JP2022547412A - レーザ加工装置 - Google Patents
レーザ加工装置 Download PDFInfo
- Publication number
- JP2022547412A JP2022547412A JP2022512740A JP2022512740A JP2022547412A JP 2022547412 A JP2022547412 A JP 2022547412A JP 2022512740 A JP2022512740 A JP 2022512740A JP 2022512740 A JP2022512740 A JP 2022512740A JP 2022547412 A JP2022547412 A JP 2022547412A
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- JP
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- Prior art keywords
- lens
- rotating
- laser beam
- opto
- grating
- Prior art date
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- 230000003287 optical effect Effects 0.000 claims abstract description 26
- 239000013307 optical fiber Substances 0.000 claims abstract description 11
- 230000000977 initiatory effect Effects 0.000 claims description 2
- 238000003754 machining Methods 0.000 abstract description 3
- 238000003672 processing method Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 11
- 238000005553 drilling Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/388—Trepanning, i.e. boring by moving the beam spot about an axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0734—Shaping the laser spot into an annular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
Abstract
Description
回転装置を備えたヘッド本体を有する光学機械システムと、
ピコ秒又はフェムト秒のパルスレーザ光源と、
少なくとも1本の光ファイバを備えている。
d1 第2レンズL2の移動距離
D1 第2レンズと第3レンズの間の距離
FL レーザビーム
L1 第1レンズ
L2 第2レンズ
L3 (最後の)第3レンズ
P 加工対象
R1 回転式回折格子
S 加工対象の支持部
x、y、z 配向の軸
1 光学式トレパニングヘッド
2 光学機械システム
21 ヘッド本体
22 主軸
26 ヘッド本体端部
3 レーザ光源
4 光ファイバ
41 光接続
Claims (10)
- 光学式トレパニングヘッド(1)を備えた加工装置であって、
先端部(26)を有するヘッド本体(21)と、回転装置(22)とを備える光学機械システム(2)と、
ピコ秒又はフェムト秒のパルスレーザ光源(3)と、
少なくとも1本の光ファイバ(4)と、
第1レンズ(L1)と、
第2レンズ(L2)と、を備える前記加工装置において、
光学機械システム(2)の回転装置(22)が、回転する回折格子(R1)を備えていることを特徴とする、前記加工装置。 - 回転回折格子(R1)が円形形状を有することを特徴とする、請求項1に記載の装置。
- 回転回折格子(R1)が1mm未満の厚さを持つことを特徴とする、請求項1又は2に記載の装置。
- 回転回折格子(R1)が位相格子のタイプであることを特徴とする、請求項1から3のいずれか一項に記載の装置。
- 回転装置(22)が、回転速度が1分当たり180000回転超である主軸であることを特徴とする、請求項1から4のいずれか一項に記載の装置。
- 第1レンズ(L1)が、レーザ光源(3)と回転装置(22)との間に配置されていて、第1レンズ(L1)の焦点が可変であることを特徴とする、請求項1から5のいずれか一項に記載の装置。
- 第2レンズ(L2)が回転装置(22)の下流に配置されていて、光学機械システム(2)の長手方向軸線に沿って移動可能であることを特徴とする、請求項1から6のいずれか一項に記載の装置。
- 第2レンズ(L2)が円錐状であることを特徴とする、請求項7に記載の装置。
- 前記光学機械システムが、ヘッド本体(26)の端部に配置されていて固定された焦点を持つ最後のレンズ(L3)を備えることを特徴とする、請求項1から8のいずれか一項に記載の装置。
- ピコ秒又はフェムト秒のパルスレーザ光(FL)を被加工物(P)の上面に集光するステップと、
前記ピコ秒又はフェムト秒のパルスレーザ光の前記被加工物(P)の上面への入射角を制御するステップと、
加工される加工対象(P)の前記上面上でレーザビームFLの歳差運動を開始し、レーザビーム(FL)が円軌道を描くようにするステップと
を備える、光学的トレパニングによる方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH01087/19A CH716546A1 (fr) | 2019-08-29 | 2019-08-29 | Dispositif d'usinage laser et procédé de trépanation optique. |
CH01087/19 | 2019-08-29 | ||
PCT/IB2020/057953 WO2021038453A1 (fr) | 2019-08-29 | 2020-08-26 | Dispositif d'usinage laser |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022547412A true JP2022547412A (ja) | 2022-11-14 |
JP7452901B2 JP7452901B2 (ja) | 2024-03-19 |
Family
ID=68807950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022512740A Active JP7452901B2 (ja) | 2019-08-29 | 2020-08-26 | レーザ加工装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220305590A1 (ja) |
EP (1) | EP4021677A1 (ja) |
JP (1) | JP7452901B2 (ja) |
CH (1) | CH716546A1 (ja) |
WO (1) | WO2021038453A1 (ja) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19736110A1 (de) * | 1997-08-21 | 1999-03-11 | Hannover Laser Zentrum | Verfahren und Vorrichtung zur grat- und schmelzfreien Mikrobearbeitung von Werkstücken |
JP2002248591A (ja) * | 2001-02-22 | 2002-09-03 | Toyota Motor Corp | レーザ加工方法およびレーザ加工装置 |
JP2003117675A (ja) * | 2001-06-19 | 2003-04-23 | Nanovia Lp | レーザビーム送出システム |
JP2003305585A (ja) * | 2001-09-11 | 2003-10-28 | Seiko Epson Corp | レーザー加工方法および加工装置 |
JP2009208092A (ja) * | 2008-02-29 | 2009-09-17 | Toyota Motor Corp | レーザ加工装置及びレーザ加工方法 |
JP2013107123A (ja) * | 2011-11-24 | 2013-06-06 | Mitsuboshi Diamond Industrial Co Ltd | レーザ加工方法及びレーザ加工装置 |
US20130175243A1 (en) * | 2012-01-11 | 2013-07-11 | The Ex One Company, Llc | Laser Drilling and Trepanning Device |
JP2015061731A (ja) * | 2013-08-20 | 2015-04-02 | 三菱重工業株式会社 | レーザ加工方法及びレーザ加工装置 |
US20170182597A1 (en) * | 2015-12-23 | 2017-06-29 | Universität Stuttgart | Drilling Device, Method, and Use |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2878338B1 (fr) | 2004-11-24 | 2007-03-02 | Varioptic Sa | Monture de lentille a focale variable |
WO2007113637A1 (en) | 2006-03-31 | 2007-10-11 | Varioptic | Multi-phase liquid composition and optical lens driven by electrowetting |
DE602006010839D1 (de) | 2006-06-21 | 2010-01-14 | Varioptic Sa | Dreifache Flüssiglinse |
-
2019
- 2019-08-29 CH CH01087/19A patent/CH716546A1/fr unknown
-
2020
- 2020-08-26 EP EP20761912.3A patent/EP4021677A1/fr active Pending
- 2020-08-26 WO PCT/IB2020/057953 patent/WO2021038453A1/fr unknown
- 2020-08-26 US US17/638,711 patent/US20220305590A1/en active Pending
- 2020-08-26 JP JP2022512740A patent/JP7452901B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19736110A1 (de) * | 1997-08-21 | 1999-03-11 | Hannover Laser Zentrum | Verfahren und Vorrichtung zur grat- und schmelzfreien Mikrobearbeitung von Werkstücken |
JP2002248591A (ja) * | 2001-02-22 | 2002-09-03 | Toyota Motor Corp | レーザ加工方法およびレーザ加工装置 |
JP2003117675A (ja) * | 2001-06-19 | 2003-04-23 | Nanovia Lp | レーザビーム送出システム |
JP2003305585A (ja) * | 2001-09-11 | 2003-10-28 | Seiko Epson Corp | レーザー加工方法および加工装置 |
JP2009208092A (ja) * | 2008-02-29 | 2009-09-17 | Toyota Motor Corp | レーザ加工装置及びレーザ加工方法 |
JP2013107123A (ja) * | 2011-11-24 | 2013-06-06 | Mitsuboshi Diamond Industrial Co Ltd | レーザ加工方法及びレーザ加工装置 |
US20130175243A1 (en) * | 2012-01-11 | 2013-07-11 | The Ex One Company, Llc | Laser Drilling and Trepanning Device |
JP2015061731A (ja) * | 2013-08-20 | 2015-04-02 | 三菱重工業株式会社 | レーザ加工方法及びレーザ加工装置 |
US20170182597A1 (en) * | 2015-12-23 | 2017-06-29 | Universität Stuttgart | Drilling Device, Method, and Use |
Also Published As
Publication number | Publication date |
---|---|
WO2021038453A1 (fr) | 2021-03-04 |
US20220305590A1 (en) | 2022-09-29 |
JP7452901B2 (ja) | 2024-03-19 |
CH716546A1 (fr) | 2021-03-15 |
EP4021677A1 (fr) | 2022-07-06 |
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