JP2023004776A - High-stability measurement method and measuring instrument of temperature response signal in laser periodic heating method - Google Patents
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Abstract
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本発明は、レーザー周期加熱法における温度応答信号の高安定測定方法及び測定器に関するものである。 TECHNICAL FIELD The present invention relates to a highly stable measuring method and measuring instrument for a temperature response signal in a laser periodic heating method.
同じ物質で構成された構造物に同じ熱エネルギーを加えると、原理的には同じ温度になり、同じ赤外線量を放射する筈である。しかし、同じ金属構造物に同じ条件でレーザー熱エネルギーを加えても、レーザー吸収率αの影響（式１）で同じ温度にはならず、その結果の異なった温度から放射される赤外線量も、放射率εの影響（式２）で、更に大きく変動する。
金属表面の正確な温度測定をするために、２波長放射赤外線量比較法で放射率をキャンセルする２色放射温度計が実用化されている。しかし、この２色放射温度計で小さな領域の温度や低い温度の測定を行うことは、技術的難易度が高い。それは、赤外線ディテクタでセンシングされる赤外線量が極めて小さくなるので、Ｓ／Ｎ比（信号とノイズの比率）が悪く、信号を検出できない場合が多いからである（大きい領域の高い温度の場合は、Ｓ／Ｎ比が高くなるため検出が容易である。）。 In order to accurately measure the temperature of a metal surface, a two-color radiation thermometer that cancels the emissivity by the two-wavelength radiation infrared dose comparison method has been put to practical use. However, it is technically difficult to measure the temperature of a small area or a low temperature with this two-color radiation thermometer. This is because the amount of infrared rays sensed by the infrared detector is extremely small, so the S/N ratio (ratio of signal to noise) is poor and the signal cannot be detected in many cases. The detection is easy because the S/N ratio is high.).
現在本出願人により実用化されているレーザー正弦波変調加熱による非破壊金属接合界面検査方法（例えば、特許文献１参照）は、温度の絶対値に影響を受けない周期加熱法による方法であるが、その場合でも、上述したレーザー吸収率や赤外線放射率の影響で赤外線ディテクタの測定値が大きく変動するため、実用性の高い安定した測定は難しい。例えば、レーザー吸収率と赤外線放射率が各々１０倍変動すると、赤外線放射エネルギーは１，０００倍変動する。従って、その大きく変動する赤外線放射エネルギーをセンシングする赤外線ディテクタも、広いダイナミックレンジ（処理可能な信号の最小値と最大値の比率を表した数値で、単位はｄＢで表現）の測定が可能であることが必要となる。 The non-destructive metal joint interface inspection method by laser sinusoidal modulation heating currently put into practical use by the present applicant (see, for example, Patent Document 1) is a method based on a periodic heating method that is not affected by the absolute value of temperature. However, even in that case, the measured value of the infrared detector fluctuates greatly due to the influence of the laser absorptivity and the infrared emissivity described above, so it is difficult to perform highly practical and stable measurements. For example, if the laser absorptance and infrared emissivity each vary by a factor of 10, the infrared radiant energy will vary by a factor of 1,000. Therefore, an infrared detector that senses the widely fluctuating infrared radiant energy can also measure a wide dynamic range (a numerical value representing the ratio of the minimum and maximum values of the signal that can be processed, expressed in dB). is required.
高速温度変移を高感度で測定する赤外線ディテクタとしては、一般に、アンチモン化インジウム（ＩｎＳｂ）やテルル化カドミウム水銀（ＭＣＴ／ＨｇＣｄＴｅ）等の量子型ディテクタが用いられ、これを、トランスインピーダンスアンプ（電流電圧線形変換器）で増幅して使用している。また、一般的な前記量子型ディテクタは、８０ｄＢ（１０，０００倍）～１００ｄＢ（１００，０００倍）以上の広いダイナミックレンジを有している。 Quantum detectors such as indium antimonide (InSb) and mercury cadmium telluride (MCT/HgCdTe) are generally used as infrared detectors for measuring high-speed temperature transitions with high sensitivity. used after being amplified by a linear converter). In addition, the general quantum type detector has a wide dynamic range of 80 dB (10,000 times) to 100 dB (100,000 times) or more.
このトランスインピーダンスアンプのダイナミックレンジは、低ノイズアンプで構成しても６０ｄＢ（１，０００倍）程度であるが、吸収率や放射率の変動幅が１０倍としても、センサ出力は６０ｄＢ（１，０００倍）以上変動することになる。 検出信号のＳ／Ｎ比は最低でも２０ｄＢ（１０倍）以上必要であることを考慮すると、放射赤外線測定系のダイナミックレンジは、最低でも８０ｄＢ（１０，０００倍）以上であることが要請されるが、一般的に用いられている従来の赤外線ディテクタアンプ（上記、トランスインピーダンスアンプ）では、この要請に応えることができない。 The dynamic range of this transimpedance amplifier is about 60 dB (1,000 times) even when configured with a low-noise amplifier. 000 times) or more. Considering that the S/N ratio of the detection signal must be at least 20 dB (10 times) or more, the dynamic range of the radiant infrared measurement system must be at least 80 dB (10,000 times) or more. However, conventional infrared detector amplifiers (the transimpedance amplifiers described above) that are generally used cannot meet this demand.
上述したように、レーザー周期加熱法における温度応答信号の測定のために従来用いられている赤外線ディテクタアンプの場合は、ダイナミックレンジが最低でも８０ｄＢ（１０，０００倍）以上という要請に応えることができない。 As described above, the infrared detector amplifier conventionally used to measure the temperature response signal in the laser periodic heating method cannot meet the requirement that the dynamic range be at least 80 dB (10,000 times) or more. .
そこで本発明は、ダイナミックレンジが最低でも８０ｄＢ（１０，０００倍）以上という要請に応えることができ、また、室温や装置温度等の周辺環境温度変化によるディテクタ出力ドリフトの低減を図ることができ、以て、レーザー周期加熱法における温度応答信号の高安定測定を可能にする方法及び測定器を提供することを課題とする。 Therefore, the present invention can meet the demand that the dynamic range is at least 80 dB (10,000 times) or more, and can reduce the detector output drift due to changes in ambient environmental temperature such as room temperature and device temperature. Accordingly, it is an object of the present invention to provide a method and a measuring instrument that enable highly stable measurement of a temperature response signal in the laser periodic heating method.
上記課題を解決するための請求項１に記載の発明は、強度を周期的に変調させた熱エネルギーを試料に与えた時の、加熱領域における温度応答の振幅又は位相差から、試料の熱物性を測定するレーザー周期加熱法の実施に当たり、
前記温度応答を検出する赤外線ディテクタ出力を、対数変換した後、直流成分の除去処理を行って温度応答による変移信号のみ抽出することにより、前記赤外線ディテクタのダイナミックレンジを拡大することを特徴とするレーザー周期加熱法における温度応答信号の高安定測定方法である。
The invention according to claim 1 for solving the above-mentioned problems is a thermophysical property of the sample from the amplitude or phase difference of the temperature response in the heating region when the sample is given thermal energy whose intensity is periodically modulated. In implementing the laser periodic heating method to measure
A laser characterized in that the dynamic range of the infrared detector is expanded by logarithmically transforming the output of the infrared detector that detects the temperature response and then removing the DC component to extract only the transition signal due to the temperature response. This is a highly stable measurement method for temperature response signals in the periodic heating method.
一実施形態においては、対数変換した対数変換器出力を、ローパスフィルタを通してノイズを除去した後に、前記直流成分除去処理を行う。また、一実施形態においては、前記対数変換を行う対数変換器は、８０ｄＢ（１０，０００倍）以上のダイナミックレンジであることが望まれる。 In one embodiment, the logarithmically transformed output of the logarithmic converter is passed through a low-pass filter to remove noise, and then the DC component removal processing is performed. In one embodiment, the logarithmic converter that performs the logarithmic conversion is desired to have a dynamic range of 80 dB (10,000 times) or more.
上記課題を解決するための請求項４に記載の発明は、強度を周期的に変調させた熱エネルギーを試料に与えた時の、加熱領域における温度応答の振幅又は位相差から、試料の熱物性を測定するレーザー周期加熱法の実施に用いる赤外線の高安定測定器であって、
前記温度応答を検出する赤外線ディテクタと、前記赤外線ディテクタ出力を対数変換する対数変換器と、対数変換した対数変換器出力から直流成分を除去する直流成分除去回路とから成ることを特徴とするレーザー周期加熱法における温度応答信号の高安定測定器である。
According to a fourth aspect of the invention for solving the above problems, the thermophysical properties of the sample can be determined from the amplitude or phase difference of the temperature response in the heating region when thermal energy whose intensity is periodically modulated is applied to the sample. A highly stable infrared measuring instrument for use in performing a laser periodic heating method for measuring
A laser cycle characterized by comprising an infrared detector for detecting the temperature response, a logarithmic converter for logarithmically converting the output of the infrared detector, and a DC component removal circuit for removing a DC component from the output of the logarithmically converted logarithmic converter. This is a highly stable measuring instrument for temperature response signals in the heating method.
一実施形態においては、前記対数変換器と直流成分除去回路の間に、前記対数変換器出力のノイズを除去するローパスフィルタを介在させる。 In one embodiment, a low-pass filter for removing noise from the output of the logarithmic converter is interposed between the logarithmic converter and the DC component removing circuit.
本発明に係るレーザー周期加熱法における温度応答信号の高安定測定方法及び測定器は上記のとおりであって、その方法並びに測定器によれば、吸収率の影響で大きく変動するレーザー加熱面から、放射率の影響で大きく変動する赤外線放射エネルギーを検出する赤外線ディテクタの出力を、８０ｄＢ以上の広ダイナミックレンジで扱うことができ、また、周辺環境温度変化によるディテクタドリフトを低減することで、測定許容範囲を拡大することができ、以て、実用性の高い安定した測定を行うことが可能となる効果がある。 The highly stable measuring method and measuring device of the temperature response signal in the laser periodic heating method according to the present invention are as described above. The output of the infrared detector, which detects infrared radiant energy that fluctuates greatly due to the influence of emissivity, can be handled with a wide dynamic range of 80 dB or more. can be expanded, and therefore, there is an effect that it becomes possible to perform highly practical and stable measurement.
本発明を実施するための形態につき、添付図面に依拠して説明する。本発明に係るレーザー周期加熱法における温度応答信号の高安定測定方法は、強度を周期的に変調させた熱エネルギーを試料に与えた時の、加熱領域における温度応答の振幅又は位相差から、試料の熱物性を測定するレーザー周期加熱法を実施するに当たり、前記温度応答を検出する赤外線ディテクタ出力を、対数変換した後、ローパスフィルタを通してノイズを除去し、更に、直流成分を除去して温度応答による変移信号のみ抽出することにより、前記ディテクタ出力のダイナミックレンジを拡大することを特徴とするものである。 A mode for carrying out the present invention will be described with reference to the accompanying drawings. A highly stable method for measuring a temperature response signal in the periodic laser heating method according to the present invention is a method for measuring the temperature response of a sample from the amplitude or phase difference of the temperature response in the heating region when thermal energy whose intensity is periodically modulated is applied to the sample. In carrying out the laser periodic heating method for measuring the thermophysical properties of, the infrared detector output for detecting the temperature response is logarithmically transformed, then noise is removed through a low-pass filter, and the DC component is removed. It is characterized in that the dynamic range of the detector output is expanded by extracting only the transition signal.
また、本発明に係るレーザー周期加熱法における温度応答信号の高安定測定器は、強度を周期的に変調させた熱エネルギーを試料に与えた時の、加熱領域における温度応答の振幅又は位相差から、試料の熱物性を測定するレーザー周期加熱法の実施に用いる赤外線測定器であって、前記温度応答を検出する赤外線ディテクタ１と、赤外線ディテクタ１の出力を対数変換する対数変換器２と、対数変換した対数変換器出力から直流成分を除去する直流成分除去回路４とから成ることを特徴とする。好ましい実施形態においては、対数変換器２と直流成分除去回路４の間に、センサ出力のノイズを除去するローパスフィルタ３を介在させる（図１参照）。
In addition, the highly stable temperature response signal measuring device in the laser periodic heating method according to the present invention is based on the amplitude or phase difference of the temperature response in the heating region when thermal energy whose intensity is periodically modulated is applied to the sample. , an infrared measuring instrument used for implementing a laser periodic heating method for measuring thermophysical properties of a sample, comprising an infrared detector 1 for detecting the temperature response, a
対数変換を行う対数変換器２は、８０ｄＢ（１０，０００倍）以上のダイナミックレンジであることが望まれる。
The
周期加熱法は、強度を周期的に変調させた熱エネルギー（レーザー光）を試料に与えた時の、加熱領域からある距離だけ離れた位置における温度応答の振幅又は位相差から、試料の熱物性（熱拡散率）を測定する方法である。そして、熱拡散率がα［ｍ２／ｓ]である試料表面を周期加熱し、その温度Ｔ［Ｋ］が周期ｆ［Ｈｚ］、振幅Ｔｍ［Ｋ］で式３のように変化する場合、加熱表面からｘ［ｍ］の位置における温度応答は、式４のように表される（時間ｔ［ｓ］）。
加熱表面からの位置ｘにおける位相差をφ［ｒａｄ］、振幅をＴｘ［Ｋ］とすると、式５により、振幅Ｅｍ又は位相差θの実測値から熱拡散率αが得られる。
放射赤外線は、温度に対して非線形性であることから（式２参照）、放射温度計等は、対数変換器で線形補正して温度指示している。この対数変換器はダイナミックレンジの拡大にも使用でき、高性能な変換器では、１６０ｄＢ（１００，０００，０００倍）ものダイナミックレンジの信号を扱えるものもある。 Since radiant infrared rays are non-linear with respect to temperature (see Equation 2), a radiation thermometer or the like indicates temperature after linear correction with a logarithmic converter. This logarithmic converter can also be used to extend the dynamic range, and some high performance converters can handle signals with dynamic ranges as high as 160 dB (100,000,000 times).
ダイナミックレンジの拡大には非線形補正（対数変換）を行うが、ディテクタ出力信号の最低Ｓ／Ｎ比が１０以上必要であることを考慮して、８０ｄＢ（１０，０００倍）以上の広ダイナミックレンジ対数変換を実施する。このダイナミックレンジの拡大を目的とする対数変換により、放射赤外線の温度に対する非線形性も補正することができる。また、ノイズの多いディテクタ出力を対数変換するとノイズ成分を拡大させてしまうため、対数変換器２の後段に、ノイズ除去を目的としたローパスフィルタ３（低域通過フィルタ）を配置することが好ましい。
Nonlinear correction (logarithmic conversion) is performed to expand the dynamic range, but considering that the minimum S/N ratio of the detector output signal must be 10 or more, a wide dynamic range logarithm of 80 dB (10,000 times) or more Carry out the conversion. The logarithmic transformation for the purpose of expanding the dynamic range can also correct the nonlinearity of the radiated infrared rays with respect to temperature. In addition, since logarithmic conversion of a detector output with a lot of noise enlarges the noise component, it is preferable to place a low-pass filter 3 (low-pass filter) for the purpose of noise removal after the
また、室温や装置温度等の周辺環境温度変化等により、赤外線ディテクタの出力にドリフトが生ずる。このドリフト変動の時間軸は長く、ほぼ直流電位の変動と見做せるので、対数変換後に直流成分除去を行い、温度応答による変移信号のみを抽出することとする。 In addition, drift occurs in the output of the infrared detector due to changes in ambient environmental temperature such as room temperature and device temperature. Since the drift fluctuation has a long time axis and can be regarded as a fluctuation of the DC potential, the DC component is removed after the logarithmic conversion, and only the displacement signal due to the temperature response is extracted.
最も簡単な直流成分除去方法は、信号経路にコンデンサーを入れて直流成分をカットする方法である。但し、この方法の場合は、カットオフ周波数を小さくするために大きな容量のコンデンサーが必要となり、この大きな容量のコンデンサーは回路時定数を大きくするため、直流除去時間（整定時間）が長くなり、１点当たりの測定時間が長くなるという大きな欠点がある。そのため、ここでは、オペアンプで高速補正処理する回路である直流サーボ回路を使用することが推奨される。その場合、出力整定時間が一桁以上速くなる。 The simplest DC component removal method is to cut the DC component by inserting a capacitor in the signal path. However, in the case of this method, a large-capacity capacitor is required to reduce the cutoff frequency, and this large-capacity capacitor increases the circuit time constant, resulting in a longer DC removal time (settling time). A major drawback is the long measurement time per point. Therefore, it is recommended to use a DC servo circuit, which is a circuit for performing high-speed correction processing with an operational amplifier. In that case, the output settling time is shortened by one order of magnitude or more.
本発明に係る方法及び高安定測定器によれば、吸収率の影響で大きく変動するレーザー加熱面から、放射率の影響で大きく変動する赤外線放射エネルギーを検出する赤外線ディテクタ出力を、８０ｄＢ以上の広ダイナミックレンジで扱うことができ、また、周辺環境温度変化によるディテクタドリフトを低減することで、測定許容範囲を大幅に拡大することができるので、実用性の高い安定した測定を行うことが可能となるという効果があり、その産業上の利用可能性は大である。 According to the method and highly stable measuring instrument of the present invention, the output of an infrared detector that detects infrared radiant energy that greatly fluctuates under the influence of emissivity from a laser heating surface that fluctuates greatly under the influence of absorptance can be spread over a range of 80 dB or more. The dynamic range can be handled, and by reducing detector drift due to ambient temperature changes, the allowable measurement range can be greatly expanded, making it possible to perform highly practical and stable measurements. , and its industrial applicability is great.
１ 赤外線ディテクタ
２ 対数変換器
３ ローパスフィルタ
４ 直流成分除去回路
1
Claims (5)
前記温度応答を検出する赤外線ディテクタ出力を、対数変換した後、直流成分の除去処理を行って温度応答による変移信号のみ抽出することにより、前記赤外線ディテクタのダイナミックレンジを拡大することを特徴とするレーザー周期加熱法における温度応答信号の高安定測定方法。 In implementing the laser cyclic heating method for measuring the thermophysical properties of a sample from the amplitude or phase difference of the temperature response in the heating region when thermal energy whose intensity is periodically modulated is applied to the sample,
A laser characterized in that the dynamic range of the infrared detector is expanded by logarithmically transforming the output of the infrared detector that detects the temperature response, then removing the DC component and extracting only the transition signal due to the temperature response. Highly stable measurement method of temperature response signal in cyclic heating method.
前記温度応答を検出する赤外線ディテクタと、前記赤外線ディテクタのセンサ出力を対数変換する対数変換器と、対数変換した対数変換器出力から直流成分を除去する直流成分除去回路とから成ることを特徴とするレーザー周期加熱法における温度応答信号の高安定測定器。 High-stable measurement of infrared light used for laser cyclic heating, which measures the thermophysical properties of a sample from the amplitude or phase difference of the temperature response in the heated region when thermal energy whose intensity is periodically modulated is applied to the sample. a vessel,
It comprises an infrared detector for detecting the temperature response, a logarithmic converter for logarithmically converting the sensor output of the infrared detector, and a DC component removal circuit for removing a DC component from the output of the logarithmically converted logarithmic converter. A highly stable measuring instrument for temperature response signals in the laser periodic heating method.
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| JPS54156599A (en) * | 1978-05-30 | 1979-12-10 | Mitsubishi Electric Corp | Thermal diffusivity measuring apparatus |
| JPS58132636A (en) * | 1982-02-03 | 1983-08-08 | Chino Works Ltd | Compensating circuit for temperature of radiation thermometer |
| JPS63180829A (en) * | 1987-01-21 | 1988-07-25 | Jeol Ltd | Linearizer for infrared temperature detector |
| JPH07325054A (en) * | 1994-05-31 | 1995-12-12 | Shimadzu Corp | Moisture measuring device |
| JP2011185852A (en) * | 2010-03-10 | 2011-09-22 | National Institute Of Advanced Industrial Science & Technology | Device for measurement of thermal diffusivity |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54156599A (en) * | 1978-05-30 | 1979-12-10 | Mitsubishi Electric Corp | Thermal diffusivity measuring apparatus |
| JPS58132636A (en) * | 1982-02-03 | 1983-08-08 | Chino Works Ltd | Compensating circuit for temperature of radiation thermometer |
| JPS63180829A (en) * | 1987-01-21 | 1988-07-25 | Jeol Ltd | Linearizer for infrared temperature detector |
| JPH07325054A (en) * | 1994-05-31 | 1995-12-12 | Shimadzu Corp | Moisture measuring device |
| JP2011185852A (en) * | 2010-03-10 | 2011-09-22 | National Institute Of Advanced Industrial Science & Technology | Device for measurement of thermal diffusivity |
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