JP2023011473A - Ultrasonic phase control device - Google Patents

Abstract

To provide an ultrasonic phase control device that can be manufactured easily and inexpensively.SOLUTION: An ultrasonic phase control device includes a phase control plate and a plurality of ultrasonic transducers that supports the plurality of ultrasonic transducers, and the phase control plate has a stepped shape on a support surface that supports the plurality of ultrasonic transducers.SELECTED DRAWING: Figure 6

Description

The present invention relates to an ultrasonic phase control device.

A technique for an ultrasonic focusing device that focuses ultrasonic waves output from a plurality of ultrasonic transducers onto a focal point and changes the focal point in a three-dimensional space by changing the phase of vibration of each ultrasonic transducer. known (see Non-Patent Document 1).

Takayuki Hoshi, Theory and Implementation of Small Ultrasonic Focusing Device, The Institute of Electrical Engineers of Japan Section C, Perception Information Technology Committee, Advanced Collaborative Research Committee for Haptic Devices, 1st Research Meeting Materials, p. 1-6, February 27, 2013

However, the technique of Non-Patent Document 1 uses an FPGA (Field Programmable Gate Array) to control the ultrasonic focusing device, so that manufacturing requires specialized knowledge and is expensive.

In other words, conventionally, a device for controlling the phase of ultrasonic waves (hereinafter referred to as "ultrasonic phase control device") cannot be manufactured easily and inexpensively.

An object of the present invention is to provide an ultrasonic phase control device that can be manufactured easily and inexpensively.

One aspect of the present invention is
Equipped with multiple ultrasonic transducers,
A phase control plate that supports the plurality of ultrasonic transducers,
The phase control plate has a stepped shape on a support surface that supports the plurality of ultrasonic transducers,
It is an ultrasonic phase control device.

1 is a block diagram showing the configuration of an ultrasonic phase control device of this embodiment; FIG. 2 is a functional block diagram of the controller of FIG. 1; FIG. 2 is an enlarged view of the ultrasonic transducer array of FIG. 1; FIG. FIG. 4 is a cross-sectional view of the ultrasonic transducer array in FIG. 3 taken along the dashed line AA; 5 is an enlarged view of a connecting portion (one-dot chain line B) in FIG. 4; FIG. Figure 4 is an enlarged view of the support surface of Figure 3; FIG. 4 is an explanatory diagram of a state before movement of the phase control plate in FIG. 3; 8 is a partial enlarged view of the support surface of FIG. 6 before movement of the phase control plate of FIG. 7; FIG. 8 is a partial enlarged view of the support surface of FIG. 6 after movement of the phase control plate of FIG. 7; FIG. FIG. 4 is an explanatory diagram of how a plurality of ultrasonic transducers in FIG. 3 are moved; FIG. 11 is an explanatory diagram of an outline of Modification 2; FIG. 11 is an enlarged view of a support surface of modification 3; 13 is an enlarged view of the support surface after the phase control plate of FIG. 12 has been moved; FIG. FIG. 11 is an enlarged view of a connection portion (one-dot chain line B) of Modification 4; The figure which looked at the phase control board of the modification 5 from the Z+ direction.

An embodiment of the present invention will be described in detail below with reference to the drawings. In the drawings for describing the embodiments, in principle, the same constituent elements are denoted by the same reference numerals, and repeated description thereof will be omitted.

In this embodiment, each term is defined as follows.
- "Direction of radiation" is the direction of propagation of ultrasonic waves.
- "Z-axis" is the axis along the radial direction.
- "X-axis" is an axis perpendicular to the Z-axis.
- "Y-axis" is an axis perpendicular to the X-axis and the Z-axis.
- "Ultrasonic waves" are vibration waves of about 20 kHz or higher, or sound waves that are inaudible to humans.

(1) Configuration of Ultrasonic Phase Control Apparatus The configuration of the ultrasonic phase control apparatus will be described. FIG. 1 is a block diagram showing the configuration of the ultrasonic phase control device of this embodiment.

As shown in FIG. 1 , the ultrasonic phase control device 1 includes a controller 10 and an ultrasonic transducer array 20 .

The controller 10 is a computer that generates control signals for controlling the ultrasonic transducer array 20 .

The ultrasonic transducer array 20 is configured to output ultrasonic waves in response to control signals generated by the controller 10 . The ultrasonic transducer array 20 includes multiple ultrasonic transducers 21 .

Each ultrasonic transducer 21 vibrates according to the control signal to generate ultrasonic waves corresponding to the vibration.

(1-1) Configuration of Controller The configuration of the controller 10 will be described. 2 is a functional block diagram of the controller of FIG. 1. FIG.

As shown in FIG. 2, the controller 10 includes a storage device 11, a processor 12, an input/output interface 13, and a communication interface .

Storage device 11 is configured to store programs and data. The storage device 11 is, for example, a combination of ROM (Read Only Memory), RAM (Random Access Memory), and storage (for example, flash memory or hard disk).

Programs include, for example, the following programs.
・Control program for vibrating the ultrasonic transducer

The data includes, for example, the following data.
・Databases referenced in information processing ・Data obtained by executing information processing (that is, execution results of information processing)

The processor 12 is configured to implement the functions of the controller 10 by activating programs stored in the storage device 11 . The processor 12 is, for example, a CPU (Central Processing Unit).

The input/output interface 13 is configured to acquire user instructions from an input device connected to the controller 10 and output information to an output device connected to the controller 10 .
Input devices are, for example, keyboards, pointing devices, touch panels, or combinations thereof.
An output device is, for example, a display.

Communication interface 14 is configured to control communication between controller 10 and ultrasound transducer array 20 .

(1-2) Configuration of Ultrasonic Transducer Array The configuration of the ultrasonic transducer array 20 will be described. FIG. 3 is an enlarged view of the ultrasonic transducer array of FIG. FIG. 4 is a cross-sectional view of the ultrasonic transducer array in FIG. 3 taken along the dashed line AA.
FIG. 3A is a perspective view of an ultrasound transducer array. FIG. 3B is a top view of the ultrasonic transducer array viewed from the Z+ direction.

As shown in FIGS. 3 to 5, the ultrasonic transducer array 20 includes a connecting portion 22, a fixing portion 23, and a phase control plate 25. FIG.

As shown in FIG. 3, the phase control plate 25 has a support surface 25a that supports the ultrasonic transducers 21. As shown in FIG.

As shown in FIG. 4 , the connecting portion 22 is connected to the ultrasonic transducer 21 . The ultrasonic transducer 21 is supported by the phase control plate 25 by the connection portion 22 coming into contact with the support surface 25a.

As shown in FIG. 3B, the fixed part 23 extends along the X-axis and the Y-axis. The fixing portion 23 connects two adjacent ultrasonic transducers 21 to each other. Thereby, the interval between two adjacent ultrasonic transducers 21 is fixed.

(1-3) Configuration of Connection Portion The configuration of the connection portion 22 will be described. FIG. 5 is an enlarged view of the connecting portion (one-dot chain line B) in FIG.

As shown in FIG. 5 , the connection portion 22 includes a first support portion 220 , a pair of second support portions 221 , a contact point 222 and a pair of elastic members 223 .
The fixing portion 23 is positioned above (Z+ side) the bottom surface (Z− side surface) of the ultrasonic transducer 21 in the Z direction.

The first support portion 220 supports the Z− side surface (hereinafter referred to as “lower surface”) of the ultrasonic transducer 21 .

Each second support portion 221 supports the lower surface of the ultrasonic transducer 21 and the Z− side end of the elastic member 223 (hereinafter referred to as “lower end”). Each second support 221 is arranged on the X+ side and the X− side with respect to the first support 220 .

The contact 222 is arranged between the lower end of the first support portion 220 and the support surface 25a.

Each elastic member 223 is connected to the second support portion 221 and the fixing portion 23 . A lower end of each elastic member 223 is connected to the second support portion 221 . The Z+ side end of each elastic member 223 (hereinafter referred to as “upper end”) is connected to the lower surface of the fixed portion 23 . The upper end of each elastic member 223 is a fixed end. That is, the fixed portion 23 fixes the position of the fixed end of each elastic member 223 on the Z-axis.
Each elastic member 223 is configured to apply a biasing force along the Z-axis (that is, in the radial direction) to each ultrasonic transducer 21 via the second support portion 221 . The biasing force is determined according to the shape of the support surface 25a. As a result, the position of the ultrasonic transducer 21 on the Z-axis becomes variable according to the shape of the support surface 25a.
The elastic member 223 is, for example, a spring.

The first supporting portion 220, the second supporting portion 221, the contacts 222, the pair of elastic members 223, and the fixing portion 23 are conductive. As a result, the first supporting portion 220, the second supporting portion 221, the contact points 222, the pair of elastic members 223, and the fixing portion 23 form a circuit (hereinafter referred to as " control circuit").

(1-4) Configuration of Support Surface The configuration of the support surface 25a will be described. 6 is an enlarged view of the support surface of FIG. 3; FIG.

As shown in FIG. 6, the support surface 25a has a stepped shape (also referred to as a "sawtooth shape") 25aa.
The staircase shape 25aa is formed according to the phase control pattern of the ultrasonic wave (for example, the relative position of the focal point with respect to the ultrasonic transducer array 20 or the rectilinear direction of the ultrasonic beam). The staircase shape 25aa is calculated by computer simulation using the phase control pattern as an input value.
The position of each contact 222 on the Z-axis is determined by this stepped shape 25aa. When the position of each contact 222 on the Z-axis is determined, the position of each ultrasonic transducer 21a to 21e on the Z-axis is also determined. In other words, the positions of the ultrasonic transducers 21a to 21e on the Z-axis are determined by the shape of the support surface (that is, the stepped shape 25aa).

The support surface 25a is made of a conductive material. Thereby, control signals and power generated by the controller 10 are supplied to the plurality of ultrasonic transducers 21a to 21e via the control circuit. The conductive material is, for example, at least one of the following.
・Conductive tape ・Conductive paint ・Metal (e.g. aluminum foil)
・Conductive filament

A plurality of signal lines 251 are arranged inside the support surface 25a. Each signal line 251 is configured to supply a control signal generated by the controller 10 to the ultrasonic transducers 21 .

(2) Phase Control Example A phase control example of the present embodiment will be described. FIG. 7 is an explanatory diagram of the phase control plate shown in FIG. 3 before it is moved. 8 is a partial enlarged view of the support surface of FIG. 6 before movement of the phase control plate of FIG. 7; FIG. 9 is a partial enlarged view of the support surface of FIG. 6 after movement of the phase control plate of FIG. 7;

The phase control plate 25 is movable in the X direction either manually or by control (eg control by the processor 12).
As shown in FIG. 7, when the phase control plate 25 is moved in the +X direction, each connecting portion 22 (not shown) applies an urging force to each ultrasonic transducer 21 along the shape of the support surface 25a. As a result, the position of each ultrasonic transducer 21 on the Z-axis is displaced.

As shown in FIG. 9, for example, the position of each ultrasonic transducer 21 on the Z-axis is displaced as follows.
- The position of the ultrasonic transducer 21a is not displaced.
• The position of the ultrasonic transducer 21b is displaced in the Z-direction.
• The position of the ultrasonic transducer 21c is displaced in the Z-direction.

In this case, the ultrasonic waves emitted from each ultrasonic transducer 21 are focused ultrasonic waves converging at a spatial focal point. The position of the focal point is determined by the phase of each ultrasonic wave (that is, the shape of the support surface 25a).

If the phase control example is applied to a loudspeaker, it can reproduce audible sound only at the focal point.
When the phase control example is applied to a tactile sense presentation device, a tactile sense can be presented to the focal point.

(3) Summary of the present embodiment According to the present embodiment, the support surface 25a of the phase control plate 25 has a stepped shape. Therefore, only by changing the relative positions of the phase control plate 25 and the plurality of ultrasonic transducers 21, the positions of the plurality of ultrasonic transducers 21 in the Z direction are displaced. The phases of the ultrasonic waves emitted from the plurality of ultrasonic transducers 21 are determined by the positions. Therefore, the phase of ultrasonic waves can be controlled only by changing the relative position. Thereby, the ultrasonic phase control device 1 can be manufactured easily.

(4) Modification A modification of the present embodiment will be described.

(4-1) Modification 1
Modification 1 will be described. Modification 1 is an example of controlling the phase by moving a plurality of ultrasonic transducers 21 .

(4-1-1) Phase Control Example of Modification 1 A phase control example of Modification 1 will be described. FIG. 10 is an explanatory diagram of how the plurality of ultrasonic transducers in FIG. 3 move.

The plurality of ultrasonic transducers 21 can be moved in the X direction manually or by control (for example, control by the processor 12). As shown in FIG. 10, for example, when a plurality of ultrasonic transducers 21 are moved in the X+ direction, each connecting portion 22 (not shown) applies an urging force along the shape of the support surface 25a to each ultrasonic transducer. Add to 21. As a result, the position of each ultrasonic transducer 21 on the Z-axis is displaced.

(4-1-2) Summary of Modification 1 According to Modification 1, by moving a plurality of ultrasonic transducers 21 instead of the phase control plate 25, the same effects as in the present embodiment can be obtained. be able to.

(4-2) Modification 2
Modification 2 will be described. Modification 2 is an example in which the phase control plate 25 is replaceable.

(4-2-1) Overview of Modification 2 An overview of Modification 2 will be described. FIG. 11 is an explanatory diagram of an overview of Modification 2. As shown in FIG.

The phase control plate 25 of Modification 2 is configured to be detachable from the plurality of ultrasonic transducers 21 .
For example, as shown in FIG. 11, the phase control plate 25-1 can be removed from the plurality of ultrasonic transducers 21 and the phase control plate 25-2 can be attached to the plurality of ultrasonic transducers 21. FIG. The shape of the support surface 25a of the phase control plate 25-1 is different from the shape of the support surface 25a of the phase control plate 25-2.

(4-2-2) Summary of Modification 2 According to Modification 2, when the phase control plate 25-1 is attached to a plurality of ultrasonic transducers 21, the phase control plate 25-1 is moved. The phase of the ultrasonic wave when the phase control plate 25-2 is attached to the plurality of ultrasonic transducers 21 is different from the phase when the phase control plate 25-2 is moved. As a result, ultrasonic waves having a desired phase can be radiated simply by exchanging the phase control plate 25 .

(4-3) Modification 3
Modification 3 will be described. Variant 3 is an electrically conductive arrangement of the support surface 25a such that the ultrasonic waves emitted from two ultrasonic transducers 21 adjacent to each other at a particular position of the support surface 25a have opposite phases. This is an example of designing a control circuit using patterns.

(4-3-1) Configuration of Support Surface of Modification 3 The configuration of the support surface 25a of Modification 3 will be described. FIG. 12 is an enlarged view of the support surface of Modification 3. FIG.

As shown in FIG. 12, the support surface 25a has unevenness.
The unevenness is formed according to the phase control pattern of ultrasonic waves. The shape of the unevenness is calculated by computer simulation using the phase control pattern as an input value.
The unevenness determines the position of each contact 222 on the Z-axis. When the position of each contact 222 on the Z-axis is determined, the position of each ultrasonic transducer 21a to 21e on the Z-axis is also determined. That is, the positions of the ultrasonic transducers 21a to 21e on the Z-axis are determined by the shape (that is, unevenness) of the support surface 25a.

A plurality of signal lines (for example, a first signal line 251 and a second signal line 252) are arranged inside the support surface 25a. Each first signal line 251 and each second signal line 252 are configured to supply control signals generated by the controller 10 to the ultrasonic transducers 21 .

A first signal line 251 supplies a first control signal to the ultrasonic transducer 21 . The first control signal is a signal for vibrating the ultrasonic transducer 21 in the first phase.
The first signal line 251 is connected to the ultrasonic transducers 21a, 21c, and 21e.

A second signal line 252 supplies a second control signal to the ultrasonic transducer 21 . The second control signal is a signal for vibrating the ultrasonic transducer 21 with a second phase different from the first phase.
The second signal line 252 is connected to the ultrasonic transducers 21b and 21d.

(4-3-2) Phase Control Example of Modification 3 A phase control example of Modification 3 will be described. FIG. 13 is an enlarged view of the support surface after the phase control plate of FIG. 12 has been moved.

The phase control plate 25 is movable in the X direction either manually or by control (eg control by the processor 12).
As shown in FIG. 7, when the phase control plate 25 is moved in the X+ direction, each connecting portion 22 (not shown) applies an urging force to each ultrasonic transducer 21 along the unevenness of the support surface 25a. As a result, the position of each ultrasonic transducer 21 on the Z-axis is displaced.

As shown in FIG. 13, for example, the position of each ultrasonic transducer 21 on the Z-axis is displaced as follows.
• The position of the ultrasonic transducer 21a is displaced in the Z-direction.
- The position of the ultrasonic transducer 21b is displaced in the +Z direction.
- The position of the ultrasonic transducer 21c is not displaced.
• The position of the ultrasonic transducer 21d is displaced in the Z-direction.
- The position of the ultrasonic transducer 21e is displaced in the +Z direction.

The first signal line 251 is connected to the ultrasonic transducers 21b and 21d. That is, the signal line to which the ultrasonic transducers 21b and 21d are connected changes from the second signal line 252 to the first signal line 251 as the phase control plate 25 moves.
The second signal line 252 is connected to the ultrasonic transducers 21a, 21c, and 21e. That is, the signal line to which the ultrasonic transducers 21a, 21c, and 21e are connected changes from the first signal line 251 to the second signal line 252 as the phase control plate 25 moves.

In this case, the ultrasonic waves emitted from each ultrasonic transducer 21 are focused ultrasonic waves converging at a spatial focal point. The position of the focal point is determined by the phase of each ultrasonic wave (that is, the unevenness of the support surface 25a).

(4-3-3) Summary of Modification 3 According to Modification 3, by moving the phase control plate 25, the signal line connected to each ultrasonic transducer 21 (that is, each ultrasonic transducer 21) is changed, and the position of each ultrasonic transducer 21 in the Z direction is displaced. The phase emitted from each ultrasonic transducer 21 and the control signal supplied to each ultrasonic transducer 21 are determined by the signal line connected to each ultrasonic transducer 21 and the unevenness. This makes it possible to minimize the difference between the concave portion and the convex portion of the phase control plate 25 compared to the stepped shape. As a result, the size of the ultrasonic transducer array 20 in the Z direction and the movement width of the ultrasonic transducers 21 on the Z axis can be reduced compared to the stepped shape (FIG. 6).

(4-4) Modification 4
Modification 4 will be described. Modification 4 is a modification relating to the configuration of the connecting portion 22 .

(4-4-1) Configuration of Connection Portion of Modification 4 The configuration of the connection portion 22 of Modification 4 will be described. FIG. 14 is an enlarged view of the connecting portion (chain line B) of Modification 4. As shown in FIG.

As shown in FIG. 14 , the connection portion 22 includes a first support portion 220 , contacts 222 and elastic members 223 . The second support portion 221 (FIG. 5) is omitted.
The fixing portion 23 is positioned below (Z− side) the bottom surface (Z− side surface) of the ultrasonic transducer 21 in the Z direction.

The first support portion 220 and the contact 222 are the same as in FIG.

The elastic member 223 is connected to the ultrasonic transducer 21 and the fixed portion 23 . A lower end of the elastic member 223 is connected to the fixed portion 23 . The upper end of the elastic member 223 is connected to the lower surface of the ultrasonic transducer 21 . A lower end of the elastic member 223 is a fixed end. That is, the fixed portion 23 fixes the position of the fixed end of each elastic member 223 on the Z-axis.
The elastic member 223 is configured to apply a biasing force along the Z-axis (that is, radial direction) to the ultrasonic transducer 21 . The biasing force is determined according to the shape of the support surface 25a. As a result, the position of the ultrasonic transducer 21 on the Z-axis becomes variable according to the shape of the support surface 25a.
The elastic member 223 is, for example, a spring.

(4-4-2) Summary of Modification 4 According to Modification 4, even if the pair of second support portions 221 is omitted, the same effects as in the present embodiment can be obtained.

(4-5) Modification 5
Modification 5 will be described. Modification 5 is an example in which the phase control plate 25 is configured to be rotatable instead of being configured to be movable in the XY directions.

(4-5-1) Configuration of Phase Control Plate of Modification 5 The configuration of the phase control plate of Modification 5 will be described. FIG. 15 is a view of the phase control plate of Modification 5 as seen from the Z+ direction.

As shown in FIG. 15, the support surface 25a includes a concave portion 25ab and a convex portion 25ac formed concentrically.
The phase control plate 25 is configured to be rotatable on the XY plane with the rotation axis X as a reference. With respect to the XY plane, the axis of rotation X is different from the center C of the concentric circles. That is, at least one of the X and Y coordinates of the rotation axis X is different from at least one of the X and Y coordinates of the center C.

Each ultrasonic transducer 21 is positioned in the concave portion 25ab or the convex portion ac.

(4-5-2) Summary of Modification 5 According to Modification 5, when the phase control plate 25 rotates about the rotation axis X, the ultrasonic transducer 21 positioned in the concave portion 25ab moves to the convex portion. 25ac, and the ultrasonic transducer 21 located in the convex portion 25ac moves to the concave portion 25ab. As a result, the position of each ultrasonic transducer 21 in the Z direction and the control signal supplied to each ultrasonic transducer 21 change. In other words, the phase can be controlled simply by rotating the phase control plate 25 . Thereby, the phase control can be easily continued.

(5) Other Modifications Other modifications will be described.

In the above description, an example of moving the phase control plate 25 or the plurality of ultrasonic transducers 21 in the X direction was shown, but the scope of the present embodiment is not limited to this. This embodiment can also be applied to any of the following examples.
・Example of moving the phase control plate 25 or the plurality of ultrasonic transducers 21 in the Y direction ・Example of moving the phase control plate 25 or the plurality of ultrasonic transducers 21 in the X direction and the Y direction

In the above description, an example is shown in which the phase control plate 25 or the plurality of ultrasonic transducers 21 are configured to be movable, but the scope of the present embodiment is not limited to this. This embodiment can also be applied to an example in which both the phase control plate 25 and the ultrasonic transducer 21 are movable.

In the above description, an example of the support surface 25a having unevenness for radiating focused ultrasonic waves was shown, but the scope of the present embodiment is not limited to this. This embodiment can also be applied to the support surface 25a having unevenness for emitting ultrasonic beams.

Although the above description shows an example in which the phase control plate 25 has a rectangular shape, the present embodiment is not limited to this. This embodiment can also be applied to an example in which the phase control plate 25 has a shape other than a rectangle (for example, a circular shape).

In the above description, an example in which the first support portion 220, the second support portion 221, the contact points 222, the pair of elastic members 223, and the fixed portion 23 form a control circuit has been described. Not limited. This embodiment can also be applied to an example in which the second support portion 221, the pair of elastic members 223, and the fixing portion 23 form a control circuit. In this case, the support surface 25a, the first support portion 220, and the contacts 222 do not need to be conductive.

In the above description, an example of phase control of ultrasonic waves has been shown, but the present embodiment is not limited to this. This embodiment can also be applied to an example of controlling the phase of an audible sound wave (that is, a sound wave phase control device).

Although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited to the above embodiments. Also, the above embodiments can be modified and modified in various ways without departing from the gist of the present invention. Also, the above embodiments and modifications can be combined.

Reference Signs List 1: ultrasonic phase control device 10: controller 11: storage device 12: processor 13: input/output interface 14: communication interface 20: ultrasonic transducer array 21: ultrasonic transducer 22: connecting section 23: fixed section 25: phase Control plate 25a: support surface 251: first signal line 252: second signal line 220: first support portion 221: second support portion 222: contact 223: elastic member

Claims (13)

Equipped with multiple ultrasonic transducers,
A phase control plate that supports the plurality of ultrasonic transducers,
The phase control plate has a stepped shape on a support surface that supports the plurality of ultrasonic transducers,
Ultrasonic phase controller. Equipped with multiple ultrasonic transducers,
A phase control plate that supports the plurality of ultrasonic transducers,
The phase control plate has unevenness on a support surface that supports the plurality of ultrasonic transducers,
Ultrasonic phase controller. a first signal line connected to the recess of the support surface;
the first signal line supplies a control signal to the ultrasonic transducer for vibrating the ultrasonic transducer in a first phase;
comprising a second signal line connected to the convex portion of the support surface;
the second signal line supplies a control signal to the ultrasonic transducer for vibrating the ultrasonic transducer at a second phase different from the first phase;
The ultrasonic phase control device according to claim 2. The unevenness is formed concentrically,
The phase control plate is configured to be rotatable with respect to a plane orthogonal to the radiation direction of the ultrasonic transducer with respect to a rotation axis located at a position different from the center of the concentric circle.
4. The ultrasonic phase control device according to claim 2 or 3. the shape of the support surface is formed according to a phase control pattern of ultrasonic waves emitted from the plurality of ultrasonic transducers;
The ultrasonic phase control device according to any one of claims 1 to 3. the position of the ultrasonic transducer along the direction of emission of the ultrasonic waves is determined by the shape of the support surface;
The ultrasonic phase control device according to any one of claims 1 to 5. A fixing part extending in a direction perpendicular to the direction of radiation of ultrasonic waves,
An elastic member having one end fixed to the fixing portion,
the elastic member applies an urging force along the radial direction to the ultrasonic transducer according to the shape of the support surface;
The ultrasonic phase control device according to any one of claims 1 to 6. The elastic member is configured to displace the positions of the plurality of ultrasonic transducers in the radial direction according to the shape of the support surface.
The ultrasonic phase control device according to claim 7. The fixing part is positioned above the bottom surface of the ultrasonic transducer with respect to the radiation direction of the ultrasonic waves.
The ultrasonic phase control device according to claim 7 or 8. The fixing part is positioned below the bottom surface of the ultrasonic transducer with respect to the radiation direction of the ultrasonic waves.
The ultrasonic phase control device according to claim 7 or 8. The phase control plate is movable along a direction perpendicular to the ultrasonic wave radiation direction of the plurality of ultrasonic transducers.
The ultrasonic phase control device according to any one of claims 1 to 10. The plurality of ultrasonic transducers are movable along a direction orthogonal to the direction of emission of ultrasonic waves from the plurality of ultrasonic transducers.
The ultrasonic phase control device according to any one of claims 1 to 11. The phase control plate is configured to be detachable from the plurality of ultrasonic transducers,
The ultrasonic phase control device according to any one of claims 1 to 12.

Images