JP2023003084A - Workpiece transfer hand - Google Patents

Abstract

To provide a workpiece transfer hand capable of sucking and holding a workpiece without a pump for vacuum adsorption or piping inside a robot.SOLUTION: A workpiece transfer hand A1 according to the present invention includes a support 1 that supports a workpiece W, and a plurality of adsorption mechanisms 2 arranged on the support 1. The adsorption mechanism 2 includes an elevating body 20 that can move up and down between a first position and a second position above the first position. The elevating body 20 includes an elastically deformable adsorption pad 22 that spreads upward, and has a first opening O1 at its upper end. When the elevating body 20 is at the first position, the first opening O1 can be sealed by the workpiece W, and a pad internal space S1 inside the adsorption pad 22 and a second opening O2 positioned outside the elevating body 20 can be blocked, and when the elevating body 20 is at the second position, the pad internal space S1 communicates with the second opening O2.SELECTED DRAWING: Figure 3

Description

TECHNICAL FIELD The present invention relates to a work transfer hand used to transfer a thin plate-like work such as a substrate.

Transfer devices for thin-plate workpieces, such as glass substrates used in the manufacture of liquid crystal displays and semiconductor wafers used in the manufacture of semiconductors, are equipped with a hand equipped with a vacuum suction function that utilizes negative pressure, for example, as an end effector of a robot. configured (see Patent Literature 1, for example). As shown in this document, a hand having a vacuum suction function is provided with a plurality of suction pads facing the upper surface of the hand and capable of selecting a state in which negative pressure is applied or not applied. A plate-shaped workpiece placed on the hand is tightly held by the suction pad due to the negative pressure applied to the suction pad by driving the pump. In this state, the work can be conveyed at high speed without slipping off the hand.

However, when using the conventional hand having the vacuum suction function, a separate pump for vacuum suction is required. In addition, it is necessary to arrange an air pipe for vacuum suction by a pump, a valve for switching the operating state of the negative pressure, and the like in the limited space of the robot. Therefore, the configuration for vacuum suction provided in the robot becomes complicated.

JP 2008-132541 A

The present invention has been devised under such circumstances, and provides a work transfer hand capable of sucking and holding a work without a vacuum suction pump or internal piping of a robot. The main task is to

In order to solve the above problems, the present invention employs the following technical means.

A work conveying hand provided by the present invention includes a support for supporting a work, and a plurality of suction mechanisms arranged on the support. and a lifting body capable of moving up and down at a second position above the lifting body, the lifting body expanding upward, having a first opening at an upper end, and including an elastically deformable adsorption pad; When the body is at the first position, the first opening can be sealed by the work, and the space inside the suction pad can be blocked from the second opening located outside the lifting body. and when the elevating body is at the second position, the space in the pad communicates with the second opening.

In a preferred embodiment, the suction mechanism includes a seal portion that communicates with both the inner space of the pad and the second opening, and when the lifting body is at the first position, the inner space of the pad and the second opening are in contact with each other. The opening is blocked by the seal portion.

In a preferred embodiment, the lifting body includes a pad fixing portion positioned below the suction pad and to which the suction pad is fixed, and the suction mechanism guides the pad fixing portion so as to be vertically movable. The pad fixing portion is provided with a communication hole communicating with both the pad inner space and the seal portion.

In a preferred embodiment, the pad fixing portion includes a first bottom surface facing downward and a first outer peripheral surface located above the first bottom surface and surrounding at least a portion of the first bottom surface in plan view. and the guide portion has a second bottom surface facing the first bottom surface, and a first inner periphery located above the second bottom surface and surrounding at least a portion of the first outer peripheral surface. and a surface, wherein the seal portion is interposed between the first bottom surface and the second bottom surface.

In a preferred embodiment, the support has a top surface of the support and a recess recessed from the top surface of the support, and the pad fixing portion is arranged in the recess.

In a preferred embodiment, the suction pad is made of a soft resin material or a rubber material, and each of the pad fixing portion and the guide portion is made of a material harder than the suction pad.

In a preferred embodiment, the pad fixing portion is made of a metal material.

According to the work conveying hand according to the present invention, when the work is placed on the support, the space inside the suction pad becomes a negative pressure state, and the work can be sucked and held by the suction pad. On the other hand, when a work is placed on a stage or the like, the space inside the pad communicates with the second opening located outside the elevator, and the suction force of the work by the suction pad disappears. Therefore, according to the work conveying hand of the present invention, the work can be sucked and held and conveyed without using a vacuum sucking pump, pipes associated therewith, or the like.

Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the accompanying drawings.

1 is a plan view showing a first embodiment of a work conveying hand according to the present invention; FIG. 2 is an enlarged cross-sectional view taken along line II-II of FIG. 1; FIG. FIG. 3 is a cross-sectional view similar to FIG. 2 showing a state in which a workpiece is suction-held by a suction mechanism; FIG. 3 is a cross-sectional view similar to FIG. 2 for explaining the operation; FIG. 3 is a cross-sectional view similar to FIG. 2 for explaining the operation; FIG. 3 is a cross-sectional view, similar to FIG. 2, showing a second embodiment of a work conveying hand according to the present invention; FIG. 7 is a cross-sectional view similar to FIG. 6 showing a state in which the workpiece is held by suction by the suction mechanism; FIG. 7 is a cross-sectional view similar to FIG. 6 for explaining the operation;

Preferred embodiments of the present invention will be specifically described below with reference to the drawings.

1 and 2 show a first embodiment of a work transfer hand according to the present invention. A work conveying hand A<b>1 of this embodiment includes a support 1 and a plurality of suction mechanisms 2 .

In this embodiment, the support 1 is a plate on which a workpiece is placed, and extends horizontally integrally from a base member connected to an arm end of a transfer robot (not shown). The support 1 has a base 11 and a pair of forks 12 . The base 11 is fixed to the base member of the transfer robot. The pair of fork portions 12 are each connected to the base portion 11 and extend bifurcated from the base portion 11 in plan view. Although the material of the support 1 is not particularly limited, it is composed of, for example, a high-rigidity lightweight material such as an aluminum alloy, a ceramic material, or a carbon fiber reinforced plastic.

A plurality of adsorption mechanisms 2 are arranged separately from each other on the support 1 (pair of fork portions 12). In this embodiment, four adsorption mechanisms 2 are provided, two adsorption mechanisms 2 are separately arranged on the base end side of the pair of fork portions 12, and the other two adsorption mechanisms 2 are arranged on the pair of fork portions 12 are arranged separately on the tip side of the Note that the number and arrangement of the adsorption mechanisms 2 are not limited to those of the present embodiment, and various configurations are possible.

A specific configuration of the adsorption mechanism 2 will be described with reference to FIG. In this embodiment, the adsorption mechanism 2 is configured to include an elevating body 20 , a guide body 30 and a seal portion 40 . The elevating body 20 is supported by the fork portion 12 (supporting body 1) and is vertically movable.

Lifting body 20 includes pad fixing portion 21 and suction pad 22 . In this embodiment, the pad fixing portion 21 has a substantially disk shape and has a bottom surface 211 , an outer peripheral surface 212 , an outward flange 213 , a pad recess 214 , a seal recess 215 and a communication hole 216 .

The bottom surface 211 is the lower end surface of the pad fixing portion 21 and faces downward. The outer peripheral surface 212 is located above the bottom surface 211 and surrounds at least a portion of the bottom surface 211 in plan view. The outward flange 213 extends radially outward from the lower end portion of the pad fixing portion 21 (outer peripheral surface 212). In this embodiment, the outward flange 213 has an annular shape surrounding the outer peripheral surface 212 in plan view. The pad concave portion 214 is recessed downward from the upper surface of the pad fixing portion 21 and is a portion for arranging the suction pad 22 . The seal portion concave portion 215 is an annular groove recessed from the bottom surface 211 of the pad fixing portion 21 and is a portion for arranging the seal portion 40 . The communication hole 216 is a through hole vertically extending from the upper surface of the pad fixing portion 21 (the bottom surface of the pad recess 214 ) to the bottom surface 211 , and is formed at the center position of the pad fixing portion 21 .

In this embodiment, the suction pad 22 is supported by the pad fixing portion 21 and has a base portion 221 and a pad portion 222 . The suction pad 22 is made of soft resin material or rubber material. The base portion 221 has a substantially disk shape and is housed in the pad recess 214 . The base portion 221 is fixed to the pad fixing portion 21 by an appropriate means such as adhesion.

The pad portion 222 is connected to the upper end of the outer peripheral portion of the base portion 221 . The pad portion 222 surrounds the base portion 221 in plan view. The pad portion 222 is a cylindrical portion that expands upward and has an open top end. Pad portion 222 has a first opening O1 at its upper end. The pad portion 222 has a relatively small thickness and is easily elastically deformable.

A hole 221 a is formed at the center position of the base portion 221 . The hole 221a is a through hole that extends vertically from the upper surface to the lower surface of the base portion 221 . The upper end of the hole 221 a communicates with the inner space surrounded by the pad portion 222 . In the present embodiment, the inner space surrounded by the pad portion 222 and the inner space of the hole 221a form the inner space of the suction pad 22 (pad inner space S1). A lower end of the hole 221 a communicates with the communication hole 216 of the pad fixing portion 21 .

Although the material of the suction pad 22 is not particularly limited, it is composed of, for example, silicone rubber or fluororubber. The pad fixing portion 21 is made of a material (for example, a hard resin material) harder than the suction pad 22 (pad portion 222). Although the material of the pad fixing portion 21 is not particularly limited, it is made of, for example, polyacetal resin which is excellent in slidability and abrasion resistance.

Fork portion 12 (support body 1) is formed with, for example, circular recess 13 . The recess 13 is recessed downward from the upper surface 12 a of the fork portion 12 . In this embodiment, the pad fixing portion 21 is arranged in the concave portion 13 . In this embodiment, the recess 13 has a recess bottom surface 131 and a recess inner peripheral surface 132 . The bottom surface 131 of the recess faces upward and faces the bottom surface 211 of the pad fixing portion 21 . The recess inner peripheral surface 132 is connected to the outer periphery of the recess bottom surface 131 and positioned above the recess bottom surface 131 .

In this embodiment, the guide body 30 has an annular shape and has a cylindrical portion 31 . The guide body 30 has, for example, an outward flange extending radially outward from the upper end of the cylindrical portion 31 . 1) is fixed. The cylindrical portion 31 is inserted into the recess inner peripheral surface 132 of the recess 13 . The vertical dimension of the cylindrical portion 31 within the recess 13 is smaller than the vertical dimension of the recess 13 . A guide surface 311 is formed on the inner periphery of the cylindrical portion 31 . The guide surface 311 surrounds part of the outer peripheral surface 212 of the pad fixing portion 21 . The inner diameter dimension of the guide surface 311 is slightly larger than the outer diameter dimension of the outer peripheral surface 212 of the pad fixing portion 21 . As a result, the lifting body 20 (pad fixing portion 21) can move up and down while being guided by the guide body 30 (the guide surface 311 of the cylindrical portion 31). A slight gap is formed between the guide surface 311 (guide body 30) and the outer peripheral surface 212 (pad fixing portion 21). In this embodiment, the gap between the guide surface 311 and the outer peripheral surface 212 corresponds to the second opening O<b>2 located outside the elevator 20 . 2, the cylindrical portion 31 overlaps the outward flange 213 of the pad fixing portion 21 in plan view. As a result, the upper end of the vertical motion stroke of the lifting body 20 (pad fixing portion 21 ) is defined by the contact of the outward flange 213 of the pad fixing portion 21 with the lower surface of the cylindrical portion 31 .

Guide body 30 is made of a material (for example, a hard resin material) that is harder than suction pad 22 (pad portion 222), for example. Although the material of the guide body 30 is not particularly limited, it is made of, for example, polyacetal resin, which is excellent in slidability and abrasion resistance.

In this embodiment, the seal portion 40 is arranged in the seal portion concave portion 215 of the pad fixing portion 21 . The seal portion 40 has an annular shape in plan view, and has a block portion 41 and an extension piece 42 . A large part of the block part 41 is accommodated in the seal part concave part 215 . The extending piece 42 extends from the lower end of the block portion 41 and has a thin lip shape. In the illustrated example, a pair of extending pieces 42 extends from both the lower end inner peripheral portion and the lower end outer peripheral portion of the block portion 41 . The seal portion 40 is made of a soft resin material or a rubber material.

In this embodiment, the seal portion 40 is interposed between the bottom surface 211 of the pad fixing portion 21 and the recess bottom surface 131 of the recess 13 . As shown in FIG. 2 , the seal portion 40 communicates with both the pad internal space S<b>1 inside the suction pad 22 and the second opening O<b>2 positioned outside the lifting body 20 . When the lifting body 20 (pad fixing portion 21) is at the lower end position of the vertical movement stroke, the seal portion 40 is in close contact with the recess bottom surface 131 of the recess 13 to block the space between the bottom surface 211 and the recess bottom surface 131. As a result, the lower end of the vertical movement stroke of the lifting body 20 (pad fixing portion 21 ) is defined by the recess bottom surface 131 . Further, in a state in which the sealing portion 40 is in close contact with the recess bottom surface 131 of the recess 13 to block the gap between the bottom surface 211 and the recess bottom surface 131, the pad internal space S1 inside the suction pad 22, the guide body 30 and the pad fixing portion 21 The gap (second opening O2) between is blocked.

In this embodiment, the bottom surface 211 of the pad fixing part 21 corresponds to the "first bottom surface" of the invention, and the outer peripheral surface 212 of the pad fixing part 21 corresponds to the "first outer peripheral surface" of the invention. The recessed bottom surface 131 of the recessed portion 13 corresponds to an example of the "second bottom surface" of the present invention, and the guide surface 311 of the guide body 30 corresponds to an example of the "first inner peripheral surface" of the present invention.

Next, the operation of this embodiment will be described.

When a thin plate-shaped work is transported by the work transporting hand A1, the support 1 supports the work. Here, as shown in FIG. 3, the work W is placed on the pad portion 222 (suction pad 22) of the suction mechanism 2, and the elevating body 20 (pad fixing portion 21) is moved to the lowest position by the own weight of the work W. It is in. The pad portion 222 expands substantially horizontally, and the pad internal space S1 inside the suction pad 22 is greatly reduced, and the first opening O1 of the pad portion 222 is sealed by the work W. As shown in FIG.

Also, the seal portion 40 arranged at the lower end of the pad fixing portion 21 is in close contact with the bottom surface 131 of the recess to close the space between the bottom surface 211 and the bottom surface 131 of the recess. At this time, the pad internal space S1 inside the suction pad 22 and the gap (second opening O2) between the guide body 30 and the pad fixing portion 21 are blocked by the seal portion 40 . A communication hole 216 formed in the pad fixing portion 21 communicates with the pad internal space S1 and also communicates with the space between the bottom surface 211 and the bottom surface 131 of the recess. As a result, a closed space is formed by the space S1 in the pad, the space surrounded by the communication hole 216, the bottom surface 211, the bottom surface 131 of the recess, and the seal portion 40, and the pressure in the closed space is reduced to less than atmospheric pressure. state (negative pressure state). Therefore, in the state shown in FIG. 3, the work W is suction-held by the pad portion 222 (suction mechanism 2), and can be horizontally moved and conveyed. As shown in FIG. 3, the position at which the lifting body 20 (pad fixing portion 21) is lowest corresponds to the "first position" of the present invention.

Next, for example, when placing the work W on a destination stage (not shown), the work W is transferred to the stage (not shown) while the support 1 (fork portion 12) is lowered as shown in FIG. Here, even when the support body 1 starts to be lowered, the state in which the pad portion 222 is attracted to the workpiece W continues. Therefore, the elevating body 20 (pad fixing portion 21) is positioned relatively higher than the support 1 compared to the case shown in FIG. Then, the seal portion 40 is separated from the bottom surface 131 of the concave portion, and the space S1 inside the suction pad 22 and the gap (second opening O2) between the guide body 30 and the pad fixing portion 21 are communicated.

In a state where the pad internal space S1 communicates with the gap (second opening O2) between the guide body 30 and the pad fixing portion 21, air flows from the second opening O2 and flows into the communication hole 216 and the pad internal space S1. and flow in. Then, as shown in FIG. 5, the pad internal space S1 returns to the atmospheric pressure state, and the suction force of the workpiece W is lost with respect to the pad portion 222 (suction pad 22). In the state shown in FIG. 5, the pad internal space S1 and the second opening O2 communicate with each other, and the lifter 20 (pad fixing portion 21) is positioned relative to the support 1 more than in the case shown in FIG. It is located relatively upward. In the state shown in FIGS. 4 and 5, the lifting body 20 (pad fixing portion 21) is at the "second position" of the present invention. After that, the pad portion 222 separates from the work W, and the elevating body 20 (pad fixing portion 21) drops into the concave portion 13 of the support 1 by its own weight, returning to the state shown in FIG.

The work conveying hand A<b>1 includes a support 1 and a plurality of suction mechanisms 2 arranged on the support 1 . The adsorption mechanism 2 includes an elevating body 20 that can move up and down between a first position and a second position above the first position. Elevator 20 includes suction pad 22 . The suction pad 22 (pad portion 222) spreads upward, has a first opening O1 at its upper end, and is elastically deformable. When the elevator 20 is at the first position, the first opening O1 is sealed by the workpiece W, and the pad internal space S1 inside the suction pad 22 and the second opening O2 located outside the elevator 20 are separated. blocked. On the other hand, when the elevating body 20 is at the second position, the intra-pad space S1 communicates with the second opening O2.

According to such a configuration, when the workpiece W is placed on the support 1, the pad internal space S1 inside the suction pad 22 is brought into a negative pressure state, and the workpiece W is held by the pad portion 222 (suction pad 22, suction mechanism 2). Adsorption can be grasped. On the other hand, when the workpiece W is placed on a stage or the like, the space S1 in the pad communicates with the second opening O2, and the suction force of the workpiece W by the pad portion 222 (the suction pad 22 and the suction mechanism 2) disappears. Therefore, according to the work conveying hand A1 of the present embodiment, the work W can be sucked and held and conveyed without using a pump for vacuum sucking and piping associated therewith.

The adsorption mechanism 2 includes a seal portion 40 . The seal portion 40 communicates with both the pad internal space S1 and the second opening O2. When the elevating body 20 is at the first position, the pad internal space S1 and the second opening O2 are blocked by the seal portion 40 . According to the configuration including such a seal portion 40, the space S1 in the pad and the second opening O2 can be properly blocked when the elevating body 20 is at the first position. Therefore, the negative pressure state of the pad internal space S1 is appropriately maintained, and as a result, the workpiece W can be sucked and gripped by the suction pad 22 more reliably.

The lifting body 20 includes a pad fixing portion 21 positioned below the suction pad 22, and the suction pad 22 is fixed to the pad fixing portion 21. As shown in FIG. The adsorption mechanism 2 includes a recessed bottom surface 131 and a guide surface 311 (guide portion) for guiding the pad fixing portion 21 so as to be vertically movable. A communication hole 216 is formed in the pad fixing portion 21 , and the communication hole 216 communicates with both the pad internal space S<b>1 and the seal portion 40 . With such a configuration, the lifting body 20 can be moved up and down appropriately, and the movement of the lifting body 20 is stabilized.

The pad fixing portion 21 includes a bottom surface 211 (first bottom surface) facing downward and an outer peripheral surface 212 (first bottom surface) positioned above the bottom surface 211 and surrounding at least a portion of the bottom surface 211 (first bottom surface) in plan view. outer peripheral surface). In the present embodiment, as guide portions, a recess bottom surface 131 (second bottom surface) facing the bottom surface 211 and a guide surface 311 (first inner peripheral surface) and The seal portion 40 is interposed between the bottom surface 211 and the bottom surface 131 of the recess. According to such a configuration, the vertical movement of the elevator 20 is stabilized, and when the elevator 20 starts to move upward relative to the support 1 from the first position, the inside of the pad The space S1 and the second opening O2 are rapidly communicated with each other. Therefore, it is possible to prevent the adsorption of the work W by the adsorption pad 22 from continuing unduly.

The fork portion 12 (support body 1) has a recessed portion 13 recessed from the upper surface 12a. Pad fixing portion 21 is arranged in recess 13 . According to such a configuration, it is possible to suppress the overall vertical dimension of the support 1 and the adsorption mechanism 2 arranged on the support 1 .

FIG. 6 shows a second embodiment of a work transfer hand according to the present invention. In the drawings after FIG. 6, elements identical or similar to those of the work conveying hand A1 of the above embodiment are given the same reference numerals as those of the above embodiment, and description thereof will be omitted as appropriate.

The work conveying hand A2 shown in FIG. 6 does not include the guide body 30 as compared with the work conveying hand A1 of the above-described embodiment, which is a major difference from the work conveying hand A1. Moreover, the pad fixing portion 21 does not have the outward flange 213 , and the outer peripheral surface 212 is connected to the outer peripheral edge of the bottom surface 211 . The pad fixing portion 21 is arranged in the concave portion 13 as in the above embodiment. A recess inner peripheral surface 132 of the recess 13 surrounds the outer peripheral surface 212 of the pad fixing portion 21 . The inner diameter of the recess inner peripheral surface 132 is slightly larger than the outer diameter of the outer peripheral surface 212 of the pad fixing portion 21 . As a result, the elevating body 20 (pad fixing portion 21) can move up and down while being guided by the inner peripheral surface 132 of the recess. A slight gap is formed between the recessed portion inner peripheral surface 132 (recessed portion 13) and the outer peripheral surface 212 (pad fixing portion 21). In the present embodiment, the gap between the recess inner peripheral surface 132 and the outer peripheral surface 212 corresponds to the second opening O<b>2 located outside the elevator 20 .

When the lifting body 20 (pad fixing portion 21) is at the lower end position of the vertical movement stroke, the seal portion 40 is in close contact with the recess bottom surface 131 of the recess 13 to block the space between the bottom surface 211 and the recess bottom surface 131. As a result, the lower end of the vertical movement stroke of the lifting body 20 (pad fixing portion 21 ) is defined by the recess bottom surface 131 . In a state in which the sealing portion 40 is in close contact with the recess bottom surface 131 of the recess 13 to block the space between the bottom surface 211 and the recess bottom surface 131, the space S1 inside the suction pad 22 and the space S1 between the recess 13 and the pad fixing portion 21 are separated. The gap (second opening O2) is blocked.

In this embodiment, the pad fixing portion 21 is made of, for example, a metal material. The pad fixing portion 21 made of a metal material is heavier than the pad fixing portion 21 made of a resin material.

In this embodiment, the bottom surface 211 of the pad fixing part 21 corresponds to the "first bottom surface" of the invention, and the outer peripheral surface 212 of the pad fixing part 21 corresponds to the "first outer peripheral surface" of the invention. The recessed portion bottom surface 131 of the recessed portion 13 corresponds to an example of the "second bottom surface" of the present invention, and the recessed portion inner peripheral surface 132 of the recessed portion 13 corresponds to an example of the "first inner peripheral surface" of the present invention.

Next, the operation of this embodiment will be described.

When conveying a thin plate-like work by the work conveying hand A2, the support 1 supports the work. Here, as shown in FIG. 7, the work W is placed on the pad portion 222 (suction pad 22) of the suction mechanism 2, and the elevating body 20 (pad fixing portion 21) is moved to the lowest position by the own weight of the work W. It is in. The pad portion 222 expands substantially horizontally, and the pad internal space S1 inside the suction pad 22 is greatly reduced, and the first opening O1 of the pad portion 222 is sealed by the work W. As shown in FIG.

Also, the seal portion 40 arranged at the lower end of the pad fixing portion 21 is in close contact with the bottom surface 131 of the recess to close the space between the bottom surface 211 and the bottom surface 131 of the recess. At this time, the pad internal space S<b>1 inside the suction pad 22 and the gap (second opening O<b>2 ) between the concave portion 13 and the pad fixing portion 21 are blocked by the seal portion 40 . A communication hole 216 formed in the pad fixing portion 21 communicates with the pad internal space S1 and also communicates with the space between the bottom surface 211 and the bottom surface 131 of the recess. As a result, a closed space is formed by the space S1 in the pad, the space surrounded by the communication hole 216, the bottom surface 211, the bottom surface 131 of the recess, and the seal portion 40, and the pressure in the closed space is reduced to less than atmospheric pressure. state (negative pressure state). Therefore, in the state shown in FIG. 7, the work W is suction-held by the pad portion 222 (suction mechanism 2), and can be horizontally moved and conveyed. As shown in FIG. 7, the position at which the lifting body 20 (pad fixing portion 21) is lowest corresponds to the "first position" of the present invention.

For example, when placing the work W on a stage (not shown) to which it is transferred, the work W is transferred to the stage (not shown) while the support 1 (fork portion 12) is lowered. Here, even when the support body 1 starts to be lowered, the state in which the pad portion 222 is attracted to the workpiece W continues. Therefore, the elevating body 20 (pad fixing portion 21) is positioned relatively higher than the support 1 compared to the case shown in FIG. Then, the sealing portion 40 is separated from the bottom surface 131 of the recess, and the space S1 inside the suction pad 22 communicates with the gap (second opening O2) between the recess 13 and the pad fixing portion 21 .

In a state in which the pad internal space S1 communicates with the gap (second opening O2) between the recess 13 and the pad fixing portion 21, air flows from the second opening O2 and flows into the communication hole 216 and the pad internal space S1. flow in. Then, as shown in FIG. 8, the pad internal space S1 returns to the atmospheric pressure state, and the suction force of the workpiece W is lost with respect to the pad portion 222 (suction pad 22). In the state shown in FIG. 8, the pad inner space S1 and the second opening O2 communicate with each other, and the lifter 20 (pad fixing portion 21) is positioned relative to the support 1 more than in the case shown in FIG. It is located relatively upward. In the state shown in FIG. 8, the lifting body 20 (pad fixing portion 21) is in the "second position" of the present invention. After that, the pad portion 222 separates from the work W, and the elevating body 20 (pad fixing portion 21) drops into the concave portion 13 of the support 1 by its own weight, returning to the state shown in FIG.

The work conveying hand A<b>2 includes a support 1 and a plurality of suction mechanisms 2 arranged on the support 1 . The adsorption mechanism 2 includes an elevating body 20 that can move up and down between a first position and a second position above the first position. Elevator 20 includes suction pad 22 . The suction pad 22 (pad portion 222) spreads upward, has a first opening O1 at its upper end, and is elastically deformable. When the elevator 20 is at the first position, the first opening O1 is sealed by the workpiece W, and the pad internal space S1 inside the suction pad 22 and the second opening O2 located outside the elevator 20 are separated. blocked. On the other hand, when the elevating body 20 is at the second position, the intra-pad space S1 communicates with the second opening O2.

According to such a configuration, when the workpiece W is placed on the support 1, the pad internal space S1 inside the suction pad 22 is brought into a negative pressure state, and the workpiece W is held by the pad portion 222 (suction pad 22, suction mechanism 2). Adsorption can be grasped. On the other hand, when the workpiece W is placed on a stage or the like, the space S1 in the pad communicates with the second opening O2, and the suction force of the workpiece W by the pad portion 222 (the suction pad 22 and the suction mechanism 2) disappears. Therefore, according to the work conveying hand A2 of the present embodiment, the work W can be sucked and held and conveyed without using a pump for vacuum suction, pipes associated therewith, or the like.

When the lifting body 20 moves upward relative to the support body 1 from a state in which the suction mechanism 2 suction-holds the workpiece W and the lifting body 20 is at the first position, the pad inner space S1 and the second opening O2 are opened. communicates with. In this embodiment, the pad fixing portion 21 is made of a metal material and has a relatively large weight. According to such a configuration, the suction pad 22 quickly separates from the workpiece W due to the weight of the pad fixing portion 21 after the pad internal space S1 and the second opening O2 are communicated with each other. Therefore, an improvement in the efficiency of conveying the work W can be expected. In addition, within the range of the configuration similar to that of the work conveying hand A1 of the above embodiment, the same effects as those of the above embodiment are obtained.

Although the embodiments of the present invention have been described above, the scope of the present invention is not limited to the above-described embodiments. subsumed in

In the above embodiment, the sealing portion 40 is arranged on the bottom surface 211 side of the pad fixing portion 21 , but the sealing portion 40 may be arranged on the concave bottom surface 131 side of the concave portion 13 . In addition, in the above-described embodiment, the configuration in which the seal portion 40 has the lip-shaped extending piece 42 was exemplified, but the specific configuration of the seal portion can be changed in various ways. For example, the seal portion may be configured by an O-ring or a plate-like seal member. When the seal portion is arranged on the recess bottom surface 131 side, the seal portion does not have to be annular. In the above embodiment, the case where the seal portion 40 is interposed between the bottom surface 211 of the pad fixing portion 21 and the recess bottom surface 131 of the recess portion 13 has been described. and the recessed portion inner peripheral surface 132 of the recessed portion 13 .

A1, A2: hand for conveying work, 1: support, 12a: upper surface (upper surface of support), 13: recessed portion, 131: bottom surface of recessed portion (second bottom surface), 132: inner peripheral surface of recessed portion (first inner peripheral surface) , 2: suction mechanism, 21: pad fixing portion, 211: bottom surface (second bottom surface), 212: outer peripheral surface (first outer peripheral surface), 216: communication hole, 22: suction pad, 30: guide body, 311: guide Surface (first inner peripheral surface), 40: seal portion, O1: first opening, O2: second opening, S1: pad inner space, W: work

Claims (5)

a support that supports the workpiece;
a plurality of adsorption mechanisms arranged on the support,
The adsorption mechanism includes an elevating body capable of moving up and down between a first position and a second position above the first position,
The elevating body includes an elastically deformable adsorption pad that expands upward and has a first opening at the upper end,
When the lifting body is at the first position, the first opening can be sealed by the work, and the space inside the suction pad and the second opening located outside the lifting body are separated from each other. is interruptible and
A hand for carrying a workpiece, wherein the inner space of the pad communicates with the second opening when the elevating body is at the second position. The adsorption mechanism includes a seal portion that communicates with both the pad internal space and the second opening,
2. The hand for conveying a work according to claim 1, wherein said space in said pad and said second opening are blocked by said seal portion when said lifting body is at said first position. The lifting body includes a pad fixing portion positioned below the suction pad and to which the suction pad is fixed,
The suction mechanism includes a guide portion that guides the pad fixing portion so as to be vertically movable,
3. The work conveying hand according to claim 2, wherein the pad fixing portion is formed with a communication hole communicating with both the inner space of the pad and the seal portion. The pad fixing portion has a first bottom surface facing downward, and a first outer peripheral surface located above the first bottom surface and surrounding at least a portion of the first bottom surface in a plan view,
The guide portion has a second bottom surface facing the first bottom surface, and a first inner peripheral surface positioned above the second bottom surface and surrounding at least a portion of the first outer peripheral surface. ,
4. The work conveying hand according to claim 3, wherein said seal portion is interposed between said first bottom surface and said second bottom surface. the support has a top surface of the support and a recess recessed from the top surface of the support;
5. The work conveying hand according to claim 3, wherein said pad fixing portion is arranged in said recess.

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