318A 2022-03-08 2022-03-08 微小振動体の実装構造 Active JP7673671B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022035318A JP7673671B2 (ja) 2022-03-08 2022-03-08 微小振動体の実装構造
US18/169,438 US12287203B2 (en) 2022-03-08 2023-02-15 Mounting structure of micro vibrator
CN202310202688.0A CN116730274A (zh) 2022-03-08 2023-03-06 微振动器的安装结构

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022035318A JP7673671B2 (ja) 2022-03-08 2022-03-08 微小振動体の実装構造

Publications (3)

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JP2023130812A JP2023130812A (ja) 2023-09-21
JP2023130812A5 true JP2023130812A5 (enExample) 2024-05-29
JP7673671B2 JP7673671B2 (ja) 2025-05-09

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ID=87908570

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JP2022035318A Active JP7673671B2 (ja) 2022-03-08 2022-03-08 微小振動体の実装構造

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US (1) US12287203B2 (enExample)
JP (1) JP7673671B2 (enExample)
CN (1) CN116730274A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4594706A1 (en) 2022-10-04 2025-08-06 Enertia Microsystems Inc. Vibratory gyroscopes with resonator attachments

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4157041A (en) * 1978-05-22 1979-06-05 General Motors Corporation Sonic vibrating bell gyro
JP4591000B2 (ja) 2004-09-16 2010-12-01 株式会社デンソー 半導体力学量センサおよびその製造方法
US10527422B2 (en) 2015-12-18 2020-01-07 Southeast University Micro three-dimensional shell resonator gyroscope
US10612925B2 (en) 2016-02-29 2020-04-07 The Regents Of The University Of Michigan Assembly processes for three-dimensional microstructures
US11703330B2 (en) 2019-04-01 2023-07-18 The Regents Of The University Of California Fused quartz dual shell resonator and method of fabrication
JP7533193B2 (ja) * 2020-12-16 2024-08-14 株式会社デンソー 微小振動体の把持構造、慣性センサの製造方法
JP7456412B2 (ja) * 2021-03-30 2024-03-27 株式会社デンソー 慣性センサ
JP7452492B2 (ja) * 2021-05-21 2024-03-19 株式会社デンソー 慣性センサおよびその製造方法

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