JP2022184708A5 - - Google Patents
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- JP2022184708A5 JP2022184708A5 JP2022015103A JP2022015103A JP2022184708A5 JP 2022184708 A5 JP2022184708 A5 JP 2022184708A5 JP 2022015103 A JP2022015103 A JP 2022015103A JP 2022015103 A JP2022015103 A JP 2022015103A JP 2022184708 A5 JP2022184708 A5 JP 2022184708A5
- Authority
- JP
- Japan
- Prior art keywords
- deposition mask
- mask according
- deposition
- opening
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 230000008021 deposition Effects 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 32
- 239000000463 material Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/015362 WO2022254925A1 (ja) | 2021-05-31 | 2022-03-29 | 蒸着マスク、及び有機電子デバイスの製造方法 |
| US18/515,813 US20240084434A1 (en) | 2021-05-31 | 2023-11-21 | Vapor deposition mask and method for producing organic electronic device |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021091159 | 2021-05-31 | ||
| JP2021091159 | 2021-05-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022184708A JP2022184708A (ja) | 2022-12-13 |
| JP2022184708A5 true JP2022184708A5 (enExample) | 2025-02-12 |
Family
ID=84437918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022015103A Pending JP2022184708A (ja) | 2021-05-31 | 2022-02-02 | 蒸着マスク、及び有機電子デバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2022184708A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20250078513A (ko) * | 2023-08-10 | 2025-06-02 | 도판 홀딩스 가부시키가이샤 | 증착 마스크, 및 전자 디바이스의 제조 방법 |
| JP7708338B2 (ja) * | 2023-08-10 | 2025-07-15 | Ｔｏｐｐａｎホールディングス株式会社 | 蒸着マスク及び、電子デバイスの製造方法 |
| JP7708340B2 (ja) * | 2023-08-10 | 2025-07-15 | Ｔｏｐｐａｎホールディングス株式会社 | 蒸着マスク及び、電子デバイスの製造方法 |
-
2022
- 2022-02-02 JP JP2022015103A patent/JP2022184708A/ja active Pending
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