JP2022545760A - 光学アクチュエータ - Google Patents
光学アクチュエータ Download PDFInfo
- Publication number
- JP2022545760A JP2022545760A JP2021571907A JP2021571907A JP2022545760A JP 2022545760 A JP2022545760 A JP 2022545760A JP 2021571907 A JP2021571907 A JP 2021571907A JP 2021571907 A JP2021571907 A JP 2021571907A JP 2022545760 A JP2022545760 A JP 2022545760A
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- light
- electromagnetic radiation
- optical
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims description 47
- 239000000463 material Substances 0.000 claims abstract description 67
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 22
- 230000033001 locomotion Effects 0.000 claims abstract description 22
- 230000004044 response Effects 0.000 claims abstract description 7
- 230000000694 effects Effects 0.000 claims abstract description 5
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 6
- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 5
- DMLAVOWQYNRWNQ-UHFFFAOYSA-N azobenzene Chemical compound C1=CC=CC=C1N=NC1=CC=CC=C1 DMLAVOWQYNRWNQ-UHFFFAOYSA-N 0.000 claims description 5
- 239000013307 optical fiber Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- 230000008859 change Effects 0.000 claims description 2
- 230000005484 gravity Effects 0.000 claims description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 239000011777 magnesium Substances 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 11
- 239000000835 fiber Substances 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 239000002360 explosive Substances 0.000 description 4
- 229910002902 BiFeO3 Inorganic materials 0.000 description 3
- 238000007792 addition Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000002902 bimodal effect Effects 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002828 fuel tank Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002582 magnetoencephalography Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2046—Cantilevers, i.e. having one fixed end adapted for multi-directional bending displacement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
- H02N2/006—Elastic elements, e.g. springs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8561—Bismuth-based oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Lens Barrels (AREA)
Abstract
Description
本発明は、国立衛生研究所によって与えられたNCI Grant♯ROI CA166379の下で、政府の支援を得てなされた。政府は、本発明の幾つかの権利を有する。
Claims (24)
- フォトニックエネルギーによって動力が供給されるアクチュエータであって、
電磁放射線に露出されたときに第1の非変形状態から第2の変形状態に変形し且つ電磁放射線を除去したときに第1の非変形状態に戻り始める材料を含む本体と、
前記本体に固定された定置要素と、
少なくとも前記本体が第2の変形状態にあるときに前記定置要素に係合する移動要素と、を有し、
前記移動要素の動作を生じさせるために、適用された電磁放射線に応答する変形可能な前記材料の変形は、前記定置要素と前記移動要素の間の摩擦によって、前記定置要素を介して前記移動要素に伝達される、アクチュエータ。 - 変形可能な前記材料は、ランタンをドープしたチタン酸ジルコン酸鉛(PLZT)、マグネシウムニオブ酸鉛-チタン酸鉛(PMN-PT)、BiFeО3、及びアゾベンゼンを含有した液晶ポリマー(LCP)から選択される、請求項1に記載のアクチュエータ。
- 前記変形は、前記本体の変形可能な前記材料の弾性的な体積寸法変化を含む、請求項1に記載のアクチュエータ。
- 更に、出力を発生させるように構成された電磁放射線源を有し、前記電磁放射線源は、光出力が前記本体の表面を放射するように配置される、請求項1に記載のアクチュエータ。
- 更に、前記電磁放射線源を変形可能な前記材料に光結合させる光学ガイドを有する、請求項4に記載のアクチュエータ。
- 前記光学ガイドは、光ファイバである、請求項5に記載のアクチュエータ。
- 前記電磁放射線源は、出力を発生させる光源である、請求項3に記載のアクチュエータ。
- 前記光源は、光出力を合焦させるように構成された光整形光学デバイスを含む、請求項7に記載のアクチュエータ。
- 前記光整形光学デバイスは、光学レンズを含む、請求項8に記載のアクチュエータ。
- 前記光源は、パルス光出力を発生させるように構成される、請求項7に記載のアクチュエータ。
- 前記光源は、レーザ源を含む、請求項7に記載のアクチュエータ。
- 更に、重力に逆らって前記移動要素を前記定置要素に押し付けるように配置されたばね又は大規模な物体を有する、請求項1に記載のアクチュエータ。
- 前記動作は、回転であり、前記移動要素は、ロータを含み、
更に、前記ロータに結合された回転可能な出力シャフトを有する、請求項1に記載のアクチュエータ。 - 前記動作は、1つ又は2つ以上の自由度に沿う並進である、請求項1に記載のアクチュエータ。
- 更に、前記移動要素と一緒に動作するように作動的に連結された物体を有する、請求項1に記載のアクチュエータ。
- 前記光源は、光学デマルチプレクサに結合される、請求項1に記載のアクチュエータ。
- 前記光学デマルチプレクサは、ビームスプリッタであり、前記ビームスプリッタは、前記電磁放射線源から伝達された出力を前記本体の複数の表面への伝達のために分配するように構成される、請求項16に記載のアクチュエータ。
- 圧電アクチュエータと、前記圧電アクチュエータに連結された光電コンバータと、を有する光学アクチュエータ。
- 光学アクチュエータであって、
電磁放射線に露出されたときに第1の非変形状態から第2の変形状態に変形し且つ電磁放射線を除去したときに第1の非変形状態に戻り始める材料を含む本体と、
前記本体に固定された定置要素と、
前記定置要素に結合された媒体と、を有し、
様々な圧力を前記媒体内に形成する変位を生じさせるために、適用された電磁放射線に応答する変形可能な前記材料の変形は、前記定置要素を介して前記媒体に伝達される、光学アクチュエータ。 - 前記定置要素の形状は、円錐形状、平らな形状、及び円形平面から選択される、請求項13に記載のアクチュエータ。
- 前記移動要素の連続的な動作を発生させるために、前記電磁放射線源からの出力は、周期的な変形が前記本体内に発生するように連係された仕方で制御される、請求項4に記載のアクチュエータ。
- 発生させた連続的な動作は、回転動作である、請求項21に記載のアクチュエータ。
- 発生させた連続的な動作は、線形動作である、請求項21に記載のアクチュエータ。
- 前記パルス光出力は、前記本体の往復動変形を生じさせる、請求項10に記載のアクチュエータ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962856599P | 2019-06-03 | 2019-06-03 | |
US62/856,599 | 2019-06-03 | ||
PCT/US2020/035901 WO2020247481A2 (en) | 2019-06-03 | 2020-06-03 | Optical actuator |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022545760A true JP2022545760A (ja) | 2022-10-31 |
JPWO2020247481A5 JPWO2020247481A5 (ja) | 2023-06-12 |
Family
ID=71842808
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021571907A Pending JP2022545760A (ja) | 2019-06-03 | 2020-06-03 | 光学アクチュエータ |
Country Status (7)
Country | Link |
---|---|
US (1) | US20220238786A1 (ja) |
EP (1) | EP3977526A2 (ja) |
JP (1) | JP2022545760A (ja) |
CN (1) | CN114902437A (ja) |
AU (1) | AU2020289333A1 (ja) |
CA (1) | CA3140595A1 (ja) |
WO (1) | WO2020247481A2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112757278B (zh) * | 2021-01-19 | 2024-09-20 | 广西大学 | 一种蛇型运动机构 |
DE102021201689A1 (de) * | 2021-02-23 | 2022-08-25 | Carl Zeiss Smt Gmbh | Optische Baugruppe, Verfahren zur Deformation eines optischen Elements und Projektionsbelichtungsanlage |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3567028B2 (ja) * | 1995-09-28 | 2004-09-15 | 株式会社トプコン | 光歪素子の制御装置及び制御方法 |
DE102009039922A1 (de) * | 2009-04-21 | 2010-11-04 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultraschallmotor |
WO2013188976A1 (en) * | 2012-06-19 | 2013-12-27 | Genesis Advanced Technologies Inc. | Actuator |
-
2020
- 2020-06-03 WO PCT/US2020/035901 patent/WO2020247481A2/en unknown
- 2020-06-03 AU AU2020289333A patent/AU2020289333A1/en active Pending
- 2020-06-03 CA CA3140595A patent/CA3140595A1/en active Pending
- 2020-06-03 EP EP20747227.5A patent/EP3977526A2/en active Pending
- 2020-06-03 JP JP2021571907A patent/JP2022545760A/ja active Pending
- 2020-06-03 US US17/616,136 patent/US20220238786A1/en active Pending
- 2020-06-03 CN CN202080055047.1A patent/CN114902437A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
AU2020289333A1 (en) | 2022-01-06 |
US20220238786A1 (en) | 2022-07-28 |
WO2020247481A2 (en) | 2020-12-10 |
CA3140595A1 (en) | 2020-12-10 |
CN114902437A (zh) | 2022-08-12 |
WO2020247481A3 (en) | 2021-01-07 |
EP3977526A2 (en) | 2022-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2022545760A (ja) | 光学アクチュエータ | |
EP3698169B1 (en) | Methods and apparatuses for scanning a lidar system in two dimensions | |
US7339306B2 (en) | Mechanism comprised of ultrasonic lead screw motor | |
US9010965B2 (en) | System and apparatuses providing laser illumination with reduced or zero speckle | |
US6999221B1 (en) | Bimorphic polymeric photomechanical actuator | |
JP2009526254A (ja) | 調節可能な光学活性素子 | |
Samuelson et al. | A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography | |
KR20080089447A (ko) | 편향 잠망경이 있거나 없는 정적인 또는 동적인 지시보정을 가지는 멀티빔 디지털 프로젝션 비디오 모터 | |
KR20010098712A (ko) | 광 스위칭 소자와 이를 사용하는 광 스위칭 장치 및이미지 디스플레이 장치 | |
CN105352923A (zh) | 一种快速宽视场体全息荧光显微成像系统 | |
US20190212420A1 (en) | LIDAR System Having a Movable Fiber | |
US20020015234A1 (en) | Apparatus for moving optical functioning element | |
US4953961A (en) | Light beam positioner | |
KR20230010464A (ko) | 복수의 압전 소자들을 구비하는 고강도 집속형 초음파 기기 | |
EP1784875A2 (en) | Mechanism comprised of ultrasonic lead screw motor | |
KR20080096731A (ko) | 스캐닝 마이크로미러 | |
US3372973A (en) | Two-dimensional beam scanning device | |
JP2954316B2 (ja) | 光ファイバの位置決め装置 | |
KR20200066126A (ko) | 광위상배열기를 위한 내장형 원거리장 모니터링 시스템 | |
JPH06217978A (ja) | 超音波プローブ | |
JP2013142867A (ja) | 超音波式可変焦点レンズアレイ及びその制御方法 | |
US6778716B1 (en) | Method and apparatus for MEMS optical sensing using micromirrors | |
Treffer et al. | MEMS axicons for nondiffracting line shaping of ultrashort pulses | |
Rahman | Experimental investigation of photostrictive materials for MEMS application | |
EP2385251B1 (en) | Method And Apparatus For Converting Or Otherwise Utilizing Radiation Pressure To Generate Mechanical Work |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230602 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230602 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20231215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240109 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20240401 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20240527 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240709 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20240813 |