JP2023126669A5 - LIQUID DISCHARGE SUBSTRATE, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND METHOD FOR MANUFACTURING LIQUID DISCHARGE SUBSTRATE - Google Patents

LIQUID DISCHARGE SUBSTRATE, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND METHOD FOR MANUFACTURING LIQUID DISCHARGE SUBSTRATE Download PDF

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JP2023126669A5
JP2023126669A5 JP2023119776A JP2023119776A JP2023126669A5 JP 2023126669 A5 JP2023126669 A5 JP 2023126669A5 JP 2023119776 A JP2023119776 A JP 2023119776A JP 2023119776 A JP2023119776 A JP 2023119776A JP 2023126669 A5 JP2023126669 A5 JP 2023126669A5
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本発明は、インクなどを含む種々の液体を吐出するための液体吐出用基板、液体吐出ヘッド、液体吐出装置、および液体吐出用基板の製造方法に関するものである。 The present invention relates to a liquid ejection substrate for ejecting various liquids including ink, a liquid ejection head , a liquid ejection device , and a method for manufacturing the liquid ejection substrate .

本発明の液体吐出用基板は、液体を吐出する吐出口が第１の方向に延在する吐出口列を成すように複数配列され、前記吐出口列のそれぞれの吐出口に対応するように、液体を吐出するために利用される熱エネルギーを発生する発熱素子をそれぞれ内部に備える複数の圧力室を備える液体吐出用基板であって、前記第１の方向に隣接する前記圧力室は、隔壁によって区画されており、前記液体吐出用基板は、１枚の基板の中で、当該液体吐出用基板の厚み方向にずれて位置する第１の部分と第２の部分とを含み、前記第１の部分には、前記圧力室の一方側に配され、当該圧力室に液体を供給する複数の供給流路と、前記圧力室の他方側に配され、当該圧力室から液体を回収する複数の回収流路と、が形成され、前記供給流路と前記回収流路とは、前記吐出口列が設けられた平面と交差する第２の方向に延在しており、前記第２の部分には、複数の前記供給流路に連通する共通供給流路と、複数の前記回収流路に連通する共通回収流路と、が形成され、前記共通供給流路と前記共通回収流路とは、前記第１の方向に延在し、前記吐出口列が設けられた前記平面において前記第１の方向と交差する第３の方向において、複数の前記供給流路の中心は前記共通供給流路の中心よりも前記吐出口列に近く、複数の前記回収流路の中心は前記共通回収流路の中心よりも前記吐出口列に近いことを特徴とする。 The liquid ejection substrate of the present invention is a liquid ejection substrate in which a plurality of ejection ports for ejecting liquid are arranged to form an ejection port row extending in a first direction , and which is provided with a plurality of pressure chambers each having a heating element therein that generates thermal energy utilized for ejecting liquid so as to correspond to each ejection port of the ejection port row, the pressure chambers adjacent to each other in the first direction being partitioned by a partition wall , the liquid ejection substrate includes, within a single substrate, a first portion and a second portion that are positioned offset in a thickness direction of the liquid ejection substrate, the first portion includes a plurality of supply flow paths that are arranged on one side of the pressure chambers and that supply liquid to the pressure chambers, and a plurality of supply flow paths that are arranged on the other side of the pressure chambers, a plurality of recovery flow paths for recovering liquid from the pressure chambers are formed, the supply flow path and the recovery flow path extend in a second direction intersecting a plane in which the row of ejection ports is provided , and a common supply flow path communicating with the plurality of supply flow paths and a common recovery flow path communicating with the plurality of recovery flow paths are formed in the second portion, the common supply flow path and the common recovery flow path extend in the first direction , and in a third direction intersecting the first direction in the plane in which the row of ejection ports is provided, the centers of the plurality of supply flow paths are closer to the row of ejection ports than the center of the common supply flow path, and the centers of the plurality of recovery flow paths are closer to the row of ejection ports than the center of the common recovery flow path .

Claims (17)

液体を吐出する吐出口が第１の方向に延在する吐出口列を成すように複数配列され、前記吐出口列のそれぞれの吐出口に対応するように、液体を吐出するために利用される熱エネルギーを発生する発熱素子をそれぞれ内部に備える複数の圧力室を備える液体吐出用基板であって、
前記第１の方向に隣接する前記圧力室は、隔壁によって区画されており、
前記液体吐出用基板は、１枚の基板の中で、当該液体吐出用基板の厚み方向にずれて位置する第１の部分と第２の部分とを含み、
前記第１の部分には、
前記圧力室の一方側に配され、当該圧力室に液体を供給する複数の供給流路と、前記圧力室の他方側に配され、当該圧力室から液体を回収する複数の回収流路と、が形成され、
前記供給流路と前記回収流路とは、前記吐出口列が設けられた平面と交差する第２の方向に延在しており、
前記第２の部分には、
複数の前記供給流路に連通する共通供給流路と、複数の前記回収流路に連通する共通回収流路と、が形成され、
前記共通供給流路と前記共通回収流路とは、前記第１の方向に延在し、
前記吐出口列が設けられた前記平面において前記第１の方向と交差する第３の方向において、複数の前記供給流路の中心は前記共通供給流路の中心よりも前記吐出口列に近く、複数の前記回収流路の中心は前記共通回収流路の中心よりも前記吐出口列に近いことを特徴とする液体吐出用基板。 A liquid ejection substrate including a plurality of pressure chambers , each of which includes a heat generating element for generating thermal energy used for ejecting liquid, the heat generating element corresponding to each of the ejection ports of the ejection port array, the heat generating element generating thermal energy used for ejecting liquid, the plurality of pressure chambers being arranged to form an ejection port array extending in a first direction ,
The pressure chambers adjacent to each other in the first direction are partitioned by a partition wall ,
the liquid ejection substrate includes, within a single substrate, a first portion and a second portion that are shifted in a thickness direction of the liquid ejection substrate;
The first portion includes :
a plurality of supply flow paths are provided on one side of the pressure chamber to supply liquid to the pressure chamber, and a plurality of recovery flow paths are provided on the other side of the pressure chamber to recover liquid from the pressure chamber;
the supply flow path and the recovery flow path extend in a second direction intersecting a plane in which the ejection port array is provided ,
The second portion includes :
a common supply flow path communicating with the plurality of supply flow paths and a common recovery flow path communicating with the plurality of recovery flow paths are formed;
the common supply flow path and the common recovery flow path extend in the first direction ,
A liquid ejection substrate characterized in that, in a third direction intersecting the first direction in the plane in which the ejection port array is provided, the centers of the multiple supply flow paths are closer to the ejection port array than the center of the common supply flow path, and the centers of the multiple recovery flow paths are closer to the ejection port array than the center of the common recovery flow path . 前記第３の方向における前記供給流路の幅は、前記第３の方向における前記共通供給流路の幅よりも小さく、
前記第３の方向における前記回収流路の幅は、前記第３の方向における共通回収流路の幅よりも小さいことを特徴とする請求項１に記載の液体吐出用基板。 a width of the supply flow path in the third direction is smaller than a width of the common supply flow path in the third direction;
2. The liquid ejection substrate according to claim 1, wherein a width of the recovery flow path in the third direction is smaller than a width of the common recovery flow path in the third direction. 前記共通供給流路と前記共通回収流路とは互いに沿って延在しており、前記共通供給流路と前記共通回収流路との間隔Ｗは、２００μｍ以下であることを特徴とする請求項１または２に記載の液体吐出用基板。 3. The liquid ejection substrate according to claim 1, wherein the common supply flow path and the common recovery flow path extend along each other, and a distance W between the common supply flow path and the common recovery flow path is 200 μm or less. 前記供給流路と前記回収流路との間隔は、前記共通供給流路と前記共通回収流路との間隔より小さいことを特徴とする請求項１から３のいずれか１項に記載の液体吐出用基板。 The liquid ejection substrate according to any one of claims 1 to 3, characterized in that the distance between the supply flow path and the recovery flow path is smaller than the distance between the common supply flow path and the common recovery flow path. 前記液体吐出用基板は略平行四辺形であり、
複数の前記吐出口が第１の方向に配列される第１の吐出口列に連通する第１の共通供給流路の両端部と、前記第１の吐出口列に並置される第２の吐出口列に連通する第２の共通供給流路の両端部と、は前記第１の方向に関してずれていることを特徴とする請求項１から４のいずれか１項に記載の液体吐出用基板。 The liquid ejection substrate is substantially parallelogram-shaped,
5. The liquid ejection substrate according to claim 1, wherein both ends of a first common supply flow path communicating with a first row of ejection ports in which a plurality of the ejection ports are arranged in a first direction, and both ends of a second common supply flow path communicating with a second row of ejection ports juxtaposed to the first row of ejection ports, are offset with respect to the first direction. 前記第１の吐出口列に連通する前記共通供給流路および前記共通回収流路の少なくとも一方の前記第１の方向の両端部は、面取りされた形状もしくはＲ形状になっていることを特徴とする請求項５に記載の液体吐出用基板。 6. The liquid ejection substrate according to claim 5, wherein both ends in the first direction of at least one of the common supply flow path and the common recovery flow path communicating with the first row of ejection ports are chamfered or rounded. 複数の前記吐出口が配列される第１の吐出口列に連通する前記共通供給流路と前記共通回収流路との間の梁幅をＷ１、前記第１の吐出口列に連通する前記共通供給流路と、前記第１の吐出口列に並置される第２の吐出口列に連通する前記共通回収流路との間の梁幅をＷ３とした場合、Ｗ１＜Ｗ３の関係になっていることを特徴とする請求項１から５のいずれか１項に記載の液体吐出用基板。 A liquid ejection substrate according to any one of claims 1 to 5, characterized in that, when a beam width between the common supply flow path and the common recovery flow path that communicates with a first row of ejection ports in which a plurality of the ejection ports are arranged is W1, and a beam width between the common supply flow path that communicates with the first row of ejection ports and the common recovery flow path that communicates with a second row of ejection ports juxtaposed to the first row of ejection ports is W3 , the relationship W1 < W3 holds. 前記液体吐出用基板は複数種類の液体を吐出し、
同一種類の液体を吐出する隣接する吐出口列の間に位置する前記共通供給流路と前記共通回収流路との間の梁幅をＷ３、互いに異なる種類の液体を吐出する隣接する吐出口列の間に位置する前記共通供給流路と前記共通回収流路との間の梁幅をＷ４とした場合、Ｗ３＜Ｗ４の関係になっていることを特徴とする請求項１から７のいずれか１項に記載の液体吐出用基板。 the liquid ejection substrate ejects a plurality of types of liquid;
A liquid ejection substrate according to any one of claims 1 to 7, characterized in that when the beam width between the common supply flow path and the common recovery flow path located between adjacent rows of ejection ports that eject the same type of liquid is W3, and the beam width between the common supply flow path and the common recovery flow path located between adjacent rows of ejection ports that eject different types of liquid is W4, the relationship W3 < W4 is satisfied. 前記発熱素子が配される面に、複数の前記供給流路から液体を供給されて複数の前記圧力室に液体を供給する第２共通供給流路と、複数の前記圧力室に連通し複数の前記回収流路に連通する第２共通回収流路と、を備え、a second common supply flow path provided on a surface on which the heat generating element is disposed, the second common supply flow path being supplied with liquid from the plurality of supply flow paths and supplying the liquid to the plurality of pressure chambers, and a second common recovery flow path communicating with the plurality of pressure chambers and communicating with the plurality of recovery flow paths,
前記第２共通供給流路および前記第２共通回収流路は、前記第１の方向に延在し、the second common supply flow path and the second common recovery flow path extend in the first direction,
前記面と垂直な方向から透視して、前記供給流路と前記第２共通供給流路とが重なり、前記回収流路と前記第２共通回収流路とが重なることを特徴とする請求項１から８のいずれか１項に記載の液体吐出用基板。9. A liquid ejection substrate according to claim 1, wherein, when viewed from a direction perpendicular to the surface, the supply flow path and the second common supply flow path overlap, and the recovery flow path and the second common recovery flow path overlap. 請求項１から９のいずれか１項に記載の液体吐出用基板を備えることを特徴とする液体吐出ヘッド。 A liquid ejection head comprising the liquid ejection substrate according to claim 1 . 前記液体吐出用基板の前記第２の部分に接合され、前記共通供給流路と連通する供給開口と、前記共通回収流路と連通する回収開口と、を備える流路部材を有し、a flow path member that is joined to the second portion of the liquid ejection substrate and includes a supply opening that communicates with the common supply flow path and a recovery opening that communicates with the common recovery flow path;
前記第１の方向における、前記供給開口の長さは前記共通供給流路の長さよりも短く、前記回収開口の長さは前記共通回収流路の長さよりも短いことを特徴とする請求項１０に記載の液体吐出ヘッド。11. The liquid ejection head according to claim 10, wherein the length of the supply opening in the first direction is shorter than the length of the common supply flow path, and the length of the recovery opening is shorter than the length of the common recovery flow path. 前記圧力室内の液体は外部との間で循環されることを特徴とする請求項１１に記載の液体吐出ヘッド。 12. The liquid ejection head according to claim 11 , wherein the liquid in the pressure chamber is circulated between the pressure chamber and the outside. 請求項１０から１２のいずれか１項に記載の液体吐出ヘッドと、
複数の発熱素子を制御する制御手段と、
前記共通供給流路、前記供給流路、前記圧力室、前記回収流路、および前記共通回収流路を通して液体を流すように、前記共通供給流路と前記共通回収流路との間に差圧を生じさせる差圧発生手段と、を備えることを特徴とする液体吐出装置。 A liquid ejection head according to any one of claims 10 to 12 ,
A control means for controlling the plurality of heating elements;
a differential pressure generating means for generating a differential pressure between the common supply flow path and the common recovery flow path so as to flow liquid through the common supply flow path, the supply flow path, the pressure chamber, the recovery flow path, and the common recovery flow path. 液体を吐出する吐出口が第１の方向に延在する吐出口列を成すように複数配列され、前記吐出口列のそれぞれの吐出口に対応するように、液体を吐出するために利用される熱エネルギーを発生する発熱素子をそれぞれ内部に備える複数の圧力室を備える液体吐出ヘッドであって、
前記第１の方向に隣接する前記圧力室を区画する隔壁と、
前記圧力室の一方側に連通する第１の流路、および他方側に連通する第２の流路と、
前記吐出口列が設けられた平面と交差する第２の方向に延在して、前記第１の流路に液体を供給するための供給流路の複数が、前記第１の方向に配列された供給流路列と、
前記第２の方向に延在して、前記第２の流路内の液体を回収するための回収流路の複数が、前記第１の方向に配列された回収流路列と、
前記第１の方向に延在して、複数の前記供給流路と連通する共通供給流路と、
前記第１の方向に延在して、複数の前記回収流路と連通する共通回収流路と、
を備え、
前記吐出口列が設けられた前記平面において前記第１の方向と交差する第３の方向において、複数の前記供給流路の中心は前記共通供給流路の中心よりも前記吐出口列に近く、複数の前記回収流路の中心は前記共通回収流路の中心よりも前記吐出口列に近いことを特徴とする液体吐出ヘッド。 A liquid ejection head including a plurality of pressure chambers, each of which includes a heat generating element for generating thermal energy used to eject liquid , the heat generating element corresponding to each of the ejection ports of the ejection port array, the heat generating element generating thermal energy used to eject liquid, the plurality of pressure chambers being arranged to form an ejection port array extending in a first direction ,
a partition wall that divides the pressure chambers adjacent to each other in the first direction ;
a first flow path communicating with one side of the pressure chamber and a second flow path communicating with the other side of the pressure chamber;
a supply flow path array in which a plurality of supply flow paths for supplying liquid to the first flow path are arranged in a second direction intersecting a plane in which the ejection port array is provided , the supply flow path array being arranged in the first direction;
a recovery flow passage array in which a plurality of recovery flow passages extending in the second direction and for recovering liquid in the second flow passage are arranged in the first direction;
a common supply flow passage extending in the first direction and communicating with the plurality of supply flow passages;
a common recovery passage extending in the first direction and communicating with the plurality of recovery passages;
Equipped with
A liquid ejection head characterized in that, in a third direction intersecting the first direction in the plane in which the ejection port array is provided, the centers of the multiple supply flow paths are closer to the ejection port array than the center of the common supply flow path, and the centers of the multiple recovery flow paths are closer to the ejection port array than the center of the common recovery flow path . 複数の前記吐出口列が、前記第２の方向に並列し、
前記供給流路列と前記回収流路列とが、前記第２の方向に関して交互に配されていることを特徴とする請求項１４に記載の液体吐出ヘッド。 The plurality of ejection port arrays are arranged in parallel in the second direction,
15. The liquid ejection head according to claim 14 , wherein the supply flow path arrays and the recovery flow path arrays are arranged alternately in the second direction. 前記圧力室内の液体は当該圧力室の外部との間で循環されることを特徴とする請求項１４または１５に記載の液体吐出ヘッド。 16. The liquid ejection head according to claim 14 , wherein the liquid in the pressure chamber is circulated between the pressure chamber and the outside. 液体を吐出する吐出口が第１の方向に延在する吐出口列を成すように複数配列され、前記吐出口列のそれぞれの吐出口に対応するように、液体を吐出するために利用される熱エネルギーを発生する発熱素子をそれぞれ内部に備える複数の圧力室を備える液体吐出用基板であって、前記第１の方向に隣接する前記圧力室は、隔壁によって区画されており、前記液体吐出用基板は、１枚の基板の中で、当該液体吐出用基板の厚み方向にずれて位置する第１の部分と第２の部分とを含み、前記第１の部分には、前記圧力室の一方側に配され、当該圧力室に液体を供給する複数の供給流路と、前記圧力室の他方側に配され、当該圧力室から液体を回収する複数の回収流路と、が形成され、前記供給流路と前記回収流路とは、前記吐出口列が設けられた平面と交差する第２の方向に延在しており、前記第２の部分には、複数の前記供給流路に連通する共通供給流路と、複数の前記回収流路に連通する共通回収流路と、が形成され、前記共通供給流路と前記共通回収流路とは、前記第１の方向に延在し、前記吐出口列が設けられた前記平面において前記第１の方向と交差する第３の方向において、複数の前記供給流路の中心は前記共通供給流路の中心よりも前記吐出口列に近く、複数の前記回収流路の中心は前記共通回収流路の中心よりも前記吐出口列に近い液体吐出用基板の製造方法であって、a liquid ejection substrate including a plurality of pressure chambers, each of which has a heat generating element therein that generates thermal energy used to eject liquid, the heat generating element being arranged to form an ejection port row extending in a first direction and corresponding to each of the ejection ports in the ejection port row, the pressure chambers adjacent to each other in the first direction being partitioned by a partition wall, the liquid ejection substrate including a first portion and a second portion that are shifted in a thickness direction of the liquid ejection substrate within a single substrate, the first portion including a plurality of supply flow paths that are arranged on one side of the pressure chambers and supply liquid to the pressure chambers, and a plurality of supply flow paths that are arranged on the other side of the pressure chambers and recover liquid from the pressure chambers; a plurality of recovery flow paths communicating with the plurality of supply flow paths are formed in the second portion, the supply flow paths and the recovery flow path extend in a second direction intersecting a plane in which the ejection port array is provided, a common supply flow path communicating with the plurality of supply flow paths and a common recovery flow path communicating with the plurality of recovery flow paths are formed in the second portion, the common supply flow path and the common recovery flow path extend in the first direction, and in a third direction intersecting the first direction in the plane in which the ejection port array is provided, a center of the plurality of supply flow paths is closer to the ejection port array than a center of the common supply flow path, and a center of the plurality of recovery flow paths is closer to the ejection port array than a center of the common recovery flow path,
前記供給流路、前記回収流路、前記共通供給流路、および前記共通回収流路を、ドライエッチングにより形成することを特徴とする液体吐出用基板の製造方法。A method for manufacturing a liquid ejection substrate, comprising forming the supply flow path, the recovery flow path, the common supply flow path, and the common recovery flow path by dry etching.
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