JP2022124680A - Ozone generation device and ozone generation method - Google Patents

Abstract

To generate ozone according to a size of a space of a use site in an ozone generation device using an excimer lamp while suppressing a load on the device.SOLUTION: An ozone generation device 10 comprises an excimer lamp 30, an air blower 40, and an operation part 50 which can set a size of a space as a subject to be ozone-treated. The ozone generation device continuously carries out an ozone generation operation performed by intermittent lighting of the excimer lamp 30 and continuous operation of the air blower 40 during the ozone generation operation according to the size of the space as the subject to be ozone-treated of a placement site.SELECTED DRAWING: Figure 1

Description

The present invention relates to an ozone generator and method using an excimer lamp.

An ozonizer equipped with an excimer lamp generates ozone by irradiating ultraviolet rays from the excimer lamp, and discharges the ozone to the outside by a blower fan or the like. The amount of ozone generated per unit time required for sterilization, deodorization, etc. varies depending on the spatial volume (floor area) of the installation location of the device. Therefore, an operation unit is provided to set the amount of generated ozone according to the space volume of the room. It is performed intermittently at sufficient intervals (see Patent Document 1, for example).

On the other hand, in order to prevent ozone from affecting the human body, it is possible to adjust the amount of generated ozone by providing an ozone sensor for detecting the concentration of ozone. When the detected ozone concentration exceeds the upper limit, the ozone generation operation is stopped, and when the detected ozone concentration falls below the lower limit, the ozone generation operation is restarted, thereby facilitating use in a room where people are always present (see Patent Document 2). ).

Japanese Utility Model Laid-Open No. 6-19737 JP 2012-34771 A

As the spatial volume of the installation location of the device increases, it is necessary to increase the ozone generation amount and the air flow in order to maintain a predetermined ozone concentration in the room for a predetermined exposure time for sterilization and deodorization. In this case, it is desirable from the viewpoint of work efficiency that the desired ozone concentration is reached in a short period of time after starting the ozone generating operation. However, in the ultraviolet irradiation type ozone generation method using an excimer lamp, high-concentration ozone is likely to be generated in a short period of time, and gas with uneven ozone concentration is likely to be discharged outside the apparatus.

Therefore, in order to reach the target ozone concentration as quickly as possible, if the diffusion of ozone in the room is insufficient while ozone is being discharged into the room, the spatial region of the gas with high or low ozone concentration will be large. Occur locally. As a result, the ozone sensors placed around the ozone generator sequentially respond to changes in the ozone concentration, causing the ozone generation operation to be stopped and restarted excessively, causing a load ( stress) increases, causing deterioration of the device. In particular, excimer lamps, which are lit by application of a high-frequency high voltage, use a step-up transformer of a power supply circuit or electrodes sealed to quartz glass, and therefore are greatly affected by device deterioration from the standpoint of maintaining insulation.

Therefore, in an ozone generator that uses an excimer lamp, it is required to generate ozone in accordance with the size of the space where sterilization and deodorization treatment is performed using ozone, while suppressing the load on the device. .

The ozone generator of the present invention controls an excimer lamp that generates ozone by irradiating ultraviolet rays, a blower that discharges gas containing ozone toward a space to be ozonized, and an ozone generation operation by turning on the excimer lamp and operating the blower. and a control unit. For example, the ozone generator can be configured as a compact device, for example, configured such that the excimer lamp is placed in the gas flow by the blower. Alternatively, it can be arranged so as to face the discharge port for discharging the gas containing ozone toward the space to be ozonated and the supply port of the blower.

In the present invention, the ozone generator controls the ozone generation operation by associating the ultraviolet irradiation amount of the excimer lamp with the air volume of the blower according to the size of the space to be ozonized. For example, it is feasible for a controller that wholly or partially controls the operation of the ozone generator to comprise such an operation controller.

The "size of the space to be treated with ozonation" here can be interpreted as "floor area" because it can be determined not only by the volume of the space, but also by the floor area, taking into consideration the fact that the height of the room is approximately constant. It is also possible to Various operation controls can be realized in the "ozone generation operation control in which the ultraviolet irradiation amount (also called radiation amount) of the excimer lamp and the air volume of the blower are associated". For example, operation control based on a change in continuous lighting of an excimer lamp, intermittent lighting, periodicity during intermittent lighting, non-periodicity, extinguishing time during intermittent lighting or length of lighting time. is included. In addition, it is possible to control the operation based on the magnitude of the lighting time and the light-off time of periodic blinking that repeats the lighting time and the light-off time, and the air volume of the fan associated with the timing.

The ozone generator can continuously generate ozone by intermittently turning on the excimer lamp and continuously operating the blower based on the amount of ozone generated and the air volume determined according to the size of the space to be ozonized. It is possible. For example, the excimer lamp can be flashed according to the set constant lighting time and extinguishing time, and the blower can be operated at the set constant air volume.

In this case, the larger the space to be ozonated, the longer the excimer lamp cyclically blinks and the shorter the turn-off time, and the air volume of the blower can be set to increase continuously or stepwise. is. For example, the lighting time can be set within a range of 0.1 second to 1 second, and the lighting time can be set within a range of 0.1 second to 10 seconds.

On the other hand, the excimer lamp can also be placed in the gas flow by the blower, turned off before the lamp surface temperature reaches the maximum after the lamp is turned on, and turned on after the lamp is turned off before the lamp surface temperature reaches the minimum. Further, when the excimer lamp emits ultraviolet rays having a peak wavelength of 172 nm, a certain lighting time and lighting time are set so that the change in lamp surface temperature between when the lamp is on and when the lamp is off is less than 30%. It may also be arranged that the light flashes in a cycle according to time, and the blower operates at a constant air volume set according to the flashing cycle.

For example, an ozone sensor capable of detecting the ozone concentration at a position corresponding to the size of the space to be ozonized may be further provided. For example, when the excimer lamp blinks periodically, the ozone sensor may detect the ozone concentration at time intervals longer than the time interval of the excimer lamp blinking cycle. When an ozone concentration exceeding a predetermined threshold value is detected, the ozone generator temporarily suspends the flickering operation of the excimer lamp, while continuing the operation of the blower.

According to another aspect of the present invention, there is provided an ozone generating method in which the amount of ozone generated and the amount of wind are set according to the size of the space to be ozonized set by the operator, and the ultraviolet irradiation amount of the excimer lamp according to the amount of ozone generated. and an air volume, an excimer lamp is irradiated with ultraviolet rays, and an air blower is operated to emit ozone-containing gas generated by ultraviolet irradiation from an ozone generator into a space to be treated with ozone, comprising: During the ozone generation operation, the excimer lamp is lit intermittently and the blower is operated continuously.

According to the present invention, in an ozone generator using an excimer lamp, ozone can be generated according to the size of the space where sterilization and deodorization processing is performed, while suppressing the load on the device. can.

It is a schematic internal block diagram of the ozone generator which is this embodiment. It is a block diagram of an ozone generator. FIG. 10 shows a table showing the correspondence relationship between the amount of ozone generated according to the size of the processing space, the ratio of the excimer lamp lighting time to the extinguishing time of the blinking operation of the excimer lamp according to the ozone generation amount, and the PWM duty ratio of the blower. FIG. 10 is a diagram showing a timing chart of blinking operation of excimer lamps according to the size of the processing space;

Embodiments of the present invention are described below with reference to the drawings.

FIG. 1 is a schematic internal configuration diagram of an ozone generator according to this embodiment.

The ozone generator 10 includes an excimer lamp 30 and a blower (here, an axial air supply fan) 40 in a housing 20, and extends from the housing 20 to a space to be subjected to ozone treatment (such as disinfection and deodorization using ozone). It is possible to perform sterilization and deodorization processing using the gas containing ozone discharged into the target space. The ozone generator 10 here is configured as a compact device that can be carried and used in various ozone processing spaces (hereinafter also referred to as target spaces) such as hotel guest rooms, shared spaces in entertainment facilities, and hospital beds. can be installed directly above, for example.

In the ozone generator 10 , the raw material gas (here, air) flows from the bottom 20</b>A of the housing (flow pipe) 20 due to the operation of the air blower 40 . The excimer lamp 30 is arranged so that the lamp axis E is arranged in the vertical direction of the device, that is, along the flow path FP, so as to face the source gas supply port on the downstream side of the blower 40. are arranged coaxially with respect to the housing 20 at . The excimer lamp 30 may be arranged on the side wall side of the housing 20 instead of the center side, and the lamp axis E may be arranged in the lateral direction (horizontal direction) of the apparatus.

On the upper surface side of the housing 20 of the ozone generator 10, an operation unit 50 operated for setting an ozone generation operation switch, an ozone generation operation time, etc. is provided, and an opening (hereinafter referred to as an outlet) is provided around it. 20B is formed at a position facing the excimer lamp 30. As shown in FIG. When the operator sets the ozone generation operation time and operates the ozone generation operation switch or the like to start the ozone generation operation, the blower 40 is operated and the excimer lamp 30 is lit.

The excimer lamp 30 irradiates the source gas (fluid) rising inside the housing 20 with ultraviolet rays, thereby generating ozone. The generated gas containing ozone flows out from an opening (hereinafter referred to as an outlet) 20B, and is discharged through the opening 20B toward the ozone treatment target space outside the apparatus. When the time set by the timer setting (hereinafter referred to as the ozone generation operation time) has elapsed, the ozone generation operation ends.

An ozone sensor 100 for detecting ozone concentration is connected to the ozone generator 10 via a cable CB having a predetermined length. Here, a plurality of cables CB are prepared according to the size of the space volume or the space floor area to be disinfected and deodorized at the installation location. Specifically, a cable CB corresponding to the length of one side of the floor of the installation site or the length of the diagonal line is prepared. The ozone sensor may be wirelessly connected to the ozone generator, or a human sensor may be provided.

FIG. 2 is a block diagram of the ozone generator 10. As shown in FIG.

The control unit 60 controls the operation of the ozone generator 10 and outputs control signals to the blower 40, the power supply unit 70, etc. based on the operation signal from the operation unit 50. FIG. A power supply unit 70 including a step-up transformer and the like controls lighting (voltage application) of the excimer lamp 30 based on a control signal from the control unit 60 . The blower 40 is operated by PWM control here.

The operation unit 50 is provided with a plurality of button type switches such as an ozone generation operation switch. In addition, a display unit is provided for displaying the space volume or floor area where sterilization and deodorization processing is performed at the installation location where the device is used, the ozone concentration level, the ozone generation operation time, etc. set by the operation unit 50. ing. It should be noted that the configuration may be such that the information is displayed on a touch panel screen or the like.

An operator who uses the ozone generator can select and set the ozone generation operation time, the ozone concentration level, the size of the installation location (processing space), etc. by operating the operation unit 50 of the ozone generator 10. is possible. The control unit 60 sets values and levels such as the selected ozone generation operation time, ozone concentration level, and size of the installation location (processing space), and sets the selected time, level, and size of the installation location. and change the settings according to changes in level, etc.

When the operator operates the ozone generating operation switch of the operation unit 50, the ozone generating operation starts, and when the set ozone generating operation time elapses, the ozone generating operation ends. The controller 60 temporarily suspends the ozone generation operation when the ozone concentration detected by the ozone sensor 100 exceeds a predetermined threshold (for example, the ozone concentration that affects the human body) during the ozone generation operation.

During the ozone generation operation, the ozone generator 10 performs the ozone generation operation by intermittently lighting the excimer lamp 30 and continuously operating the air blower 40 according to the size of the space where the sterilization/deodorization treatment is performed. continue to run. This will be described in detail below.

FIG. 3 shows the amount of ozone generated according to the size of the processing space (room size), the ratio of the excimer lamp 30 lighting time to the turning off time during the blinking operation of the excimer lamp 30 according to the ozone generation amount, and the blower (air supply fan) 40. 10 shows a table showing the correspondence relationship between , and the PWM duty ratio. FIG. 4 is a diagram showing a timing chart of blinking operation of the excimer lamp 30 according to the size of the processing space.

By setting the space to be treated with ozone to a given ozone concentration and a given exposure time (treatment time for sterilization and deodorization using ozone), the amount of ozone generated (generation amount) differs depending on the size of the processing space where the ozone generator 10 is installed. Therefore, as shown in Table T in FIG. 3, the amount of ozone generated per unit time (mg/h) is set to a larger value as the size of the processing space (room size) increases. The amount of ozone generated here is proportional to the size of the processing space.

As described above, the operator can input and set the size of the processing space at the installation location through the operation unit 50, and the ozone generation amount is determined according to the size of the selected processing space. In addition, since the height to the ceiling is usually common between buildings, the size of the processing space is replaced by the size of the floor area of the room (room size in Fig. 3), and the amount of ozone generation is determined by the floor area determined according to the size of

For example, it is possible to set the size of the processing space to be smaller than the size of the room. All that is necessary is to set the size of the processing space. Furthermore, by setting the ozone concentration level according to the conditions of the room, the ozone concentration (ozone generation amount and air volume) set according to the size of the processing space can be adjusted to the gas containing ozone at a higher or lower concentration. can also be released.

The amount of ozone generated follows (proportionally) to the amount of UV irradiation from the excimer lamp 30, but compared to discharge-type ozone generators, high-concentration ozone is likely to be generated at the moment the lamp is turned on. By the way, since the ozone generator 10 is configured as a compact type device as described above, the excimer lamp 30 is arranged to face the inflow port 20A (fluid supply port portion of the blower 40) and the outflow port 20B near each other. be.

As a result, the inflow port 20A and the outflow port 20B are set at the minimum distance or close to the minimum distance that can prevent dielectric breakdown between the excimer lamp 30 and the inflow port 20A. In particular, here, the distance between one end of the excimer lamp 30 on the outflow port 20B side and the outflow port 20B along the axis E of the housing 20 is the distance between the inflow port 20A and one end of the excimer lamp 30 on the inflow port 20A side. shorter than the interval. Therefore, immediately after the excimer lamp 30 starts lighting, gas containing high-concentration ozone is likely to be released to the outside of the apparatus.

Also, if the surface temperature of the excimer lamp 30 rises too much, the ultraviolet illuminance decreases. In particular, this tendency is remarkable in the case of ultraviolet rays having a peak wavelength of 200 nm or less (for example, 172 nm). In general, the decomposition of ozone generated by ultraviolet irradiation is accelerated as the temperature rises. Specifically, ozonolysis starts at about 40°C and becomes active at about 60°C. Therefore, if the surface temperature of the excimer lamp 30 rises too much, decomposition of the generated ozone will be accelerated and the ozone generation efficiency will decrease.

At this time, if the flow rate of the gas flowing around the excimer lamp 30 is low with respect to the length of the lighting time of the excimer lamp 30, the cooling of the excimer lamp 30 is insufficient, resulting in an overheated state, which leads to a decrease in illuminance and an increase in ozone concentration. Uneven gas is likely to be released outside the device. As a result, a situation arises in which ozone stays around the ozone generator and is not sufficiently diffused. Thus, the amount of ozone generated and the amount of ozone decomposed are also affected by the lamp cooling conditions due to the gas flow around the excimer lamp 30 , that is, the air volume of the blower 40 .

In this embodiment, during the ozone generation operation, ozone generation operation control is performed in which lighting of the excimer lamp 30 and operation of the blower 40 are associated with each other. Specifically, the excimer lamps 30 perform intermittent lighting in which lighting and extinguishing are repeated according to a predetermined fixed period of time, that is, blinking at a fixed cycle. Instead of executing the ozone generating operation once or a plurality of times at intervals of time, the ozone generating operation is set by combining the intermittent lighting of the excimer lamp 30 with periodicity and the continuous operation of the blower 40. Continue until the specified ozone generation operation time has elapsed.

As a result, it is possible to suppress the generation of high-concentration ozone due to continuous rapid ultraviolet irradiance, and to supply the necessary amount of generated ozone to reach the ozone concentration according to the size of the processing space. . Furthermore, as a result of setting the air volume according to the processing space and the amount of ozone generated, it is possible to suppress the generation of a space area containing a gas with a high ozone concentration locally (for example, around the device), and the entire processing space of the installation location. The ozone concentration rises uniformly so that the diffusion of ozone in the region becomes dominant.

Due to the intermittent lighting of the excimer lamp 30, the time required to reach the ozone concentration corresponding to the size of the processing space at the installation site is longer than when the excimer lamp 30 is lit continuously. That is, the rate of increase in ozone concentration becomes moderate. However, since the detection of high-concentration ozone by the ozone sensor 100 suppresses the forcible stop of the ozone generation operation, as a result, from the start of ozone generation to the end of ozone generation, it is subject to disinfection and deodorization treatment with ozone. Ozone can be sufficiently diffused over the entire space, and the ozone concentration can be uniformly increased to a predetermined level. In addition, since a predetermined exposure time (period of sterilization/deodorization treatment using ozone) can be maintained even after the generation of ozone is finished, sterilization/deodorization treatment can be effectively performed.

Table T in FIG. 3 shows the lighting time, the lighting time, and the ratio (%) of the lighting time to the lighting time of the excimer lamp 30 . 4A to 4D show lighting timing charts of the excimer lamp 30 when the space size is 10 (m ² ), 15 (m ² ), 30 (m ² ), and 120 (m ² ). showing. As shown in FIG. 4, the larger the space size, the shorter the time (period) of one turn-off in blinking and the longer the time (period) of one turn-on.

On the other hand, the blower 40 is also set to have a larger air volume as the processing space becomes larger. Here, the air volume of the blower 40 is determined according to the lengthening of the lighting time and the shortening of the light-off time of the flickering cycle as the processing space becomes larger. However, since the blower 40 is driven by PWM control as described above, there is a limit to the number of duty ratio settings for PWM control. A common air volume is set for each ozone generation amount within each range. In the table T of FIG. 3, the air volume is represented by the duty ratio. For example, when the ozone generation amount is 30 to 60 (mg/h), the air volume is set to a duty ratio of 80%. In this way, as a tendency of the entire settable range, the larger the processing space, the larger the air volume may be set.

For example, in the case of ultraviolet rays having a peak wavelength of 172 nm, when the surface temperature rises to 80° C. and becomes constant, the ultraviolet illuminance drops to 90% of that immediately after the start of lighting. On the other hand, if the surface temperature of the excimer lamp 30 drops too much, high illuminance ultraviolet rays are emitted only immediately after the lamp is turned on, and the difference between the ultraviolet illuminance (low illuminance) near the maximum surface temperature increases. In addition, the ultraviolet illuminance during lighting is not stable, and gas with uneven ozone concentration is likely to be discharged outside the apparatus.

In order to maintain a stable ultraviolet illuminance during the ozone generating operation period without greatly changing the lighting conditions during the blinking operation period of the excimer lamp 30, the blinking operation of the excimer lamp 30 during the ozone generating operation period is controlled by the surface temperature of the excimer lamp 30. To prevent the temperature from reaching the maximum temperature, the lighting is switched from lighting to lighting before the maximum temperature is reached.

On the other hand, the extinguishing time is such that the excimer lamp 30 is extinguished and the lamp surface temperature is lowered to a predetermined lower threshold, for example, a temperature (minimum surface temperature ) is determined to switch from off to on at a timing that does not fall below. Even in the case of irradiating ultraviolet rays with a wavelength other than 172 nm, the timing of switching between lighting and extinguishing may be set according to the lamp surface temperature according to the wavelength of the ultraviolet rays.

At the same time, the cycle of turning on and off is set according to the size of the processing space so that the temperature change of the lamp surface temperature is 30% or less. More preferably, it is determined so that the temperature change of the lamp surface temperature is 10% or less. By periodically blinking to suppress changes in the lamp surface temperature, it is possible to balance the amount of ozone generated, the amount of decomposition, and the surface temperature of the excimer lamp 30, so that the irradiance of ultraviolet rays does not become unstable and the time series It is substantially uniform from the point of view, and it is possible to suppress the local generation of gas containing ozone of high concentration and low concentration.

In order to realize the diffusion of ozone and the stabilization of the ultraviolet illuminance described above, as shown in Table T in FIG. It is set in the range of ~10 seconds. During the ozone generating operation period, the excimer lamp 30 is blinked at time intervals (cycle) shorter than the fixed time interval (sampling time) at which the ozone sensor detects the ozone concentration.

For example, if the short-circuit current when the excimer lamp 30 is momentarily turned on by a high-frequency high voltage and the rush current when the blower 40 starts operating flow simultaneously, malfunction may occur in some devices, and the excimer lamp 30 and In some cases, the load (stress) on the components of the power supply unit 70 increases, causing deterioration of the device.

Excessive short-circuit current is prevented from flowing by intermittently lighting the excimer lamp 30 with periodicity, and the blower 40 continues to operate continuously at an appropriate air flow rate to more effectively prevent this. can do. It is also possible to set a delay time including electrical characteristics so that short-circuit current and inrush current do not flow at the same time. Further, when the continuous lamp lighting error or the lamp non-lighting error is detected after a predetermined time has elapsed from the start of the ozone generating operation, the upper limits of the lighting time and the light-off time may be set so as not to exceed that time.

As described above, during the ozone generating operation period, the excimer lamp 30 is blinked at time intervals relatively shorter than the sampling time interval for detecting the ozone concentration, and the blower 40 is continuously operated at an appropriate air volume. By appropriately adjusting the rate of increase in concentration, the balance between the release of gas containing ozone from the ozone generator, the diffusion of ozone into the room, and the supply and disappearance of ozone due to ozone decomposition is improved, and finally the ozone concentration reaches an equilibrium state. do.

Further, when the ozone concentration detected by the ozone sensor 100 during the ozone generation operation exceeds a predetermined upper threshold value for some reason from the equilibrium state, intermittent lighting of the excimer lamp 30 is temporarily interrupted, that is, turned off. . On the other hand, the blower 40 continues to operate without stopping its operation. After that, when the ozone concentration falls below the predetermined lower threshold, the intermittent lighting of the excimer lamp 30 resumes.

As described above, the ozone sensor 100 is connected to the ozone generator 10 by the cable CB corresponding to the length of one side or the length of the diagonal of the floor area of the installation place (processing space) where the ozone generator is used. ing. Since the ozone sensor 100 can be installed not in the vicinity of the ozone generator 10 but in a place where the ozone concentration can be detected in the entire processing space due to the sufficient diffusion of ozone, the ozone sensor 100 can detect sufficient ozone. The ozone concentration does not react sequentially to changes in the ozone concentration before it is diffused, and the ozone concentration becomes substantially uniform with respect to the time interval for detecting the ozone concentration. can be prevented.

For example, in a space where the cable CB cannot be arranged along the wall of the floor, the ozone sensor 100 can be installed at the furthest place from the ozone generator 10 by preparing a cable CB corresponding to the length of the diagonal line. . Also, in the case of a rectangular floor, it is possible to prepare the cable CB along the length in the longitudinal direction and arrange the ozone generator 10 and the ozone sensor 100 along the wall. Such setting of the length of the cable CB can be grasped as an indicator of the recommended floor area and recommended installation method suitable for the ozone generating operation described above. A cable having such a length can be applied to devices other than the ozone generator described above.

For example, conventionally, the ozone sensor was connected to the ozone generator without considering the length of the cable CB as in Patent Document 2, but the length of the cable was determined regardless of the size of the processing space. Therefore, it was difficult to determine whether the ozone concentration was appropriate for the size of the processing space. can be maintained until the end of work.

That is, the cable connecting the ozone generator and the ozone sensor capable of detecting the ozone concentration has a cable length corresponding to the length of one side or the length of the diagonal line of the floor area of the space to be treated with ozone. A generator cable can be provided.

The lighting control of the excimer lamp 30 is not limited to periodic intermittent lighting, and non-continuous lighting may be performed. Alternatively, continuous lighting may be performed while varying the intensity of the UV radiation by adjusting the voltage. The air volume of the blower 40 can also be operated discontinuously.

REFERENCE SIGNS LIST 10 ozone generator 20 housing 30 excimer lamp 40 blower 50 operation unit 60 control unit

Claims (10)

an excimer lamp that generates ozone by irradiating ultraviolet rays;
A blower that releases gas containing ozone toward the space to be ozonated;
a control unit for controlling an ozone generation operation by lighting the excimer lamp and operating the blower;
An ozonizer according to claim 1, wherein an ozonizing operation is controlled in accordance with the size of the space to be ozonized by associating the amount of UV irradiation from the excimer lamp with the amount of air flow from the blower. The ozone generating operation is continuously performed by intermittent lighting of the excimer lamp and continuous operation of the blower based on the amount of ozone generated and the amount of air determined according to the size of the space to be ozonized. The ozone generator according to claim 1. The excimer lamp blinks according to a set constant lighting time and lighting time,
3. The ozone generator according to claim 1, wherein said blower operates at a set constant air volume. 3. The larger the space to be ozonated, the longer the excimer lamp cyclically blinks, the lighting time becomes longer and the extinguishing time becomes shorter, and the air volume of the blower increases continuously or stepwise. 3. The ozone generator according to . The excimer lamp is arranged in the flow of gas by the blower, is turned off before the lamp surface temperature reaches a maximum after the lamp is turned on, and is turned on after the lamp is turned off before the lamp surface temperature reaches a minimum. 5. The ozone generator according to item 3 or 4. The excimer lamp emits ultraviolet rays having a peak wavelength of 172 nm, and the constant lighting time and light-off time are set so that the change in the lamp surface temperature between when the lamp is on and when the lamp is off is less than 30%. Flashes in the cycle according to
6. The ozone generator according to any one of claims 3 to 5, wherein said blower operates at a constant air volume set according to said blinking period. The lighting time is set within a range of 0.1 seconds to 1 second,
7. The ozone generator according to any one of claims 3 to 6, wherein said turn-off time is set within a range of 0.1 seconds to 10 seconds. further comprising an ozone sensor capable of detecting ozone concentration at a position corresponding to the size of the space to be treated with ozone;
the ozone sensor detects the ozone concentration at a time interval longer than the time interval of the cycle in which the excimer lamp blinks;
8. The apparatus according to any one of claims 3 to 7, wherein when an ozone concentration exceeding a predetermined threshold is detected, the operation of the blower is continued while the operation of blinking the excimer lamp is temporarily interrupted. ozone generator. 9. The excimer lamp according to any one of claims 1 to 8, wherein said excimer lamp is arranged so as to face each of a discharge port for discharging gas containing ozone toward said space to be treated with ozone and a supply port of said blower. Ozone generator as described. According to the size of the space to be ozonated set by the operator, set the amount of ozone generation and air flow,
The excimer lamp is irradiated with ultraviolet rays based on the ultraviolet irradiation amount of the excimer lamp and the air flow rate according to the ozone generation amount, and the blower is operated to release the ozone-containing gas generated by the ultraviolet irradiation from the ozone generator. An ozone generation method for discharging into an ozone treatment target space,
A method for generating ozone, characterized by intermittently lighting the excimer lamp and continuously operating the blower during an ozone generating operation.

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