JP2022134312A5 - - Google Patents

Download PDF

Info

Publication number
JP2022134312A5
JP2022134312A5 JP2021033367A JP2021033367A JP2022134312A5 JP 2022134312 A5 JP2022134312 A5 JP 2022134312A5 JP 2021033367 A JP2021033367 A JP 2021033367A JP 2021033367 A JP2021033367 A JP 2021033367A JP 2022134312 A5 JP2022134312 A5 JP 2022134312A5
Authority
JP
Japan
Prior art keywords
pressure
circuit board
measuring device
sensor case
washer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021033367A
Other languages
Japanese (ja)
Other versions
JP2022134312A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2021033367A priority Critical patent/JP2022134312A/en
Priority claimed from JP2021033367A external-priority patent/JP2022134312A/en
Priority to CN202210196820.7A priority patent/CN115014630B/en
Priority to KR1020220026788A priority patent/KR102628745B1/en
Publication of JP2022134312A publication Critical patent/JP2022134312A/en
Publication of JP2022134312A5 publication Critical patent/JP2022134312A5/ja
Pending legal-status Critical Current

Links

Description

本発明は、前記圧力測定装置において、前記回路基板は、前記導圧路の前記開口端が指向する方向が厚み方向となる状態で前記ボディに固定され、前記回路基板における、前記導圧路の前記開口端と対向する位置に貫通穴が形成されていてもよい。
本発明は、前記圧力測定装置において、前記回路基板は、前記導圧路の前記開口端が指向する方向と直交する方向が厚み方向となる状態で前記ボディに固定され、前記細管は、前記センサケースに接続される一端部に対して前記ワッシャに接続される他端部が垂直となるように曲げられていてもよい。
In the pressure measuring device according to the present invention, the circuit board is fixed to the body in a state in which the direction in which the open end of the pressure guide path is oriented is the thickness direction, and the pressure guide path in the circuit board A through hole may be formed at a position facing the open end.
In the pressure measuring device according to the present invention, the circuit board is fixed to the body in a state in which the thickness direction is perpendicular to the direction in which the open end of the pressure guide path is oriented, and the thin tube is the sensor. The other end connected to the washer may be bent perpendicular to the one end connected to the case.

Claims (5)

測定対象であるプロセス流体の圧力を受圧する受圧ダイアフラムを備え、
前記受圧ダイアフラムとの間に充填された圧力伝達媒体の圧力を受圧して圧力を検出する圧力センサチップと、
前記圧力センサチップを収容するセンサケースとが内部空間に設置されたボディを有する圧力測定装置であって、
前記センサケースは、絶縁材料によって形成されているとともに、前記圧力伝達媒体の圧力を前記圧力センサチップに導入するための開口部を有し、
前記ボディは、前記受圧ダイアフラムを壁の一部として形成されて前記圧力伝達媒体の一部を収容する圧力伝達室から前記ボディの前記内部空間に通じる導圧路を有し、
前記ボディの前記内部空間には、
前記導圧路における前記ボディの前記内部空間に通じる開口端に装着された、貫通孔を有するステンレス製のワッシャと、
前記ワッシャの前記貫通孔にその一端が挿入されて接合されるとともに、その他端が前記センサケースの前記開口部を貫通して前記圧力センサチップに連通する、内部に前記圧力伝達媒体が充填された細管と、
前記圧力センサチップの検出出力から電気信号を生成する電気回路が搭載された回路基板とが設けられ、
前記センサケースは、前記回路基板上に載置されていることを特徴とする圧力測定装置。
Equipped with a pressure-receiving diaphragm that receives the pressure of the process fluid to be measured,
a pressure sensor chip that receives the pressure of the pressure transmission medium filled between the pressure receiving diaphragm and detects the pressure;
A pressure measuring device having a body in which a sensor case containing the pressure sensor chip is installed in an internal space,
the sensor case is made of an insulating material and has an opening for introducing the pressure of the pressure transmission medium to the pressure sensor chip;
the body has a pressure transmission chamber formed with the pressure receiving diaphragm as a part of a wall and containing a part of the pressure transmission medium, and a pressure transmission path leading to the internal space of the body;
The internal space of the body includes:
a stainless steel washer having a through-hole attached to the open end of the pressure guide path communicating with the internal space of the body;
One end of the washer is inserted into and joined to the through hole of the washer, and the other end of the washer passes through the opening of the sensor case to communicate with the pressure sensor chip, and the interior is filled with the pressure transmission medium. a tubule;
a circuit board mounted with an electric circuit for generating an electric signal from the detection output of the pressure sensor chip;
A pressure measuring device, wherein the sensor case is mounted on the circuit board.
請求項1に記載の圧力測定装置において、
前記回路基板は、端部に前記細管を通す切欠きを有し、
前記センサケースは、前記回路基板上の前記切欠きの周辺部に載置されていることを特徴とする圧力測定装置。
The pressure measurement device according to claim 1,
The circuit board has a notch at the end for the thin tube to pass through,
The pressure measuring device, wherein the sensor case is placed on the periphery of the notch on the circuit board.
請求項2に記載の圧力測定装置において、
前記回路基板は、前記導圧路の前記開口端が指向する方向が厚み方向となる状態で前記ボディに固定され、
前記回路基板における、前記導圧路の前記開口端と対向する位置に貫通穴が形成されていることを特徴とする圧力測定装置。
In the pressure measuring device according to claim 2,
the circuit board is fixed to the body in a state in which the direction in which the open end of the pressure guiding path is oriented is the thickness direction;
A pressure measuring device, wherein a through hole is formed in the circuit board at a position facing the open end of the pressure guiding path.
請求項2に記載の圧力測定装置において
前記回路基板は、前記導圧路の前記開口端が指向する方向と直交する方向が厚み方向となる状態で前記ボディに固定され、
前記細管は、前記センサケースに接続される一端部に対して前記ワッシャに接続される他端部が垂直となるように曲げられていることを特徴とする圧力測定装置。
In the pressure measuring device according to claim 2 ,
the circuit board is fixed to the body in a state in which a direction orthogonal to a direction in which the opening end of the pressure guiding path is oriented is a thickness direction;
The pressure measuring device, wherein the narrow tube is bent such that the other end connected to the washer is perpendicular to the one end connected to the sensor case.
請求項2ないし請求項4に記載の圧力測定装置において、
前記回路基板における前記切欠きの穴部分を囲む3つの辺を形成する部分に、前記電気回路に接続された半田付け用ランドがそれぞれ設けられ、
前記センサケースの前記回路基板に載置される載置面である底面に、前記半田付け用ランドと接続して導通する電極パッドが設けられていることを特徴とする圧力測定装置。
In the pressure measuring device according to claims 2 to 4 ,
Soldering lands connected to the electric circuit are provided in portions forming three sides surrounding the hole portion of the notch in the circuit board, respectively;
A pressure measuring device, wherein electrode pads are provided on a bottom surface of the sensor case, which is a mounting surface to be mounted on the circuit board, and are electrically connected to the soldering lands.
JP2021033367A 2021-03-03 2021-03-03 Pressure measuring device Pending JP2022134312A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021033367A JP2022134312A (en) 2021-03-03 2021-03-03 Pressure measuring device
CN202210196820.7A CN115014630B (en) 2021-03-03 2022-03-01 Pressure measuring device
KR1020220026788A KR102628745B1 (en) 2021-03-03 2022-03-02 Pressure measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021033367A JP2022134312A (en) 2021-03-03 2021-03-03 Pressure measuring device

Publications (2)

Publication Number Publication Date
JP2022134312A JP2022134312A (en) 2022-09-15
JP2022134312A5 true JP2022134312A5 (en) 2022-12-19

Family

ID=83067498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021033367A Pending JP2022134312A (en) 2021-03-03 2021-03-03 Pressure measuring device

Country Status (3)

Country Link
JP (1) JP2022134312A (en)
KR (1) KR102628745B1 (en)
CN (1) CN115014630B (en)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521350Y2 (en) 1972-08-23 1977-01-13
US4841777A (en) 1988-03-22 1989-06-27 Honeywell Inc. Pressure transmitter assembly
JP2000111434A (en) 1998-10-06 2000-04-21 Hokuriku Electric Ind Co Ltd Capacitance type pressure sensor unit
DE10107813A1 (en) * 2001-02-20 2002-09-05 Bosch Gmbh Robert Pressure sensor module
JP3847281B2 (en) 2003-08-20 2006-11-22 株式会社山武 Pressure sensor device
JP5912675B2 (en) * 2012-03-05 2016-04-27 アズビル株式会社 Differential pressure transmitter
JP6037112B2 (en) * 2012-11-07 2016-11-30 富士電機株式会社 Differential pressure / pressure transmitter
JP5926858B2 (en) * 2013-03-28 2016-05-25 株式会社フジキン Pressure detector mounting structure
CN204461670U (en) * 2015-03-04 2015-07-08 苏州敏芯微电子技术有限公司 A kind of pressure sensor packaging structure
CN105424272A (en) * 2015-12-28 2016-03-23 黄山迈普汽车部件有限公司 vacuum degree sensor suitable for plateau
JP6559584B2 (en) * 2016-01-22 2019-08-14 アズビル株式会社 Welded structure of welding tube and welding method
US10545064B2 (en) * 2017-05-04 2020-01-28 Sensata Technologies, Inc. Integrated pressure and temperature sensor
CN206945209U (en) * 2017-07-31 2018-01-30 李峰 A kind of pressure sensor assembling structure
CN109186851A (en) * 2018-09-27 2019-01-11 江苏德尔森控股有限公司 A kind of many reference amounts differential pressure pick-up
JP6584618B2 (en) * 2018-10-03 2019-10-02 アルプスアルパイン株式会社 Sensor package
CN210893490U (en) * 2019-11-25 2020-06-30 松诺盟科技有限公司 Pressure sensor can be dismantled to simple

Similar Documents

Publication Publication Date Title
JP5394564B2 (en) Capacitance pressure sensor with vacuum dielectric
KR101766144B1 (en) A pressure sensor having a temperature sensor
CN107817015A (en) Integrated form pressure and temperature sensor
JP2009517675A (en) Pressure and temperature sensor
JP2010256187A (en) Pressure sensor
RU2012157960A (en) DIFFERENTIAL PRESSURE SENSOR WITH PRESSURE MEASUREMENT IN THE LINE
JP2009544028A (en) Pressure detection device
JP2022134312A5 (en)
KR20130140256A (en) Pressure sensor with temperature-sensing element and mounting structure of the same
CN113167614A (en) Magnetic-inductive flow sensor and measuring point
CN216954626U (en) Temperature and pressure sensor
WO2012144454A1 (en) Connector and detecting device using same
CN114427887A (en) Temperature and pressure sensor
JP2010008434A (en) Semiconductor pressure sensor
CN112444339A (en) Differential pressure sensor test fixture and differential pressure sensor test system
JP5240763B2 (en) Ultrasonic flow meter
JP2020165760A (en) Ultrasonic flowmeter
JP6191507B2 (en) Temperature sensor
JPH0454419Y2 (en)
CN214373116U (en) Differential pressure sensor detection device and differential pressure sensor detection system
WO2022085497A1 (en) Pressure and temperature sensor
JP2008082969A (en) Pressure sensor
JP2000131174A (en) Pressure-measuring device
KR20220124648A (en) Pressure measuring device
JPH0425630Y2 (en)