JP2022534476A5 - - Google Patents

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Publication number
JP2022534476A5
JP2022534476A5 JP2021568400A JP2021568400A JP2022534476A5 JP 2022534476 A5 JP2022534476 A5 JP 2022534476A5 JP 2021568400 A JP2021568400 A JP 2021568400A JP 2021568400 A JP2021568400 A JP 2021568400A JP 2022534476 A5 JP2022534476 A5 JP 2022534476A5
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JP
Japan
Prior art keywords
layer
carbon nanofibers
nanofiber
layers
film according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021568400A
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English (en)
Japanese (ja)
Other versions
JP2022534476A (ja
JP7684227B2 (ja
Filing date
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Application filed filed Critical
Priority claimed from PCT/US2020/034590 external-priority patent/WO2020243112A1/en
Publication of JP2022534476A publication Critical patent/JP2022534476A/ja
Publication of JP2022534476A5 publication Critical patent/JP2022534476A5/ja
Application granted granted Critical
Publication of JP7684227B2 publication Critical patent/JP7684227B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021568400A 2019-05-31 2020-05-26 多層、数層、及び単層のカーボンナノチューブ混合物のペリクル膜 Active JP7684227B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962855432P 2019-05-31 2019-05-31
US62/855,432 2019-05-31
US202062976449P 2020-02-14 2020-02-14
US62/976,449 2020-02-14
PCT/US2020/034590 WO2020243112A1 (en) 2019-05-31 2020-05-26 Films of multiwall, few wall, and single wall carbon nanotube mixtures

Publications (3)

Publication Number Publication Date
JP2022534476A JP2022534476A (ja) 2022-08-01
JP2022534476A5 true JP2022534476A5 (https=) 2023-01-27
JP7684227B2 JP7684227B2 (ja) 2025-05-27

Family

ID=73554187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021568400A Active JP7684227B2 (ja) 2019-05-31 2020-05-26 多層、数層、及び単層のカーボンナノチューブ混合物のペリクル膜

Country Status (5)

Country Link
US (2) US11820659B2 (https=)
JP (1) JP7684227B2 (https=)
KR (3) KR102945373B1 (https=)
TW (1) TWI783231B (https=)
WO (1) WO2020243112A1 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7684227B2 (ja) * 2019-05-31 2025-05-27 リンテック オブ アメリカ インク 多層、数層、及び単層のカーボンナノチューブ混合物のペリクル膜
CN117222941A (zh) * 2021-03-31 2023-12-12 三井化学株式会社 防护膜组件、曝光原版、曝光装置、防护膜组件的制造方法和半导体装置的制造方法
US12174526B2 (en) * 2021-08-06 2024-12-24 Taiwan Semiconductor Manufacturing Company, Ltd. Pellicle for an EUV lithography mask and a method of manufacturing thereof
JP2024535841A (ja) * 2021-09-28 2024-10-02 リンテック オブ アメリカ インク Ｅｕｖリソグラフィ用の強化された超薄型・超低密度フィルム及びその製造方法
WO2023055729A1 (en) * 2021-09-28 2023-04-06 Lintec Of America, Inc. Zirconium-coated ultra-thin, ultra-low density films for euv lithography
EP4202546B1 (en) * 2021-12-22 2024-08-28 Imec VZW An euv pellicle
FI20225350A1 (en) * 2022-04-27 2023-10-28 Canatu Oy A free-standing pellicle film comprising harm-structures
WO2023233932A1 (ja) * 2022-05-31 2023-12-07 日本ゼオン株式会社 カーボンナノチューブ積層構造体、カーボンナノチューブ分散液、電子素子製造用塗布液、カーボンナノチューブ膜、および電子素子
CN120981766A (zh) * 2023-03-28 2025-11-18 琳得科株式会社 防护膜及防护膜组件
KR20250163883A (ko) * 2023-03-28 2025-11-21 린텍 가부시키가이샤 펠리클 및 펠리클의 제조 방법
CN120883131A (zh) * 2023-03-28 2025-10-31 琳得科株式会社 防护膜组件、防护膜支撑体及防护膜组件的制造方法
JP7675948B2 (ja) * 2023-03-28 2025-05-13 リンテック株式会社 ペリクル膜およびペリクル
KR20250163877A (ko) * 2023-03-28 2025-11-21 린텍 가부시키가이샤 펠리클막 및 펠리클
WO2024204102A1 (ja) * 2023-03-28 2024-10-03 リンテック株式会社 ペリクル膜およびペリクル
EP4732069A1 (en) * 2023-10-02 2026-04-29 Lintec Of America, Inc. Two-density extreme ultraviolet pellicle with enhanced properties
CN121646531A (zh) * 2024-07-01 2026-03-10 碳博来股份有限公司 复合体、复合体的制造方法和复合体的用途
WO2026009466A1 (ja) * 2024-07-01 2026-01-08 株式会社カーボンフライ カーボンナノチューブ分散液

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US8926933B2 (en) 2004-11-09 2015-01-06 The Board Of Regents Of The University Of Texas System Fabrication of twisted and non-twisted nanofiber yarns
EP1957406A4 (en) * 2005-11-16 2012-11-07 Hyperion Catalysis Int MIXED STRUCTURES OF SINGLE-WALL AND MULTI-WALL CARBON CANNONS
US8329135B2 (en) * 2006-01-06 2012-12-11 National Institute Of Advanced Industrial Science And Technology Aligned carbon nanotube bulk structure having portions different in density
US7955535B2 (en) * 2006-02-02 2011-06-07 Florida State University Research Foundation Method for fabricating macroscale films comprising multiple-walled nanotubes
US7428402B2 (en) 2006-07-26 2008-09-23 Xerox Corporation Carbon nanotube composites for blade cleaning in electrophotographic marking systems
EP2167209A4 (en) * 2007-07-18 2013-03-06 Univ Nanyang Tech HOLLOW POROUS MICRO BEADS
US8058364B2 (en) 2008-04-15 2011-11-15 Florida State University Research Foundation Method for functionalization of nanoscale fibers and nanoscale fiber films
US8940173B2 (en) * 2008-05-29 2015-01-27 Lawrence Livermore National Security, Llc Membranes with functionalized carbon nanotube pores for selective transport
WO2010019942A2 (en) * 2008-08-15 2010-02-18 Board Of Regents, The University Of Texas System Nanofiber actuators and strain amplifiers
WO2012157506A1 (ja) 2011-05-13 2012-11-22 国立大学法人熊本大学 カーボンナノチューブ複合電極及びその製造方法
US9088049B2 (en) * 2012-01-23 2015-07-21 Florida State University Research Foundation, Inc. Bifunctional hollandite Ag2Mn8O16 catalyst for lithium-air batteries
WO2013133941A1 (en) 2012-03-06 2013-09-12 Applied Nanotech Holdings, Inc. Carbon nanotube reinforced nanocomposites
KR101381889B1 (ko) * 2013-01-24 2014-04-17 광주과학기술원 층상 자기조립법에 의해 제조된 탄소나노튜브를 함유하는 다층막
JP2016190772A (ja) * 2015-03-31 2016-11-10 日本ゼオン株式会社 炭素膜およびその製造方法
KR102809564B1 (ko) * 2016-07-05 2025-05-20 미쯔이가가꾸가부시끼가이샤 펠리클막, 펠리클 프레임체, 펠리클, 그 제조 방법, 노광 원판, 노광 장치, 반도체 장치의 제조 방법
EP3404487B1 (en) * 2017-05-15 2021-12-01 IMEC vzw Method for forming a carbon nanotube pellicle membrane
EP3638674A1 (en) 2017-06-13 2020-04-22 Yeda Research and Development Co. Ltd Small molecules based free-standing films and hybrid materials
WO2019099299A1 (en) * 2017-11-15 2019-05-23 Lintec Of America, Inc. Nanofiber sheet holder
JP7684227B2 (ja) * 2019-05-31 2025-05-27 リンテック オブ アメリカ インク 多層、数層、及び単層のカーボンナノチューブ混合物のペリクル膜
KR20220047581A (ko) * 2019-08-26 2022-04-18 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치용 펠리클 멤브레인
US11860534B2 (en) * 2021-08-06 2024-01-02 Taiwan Semiconductor Manufacturing Company, Ltd. Pellicle for an EUV lithography mask and a method of manufacturing thereof

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