JP2023086079A - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP2023086079A
JP2023086079A JP2022103401A JP2022103401A JP2023086079A JP 2023086079 A JP2023086079 A JP 2023086079A JP 2022103401 A JP2022103401 A JP 2022103401A JP 2022103401 A JP2022103401 A JP 2022103401A JP 2023086079 A JP2023086079 A JP 2023086079A
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JP
Japan
Prior art keywords
interface
vacuum pump
controller
accessory
noise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022103401A
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English (en)
Japanese (ja)
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JP7515540B2 (ja
Inventor
ディルク・ホプフ
Hopf Dirk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Publication of JP2023086079A publication Critical patent/JP2023086079A/ja
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Publication of JP7515540B2 publication Critical patent/JP7515540B2/ja
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP2022103401A 2021-12-09 2022-06-28 真空ポンプ Active JP7515540B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP21213446 2021-12-09
EP21213446.4A EP4006350B1 (de) 2021-12-09 2021-12-09 Vakuumpumpe

Publications (2)

Publication Number Publication Date
JP2023086079A true JP2023086079A (ja) 2023-06-21
JP7515540B2 JP7515540B2 (ja) 2024-07-12

Family

ID=78827985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022103401A Active JP7515540B2 (ja) 2021-12-09 2022-06-28 真空ポンプ

Country Status (2)

Country Link
EP (1) EP4006350B1 (de)
JP (1) JP7515540B2 (de)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8467890B2 (en) * 2008-11-10 2013-06-18 Broadcom Corporation Method and system for detecting interrupts from detachable electronic accessories or peripherals
GB2502983A (en) * 2012-06-12 2013-12-18 Incus Lab Ltd Electronic host device with flexible interface for accessory connection
JP2021060034A (ja) * 2019-10-08 2021-04-15 プファイファー・ヴァキューム・ゲーエムベーハー 真空機器及び真空機器を運転する方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8467890B2 (en) * 2008-11-10 2013-06-18 Broadcom Corporation Method and system for detecting interrupts from detachable electronic accessories or peripherals
GB2502983A (en) * 2012-06-12 2013-12-18 Incus Lab Ltd Electronic host device with flexible interface for accessory connection
JP2021060034A (ja) * 2019-10-08 2021-04-15 プファイファー・ヴァキューム・ゲーエムベーハー 真空機器及び真空機器を運転する方法

Also Published As

Publication number Publication date
EP4006350B1 (de) 2023-09-13
EP4006350A1 (de) 2022-06-01
JP7515540B2 (ja) 2024-07-12

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