JP2022075222A - Transport vehicle - Google Patents

Transport vehicle Download PDF

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Publication number
JP2022075222A
JP2022075222A JP2020185880A JP2020185880A JP2022075222A JP 2022075222 A JP2022075222 A JP 2022075222A JP 2020185880 A JP2020185880 A JP 2020185880A JP 2020185880 A JP2020185880 A JP 2020185880A JP 2022075222 A JP2022075222 A JP 2022075222A
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Prior art keywords
article
posture
holding portion
holding
angle
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JP2020185880A
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JP7342841B2 (en
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健史 安部
Takeshi Abe
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Daifuku Co Ltd
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Daifuku Co Ltd
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Priority to JP2020185880A priority Critical patent/JP7342841B2/en
Priority to KR1020210149673A priority patent/KR20220061877A/en
Priority to TW110141176A priority patent/TW202222669A/en
Priority to CN202111306316.XA priority patent/CN114435876A/en
Publication of JP2022075222A publication Critical patent/JP2022075222A/en
Priority to JP2023080903A priority patent/JP7480887B2/en
Application granted granted Critical
Publication of JP7342841B2 publication Critical patent/JP7342841B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Handcart (AREA)

Abstract

To realize a technology that can hold, by a holding unit, an article in a posture suitable for running of a transport vehicle while the transport vehicle is running when the posture of the article suitable for running of the transport vehicle is different from the posture of the article required at a transfer target location, and causes the posture of the article placed at the transfer target location at the time of transfer of the article between the holding unit and the transfer target location to be the posture required at the transfer target location.SOLUTION: A holding unit 20 includes a first portion 21 connected to an elevating device, a second portion 22 connected to the elevating device via the first portion 21 and in contact with an article, and an angle adjusting mechanism 40 provided between the first portion 21 and the second portion 22 and changing the inclination angle A of the second portion 22 with respect to the first portion 21.SELECTED DRAWING: Figure 5

Description

本発明は、物品を搬送する搬送車に関する。 The present invention relates to a transport vehicle for transporting articles.

上記のような搬送車の一例が、特開２０１２－６４７９９号公報（特許文献１）に開示されている。以下、背景技術の説明において括弧内に示す符号は特許文献１のものである。特許文献１には、物品を搬送する搬送車として、収納容器（４）を搬送する天井搬送車（Ａ）が開示されている。この天井搬送車（Ａ）は、走行経路（３）に沿って走行する走行部（１１）と、収納容器（４）を保持する保持部（１０）と、保持部（１０）を走行部（１１）に対して昇降させる昇降装置と、を備えている。 An example of the transport vehicle as described above is disclosed in Japanese Patent Application Laid-Open No. 2012-6499 (Patent Document 1). Hereinafter, the reference numerals shown in parentheses in the description of the background technique are those of Patent Document 1. Patent Document 1 discloses a ceiling carrier (A) for transporting a storage container (4) as a carrier for transporting articles. The ceiling carrier (A) has a traveling portion (11) traveling along the traveling route (3), a holding portion (10) for holding the storage container (4), and a traveling portion (10). It is provided with an elevating device for elevating and lowering with respect to 11).

特許文献１では、収納容器（４）は、基板（５）を出し入れするための開口（６）が側面に形成されたオープンカセットである。保持部（１０）に保持されている収納容器（４）の開口（６）から、基板（５）が飛び出すことを防止するために、特許文献１の天井搬送車（Ａ）には、基板（５）の側面に接触する接触位置と基板（５）の側面から離間する離間位置とに移動可能な接触体（２６）を備えた飛び出し防止機構（９）が設けられている。 In Patent Document 1, the storage container (4) is an open cassette having an opening (6) formed on the side surface for taking in and out the substrate (5). In order to prevent the substrate (5) from popping out from the opening (6) of the storage container (4) held in the holding portion (10), the ceiling carrier (A) of Patent Document 1 has a substrate ( A pop-out prevention mechanism (9) is provided with a contact body (26) that can be moved between a contact position that contacts the side surface of the substrate (5) and a separation position that is separated from the side surface of the substrate (5).

特開２０１２－６４７９９号公報Japanese Unexamined Patent Publication No. 2012-6499

搬送車の走行時には保持部に保持されている物品に振動が伝わりやすいため、特許文献１の飛び出し防止機構のような機構の有無にかかわらず、搬送車の走行時には、振動に対する許容度を高く確保しやすい姿勢で物品が保持部に保持されることが望ましい。このように、搬送車の走行時には、搬送車の走行時に適した姿勢で物品が保持部に保持されることが望ましいが、搬送車の走行時に適した物品の姿勢が、移載対象箇所（保持部との間で物品が移載される箇所）において要求される物品の姿勢と異なる場合がある。例えば、特許文献１では、物品が、側面に開口が形成された収納容器であり、移載対象箇所が、収納容器から取り出された基板に対して処理を行う処理装置のロードポートである。そのため、移載対象箇所において要求される収納容器の姿勢が、特許文献１の図５に示されるように、収納容器に対して基板を出し入れしやすい姿勢（具体的には、開口が水平方向を向く水平姿勢）となるのに対して、搬送車の走行時に適した収納容器の姿勢は、基板が開口から収納容器の外部に移動し難い姿勢（例えば、開口が斜め上方を向く傾斜姿勢）となる。 Since vibration is easily transmitted to the article held in the holding portion when the transport vehicle is running, a high tolerance for vibration is ensured when the transport vehicle is running, regardless of the presence or absence of a mechanism such as the pop-out prevention mechanism of Patent Document 1. It is desirable that the article is held in the holding portion in an easy-to-use posture. As described above, when the transport vehicle is traveling, it is desirable that the article is held in the holding portion in a posture suitable for traveling the transport vehicle, but the posture of the article suitable for traveling the transport vehicle is the transfer target location (holding). It may differ from the posture of the article required at the place where the article is transferred to and from the department. For example, in Patent Document 1, the article is a storage container having an opening formed on a side surface, and the transfer target location is a load port of a processing device that processes a substrate taken out from the storage container. Therefore, as shown in FIG. 5 of Patent Document 1, the posture of the storage container required at the transfer target location is such that the substrate can be easily taken in and out of the storage container (specifically, the opening is in the horizontal direction). The posture of the storage container suitable for traveling of the transport vehicle is a posture in which the substrate is difficult to move from the opening to the outside of the storage container (for example, an inclined posture in which the opening faces diagonally upward). Become.

搬送車の走行時に適した物品の姿勢が、移載対象箇所において要求される物品の姿勢と異なる場合、単に搬送車の走行時に適した姿勢で物品が保持部に保持される構成とすると、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢も、搬送車の走行時に適した姿勢となる。そのため、搬送車の走行時に適した姿勢と移載対象箇所において要求される姿勢との間で物品の姿勢を変更する機構を移載対象箇所に設けて、保持部と移載対象箇所との間での物品の移載動作とは別に、移載対象箇所において物品の姿勢変更動作を行う必要が生じ、物品の処理効率が低下するおそれがある。 If the posture of the article suitable for traveling of the transport vehicle is different from the posture of the article required at the transfer target location, the article is simply held in the holding portion in the posture suitable for traveling of the transport vehicle. The posture of the article placed at the transfer target location when the article is transferred between the unit and the transfer target location is also a posture suitable for the traveling vehicle. Therefore, a mechanism for changing the posture of the article between the posture suitable for traveling of the transport vehicle and the posture required at the transfer target location is provided at the transfer target location between the holding portion and the transfer target location. In addition to the movement of the goods to be transferred in the above, it is necessary to change the posture of the goods at the place to be transferred, which may reduce the processing efficiency of the goods.

そこで、搬送車の走行時に適した物品の姿勢が移載対象箇所において要求される物品の姿勢と異なる場合に、搬送車の走行時には搬送車の走行時に適した姿勢で物品を保持部により保持しつつ、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢を、当該移載対象箇所において要求される姿勢とすることが可能な技術の実現が望まれる。 Therefore, when the posture of the article suitable for traveling of the transport vehicle is different from the posture of the article required at the transfer target location, the article is held by the holding portion in the posture suitable for traveling of the transport vehicle when the transport vehicle is traveling. At the same time, the posture of the article placed at the transfer target location at the time of transfer of the article between the holding portion and the transfer target location can be the posture required at the transfer target location. Realization is desired.

本開示に係る搬送車は、物品を搬送する搬送車であって、移動経路に沿って移動する本体部と、前記物品を保持する保持部と、前記保持部を前記本体部に対して昇降方向に昇降させる昇降装置と、を備え、前記保持部は、前記昇降装置に連結された第１部分と、前記第１部分を介して前記昇降装置に連結されると共に前記物品に接触する第２部分と、前記第１部分と前記第２部分との間に設けられ、前記第１部分に対する前記第２部分の傾斜角度を変更する角度調整機構と、を備えている。 The transport vehicle according to the present disclosure is a transport vehicle that transports an article, and has a main body portion that moves along a movement path, a holding portion that holds the article, and the holding portion in an ascending / descending direction with respect to the main body portion. The holding portion includes a first portion connected to the elevating device and a second portion connected to the elevating device via the first portion and in contact with the article. And an angle adjusting mechanism provided between the first portion and the second portion and changing the inclination angle of the second portion with respect to the first portion.

本構成によれば、保持部が角度調整機構を備えるため、保持部の姿勢を変更するための機構を昇降装置に設けなくても、角度調整機構により第１部分に対する第２部分の傾斜角度を変更することで、第２部分が接触する物品（すなわち、保持部に保持されている物品）の姿勢を所望の姿勢とすることができる。よって、搬送車の走行時における物品の姿勢を、搬送車の走行時に適した姿勢としつつ、保持部と移載対象箇所との間での物品の移載時における物品の姿勢を、当該移載対象箇所において要求される姿勢とすることができる。よって、搬送車の走行時には搬送車の走行時に適した姿勢で物品を保持部により保持しつつ、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢を、当該移載対象箇所において要求される姿勢とすることが可能となっている。なお、本構成では、保持部の姿勢を変更するための機構を昇降装置に設ける必要がないため、昇降装置の複雑化を抑制しつつ本開示の搬送車を実現することができる。 According to this configuration, since the holding portion is provided with an angle adjusting mechanism, the tilt angle of the second portion with respect to the first portion can be adjusted by the angle adjusting mechanism without providing a mechanism for changing the posture of the holding portion in the elevating device. By changing the posture, the posture of the article with which the second portion contacts (that is, the article held by the holding portion) can be set to the desired posture. Therefore, while the posture of the article when the transport vehicle is traveling is set to a posture suitable for the traveling of the transport vehicle, the posture of the article when the article is transferred between the holding portion and the transfer target portion is the posture of the article. It can be the required posture at the target location. Therefore, while the article is held by the holding portion in a posture suitable for traveling the transport vehicle when the transport vehicle is traveling, the article is placed at the transfer target location when the article is transferred between the holding portion and the transfer target location. It is possible to set the posture of the article to the posture required at the transfer target location. In this configuration, since it is not necessary to provide the elevating device with a mechanism for changing the posture of the holding portion, it is possible to realize the transport vehicle of the present disclosure while suppressing the complexity of the elevating device.

搬送車の更なる特徴と利点は、図面を参照して説明する実施形態についての以下の記載から明確となる。 Further features and advantages of the carrier will be clarified from the following description of embodiments described with reference to the drawings.

搬送車の斜視図Perspective view of the carrier 搬送車の正面図Front view of the transport vehicle 保持部と移載対象箇所との間で物品が移載される状況を示す図The figure which shows the situation which the article is transferred between the holding part and the transfer target part. 傾斜角度が第２角度に調整されている状態での保持部の斜視図Perspective view of the holding portion when the tilt angle is adjusted to the second angle. 傾斜角度が第１角度に調整されている状態での保持部の斜視図Perspective view of the holding portion when the tilt angle is adjusted to the first angle. 移載対象箇所からの物品の搬出動作の説明図Explanatory drawing of the operation of carrying out the goods from the transfer target location 移載対象箇所からの物品の搬出動作の説明図Explanatory drawing of the operation of carrying out the goods from the transfer target location 移載対象箇所からの物品の搬出動作の説明図Explanatory drawing of the operation of carrying out the goods from the transfer target location 移載対象箇所への物品の搬入動作の説明図Explanatory drawing of the operation of carrying goods to the transfer target location 移載対象箇所への物品の搬入動作の説明図Explanatory drawing of the operation of carrying goods to the transfer target location 移載対象箇所への物品の搬入動作の説明図Explanatory drawing of the operation of carrying goods to the transfer target location 移載対象箇所への物品の搬入動作の説明図Explanatory drawing of the operation of carrying goods to the transfer target location 移載対象箇所への物品の搬入動作の説明図Explanatory drawing of the operation of carrying goods to the transfer target location 制御ブロック図Control block diagram

搬送車の実施形態について、図面を参照して説明する。 An embodiment of the transport vehicle will be described with reference to the drawings.

搬送車１は、図３に例示するような物品搬送設備１００において、移動経路２に沿って走行して物品９０を搬送する。図１～図３に示すように、搬送車１は、移動経路２に沿って移動する本体部１０と、物品９０を保持する保持部２０と、保持部２０を本体部１０に対して鉛直方向Ｖに昇降させる昇降装置５０と、を備えている。ここで、移動経路２の長手方向（移動経路２が延びる方向）を経路長手方向Ｌとし、移動経路２の幅方向を経路幅方向Ｗとする。経路幅方向Ｗは、経路長手方向Ｌ及び鉛直方向Ｖの双方に直交する方向である。また、搬送車１を基準として定義される方向（すなわち、搬送車１の姿勢に応じて変化する方向）であって、移動経路２に配置された状態で経路長手方向Ｌに沿う方向を車体前後方向Ｘとし、搬送車１を基準として定義される方向であって、移動経路２に配置された状態で経路幅方向Ｗに沿う方向を車体左右方向Ｙとする。本実施形態では、鉛直方向Ｖが「昇降方向」に相当する。 The transport vehicle 1 travels along the movement path 2 in the article transport facility 100 as illustrated in FIG. 3 to transport the article 90. As shown in FIGS. 1 to 3, in the transport vehicle 1, the main body portion 10 that moves along the movement path 2, the holding portion 20 that holds the article 90, and the holding portion 20 are vertically oriented with respect to the main body portion 10. It is provided with an elevating device 50 for elevating and descending to V. Here, the longitudinal direction of the movement path 2 (the direction in which the movement path 2 extends) is defined as the path longitudinal direction L, and the width direction of the movement path 2 is defined as the path width direction W. The path width direction W is a direction orthogonal to both the path longitudinal direction L and the vertical direction V. Further, the direction defined with reference to the transport vehicle 1 (that is, the direction that changes according to the posture of the transport vehicle 1), and the direction along the path longitudinal direction L in the state of being arranged on the movement path 2, is the front and rear of the vehicle body. The direction X is defined as the direction defined with the carrier vehicle 1 as a reference, and the direction along the path width direction W in the state of being arranged on the moving path 2 is defined as the vehicle body left-right direction Y. In this embodiment, the vertical direction V corresponds to the "up and down direction".

移動経路２は、物理的に形成されても仮想的に設定されてもよい。本実施形態では、移動経路２は、レール３を用いて物理的に形成されている。具体的には、物品搬送設備１００は、移動経路２に沿って配置されたレール３（ここでは、経路幅方向Ｗに間隔を空けて配置された一対のレール３）を備えており、本体部１０は、レール３に沿って移動する。また、本実施形態では、レール３は、天井４から吊り下げ支持されており、移動経路２は、天井４に沿って形成されている。すなわち、本実施形態では、搬送車１は、天井４に沿って形成された移動経路２に沿って走行する天井搬送車である。なお、搬送車１は、天井搬送車以外の搬送車であってもよい。 The movement path 2 may be physically formed or virtually set. In this embodiment, the movement path 2 is physically formed by using the rail 3. Specifically, the article transport facility 100 includes rails 3 arranged along the movement path 2 (here, a pair of rails 3 arranged at intervals in the path width direction W), and has a main body portion. 10 moves along the rail 3. Further, in the present embodiment, the rail 3 is suspended and supported from the ceiling 4, and the movement path 2 is formed along the ceiling 4. That is, in the present embodiment, the transport vehicle 1 is a ceiling transport vehicle that travels along the movement path 2 formed along the ceiling 4. The transport vehicle 1 may be a transport vehicle other than the ceiling transport vehicle.

図１及び図２に示すように、本体部１０は、レール３（ここでは、一対のレール３）の走行面を転動する車輪１２を備えた走行部１１と、走行部１１に連結されたカバー部１４と、を備えている。レール３の走行面は、鉛直方向Ｖの上方Ｖ１を向く面であり、車輪１２は、鉛直方向Ｖに直交する軸心周りに回転する。走行部１１は、車輪１２を回転させる走行駆動部７０（例えば、サーボモータ等の電動モータ、図１４参照）を備えており、車輪１２が走行駆動部７０により回転駆動されることで、走行部１１がレール３に沿って走行する。図２に示すように、本実施形態では、走行部１１は、レール３の案内面を転動する案内輪１３を備えており、走行部１１は、案内輪１３がレール３の案内面に接触案内された状態で、レール３に沿って走行する。レール３の案内面は、経路幅方向Ｗの内側（一対のレール３の間の経路幅方向Ｗの中心位置に向かう側）を向く面であり、案内輪１３は、鉛直方向Ｖに沿う軸心周りに回転する（本例では、遊転する）。図１に示す例では、本体部１０は、走行部１１を、車体前後方向Ｘに並ぶように一対備えている。 As shown in FIGS. 1 and 2, the main body portion 10 is connected to a traveling portion 11 having wheels 12 that roll on the traveling surface of the rail 3 (here, a pair of rails 3). It is provided with a cover portion 14. The traveling surface of the rail 3 is a surface facing upward V1 in the vertical direction V, and the wheel 12 rotates around an axis orthogonal to the vertical direction V. The traveling unit 11 includes a traveling drive unit 70 (for example, an electric motor such as a servomotor, see FIG. 14) that rotates the wheels 12, and the wheels 12 are rotationally driven by the traveling drive unit 70 to drive the traveling unit. 11 runs along the rail 3. As shown in FIG. 2, in the present embodiment, the traveling unit 11 includes a guide wheel 13 that rolls on the guide surface of the rail 3, and the traveling unit 11 has the guide wheel 13 in contact with the guide surface of the rail 3. In the guided state, the vehicle travels along the rail 3. The guide surface of the rail 3 is a surface facing the inside of the path width direction W (the side of the pair of rails 3 toward the center position of the path width direction W), and the guide wheel 13 is an axial center along the vertical direction V. Rotate around (in this example, idle). In the example shown in FIG. 1, the main body portion 10 is provided with a pair of traveling portions 11 so as to be arranged in the front-rear direction X of the vehicle body.

図１に示すように、本実施形態では、カバー部１４は、走行部１１に対して鉛直方向Ｖの下方Ｖ２に配置された状態で、走行部１１に支持されている。搬送車１の走行時には、保持部２０に保持された状態の物品９０は、カバー部１４の内部空間に配置される。図１に示すように、本実施形態では、カバー部１４の内部空間は、車体前後方向Ｘの両側が閉じられていると共に、車体左右方向Ｙの少なくとも一方側が開放されている。よって、カバー部１４の内部空間に配置された物品９０は、カバー部１４の壁部によって少なくとも車体前後方向Ｘの両側から覆われる。 As shown in FIG. 1, in the present embodiment, the cover portion 14 is supported by the traveling portion 11 in a state of being arranged below V2 in the vertical direction V with respect to the traveling portion 11. When the transport vehicle 1 is traveling, the article 90 held by the holding portion 20 is arranged in the internal space of the cover portion 14. As shown in FIG. 1, in the present embodiment, in the internal space of the cover portion 14, both sides of the vehicle body front-rear direction X are closed and at least one side of the vehicle body left-right direction Y is open. Therefore, the article 90 arranged in the internal space of the cover portion 14 is covered by the wall portion of the cover portion 14 from at least both sides in the vehicle body front-rear direction X.

図４に示すように、保持部２０は、物品９０に形成された被保持部９１（図２参照）を支持する支持部２３を備えており、支持部２３を用いて物品９０を保持する。図２に示す例では、保持部２０は、物品９０を上方Ｖ１から保持する。具体的には、被保持部９１は、物品９０の上面９０ａを構成する上面部（例えば、板状の天板部）に形成されたフランジ部であり、支持部２３は、当該支持部２３の支持部分が被保持部９１と上面部との間の空間（以下、「支持用空間」という）に挿入された状態で、被保持部９１を下方Ｖ２から支持する。支持部２３は、上方Ｖ１を向く支持面２３ａ（図４参照）を備えており、支持面２３ａを被保持部９１の下面に接触させて被保持部９１を下方Ｖ２から支持する。なお、被保持部９１は、物品９０の上部に形成されるフランジ部に限られず、例えば、物品９０の上面部（具体的には、上面部の外周部分）が被保持部９１として用いられる構成、物品９０の側面９０ｂを構成する側面部に被保持部９１が形成される構成、或いは、物品９０の底面９０ｃを構成する底面部（例えば、板状の底板部）が被保持部９１として用いられる構成とすることができる。 As shown in FIG. 4, the holding portion 20 includes a supporting portion 23 that supports the held portion 91 (see FIG. 2) formed on the article 90, and the supporting portion 23 is used to hold the article 90. In the example shown in FIG. 2, the holding portion 20 holds the article 90 from above V1. Specifically, the held portion 91 is a flange portion formed on the upper surface portion (for example, a plate-shaped top plate portion) constituting the upper surface 90a of the article 90, and the support portion 23 is the support portion 23 of the support portion 23. The held portion 91 is supported from the lower V2 in a state where the supported portion is inserted into the space between the held portion 91 and the upper surface portion (hereinafter, referred to as “supporting space”). The support portion 23 includes a support surface 23a (see FIG. 4) facing upward V1 and brings the support surface 23a into contact with the lower surface of the held portion 91 to support the held portion 91 from the lower V2. The held portion 91 is not limited to the flange portion formed on the upper portion of the article 90, and for example, the upper surface portion (specifically, the outer peripheral portion of the upper surface portion) of the article 90 is used as the held portion 91. , The structure in which the held portion 91 is formed on the side surface portion constituting the side surface 90b of the article 90, or the bottom surface portion (for example, a plate-shaped bottom plate portion) constituting the bottom surface 90c of the article 90 is used as the held portion 91. Can be configured to be.

保持部２０は、保持部２０による物品９０の保持及び保持解除を行うための保持駆動部７２（例えば、ソレノイドや電動モータ、図１４参照）を備えており、保持駆動部７２の駆動により、保持部２０による物品９０の保持及び保持解除が行われる。本実施形態では、図４に示すように、保持部２０は、一対の支持部２３を備えており、保持駆動部７２は、一対の支持部２３（具体的には、一対の支持部２３の一方の支持部分と他方の支持部分）を互いに接近及び離間させるように構成されている。なお、支持部分は、支持面２３ａが形成された部分である。 The holding unit 20 includes a holding drive unit 72 (for example, a solenoid or an electric motor, see FIG. 14) for holding and releasing the article 90 by the holding unit 20, and is held by driving the holding drive unit 72. The article 90 is held and released by the unit 20. In the present embodiment, as shown in FIG. 4, the holding portion 20 includes a pair of supporting portions 23, and the holding driving portion 72 is a pair of supporting portions 23 (specifically, a pair of supporting portions 23. One support portion and the other support portion) are configured to approach and separate from each other. The support portion is a portion on which the support surface 23a is formed.

一対の支持部２３が互いに接近及び離間する方向（言い換えれば、一対の支持部２３の並び方向）を対象方向とすると、保持部２０による物品９０の保持を行う場合、保持駆動部７２は、一対の支持部２３を互いに接近させて、一対の支持部２３の姿勢を、一対の支持部２３の間隔が被保持部９１の対象方向の幅よりも小さくなる保持姿勢に切り替える。また、保持部２０による物品９０の保持解除を行う場合、保持駆動部７２は、一対の支持部２３を互いに離間させて、一対の支持部２３の姿勢を、一対の支持部２３の間隔が被保持部９１の対象方向の幅よりも大きくなる保持解除姿勢に切り替える。ここで、姿勢は、位置及び向きの少なくとも一方を含む概念として用いている。図４及び図５に示す例では、車体前後方向Ｘが対象方向である。 Assuming that the direction in which the pair of support portions 23 approach and separate from each other (in other words, the direction in which the pair of support portions 23 are arranged) is the target direction, when the holding portion 20 holds the article 90, the holding drive units 72 are paired. The support portions 23 of the above are brought close to each other, and the posture of the pair of support portions 23 is switched to a holding posture in which the distance between the pair of support portions 23 is smaller than the width of the held portion 91 in the target direction. Further, when the holding portion 20 releases the holding of the article 90, the holding driving portion 72 separates the pair of supporting portions 23 from each other so that the posture of the pair of supporting portions 23 is covered by the distance between the pair of supporting portions 23. The holding portion 91 is switched to a holding release posture that is larger than the width in the target direction. Here, posture is used as a concept including at least one of position and orientation. In the examples shown in FIGS. 4 and 5, the vehicle body front-rear direction X is the target direction.

保持部２０が後述する第２位置Ｐ２（図３、図６、図１１参照）に配置されている状態で、一対の支持部２３の姿勢を保持解除姿勢から保持姿勢に切り替えることで、一対の支持部２３のそれぞれの支持部分が、移載対象箇所６に配置されている物品９０の支持用空間に挿入される。この状態で保持部２０を上昇させることで、物品９０が保持部２０と共に上昇する。また、保持部２０が第２位置Ｐ２に配置されている状態で、一対の支持部２３の姿勢を保持姿勢から保持解除姿勢に切り替えることで、一対の支持部２３のそれぞれの支持部分が、保持部２０に保持されていた物品９０の支持用空間から抜き出される。この状態で保持部２０を上昇させることで、物品９０を移載対象箇所６に残した状態で保持部２０のみが上昇する。 By switching the posture of the pair of support portions 23 from the holding release posture to the holding posture while the holding portion 20 is arranged at the second position P2 (see FIGS. 3, 6, and 11) described later, the pair of support portions 23 is paired. Each support portion of the support portion 23 is inserted into the support space of the article 90 arranged at the transfer target portion 6. By raising the holding portion 20 in this state, the article 90 rises together with the holding portion 20. Further, by switching the posture of the pair of support portions 23 from the holding posture to the holding release posture while the holding portion 20 is arranged at the second position P2, the respective support portions of the pair of support portions 23 are held. It is taken out from the support space of the article 90 held by the portion 20. By raising the holding portion 20 in this state, only the holding portion 20 is raised while the article 90 is left at the transfer target portion 6.

物品９０の種類はこれに限定されないが、図２に示すように、本実施形態では、物品９０は、側面９０ｂに開口部９２を有する容器である。開口部９２は、物品９０に対して収容物を出し入れするために設けられており、開口部９２を介して物品９０に対する収容物の出し入れが行われる。開口部９２とは別の開口（例えば、軽量化や洗浄のための開口、或いは物品９０の構造上形成される開口）が、物品９０の側面９０ｂに形成されていてもよいが、物品９０に収容されている収容物は、開口部９２を通らなければ物品９０の外部に移動できないように、物品９０が構成されている。本実施形態では、ガラス基板や半導体ウェハ等の基板９３（収容物の一例）が、物品９０に収容される。また、本実施形態では、物品９０は、複数枚の基板９３を上下方向（底面９０ｃが水平に配置された状態で鉛直方向Ｖに沿う方向）に並べて収容可能に構成されている。 The type of the article 90 is not limited to this, but as shown in FIG. 2, in the present embodiment, the article 90 is a container having an opening 92 on the side surface 90b. The opening 92 is provided for putting in and taking out the contents to and from the article 90, and the contents are put in and out of the article 90 through the opening 92. An opening different from the opening 92 (for example, an opening for weight reduction or cleaning, or an opening formed due to the structure of the article 90) may be formed on the side surface 90b of the article 90, but the article 90 may have an opening. The article 90 is configured so that the contained object cannot move to the outside of the article 90 without passing through the opening 92. In the present embodiment, a substrate 93 (an example of an contained object) such as a glass substrate or a semiconductor wafer is accommodated in the article 90. Further, in the present embodiment, the article 90 is configured to be capable of accommodating a plurality of substrates 93 side by side in the vertical direction (direction along the vertical direction V with the bottom surface 90c arranged horizontally).

本実施形態では、物品９０は、開口部９２を閉じる蓋を備えていない。例えば、オープンカセットを物品９０として用いることができる。物品９０が、開口部９２を閉じする蓋を備える構成とすることもできる。この場合、例えば、ＦＯＵＰ（Front Opening Unified Pod）を物品９０として用いることができる。 In this embodiment, the article 90 does not have a lid that closes the opening 92. For example, an open cassette can be used as the article 90. The article 90 may also be configured to include a lid that closes the opening 92. In this case, for example, FOUP (Front Opening Unified Pod) can be used as the article 90.

図４及び図５では、一対の支持部２３が車体前後方向Ｘに互いに接近及び離間する向きで、保持部２０が配置される場合を例示しているが、一対の支持部２３が車体左右方向Ｙに互いに接近及び離間する向きで、保持部２０が配置されてもよい。また、図１～図３では、開口部９２が車体左右方向Ｙの一方側を向く向きで、物品９０が保持部２０に保持される場合を例示しているが、開口部９２が車体前後方向Ｘの一方側を向く向きで、物品９０が保持部２０に保持されてもよい。なお、搬送車１が、保持部２０を本体部１０に対して鉛直方向Ｖに沿う軸心周りに回転させる機構を備える構成とすることもできる。物品９０に収容されている基板９３が、搬送車１の走行時に開口部９２から物品９０の外部に移動することをより確実に防止するという観点から、開口部９２がカバー部１４の壁部を向く向きで、物品９０が保持部２０に保持される構成とすると好適である。 4 and 5 illustrate a case where the holding portions 20 are arranged so that the pair of support portions 23 approach and separate from each other in the front-rear direction X of the vehicle body, but the pair of support portions 23 are in the left-right direction of the vehicle body. The holding portion 20 may be arranged so as to approach and separate from Y. Further, FIGS. 1 to 3 illustrate a case where the article 90 is held by the holding portion 20 with the opening 92 facing one side in the left-right direction Y of the vehicle body, but the opening 92 is in the front-rear direction of the vehicle body. The article 90 may be held by the holding portion 20 so as to face one side of X. The transport vehicle 1 may be configured to include a mechanism for rotating the holding portion 20 around the axis along the vertical direction V with respect to the main body portion 10. From the viewpoint of more reliably preventing the substrate 93 housed in the article 90 from moving from the opening 92 to the outside of the article 90 when the transport vehicle 1 is traveling, the opening 92 covers the wall portion of the cover portion 14. It is preferable that the article 90 is held by the holding portion 20 in the facing direction.

昇降装置５０は、保持部２０を昇降させるための昇降駆動部７１（例えば、サーボモータ等の電動モータ、図１４参照）を備えており、昇降駆動部７１の駆動により、保持部２０が昇降される。昇降装置５０は、第１位置Ｐ１（図２及び図３参照）と、第１位置Ｐ１よりも下方Ｖ２の第２位置Ｐ２（図３参照）との間で、保持部２０を昇降させる。第１位置Ｐ１は、昇降方向（鉛直方向Ｖ）の上端の位置である。第１位置Ｐ１は、本体部１０が移動する場合の保持部２０の鉛直方向Ｖの位置である。すなわち、第１位置Ｐ１は、搬送車１の走行時における保持部２０の位置である。本実施形態では、第１位置Ｐ１は、保持部２０に保持された状態の物品９０がカバー部１４の内部空間に配置されるような保持部２０の位置である。また、第２位置Ｐ２は、保持部２０による物品９０の保持及び保持解除を行う場合の保持部２０の鉛直方向Ｖの位置である。すなわち、第２位置Ｐ２は、保持部２０による物品９０の保持及び保持解除を行う位置であり、言い換えれば、保持部２０と移載対象箇所６との間での物品９０の移載時における保持部２０の位置である。第２位置Ｐ２は、各移載対象箇所６の高さ（鉛直方向Ｖの位置）に応じて設定される。本実施形態では、第２位置Ｐ２は、一対の支持部２３の姿勢を保持姿勢と保持解除姿勢とに切り替えることで、移載対象箇所６に配置されている物品９０の支持用空間に、一対の支持部２３のそれぞれの支持部分を挿脱可能な高さに設定される。 The elevating device 50 includes an elevating drive unit 71 (for example, an electric motor such as a servomotor, see FIG. 14) for elevating and lowering the holding unit 20, and the holding unit 20 is elevated and lowered by driving the elevating drive unit 71. To. The elevating device 50 raises and lowers the holding portion 20 between the first position P1 (see FIGS. 2 and 3) and the second position P2 (see FIG. 3) V2 below the first position P1. The first position P1 is the position of the upper end in the vertical direction (vertical direction V). The first position P1 is a position in the vertical direction V of the holding portion 20 when the main body portion 10 moves. That is, the first position P1 is the position of the holding portion 20 when the transport vehicle 1 is traveling. In the present embodiment, the first position P1 is the position of the holding portion 20 such that the article 90 held by the holding portion 20 is arranged in the internal space of the cover portion 14. Further, the second position P2 is a position in the vertical direction V of the holding portion 20 when the holding portion 20 holds and releases the article 90. That is, the second position P2 is a position where the holding portion 20 holds and releases the article 90, in other words, the holding portion 20 and the transfer target portion 6 hold the article 90 at the time of transfer. The position of the part 20. The second position P2 is set according to the height (position in the vertical direction V) of each transfer target location 6. In the present embodiment, the second position P2 is paired with the support space of the article 90 arranged at the transfer target portion 6 by switching the posture of the pair of support portions 23 between the holding posture and the holding release posture. Each support portion of the support portion 23 is set to a height at which it can be inserted and removed.

図３では、移載対象箇所６の一例として、処理装置５に隣接して配置されるロードポートを示している。処理装置５は、物品９０を処理対象とする装置であり、本実施形態では、物品９０から取り出された基板９３に対して処理を行う。図３に示すように、物品９０は、開口部９２が処理装置５側を向くように移載対象箇所６に配置される。 FIG. 3 shows a load port arranged adjacent to the processing device 5 as an example of the transfer target location 6. The processing device 5 is an apparatus for processing the article 90, and in the present embodiment, the substrate 93 taken out from the article 90 is processed. As shown in FIG. 3, the article 90 is arranged at the transfer target portion 6 so that the opening 92 faces the processing device 5 side.

図２に簡略化して模式的に示すように、昇降装置５０は、回転駆動される回転体５１と、回転体５１に巻き取り及び繰り出し自在に巻回された伝動部材５２と、を備えている。昇降装置５０は、更に、回転体５１を回転駆動する上述した昇降駆動部７１（図１４参照）を備えている。回転体５１及び昇降駆動部７１は、本体部１０に支持されており、本実施形態では、カバー部１４の内部空間における上方Ｖ１の部分に配置されている。例えば、伝動部材５２がベルトであり、回転体５１がベルトを巻き取る巻取プーリである構成とし、或いは、伝動部材５２がワイヤであり、回転体５１がワイヤを巻き取る巻取ドラムである構成とすることができる。伝動部材５２は、保持部２０に連結されている。具体的には、図３に示すように、伝動部材５２における回転体５１から繰り出される先端側に設けられた連結部５２ａが、保持部２０に連結されている。昇降装置５０は、回転体５１を昇降駆動部７１の駆動により回転させて、伝動部材５２を巻き取り又は繰り出すことで、保持部２０を上昇又は下降させる（すなわち、昇降させる）。このように、昇降装置５０は、保持部２０を吊り下げ支持した状態で、保持部２０を昇降させる。 As simplified and schematically shown in FIG. 2, the elevating device 50 includes a rotating body 51 that is rotationally driven, and a transmission member 52 that is wound around the rotating body 51 so as to be freely wound and unwound. .. The elevating device 50 further includes the above-mentioned elevating drive unit 71 (see FIG. 14) that rotationally drives the rotating body 51. The rotating body 51 and the elevating drive unit 71 are supported by the main body unit 10, and in the present embodiment, they are arranged in the upper V1 portion in the internal space of the cover portion 14. For example, the transmission member 52 is a belt and the rotating body 51 is a winding pulley for winding the belt, or the transmission member 52 is a wire and the rotating body 51 is a winding drum for winding the wire. Can be. The transmission member 52 is connected to the holding portion 20. Specifically, as shown in FIG. 3, a connecting portion 52a provided on the tip end side of the transmission member 52, which is fed out from the rotating body 51, is connected to the holding portion 20. The elevating device 50 rotates the rotating body 51 by driving the elevating drive unit 71, and winds up or unwinds the transmission member 52 to raise or lower (that is, raise or lower) the holding portion 20. In this way, the elevating device 50 raises and lowers the holding portion 20 while the holding portion 20 is suspended and supported.

図２及び図３に示すように、本実施形態では、昇降装置５０は、複数の回転体５１を備えており、複数の回転体５１のそれぞれに伝動部材５２が巻回されている。図２及び図３に示す例では、昇降装置５０は、３つの回転体５１を備えている。そして、複数の伝動部材５２（本例では、３つの伝動部材５２）のそれぞれの連結部５２ａが、保持部２０に連結されている。図４に示すように、複数の連結部５２ａは、保持部２０における互いに異なる部分に連結されている。なお、図２及び図３では、昇降装置５０が複数の回転体５１を備えていることを示すために、複数の回転体５１をそれぞれ別軸に配置しているが、複数の回転体５１は、同軸に並べて配置されてもよい。また、図３では、伝動部材５２の連結部５２ａが、当該伝動部材５２が巻回された回転体５１の直下に配置されているが、伝動部材５２における回転体５１から繰り出された部分が、案内用回転体（案内用プーリ等）に巻き掛けられ、伝動部材５２の連結部５２ａが、当該案内用回転体の直下に配置される構成としてもよい。 As shown in FIGS. 2 and 3, in the present embodiment, the elevating device 50 includes a plurality of rotating bodies 51, and a transmission member 52 is wound around each of the plurality of rotating bodies 51. In the example shown in FIGS. 2 and 3, the elevating device 50 includes three rotating bodies 51. Then, each connecting portion 52a of the plurality of transmission members 52 (in this example, the three transmission members 52) is connected to the holding portion 20. As shown in FIG. 4, the plurality of connecting portions 52a are connected to different portions of the holding portion 20. In addition, in FIGS. 2 and 3, in order to show that the elevating device 50 includes a plurality of rotating bodies 51, the plurality of rotating bodies 51 are arranged on different axes, but the plurality of rotating bodies 51 have a plurality of rotating bodies 51. , May be arranged side by side coaxially. Further, in FIG. 3, the connecting portion 52a of the transmission member 52 is arranged directly under the rotating body 51 around which the transmission member 52 is wound, but the portion of the transmission member 52 extended from the rotating body 51 is formed. It may be configured such that the connecting portion 52a of the transmission member 52 is wound around the guiding rotating body (guide pulley or the like) and is arranged directly under the guiding rotating body.

本実施形態では、物品９０は、側面９０ｂに形成された開口部９２を介して基板９３が出し入れされる容器である。そのため、搬送車１の走行時には、図２に示すように、物品９０の姿勢を開口部９２が斜め上方を向く傾斜姿勢Ｓ１とすることで、物品９０に収容された基板９３が開口部９２から物品９０の外部に移動し難いようにすることができる。一方、図３に示す例のように、移載対象箇所６において物品９０に対する基板９３の出し入れが行われる場合には、物品９０の姿勢を開口部９２が水平方向を向く水平姿勢Ｓ２とすることで、開口部９２を介した基板９３の物品９０に対する出し入れを行いやすくなる。すなわち、図３に示す例では、移載対象箇所６において要求される物品９０の姿勢が、水平姿勢Ｓ２となる。本実施形態では、保持部２０が以下に説明する角度調整機構４０を備えており、これにより、搬送車１の走行時には傾斜姿勢Ｓ１で物品９０を保持部２０により保持しつつ、移載対象箇所６に配置される物品９０の姿勢を水平姿勢Ｓ２とすることが可能となっている。 In the present embodiment, the article 90 is a container in which the substrate 93 is taken in and out through the opening 92 formed in the side surface 90b. Therefore, when the transport vehicle 1 is traveling, as shown in FIG. 2, the posture of the article 90 is set to the inclined posture S1 in which the opening 92 faces diagonally upward, so that the substrate 93 housed in the article 90 can be moved from the opening 92. It can be made difficult to move to the outside of the article 90. On the other hand, as in the example shown in FIG. 3, when the substrate 93 is taken in and out of the article 90 at the transfer target portion 6, the posture of the article 90 is the horizontal posture S2 in which the opening 92 faces the horizontal direction. Therefore, the substrate 93 can be easily taken in and out of the article 90 through the opening 92. That is, in the example shown in FIG. 3, the posture of the article 90 required at the transfer target portion 6 is the horizontal posture S2. In the present embodiment, the holding portion 20 is provided with the angle adjusting mechanism 40 described below, whereby the article 90 is held by the holding portion 20 in the inclined posture S1 when the transport vehicle 1 is traveling, and the transfer target portion is provided. The posture of the article 90 arranged in 6 can be the horizontal posture S2.

図２～図５に示すように、保持部２０は、昇降装置５０に連結された第１部分２１と、第１部分２１を介して昇降装置５０に連結されると共に物品９０に接触する第２部分２２と、角度調整機構４０と、を備えている。保持部２０は、更に、角度調整機構４０を駆動する揺動駆動部７３（例えば、電動モータやソレノイド、図１４参照）を備えている。本実施形態では、揺動駆動部７３が「駆動部」に相当する。 As shown in FIGS. 2 to 5, the holding portion 20 has a first portion 21 connected to the elevating device 50 and a second portion connected to the elevating device 50 via the first portion 21 and in contact with the article 90. A portion 22 and an angle adjusting mechanism 40 are provided. The holding unit 20 further includes a swing driving unit 73 (for example, an electric motor or a solenoid, see FIG. 14) that drives the angle adjusting mechanism 40. In the present embodiment, the swing drive unit 73 corresponds to the “drive unit”.

本実施形態では、第１部分２１は、伝動部材５２に連結されている。第１部分２１は、複数の伝動部材５２のそれぞれに（具体的には、複数の伝動部材５２のそれぞれの連結部５２ａに）連結されている。そのため、第１部分２１の姿勢は、複数の連結部５２ａ（ここでは、３つの連結部５２ａ）の間の高低差に応じて定まる。本実施形態では、複数の回転体５１を回転駆動する共通の昇降駆動部７１が設けられており、第１部分２１は、姿勢が特定の姿勢（ここでは、全ての連結部５２ａが同じ高さに配置される姿勢）に維持されるように昇降装置５０により昇降される。そのため、図３に示すように、保持部２０が第１位置Ｐ１に位置する状態、保持部２０が第２位置Ｐ２に位置する状態、及び、保持部２０が第１位置Ｐ１と第２位置Ｐ２との間の第３位置Ｐ３に位置する状態のいずれにおいても、第１部分２１は上記特定の姿勢で配置される。 In the present embodiment, the first portion 21 is connected to the transmission member 52. The first portion 21 is connected to each of the plurality of transmission members 52 (specifically, to each connection portion 52a of the plurality of transmission members 52). Therefore, the posture of the first portion 21 is determined according to the height difference between the plurality of connecting portions 52a (here, the three connecting portions 52a). In the present embodiment, a common elevating drive unit 71 for rotationally driving a plurality of rotating bodies 51 is provided, and the first portion 21 has a specific posture (here, all the connecting portions 52a have the same height). It is lifted and lowered by the lifting device 50 so as to be maintained in the posture (position arranged in). Therefore, as shown in FIG. 3, the holding portion 20 is located at the first position P1, the holding portion 20 is located at the second position P2, and the holding portion 20 is located at the first position P1 and the second position P2. In any of the states located at the third position P3 between and, the first portion 21 is arranged in the above-mentioned specific posture.

第２部分２２は、保持部２０における物品９０に接触する部分である。そのため、保持部２０に保持されている物品９０の姿勢は、第２部分２２の姿勢に応じて定まる。第２部分２２は支持部２３（本実施形態では、一対の支持部２３）を備えており、第２部分２２を構成する支持部２３が、物品９０（具体的には、被保持部９１）に接触する。 The second portion 22 is a portion of the holding portion 20 that comes into contact with the article 90. Therefore, the posture of the article 90 held by the holding portion 20 is determined according to the posture of the second portion 22. The second portion 22 includes a support portion 23 (in this embodiment, a pair of support portions 23), and the support portion 23 constituting the second portion 22 is an article 90 (specifically, a held portion 91). Contact.

角度調整機構４０は、第１部分２１と第２部分２２との間に設けられ、第１部分２１に対する第２部分２２の傾斜角度Ａ（図２、図５参照）を変更する。図４及び図５に示すように、本実施形態では、角度調整機構４０は、水平方向に沿う軸心Ｒ周りに第２部分２２を揺動させる（第１部分２１に対して揺動させる）ことで傾斜角度Ａを変更する。ここでは、保持部２０（具体的には、第２部分２２）に保持されている物品９０が水平姿勢Ｓ２で配置される場合を０度とするように、傾斜角度Ａを定義する。図４は、傾斜角度Ａが０度である状態の保持部２０を示している。また、保持部２０に保持されている物品９０が、開口部９２が斜め上方を向く傾斜姿勢Ｓ１で配置される場合（図２参照）に正の鋭角となるように、傾斜角度Ａを定義する。ここでは、開口部９２を介した収容物（本実施形態では、基板９３）の出し入れが行われる際の収容物の移動方向に沿って、物品９０の外部に向かう方向を、開口部９２の向きとしており、本実施形態では、物品９０の底面９０ｃが水平面に沿う姿勢が、開口部９２が水平方向を向く水平姿勢Ｓ２である。 The angle adjusting mechanism 40 is provided between the first portion 21 and the second portion 22, and changes the inclination angle A (see FIGS. 2 and 5) of the second portion 22 with respect to the first portion 21. As shown in FIGS. 4 and 5, in the present embodiment, the angle adjusting mechanism 40 swings the second portion 22 around the axis R along the horizontal direction (swings with respect to the first portion 21). This changes the tilt angle A. Here, the inclination angle A is defined so that the case where the article 90 held by the holding portion 20 (specifically, the second portion 22) is arranged in the horizontal posture S2 is 0 degree. FIG. 4 shows a holding portion 20 in a state where the inclination angle A is 0 degrees. Further, the inclination angle A is defined so that the article 90 held by the holding portion 20 has a positive acute angle when the opening 92 is arranged in the inclined posture S1 facing diagonally upward (see FIG. 2). .. Here, the direction toward the outside of the article 90 is the direction of the opening 92 along the moving direction of the contained object when the contained object (in the present embodiment, the substrate 93) is taken in and out through the opening 92. In the present embodiment, the posture of the bottom surface 90c of the article 90 along the horizontal plane is the horizontal posture S2 in which the opening 92 faces the horizontal direction.

本実施形態では、軸心Ｒは、車体前後方向Ｘに沿うように配置されており、図５に示すように、第２部分２２が第１部分２１に対して傾斜している場合（具体的には、傾斜角度Ａが正の鋭角である場合）には、第２部分２２は、車体左右方向Ｙの一方側が他方側よりも高くなる。そのため、本実施形態では、物品９０は、開口部９２が平面視（鉛直方向Ｖに沿う方向視）で車体左右方向Ｙの当該一方側を向く向きで、保持部２０に保持される。 In the present embodiment, the axial center R is arranged along the vehicle body front-rear direction X, and as shown in FIG. 5, the second portion 22 is inclined with respect to the first portion 21 (specifically). In the case where the inclination angle A is a positive acute angle), the second portion 22 has one side of the vehicle body left-right direction Y higher than the other side. Therefore, in the present embodiment, the article 90 is held by the holding portion 20 with the opening 92 facing the one side in the left-right direction Y of the vehicle body in a plan view (direction view along the vertical direction V).

図４及び図５に一例を示すように、本実施形態では、角度調整機構４０は、第２部分２２に固定された揺動部材４１と、第１部分２１に固定された支持部材４２と、を備えており、支持部材４２は、揺動部材４１を軸心Ｒ周りに回転可能に支持している。そして、揺動駆動部７３は、揺動部材４１を軸心Ｒ周りに揺動させるように構成されている。揺動部材４１は第２部分２２に固定されているため、このように揺動部材４１を軸心Ｒ周りに揺動させることで、第２部分２２を軸心Ｒ周りに揺動させて、傾斜角度Ａを変更することができる。なお、揺動駆動部７３は、第１部分２１に固定されている。 As shown in FIGS. 4 and 5, in the present embodiment, the angle adjusting mechanism 40 includes a swing member 41 fixed to the second portion 22 and a support member 42 fixed to the first portion 21. The support member 42 rotatably supports the swing member 41 around the axis R. The swing drive unit 73 is configured to swing the swing member 41 around the axis R. Since the swing member 41 is fixed to the second portion 22, by swinging the swing member 41 around the axis R in this way, the second portion 22 is swung around the axis R. The tilt angle A can be changed. The rocking drive unit 73 is fixed to the first portion 21.

図４及び図５に示す例では、揺動部材４１は、軸心Ｒ上に配置される軸部材であり、固定部材４３を介して第２部分２２に固定されている。本例では、軸心Ｒに沿う方向（ここでは、車体前後方向Ｘ）の２箇所で、揺動部材４１が固定部材４３を介して第２部分２２（具体的には、第２部分２２が備える本体部）に固定されている。一対の支持部２３は、案内機構４６によって、互いに接近及び離間する方向（ここでは、軸心Ｒに沿う方向）の移動を案内される。本例では、案内機構４６は、軸心Ｒに沿う方向に延びる案内レールと、案内レールに係合する案内ブロックとを備えた直動機構であり、案内レールが第２部分２２の上記本体部に固定され、案内ブロックが一対の支持部２３のそれぞれに固定されている。 In the example shown in FIGS. 4 and 5, the swing member 41 is a shaft member arranged on the axis R, and is fixed to the second portion 22 via the fixing member 43. In this example, the rocking member 41 has a second portion 22 (specifically, the second portion 22) via the fixing member 43 at two locations along the axis R (here, the vehicle body front-rear direction X). It is fixed to the main body). The pair of support portions 23 are guided by the guide mechanism 46 in the direction of approaching and separating from each other (here, the direction along the axis R). In this example, the guide mechanism 46 is a linear motion mechanism including a guide rail extending in a direction along the axis R and a guide block engaged with the guide rail, and the guide rail is the main body portion of the second portion 22. The guide block is fixed to each of the pair of support portions 23.

一対の支持部２３を駆動する保持駆動部７２は、第２部分２２の上記本体部に固定されている。本例では、保持駆動部７２は、運動変換機構４５を介して一対の支持部２３を駆動する。ここでは、運動変換機構４５は、ボールねじ機構であり、保持駆動部７２としての電動モータによって回転駆動される回転軸の回転運動が、一対の支持部２３のそれぞれの直線運動に変換される。なお、一対の支持部２３が、軸心Ｒに沿う方向に互いに接近及び離間する構成ではなく、一対の支持部２３が、平面視で軸心Ｒに直交する方向（本例では、車体左右方向Ｙ）に互いに接近及び離間する構成としてもよい。 The holding drive unit 72 that drives the pair of support units 23 is fixed to the main body portion of the second portion 22. In this example, the holding drive unit 72 drives the pair of support units 23 via the motion conversion mechanism 45. Here, the motion conversion mechanism 45 is a ball screw mechanism, and the rotational motion of the rotary shaft rotationally driven by the electric motor as the holding drive unit 72 is converted into the linear motion of each of the pair of support portions 23. It should be noted that the pair of support portions 23 are not configured to approach and separate from each other in the direction along the axis R, but the direction in which the pair of support portions 23 are orthogonal to the axis R in a plan view (in this example, the vehicle body left-right direction). It may be configured to approach and separate from each other in Y).

図４及び図５に示す例では、揺動部材４１は、軸心Ｒに沿う方向の２箇所で、軸心Ｒ周りに回転可能に支持部材４２に支持されている。具体的には、一対の固定部材４３に対して軸心Ｒに沿う方向の両側のそれぞれに支持部材４２が設けられており、支持部材４２のそれぞれは、揺動部材４１を第１部分２１に対して回転可能に支持している。そして、本例では、第１部分２１に固定されている揺動駆動部７３が、ギヤ機構４４（例えば、減速機構）を介して揺動部材４１に連結されており、揺動駆動部７３としての電動モータの回転がギヤ機構４４を介して揺動部材４１に伝達されて、揺動部材４１が揺動される。なお、図４及び図５における各部の寸法や形状は概念的なものであり、実際の寸法や形状はこれに限定されない。 In the example shown in FIGS. 4 and 5, the swing member 41 is rotatably supported by the support member 42 around the axis R at two points in the direction along the axis R. Specifically, support members 42 are provided on both sides of the pair of fixing members 43 in the direction along the axis R, and each of the support members 42 has the swing member 41 in the first portion 21. On the other hand, it supports rotatably. In this example, the swing drive unit 73 fixed to the first portion 21 is connected to the swing member 41 via a gear mechanism 44 (for example, a reduction mechanism), and is used as the swing drive unit 73. The rotation of the electric motor is transmitted to the swing member 41 via the gear mechanism 44, and the swing member 41 is swung. The dimensions and shapes of each part in FIGS. 4 and 5 are conceptual, and the actual dimensions and shapes are not limited thereto.

図１４に示すように、物品搬送設備１００は、搬送車１の動作を制御する制御部８０を備えている。制御部８０は、ＣＰＵ等の演算処理装置を備えると共にメモリ等の周辺回路を備え、これらのハードウェアと、演算処理装置等のハードウェア上で実行されるプログラムとの協働により、制御部８０の各機能が実現される。制御部８０は、搬送車１に設けられても、搬送車１とは独立に設けられてもよい。また、制御部８０が互いに通信可能に分離された複数のハードウェアを備える場合、一部のハードウェアが搬送車１に設けられ、残りのハードウェアが搬送車１とは独立に設けられてもよい。 As shown in FIG. 14, the article transport facility 100 includes a control unit 80 that controls the operation of the transport vehicle 1. The control unit 80 includes an arithmetic processing unit such as a CPU and peripheral circuits such as a memory, and the control unit 80 cooperates with these hardware and a program executed on the hardware such as the arithmetic processing apparatus. Each function of is realized. The control unit 80 may be provided on the transport vehicle 1 or may be provided independently of the transport vehicle 1. Further, when the control unit 80 includes a plurality of hardware separated so as to be able to communicate with each other, even if some hardware is provided in the transport vehicle 1 and the remaining hardware is provided independently of the transport vehicle 1. good.

制御部８０は、走行駆動部７０の駆動を制御することで、移動経路２に沿って移動する移動動作を本体部１０に行わせる。具体的には、制御部８０は、走行駆動部７０の駆動を制御することで、レール３に沿って走行する走行動作を走行部１１に行わせる。本実施形態では、走行部１１の走行動作によって本体部１０の移動動作が実現される。制御部８０は、保持部２０が保持している物品９０を移載対象箇所６に搬送する場合に、保持部２０が物品９０を保持した状態で走行部１１に走行動作を行わせる。また、制御部８０は、昇降駆動部７１の駆動を制御することで、保持部２０を昇降させる昇降動作を昇降装置５０に行わせる。また、制御部８０は、保持駆動部７２の駆動を制御することで、物品９０を保持する保持動作や物品９０の保持を解除する保持解除動作を保持部２０に行わせる。本実施形態では、物品９０の保持動作は、一対の支持部２３を互いに接近させる動作（言い換えれば、一対の支持部２３の姿勢を保持姿勢に切り替える動作）であり、物品９０の保持解除動作は、一対の支持部２３を互いに離間させる動作（言い換えれば、一対の支持部２３の姿勢を保持解除姿勢に切り替える動作）である。また、制御部８０は、揺動駆動部７３の駆動を制御することで、第１部分２１に対する第２部分２２の傾斜角度Ａを変更する傾斜角度変更動作を保持部２０に行わせる。 The control unit 80 controls the drive of the travel drive unit 70 to cause the main body unit 10 to perform a movement operation of moving along the movement path 2. Specifically, the control unit 80 controls the drive of the travel drive unit 70 to cause the travel unit 11 to perform a travel operation of traveling along the rail 3. In the present embodiment, the moving operation of the main body portion 10 is realized by the traveling operation of the traveling unit 11. When the article 90 held by the holding unit 20 is transported to the transfer target portion 6, the control unit 80 causes the traveling unit 11 to perform a traveling operation while the holding unit 20 holds the article 90. Further, the control unit 80 controls the drive of the elevating drive unit 71 to cause the elevating device 50 to perform an elevating operation for raising and lowering the holding unit 20. Further, the control unit 80 controls the drive of the holding drive unit 72 to cause the holding unit 20 to perform a holding operation for holding the article 90 and a holding / releasing operation for releasing the holding of the article 90. In the present embodiment, the holding operation of the article 90 is an operation of bringing the pair of support portions 23 close to each other (in other words, an operation of switching the posture of the pair of support portions 23 to the holding posture), and the holding release operation of the article 90 is. , An operation of separating the pair of support portions 23 from each other (in other words, an operation of switching the posture of the pair of support portions 23 to the holding release posture). Further, the control unit 80 causes the holding unit 20 to perform an tilt angle changing operation for changing the tilt angle A of the second portion 22 with respect to the first portion 21 by controlling the drive of the swing drive unit 73.

移載対象箇所６から保持部２０に物品９０を移載する場合（すなわち、移載対象箇所６から物品９０を搬出する場合）、制御部８０は、移載対象箇所６に対応する位置（ここでは、移載対象箇所６より上方Ｖ１であって、平面視で移載対象箇所６と重複する位置）まで搬送車１を走行させる走行動作を走行部１１に行わせた後、物品９０を保持していない保持部２０を第１位置Ｐ１から第２位置Ｐ２まで下降させる昇降動作を、昇降装置５０に行わせる（図６参照）。本実施形態では、揺動駆動部７３は、物品９０を保持していない保持部２０が第２位置Ｐ２へ向かって下降している間、傾斜角度Ａを後述する第２角度とする。具体的には、物品９０を保持していない保持部２０は、傾斜角度Ａが第２角度とされた状態で第１位置Ｐ１に配置されており、保持部２０が第１位置Ｐ１から第２位置Ｐ２まで下降する間、傾斜角度Ａが第２角度に維持される。保持部２０が第２位置Ｐ２に到達すると、制御部８０は、物品９０の保持動作を保持部２０に行わせ、その後、保持部２０を第２位置Ｐ２から第１位置Ｐ１まで上昇させる昇降動作を昇降装置５０に行わせる（図７、図８参照）。これにより、物品９０を保持している保持部２０が第１位置Ｐ１まで上昇する。 When the article 90 is transferred from the transfer target location 6 to the holding unit 20 (that is, when the article 90 is carried out from the transfer target location 6), the control unit 80 is located at a position corresponding to the transfer target location 6 (here). Then, after causing the traveling unit 11 to perform a traveling operation of traveling the transport vehicle 1 to a position V1 above the transfer target location 6 and overlapping the transfer target location 6 in a plan view, the article 90 is held. The elevating device 50 is made to perform an elevating operation for lowering the holding portion 20 which is not used from the first position P1 to the second position P2 (see FIG. 6). In the present embodiment, the swing drive unit 73 sets the inclination angle A as the second angle described later while the holding unit 20 that does not hold the article 90 descends toward the second position P2. Specifically, the holding portion 20 that does not hold the article 90 is arranged at the first position P1 with the inclination angle A set to the second angle, and the holding portion 20 is arranged from the first position P1 to the second position. The tilt angle A is maintained at the second angle while descending to position P2. When the holding unit 20 reaches the second position P2, the control unit 80 causes the holding unit 20 to perform the holding operation of the article 90, and then raises and lowers the holding unit 20 from the second position P2 to the first position P1. Is performed by the elevating device 50 (see FIGS. 7 and 8). As a result, the holding portion 20 holding the article 90 rises to the first position P1.

一方、保持部２０から移載対象箇所６に物品９０を移載する場合（すなわち、移載対象箇所６に物品９０を搬入する場合）、制御部８０は、移載対象箇所６に対応する位置まで搬送車１を走行させる走行動作を走行部１１に行わせた後、物品９０を保持している保持部２０を第１位置Ｐ１から第２位置Ｐ２まで下降させる昇降動作を、昇降装置５０に行わせる（図９～図１１参照）。保持部２０が第２位置Ｐ２に到達すると、制御部８０は、物品９０の保持解除動作を保持部２０に行わせ、その後、保持部２０を第２位置Ｐ２から第１位置Ｐ１まで上昇させる昇降動作を昇降装置５０に行わせる（図１１参照）。これにより、物品９０を移載対象箇所６に残した状態で、物品９０を保持していない保持部２０が第１位置Ｐ１まで上昇する。本実施形態では、揺動駆動部７３は、物品９０を保持していない保持部２０が第２位置Ｐ２から上昇している間、傾斜角度Ａを第２角度とする。 On the other hand, when the article 90 is transferred from the holding unit 20 to the transfer target location 6 (that is, when the article 90 is carried into the transfer target location 6), the control unit 80 is located at a position corresponding to the transfer target location 6. After causing the traveling unit 11 to perform a traveling operation for traveling the transport vehicle 1 to, the elevating device 50 performs an elevating operation for lowering the holding portion 20 holding the article 90 from the first position P1 to the second position P2. Let them do it (see FIGS. 9-11). When the holding unit 20 reaches the second position P2, the control unit 80 causes the holding unit 20 to perform the holding release operation of the article 90, and then raises and lowers the holding unit 20 from the second position P2 to the first position P1. Let the elevating device 50 perform the operation (see FIG. 11). As a result, the holding portion 20 that does not hold the article 90 rises to the first position P1 while the article 90 is left at the transfer target portion 6. In the present embodiment, the swing drive unit 73 sets the inclination angle A as the second angle while the holding unit 20 that does not hold the article 90 rises from the second position P2.

本実施形態では、揺動駆動部７３が、保持部２０が物品９０を保持している場合に、傾斜角度調整制御を実行するように構成されている。揺動駆動部７３は、制御部８０による制御を受けて、傾斜角度調整制御を実行する。鉛直方向Ｖにおける第２位置Ｐ２を含む領域を規定領域ΔＶ２として（図６、図１１参照）、傾斜角度調整制御は、保持部２０が規定領域ΔＶ２の外部に配置されている状態では、傾斜角度Ａを第１角度とし、保持部２０が第２位置Ｐ２に配置されている状態では、傾斜角度Ａを第２角度とする制御である。ここで、第１角度は、物品９０（保持部２０に保持されてる物品９０、以下同様）の姿勢が傾斜姿勢Ｓ１（開口部９２が斜め上方を向く物品９０の姿勢）となる角度であり、例えば５度とされる。また、第２角度は、物品９０の姿勢が水平姿勢Ｓ２（開口部９２が水平方向を向く物品９０の姿勢）となる角度であり、本実施形態では０度である。なお、図６～図１３では、鉛直方向Ｖにおける規定領域ΔＶ２の外部の領域を外部領域ΔＶ１としている。 In the present embodiment, the swing drive unit 73 is configured to execute the tilt angle adjustment control when the holding unit 20 holds the article 90. The swing drive unit 73 is controlled by the control unit 80 to execute tilt angle adjustment control. The region including the second position P2 in the vertical direction V is set as the defined region ΔV2 (see FIGS. 6 and 11), and the tilt angle adjustment control is performed in the state where the holding portion 20 is arranged outside the defined region ΔV2. In the state where A is the first angle and the holding portion 20 is arranged at the second position P2, the control is such that the inclination angle A is the second angle. Here, the first angle is an angle at which the posture of the article 90 (the article 90 held by the holding portion 20; the same applies hereinafter) becomes the inclined posture S1 (the posture of the article 90 with the opening 92 facing diagonally upward). For example, it is set to 5 degrees. The second angle is an angle at which the posture of the article 90 becomes the horizontal posture S2 (the posture of the article 90 with the opening 92 facing in the horizontal direction), which is 0 degree in the present embodiment. In FIGS. 6 to 13, the region outside the defined region ΔV2 in the vertical direction V is defined as the external region ΔV1.

規定領域ΔＶ２は第１位置Ｐ１を含まないように設定される。すなわち、第１位置Ｐ１は、規定領域ΔＶ２の上限よりも上方Ｖ１に配置され、外部領域ΔＶ１に含まれる。そのため、揺動駆動部７３が傾斜角度調整制御を実行することで、保持部２０が第１位置Ｐ１に配置される搬送車１の走行時や、保持部２０が外部領域ΔＶ１に配置されている状態での保持部２０の昇降時には、物品９０の姿勢を、物品９０に収容された収容物（本実施形態では、基板９３）が開口部９２から物品９０の外部に移動し難い傾斜姿勢Ｓ１とすることができる。また、保持部２０が第２位置Ｐ２に配置される物品９０の移載時には、物品９０の姿勢を、移載対象箇所６において要求される水平姿勢Ｓ２とすることができる。 The defined region ΔV2 is set so as not to include the first position P1. That is, the first position P1 is arranged in V1 above the upper limit of the defined region ΔV2 and is included in the external region ΔV1. Therefore, when the swing drive unit 73 executes the tilt angle adjustment control, the holding unit 20 is arranged in the external region ΔV1 during traveling of the transport vehicle 1 in which the holding unit 20 is arranged in the first position P1. When the holding portion 20 is raised and lowered in the state, the posture of the article 90 is changed to the inclined posture S1 in which the contained object (in the present embodiment, the substrate 93) is difficult to move from the opening 92 to the outside of the article 90. can do. Further, at the time of transferring the article 90 in which the holding portion 20 is arranged at the second position P2, the posture of the article 90 can be the horizontal posture S2 required at the transfer target portion 6.

保持部２０が物品９０を保持している場合に揺動駆動部７３が傾斜角度調整制御を実行するため、移載対象箇所６から保持部２０に物品９０を移載する場合には、物品９０の保持動作後の、保持部２０が第２位置Ｐ２に配置されている状態では、図６に示すように、傾斜角度Ａが第２角度とされることで、物品９０の姿勢が水平姿勢Ｓ２とされる。その後、保持部２０を第２位置Ｐ２から第１位置Ｐ１まで上昇させる昇降動作が開始されると、保持部２０が外部領域ΔＶ１に進入するまでの間に、傾斜角度Ａを第２角度から第１角度に変更する傾斜角度変更動作が行われる。これにより、保持部２０が外部領域ΔＶ１において上昇している間、図８に示すように、傾斜角度Ａが第１角度とされることで、物品９０の姿勢が傾斜姿勢Ｓ１とされる。 Since the swing drive unit 73 executes the tilt angle adjustment control when the holding unit 20 holds the article 90, when the article 90 is transferred from the transfer target portion 6 to the holding unit 20, the article 90 is transferred. In the state where the holding portion 20 is arranged at the second position P2 after the holding operation of the article 90, as shown in FIG. 6, the inclination angle A is set to the second angle, so that the posture of the article 90 is the horizontal posture S2. It is said that. After that, when the ascending / descending operation of raising the holding portion 20 from the second position P2 to the first position P1 is started, the inclination angle A is changed from the second angle until the holding portion 20 enters the external region ΔV1. The tilt angle changing operation for changing to one angle is performed. As a result, while the holding portion 20 is rising in the external region ΔV1, the tilt angle A is set to the first angle as shown in FIG. 8, so that the posture of the article 90 is set to the tilt posture S1.

図７及び図８では、保持部２０が規定領域ΔＶ２の上限（規定領域ΔＶ２よりも上方Ｖ１の外部領域ΔＶ１と規定領域ΔＶ２との境界）に到達するのに合わせて傾斜角度変更動作が行われて、物品９０の姿勢が図７に示す水平姿勢Ｓ２から図８において二点鎖線で示す傾斜姿勢Ｓ１に変更される場合を例示している。この場合、規定領域ΔＶ２の上限において保持部２０の上昇速度をそれ以前の速度からゼロ或いはゼロより大きな値まで低下させる構成としてもよい。保持部２０を上昇させながら姿勢変更動作を行う場合には、例えば、保持部２０が規定領域ΔＶ２の上限に到達する前に傾斜角度変更動作が開始され、保持部２０が規定領域ΔＶ２の上限に到達した時点で傾斜角度変更動作が終了するように、傾斜角度変更動作が行われる。物品９０が傾斜姿勢Ｓ１で昇降される昇降範囲をできるだけ大きく確保するために、規定領域ΔＶ２の上限は、傾斜角度変更動作に伴う物品９０の姿勢変化によって物品９０が移載対象箇所６に接触しない範囲で、できるだけ第２位置Ｐ２に近い位置に設定すると好適である。 In FIGS. 7 and 8, the tilt angle changing operation is performed so that the holding portion 20 reaches the upper limit of the specified region ΔV2 (the boundary between the external region ΔV1 of V1 above the specified region ΔV2 and the specified region ΔV2). The case where the posture of the article 90 is changed from the horizontal posture S2 shown in FIG. 7 to the inclined posture S1 shown by the two-dot chain line in FIG. 8 is illustrated. In this case, the ascending speed of the holding unit 20 may be reduced from the speed before that to zero or a value larger than zero at the upper limit of the specified region ΔV2. When the posture changing operation is performed while raising the holding portion 20, for example, the tilt angle changing operation is started before the holding portion 20 reaches the upper limit of the specified region ΔV2, and the holding portion 20 reaches the upper limit of the specified region ΔV2. The tilt angle changing operation is performed so that the tilt angle changing operation ends when it is reached. In order to secure as much as possible the elevating range in which the article 90 is moved up and down in the tilted posture S1, the upper limit of the specified region ΔV2 is such that the article 90 does not come into contact with the transfer target portion 6 due to the posture change of the article 90 due to the tilt angle changing operation. It is preferable to set the position as close to the second position P2 as possible within the range.

また、保持部２０から移載対象箇所６に物品９０を移載する場合には、保持部２０を第１位置Ｐ１から第２位置Ｐ２まで下降させる昇降動作が開始されると、保持部２０が外部領域ΔＶ１において下降している間、図９に示すように、傾斜角度Ａが第１角度とされることで、物品９０の姿勢が傾斜姿勢Ｓ１とされる。保持部２０が規定領域ΔＶ２に進入すると、保持部２０が第２位置Ｐ２に到達するまでの間に、傾斜角度Ａを第１角度から第２角度に変更する傾斜角度変更動作が行われる。これにより、図１１に示すように、保持部２０の姿勢が傾斜姿勢Ｓ１から水平姿勢Ｓ２に変更された後、保持部２０が第２位置Ｐ２に到達する。 Further, when the article 90 is transferred from the holding portion 20 to the transfer target portion 6, when the raising / lowering operation of lowering the holding portion 20 from the first position P1 to the second position P2 is started, the holding portion 20 moves. As shown in FIG. 9, the posture of the article 90 is set to the tilted posture S1 by setting the tilt angle A to the first angle while descending in the outer region ΔV1. When the holding portion 20 enters the specified region ΔV2, an tilt angle changing operation for changing the tilt angle A from the first angle to the second angle is performed until the holding portion 20 reaches the second position P2. As a result, as shown in FIG. 11, after the posture of the holding portion 20 is changed from the tilted posture S1 to the horizontal posture S2, the holding portion 20 reaches the second position P2.

図９及び図１０では、保持部２０が規定領域ΔＶ２の上限に到達するのに合わせて傾斜角度変更動作が行われて、物品９０の姿勢が図９において実線で示す傾斜姿勢Ｓ１から図１０に示す水平姿勢Ｓ２に変更される場合を例示している。この場合、規定領域ΔＶ２の上限において保持部２０の下降速度をそれ以前の速度からゼロ或いはゼロより大きな値まで低下させる構成としてもよい。保持部２０を下降させながら姿勢変更動作を行う場合には、例えば、保持部２０が規定領域ΔＶ２の上限に到達した時点で傾斜角度変更動作が開始され、保持部２０が第２位置Ｐ２に到達する前に傾斜角度変更動作が終了するように、傾斜角度変更動作が行われる。 In FIGS. 9 and 10, the tilt angle changing operation is performed as the holding portion 20 reaches the upper limit of the specified region ΔV2, and the posture of the article 90 is changed from the tilted posture S1 shown by the solid line in FIG. 9 to FIG. The case where the posture is changed to the horizontal posture S2 shown is illustrated. In this case, the descending speed of the holding portion 20 may be reduced from the speed before that to zero or a value larger than zero at the upper limit of the specified region ΔV2. When the posture changing operation is performed while lowering the holding portion 20, for example, the tilt angle changing operation is started when the holding portion 20 reaches the upper limit of the specified region ΔV2, and the holding portion 20 reaches the second position P2. The tilt angle changing operation is performed so that the tilt angle changing operation is completed before the operation is performed.

ところで、図１２及び図１３に一例を示すように、移載対象箇所６が複数の高さに分かれて配置される場合がある。この場合、移載対象箇所６が配置される複数の高さのそれぞれに応じて第２位置Ｐ２が設定されるため、第２位置Ｐ２は、第１位置Ｐ１よりも下方Ｖ２の複数の位置を含む。図１２及び図１３に示す例では、第２位置Ｐ２は、実線で示す移載対象箇所６に対応する第２位置Ｐ２と、二点鎖線で示す移載対象箇所６に対応する第２位置Ｐ２（図１２及び図１３では図示を省略）とを含む。 By the way, as shown in FIGS. 12 and 13, the transfer target portion 6 may be divided into a plurality of heights and arranged. In this case, since the second position P2 is set according to each of the plurality of heights at which the transfer target points 6 are arranged, the second position P2 has a plurality of positions V2 below the first position P1. include. In the example shown in FIGS. 12 and 13, the second position P2 corresponds to the second position P2 corresponding to the transfer target location 6 indicated by the solid line and the second position P2 corresponding to the transfer target location 6 indicated by the alternate long and short dash line. (The illustration is omitted in FIGS. 12 and 13).

このように第２位置Ｐ２が複数の位置を含む場合、複数の第２位置Ｐ２のうちの、保持部２０の昇降動作の始点又は終点となる第２位置Ｐ２を対象第２位置Ｐ２ａとして（図１３参照）、本実施形態では、揺動駆動部７３が、対象第２位置Ｐ２ａを含む領域を規定領域ΔＶ２に設定して傾斜角度調整制御を実行するように構成されている。なお、規定領域ΔＶ２は、基本的には対象第２位置Ｐ２ａのみを含むように設定されるが、対象第２位置Ｐ２ａに近い高さに存在する別の第２位置Ｐ２が規定領域ΔＶ２に含まれる場合もある。図１２及び図１３に示す例では、実線で示す移載対象箇所６に物品９０を搬入する場合を想定しており、実線で示す移載対象箇所６に対応する第２位置Ｐ２が対象第２位置Ｐ２ａとされている。そして、本例では、対象第２位置Ｐ２ａのみを含むように（すなわち、二点鎖線で示す移載対象箇所６に対応する第２位置Ｐ２を含まないように）規定領域ΔＶ２が設定されており、二点鎖線で示す移載対象箇所６に対応する第２位置Ｐ２は、外部領域ΔＶ１に含まれている。これにより、二点鎖線で示す移載対象箇所６に対応する第２位置Ｐ２を含む比較的大きい昇降範囲において、傾斜姿勢Ｓ１で物品９０を保持することが可能となっている。 When the second position P2 includes a plurality of positions as described above, the second position P2 which is the start point or the end point of the elevating operation of the holding portion 20 among the plurality of second positions P2 is set as the target second position P2a (FIG. 13), in the present embodiment, the swing drive unit 73 is configured to set the region including the target second position P2a to the defined region ΔV2 and execute the tilt angle adjustment control. The defined region ΔV2 is basically set to include only the target second position P2a, but another second position P2 existing at a height close to the target second position P2a is included in the defined region ΔV2. In some cases. In the examples shown in FIGS. 12 and 13, it is assumed that the article 90 is carried into the transfer target location 6 shown by the solid line, and the second position P2 corresponding to the transfer target location 6 shown by the solid line is the target second. The position is P2a. Then, in this example, the defined region ΔV2 is set so as to include only the target second position P2a (that is, not to include the second position P2 corresponding to the transfer target location 6 indicated by the alternate long and short dash line). , The second position P2 corresponding to the transfer target portion 6 indicated by the alternate long and short dash line is included in the external region ΔV1. This makes it possible to hold the article 90 in the inclined posture S1 in a relatively large elevating range including the second position P2 corresponding to the transfer target portion 6 indicated by the alternate long and short dash line.

〔その他の実施形態〕
次に、搬送車のその他の実施形態について説明する。 [Other embodiments]
Next, other embodiments of the transport vehicle will be described.

（１）上記の実施形態では、角度調整機構４０を駆動する駆動部（揺動駆動部７３）が、第２部分２２に固定された揺動部材４１を軸心Ｒ周りに揺動させることで、第１部分２１に対する第２部分２２の傾斜角度Ａを変更する構成を例として説明した。しかし、本開示はそのような構成に限定されず、例えば、第２部分２２がリンク機構を介して第１部分２１に連結され、角度調整機構４０を駆動する駆動部が、当該リンク機構を駆動して傾斜角度Ａを変更する構成とすることもできる。また、上記の実施形態では、角度調整機構４０を駆動する駆動部が、第１部分２１に固定される構成を例として説明したが、角度調整機構４０の構成によっては、角度調整機構４０を駆動する駆動部が第２部分２２に固定されてもよい。 (1) In the above embodiment, the drive unit (swing drive unit 73) that drives the angle adjusting mechanism 40 swings the swing member 41 fixed to the second portion 22 around the axis R. , A configuration in which the inclination angle A of the second portion 22 with respect to the first portion 21 is changed has been described as an example. However, the present disclosure is not limited to such a configuration, for example, a second portion 22 is connected to the first portion 21 via a link mechanism, and a drive unit for driving the angle adjusting mechanism 40 drives the link mechanism. It is also possible to change the inclination angle A. Further, in the above embodiment, the configuration in which the drive unit for driving the angle adjustment mechanism 40 is fixed to the first portion 21 has been described as an example, but depending on the configuration of the angle adjustment mechanism 40, the angle adjustment mechanism 40 is driven. The driving unit may be fixed to the second portion 22.

（２）上記の実施形態では、軸心Ｒが車体前後方向Ｘに沿うように配置される構成を例として説明した。しかし、本開示はそのような構成に限定されず、軸心Ｒが車体左右方向Ｙに沿うように配置される構成とすることもできる。この場合、第２部分２２が第１部分２１に対して傾斜している場合（具体的には、傾斜角度Ａが正の鋭角である場合）には、第２部分２２は、車体前後方向Ｘの一方側が他方側よりも高くなり、物品９０は、開口部９２が平面視で車体前後方向Ｘの当該一方側を向く向きで、保持部２０に保持される。 (2) In the above embodiment, a configuration in which the axis R is arranged along the vehicle body front-rear direction X has been described as an example. However, the present disclosure is not limited to such a configuration, and the axial center R may be arranged along the vehicle body left-right direction Y. In this case, when the second portion 22 is inclined with respect to the first portion 21 (specifically, when the inclination angle A is a positive acute angle), the second portion 22 is the vehicle body front-rear direction X. One side is higher than the other side, and the article 90 is held by the holding portion 20 with the opening 92 facing the one side in the vehicle body front-rear direction X in a plan view.

（３）上記の実施形態では、第２位置Ｐ２が複数の位置を含む場合に、揺動駆動部７３が、対象第２位置Ｐ２ａを含む領域を規定領域ΔＶ２に設定して傾斜角度調整制御を実行する構成を例として説明した。しかし、本開示はそのような構成に限定されず、例えば第２位置Ｐ２に含まれる複数の位置の間の高低差が小さい場合等に、全ての第２位置Ｐ２を含む領域が規定領域ΔＶ２に設定される構成としてもよい。 (3) In the above embodiment, when the second position P2 includes a plurality of positions, the swing drive unit 73 sets the region including the target second position P2a in the defined region ΔV2 and performs tilt angle adjustment control. The configuration to be executed has been described as an example. However, the present disclosure is not limited to such a configuration, and for example, when the height difference between a plurality of positions included in the second position P2 is small, the region including all the second positions P2 becomes the defined region ΔV2. It may be a configuration to be set.

（４）上記の実施形態では、第２角度が、物品９０の姿勢が水平姿勢Ｓ２となる角度とされる構成を例として説明した。しかし、本開示はそのような構成に限定されず、第２角度を、物品９０の姿勢が傾斜姿勢Ｓ１となる角度であって第１角度とは異なる角度（例えば、第１角度よりも小さい角度）とすることもできる。 (4) In the above embodiment, the configuration in which the second angle is the angle at which the posture of the article 90 is the horizontal posture S2 has been described as an example. However, the present disclosure is not limited to such a configuration, and the second angle is an angle at which the posture of the article 90 becomes the tilted posture S1 and is different from the first angle (for example, an angle smaller than the first angle). ).

（５）なお、上述した各実施形態で開示された構成は、矛盾が生じない限り、他の実施形態で開示された構成と組み合わせて適用すること（その他の実施形態として説明した実施形態同士の組み合わせを含む）も可能である。その他の構成に関しても、本明細書において開示された実施形態は全ての点で単なる例示に過ぎない。従って、本開示の趣旨を逸脱しない範囲内で、適宜、種々の改変を行うことが可能である。 (5) The configurations disclosed in each of the above-described embodiments should be applied in combination with the configurations disclosed in other embodiments as long as there is no contradiction (the embodiments described as other embodiments). (Including combinations) is also possible. With respect to other configurations, the embodiments disclosed herein are merely exemplary in all respects. Therefore, various modifications can be appropriately made without departing from the spirit of the present disclosure.

〔上記実施形態の概要〕
以下、上記において説明した搬送車の概要について説明する。 [Outline of the above embodiment]
Hereinafter, the outline of the transport vehicle described above will be described.

物品を搬送する搬送車であって、移動経路に沿って移動する本体部と、前記物品を保持する保持部と、前記保持部を前記本体部に対して昇降方向に昇降させる昇降装置と、を備え、前記保持部は、前記昇降装置に連結された第１部分と、前記第１部分を介して前記昇降装置に連結されると共に前記物品に接触する第２部分と、前記第１部分と前記第２部分との間に設けられ、前記第１部分に対する前記第２部分の傾斜角度を変更する角度調整機構と、を備えている。 A transport vehicle for transporting an article, a main body that moves along a movement path, a holding portion that holds the article, and an elevating device that raises and lowers the holding portion in the elevating direction with respect to the main body. The holding portion includes a first portion connected to the elevating device, a second portion connected to the elevating device via the first portion and in contact with the article, and the first portion and the above. It is provided between the second portion and includes an angle adjusting mechanism for changing the inclination angle of the second portion with respect to the first portion.

本構成によれば、保持部が角度調整機構を備えるため、保持部の姿勢を変更するための機構を昇降装置に設けなくても、角度調整機構により第１部分に対する第２部分の傾斜角度を変更することで、第２部分が接触する物品（すなわち、保持部に保持されている物品）の姿勢を所望の姿勢とすることができる。よって、搬送車の走行時における物品の姿勢を、搬送車の走行時に適した姿勢としつつ、保持部と移載対象箇所との間での物品の移載時における物品の姿勢を、当該移載対象箇所において要求される姿勢とすることができる。よって、搬送車の走行時には搬送車の走行時に適した姿勢で物品を保持部により保持しつつ、保持部と移載対象箇所との間での物品の移載時に移載対象箇所に配置される物品の姿勢を、当該移載対象箇所において要求される姿勢とすることが可能となっている。なお、本構成では、保持部の姿勢を変更するための機構を昇降装置に設ける必要がないため、昇降装置の複雑化を抑制しつつ本開示の搬送車を実現することができる。 According to this configuration, since the holding portion is provided with an angle adjusting mechanism, the tilt angle of the second portion with respect to the first portion can be adjusted by the angle adjusting mechanism without providing a mechanism for changing the posture of the holding portion in the elevating device. By changing the posture, the posture of the article with which the second portion contacts (that is, the article held by the holding portion) can be set to the desired posture. Therefore, while the posture of the article when the transport vehicle is traveling is set to a posture suitable for the traveling of the transport vehicle, the posture of the article when the article is transferred between the holding portion and the transfer target portion is the posture of the article. It can be the required posture at the target location. Therefore, while the article is held by the holding portion in a posture suitable for traveling the transport vehicle when the transport vehicle is traveling, the article is placed at the transfer target location when the article is transferred between the holding portion and the transfer target location. It is possible to set the posture of the article to the posture required at the transfer target location. In this configuration, since it is not necessary to provide the elevating device with a mechanism for changing the posture of the holding portion, it is possible to realize the transport vehicle of the present disclosure while suppressing the complexity of the elevating device.

ここで、前記昇降装置は、回転駆動される複数の回転体と、複数の前記回転体のそれぞれに巻き取り及び繰り出し自在に巻回された伝動部材と、を備え、前記第１部分は、前記伝動部材に連結されていると好適である。 Here, the elevating device includes a plurality of rotating bodies that are rotationally driven, and a transmission member that is freely wound and unwound around each of the plurality of rotating bodies, and the first portion is the said. It is preferable that it is connected to the transmission member.

本構成によれば、複数の回転体を回転させて伝動部材を巻き取り又は繰り出すことで、保持部を吊り下げ支持した状態で保持部を昇降させることができる。本開示の搬送車では、上述したように、保持部の姿勢を変更するための機構を昇降装置に設ける必要がない。そのため、本構成のように昇降装置が構成される場合に、吊り下げ支持される保持部の姿勢を変更可能に各部（回転体、伝動部材、回転体を回転駆動する駆動部等）を構成する必要はなく、昇降装置の簡素化を図ることができる。 According to this configuration, by rotating a plurality of rotating bodies to wind up or unwind the transmission member, the holding portion can be raised and lowered while the holding portion is suspended and supported. In the transport vehicle of the present disclosure, as described above, it is not necessary to provide the elevating device with a mechanism for changing the posture of the holding portion. Therefore, when the elevating device is configured as in this configuration, each part (rotating body, transmission member, driving part for rotationally driving the rotating body, etc.) is configured so that the posture of the holding part suspended and supported can be changed. It is not necessary, and the lifting device can be simplified.

また、前記角度調整機構は、前記第２部分に固定された揺動部材と、前記第１部分に固定されていると共に前記揺動部材を水平方向に沿う軸心周りに回転可能に支持する支持部材と、を備え、前記角度調整機構を駆動する駆動部が、前記揺動部材を前記軸心周りに揺動させるように構成されていると好適である。 Further, the angle adjusting mechanism includes a swing member fixed to the second portion and a support fixed to the first portion and rotatably supporting the swing member around an axis along the horizontal direction. It is preferable that the drive unit including the member and driving the angle adjusting mechanism is configured to swing the swing member around the axis.

本構成によれば、駆動部により揺動部材を軸心周りに揺動させることで、第１部分に対する第２部分の傾斜角度を大きくなるように変化させたり小さくなるように変化させたりすることができ、当該傾斜角度を変更する角度調整機構を適切に設けることができる。 According to this configuration, by swinging the swing member around the axis by the drive unit, the tilt angle of the second portion with respect to the first portion can be changed to be large or small. Therefore, an angle adjusting mechanism for changing the inclination angle can be appropriately provided.

また、前記物品は、側面に開口部を有する容器であり、前記昇降装置は、第１位置と、前記保持部による前記物品の保持及び保持解除を行う位置であって前記第１位置よりも下方の第２位置との間で、前記保持部を昇降させ、前記昇降方向における前記第２位置を含む領域を規定領域とし、前記開口部が斜め上方を向く前記物品の姿勢を傾斜姿勢とし、前記開口部が水平方向を向く前記物品の姿勢を水平姿勢として、前記角度調整機構を駆動する駆動部は、前記保持部が前記物品を保持している場合に、傾斜角度調整制御を実行し、前記傾斜角度調整制御は、前記保持部が前記規定領域の外部に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記傾斜姿勢となる角度である第１角度とし、前記保持部が前記第２位置に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記水平姿勢となる角度である第２角度とする制御であると好適である。 Further, the article is a container having an opening on the side surface, and the elevating device is a position where the article is held and released by the holding portion at a first position and below the first position. The holding portion is moved up and down between the second position and the holding portion, the region including the second position in the elevating direction is defined as a defined region, and the posture of the article with the opening facing diagonally upward is defined as an inclined posture. The drive unit that drives the angle adjustment mechanism executes the tilt angle adjustment control when the holding unit holds the article, with the posture of the article whose opening faces the horizontal direction as the horizontal posture. In the tilt angle adjustment control, when the holding portion is arranged outside the specified region, the tilting angle is set to a first angle at which the posture of the article becomes the tilting posture, and the holding portion sets the tilting angle. In the state of being arranged at the second position, it is preferable to control the inclination angle to be a second angle which is an angle at which the posture of the article becomes the horizontal posture.

本構成のように、物品が側面に開口部を有する容器である場合、物品の姿勢を傾斜姿勢とすることで、物品の姿勢が水平姿勢である場合に比べて、物品に収容された収容物が開口部から物品の外部に移動し難くすることができる。また、物品の姿勢を水平姿勢とすることで、開口部を介した収容物の物品に対する出し入れを行いやすくなる。本構成によれば、保持部が物品を保持している場合に傾斜角度調整制御が実行されるため、搬送車の走行時における保持部の位置を規定領域の外部の位置（例えば、第１位置）とすることで、搬送車の走行時や規定領域の外部での保持部の昇降時には、物品の姿勢を傾斜姿勢としつつ、保持部による物品の保持又は保持解除を行う物品の移載時には、物品の姿勢を水平姿勢とすることができる。 When the article is a container having an opening on the side surface as in the present configuration, by setting the posture of the article to the inclined posture, the contained object contained in the article is compared with the case where the posture of the article is the horizontal posture. Can be made difficult to move from the opening to the outside of the article. Further, by setting the posture of the article to the horizontal posture, it becomes easy to put in and take out the contained item through the opening. According to this configuration, since the tilt angle adjustment control is executed when the holding portion holds the article, the position of the holding portion when the transport vehicle is traveling is set to a position outside the specified region (for example, the first position). ), When the carrier is traveling or when the holding portion is raised or lowered outside the specified area, the posture of the article is set to an inclined posture, and when the holding portion holds or releases the article, the article is transferred. The posture of the article can be a horizontal posture.

上記のように前記駆動部が前記傾斜角度調整制御を実行する構成において、前記第２位置は、前記第１位置よりも下方の複数の位置を含み、複数の前記第２位置のうちの、前記保持部の昇降動作の始点又は終点となる前記第２位置を対象第２位置として、前記駆動部は、前記対象第２位置を含む領域を前記規定領域に設定して前記傾斜角度調整制御を実行すると好適である。 In the configuration in which the driving unit executes the tilt angle adjustment control as described above, the second position includes a plurality of positions below the first position, and the said second position among the plurality of the second positions. The driving unit executes the tilt angle adjustment control by setting the area including the target second position as the target second position as the target second position, which is the start point or the end point of the raising / lowering operation of the holding unit. Then, it is suitable.

本構成によれば、第２位置が複数の位置を含む場合に、規定領域よりも上方の領域と規定領域との境界を、その時点で昇降動作の始点又は終点となっている対象第２位置に比較的近い近接位置に設定することができる。よって、保持部が第１位置と近接位置との間の比較的大きい昇降範囲内に配置されている間、傾斜姿勢で物品を保持することができ、保持部に保持された物品を適切に昇降させやすくなる。 According to this configuration, when the second position includes a plurality of positions, the boundary between the area above the specified area and the specified area is the target second position which is the start point or the end point of the elevating operation at that time. It can be set to a position relatively close to. Therefore, while the holding portion is arranged within a relatively large elevating range between the first position and the proximity position, the article can be held in an inclined posture, and the article held by the holding portion can be appropriately raised and lowered. It will be easier to make.

また、前記駆動部は、前記物品を保持していない前記保持部が前記第２位置へ向かって下降している間、前記傾斜角度を前記第２角度とすると好適である。 Further, it is preferable that the driving portion has the tilt angle set to the second angle while the holding portion that does not hold the article is descending toward the second position.

本構成によれば、物品を保持していない保持部を第２位置へ向かって下降させる場合にも、物品を保持している保持部を第２位置へ向かって下降させる場合と同様に、保持部が規定領域の外部に配置されている状態では傾斜角度を第１角度とする場合に比べて、傾斜角度を第１角度から第２角度に変更する制御を保持部が規定領域に進入してから行う必要がない分、制御の簡素化や処理の高速化を図ることができる。 According to this configuration, even when the holding portion that does not hold the article is lowered toward the second position, the holding portion that holds the article is held as in the case of lowering the holding portion toward the second position. In the state where the unit is arranged outside the specified area, the holding unit enters the specified area to control the change of the inclination angle from the first angle to the second angle as compared with the case where the inclination angle is set to the first angle. Since it is not necessary to do it from the beginning, it is possible to simplify the control and speed up the processing.

本開示に係る搬送車は、上述した各効果のうち、少なくとも１つを奏することができればよい。 The transport vehicle according to the present disclosure may be capable of exhibiting at least one of the above-mentioned effects.

１：搬送車
２：移動経路
１０：本体部
２０：保持部
２１：第１部分
２２：第２部分
４０：角度調整機構
４１：揺動部材
４２：支持部材
５０：昇降装置
５１：回転体
５２：伝動部材
７３：揺動駆動部（駆動部）
９０：物品
９０ｂ：側面
９２：開口部
Ａ：傾斜角度
Ｐ１：第１位置
Ｐ２：第２位置
Ｐ２ａ：対象第２位置
Ｒ：軸心
Ｓ１：傾斜姿勢
Ｓ２：水平姿勢
Ｖ：鉛直方向（昇降方向）
Ｖ２：下方
ΔＶ２：規定領域 1: Transport vehicle 2: Movement path 10: Main body 20: Holding part 21: First part 22: Second part 40: Angle adjusting mechanism 41: Swing member 42: Support member 50: Elevating device 51: Rotating body 52: Transmission member 73: Swing drive unit (drive unit)
90: Article 90b: Side surface 92: Opening A: Tilt angle P1: First position P2: Second position P2a: Target second position R: Axial center S1: Tilt posture S2: Horizontal posture V: Vertical direction (up and down direction)
V2: Downward ΔV2: Specified area

Claims (6)

物品を搬送する搬送車であって、
移動経路に沿って移動する本体部と、前記物品を保持する保持部と、前記保持部を前記本体部に対して昇降方向に昇降させる昇降装置と、を備え、
前記保持部は、前記昇降装置に連結された第１部分と、前記第１部分を介して前記昇降装置に連結されると共に前記物品に接触する第２部分と、前記第１部分と前記第２部分との間に設けられ、前記第１部分に対する前記第２部分の傾斜角度を変更する角度調整機構と、を備えている、搬送車。 It is a transport vehicle that transports goods.
A main body that moves along a movement path, a holding portion that holds the article, and an elevating device that raises and lowers the holding portion in the elevating direction with respect to the main body are provided.
The holding portion includes a first portion connected to the elevating device, a second portion connected to the elevating device via the first portion and in contact with the article, and the first portion and the second portion. A transport vehicle provided between the portions and provided with an angle adjusting mechanism for changing the inclination angle of the second portion with respect to the first portion. 前記昇降装置は、回転駆動される複数の回転体と、複数の前記回転体のそれぞれに巻き取り及び繰り出し自在に巻回された伝動部材と、を備え、
前記第１部分は、前記伝動部材に連結されている、請求項１に記載の搬送車。 The elevating device includes a plurality of rotating bodies that are rotationally driven, and a transmission member that is freely wound and unwound around each of the plurality of rotating bodies.
The transport vehicle according to claim 1, wherein the first portion is connected to the transmission member. 前記角度調整機構は、前記第２部分に固定された揺動部材と、前記第１部分に固定されていると共に前記揺動部材を水平方向に沿う軸心周りに回転可能に支持する支持部材と、を備え、
前記角度調整機構を駆動する駆動部が、前記揺動部材を前記軸心周りに揺動させるように構成されている、請求項１又は２に記載の搬送車。 The angle adjusting mechanism includes a swing member fixed to the second portion and a support member fixed to the first portion and rotatably supporting the swing member around an axis along the horizontal direction. , Equipped with
The carrier according to claim 1 or 2, wherein the drive unit that drives the angle adjusting mechanism is configured to swing the swing member around the axis. 前記物品は、側面に開口部を有する容器であり、
前記昇降装置は、第１位置と、前記保持部による前記物品の保持及び保持解除を行う位置であって前記第１位置よりも下方の第２位置との間で、前記保持部を昇降させ、
前記昇降方向における前記第２位置を含む領域を規定領域とし、前記開口部が斜め上方を向く前記物品の姿勢を傾斜姿勢とし、前記開口部が水平方向を向く前記物品の姿勢を水平姿勢として、
前記角度調整機構を駆動する駆動部は、前記保持部が前記物品を保持している場合に、傾斜角度調整制御を実行し、
前記傾斜角度調整制御は、前記保持部が前記規定領域の外部に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記傾斜姿勢となる角度である第１角度とし、前記保持部が前記第２位置に配置されている状態では、前記傾斜角度を、前記物品の姿勢が前記水平姿勢となる角度である第２角度とする制御である、請求項１から３のいずれか一項に記載の搬送車。 The article is a container having an opening on the side surface.
The elevating device raises and lowers the holding portion between the first position and the second position below the first position, which is the position where the holding portion holds and releases the article.
The region including the second position in the elevating direction is defined as a defined region, the posture of the article with the opening facing diagonally upward is defined as an inclined posture, and the posture of the article with the opening facing horizontally is defined as a horizontal posture.
The drive unit that drives the angle adjustment mechanism executes the tilt angle adjustment control when the holding unit holds the article.
In the tilt angle adjustment control, when the holding portion is arranged outside the specified region, the tilting angle is set to a first angle at which the posture of the article becomes the tilting posture, and the holding portion is set. Is any one of claims 1 to 3, which is a control in which the tilt angle is set to the second angle, which is the angle at which the posture of the article becomes the horizontal posture, in the state where is arranged at the second position. The carrier described in. 前記第２位置は、前記第１位置よりも下方の複数の位置を含み、
複数の前記第２位置のうちの、前記保持部の昇降動作の始点又は終点となる前記第２位置を対象第２位置として、
前記駆動部は、前記対象第２位置を含む領域を前記規定領域に設定して前記傾斜角度調整制御を実行する、請求項４に記載の搬送車。 The second position includes a plurality of positions below the first position.
Of the plurality of the second positions, the second position, which is the start point or the end point of the elevating operation of the holding portion, is set as the target second position.
The transport vehicle according to claim 4, wherein the drive unit sets a region including the target second position in the specified region and executes the tilt angle adjustment control. 前記駆動部は、前記物品を保持していない前記保持部が前記第２位置へ向かって下降している間、前記傾斜角度を前記第２角度とする、請求項４又は５に記載の搬送車。 The transport vehicle according to claim 4 or 5, wherein the driving unit has the tilt angle as the second angle while the holding unit that does not hold the article is descending toward the second position. ..
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JP2017154840A (en) * 2016-02-29 2017-09-07 株式会社ダイフク Article conveyance facility
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