JP2023093417A - 走査プローブ、および方法 - Google Patents
走査プローブ、および方法 Download PDFInfo
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- JP2023093417A JP2023093417A JP2022206080A JP2022206080A JP2023093417A JP 2023093417 A JP2023093417 A JP 2023093417A JP 2022206080 A JP2022206080 A JP 2022206080A JP 2022206080 A JP2022206080 A JP 2022206080A JP 2023093417 A JP2023093417 A JP 2023093417A
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
- G01B5/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/001—Constructional details of gauge heads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2046—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/559,611 | 2021-12-22 | ||
| US17/559,611 US11713956B2 (en) | 2021-12-22 | 2021-12-22 | Shielding for sensor configuration and alignment of coordinate measuring machine probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2023093417A true JP2023093417A (ja) | 2023-07-04 |
Family
ID=84519382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022206080A Pending JP2023093417A (ja) | 2021-12-22 | 2022-12-22 | 走査プローブ、および方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11713956B2 (zh) |
| EP (1) | EP4202354A1 (zh) |
| JP (1) | JP2023093417A (zh) |
| CN (1) | CN116379897A (zh) |
Family Cites Families (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2347899A1 (de) | 1973-09-24 | 1975-04-03 | Siemens Ag | Kopierfuehleranordnung |
| US4451987A (en) * | 1982-06-14 | 1984-06-05 | The Valeron Corporation | Touch probe |
| ATE39869T1 (de) | 1983-07-05 | 1989-01-15 | Elektroniktechnologie Get | Induktive sensoranordnung und messanordnung zur verwendung derselben. |
| GB8330412D0 (en) | 1983-11-15 | 1983-12-21 | Renishaw Plc | Tool change apparatus |
| US4866854A (en) | 1986-12-05 | 1989-09-19 | The Charles Stark Draper Laboratory, Inc. | Multiple axis displacement sensor |
| DE3813949A1 (de) | 1988-04-26 | 1989-11-09 | Heidenhain Gmbh Dr Johannes | Vorrichtung zur induktiven signaluebertragung bei tastkoepfen |
| US5209131A (en) | 1989-11-03 | 1993-05-11 | Rank Taylor Hobson | Metrology |
| EP0521092B1 (en) | 1990-03-23 | 1997-08-13 | Geotronics Ab | Analogue displacement sensor |
| GB9111382D0 (en) | 1991-05-25 | 1991-07-17 | Renishaw Metrology Ltd | Improvements in measuring probes |
| US5756997A (en) | 1996-03-04 | 1998-05-26 | General Nanotechnology, L.L.C. | Scanning probe/optical microscope with modular objective/probe and drive/detector units |
| CH690934A5 (fr) | 1996-04-29 | 2001-02-28 | Suisse Electronique Microtech | Dispositif de détection de position et de mouvement à variation de champ magnétique. |
| US5841274A (en) | 1997-01-29 | 1998-11-24 | Mitutoyo Corporation | Induced current absolute position transducer using a code-track-type scale and read head |
| IT1305536B1 (it) | 1998-09-21 | 2001-05-09 | Marposs Spa | Testata per il controllo di dimensioni lineari di pezzi meccanici |
| DE19928151B4 (de) * | 1999-06-19 | 2006-01-12 | Gth Fertigungstechnik Gmbh | Meßtaster |
| GB0102324D0 (en) | 2001-01-30 | 2001-03-14 | Renishaw Plc | Capacitance type displacement responsive device and a suspension system for a displacement responsive device |
| JP4417114B2 (ja) | 2002-02-28 | 2010-02-17 | カール ツァイス インドゥストリーレ メステクニーク ゲーエムベーハー | 座標測定器用プローブヘッド |
| US7135855B2 (en) | 2004-05-17 | 2006-11-14 | David Scott Nyce | Simplified inductive position sensor and circuit configuration |
| US7652275B2 (en) | 2006-07-28 | 2010-01-26 | Mitutoyo Corporation | Non-contact probe control interface |
| JP5410317B2 (ja) | 2010-02-05 | 2014-02-05 | 株式会社ミツトヨ | 三次元測定機 |
| EP2381212B1 (en) | 2010-04-26 | 2018-04-25 | Tesa Sa | Coordinate measuring system for rotationally symmetric workpieces |
| EP2384851B1 (en) | 2010-05-03 | 2018-01-03 | Tesa Sa | Coordinate Measuring System with rotatory adapter |
| GB201012249D0 (en) | 2010-07-21 | 2010-09-08 | Renishaw Plc | Metrology apparatus |
| DE102010034482A1 (de) | 2010-08-10 | 2012-04-19 | Carl Zeiss Industrielle Messtechnik Gmbh | Sensoranordnung und Verfahren zum Bestimmen einer räumlichen Position eines ersten Teils relativ zu einem zweiten Teil |
| DE102013219389A1 (de) | 2013-09-26 | 2015-03-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Reduzierung von Fehlern einer Drehvorrichtung, die bei der Bestimmung von Koordinaten eines Werkstücks oder bei der Bearbeitung eines Werkstücks verwendet wird |
| US9829305B2 (en) | 2014-05-14 | 2017-11-28 | Faro Technologies, Inc. | Metrology device and method of changing operating system |
| JP6039718B2 (ja) * | 2015-03-05 | 2016-12-07 | 株式会社ミツトヨ | 測定プローブ |
| JP6049786B2 (ja) * | 2015-03-05 | 2016-12-21 | 株式会社ミツトヨ | 測定プローブ |
| US9791262B2 (en) | 2015-12-17 | 2017-10-17 | Mitutoyo Corporation | Measurement device with multiplexed position signals |
| US9803972B2 (en) | 2015-12-17 | 2017-10-31 | Mitutoyo Corporation | Optical configuration for measurement device |
| CN108291801B (zh) | 2015-12-22 | 2020-11-10 | 株式会社三丰 | 用于cmm接触探针的传感器信号偏移补偿系统 |
| CN109313004B (zh) | 2016-04-21 | 2021-10-08 | 株式会社三丰 | 坐标测量探针主体 |
| US10215547B2 (en) | 2016-06-24 | 2019-02-26 | Mitutoyo Corporation | Method for operating a coordinate measuring machine |
| US9970744B2 (en) | 2016-06-24 | 2018-05-15 | Mitutoyo Corporation | Method for operating a coordinate measuring machine |
| WO2018006032A1 (en) | 2016-07-01 | 2018-01-04 | Mitutoyo Corporation | Power transfer configuration for supplying power to a detachable probe for a coordinate measurement machine |
| US10101141B2 (en) | 2016-12-07 | 2018-10-16 | Mitutoyo Corporation | Trigger counter for measurement device with count values stored in flash memory |
| US10145666B2 (en) | 2016-12-19 | 2018-12-04 | Mitutoyo Corporation | Touch probe for CMM including digital signal communication |
| US9835433B1 (en) | 2017-05-09 | 2017-12-05 | Tesa Sa | Touch trigger probe |
| US10866080B2 (en) | 2018-11-01 | 2020-12-15 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| US10323928B2 (en) | 2017-06-16 | 2019-06-18 | Mitutoyo Corporation | Optical configuration for measurement device using emitter material configuration |
| US10006757B1 (en) | 2017-06-16 | 2018-06-26 | Mitutoyo Corporation | Optical configuration for measurement device using emitter material configuration with quadrant photodetectors |
| WO2019005621A1 (en) | 2017-06-30 | 2019-01-03 | Mitutoyo Corporation | SELF-CONFIGURATION COMPONENT IDENTIFICATION AND SIGNAL PROCESSING SYSTEM FOR A COORDINATE MEASURING MACHINE |
| JP7100119B2 (ja) | 2017-09-29 | 2022-07-12 | 株式会社ミツトヨ | 複雑な回路の統合用のコンパクトな測定デバイス構成体 |
| US11543899B2 (en) * | 2018-11-01 | 2023-01-03 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position and including coil misalignment compensation |
| US10914570B2 (en) | 2018-11-01 | 2021-02-09 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| US11644298B2 (en) | 2018-11-01 | 2023-05-09 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| US11740064B2 (en) * | 2018-11-01 | 2023-08-29 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| US11474127B2 (en) | 2020-05-08 | 2022-10-18 | Rutgers, The State University Of New Jersey | Modular scanning probe microscope head |
| EP4019888B1 (en) * | 2020-12-28 | 2024-04-24 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position and including coil misalignment compensation |
| EP4019886B1 (en) * | 2020-12-28 | 2024-05-01 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
| US11644299B2 (en) * | 2020-12-31 | 2023-05-09 | Mitutoyo Corporation | Inductive position sensor signal gain control for coordinate measuring machine probe |
-
2021
- 2021-12-22 US US17/559,611 patent/US11713956B2/en active Active
-
2022
- 2022-12-13 EP EP22213147.6A patent/EP4202354A1/en active Pending
- 2022-12-20 CN CN202211643595.3A patent/CN116379897A/zh active Pending
- 2022-12-22 JP JP2022206080A patent/JP2023093417A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20230194233A1 (en) | 2023-06-22 |
| US11713956B2 (en) | 2023-08-01 |
| EP4202354A1 (en) | 2023-06-28 |
| CN116379897A (zh) | 2023-07-04 |
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