JP2022184395A - Processing device - Google Patents

Abstract

To prevent a motor power from not being transmitted to a chuck rotating shaft when tension of an endless belt changes during a change of inclination of the chuck rotating shaft.SOLUTION: A processing device 1 includes: a shaft 32 hanging down from a lower surface of a table 30; a housing 33 which arranges a first bearing 331 rotatably supporting the shaft 32; a base table 39 which supports the housing 33 and is provided with a shaft insertion port; a mechanism 34 which is arranged between the base table 39 and the housing 33 and adjusts shaft inclination; and a shaft rotation mechanism 4. The rotation mechanism 4 is provided with: a bearing arranging part 40 arranging a second bearing 42; a first pulley 41 rotatably supported by the second bearing 42; a three-dimensional coupling 5 engaged with the shaft 32 whose inclination has been changed and the first pulley 41; a motor 44 which is separate horizontally from the shaft 32 and is arranged on the base table 39; a second pulley 45 which is connected to the motor 44; and a belt 46 which is engaged with the first pulley 41 and the second pulley 45, and transmits motor power to the shaft 32.SELECTED DRAWING: Figure 2

Description

The present invention relates to a processing apparatus for processing workpieces such as semiconductor wafers.

As disclosed in Patent Document 1, a grinding apparatus that holds a wafer on a holding surface of a chuck table and grinds the wafer with the lower surface of a grinding wheel has a chuck rotation axis that rotates the chuck table around the center of the holding surface. and a rotating mechanism for rotating the chuck rotating shaft.

For example, the rotating mechanism engages a first pulley attached to the chuck rotating shaft, a motor arranged on the base, a second pulley connected to the rotating shaft of the motor, and the first pulley and the second pulley. an endless belt; An endless belt wound around the first and second pulleys with a predetermined tension transmits the power of the motor to the chuck rotating shaft to rotate the chuck table around the chuck rotating shaft. I am letting

In addition, the grinding apparatus is equipped with an inclination adjusting mechanism that changes the inclination of the chuck rotating shaft, as disclosed in Patent Document 2, in order to adjust the parallelism between the holding surface and the lower surface of the grinding wheel. The tilt adjusting mechanism is arranged on the base and changes the tilt of the chuck table by changing the vertical distance between the base and the chuck table. In other words, the chuck table is supported on the base via the tilt adjusting mechanism, and the motor of the power source for rotating the chuck table is arranged on the base.

Japanese Unexamined Patent Application Publication No. 2014-237200 JP 2013-119123 A

In grinding, the inclination of the chuck rotation axis is changed in order to adjust the vertical cross-sectional shape of the wafer. By changing this tilt, the tilt relationship between the first pulley and the second pulley is no longer parallel. Therefore, the tension of the endless belt changes as the distance between the first pulley and the second pulley changes. As a result, there is a problem that the power of the motor may not be transmitted to the chuck rotating shaft.

Therefore, in the processing apparatus, when the inclination of the chuck rotating shaft is changed, the tension of the endless belt is changed, and there is a problem of preventing the power of the motor from being transmitted to the chuck rotating shaft. .

The present invention for solving the above problems is a processing apparatus comprising a holding mechanism for holding a workpiece on a holding surface and a machining mechanism for machining the workpiece held on the holding surface, The holding mechanism includes a chuck table having the holding surface on its upper surface, a support plate supporting the lower surface of the chuck table, a shaft hanging down from the center of the lower surface of the support plate, and a first rotatably supporting the shaft. A housing in which the bearing is arranged, a base supporting the housing and having an insertion opening into which the shaft is inserted, and at least three pillars arranged between the base and the housing so as to surround the insertion opening. and a tilt adjustment mechanism for adjusting the tilt of the shaft by varying the length of at least one column of the insertion port, and a rotation mechanism for rotating the shaft inserted into the insertion port, wherein the rotation mechanism is attached to the insertion port. A bearing arrangement portion having a corresponding opening and in which a second bearing is arranged, an annular first pulley rotatably supported by the second bearing, and an inclination adjustment mechanism that tilts and changes the height and horizontal position. a three-dimensional coupling that engages the shaft and the first pulley; a motor that is horizontally separated from the shaft and disposed on the base; a second pulley that is connected to the rotating shaft of the motor; an endless belt that engages the first pulley and the second pulley with a predetermined tension and transmits the power of the motor to the shaft, wherein the tension of the endless belt changes when the inclination of the shaft changes. It is a processing device characterized by not changing the

The three-dimensional coupling includes a first plate having the first pulley on its upper surface and a first opening corresponding to the insertion port, and a pair of plates hanging from the lower surface of the first plate across the first opening. A first convex portion, a second plate connected to the shaft, and a shape similar to the first convex portion which is erected on the upper surface of the second plate at a difference of 90 degrees from the first convex portion in plan view. a pair of second projections, and a floater having a second opening into which the shaft is inserted in the center of the area surrounded by the pair of first projections and the pair of second projections having a rectangular outer shape. and preferably a block.

The shaft includes a rotational force receiving portion having a rectangular lower cross section or a convex or concave side surface of the lower portion, and the three-dimensional coupling has the first a third plate having a pulley disposed thereon and a third opening corresponding to the insertion opening; a fourth plate disposed below the third plate and having a transmission opening corresponding to the rotational force receiving portion in the center thereof; It is preferable to include a connection spring that connects the third plate and the fourth plate and allows the inclination of the fourth plate to be variable with respect to the third plate.

A processing apparatus according to the present invention includes a holding mechanism that holds a workpiece on a holding surface, and a machining mechanism that processes the workpiece held on the holding surface, wherein the holding mechanism includes the holding surface on its upper surface. a chuck table, a support plate that supports the lower surface of the chuck table, a shaft that hangs down from the center of the lower surface of the support plate, a housing in which a first bearing that rotatably supports the shaft is arranged, and a housing that supports the shaft and is inserted into the shaft A base having an insertion opening, and an inclination adjusting mechanism for adjusting the inclination of the shaft by varying the length of at least one of at least three columns arranged between the base and the housing so as to surround the insertion opening. and a rotation mechanism for rotating the shaft inserted into the insertion opening, wherein the rotation mechanism includes a bearing arrangement portion having an opening corresponding to the insertion opening and for arranging the second bearing, and the second bearing is rotatably supported. a three-dimensional coupling that engages the first pulley with the shaft tilted by the tilt adjustment mechanism to change its height and horizontal position; and a base horizontally separated from the shaft A motor, a second pulley connected to the rotating shaft of the motor, and an endless belt that engages the first and second pulleys with a predetermined tension and transmits the power of the motor to the shaft. Therefore, even if the inclination of the shaft is changed, the tension of the endless belt does not change. The three-dimensional coupling makes it possible to properly transmit the rotational power of the motor to the shaft.

Further, in the processing apparatus according to the present invention, the three-dimensional coupling includes a first plate having a first pulley disposed on the upper surface thereof and a first opening corresponding to the insertion opening, and a lower surface of the first plate sandwiching the first opening. A pair of first protrusions hanging down from the shaft, a second plate connected to the shaft, and a shape similar to the first protrusion, which is erected on the upper surface of the second plate at a difference of 90 degrees in plan view from the first protrusion. a pair of second projections, and a floating block having a second opening into which the shaft is inserted in the center thereof, and is movable in an area surrounded by the pair of first projections and the pair of second projections having a square outer shape. By providing , even if the inclination of the shaft is changed and the axial center of the shaft and the center of the first pulley are displaced in the horizontal direction, the rotational power of the motor can be appropriately transmitted to the shaft by the floating block. Become.

Further, in the processing apparatus according to the present invention, the shaft includes a rotational force receiving portion having a rectangular cross section at the lower portion or a convex or concave side surface at the lower portion, and the three-dimensional coupling is a third plate having a first pulley on its upper surface and a third opening corresponding to the insertion port, and a fourth plate disposed below the third plate and having a transmission opening corresponding to the rotational force receiving portion in the center. and a connection spring that connects the third plate and the fourth plate and makes the inclination of the fourth plate variable with respect to the third plate, thereby changing the inclination of the shaft to the axis of the shaft. Even if the center of the first pulley deviates in the horizontal direction, the tension of the endless belt changes due to the deformation of the connecting spring (the state in which the shaft and the fourth plate are allowed to tilt). It is possible to properly transmit the rotational power of the motor to the shaft.

It is a perspective view which shows an example of a processing apparatus. It is a sectional view showing an example of a processing device. 1 is an exploded perspective view showing an example of a three-dimensional coupling; FIG. It is a perspective view which shows the state which turned the lower surface of the bearing installation part upward. It is a perspective view which shows the state which turned the lower surface of a 1st plate upward. FIG. 10 is a cross-sectional view illustrating the chuck table that is not tilted by the tilt adjusting mechanism, the shaft that is not tilted, and the rotating mechanism; FIG. 5 is a cross-sectional view illustrating the chuck table tilted by the tilt adjusting mechanism, the tilted shaft, and the rotating mechanism; FIG. 10 is a schematic plan view illustrating the three-dimensional coupling in a state in which the shaft is tilted by the tilt adjusting mechanism and the first pulley is not rotating from the rotation start position; FIG. 10 is a schematic plan view illustrating the three-dimensional coupling in a state where the shaft is tilted by the tilt adjusting mechanism and the first pulley is rotated 45 degrees from the rotation start position; FIG. 4 is a schematic plan view illustrating a three-dimensional coupling in a state where the shaft is tilted by the tilt adjusting mechanism and the first pulley is rotated 90 degrees from the rotation start position; FIG. 10 is a schematic plan view illustrating the three-dimensional coupling in a state where the shaft is tilted by the tilt adjusting mechanism and the first pulley is rotated 135 degrees from the rotation start position; FIG. 11 is a perspective view showing an example of a three-dimensional coupling according to Embodiment 2; 8 is a perspective view showing another example of the three-dimensional coupling of Embodiment 2. FIG.

The processing apparatus 1 shown in FIG. 1 is an apparatus for grinding a workpiece 90 held on a chuck table 30 by suction using a processing mechanism 16 (hereinafter referred to as a grinding mechanism 16). The front side (−Y direction side) of the apparatus base 10, which is the longitudinal direction, is an attachment/detachment area in which the workpiece 90 is attached to and detached from the chuck table 30, and the rear side (+Y direction side) of the apparatus base 10 is an attachment/detachment area. , a grinding region where the workpiece 90 sucked and held on the chuck table 30 by the grinding mechanism 16 is ground.
The processing apparatus according to the present invention is not limited to the one-axis type grinding mechanism 16 as in the processing apparatus 1, but includes a rough grinding mechanism and a finish grinding mechanism. It may be of the two-axis type that can be positioned below the rough grinding mechanism or the finish grinding mechanism. Further, the processing device 1 may be a polishing device that polishes the workpiece 90 with a polishing pad.

The workpiece 90 shown in FIG. 1 is, for example, a circular semiconductor wafer made of a silicon base material or the like, and the surface 900 of the workpiece 90 facing downward in FIG. 1 has a plurality of devices formed thereon. , are protected by a protective tape (not shown). A back surface 903 (upper surface 903) of the workpiece 90 facing upward is a surface to be ground. In addition to silicon, the workpiece 90 may be made of gallium arsenide, sapphire, gallium nitride, resin, ceramics, silicon carbide, or the like, or may be a package substrate or the like.

A chuck table 30 having a circular outer shape in plan view and arranged on the apparatus base 10 shown in FIG. and a frame 301 . The suction unit 300 of the chuck table 30 communicates with a suction source (not shown) such as an ejector unit or a vacuum generator. and the upper surface of the frame 301 , the chuck table 30 can suction-hold the workpiece 90 on the holding surface 302 . The chuck table 30 is one component of the holding mechanism 3 that holds the workpiece 90 on the holding surface 302 .
Note that the holding surface 302 has an extremely gentle conical slope that is invisible to the naked eye, with the center of rotation of the chuck table 30 as the apex.

The horizontal movement unit 13 for moving the holding mechanism 3 toward the grinding mechanism 16 in the Y-axis direction shown in FIG. A rail 131 and a motor 132 connected to one end of the ball screw 130 and rotating the ball screw 130 are provided. The base 39 constituting the holding mechanism 3 has an internal nut screwed onto the ball screw 130 and a bottom portion slidably contacts the guide rail 131 . When the motor 132 rotates the ball screw 130, the base 39 is guided by the guide rail 131 and moves linearly in the Y-axis direction, and is arranged on the base 39 via the shaft 32 shown in FIG. The chuck table 30 can be moved in the Y-axis direction.
Note that the horizontal movement unit 13 may be a turntable.

As shown in FIG. 1, a column 11 is erected in the grinding processing area. A mechanism 17 is provided. The grinding feed mechanism 17 includes a ball screw 170 whose axial direction is the Z-axis direction, a pair of guide rails 171 arranged parallel to the ball screw 170, and an elevating motor 172 connected to the upper end of the ball screw 170 and rotating the ball screw 170. and an elevating plate 173 whose inner nut is screwed onto the ball screw 170 and whose side portion is in slidable contact with the guide rail 171. When the elevating motor 172 rotates the ball screw 170, the elevating plate 173 is accordingly guided. Guided by the rail 171, it reciprocates in the Z-axis direction, and the grinding mechanism 16 fixed to the lifting plate 173 is fed for grinding in the Z-axis direction.

For example, as shown in FIG. 1 , the processing apparatus 1 includes a height position detection section 12 that detects the height position of a grinding mechanism 16 vertically moved by a grinding feed mechanism 17 . The height position detection unit 12 includes a scale 120 extending in the Z-axis direction along a pair of guide rails 171 and a lift plate 173 fixed to the scale 120 and moved together with the lift plate 173 to detect the scale of the scale 120 optically. and a reader 123 for reading the formula.

The grinding mechanism 16 that grinds the workpiece 90 held on the holding surface 302 of the chuck table 30 includes a rotating shaft 160 whose axial direction is the Z-axis direction, a housing 161 that rotatably supports the rotating shaft 160, and a rotating A motor 162 for rotationally driving a shaft 160, an annular mount 163 connected to the lower end of the rotating shaft 160, a grinding wheel 164 detachably attached to the lower surface of the mount 163, and a housing 161 supporting a grinding feed mechanism. and a holder 165 fixed to 17 elevator plates 173 .
The grinding wheel 164 includes a wheel base 1641 and a grinding stone 1644 annularly arranged on the bottom surface of the wheel base 1641 .

As shown in FIG. 2, inside the rotating shaft 160, a flow path 169 that communicates with the grinding water supply source and serves as a path for the grinding water is provided through the rotating shaft 160 in the axial direction. 169 further passes through the mount 163 and has an opening at the bottom surface of the wheel base 1641 so that grinding water can be jetted toward the grinding wheel 1644 .

As shown in FIG. 1, for example, a thickness measuring unit 104 for measuring the thickness of the workpiece 90 in a contact manner is arranged at a position adjacent to the grinding mechanism 16 lowered to the grinding position. The thickness measurement unit 104 measures the height position of the holding surface 302 serving as the reference surface, that is, the height of the upper surface of the frame 301 at the same height position as the holding surface 302 in this embodiment, using the first linear gauge. By measuring the position, measuring the height position of the upper surface 903 of the workpiece 90 to be ground by the second linear gauge, and calculating the difference between the measured values of both linear gauges, the thickness of the workpiece 90 is calculated. It can be measured sequentially during grinding.
Note that the thickness measuring unit 104 may be of a non-contact type.

The holding mechanism 3 shown in FIGS. 1 and 2 for holding the workpiece 90 on the holding surface 302 includes a chuck table 30 whose upper surface is the holding surface 302, a support plate 31 which supports the lower surface of the chuck table 30, and a support plate. A shaft 32 hanging down from the center of the lower surface of 31, a housing 33 in which a first bearing 331 that rotatably supports the shaft 32 is arranged, a base 39 that supports the housing 33 and has an insertion opening 390 into which the shaft 32 is inserted, an inclination adjusting mechanism 34 for adjusting the inclination of the shaft 32 by varying the length of at least one of at least three pillars arranged to surround the insertion opening 390 between the base 39 and the housing 33; and a rotating mechanism 4 for rotating the shaft 32 inserted into the mouth 390 .

For example, the shaft 32 shown in FIG. Bearing 331 is in contact. The first bearing 331 is a ball bearing, roller bearing or air bearing.

The base 39 includes, for example, a cylindrical side plate 396, a top plate 394 having a cylindrical wall connected to the upper end side of the cylindrical side plate 396, extending radially inward and further vertically rising, and the side plate 396. and a bottom plate 392 connected to the lower end side of the and extending radially inward and having a circular insertion opening 390 in the center.

For example, the outer surface of the chuck table 30 is formed with a skirt-shaped cover portion 305 that extends radially outward and further hangs down. By arranging the chuck table 30 at the top, it is possible to prevent the grinding water or the like flowing down from the holding surface 302 from entering the gap between the base 39 and the chuck table 30 .

The housing 33 is arranged in the inner space of the base 39 so as to surround the shaft 32 inserted so as to penetrate from the opening of the top plate 394 to the insertion port 390 of the bottom plate 392. The housing 33 is formed, for example, in a cylindrical shape. A first bearing 331 is arranged on the inner surface thereof to contact the shaft 32 .

In the present embodiment, the tilt adjusting mechanism 34 includes, for example, two elevating columns spaced apart by 120 degrees in the circumferential direction around the center of the holding surface 302, and two elevating columns spaced apart by 120 degrees in the circumferential direction from each of the elevating columns. and one fixed column (not shown) arranged in the same direction. That is, the two elevating columns and one fixed column are positioned at the vertices of a virtual equilateral triangle formed on the X-axis and Y-axis planes. The two elevating columns are, for example, an electric actuator capable of moving the housing 33 up and down in the Z-axis direction. The inclination of the supported shaft 32 can be adjusted.

The rotation mechanism 4 shown in FIG. 2 includes a bearing placement portion 40 having an opening 403 corresponding to the insertion port 390 of the base 39 and in which the second bearing 42 is placed; 1 pulley 41, a three-dimensional coupling 5 that engages the first pulley 41 with the shaft 32 that is tilted by the tilt adjustment mechanism 34 and whose height and horizontal position are changed, and a base that is horizontally separated from the shaft 32. A motor 44 disposed on a base 39, a second pulley 45 connected to the rotating shaft of the motor 44, and the first and second pulleys 41 and 45 are engaged with each other with a predetermined tension, and the power of the motor 44 is applied to the shaft 32. and an endless belt 46 for transmission.

The motor 44 is connected to the base 39 via a holder or the like (not shown), and the second pulley 45 connected to the rotating shaft of the motor 44 is inserted in the insertion port 390 of the base 39 or inside the base 39, for example. It is rotatable.

The bearing placement portion 40 shown in FIGS. 2, 3, and 4 includes, for example, a plate base portion 400 having a rectangular plate shape in a plan view, and a cylindrical boss portion 401 vertically provided substantially in the center of the lower surface 4006 of the plate base portion 400. and a circular opening 403 formed through the boss portion 401 and the plate base portion 400 .
As shown in FIGS. 3 and 4, bolt holes 4002 are formed in the four corners of the plate base portion 400, and the bearing arrangement portion 40, for example, has its center and the center of the bottom plate 392 of the base 39 shown in FIG. The four corners are bolted to the bottom plate 392 with bolts (not shown) in a state in which they are substantially aligned and inserted into the insertion opening 390 with the boss portion 401 directed downward. In addition, in FIG. 4, the lower surface 4006 of the bearing placement portion 40 is shown facing upward.
The opening 403 has a larger diameter than the lower portion 321 of the shaft 32 , and a gap is formed between the opening 403 and the lower portion 321 of the shaft 32 so that the lower portion 321 can be tilted at a predetermined angle.

The second bearing 42 shown in FIG. 3 has a plurality of rolling balls 422 arranged between an inner ring 420 and an outer ring 423, and a retainer (not shown) keeps the rolling balls 422 from coming into contact with each other. It enables smooth rolling motion while maintaining it. The second bearing 42 is, for example, connected (press-fitted) to the boss portion 401 to which the inner ring 420 is fixed, and the outer ring 423 is connected to the inner peripheral surface 412 of the rotating first pulley 41 or the one opening 511 of the first plate 51. The first pulley 41 is rotatably supported by the second bearing 42 . Note that the second bearing 42 may be a roller bearing.

As shown in FIG. 2, an endless belt 46 is wound around the second pulley 45, and the endless belt 46 is also wound around the first pulley 41 shown in FIGS. The rotational power generated by the motor 44 is also transmitted to 41 .

The three-dimensional coupling 5 shown in FIGS. 2 and 3 in this embodiment (hereinafter referred to as the three-dimensional coupling 5 of Embodiment 1) has a first pulley 41 arranged on an upper surface 515 as shown in detail in FIG. A first plate 51 having a first opening 511 corresponding to the insertion port 390 (see FIG. 2) of the base 39 and the opening 403 of the bearing arrangement portion 40, and a lower surface 514 of the first plate 51 with the first opening 511 interposed therebetween. a pair of first protrusions 55 hanging down from the shaft 32; a second plate 52 connected to the shaft 32; A pair of second protrusions 56 having a shape similar to that of the protrusions 55 and an area 57 having a rectangular outer shape surrounded by the pair of first protrusions 55 and the pair of second protrusions 56 are movably provided, and a shaft is provided in the center. and a floating block 58 having a second opening 582 into which the 32 is inserted. The three-dimensional coupling 5 has a function similar to a so-called Oldham coupling that allows deviation between the center of the first pulley 41 and the axis of the shaft 32, and has a pair of first protrusions 55 on the side surface of the floating block 58. , and the second plate 52, which contacts the pair of second projections 56 on the side surface of the floating block 58, allow the distance in the axial direction of the shaft 32 to change.

For example, the upper surface 515 of the first plate 51 is fixed to the lower surface 415 of the first pulley 41 shown in FIG. Rotate.

The first plate 51 shown in FIGS. 3 and 5 includes, for example, a plate portion 510 and a circular first opening 511 penetrating through the center of the plate portion 510 . Two sides of the plate portion 510 that face each other in the Y-axis direction are formed in an arc shape, and two sides that face each other in the X-axis direction are formed in a straight line. A pair of first protrusions 55 having a flat inner surface and an arc-shaped curved outer surface hang down for a predetermined length from regions on both ends in the Y-axis direction of the lower surface 514 of the first plate 51 . is doing. The pair of first protrusions 55 sandwich the first opening 511 in the planar direction of the lower surface 514 . 5, the first plate 51 is shown with the lower surface 514 facing upward.

As shown in FIG. 3 , the second plate 52 includes, for example, a plate portion 520 and a shaft connecting portion 525 formed in the center of an upper surface 524 of the plate portion 520 . Two sides of the plate portion 520 that face each other in the X-axis direction are formed in an arc shape, and two sides that face each other in the Y-axis direction are formed in a straight line. A pair of second protrusions 56 having a flat inner surface and an arc-shaped curved outer surface are vertically formed on the upper surface 524 of the second plate 52 at both ends in the X-axis direction. is set up in

The shaft connecting portion 525 has, for example, two bolt insertion holes 526 into which fixing bolts (not shown) are screwed on the lower end surface of the shaft 32 . Two screw holes (not shown) formed in the lower end surface of the shaft 32 and the bolt insertion holes 526 are overlapped, and the fixing bolts inserted through the bolt insertion holes 526 are screwed into the screw holes of the shaft 32. , the shaft 32 inserted through the opening 403 of the bearing arrangement portion 40, the second bearing 42, the first opening 511 of the first plate 51, and the second opening 582 of the floating block 58 is connected to the second plate 52 in this order from the top. can be made

The bolt insertion hole 526 of the shaft connecting portion 525 may be, for example, a fitting hole into which two protrusions (not shown) formed on the lower end surface of the shaft 32 are fitted. By fitting the two projections of the shaft 32 into the bolt insertion holes 526, which are fitting holes, the shaft 32 is connected to the second plate 52, and the rotational force of the rotating second plate 52 is transmitted. become.

For example, from the frame 301 of the chuck table 30 connected as shown in FIG. A lower end of the suction channel communicates with a suction hole 523 formed in the second plate 52 shown in FIG.
As shown in FIG. 2, for example, a rotary joint 529 is connected below the second plate 52, and a suction channel (not shown) is connected to an ejector mechanism or a vacuum via the suction hole 523 and the rotary joint 529. It communicates with a suction source (not shown) such as a generator. The rotary joint 529 completely transfers the suction force generated by the suction source to the rotating shaft 32 side.

The floating block 58 shown in FIG. 3 is formed, for example, in the shape of a rectangular (for example, square) plate in plan view, and a circular second opening 582 into which the shaft 32 is inserted is formed through the center in the thickness direction. . Then, as shown in FIG. The first plate 51 is put on the floating block 58 on the second plate 52 after being shifted by 90 degrees in plan view. A substantially square rectangular parallelepiped in plan view surrounded by the lower surface 514 of the first plate 51 , the inner side surfaces of the pair of first protrusions 55 , the upper surface 524 of the second plate 52 , and the inner side surfaces of the pair of second protrusions 56 . Area 57 is formed. Further, the lower surface 514 of the first plate 51 is supported by the upper surface of the floating block 58 movably accommodated within the area 57 .
The floating block 58 is movable in the surface direction of the upper surface 524 of the second plate 52 within the rectangular parallelepiped area 57 that is substantially square in plan view.

The diameter of the circular opening 403 of the bearing arrangement part 40, the diameter of the first opening 511 of the first plate 51, and the diameter of the second opening 582 of the floating block 58 are formed larger than the diameter of the lower part 321 into which the shaft 32 is inserted. , allowing tilting motion of the shaft 32 inserted into the opening 403 , the first opening 511 and the second opening 582 .

The operation of the processing apparatus 1 shown in FIG. 1 when grinding the workpiece 90 held on the chuck table 30 will be described below.
First, the workpieces 90 are placed on the holding surface 302 of the chuck table 30 in the attachment/detachment area with their centers substantially aligned. A suction force generated by a suction source (not shown) is transmitted to the holding surface 302 through the rotary joint 529 shown in FIG. 30 suction-holds the workpiece 90 on the holding surface 302 .

Next, the horizontal movement unit 13 moves the chuck table 30 sucking and holding the workpiece 90 from the attachment/detachment area to below the grinding mechanism 16 in the machining area in the +Y direction. The center of rotation of the grinding wheel 1644 of the grinding mechanism 16 is shifted horizontally from the center of rotation of the workpiece 90 by a predetermined distance, and the locus of rotation of the grinding wheel 1644 passes through the center of rotation of the workpiece 90. Alignment is made.

As shown in FIG. 6, for example, two elevating columns are arranged at intervals of 120 degrees in the circumferential direction of the holding surface 302 of the tilt adjusting mechanism 34, and each elevating column is spaced from each of the elevating columns in the circumferential direction by 120 degrees. In a state in which the length in the Z-axis direction of one fixed column (not shown) is matched, for example, the holding surface 302, which is an extremely gentle conical slope, is parallel to the lower surface of the grinding wheel 1644. do not have. Also, in this state, the center 320 of the shaft 32 and the center of the chuck table 30 and the center 418 of the first pulley 41 are not displaced within the X-axis and Y-axis planes.

Next, as shown in FIG. 7, the chuck table is tilted by the tilt adjusting mechanism 34 so that the holding surface 302, which is an extremely gentle conical slope, is parallel to the grinding surface (lower surface) of the grinding wheel 1644 of the grinding mechanism 16. By adjusting the inclination of 30 , the holding surface 302 , which is a conical slope, becomes substantially parallel to the lower surface of the grinding wheel 1644 .
Specifically, for example, of the elevating columns, which are the electric actuators of the two tilt adjusting mechanisms 34 shown in FIG. 7, the +Y direction side area of the holding surface 302 of the chuck table 30 is relatively lifted more than the -Y direction side area. , and become substantially parallel to the lower surface of the grinding wheel 1644 . 6, the shaft 32, whose axis 320 is parallel to the vertical direction (Z-axis direction), is tilted counterclockwise by a predetermined angle when viewed from the front side of the paper. On the other hand, as shown in FIGS. 6 and 7, the first pulley 41 is connected to the bearing arrangement portion 40 attached to the bottom plate 392 of the base 39 via the second bearing 42, so that the change in inclination or the like is possible. does not occur Therefore, the distance between the first pulley 41 and the second pulley 45 in the horizontal direction does not change, and the tension of the endless belt 46 does not change and the endless belt 46 loosens. Therefore, the rotational power generated by the motor 44 is appropriately transmitted to the first pulley 41 in the state shown in FIG. 7 via the second pulley 45 and endless belt 46 .
It should be noted that only one of the tilt adjusting mechanisms 34 may be operated to change the tilt of the holding surface 302 .

By changing the inclination of the shaft 32 by the inclination adjusting mechanism 34, the center 418 of the first pulley 41 and the axial center 320 of the shaft 32 are aligned as shown in FIG. Also, the distance between the first plate 51 and the second plate 52 changes in the axial direction (Z-axis direction) of the shaft 32 . That is, there is a misalignment of the shaft centers, but this deviation is allowed by the three-dimensional coupling 5 .
FIG. 8 illustrates the three-dimensional coupling 5 in a state where the shaft 32 is tilted by the tilt adjusting mechanism 34 as described above and the first pulley 41 is not rotating from the rotation start position (rotation angle of 0 degree). FIG. 10 is a schematic plan view of the device. As shown in FIG. 8, since the shaft 32 is tilted by the tilt adjusting mechanism 34 as described above, the lower end of the shaft 32 is connected to the first plate 51 fixed in the horizontal plane. The second plate 52 is moved relatively in the +Y direction and is inclined with respect to the horizontal plane.
The position display P on the first pulley 41 shown in FIG. 8 moves as the first pulley 41 rotates.

In order to start grinding the workpiece 90, the motor 162 (see FIG. 1) rotates the rotating shaft 160 at a predetermined rotational speed, and accordingly the grinding wheel 164 shown in FIG. 7 also rotates. Then, the grinding mechanism 16 is fed in the −Z direction by the grinding feed mechanism 17 (see FIG. 1), and the rotating grinding wheel 1644 contacts the back surface 903 of the workpiece 90 to perform grinding.

On the holding mechanism 3 side, the motor 44 shown in FIG. 7 rotates the second pulley 45 counterclockwise when viewed from the +Z direction side, for example, so that the endless belt 46 rotates. The first pulley 41 rotatably supported by the second bearing 42 arranged in the bearing arrangement portion 40 rotates counterclockwise when viewed from the +Z direction side. As the first pulley 41 rotates, the first plate 51 fixedly connected to the lower surface 415 of the first pulley 41 rotates in the same direction.

Along with the first plate 51 that rotates counterclockwise when viewed from the +Z direction side, the floating block 58 having a rectangular outer shape in a plan view is, as shown in FIG. The inner surface of the first convex portion 55 on the side and the inner surface of the second convex portion 56 on the +X direction side of the pair of second convex portions 56 are provided with two outer surfaces forming one corner portion on the +X direction side. It comes into contact with a pressing force and moves freely in the area 57 so as to slide in the surface direction of the upper surface 524 of the second plate 52 . Therefore, the rotational force of the first plate 51 is transmitted to the second plate 52 through the floating block 58, and the second plate 52 and the shaft 32 connected to the second plate 52 also rotate at the rotational speed of the first plate 51. At the same rotational speed, it rotates counterclockwise when viewed from the +Z direction side. 9 shows a state in which the first pulley 41 has rotated 45 degrees counterclockwise from the rotation start position shown in FIG.

Further, from the state shown in FIG. 9, as shown in FIG. 10, the first pulley 41 is further rotated by 45 degrees (rotated by 90 degrees from the rotation start position shown in FIG. 8), and together with the rotating first plate 51, The floating block 58 moves in the surface direction of the upper surface 524 of the second plate 52 in the area 57 while pressing the inner surface of the second protrusion 56 on the +Y direction side of the pair of second protrusions 56 . to roam Therefore, the rotational force of the first plate 51 is transmitted to the second plate 52 via the floating block 58, and the second plate 52 rotates. Further, as shown in FIG. 11, the first pulley 41 rotates further 45 degrees from the state shown in FIG. 10 (135 degrees from the rotation start position shown in FIG. The block 58 includes the inner surface of the first convex portion 55 on the -X direction side of the pair of first convex portions 55 and the second convex portion 56 on the -X direction side of the pair of second convex portions 56. It contacts the inner side surface so as to press the two outer side surfaces forming one corner on the -X direction side, and floats in the surface direction of the upper surface 524 of the second plate 52 within the area 57 .

As shown in FIGS. 9 to 11, during rotation of the first pulley 41, the center 418 of the first pulley 41 and the axis 320 of the shaft 32 are displaced by a predetermined distance within the X-axis and Y-axis planes. 7 is appropriately transmitted to the first pulley 41 via the second pulley 45 and the endless belt 46 whose tension is unchanged, and furthermore, the second It is appropriately transmitted to the second plate 52 and the shaft 32 via the first pulley 41, the first plate 51, and the floating block 58. That is, the chuck table 30 connected to the upper end side of the shaft 32 to which the rotational force is appropriately transmitted and rotated also continues to rotate appropriately with the holding surface 302 substantially parallel to the lower surface of the grinding wheel 1644. be able to.

During grinding, as described above, the workpiece 90 held on the holding surface 302 rotates as the chuck table 30 shown in FIG. grinds the entire back surface 903 of the workpiece 90 . Grinding water passing through the flow path 169 is supplied to the contact portion between the grinding wheel 1644 and the workpiece 90 to cool and wash the contact portion.
After the workpiece 90 has been ground to a desired thickness, the grinding feed mechanism 17 lifts the grinding mechanism 16 upward, and the grinding wheel 1644 is separated from the workpiece 90 to finish grinding.

As described above, the present invention comprising the holding mechanism 3 that holds the workpiece 90 on the holding surface 302 and the processing mechanism 16 (grinding mechanism 16) that processes the workpiece 90 held on the holding surface 302. The processing apparatus 1 according to , the holding mechanism 3 includes a chuck table 30 having a holding surface 302 on its upper surface, a support plate 31 that supports the lower surface of the chuck table 30, a shaft 32 that hangs down from the center of the lower surface of the support plate 31, A housing 33 in which a first bearing 331 that rotatably supports the shaft 32 is arranged, a base 39 that supports the housing 33 and has an insertion opening 390 into which the shaft 32 is inserted, and inserted between the base 39 and the housing 33 A tilt adjustment mechanism 34 for adjusting the tilt of the shaft 32 by varying the length of at least one of at least three columns arranged to surround the port 390, and rotation for rotating the shaft 32 inserted into the insertion port 390. The rotation mechanism 4 includes a bearing arrangement portion 40 having an opening 403 corresponding to the insertion port 390 and in which the second bearing 42 is arranged, and an annular first bearing rotatably supported by the second bearing 42 A pulley 41, a three-dimensional coupling 5 that engages the first pulley 41 with the shaft 32 tilted by the tilt adjustment mechanism 34 and changed in height and horizontal position, and a base spaced apart from the shaft 32 in the horizontal direction. 39, a second pulley 45 connected to the rotating shaft of the motor 44, the first pulley 41 and the second pulley 45 are engaged with a predetermined tension, and the power of the motor 44 is transmitted to the shaft 32. , the tension of the endless belt 46 does not change even if the inclination of the shaft 32 is changed. Although the center deviates in the horizontal direction, it is possible to properly transmit the rotational power of the motor 44 to the shaft 32 even if the deviation occurs, so that the chuck table 30 can be properly rotated during the grinding process.

Further, in the processing apparatus 1 according to the present invention, the three-dimensional coupling 5 includes the first plate 51 having the first pulley 41 arranged on the upper surface 515 and the first opening 511 corresponding to the insertion port 390, and the first opening 511 A pair of first protrusions 55 hanging down from the lower surface 514 of the first plate 51 across the , a second plate 52 connected to the shaft 32 , and a second plate 90 degrees different from the first protrusions 55 in plan view A pair of second protrusions 56 erected on an upper surface 524 of 52 and having a shape similar to that of the first protrusions 55 , and a rectangular outer shape surrounded by the pair of first protrusions 55 and the pair of second protrusions 56 . and a floating block 58 having a second opening 582 into which the shaft 32 is inserted in the center, which is movable in the area 57 . Even if there is a horizontal misalignment, the rotational power of the motor 44 can continue to be properly transmitted to the shaft 32 by the floating block 58 that floats within the area 57 .

It goes without saying that the processing apparatus 1 according to the present invention is not limited to the above embodiment, and may be implemented in various forms within the scope of the technical idea. Moreover, each step of grinding the workpiece 90 using the processing apparatus 1 is not limited to this, and can be changed as appropriate within the range where the effects of the present invention can be exhibited.

For example, the processing apparatus 1 may include the three-dimensional coupling 7 of Embodiment 2 shown in FIG. 12 instead of the three-dimensional coupling 5 of Embodiment 1 shown in FIGS.
The three-dimensional coupling 7 includes a third plate 73 having a first pulley 41 arranged on an upper surface 735 and a third opening 733 corresponding to the insertion port 390 shown in FIG. A fourth plate 74 having a transmission opening 746 corresponding to a later-described rotational force transmitted portion 328 of the shaft 32 is connected to the third plate 73 and the fourth plate 74, and the fourth plate 74 is connected to the third plate 73. and a connection spring 76 that makes the inclination variable.

As shown in FIG. 12 , the first pulley 41 is rotatably supported by a second bearing 42 attached to the boss portion 401 of the bearing placement portion 40 . The configuration of the bearing arrangement portion 40, the second bearing 42, and the first pulley 41, and the configuration of connection are the same as those of the three-dimensional coupling 5 of the first embodiment.

For example, the upper surface 735 of the third plate 73 is fixed to the lower surface 415 of the first pulley 41, and the rotational power of the motor 44 shown in FIG. 73 also rotates.
The third plate 73 has, for example, an annular shape in plan view, and a circular third opening 733 is formed in the center.

Three long plate-like connecting springs 76 are connected to the outer surface of the third plate 73 at regular intervals of 120 degrees, for example, in the circumferential direction of the third plate 73 with the Z-axis direction as the longitudinal direction. Also, the lower end side of each connecting spring 76 is connected to the outer surface of the fourth plate 74 .

The fourth plate 74 is, for example, circular in plan view and has the same outer diameter as the outer diameter of the third plate 73. In the center of the fourth plate 74, for example, a transmission opening 746, which is rectangular in plan view, is formed through the thickness direction. ing. The center of the fourth plate 74 and the center of the third plate 73 substantially coincide with each other when the connecting spring 76 is in its natural length without deformation.

The lower portion of the shaft 32 when used together with the three-dimensional coupling 7 of Embodiment 2 has a rectangular cross section that fits in the transmission opening 746, as shown in FIG. becomes. The shaft 32 is inserted through the opening 403 of the bearing arrangement portion 40, the second bearing 42, and the third opening 733 of the third plate 73 in order from the top, and the rotational force receiving portion 328 is inserted into the transmission opening of the fourth plate 74. By fitting it to 746 , it is possible to transmit the rotational force from the fourth plate 74 to the shaft 32 .

The diameter of the circular opening 403 of the bearing arrangement portion 40 and the diameter of the third opening 733 of the third plate 73 are formed larger than the diameter of the shaft 32, and the opening 403 and the third opening 733 are inserted. Tilting motion of shaft 32 is permitted.

For example, when used together with the three-dimensional coupling 7 of Embodiment 2, a convex rotational force receiving portion 327 is formed on the lower side surface of the shaft 32, which has a cylindrical shape as a whole, as shown in FIG. good too. Correspondingly, as shown in FIG. 13, the transmission opening of the fourth plate 74 is a transmission opening 746 having a shape combining a circular shape into which the convex rotational force receiving portion 327 is fitted and a concave shape. It may be If the rotational force transmitted portion 327 of the shaft 32 has a concave shape, the transmission opening 746 of the fourth plate 74 may also have a corresponding convex shape directed toward the inside of the circular opening.

The rotation of the chuck table 30 during grinding of the workpiece 90 when the processing apparatus 1 shown in FIG. 1 includes the three-dimensional coupling 7 of Embodiment 2 shown in FIG. 12, for example, will be described below.
The process up to the positioning of the chuck table 30 sucking and holding the workpiece 90 with respect to the grinding wheel 1644 is the same as the case described above.

The inclination of the chuck table 30 is adjusted by the inclination adjustment mechanism 34 shown in FIG. As a result, the upper surface 903 of the workpiece 90 sucked and held following the holding surface 302 which is a conical slope becomes substantially parallel to the lower surface of the grinding wheel 1644 .
Here, since the first pulley 41 is connected via the second bearing 42 to the bearing arrangement portion 40 attached to the bottom plate 392 of the base 39, the inclination does not change. Therefore, the rotational power generated by the motor 44 is appropriately transmitted to the first pulley 41 via the second pulley 45 and the endless belt 46 in which slackness or the like has not occurred.

On the other hand, when the shaft 32 is tilted, the center 418 of the first pulley 41 and the axis 320 of the shaft 32 are misaligned within the X-axis and Y-axis planes. Allowed by dimensional coupling 7. Further, although the shaft 32 is displaced in the axial direction (Z-axis direction) of the shaft 32 , it is allowed by the rotational force transmitted portion 328 sliding in the transmission opening 746 in the Z-axis direction. That is, since the rotational force receiving portion 328 of the shaft 32 is slidably fitted in the transmission opening 746 of the fourth plate 74, the tilting of the shaft 32 causes the fourth plate 74 to be parallel to the horizontal plane. A predetermined angle is tilted from the state, and the rotational force transmitted portion 328 slides in the transmission opening 746 in the Z-axis direction. Here, the connecting spring 76 is deformed to allow the tilting of the fourth plate 74, and the shaft 32 is also tilted within the opening 403 of the bearing arrangement portion 40 and within the third opening 733 of the third plate 73. is allowed.

On the holding mechanism 3 side, the motor 44 shown in FIG. 7 rotates the second pulley 45 counterclockwise when viewed from the +Z direction side, for example, so that the endless belt 46 rotates. The first pulley 41 rotatably supported by the second bearing 42 arranged in the bearing arrangement portion 40 rotates counterclockwise when viewed from the +Z direction side. As the first pulley 41 rotates, it is connected via the third plate 73 shown in FIG. The fourth plate 74 rotates in the same direction together with the third plate 73 and the connecting spring 76 .

As described above, while the first pulley 41 is rotating, the center 418 of the first pulley 41 and the axial center 320 of the shaft 32 are deviated by a predetermined distance within the X-axis and Y-axis planes. is appropriately transmitted to the first pulley 41 via the second pulley 45 and the endless belt 46 whose tension is unchanged, and furthermore, the rotating first pulley 41 and the rotating third plate 73 , and through the transmission opening 746 of the fourth plate 74 connected to the rotating third plate 73 via the connecting spring 76 , the torque is appropriately transmitted to the shaft 32 by the rotational force transmitted portion 327 . That is, the chuck table 30 connected to the upper end side of the shaft 32 should also continue to rotate properly with the holding surface 302 substantially parallel to the lower surface of the grinding wheel 1644 (holding surface 302 is inclined). can be done.

As described above, in the processing apparatus 1 according to the present invention, the shaft 32 includes the rotational force receiving portion 327 whose lower cross section is formed into, for example, a rectangle, and the three-dimensional coupling 7 of Embodiment 2 has the upper surface 735 A third plate 73 on which the first pulley 41 is arranged and has a third opening 733 corresponding to the insertion port 390 of the base 39; By providing a fourth plate 74 having an opening 746 and a connection spring 76 that connects the third plate 73 and the fourth plate 74 and allows the inclination of the fourth plate 74 to be variable with respect to the third plate 73 , even if the inclination of the shaft 32 is changed so that the axis of the shaft 32 and the center of the first pulley 41 are shifted in the horizontal direction, the connecting spring 76 is deformed (the inclination of the shaft 32 is allowed). ), the tension of the endless belt 46 does not change, and the rotational power of the motor 44 can be appropriately transmitted to the shaft 32 during grinding to rotate the chuck table 30 .

90: Workpiece 900: Front surface 903: Upper surface (back surface)
1: Processing device 10: Device base 11: Column 13: Horizontal movement unit 130: Ball screw 132: Motor 16: Grinding mechanism (processing mechanism) 164: Grinding wheel 1644: Grinding wheel 17: Grinding feed mechanism 170: Ball screw 172: Lifting motor 12: Height position detection unit 123: Reader 104: Thickness measurement unit 3: Holding mechanism 30: Chuck table 300: Adsorption unit 301: Frame 302: Holding surface 305: Cover unit 31: Support plate 32: Shaft 323: Shaft 321: Lower portion of shaft 33: Housing 331: First bearing 39: Base 390: Insertion port 396: Side plate 394: Top plate 392: Bottom plate 34: Tilt adjustment mechanism 4: Rotation mechanism
40: Bearing placement portion 400: Plate base 4006: Lower surface of plate base 401: Boss portion 403: Opening 4002: Bolt hole 41: First pulley 42: Second bearing 420: Inner ring 422: Rolling ball 423: Outer ring
44: Motor 45: Second pulley 46: Endless belt 5: Three-dimensional coupling of Embodiment 1 51: First plate 510: Plate portion 511: First opening 514: Lower surface of first plate 515: Upper surface of first plate 55: Pair of first protrusions 52: Second plate 520: Plate portion 524: Upper surface of second plate 525: Shaft connecting portion 526: Bolt insertion hole 523: Suction hole 56: Pair of second protrusions 529: Rotary joint 57: Area 58: Floating block 582: Second opening
7: Three-dimensional coupling of Embodiment 2 73: Third plate 733: Third opening
74: Fourth plate 746: Transmission opening 76: Connection spring 32: Shaft 328: Torque force receiving portion 327: Convex shape torque receiving portion

Claims (3)

A processing apparatus comprising a holding mechanism for holding a workpiece on a holding surface and a machining mechanism for machining the workpiece held on the holding surface,
The retention mechanism is
A housing in which a chuck table having the holding surface on its upper surface, a support plate supporting the lower surface of the chuck table, a shaft hanging down from the center of the lower surface of the support plate, and a first bearing rotatably supporting the shaft are arranged. a base supporting the housing and having an insertion opening into which the shaft is inserted; and at least one of at least three pillars disposed between the base and the housing so as to surround the insertion opening. An inclination adjustment mechanism for adjusting the inclination of the shaft by varying the length, and a rotation mechanism for rotating the shaft inserted into the insertion port,
The rotating mechanism is
a bearing arrangement portion having an opening corresponding to the insertion port and for arranging the second bearing;
an annular first pulley rotatably supported by the second bearing;
a three-dimensional coupling that engages the first pulley with the shaft whose tilt, height and horizontal position are changed by the tilt adjusting mechanism;
a motor horizontally spaced from the shaft and disposed on the base;
a second pulley connected to the rotating shaft of the motor;
an endless belt that engages the first pulley and the second pulley with a predetermined tension and transmits the power of the motor to the shaft;
A processing apparatus characterized in that the tension of the endless belt does not change when the inclination of the shaft changes. The three-dimensional coupling is
a first plate having the first pulley disposed on its upper surface and having a first opening corresponding to the insertion port;
a pair of first protrusions hanging down from the lower surface of the first plate across the first opening;
a second plate connected to the shaft;
a pair of second protrusions erected on the upper surface of the second plate with a difference of 90 degrees from the first protrusions in plan view and having a shape similar to the first protrusions;
2. A floating block having a rectangular outer shape, movable in an area surrounded by the pair of first projections and the pair of second projections, and having a second opening in the center for inserting the shaft. Processing equipment as described. The shaft is
Equipped with a rotational force transmitting part having a rectangular cross section at the bottom or having a convex or concave shape on the side surface of the bottom,
The three-dimensional coupling includes a third plate on which the first pulley is arranged and which has a third opening corresponding to the insertion port;
a fourth plate disposed below the third plate and provided with a transmission opening corresponding to the rotational force transmitted portion in the center;
2. The processing apparatus according to claim 1, further comprising a connection spring that connects the third plate and the fourth plate and allows the inclination of the fourth plate to be variable with respect to the third plate.

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