JP2023020147A5 - - Google Patents

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Publication number
JP2023020147A5
JP2023020147A5 JP2021125351A JP2021125351A JP2023020147A5 JP 2023020147 A5 JP2023020147 A5 JP 2023020147A5 JP 2021125351 A JP2021125351 A JP 2021125351A JP 2021125351 A JP2021125351 A JP 2021125351A JP 2023020147 A5 JP2023020147 A5 JP 2023020147A5
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JP
Japan
Prior art keywords
protective film
silicon substrate
forming
flow path
ejection head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021125351A
Other languages
English (en)
Japanese (ja)
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JP2023020147A (ja
JP7721355B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2021125351A priority Critical patent/JP7721355B2/ja
Priority claimed from JP2021125351A external-priority patent/JP7721355B2/ja
Priority to US17/872,999 priority patent/US12311667B2/en
Publication of JP2023020147A publication Critical patent/JP2023020147A/ja
Publication of JP2023020147A5 publication Critical patent/JP2023020147A5/ja
Priority to US19/196,352 priority patent/US20250269645A1/en
Application granted granted Critical
Publication of JP7721355B2 publication Critical patent/JP7721355B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021125351A 2021-07-30 2021-07-30 液体吐出ヘッドおよびその製造方法 Active JP7721355B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021125351A JP7721355B2 (ja) 2021-07-30 2021-07-30 液体吐出ヘッドおよびその製造方法
US17/872,999 US12311667B2 (en) 2021-07-30 2022-07-25 Liquid ejection head and method for manufacturing the same
US19/196,352 US20250269645A1 (en) 2021-07-30 2025-05-01 Liquid ejection head and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021125351A JP7721355B2 (ja) 2021-07-30 2021-07-30 液体吐出ヘッドおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2023020147A JP2023020147A (ja) 2023-02-09
JP2023020147A5 true JP2023020147A5 (enExample) 2024-08-02
JP7721355B2 JP7721355B2 (ja) 2025-08-12

Family

ID=85039088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021125351A Active JP7721355B2 (ja) 2021-07-30 2021-07-30 液体吐出ヘッドおよびその製造方法

Country Status (2)

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US (2) US12311667B2 (enExample)
JP (1) JP7721355B2 (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3248784B1 (en) * 2016-05-26 2020-02-19 Canon Kabushiki Kaisha Liquid ejection head, method for manufacturing the same, and printing method
JP6932519B2 (ja) * 2016-05-26 2021-09-08 キヤノン株式会社 液体吐出ヘッドおよびその製造方法、並びに記録方法
JP6840576B2 (ja) * 2016-05-27 2021-03-10 キヤノン株式会社 液体吐出ヘッドおよびその製造方法、並びに記録方法
JP6881967B2 (ja) * 2016-12-22 2021-06-02 キヤノン株式会社 基板の製造方法
JP7106828B2 (ja) * 2017-09-13 2022-07-27 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電デバイス、及び、液体噴射ヘッドの製造方法

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