JP2023059416A5 - - Google Patents
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- JP2023059416A5 JP2023059416A5 JP2021169407A JP2021169407A JP2023059416A5 JP 2023059416 A5 JP2023059416 A5 JP 2023059416A5 JP 2021169407 A JP2021169407 A JP 2021169407A JP 2021169407 A JP2021169407 A JP 2021169407A JP 2023059416 A5 JP2023059416 A5 JP 2023059416A5
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Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021169407A JP7374158B2 (ja) | 2021-10-15 | 2021-10-15 | 生成物除去装置、処理システム及び生成物除去方法 |
| TW111129384A TW202317805A (zh) | 2021-10-15 | 2022-08-04 | 生成物去除裝置、處理系統及生成物去除方法 |
| KR1020220104730A KR20230054261A (ko) | 2021-10-15 | 2022-08-22 | 생성물 제거 장치, 처리 시스템 및 생성물 제거 방법 |
| EP22194765.8A EP4166788A1 (en) | 2021-10-15 | 2022-09-09 | Product removal apparatus, treatment system, and product removal method |
| US17/935,595 US20230119979A1 (en) | 2021-10-15 | 2022-09-27 | Product removal apparatus, treatment system, and product removal method |
| CN202211258615.5A CN115985744A (zh) | 2021-10-15 | 2022-10-14 | 生成物去除装置、处理系统及生成物去除方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021169407A JP7374158B2 (ja) | 2021-10-15 | 2021-10-15 | 生成物除去装置、処理システム及び生成物除去方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023059416A JP2023059416A (ja) | 2023-04-27 |
| JP2023059416A5 true JP2023059416A5 (ja) | 2023-05-25 |
| JP7374158B2 JP7374158B2 (ja) | 2023-11-06 |
Family
ID=83270966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021169407A Active JP7374158B2 (ja) | 2021-10-15 | 2021-10-15 | 生成物除去装置、処理システム及び生成物除去方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20230119979A1 (ja) |
| EP (1) | EP4166788A1 (ja) |
| JP (1) | JP7374158B2 (ja) |
| KR (1) | KR20230054261A (ja) |
| CN (1) | CN115985744A (ja) |
| TW (1) | TW202317805A (ja) |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09184075A (ja) * | 1995-12-27 | 1997-07-15 | Canon Inc | プラズマ処理方法及び処理装置 |
| JPH11222680A (ja) * | 1998-02-06 | 1999-08-17 | Yamaha Corp | 処理室クリーニング方法と装置 |
| JP3913646B2 (ja) * | 2002-08-30 | 2007-05-09 | 東京エレクトロン株式会社 | 基板処理装置 |
| EP1552152B1 (en) * | 2002-10-14 | 2013-03-20 | Edwards Limited | Rotary piston vacuum pump with washing installation |
| US8047817B2 (en) * | 2003-09-23 | 2011-11-01 | Edwards Limited | Cleaning method of a rotary piston vacuum pump |
| US7658802B2 (en) * | 2005-11-22 | 2010-02-09 | Applied Materials, Inc. | Apparatus and a method for cleaning a dielectric film |
| US8382909B2 (en) * | 2005-11-23 | 2013-02-26 | Edwards Limited | Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system |
| DE102008030788A1 (de) * | 2008-06-28 | 2009-12-31 | Oerlikon Leybold Vacuum Gmbh | Verfahren zum Reinigen von Vakuumpumpen |
| JP2013151714A (ja) * | 2012-01-24 | 2013-08-08 | Canon Inc | 堆積膜形成方法 |
| JP2017089462A (ja) * | 2015-11-06 | 2017-05-25 | エドワーズ株式会社 | 真空ポンプの判断システム、および真空ポンプ |
| CN109069990B (zh) * | 2016-04-26 | 2021-11-16 | 应用材料公司 | 用于排放沉积移除的温度控制远端等离子清洗 |
| JP2019012812A (ja) | 2017-06-29 | 2019-01-24 | 株式会社荏原製作所 | 排気系設備システム |
| KR20190002318A (ko) * | 2017-06-29 | 2019-01-08 | 가부시키가이샤 에바라 세이사꾸쇼 | 배기계 설비 시스템 |
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2021
- 2021-10-15 JP JP2021169407A patent/JP7374158B2/ja active Active
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2022
- 2022-08-04 TW TW111129384A patent/TW202317805A/zh unknown
- 2022-08-22 KR KR1020220104730A patent/KR20230054261A/ko unknown
- 2022-09-09 EP EP22194765.8A patent/EP4166788A1/en active Pending
- 2022-09-27 US US17/935,595 patent/US20230119979A1/en active Pending
- 2022-10-14 CN CN202211258615.5A patent/CN115985744A/zh active Pending