JP2022066416A - Shape measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shape measuring device that suppresses effect of disturbances in measurement environment and performs highly accurate measurement.

SOLUTION: There is provided a shape measuring device for bringing a contact piece into contact with a measurement object, moving the measurement object and the contact piece relative to each other and measuring a shape of the measurement object, the shape measuring device comprising: a vibration isolation table installed on an installation surface; a device body placed on the vibration isolation table; a first cover installed on the installation surface and enclosing the device body and the vibration isolation table; and a second cover for dividing the internal space of the first cover into a body chamber where at least a portion of the device body is arranged and a measurement object chamber where at least the measurement object is arranged, and having an opening through which a portion of the device body is inserted. The above problem is solved by the shape measuring device in which the first cover and the second cover are connected by a flexible member.

SELECTED DRAWING: Figure 2

COPYRIGHT: (C)2022,JPO&INPIT

Description

The present invention relates to a shape measuring device, and more particularly to a shape measuring device covered with a cover.

A shape measuring device for measuring the shape of a work by bringing a contactor into contact with a work to be measured and relatively moving the work and the contact is known. For example, a roundness measuring machine is known as a shape measuring device for measuring the roundness of a work (see Patent Document 1). The roundness measuring machine is a base, a rotary table placed on the base and rotating by placing a work on the upper surface, a column erected on the base, and a carriage supported by the column so as to be movable in the vertical direction. It is provided with an arm that is horizontally movable and supported by a carriage, and a detector that detects the displacement of a stylus that is supported by the arm and comes into contact with the surface of a work mounted on a rotary table.

In such a roundness measuring machine, the main body of the device is provided on the vibration isolation table in order to suppress the influence of vibration on the installation surface.

Japanese Unexamined Patent Publication No. 2016-65751

The roundness measuring machine deteriorates the measurement accuracy when a temperature gradient is generated in the base and the column due to the influence of heat and wind disturbance in the measurement environment. In order to prevent this, it is conceivable to cover the main body of the device with a cover to stabilize the temperature of the main body of the device. However, when the cover is installed on the vibration isolation table, the mass increases, which causes the vibration isolation table to become unstable and deteriorates the measurement accuracy.

On the other hand, it is conceivable to install the cover on the installation surface of the device. However, there is a problem that the work interlocking with the vibration isolation table and the cover may come into contact with each other due to the vibration of the vibration isolation table.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a shape measuring device that suppresses the influence of disturbance in the measuring environment and performs highly accurate measurement.

In order to achieve the above object, one aspect of the shape measuring device is a shape measuring device in which a contact is brought into contact with the object to be measured and the object to be measured and the contact are relatively moved to measure the shape of the object to be measured. , The vibration isolator installed on the installation surface, the device body mounted on the vibration isolation table, the first cover installed on the installation surface and surrounding the device body and the vibration isolation table, and the inside of the first cover. A second cover that divides the space into a main body room in which at least a part of the main body of the device is arranged and a room for an object to be measured in which at least a part of the device body is arranged, and has an opening through which a part of the device main body is inserted. The second cover is a shape measuring device supported by the main body of the device, and the first cover and the second cover are connected by a flexible member.

According to this aspect, the vibration isolation table installed on the installation surface, the device main body mounted on the vibration isolation table, the first cover installed on the installation surface and surrounding the device main body and the vibration isolation table, and the device. A second cover that has an opening through which a part of the main body is inserted and divides the space inside the first cover into a main body room in which the device main body is arranged and a measurement object room in which the object to be measured is installed. , And the second cover is supported by the main body of the device, and the first cover and the second cover are connected by a flexible member, so that the influence of disturbance in the measurement environment is suppressed and high accuracy is achieved. Measurements can be made.

The flexible member is preferably airtight. As a result, the airtightness of the main body chamber can be improved, the temperature of the main body chamber can be stabilized, and high-precision measurement can be performed.

It is preferable that a heat insulating material is provided inside the first cover. As a result, the heat outside the first cover can be prevented from being transferred to the inside of the first cover, and high-precision measurement can be performed.

The outer surface of the first cover is preferably white. As a result, light and infrared rays from the outside of the first cover are reflected to reduce the temperature rise inside the first cover, and high-precision measurement can be performed.

The outer surface of the first cover is preferably coated with a non-absorbent material of light and infrared rays. As a result, light and infrared rays from the outside of the first cover are reflected to reduce the temperature rise inside the first cover, and high-precision measurement can be performed.

The first cover is provided with a door for putting the object to be measured in and out of the object room to be measured, and the door preferably has a window portion made of a transparent member. As a result, the object to be measured can be easily taken in and out of the object room to be measured, and the inside can be observed from the window portion with the door closed, and the position and shape of the object to be measured can be measured. Therefore, the disturbance can be minimized and the measurement can be performed with high accuracy.

The main body of the device is horizontal with a base, a rotary table placed on the base and rotating by placing a work on the upper surface, a column standing on the base, and a carriage supported by the column so as to be movable in the vertical direction. It has an arm that is movably movable in the direction and is supported by the carriage, and a detector that is supported by the arm and detects the displacement of the stylus that comes into contact with the surface of the workpiece placed on the rotary table. However, the opening of the second cover has a first opening through which the rotary table is inserted and a second opening through which the arm is inserted, and the second cover is supported by the base and the column. As a result, it can be applied to a roundness measuring machine that measures the roundness of an object to be measured, and high-precision measurement can be performed.

The outer surface of the first cover preferably has a stepless shape from the height position of the upper end of the column to the height position of the lower end of the base. As a result, it is possible to prevent the generation of a temperature gradient on the surface of the first cover and perform highly accurate measurement.

According to the present invention, it is possible to suppress the influence of disturbance and perform highly accurate measurement.

External perspective view of the roundness measuring machine Outline of the configuration of the roundness measuring machine Outline of the configuration of the roundness measuring machine

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<Structure of roundness measuring machine>
FIG. 1 is an external perspective view of a roundness measuring machine 10 which is an example of a shape measuring device according to the present embodiment. Further, FIG. 2 is a configuration schematic diagram of the roundness measuring machine 10.

As shown in FIGS. 1 and 2, the roundness measuring machine 10 has a main body 26 (device) including a main body base 12, a rotary table 14, a column 16, a carriage 18, an arm 20, a detector 22, and a stylus 24. An example of the main body), a vibration isolation table 28, a first cover 30, a second cover 50, and the like are provided.

The vibration isolator 28 is a passive or active vibration isolator. The vibration isolation table 28 reduces the vibration of the vibration isolation surface 28A on the upper surface. The main body base 12 is placed on the vibration isolating surface 28A of the vibration isolating table 28. As a result, the vibration generated in the main body base 12 due to the disturbance is suppressed.

The main body base 12 is provided with a rotary table 14 on which the work W, which is the object to be measured, is placed. The rotary table 14 is finely fed in the ± X and ± Y directions by the ± X direction fine movement knob (not shown) and the ± Y direction fine movement knob (not shown), and the ± X direction tilt knob (not shown) and ± Y. The inclination is adjusted in the ± X direction and the ± Y direction by the direction inclination knob (not shown).

The ± X direction, the ± Y direction, and the ± Z direction are orthogonal to each other, the ± X direction is the horizontal direction (the moving direction of the arm 20 described later), and the ± Y direction is the horizontal direction orthogonal to the ± X direction. , ± Z direction is the vertical direction (moving direction of the carriage 18 described later). In the following, the + X direction may be described as left, the -X direction as the right, the + Y direction as the front, the -Y direction as the back, the + Z direction as the top, and the -Z direction as the bottom. Therefore, it is used for convenience and does not limit the orientation when using the device.

Inside the main body base 12, a motor (not shown) connected to the rotary table 14 is provided. The rotary table 14 rotates about a rotation axis parallel to the ± Z direction.

The work W is placed on the upper surface of the rotary table 14. The work W is placed so that its central axis is coaxial with the rotation axis of the rotary table 14. The work W placed on the rotary table 14 rotates about the rotation axis together with the rotary table 14.

Further, a column 16 extending in the ± Z direction is erected on the main body base 12, and a carriage 18 is movably supported in the column 16 in the ± Z direction. The carriage 18 moves in the ± Z direction by driving a motor (not shown).

An arm 20 is movably supported on the carriage 18 in the ± X direction. The arm 20 moves in the ± X direction by driving a motor (not shown).

A detector 22 is detachably attached to the tip of the arm 20. The detector 22 includes a stylus 24 that comes into contact with the surface of the work W. As the detector 22, for example, an electric micrometer using a differential transformer is used. The detector 22 measures the surface texture of the work W by bringing the stylus 24 into contact with the surface of the work W that rotates together with the rotary table 14 and detecting the displacement of the stylus 24.

The positions of the detector 22 in the ± Z direction and the ± X direction can be changed by moving the carriage 18 in the ± Z direction and the arm 20 in the ± X direction.

The roundness measuring machine 10 is placed on the installation surface 1A of the floor 1. Specifically, the vibration isolation table 28 and the first cover 30 are placed on the installation surface 1A parallel to the XY plane.

The first cover 30 surrounds the main body 26 and the vibration isolation table 28 in the front direction, the rear direction, the right direction, the left direction, and the upward direction. The first cover 30 includes a front cover 32, a back cover 34, a left side cover 36, a right side cover 38, and a top cover 40, each of which is composed of a plate-shaped member.

The front cover 32 and the back cover 34 are erected in parallel with the XZ plane and at regular intervals, respectively. The left side cover 36 and the right side cover 38 are erected in parallel with the YZ plane and at regular intervals, respectively. The left side cover 36 and the right side cover 38 connect the front cover 32 and the back cover 34, respectively. The top cover 40 is arranged parallel to the XY plane and connects the upper ends of the front cover 32, the back cover 34, the left side cover 36, and the right side cover 38.

The right side cover 38 has an inclined portion 38A inclined to the left on the upper portion thereof, and is connected to the upper surface cover 40 at the inclined portion 38A.

A heat insulating material is provided on the first cover 30. Here, a heat insulating material is attached to the inside of the first cover 30.

The outer surface of the first cover 30 is white. Further, the outer surface of the first cover 30 is coated with a non-absorbent material of light and infrared rays having high reflectance of light and infrared rays. Further, the outer surface of the first cover 30 has a stepless shape provided in parallel in the ± Z direction from the position of the height of the upper end of the column 16 to the position of the height of the lower end of the main body base 12.

The roundness measuring machine 10 includes a second cover 50. The second cover 50 is made of a material that does not transmit light and infrared rays. The second cover 50 includes at least the main body base 12, the column 16, the carriage 18 (an example of a part of the main body of the apparatus), the main body chamber 60A accommodating the vibration isolation table 28, and at least the work W inside the first cover 30. It is divided into a work room 60B (an example of an object room to be measured) to be accommodated.

The second cover 50 is composed of a horizontal portion 50A and a vertical portion 50B. The horizontal portion 50A is arranged horizontally on the XY plane. Further, the vertical portion 50B is arranged horizontally on the YZ plane. The back surface, left side surface, right side surface, upper surface, and bottom surface of the work chamber 60B are composed of a back surface cover 34, a left side surface cover 36, a vertical portion 50B, an upper surface cover 40, and a horizontal portion 50A, respectively. The front surface of the work room 60B will be described later.

The second cover 50 is supported in conjunction with the vibration isolating surface 28A of the vibration isolating table 28. Here, in the second cover 50, the horizontal portion 50A is supported by the support portion 52A on the main body base 12, and the vertical portion 50B is supported by the column 16 by the support portion 52B.

Further, the second cover 50 is provided with an opening 54A (an example of a first opening) in the horizontal portion 50A and an opening 54B (an example of a second opening) in the vertical portion 50B. A rotary table 14 is inserted through the opening 54A, and an arm 20 is inserted through the opening 54B. The openings 54A and 54B are aligned with respect to the main body base 12 and the column 16, respectively.

The first cover 30 and the second cover 50 are connected by using a flexible material. Here, the left side cover 36 of the first cover 30 and the horizontal portion 50A of the second cover 50 are connected by a flexible member 56A, and the upper surface cover 40 of the first cover 30 and the vertical portion 50B of the second cover 50 are connected. Are connected by a flexible member 56B. The flexible members 56A and 56B have substantially airtightness, respectively.

In this way, in the roundness measuring machine 10, the main body 26 is shielded from external heat, light, and wind by the first cover 30 and the second cover 50.

The front cover 32 covers the front surface of the main body chamber 60A. The front cover 32 is composed of a left front cover 32A connected to the left side cover 36 and a right front cover 32B connected to the right side cover 38.

The left front cover 32A and the right front cover 32B are arranged parallel to the XZ plane, respectively. Further, the right front cover 32B is arranged on the front side of the left front cover 32A. An inclined portion 32C inclined toward the back side is provided at the left end of the right front cover 32B, and the right front cover 32B is connected to the left front cover 32A at the inclined portion 32C.

A door 32D, which is an opening / closing mechanism for moving the work W in and out of the work chamber 60B, is provided on the front surface of the work chamber 60B of the first cover 30. The door 32D has a window portion 32E made of a transparent member. Here, the entire door 32D is composed of a transparent member, and the entire door 32D functions as the window portion 32E.

Inside the first cover 30, a guide portion (not shown) for sliding the door 32D along the inner surface of the first cover 30 is provided. When the user slides the door 32D to the left side, the door 32D moves along the guide portion to be in an open state, and the work room 60B is opened. FIG. 1 shows a state in which the door 32D is in the open state.

An operation unit 32F is provided at a position sandwiching the door 32D of the work chamber 60B. The operation unit 32F is an input interface for the user to operate the roundness measuring machine 10.

<Configuration of roundness measuring machine in comparative example>
FIG. 3 is a configuration schematic diagram of the roundness measuring machine 100 of the comparative example. The parts common to the schematic configuration diagram shown in FIG. 2 are designated by the same reference numerals, and detailed description thereof will be omitted. As shown in FIG. 3, the roundness measuring machine 100 includes a main body base 12, a rotary table 14, a column 16, a carriage 18, an arm 20, a detector 22, a stylus 24, a vibration isolator 28, and a first cover 102. And a second cover 104 and the like are provided.

The roundness measuring machine 100 is placed on the installation surface 1A of the floor 1. Specifically, the vibration isolation table 28 and the first cover 102 are placed on the installation surface 1A.

The first cover 102 is placed on the installation surface 1A. The first cover 102 includes a main body 26 including a main body base 12, a rotary table 14, a column 16, a carriage 18, an arm 20, a detector 22, and a stylus 24, and a vibration isolation table 28 in the forward and backward directions. Surrounds the right, left, and upward directions.

The second cover 104 is placed on the vibration isolating surface 28A of the vibration isolating table 28. The second cover 104 surrounds at least the main body base 12, the column 16, and the carriage 18 of the main body 26.

The space inside the first cover 102 is divided by the second cover 104 into a main body room 110A, which is a space inside the second cover 104, and a work room 110B, which is a space outside the second cover 104.

Further, the second cover 104 is provided with an opening 104A through which the rotary table 14 is inserted and an opening 104B through which the arm 20 is inserted.

The first cover 102 is provided with an opening (not shown) for opening the work chamber 110B and an opening / closing mechanism (not shown) for moving the work W in and out of the work chamber 110B.

<Effect of roundness measuring machine>
According to the roundness measuring machine 10, the following effects are obtained.

Since the main body 26 is covered with the first cover 30, it is possible to suppress the transmission of temperature changes in the surrounding environment to the main body 26 and stabilize the temperature of the main body 26. Further, since the heat insulating material is provided on the first cover 30, the influence of the temperature change in the surrounding environment can be further reduced. This makes it possible to perform highly accurate measurement.

Further, by making the outer surface of the first cover 30 white, it is possible to reflect light and infrared rays from the surrounding environment and reduce the temperature rise inside the first cover 30. Further, by painting the outer surface of the first cover 30 with a non-absorbent material of light and infrared rays, it is possible to reflect light and infrared rays from the surrounding environment and reduce the temperature rise inside the first cover 30. As a result, the temperature of the main body 26 can be stabilized, and high-precision measurement can be performed.

Further, since the main body 26 is covered by the first cover 30 arranged on the installation surface 1A, it is possible to prevent the wind in the surrounding environment from hitting the main body 26, and the vibration of the main body 26 due to the entrainment of the wind. Can be reduced. This makes it possible to perform highly accurate measurement.

Further, when a temperature gradient is generated in the main body portion 26, particularly the main body base 12 and the column 16, the measurement accuracy is adversely affected by the thermal deformation. According to the roundness measuring machine 10, since the outer surface of the first cover 30 has a stepless shape from the height of the column 16 to the height of the main body base 12, turbulence of wind is prevented and the generation of temperature gradient is suppressed. be able to. This makes it possible to perform highly accurate measurement.

Since the window portion 32E made of a transparent member is provided on the door 32D, the work chamber 60B can be observed from the window portion 32E with the door 32D closed. As a result, the position of the work W and the stylus 24 can be aligned and the roundness of the work W can be measured, and the disturbance can be minimized. In addition, the behavior at the time of measurement can be observed without causing disturbance.

The door 32D may be configured by a member that does not transmit the window portion 32E and does not transmit light and infrared rays. As a result, it is possible to suppress the intrusion of light and infrared rays from the surrounding environment into the work room 60B, and further minimize the disturbance. In this case, by providing a light source for illuminating the inside of the work chamber 60B and a camera for observing, it is possible to align the work W and the stylus 24 and measure the roundness of the work W with the door 32D closed. More preferred.

Since the main body chamber 60A and the work chamber 60B are separated by the second cover 50 and the openings 54A and 54B are provided in the second cover 50, the rotation of the work W in the work chamber 60B and the contact of the stylus 24 with the work W Is possible.

Here, in the roundness measuring machine 100 of the comparative example, the entire second cover 104 is placed on the vibration isolating surface 28A of the vibration isolating table 28. This is because when the second cover 104 is installed on the installation surface 1A, the opening may come into contact with the rotary table 14 or the arm 20 due to the vibration of the vibration isolation surface 28A.

On the other hand, the second cover 50 of the roundness measuring machine 10 minimizes the portion placed on the vibration isolating surface 28A. As a result, the mass applied to the vibration isolating surface 28A can be reduced, and the vibration isolating table 28 can be stabilized. Further, by minimizing the cover area affected by the wind, the influence of vibration can be reduced. Further, since the area for transmitting the heat from the light and infrared rays entering from the door 32D to the main body 26 is minimized, the temperature of the main body 26 is stable. As a result, the measurement can be made highly accurate and the measurement accuracy can be made highly stable.

Further, since the first cover 30 and the second cover 50 are connected via the flexible members 56A and 56B, vibration is less likely to be transmitted between the first cover 30 and the second cover 50. As a result, the influence of vibration can be suppressed and the measurement can be made highly accurate. Further, since the flexible members 56A and 56B having substantially airtightness are used, the airtightness of the main body chamber 60A can be enhanced and the temperature of the main body chamber 60A can be stabilized. As a result, the influence of temperature disturbance can be reduced and the measurement can be made highly accurate.

Since the volume of the work chamber 60B is smaller than that of the work chamber 110B of the roundness measuring machine 100, the volume of gas replaced when the door 32D is opened and the work W is replaced is small, and the temperature change of the work chamber 60B is minimized. Can be transformed into. As a result, the measurement accuracy can be stabilized and the tact time due to the replacement of the work W can be shortened.

Further, in the roundness measuring machine 100, in order to access the main body 26 for maintenance, it is necessary to provide maintenance doors (not shown) on both the first cover 102 and the second cover 104. On the other hand, the roundness measuring machine 10 can access the main body portion by opening one maintenance door (not shown) provided on the main body chamber 60A side of the first cover 30. As a result, the cost can be reduced and the maintainability can be improved.

<Others>
Here, the roundness measuring machine has been described, but it is applied to a shape measuring device that measures the shape of a measured object by bringing a contactor into contact with the object to be measured and relatively moving the object to be measured and the contact. Can be done.

The technical scope of the present invention is not limited to the scope described in the above embodiments. The configurations and the like in each embodiment can be appropriately combined between the embodiments without departing from the spirit of the present invention.

1 Floor 1A Installation surface 10 Roundness measuring machine 12 Main body base 14 Rotating table 16 Column 18 Carrying 20 Arm 22 Detector 24 Magnifier 26 Main body 28 Anti-vibration table 28A Anti-vibration surface 30 First cover 32 Front cover 32A Left front Cover 32B Right front cover 32C Inclined part 32D Door 32E Window 32F Operation unit 34 Back cover 36 Left side cover 38 Right side cover 38A Inclined part 40 Top cover 50 Second cover 50A Horizontal part 50B Vertical part 52A Support part 52B Support part 54A Opening 54B Opening 56A Flexible member 56B Flexible member 60A Main body room 60B Work room 100 Roundness measuring machine 102 First cover 104 Second cover 104A Opening 104B Opening 110A Main body room 110B Work room W Work

Claims (8)

In a shape measuring device that measures the shape of an object to be measured by bringing a contactor into contact with the object to be measured and relatively moving the object to be measured and the contact.
The vibration isolation table installed on the installation surface and
The main body of the device mounted on the vibration isolation table and
A first cover that is installed on the installation surface and surrounds the apparatus main body and the vibration isolation table, and
The space inside the first cover is divided into a main body chamber in which at least a part of the apparatus main body is arranged and at least a measurement object chamber in which the object to be measured is arranged, and a part of the apparatus main body is inserted. A second cover with an opening to
Equipped with
A shape measuring device in which the first cover and the second cover are connected by a flexible member. The shape measuring device according to claim 1, wherein the flexible member has airtightness. The shape measuring device according to claim 1 or 2, wherein a heat insulating material is provided inside the first cover. The shape measuring device according to any one of claims 1 to 3, wherein the outer surface of the first cover is white. The shape measuring device according to any one of claims 1 to 4, wherein the outer surface of the first cover is coated with a non-absorbent material of light and infrared rays. The first cover is provided with a door for putting the object to be taken in and out of the object chamber to be measured.
The shape measuring device according to any one of claims 1 to 4, wherein the door has a window portion made of a transparent member. The apparatus main body was supported by the base, a rotary table arranged on the base and rotating by placing a work on the upper surface, a column erected on the base, and the column movably movable in the vertical direction. The displacement of the carriage, the arm movably supported by the carriage in the horizontal direction, and the detector supported by the arm and in contact with the surface of the work mounted on the rotary table. With a detector to detect,
The opening of the second cover has a first opening through which the rotary table is inserted and a second opening through which the arm is inserted.
The shape measuring device according to any one of claims 1 to 6, wherein the second cover is supported by the base and the column. The shape measuring device according to claim 7, wherein the outer surface of the first cover has a stepless shape from the position of the height of the upper end of the column to the position of the height of the lower end of the base.

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