JP2023130113A - Mass separation device, transport apparatus, and linear accelerator - Google Patents

Abstract

To provide a mass separation device capable of selecting an ion type in an electric charge beam and removing an unnecessary ion without increasing a transport length, a transport apparatus, and a linear accelerator.SOLUTION: A mass separation device comprises: a plurality of electrodes 30 having a plurality of coils 31, a coil power supply 13 that supplies an excitation current to the coils 31, and a cooling part 33 that removes heat generated when absorbing an electric charge particle beam 2; and an electrode power supply 12 that applies a voltage to the electrodes 30. On a cross section viewed from an axis of the electric charge particle beam 2, the electrode 30 and the coil 31 are arranged at a position where an electric field generated by the electrode 30 and a magnetic field generated by the coil 31 are generated in orthogonal directions.SELECTED DRAWING: Figure 3

Description

The present invention relates to a mass separation device, a transport device, and a linear accelerator for charged particle beams in a linear accelerator.

A technique for removing unnecessary ions when transporting a charged particle beam is described in Patent Document 1.

This patent document 1 describes ``Surface modification of a minute area using a high-energy charged beam in which a high-energy ion beam from an accelerator passes through an ion species selector, an objective collimator, and a beam focuser and is incident on a sample as a spot; In equipment for physical property and composition analysis, an objective collimator is placed immediately downstream of the accelerator, and an analysis component for ion species and beam energy is inserted into the drift space within the object distance between the objective collimator and the quadrupole electromagnetic lens. ``Focused ion beam device characterized by having a configuration in which

Japanese Patent Application Publication No. 3-74037

L. Bellan et al. , Source and LEBT beam preparation for IFMIF-EVEDA RFQ, Proceedings of LINAC2016, Nuclear Fusion 55 (2015) 086003.

The above-mentioned Patent Document 1 describes a method for selecting ion species in a charged particle beam using a Wien filter (E×B) type mass spectrometer and an ion type slit. However, the configuration of Patent Document 1 has a problem in that it cannot withstand the physical load (for example, sputtering, etc.) of removing unnecessary ions during heavy current charged particle beam transport.

Therefore, as described in Non-Patent Document 1, as a method for removing unnecessary ions in large-current charged particle beam transport, a collimator with a cooling function is used to utilize the dependence of the beam focusing force on the ion mass due to a solenoid magnetic field. It is possible to remove unnecessary ions by colliding them with a certain incident cone. However, this method has a problem in that it is not possible to separate ion species near the center activation and remove unnecessary ions.

If the ion species in the beam cannot be selected and unnecessary ions remain, this will lead to discharge in the subsequent accelerator, making it impossible to stably supply the charged particle beam. Therefore, a mass separation device such as a Wien filter (E×B) type is required in the configuration of Non-Patent Document 1 to select ion species near the center startup of a high-current charged particle beam, but the transport device becomes large. In other words, as the length of the transport system increases, the influence of beam divergence due to the space charge effect increases.

An object of the present invention is to provide a mass separator, a transport device, and a linear accelerator that are capable of selecting ion species in a charged particle beam and removing unnecessary ions without increasing the length of the transport system.

The present invention includes a plurality of means for solving the above problems, and one example thereof is a mass separator that selects ion types in a charged particle beam and removes unnecessary ions, which includes a plurality of coils, A coil power source that supplies an exciting current to the coil, a plurality of electrodes that has a cooling unit that removes heat generated when absorbing the charged particle beam, and an electrode power source that applies a voltage to the electrodes. , the electrode and the coil are arranged at a position where the electric field generated by the electrode and the magnetic field generated by the coil are generated in orthogonal directions on a cross section viewed from the axis of the charged particle beam. shall be.

According to the present invention, it is possible to select ion species in a charged particle beam and remove unnecessary ions without increasing the length of the transport system. Problems, configurations, and effects other than those described above will be made clear by the description of the following examples.

1 is a schematic configuration diagram of a linear accelerator including a mass separation device and a transport device according to Example 1. FIG. FIG. 2 is a diagram showing a schematic configuration of the mass separator of Example 1 when viewed from a direction parallel to the beam axis. FIG. 3 is a diagram showing a schematic cross-sectional shape of the mass separator in the mass separator of Example 1 when viewed from a direction parallel to the beam axis. FIG. 2 is a schematic diagram showing a cross-sectional shape of a mass separator in the mass separator of Example 1 when viewed from a direction perpendicular to the beam axis. FIG. 3 is a schematic diagram showing a cross-sectional shape of the mass separator in the mass separator of Example 2, viewed from a direction perpendicular to the beam axis. 3 is a schematic diagram showing a cross-sectional shape of a mass separator in a mass separator of Example 3 when viewed from a direction perpendicular to the beam axis. FIG. FIG. 7 is a schematic diagram showing a cross-sectional shape of a mass separator in the mass separator of Example 4 when viewed from a direction perpendicular to the beam axis. FIG. 7 is a diagram showing a schematic cross-sectional shape of the mass separator in the mass separator of Example 5 when viewed from a direction parallel to the beam axis.

Examples of the mass separator, transport device, and linear accelerator of the present invention will be described below with reference to the drawings. In the drawings used in this specification, the same or corresponding components are given the same or similar symbols, and repeated description of these components may be omitted.

<Example 1>
Embodiment 1 of the mass separator, transport device, and linear accelerator of the present invention will be described using FIGS. 1 to 4.

First, the overall configuration of a linear accelerator including a transport device including a mass separator will be described using FIG. 1. FIG. 1 is a schematic diagram of a linear accelerator including a mass separator 1 according to a first embodiment.

The linear accelerator 18 shown in FIG. 1 includes a charged particle beam generation device 3 that generates plasma 4, acceleration electrodes 5 and 6 that extract plasma from the charged particle beam generation device 3 and accelerate the charged particle beam 2, and a mass separation device 16. It is composed of a transport device 17 including a mass separator 1 that transports a charged particle beam 2 containing .

Of these, the transport device 17 includes converging coils 7 and 8 that converge the charged particle beam 2, and a mass separation device 16. Further, the mass separator 16 includes a mass separator 1, an electrode power source 12, and a coil power source 13.

The charged particle beam generation device 3 can use, for example, a microwave ion source, an ECR (Electron Cyclotron Resonance) ion source, a duoplasmatron, an electron gun, or the like. In this embodiment, a microwave ion source is employed as the charged particle beam generating device 3.

Plasma 4 generated by microwaves in charged particle beam generation device 3 is extracted by a potential difference between accelerating electrodes 5 and 6. As a result, a charged particle beam 2 is generated.

The generated charged particle beam 2 is focused by focusing coils 7 and 8 installed along the chamber 14 that forms the outer wall of the linear accelerator 18, and is transported to the subsequent stage accelerator 9. In the converging coils 7 and 8, for example, magnetic poles made of a magnetic material can be used.

The second stage accelerator 9 is, for example, a high frequency accelerator, and can employ RFQ (Radio Frequency Quadrupole), DTL (Drift Tube Linac), or a combination thereof. Furthermore, as the second-stage accelerator 9, an electrostatic accelerator such as a Cockcroft-Walton type or a Vann-Graf type may be employed.

The mass separator 16 is a device for selecting ion types in the charged particle beam 2 and removing unnecessary ions, and includes a plurality of coils 31, a coil power supply 13 that supplies excitation current to the plurality of coils 31, and a plurality of It includes an electrode 30, an electrode power source 12 for applying voltage to the plurality of electrodes 30, and a yoke 32 for increasing the strength of the magnetic field generated by the coil 31.

As shown in FIG. 2, among these, a plurality of coils 31, a plurality of electrodes 30, and a yoke 32 constitute a mass separator 1.

Here, when the charged particle beam 2 is focused and transported to the subsequent accelerator 9, by adjusting the beam focusing force by the focusing coils 7 and 8, unnecessary ions other than ions with a specific mass are removed from the mass separator 1. catch it and remove it.

A beam 10 of ions having a lower mass than the specific ions in the charged particle beam 2 becomes a short focus, diverges again, and is received by the mass separator 1. On the other hand, the beam 11 of ions having a higher mass than the specific ions has a long focal point and therefore lacks sufficient focusing power, so it is received and absorbed by the mass separator 1.

For this reason, in the linear accelerator 18 shown in FIG. 1, the shape of the mass separator 1 is thick in the beam traveling direction of the charged particle beam 2. Furthermore, a through hole for the charged particle beam 2 to pass is provided between the plurality of electrodes 30 through which the charged particle beam 2 passes.

Here, the ion species selection method based on the mass dependence of the focusing force of the charged particle beam 2 cannot remove unnecessary ions near the central orbit. Therefore, the mass separator 1 is provided with an ExB type mass separation function in which the electric field and the magnetic field are orthogonal to each other as shown in FIG. As a result, only the ion beam 20 having a specific mass in the charged particle beam 2 is allowed to proceed straight, and unnecessary ion beams 21 are deflected and absorbed by the mass separator 1 and removed.

That is, the electrode 30 and the coil 31 are arranged at a position where the electric field generated by the electrode 30 and the magnetic field generated by the coil 31 are generated in orthogonal directions on a cross section viewed from the axis of the charged particle beam 2. do.

In addition, in ExB type mass separation, the electric and magnetic fields are adjusted so that the Lorentz force cancels out only for charged particles with specific energy and mass. By doing so, it is possible to cause only the charged particle beam of a specific ion type to travel straight, and to deflect the charged particle beams of other ion types.

In order to provide the mass separator 1 with the above-mentioned ExB type mass separation function, it is configured with an electrode 30 for generating an electric field, a coil 31 for generating a magnetic field, and a yoke 32, as shown in FIG. Here, as the electrode 30, iron or the like is preferably used. Note that the yoke 32 may not be disposed or the electrode 30 may be made of a non-magnetic material such as copper to reduce the amount of magnetic material, or the yoke 32 may not be disposed and the electrode 30 may be made of a non-magnetic material. You may do so.

An electric field is generated by applying a voltage to the electrode 30 by the electrode power source 12, and a magnetic field is generated by applying a voltage to the coil 31 by the coil power source 13. At this time, the trajectory of the charged particle beam 2 can be adjusted by adjusting the intensity ratio of the electrode power source 12 and the coil power source 13 to adjust the intensity ratio of the electric field and the magnetic field.

FIG. 4 is a sectional view of the mass separator 1 viewed from the beam axis direction.

FIG. 4 shows, as a configuration example, a configuration in which eight electrodes 30a1, 30b1, 30c1, 30d1, 30a2, 30b2, 30c2, and 30d2 and cosine distributed coils 31a and 31b are arranged. In this case, electric and magnetic fields can be generated in any direction within the vertical plane of the charged particle beam 2.

As long as the number of electrodes 30 is 6 or more, it can be increased by a multiple of 2, and a structure with more electrodes can generate a more uniform bipolar electromagnetic field distribution.

Here, it is assumed that the outer coil 31a and the inner coil 31b are independent from each other, and the coil power supply 13 is also composed of two different power supplies.

Among the eight electrodes 30a1, 30b1, 30c1, 30d1, 30a2, 30b2, 30c2, 30d2, one set consists of the electrodes 30a1, 30a2 located on the opposite side of 180 degrees when viewed from the beam axis direction, and one set consists of the electrodes 30b1, 30b2. One set includes electrodes 30c1 and 30c2, and one set includes electrodes 30d1 and 30d2, for a total of four sets, each of which is independent, that is, the electrode power supply 12 is also composed of four power supplies from different systems. do.

However, unlike the coil power source 13, the electrode power source 12 has a constant ratio of voltages applied to the four sets of electrodes 30a1, 30a2, electrodes 30b1, 30b2, electrodes 30c1, 30c2, and electrodes 30d1, 30d2. The electrode power source 12 can be configured with one power source depending on the arrangement of resistors and the like.

Returning to FIG. 2, the electrode 30 also serves as an absorber for receiving an unnecessary ion beam separated by ion species or a diverged ion beam, and therefore has a cooling section 33 for removing heat generated by beam collision. The cooling unit 33 may have a structure in which the coolant is introduced into a cavity inside the electrode 30, but it may also have a structure in which the coolant touches the side surface of the electrode 30. Note that in FIG. 4, the cooling unit 33 is omitted for convenience of illustration.

Further, as shown in FIG. 3, the through holes between the plurality of electrodes 30 through which the charged particle beam 2 passes are formed into a cone shape whose hole diameter becomes smaller toward the downstream side of the beam path of the charged particle beam 2.

Next, the effects of this embodiment will be explained.

The mass separator 16 of the first embodiment of the present invention described above is a device that selects ion species in the charged particle beam 2 and removes unnecessary ions, and includes a plurality of coils 31 and a coil that supplies excitation current to the coils 31. a plurality of electrodes 30 including a cooling unit 33 that removes heat generated during absorption of the charged particle beam 2; and an electrode power source 12 that applies a voltage to the electrodes 30; The electrode 30 and the coil 31 are arranged at a position where the electric field generated by the electrode 30 and the magnetic field generated by the coil 31 are generated in orthogonal directions on a cross section viewed from the axis.

This enables mass separation that also serves as an ion species separation function of an absorber for unnecessary ions and a Wien filter (ExB) type in which only specific ions travel straight, and the length of the transport system as the linear accelerator 18 can be maintained. Therefore, it is possible to select ion species and remove unnecessary ions from a charged particle beam without increasing beam divergence due to space charge effects.

Such a mass separator 16 is preferably used as a linear accelerator, and can be used as an ion source in a nuclear fusion power reactor, a neutron capture therapy (BNCT), or a particle beam therapy device using a synchroton accelerator. Applicable to

Furthermore, since the charged particle beam 2 can be deflected in any direction to adjust the strength ratio of the electric field and the magnetic field, it is possible to adjust the trajectory when it enters the post-accelerator 9.

Furthermore, by further providing a yoke 32 for increasing the strength of the magnetic field generated by the coil 31, it is possible to downsize the coil 31 and the coil power supply 13.

Further, since the distance between the plurality of electrodes 30 through which the charged particle beam 2 passes becomes smaller in diameter toward the downstream side, unnecessary ions that are not focused can be efficiently stopped.

Furthermore, by further providing converging coils 7 and 8 that converge the charged particle beam 2, the mass separator 1 can more effectively receive and remove unnecessary ions other than ions having a specific mass.

<Example 2>
A mass separation device, a transport device, and a linear accelerator according to a second embodiment of the present invention will be explained using FIG. 5. FIG. 5 is a conceptual diagram showing a cross-sectional shape of the mass separator of this example when viewed from the beam axis direction.

The difference from Example 1 is the way the coil 40 for generating a magnetic field is wound.

The mass separator 1A shown in FIG. 5 has a concentrated winding coil arrangement in which the coil 40 is arranged so as to wind each of the eight magnetic poles 41.

More specifically, among the eight magnetic poles 41, the coil 40a1 around the magnetic pole 41a1, and the magnetic pole 41a2 located 180 degrees opposite to these magnetic poles 41a1 and the coil 40a1 when viewed from the beam axis direction. The surrounding coils 40a2 form one set of coils.

Similarly, a coil 40b1 around the magnetic pole 41b1, a magnetic pole 41b2 located 180 degrees on the opposite side when viewed from the beam axis direction from these magnetic poles 41b1 and the coil 40b1, and a coil 40b2 around it form one set of coils. do. A coil 40c1 around the magnetic pole 41c1, a magnetic pole 41c2 located 180° opposite to the magnetic pole 41c1 and the coil 40c1 when viewed from the beam axis direction, and a coil 40c2 around the magnetic pole 41c2 form a set of coils. A coil 40d1 around the magnetic pole 41d1, a magnetic pole 41d2 located 180 degrees opposite to the magnetic pole 41d1 and the coil 40d1 when viewed from the beam axis direction, and a coil 40d2 around the magnetic pole 41d1 form a set of coils.

These four sets of coils 40a1, 40a2, coils 40b1, 40b2, coils 40c1, 40c2, and coils 40d1, 40d2 are each independent, and generate magnetic fields using different power sources.

Note that the electrode 30 may be made of a non-magnetic material and the magnetic pole 41 and the yoke 32 may not be arranged, or a structure may be used in which these are combined to reduce the amount of magnetic material.

Further, the coil in the configuration shown in FIG. 5 may be arranged in a distributed winding type which is used in a motor or the like.

The other configurations and operations are substantially the same as those of the mass separation device, transport device, and linear accelerator of Example 1 described above, and details will be omitted.

In the mass separator, transport device, and linear accelerator of the second embodiment of the present invention, substantially the same effects as in the mass separator, transport device, and linear accelerator of the first embodiment described above can be obtained.

<Example 3>
A mass separation device, a transport device, and a linear accelerator according to Example 3 of the present invention will be described using FIG. 6. FIG. 6 is a conceptual diagram showing a cross-sectional shape of the mass separator of this example when viewed from the beam axis direction.

The difference between this example and Example 1 is the interelectrode structure of the electrode 50 in FIG.

In the mass separator 1B of this embodiment, the electrodes 50 are arranged so that the spaces between each of the plurality of electrodes 50 are not radial on the cross section viewed from the axis of the charged particle beam 2, and the electrodes 50 are The structure is such that the charged particle beam 2 is difficult to see from the coils 31a and 31b arranged on the outer periphery of the coils 31a and 31b.

The structure of the other electrodes 50 is approximately the same as the electrode 30 of Example 1, and one set includes electrodes 50a1 and 50a2 located on the opposite side of 180 degrees when viewed from the beam axis direction, and one set includes electrodes 50b1 and 50b2. One set of electrodes 50c1 and 50c2, and one set of electrodes 50d1 and 50d2, a total of four sets, each of which can be configured independently, or may be configured with one power source.

Note that the interelectrode structure of the electrodes is not limited to the structure like the electrode 50 shown in FIG. The charged particle beam 2 may have a structure that makes it difficult for the charged particle beam 2 to collide with the coil 31, such as by providing an uneven portion between each of the electrodes 50.

The other configurations and operations are substantially the same as those of the mass separation device, transport device, and linear accelerator of Example 1 described above, and details will be omitted.

In the mass separator, transport device, and linear accelerator of Example 3 of the present invention, substantially the same effects as in the mass separator, transport device, and linear accelerator of Example 1 described above can be obtained.

Further, since the electrodes 50 are arranged so that the spaces between each of the plurality of electrodes 50 do not become radial on the cross section seen from the axis of the charged particle beam 2, the divergent charged particle beam and ion species By suppressing the sorted charged particle beam from colliding with anything other than the electrode 50 which also serves as an absorber, it is suppressed from colliding with the coil 31, thereby further suppressing collision damage and thermal damage caused by unnecessary charged particle beams. be able to. Therefore, the operational stability of the linear accelerator 18 can be further improved.

<Example 4>
A mass separation device, a transport device, and a linear accelerator according to Example 4 of the present invention will be explained using FIG. 7. FIG. 7 is a conceptual diagram showing a cross-sectional shape of the mass separator of this example when viewed from the beam axis direction.

The difference between this example and Example 1 is that the direction of generation of the electric field and magnetic field of the ExB type mass separation is fixed. As shown in FIG. 7, the mass separator 1C in this embodiment includes a magnetic pole 61, an electromagnetic pole 62, and a plurality of coils 63.
In this embodiment, a dipole magnetic field for ExB type mass separation is generated by a current flowing through a coil 63 arranged so as to wind part of the magnetic pole 61 and the electromagnetic pole 62. Further, an electric field is generated in a direction orthogonal to the magnetic field by applying a voltage only to the electromagnetic pole 62.

The mass separator shown in FIG. 7 requires two sets of power supplies, one for the electromagnetic pole 62 and one for the coil 63.

The magnetic pole 61 and the electromagnetic pole 62 require a cooling unit because heat is generated when charged particle beams containing unnecessary ion species collide with each other. The cooling structure of the cooling section can be the same as the cooling section 33 of the electrode 30 of the first embodiment.

Note that, similarly to FIG. 8 described later, in this embodiment, a simple structure using only a pair of flat electrodes and a pair of coils can be adopted.

The other configurations and operations are substantially the same as those of the mass separation device, transport device, and linear accelerator of Example 1 described above, and details will be omitted.

The mass separator, transport device, and linear accelerator of Example 4 of the present invention also provide substantially the same effects as the mass separator, transport device, and linear accelerator of Example 1 described above.

Furthermore, in this embodiment, the direction in which the magnetic field and electric field are generated cannot be changed. Therefore, by adjusting the electric field and magnetic field as in the first embodiment, it is not possible to deflect a specific ion beam to be accelerated in an arbitrary direction. However, if only the ExB type mass separation function is required, there is an advantage that the number of power supplies can be significantly reduced compared to the first embodiment.

<Example 5>
A mass separation device, a transport device, and a linear accelerator according to Example 5 of the present invention will be described using FIG. 8. FIG. 8 is a conceptual diagram showing a cross-sectional shape of the mass separator of this example when viewed from a direction parallel to the beam axis.

As shown in FIG. 8, in the mass separator 1D of the mass separator of this embodiment, unlike in the first embodiment, a plurality of electrodes 70 are provided with a cooling section 74 for removing heat generated during absorption of the charged particle beam 2; The structure is such that a plurality of coils 71 and a yoke 72 for increasing the strength of the magnetic field generated by the coils 71 are arranged parallel to the beam axis of the charged particle beam 2.

If it is not necessary to use the converging coils 7 and 8 as in the first embodiment, the mass separator 1 does not need to have a cone shape as shown in FIG. Therefore, as shown in FIG. 8, each structure arranged in the chamber 14 of the mass separator 1D can be made into a linear structure parallel to the beam axis of the charged particle beam 2.

Note that, as in the first embodiment, the yoke 72 may not be provided, or the electrode 70 may be made of a non-magnetic material to reduce the amount of magnetic material, or both may be implemented.

The other configurations and operations are substantially the same as those of the mass separation device, transport device, and linear accelerator of Example 1 described above, and details will be omitted.

In the mass separator, transport device, and linear accelerator of Example 5 of the present invention, substantially the same effects as in the mass separator, transport device, and linear accelerator of Example 1 described above can be obtained.

<Others>
Note that the present invention is not limited to the above-described embodiments, and includes various modifications. The above-mentioned embodiments have been described in detail to explain the present invention in an easy-to-understand manner, and the present invention is not necessarily limited to having all the configurations described.

Further, it is also possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is also possible to add, delete, or replace some of the configurations of each embodiment with other configurations.

1, 1A, 1B, 1C, 1D...Mass separator 2...Charged particle beam 3...Charged particle beam generator 4...Plasma 5, 6...Accelerating electrodes 7, 8...Focusing coil 9...Late stage accelerator 10...Low mass ion beam 11...High mass ion beam 12...Electrode power source 13...Coil power source 14...Chamber 16...Mass separation device 17...Transport device 18...Linear accelerator 20...Ion beam after sorting 21...Unnecessary ion beam 30, 30a1, 30a2, 30b1, 30b2, 30c1, 30c2, 30d1, 30d2... Electrode 31, 31a, 31b... Coil 32... Yoke (magnetic material)
33, 73... Cooling part 40, 40a1, 40a2, 40b1, 40b2, 40c1, 40c2, 40d1, 40d2... Coil 41, 41a1, 41a2, 41b1, 41b2, 41c1, 41c2, 41d1, 41d2... Magnetic pole (magnetic material)
50, 50a1, 50a2, 50b1, 50b2, 50c1, 50c2, 50d1, 50d2... Electrode 61... Magnetic pole (magnetic material)
62... Electromagnetic pole 63... Coil 70... Electrode 71... Coil 72... Yoke (magnetic material)

Claims (8)

A mass separator that selects ion types in a charged particle beam and removes unnecessary ions,
multiple coils,
a coil power source that supplies exciting current to the coil;
a plurality of electrodes having a cooling section that removes heat generated when absorbing the charged particle beam;
an electrode power source that applies a voltage to the electrode,
The electrode and the coil are arranged at a position where the electric field generated by the electrode and the magnetic field generated by the coil are generated in orthogonal directions on a cross section viewed from the axis of the charged particle beam. mass separator. The mass separator according to claim 1,
A mass separation device characterized in that the intensity ratio of the electric field and the magnetic field is adjusted. The mass separator according to claim 1,
A mass separation device further comprising a magnetic material for increasing the strength of the magnetic field generated by the coil. The mass separator according to claim 1,
A mass separation device characterized in that the electrodes are arranged so that the spaces between each of the plurality of electrodes are not radial in a cross section viewed from the axis of the charged particle beam. The mass separator according to claim 1,
A mass separation device characterized in that the distance between the plurality of electrodes through which the charged particle beam passes becomes smaller in diameter toward the downstream side. A transport device comprising the mass separator according to claim 1. The transport device according to claim 6,
A transport device further comprising a convergence coil that converges the charged particle beam. The transportation device according to claim 7,
a charged particle beam generator that generates plasma;
an accelerating electrode for drawing out the plasma from the charged particle beam generating device;
A linear accelerator comprising: a post-accelerator that further accelerates the charged particle beam that has passed through the mass separator.

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