JP2022061858A - Fluid control valve - Google Patents

Abstract

To reduce shearing force applied to a piezoelectric element, in a fluid control valve including the piezoelectric element and a mechanical amplifier for enlarging displacement of the piezoelectric element.SOLUTION: A fluid control valve 10 has: a case 12 including an inner chamber 40 and openings A, P as gateways of a fluid; a piezoelectric element 44 telescopic along a telescopic shaft X; and a mechanical amplifier 54 for enlarging displacement of the piezoelectric element and displacing a valve portion 84 for opening and closing the openings. The mechanical amplifier includes: a support portion 60 disposed on the case and connected to an axial one end of the telescopic shaft of the piezoelectric element; a displacement portion 66 connected to the axial other end of the piezoelectric element; an arm 64 connected to the displacement portion at one end, connected to the support portion at an intermediate portion through a deformable amplifier hinge portion 62, and opening and closing one of the openings at the other end; and a balance mechanism 68 for applying a load in a direction opposite to a load of the direction orthogonal to the telescopic shaft, applied to the displacement portion by expansion of the piezoelectric element.SELECTED DRAWING: Figure 2

Description

The present invention relates to a fluid control valve for switching a flow path and adjusting a flow rate.

An electric switching valve that switches the flow direction of a fluid is known (for example, Patent Document 1). The electric switching valve of Patent Document 1 is a spool type, and spool liquid chambers are formed on both sides of the spool. Nozzles are connected to each of the spool liquid chambers, and the nozzles are connected to the discharge flow path connected to the tank line.

Each of the discharge passages is provided with an opening / closing mechanism for opening / closing the nozzle. The opening / closing mechanism includes a laminated piezoelectric element (electrostrain element) and a mechanical amplifier (displacement expansion mechanism) that expands the displacement of the piezoelectric element. The mechanical amplifier has a support arm fixed to the housing of the electric switching valve and an L-shaped lever connected to the support arm via a hinge. The lever seals the nozzle at one end and is connected to the piezoelectric element at the other end.

When a voltage is applied to the piezoelectric element, the piezoelectric element expands, the lever rotates around the hinge, and the nozzle is opened. When the nozzle is opened, one of the spool liquid chambers communicates with the tank line through the discharge flow path, and the liquid pressure in the spool liquid chamber is discharged. As a result, a difference in hydraulic pressure between the two spool liquid chambers is generated, the spool moves, and the fluid flow direction is switched.

By constructing the opening / closing mechanism using the piezoelectric element in this way, it is possible to respond at a higher speed than the solenoid type opening / closing mechanism. In addition, since opening and closing is performed using a single L-shaped lever, the size of the electric switching valve is smaller than when multiple levers are used or when a linear lever is used. Is planned.

Jitsufuku 3-43501 Gazette

In the electric switching valve of Patent Document 1, when the piezoelectric element is extended, the lever rotates about the hinge, so that the connection portion between the lever and the support arm moves along the arc around the hinge. Therefore, a load having a component in the direction orthogonal to the extension direction is applied to the coupling portion between the piezoelectric element and the lever. Of the load, the component in the direction orthogonal to the extension direction becomes a shearing force on the piezoelectric element, so that a load is applied to the piezoelectric element and the durability of the electromagnetic switching valve may decrease.

An object to be solved by the present invention is to reduce the shear force applied to the piezoelectric element in the piezoelectric element and the fluid control valve provided with the mechanical amplifier that expands the displacement of the piezoelectric element.

The fluid control valve (10, 110, 210, 310, 410) according to one embodiment of the present invention has an inner chamber (40) and at least two openings (A) that communicate with the inner chamber and serve as an inlet / outlet for fluid. , P), a piezoelectric element (44) that can be expanded and contracted along a predetermined expansion and contraction axis (X), and the piezoelectric element is expanded in displacement to open and close at least one of the openings. It has a mechanical amplifier (54) that displaces the valve portion (84), and the mechanical amplifier is provided in the case and is connected to one end of the expansion / contraction shaft of the piezoelectric element in the axial direction (60). And, via a displacement portion (66) coupled to the other end of the piezoelectric element in the axial direction, and an amplifier hinge portion (62) connected to the displacement portion at one end and deformable to the support portion at the intermediate portion. An arm (64) that opens and closes at least one of the openings at the other end, and a load in the direction opposite to the load in the direction orthogonal to the expansion and contraction axis applied to the displacement portion by the extension of the piezoelectric element. Includes a balance mechanism (68) to be added.

The displacement portion coupled to the piezoelectric element is displaced, and the displacement is input to one end of the arm connected to the displacement portion. By the so-called lever principle with the amplifier hinge portion as a fulcrum, the displacement on one end side is amplified and output to the other end of the arm, and an opening is opened. At this time, since one end of the arm is displaced in a direction deviated from the axial direction of the telescopic shaft, this displacement causes a load to be applied to the other end of the piezoelectric element via the displacement portion in a direction orthogonal to the extension direction, and the piezoelectric element is loaded. Shearing force may be applied.

According to the above configuration, when a load having a component in the direction orthogonal to the expansion / contraction axis is applied to the displacement portion, a load is applied from the balance mechanism so as to cancel the component. Therefore, the load is prevented from being transmitted to the other end of the piezoelectric element in the direction orthogonal to the extension direction through the displacement portion, and the shearing force in the direction orthogonal to the extension direction is reduced to the piezoelectric element.

In the fluid control valve, more preferably, the balance mechanism is a pseudo arm (80) coupled to the displacement portion, and a balance hinge portion (82) coupled to the pseudo arm and the support portion and deformable. The joint portion between the arm and the displacement portion and the joint portion between the pseudo arm and the displacement portion face each other via the expansion / contraction shaft.

According to this configuration, the displacement portion is coupled to the arm and the balance hinge portion at positions facing each other via the telescopic shaft. Therefore, when a load having a component in the direction orthogonal to the expansion / contraction axis applied from the arm is applied to the displacement portion via the balance hinge portion, a load in the opposite direction facing the component can be applied.

In the fluid control valve (10), more preferably, the support portion extends in the direction of the expansion / contraction shaft, and the first support portion (60B) and the second support portion are arranged at positions facing each other via the piezoelectric element. (60C) is included, the amplifier hinge portion extends from the first support portion along the telescopic axis, and the balance hinge portion has a cross section having the same shape as the amplifier hinge portion and is described from the second support portion. The displacement portion extends along the telescopic shaft, and the displacement portion extends from the cap portion (72) coupled to the other end of the piezoelectric element and the cap portion along the telescopic shaft, and is connected to the arm. It has a uniaxially extending portion (74) and a second axially extending portion (76) extending from the cap portion along the telescopic axis and connected to the pseudo arm, and the displacement portion is described above. It is axially symmetric with respect to the telescopic axis, and in the axial direction, the base end (82A) of the balance hinge portion is located closer to the one end side of the piezoelectric element than the base end (62A) of the amplifier hinge portion.

According to this configuration, the base end of the balance hinge portion and the base end of the amplifier hinge portion are added to the displacement portion from the arm via the balance hinge portion rather than when they are aligned in the axial direction of the telescopic shaft. The load can be applied so as to more cancel the load in the direction orthogonal to the expansion / contraction axis.

In the fluid control valve (210), more preferably, the support portion extends in the direction of the expansion / contraction shaft, and the first support portion (60B) and the second support portion arranged at positions facing each other via the piezoelectric element. (60C) is included, the amplifier hinge portion extends from the first support portion along the telescopic axis, and the balance hinge portion has a cross section having the same shape as the amplifier hinge portion and is described from the second support portion. The displacement portion extends along the expansion / contraction shaft, and the displacement portion extends from the cap portion (72) coupled to the other end of the piezoelectric element and the cap portion along the expansion / contraction shaft, and is connected to the arm. It has a uniaxial extending portion (74) and a second axial extending portion (76) extending from the cap portion along the telescopic axis and connected to the pseudo arm, and in the axial direction, The base end (82A) of the balance hinge portion is located at a position consistent with the base end (62A) of the amplifier hinge portion, and the side edge of the arm located on the other end side of the piezoelectric element is the piezoelectric element. It is located on the other end side of the piezoelectric element with respect to the side edge of the pseudo arm located on the other end side of the piezoelectric element.

According to this configuration, the side edge of the arm located on the other end side of the piezoelectric element and the side edge of the pseudo arm located on the other end side of the piezoelectric element are aligned in the axial direction of the expansion / contraction axis. Also, a load can be applied to the displacement portion via the balance hinge portion so as to more cancel the load in the direction orthogonal to the expansion / contraction axis applied from the arm.

In the fluid control valve (310), more preferably, the support portion extends in the direction of the expansion / contraction shaft, and the first support portion (60B) and the second support portion are arranged at positions facing each other via the piezoelectric element. (60C) is included, the amplifier hinge portion extends from the first support portion along the telescopic shaft, the balance hinge portion extends from the second support portion along the telescopic shaft, and the displacement portion extends. A cap portion (72) coupled to the other end of the piezoelectric element, a first axial extending portion (74) extending from the cap portion along the telescopic axis and connected to the arm, and the above. It has a second axial extension portion (76) extending from the cap portion along the telescopic axis and connected to the pseudo-arm, the displacement portion being axially symmetric with respect to the telescopic axis, and the axis. In the direction, the base end (82A) of the balance hinge portion is in a position consistent with the base end (62A) of the amplifier hinge portion, and the cross-sectional area of the balance hinge portion is partially different from other portions.

According to this configuration, by adjusting the cross-sectional area of the balance hinge portion, a load is applied to the displacement portion via the balance hinge portion so as to more offset the load in the direction orthogonal to the expansion / contraction axis applied from the arm. Can be done.

In the fluid control valve (10, 110, 210, 310, 410), more preferably, the bending point (P2) of the balance hinge portion and the bending point (P1) of the amplifier hinge portion are centered on the expansion / contraction shaft. Axisymmetric as.

According to this configuration, as compared with the case where the bending point of the balance hinge portion and the bending point of the amplifier hinge portion are not axisymmetric with respect to the expansion / contraction axis, the expansion / contraction shaft applied from the arm to the displacement portion via the balance hinge portion. Loads can be applied to more offset the loads in the orthogonal directions.

In the fluid control valve (10, 110, 210, 310, 410), more preferably, in the case, the inner chamber is a first space (90, 190) for accommodating the piezoelectric element, and two. A partition wall (94) is provided to partition the second space (92, 192) including the passage connecting the openings.

According to this configuration, the inner chamber is separated into a first space provided with the piezoelectric element and a second space through which the fluid flows through the two through holes. Therefore, it is possible to prevent the fluid from entering the space provided with the piezoelectric element, and it is possible to protect the piezoelectric element.

In the fluid control valve (10, 110, 210, 310, 410), preferably the partition wall defines at least a part of the arm passage (32A, 130) through which the arm passes (30D, 126A). , 126B, 126D) and elastically deformable seal members (70, 170) provided between the arm and the wall surface defining the passage.

According to this configuration, since the space between the arm and the passage is sealed by an elastically deformable sealing member, the arm is displaced while the inner chamber is divided into a first space and a second space. Can be done. Further, the vibration generated in the arm can be damped by the seal member.

In the fluid control valve (10, 210, 310, 410), preferably, the wall body has a through hole (32) defining the arm passage, and the sealing member has a wall surface defining the through hole. It is provided between the arm and the arm.

According to this configuration, the inner chamber can be divided into a first space and a second space, and the arm can be displaced.

In the fluid control valve (110), preferably, the wall body defines the arm passage in cooperation with the wall surface defining the inner chamber, and the seal member (170) is the wall body and the inner chamber. Is provided between the wall surface defining the arm and the arm.

According to this configuration, the inner chamber can be divided into a first space and a second space, and the arm can be displaced.

In the fluid control valve (10, 110, 210, 310, 410), preferably, the first space communicates with the outside of the case via the connector hole (42) and is aligned with the connector hole. Is provided with a connector (C) for supplying a voltage to the piezoelectric element.

According to this configuration, the connector can be easily assembled and it is not necessary to use the connector hole having a sealing function, so that the fluid control valve can be miniaturized.

In the fluid control valve (10, 110, 210, 310, 410), an elastomer valve body is preferably integrally formed at one end of the arm.

According to this configuration, the valve body more reliably seals the opening.

In the fluid control valve (410), a valve seat (52) made of an elastomer is preferably provided in the opening opened and closed by the arm.

According to this configuration, the valve body more reliably seals the opening.

According to the present invention, it is possible to reduce the shearing force applied to the piezoelectric element in the piezoelectric element and the fluid control valve provided with the mechanical amplifier that expands the displacement of the piezoelectric element.

Perspective view of the fluid control valve according to the first embodiment (A) A cross-sectional view taken along the line II-II of FIG. 1 and (B) an enlarged view of the portion surrounded by the two-dot chain line. Section III-III sectional view of FIG. An exploded perspective view of the fluid control valve according to the first embodiment. Cross-sectional view of the fluid control valve when the piezoelectric element is extended (A) When the base end of the balance hinge part and the base end of the amplifier hinge part are aligned in the left-right direction, and (B) When the base end of the balance hinge part is located on the left side of the base end of the amplifier hinge part. A diagram showing the stress distribution inside the plate when the piezoelectric element is stretched. Perspective view of the fluid control valve according to the second embodiment VIII-VIII sectional view of FIG. IX-IX sectional view of FIG. An exploded perspective view of the fluid control valve according to the second embodiment. The figure which shows the shape of the plate (A) of the fluid control valve which concerns on 3rd Embodiment, and (B) the stress distribution inside the plate when the piezoelectric element is extended. Explanatory drawing for explaining the shape of the plate of the fluid control valve which concerns on 4th Embodiment Sectional drawing of the fluid control valve which concerns on 5th Embodiment

Hereinafter, the fluid control valve according to the present invention is used to control the connection state of a plurality of ports each defining a flow path. Hereinafter, four embodiments in which the present invention is applied to a fluid control valve that controls the connection state of two ports will be described. In the following, according to the arrows shown in FIG. 1, the vertical, front-back, and left-right directions are conveniently determined and described.

<< First Embodiment >>
As shown in FIG. 1, the fluid control valve 10 according to the first embodiment has a substantially rectangular parallelepiped shape having surfaces facing in each of the vertical, front-rear, and left-right directions. On the upper surface of the fluid control valve 10, a supply port P that serves as an inlet for a fluid such as compressed air and an output port A that serves as an outlet for the fluid are provided. The supply port P and the output port A are arranged side by side.

As shown in FIGS. 1 to 4, the fluid control valve 10 has a case 12 having a substantially rectangular parallelepiped shape. The case 12 is composed of a case main body 14 constituting the front lower half portion thereof, an upper member 16 constituting the upper half portion thereof, and a cover member 18 constituting the lower half portion thereafter.

The upper member 16 has a rectangular parallelepiped shape extending to the left and right, and is provided with two through holes 20L and 20R for ports that penetrate vertically. The two port through holes 20L and 20R are arranged so as to be arranged side by side. The output port A is defined by the upper end opening portion of the port through hole 20L on the left side, and the supply port P is defined by the upper end opening portion of the port through hole 20R on the right side.

In the present embodiment, as shown in FIGS. 2A and 3, the upper member 16 includes a first upper member 16U constituting the upper portion thereof, a second upper member 16D constituting the lower portion thereof, and a first upper member. It is composed of a tubular member 22 provided between the 16U and the second upper member 16D. Two through holes 24LU and 24RU (24LD, 24RD) penetrating in the vertical direction are arranged side by side in the first upper member 16U (second upper member 16D). The two through holes 24LU and 24RU of the first upper member 16U and the through hole 24RD on the right side of the second upper member 16D each form a circle, and the through hole 24LD on the left side of the second upper member 16D has a length extending in the left-right direction. It has a hole shape.

The tubular member 22 has a tubular shape with an inner hole 22A penetrating vertically. The inner hole 22A has an elongated cross section extending in the left-right direction. The tubular member 22 is housed in the through hole 24LD on the left side of the second upper member 16D. The first upper member 16U and the second upper member 16D are co-tightened to the upper surface of the case main body 14 and coupled to the upper surface of the case main body 14. At this time, the through hole 24LU on the left side of the first upper member 16U and the through hole 24LD on the left side of the second upper member 16D are vertically aligned to form the through hole 20L for the port on the left side, and the right side of the first upper member 16U. The through hole 24RU and the right through hole 24RD of the second upper member 16D are vertically aligned to form the right through hole 20R for the port.

As shown in FIG. 2A, the tubular member 22 is housed in the through hole 24LD on the left side of the second upper member 16D in a state where the lower end thereof projects below the lower surface of the second upper member 16D. .. In this embodiment, the tubular member 22 is made of a metal member.

As shown in FIGS. 3 and 4, the case main body 14 includes a main body upper portion 26 constituting the upper portion thereof and a main body lower portion 28 extending downward from the lower front portion of the lower surface front portion of the main body upper portion 26. The upper part 26 of the main body has a rectangular parallelepiped shape extending in the left-right direction. The upper surface of the upper portion 26 of the main body is provided with an upper concave portion 30 having a rectangular opening and denting downward. As shown in FIGS. 2 (A) and 3 (A), a through hole 32 penetrating vertically is provided on the right edge of the bottom wall 30D (lower wall) of the upper recess 30.

The lower part 28 of the main body has a rectangular plate shape having a main surface facing in the front-rear direction. As shown in FIGS. 2A and 4, the rear surface of the lower portion 28 of the main body has an accommodation recess 34 that is recessed forward, and a groove portion that is recessed forward like the accommodation recess 34 and extends downward from the lower right edge of the accommodation recess 34. 36 is provided.

The cover member 18 has a plate shape having a surface facing in the front-rear direction. The cover member 18 has a rectangular plate shape that matches the lower portion 28 of the main body, and is fastened to the rear side surface of the lower portion 28 of the main body. A notch 38 notched upward in a square shape is provided at a position on the lower right edge of the cover member 18 that matches the groove 36.

The accommodating recess 34 of the case body 14 is closed by the cover member 18, and the upper member 16 is fastened to the upper surface of the case body 14, so that the inside of the case 12 is connected to the two port through holes 20L and 20R. An inner chamber 40 (that is, communicating with the supply port P and the output port A) is formed. As shown in FIG. 3, the inner chamber 40 communicates with the outside through the groove 36. That is, by providing the groove portion 36, the case 12 is formed with a connector hole 42 that allows the inner chamber 40 to communicate with the outside.

As shown in FIGS. 2A and 4, the inner chamber 40 includes a piezoelectric element 44, a valve body 46 that abuts on the lower end of the tubular member 22 and closes the lower end of the port through hole 20L on the left side, and piezoelectric. A plate 48 that transmits the displacement of the element 44 to the valve body 46 is housed.

The piezoelectric element 44 is a laminated piezoelectric actuator configured by laminating a plurality of piezoelectric bodies 44A, and is arranged so that the stacking direction of the piezoelectric bodies 44A is the left-right direction in the present embodiment. An electrode is provided between the piezoelectric bodies 44A. The electrodes between the piezoelectric bodies 44A are connected to the corresponding positive or negative terminals provided on the side surfaces of the piezoelectric element 44, respectively. Wiring 50 is connected to each terminal. When a predetermined voltage is applied between the two wirings 50, the piezoelectric body 44A is deformed, the piezoelectric element 44 expands in the stacking direction thereof, and when the voltage becomes zero, the piezoelectric element 44 shrinks and returns to its original size. ..

The piezoelectric element 44 has a flat plate shape extending in the stacking direction. The piezoelectric element 44 is arranged so that the main surface faces the front-rear direction and the stacking direction (that is, the expansion / contraction direction) is the left-right direction. Hereinafter, the axis that passes through the center of the piezoelectric element 44 and extends in the stacking direction (left-right direction) will be referred to as an expansion / contraction axis X. The piezoelectric element 44 is vertically symmetrical with respect to the expansion / contraction axis X. The piezoelectric element 44 extends along the telescopic shaft X when no load is applied or only a load along the telescopic shaft X is applied.

The wiring 50 connected to the piezoelectric element 44 is connected to the connector C. The connector C is housed in the groove 36 on the lower side of the connector hole 42 and is coupled to the front surface of the case body 14.

The valve body 46 is a sheet-like member made of elastically deformable resin (elastomer), and abuts on the lower end of the tubular member 22 to seal the tubular member 22. That is, the lower end of the tubular member 22 constitutes a portion that receives the valve body 46, that is, the valve seat 52. In the present embodiment, the valve body 46 is integrally formed on the plate 48 by cutting out an elastically deformable resin sheet material into a rectangular shape and welding the cut out sheet-shaped member to the plate 48. ..

The plate 48 is a metal plate-shaped member processed into a predetermined shape, and is made of a low expansion alloy (Invar) in the present embodiment. In the present embodiment, the plate 48 is manufactured by press-molding a single metal plate or wire-cut electric discharge machining.

The plate 48 functions as a so-called mechanical amplifier 54 (displacement expansion mechanism) that amplifies (enlarges) the amount of displacement generated at the end of the piezoelectric element 44 and transmits it to the valve body 46. Hereinafter, the structure of the plate 48 will be described in detail with reference to FIGS. 2 (A) and 2 (B).

The plate 48 is fixed to the case 12, and the support portion 60 that supports the piezoelectric element 44, the arm 64 that is connected to the support portion 60 via the amplifier hinge portion 62, and the displacement that connects the piezoelectric element 44 and the arm 64. A unit 66 and a balance mechanism 68 are included.

The support portion 60 has a rectangular plate-shaped support base portion 60A extending in the vertical direction and a rectangular plate-shaped first support pillar portion 60B (first support portion) extending in the right direction (direction of the expansion / contraction axis X) from the upper end of the support base portion 60A. And a rectangular plate-shaped second support pillar portion 60C (second support portion) extending from the lower end of the support base portion 60A in the extension direction of the first support pillar portion 60B (axial direction of the expansion / contraction axis X, to the right). It is equipped with. At the center of the right edge of the support base 60A, a support convex portion that protrudes in the shape of a rectangular plate is provided to the right. The left end of the piezoelectric element 44 (one end in the axial direction of the telescopic shaft X) is connected to the right end of the support convex portion, and the first support pillar portion 60B and the second support pillar portion 60C face each other up and down via the piezoelectric element 44. ing. Through holes are provided in the first support pillar portion 60B and the second support pillar portion 60C, respectively, and are fastened to the bottom surface (front surface) of the accommodating recess 34 of the case body 14 by fasteners (screws). As a result, the support portion 60 is fixed to the case 12.

The left edges of the first support pillar portion 60B and the second support pillar portion 60C are provided at positions aligned vertically. In the present embodiment, the length of the first support pillar portion 60B in the left-right direction (axial direction of the expansion / contraction axis X) is longer than the length of the second support pillar portion 60C in the left-right direction, and is to the right of the first support pillar portion 60B. The edge is located to the right of the right edge of the second support column 60C (that is, the right edge of the second support column 60C is to the left of the first support column 60B).

The arm 64 has an arm base 64A extending in the vertical direction, an arm extending portion 64B extending in the left-right direction (leftward on the paper) from the upper end of the arm base 64A, and an arm base end extending downward from the lower right end of the arm base 64A. It includes a portion 64C and forms an L-shape when viewed in the anteroposterior direction. The valve body 46 is provided on the upper surface of the left end (extended end, also referred to as a free end) of the arm 64. As shown in FIG. 2A, the left end portions of the arm base end portion 64C and the arm extension portion 64B form both end portions of the arm 64, and the arm base portion 64A is located in the middle portion of the arm 64.

As shown in FIG. 2A, the arm base portion 64A passes through the through hole 32 provided in the wall body (bottom wall 30D of the upper recess 30). In other words, the arm base 64A passes through the inside of the arm passage (arm passage 32A) defined by the through hole 32. A sealing member 70 is provided between the outer peripheral surface of the arm base 64A and the wall surface defining the through hole 32 to seal the gap.

The amplifier hinge portion 62 has a plate shape extending in the left-right direction. The width of the amplifier hinge portion 62 in the vertical direction (direction orthogonal to the extending direction) is the vertical width of the first support pillar portion 60B, the vertical width of the second support pillar portion 60C, and the arm base portion 64A. It is smaller than any of the widths in the left-right direction, and is more easily deformable than any of the first support column portion 60B, the second support column portion 60C, and the arm base portion 64A. Specifically, the amplifier hinge portion 62 connects the lower right end of the first support pillar portion 60B and the lower left end of the arm base portion 64A.

As shown in FIG. 2B, the displacement portion 66 has a cap portion 72 coupled to the right end of the piezoelectric element 44 and the cap portion 72 to the right (that is, along the expansion / contraction axis X) from the upper end of the right edge of the cap portion 72. A first axial extension portion 74 extending and a second axial extension portion 76 extending to the right from the lower end of the lower edge of the cap portion 72 are provided. The first axial extension portion 74 is connected to the left edge of the arm base end portion 64C at the right end.

As shown in FIG. 2A, in the present embodiment, the displacement portion 66 is axisymmetric with respect to the expansion / contraction axis X.

The balance mechanism 68 is a mechanism for applying a load that balances the load applied to the piezoelectric element 44 to reduce the shearing force applied to the piezoelectric element 44, and is coupled to the displacement portion 66 as shown in FIG. 2 (B). The pseudo-arm 80 is included, and the pseudo-arm 80 and the balance hinge portion 82 coupled to the support portion 60 are included. The pseudo-arm 80 is located symmetrically with respect to the arm base end portion 64C and the telescopic axis X, is connected to the right edge of the second axial extension portion 76 at the upper left edge, and extends downward. The balance hinge portion 82 extends to the right from the upper right edge of the second support pillar portion 60C, and is connected to the lower left edge of the pseudo arm 80 at the upper right edge.

The displacement portion 66 is located at the right end of the piezoelectric element 44 (the other end in the axial direction of the telescopic shaft X) in the cap portion 72, and at the lower left edge of the arm base end portion 64C at the right edge of the first axial extension portion 74. The right edge of the uniaxial extending portion 74 is connected to the upper left edge of the pseudo arm 80, respectively.

The joint portion between the arm 64 and the displacement portion 66 (more specifically, the joint portion between the arm base end portion 64C and the first axial extension portion 74), and the pseudo arm 80 and the displacement portion 66 (second axial extension portion). The joint portion of 76) is located at a position facing up and down via the expansion / contraction axis X (more specifically, about the expansion / contraction axis X).

The vertical width of the balance hinge portion 82 (the width in the direction orthogonal to the extending direction) is the vertical width of the first support pillar portion 60B, the vertical width of the second support pillar portion 60C, and the arm base portion. It is smaller than any of the widths in the left-right direction of 64A, and can be elastically deformed more easily than any of the first support column portion 60B, the second support column portion 60C, and the arm base portion 64A. In the present embodiment, the vertical width of the balance hinge portion 82 is equal to the vertical width of the amplifier hinge portion 62. The cross section of the balance hinge portion 82 has the same shape as the cross section of the amplifier hinge portion 62, and the cross-sectional areas of both are equal to each other. Further, the first axial extension portion 74 and the second axial extension portion 76 also have substantially the same vertical width as the balance hinge portion 82 and the amplifier hinge portion 62, and the first support pillar portion. It is more easily elastically deformable than any of the 60B, the second support column portion 60C, and the arm base portion 64A.

In the present embodiment, as shown in FIG. 2B, the base end 82A (left end) of the balance hinge portion 82 is on the left side of the base end 62A (left end) of the amplifier hinge portion 62, that is, the support of the piezoelectric element 44. It is located on the side of the end (left end) fixed to the portion 60.

Next, the operation and effect of the fluid control valve 10 according to the first embodiment configured in this way will be described.

When no voltage is applied to the piezoelectric element 44, the valve body 46 abuts on the valve seat 52, and the valve body 46 seals the lower end of the port through hole 20L on the left side. As a result, the flow path connecting the supply port P and the output port A is closed.

As shown in FIG. 5, when a power supply is connected to the connector C and a predetermined voltage is applied between the wirings 50, the piezoelectric element 44 extends in the stacking direction thereof. As a result, the cap portion 72 is pushed out to the right (see the black arrow), and the lower end of the arm base 64A connected to the cap portion 72 is also pushed out to the right. As a result, the amplifier hinge portion 62 is elastically deformed, and as shown by the white arrow in FIG. 5, the arm 64 is displaced so as to substantially rotate around the point P0 on the amplifier hinge portion 62. As a result, the valve body 46 moves away from the valve seat 52, and the lower end of the port through hole 20L on the left side is opened. As a result, a flow path connecting the supply port P and the output port A is formed and is in an open state. As described above, the arm 64 constitutes a valve portion 84 at the left end, which opens and closes the left port through hole 20L according to the voltage applied to the piezoelectric element 44.

At this time, the displacement of the left end of the arm extension portion 64B, which is the point of action, is determined by the so-called lever principle, in which the coupling portion between the arm 64 and the displacement portion 66 is the force point and the point P0 on the amplifier hinge portion 62 is the fulcrum. It is larger than the displacement of the right end of the piezoelectric element 44. In this way, the plate 48 functions as a mechanical amplifier 54 (displacement expansion mechanism) that expands the displacement amount of the piezoelectric element 44 and outputs it as the displacement amount of the valve body 46. By amplifying the displacement of the piezoelectric element 44 by using the mechanical amplifier 54, it is possible to easily secure a sufficiently large stroke that can separate the valve body 46 from the valve seat 52. Further, since the amplification factor can be adjusted by adjusting the length of the arm extending portion 64B in the left-right direction, it is easy to secure a stroke for separating the valve body 46 from the valve seat 52. Further, by adjusting the extension amount of the piezoelectric element 44 by the voltage applied to the piezoelectric element 44, the gap between the valve body 46 and the lower end opening portion of the tubular member 22 can be adjusted, so that the supply port P and the supply port P can be adjusted. The flow rate between the output port A (more specifically, the conductance of the flow path connecting the supply port P and the output port A) can be adjusted.

When the voltage applied to the piezoelectric element 44 is reduced to zero, the piezoelectric element 44 contracts and returns to its original length, and the valve body 46 seals the lower end of the port through hole 20L on the left side. As a result, the flow path connecting the supply port P and the output port A is closed.

When a voltage is applied to the piezoelectric element 44 to extend it, the arm 64 moves as shown by the white arrow in FIG. As a result, a load is applied to the support portion 60 from the arm 64 in a direction different from the expansion / contraction axis X (that is, in the left-right direction). Since the component in the direction orthogonal to the extension direction (vertical direction) of this load functions as a shearing force on the piezoelectric element 44, it becomes a factor that lowers the durability of the fluid control valve 10.

The displacement portion 66 is coupled to the arm 64 portion and the balance hinge portion 82 at positions facing each other up and down via a telescopic shaft X. Therefore, when a load having an upward component is applied to the support portion 60 from the arm 64, a load having a downward component facing the upward component of the load is applied to the displacement portion 66 via the balance hinge portion 82. As a result, the upward component of the load applied to the support portion 60 from the arm 64 is offset by the downward component of the load applied from the balance hinge portion 82. That is, in order to cancel the component of the load applied to the displacement portion 66 from the arm 64 in the upward direction (direction orthogonal to the expansion / contraction axis X) by the balance hinge portion 82, the load in the opposite direction facing the component (that is, the load to be balanced). ) Is added to the displacement portion 66 to form a balance mechanism 68. By this balance mechanism 68, it is possible to prevent a shearing force in the vertical direction from being applied to the right end of the piezoelectric element 44 via the displacement portion 66, and the force generated by the piezoelectric element 44 can be effectively utilized.

As shown in FIG. 2A, one arm 64 is provided on the plate 48 at a position deviated from the telescopic axis X. As a result, the plate 48 is asymmetric with respect to the telescopic axis X. Therefore, when the portion of the plate 48 surrounded by the alternate long and short dash line is made symmetrical with respect to the expansion / contraction axis X, the plate 48 becomes the expansion / contraction axis X when the piezoelectric element 44 is extended. On the other hand, it is predicted that the piezoelectric element 44 is deformed asymmetrically and a load is applied to the right end of the piezoelectric element 44 in a direction orthogonal to the expansion / contraction axis X.

6 (A) shows the base end 82A of the balance hinge portion 82 in FIG. 6 (B) when the portion surrounded by the alternate long and short dash line shown in FIG. 2 is symmetrical with respect to the telescopic axis X. A simulation of the shape of the plate 48 and the stress distribution when the piezoelectric element 44 is extended when it is located on the left side of the base end 62A of the amplifier hinge portion 62 is shown. In FIG. 6A, the base end 82A of the balance hinge portion 82 and the base end 62A of the amplifier hinge portion 62 are aligned in the left-right direction, and the right end of the first support pillar portion 60B and the second support pillar portion 60C. The right end of is aligned in the left-right direction. In FIGS. 6A and 6B, it is shown that the stress becomes thicker as the stress increases, and the shape of the plate 48 before deformation due to the elongation of the piezoelectric element 44 is shown by a two-dot chain line.

Comparing FIGS. 6 (A) and 6 (B), it can be seen that the stress distribution in FIG. 6 (B) is more symmetric with respect to the telescopic axis X than the stress distribution in FIG. 6 (A). More specifically, assuming that the point at which the amplifier hinge portion 62 has the highest stress and bends most strongly (hereinafter referred to as the bending point) is P1 and the bending point of the balance hinge portion 82 is P2, FIG. 6B is shown in FIG. It can be understood that the lateral deviation δ between P1 and P2 is sufficiently smaller than that in (A), and P1 and P2 are closer to symmetry with respect to the expansion / contraction axis X.

In this way, by setting the base end 82A of the balance hinge portion 82 to be on the left side of the base end 62A of the amplifier hinge portion 62, the stress is compared with the case where both base ends 82A and 62A are aligned in the left-right direction. The distribution can be made more symmetric with respect to the telescopic axis X. Therefore, when the base end 82A of the balance hinge portion 82 is located on the left side of the base end 62A of the amplifier hinge portion 62, the balance hinge portion 82 is located on the displacement portion 66 as compared with the case where both base ends are aligned in the left-right direction. The load can be applied so as to more cancel the load in the direction orthogonal to the expansion / contraction axis X applied from the arm 64, and the shearing force can be prevented from being applied to the piezoelectric element 44.

As shown in FIGS. 2A and 3, a sealing member 70 is provided between the outer peripheral surface of the arm base 64A and the wall surface defining the through hole 32 of the bottom wall 30D of the upper recess 30 to seal the gap. Has been done. As a result, the fluid flows through the first space 90 provided with the piezoelectric element 44 and the through holes 20L and 20R for the two ports (that is, the supply port P and the output) in the inner chamber 40 of the case 12. A partition wall 94 that separates from the second space 92 (which communicates with the port A) is formed. The inner chamber 40 is separated into the first space 90 and the second space 92 by the partition wall 94, so that the fluid supplied from the supply port P enters the first space 90 provided with the piezoelectric element 44. It can be prevented from invading. Therefore, even if the fluid supplied from the supply port P contains water, the fluid control valve 10 has a structure for removing water or dehumidifying in order to protect the piezoelectric element 44 (a refrigerating dryer or a refrigerating dryer). , Adsorption type dryer, etc.) does not need to be provided separately. Further, since the first space 90 in which the piezoelectric element 44 is provided and the second space 92 through which the fluid flows are separated, the fluid control valve 10 is installed in the flow path regardless of the type of fluid. be able to.

The partition wall 94 is provided between the bottom wall 30D having a through hole 32 defining the arm passage 32A through which the arm 64 is passed, and the wall surface defining the arm 64 and the through hole 32, and is provided with an elastically deformable seal member 70. including. As a result, the wall surface defining the arm 64 and the arm passage 32A is sealed by the sealing member 70, and the inner chamber 40 is divided into a first space 90 and a second space 92. Further, since the seal member 70 is elastically deformable, the arm 64 can be displaced while the space between the arm 64 and the passage is sealed, and even when the piezoelectric element 44 is extended and the arm 64 is displaced. , A separated state is maintained in which no fluid flows between the first space 90 and the second space 92. Further, the vibration transmitted to the arm 64 is damped by the seal member 70. As a result, the vibration of the mechanical amplifier 54 can be attenuated even when the mechanical amplifier 54 is used under the condition of resonance.

In the present embodiment, the seal member 70 is provided between the arm base 64A and the wall surface defining the through hole 32. By providing the seal member 70 at a position closer to the fulcrum P0 (see FIG. 5) in this way, the displacement of the arm 64 is less likely to be obstructed by the seal member 70.

An elastomer valve body 46 is integrally formed at the left end of the arm 64. Therefore, when the valve body 46 seals the port through hole 20L on the left side, the shape of the valve body 46 elastically deforms to fit the valve seat 52, so that the opening can be sealed more reliably.

Since the first space 90 in which the piezoelectric element 44 is provided and the second space 92 through which the fluid flows are separated, the connector hole 42 is provided so as to pass the first space 90 to the outside. However, since it is not necessary to seal the connector hole 42, the connector C can be easily assembled. Further, since it is not necessary to seal the connector hole 42 by using a connector having a larger sealing structure than a connector having no sealing structure, the fluid control valve 10 can be miniaturized.

<< Second Embodiment >>
The shape of the case 12 of the fluid control valve 110 according to the second embodiment is different from that of the first embodiment. Since other configurations are the same as those of the first embodiment, the description of other configurations will be omitted.

As shown in FIG. 7, the case 12 of the fluid control valve 110 according to the second embodiment has the same as the first embodiment, and the case 12 has a case main body 14 constituting the front lower half thereof and the upper half thereof. It is composed of an upper member 16 constituting the upper member and a cover member 18 constituting the lower half portion thereafter. Since the configuration of the kale upper member 16 according to the second embodiment is the same as that of the first embodiment, the description thereof will be omitted.

As shown in FIG. 8, the case main body 14 includes a main body upper left portion 126 constituting the upper left portion thereof, and a main body main portion 128 extending downward and to the right from the main body upper left portion 126. As shown in FIGS. 8 and 9, the upper left portion 126 of the main body has a front wall 126A and a rear wall 126B paired back and forth, a left wall 126C connecting the left edges of the front wall 126A and the rear wall 126B, respectively, and a front wall. It has a 126A, a rear wall 126B, and a lower wall 126D connecting the lower edges of the left wall 126C, forming a rectangular parallelepiped box that opens upward and to the right. The upper left portion 126 of the main body is defined by the front wall 126A, the rear wall 126B, the left wall 126C, and the lower wall 126D, and a groove portion 127 recessed downward is formed. The groove portion 127 extends from the left portion of the upper left portion 126 of the main body to the right and reaches the right edge of the upper left portion 126 of the main body.

As shown in FIG. 10, the upper member 16 is fastened to the upper surface of the case body 14 as in the first embodiment. By fastening the upper member 16 to the upper surface of the case body 14, the arm passage 130 defined by the upper member 16, the left wall 126C, the front wall 126A, the rear wall 126B, and the lower wall 126D is formed. Similar to the first embodiment, the upper member 16 is provided with two through holes 20L and 20R for ports that penetrate vertically. The arm passage 130 extends to the left and right at the upper part of the case 12, and is connected to the two port through holes 20L and 20R, respectively.

Similar to the first embodiment, the upper left portion 126 of the main body is formed with a housing recess 34 recessed forward. The accommodating recess 34 is formed on the right side and the lower side of the upper left portion 126 of the main body so as to form an inverted L shape in rear view. Similar to the first embodiment, the upper left portion 126 of the main body is provided with a groove portion 36 recessed forward, and the connector C is coupled to the case main body 14 in a state of being accommodated in the groove portion 127.

The cover member 18 has a shape corresponding to the main body 128. Similar to the first embodiment, the cover member 18 includes a notch 38 notched upward at a position corresponding to the groove 36. When the cover member 18 is fastened to the main body 128, the accommodating recess 34 is sealed from the rear.

As shown in FIG. 8, the arm extending portion 64B is arranged so as to pass through the inside of the arm passage 130 extending to the left and right in the upper part of the case 12. A seal member 170 is provided between the wall surface defining the upper and lower or front-rear boundaries of the arm passage 130 and the arm extending portion 64B to fill the gap between them. Similar to the first embodiment, the seal member 170 is made of an elastically deformable resin.

The sealing member 170 and the lower wall 126D constitute a partition wall 194 extending in an inverted L shape when viewed in the front-rear direction. The partition wall 194 connects the inner chamber 40 of the case 12 to the first space 190 including the piezoelectric element 44 and the through holes 20L and 20R for two ports (that is, the supply port P), as in the first embodiment. It includes an arm passage 130 (which communicates with the output port A) and is partitioned into a second space 192 through which the fluid flows.

Next, the effect of the fluid control valve 110 according to the second embodiment will be described. In the fluid control valve 110, as in the first embodiment, the piezoelectric element 44 is provided because it is partitioned into the first space 190 in which the piezoelectric element 44 is provided and the second space 192 in which the fluid flows. It is possible to prevent fluid from entering the space. Further, since the space between the arm 64 and the arm passage 130 is sealed by an elastically deformable seal member 170, the inner chamber 40 is divided into a first space 190 and a second space 192. Then, the arm 64 can be displaced.

Further, the vibration generated in the arm 64 can be damped by the seal member 170. Since the fluid control valve 110 according to the second embodiment is provided with a seal member 170 that easily swings due to the extension of the piezoelectric element 44 between the arm extension portion 64B and the wall surface defining the arm passage 130. The vibration generated in the arm 64 can be suppressed more effectively.

<< Third Embodiment >>
The fluid control valve 210 according to the third embodiment differs only in the shape of the plate 248, and the other configurations are the same as those in the first embodiment. Therefore, the description other than the shape of the plate 248 will be omitted.

As shown in FIG. 11A, the plate 248 according to the third embodiment has at least the position of the base end 82A (left end) of the balance hinge portion 82 and the amplifier hinge as compared with the plate 248 according to the first embodiment. The base end 62A (left end) of the portion 62 is aligned (aligned) in the left-right direction, and the right end of the first support pillar portion 60B and the right end of the second support pillar portion 60C are aligned in the left-right direction. There is a difference. Further, in the plate 248 according to the third embodiment, the right edge 64R of the arm 64 (more specifically, the arm base portion 64A and the arm base end portion 64C) is a pseudo arm 80 as compared with the plate 248 according to the first embodiment. The difference is that it is located on the right side of the right edge 80R of. That is, the right end of the second axial extension portion 76 and the right end of the balance hinge portion 82 are located on the left side of the first embodiment, respectively, and the length of the balance hinge portion 82 in the left-right direction is longer than that of the first embodiment. Is also short. As a result, the displacement portion 66 is vertically asymmetric with respect to the expansion / contraction axis X.

Next, the effect of the fluid control valve 210 according to the third embodiment will be described with reference to FIGS. 6 (A) and 11 (B). FIG. 11B shows a simulation of the stress distribution of the plate 248 when the piezoelectric element 44 is extended, as in FIG. 6A. However, in FIG. 6A, the right edge 64R of the arm 64 is set to be aligned with the right edge 80R of the pseudo arm 80 in the left-right direction.

Comparing FIGS. 6 (A) and 11 (B), the lateral deviation δ between the bending point P1 of the amplifier hinge portion 62 and the bending point P2 of the balance hinge portion 82 is shown in FIG. 6 (B). It is smaller than A), and it can be seen that the stress distribution in FIG. 11 (B) is symmetrical with respect to the expansion / contraction axis X as compared with the stress distribution in FIG. 6 (A).

That is, by configuring the right edge 64R of the arm 64 to be located to the right of the right edge 80R of the pseudo arm 80, the stress distribution is distributed with respect to the expansion / contraction axis X as compared with the case where both edges are aligned in the left-right direction. Can be made more symmetrical. Therefore, when the right edge 64R of the arm 64 is located on the right side of the right edge 80R of the pseudo arm 80, the displacement portion is compared with the case where the right edge 64R of the arm 64 and the right edge of the pseudo arm 80 are aligned in the left-right direction. A load can be applied to the 66 via the balance hinge portion 82 so as to more cancel the load in the direction orthogonal to the expansion / contraction axis X applied from the arm 64, and it is possible to prevent the shearing force from being applied to the piezoelectric element 44. can.

When the opening / closing speed of the fluid control valve 210 is increased, the load applied to the balance mechanism 68 from the arm extending portion 64B may become a problem. In the present embodiment, the right edge 80R of the pseudo arm 80 is shorter than the right edge 64R of the arm 64, and the length of the balance hinge portion 82 in the left-right direction is shorter than that of the fluid control valve 110 of the second embodiment. Therefore, in the fluid control valve 210 according to the present embodiment, the rigidity of the balance hinge portion 82 is higher than that of the fluid control valve 110 of the second embodiment, and the fluid control valve 210 according to the present embodiment is required to have a high-speed opening / closing operation. It is especially effective when it is used.

<< Fourth Embodiment >>
The fluid control valve 310 according to the fourth embodiment differs only in the shape of the plate 348, and the other configurations are the same as those in the first embodiment. Therefore, the description other than the shape of the plate 348 will be omitted.

As shown in FIG. 12, the plate 348 according to the fourth embodiment has at least the position of the base end 82A (left end) of the balance hinge portion 82 and the amplifier hinge portion 62 as compared with the plate 348 according to the first embodiment. The difference is that the position of the base end 62A (left end) and the position of the right end of the first support pillar portion 60B and the position of the right end of the second support pillar portion 60C are aligned (matched) in the left-right direction.

Further, the plate 348 according to the fourth embodiment is different from the plate 348 according to the first embodiment in that the cross-sectional area of the balance hinge portion 82 is not uniform.

More specifically, the cross-sectional area of the balance hinge portion 82 is partially different from other portions. In the present embodiment, as shown in FIG. 12, a thick portion 82B formed by welding a metal plate member is provided on the right half portion of the balance hinge portion 82. As a result, the cross-sectional area of the balance hinge portion 82 is larger than that of the other portion in the thick portion 82B, unlike the other portions.

Next, the effect of the fluid control valve 310 according to the fourth embodiment will be described. By increasing the cross-sectional area of the balance hinge portion 82 in the right half portion, it is predicted that the bending point P2 of the balance hinge portion 82 will move to the left side. As a result, the lateral deviation δ between the bending point P1 of the amplifier hinge portion 62 and the bending point P2 of the balance hinge portion 82 can be reduced, and the stress distribution inside the plate 348 is vertically symmetrical with respect to the expansion / contraction axis X. Can be. Therefore, a load can be applied to the displacement portion 66 via the balance hinge portion 82 so as to further cancel the load in the direction orthogonal to the expansion / contraction axis X applied from the arm 64, and the shearing force is applied to the piezoelectric element 44. Can be prevented.

In this way, by configuring the cross-sectional area of the balance hinge portion 82 to be different from that of the other parts in a part, it is possible to adjust the distribution of the cross-sectional area of the balance hinge portion 82, and the piezoelectric element 44 is sheared. It is possible to prevent the force from being applied.

<< Fifth Embodiment >>
As shown in FIG. 13, the fluid control valve 410 according to the fifth embodiment is not provided with the valve body 46 provided in the arm extending portion 64B as compared with the first embodiment, and the tubular member 22 is not provided. It differs from the point that the ring member 423 is provided on the lower edge. Since other configurations are the same as those of the first embodiment, the description thereof will be omitted.

The ring member 423 is an annular member extending along the lower edge of the tubular member 22, and is formed of an elastically deformable resin, that is, an elastomer. The ring member 423 is arranged so as to cover the lower edge of the tubular member 22 from below, and is fixed to the tubular member 22.

The tubular member 22 is coupled to the case body 14 in a state of being sandwiched between the first upper member 16U and the second upper member 16D. At this time, the ring member 423 is arranged along the lower edge of the tubular member 22, defines the lower edge of the port through hole 20L on the left side, and is lower than the lower edge of the upper member 16 (inner chamber 40 side). ), It is fixed to the case body 14. As a result, the upper surface of the left end of the arm extending portion 64B functions as the valve body 46, and the arm extending portion 64B constitutes the valve portion 84. Further, the valve seat 52 is configured by the ring member 423 made of elastomer.

Next, the effect of the fluid control valve 410 configured in this way will be described. The valve seat 52 is composed of an elastomer ring member 423. As a result, when the upper surface of the arm extending portion 64B abuts on the valve seat 52, the valve seat 52 is elastically deformed in accordance with the upper surface of the arm extending portion 64B. This makes it possible to more reliably seal the opening portion of the port through hole 20L on the left side by the valve body 46.

The present invention has been described above with respect to preferred embodiments thereof, but as can be easily understood by those skilled in the art, the present invention is not limited to such embodiments and deviates from the gist of the present invention. It can be changed as appropriate to the extent that it does not.

In each of the first to third embodiments and the fifth embodiment, the plate 48 (displacement expansion mechanism) is composed of one metal plate material, but the present invention is not limited to this embodiment. For example, the plate 48 may be configured by combining a plurality of members. However, since the plate 48 is made of a single metal plate, screwing, welding, welding, etc. are not required, so that the manufacturing process of the fluid control valves 10, 110, 210, 410 is simplified and required for manufacturing. The cost can be reduced.

In the above embodiment, the present invention has been described when the present invention is applied to a fluid control valve having two ports and opening and closing one port to open and close one flow path, but the present invention is not limited to this embodiment. The present invention can also be applied to a fluid control valve (for example, a three-way valve) that opens and closes three or more ports.

In the fifth embodiment, the valve seat 52 made of an elastomer is configured by providing the ring member 423 on the tubular member 22, but the present invention is not limited to this embodiment. Any aspect may be used as long as the valve seat 52 made of an elastomer is provided, and for example, the tubular member 22 may be made of an elastomer.

In the above embodiment, the balance mechanism 68 is configured by the balance hinge portion 82, but the present invention is not limited to this embodiment. For example, the balance mechanism 68 may have any embodiment as long as it applies a balanced load so that the load applied to the displacement portion 66 is corrected so as to be in the expansion / contraction direction. For example, the balance mechanism 68 may include a leaf spring piece connecting the second support column portion 60C and the displacement portion 66. Further, the plate 48 is arranged so that the base end 82A of the balance hinge portion 82 and the base end 62A of the amplifier hinge portion 62 are aligned in the left-right direction in the first embodiment, and is a portion surrounded by the alternate long and short dash line shown in FIG. May be configured to be symmetrical.

In the above embodiment, an example in which the shapes are changed so that the positions of the bending points P1 and P2 based on the stress distribution obtained by the simulation are aligned in the left-right direction is shown in the first embodiment and the third embodiment, respectively. Has been done. As can be understood by comparing FIG. 6 (A) with FIG. 6 (B) and FIG. 11, by adjusting the parameters for setting the shape of the plate, the two bending points P1 and P2 are displaced in the left-right direction δ. Can be made smaller so that the positions of the bending points P1 and P2 are more symmetrical with respect to the telescopic axis X, and the positions of the bending points P1 and P2 are substantially symmetrical with respect to the telescopic axis X. can.

Further, in a fluid control valve having at least two openings serving as inlets and outlets for fluid and an inner chamber 40 communicating with each of the two openings and driven by the piezoelectric element 44 housed in the inner chamber 40, the liquid to the piezoelectric element 44 is provided. If the intrusion is a problem, the inner chamber 40 is provided with a partition wall 94 for partitioning the inner chamber 40 into a first space 90 for accommodating the piezoelectric element 44 and a second space 92 including a passage connecting the ports. The other configurations are not limited to the above aspects. For example, the structure of the plate of the fluid control valve is not limited to the above embodiment, and the fluid control valve is an electric fluid control valve having a plurality of arms even if it is a so-called single-arm electric fluid control valve having no balance mechanism 68. It may be a type fluid control valve.

In the above embodiment, the support portion 60 is provided separately from the case 12, but the present invention is not limited to this embodiment. The support portion 60 may be integrated with the case 12, or may form a part of the case 12.

In addition, not all of the components shown in the above embodiments are indispensable, and they can be appropriately selected as long as they do not deviate from the gist of the present invention.

10: Fluid control valve according to the first embodiment 12: Case 14: Case body 16: Upper member 16D: Second upper member 16U: First upper member 18: Cover member 20L: Port through hole 20R: Port through hole 22: Cylindrical member 22A: Inner hole 24LD: Through hole 24LU: Through hole 24RD: Through hole 24RU: Through hole 26: Main body upper part 28: Main body lower part 30: Upper concave portion 30D: Bottom wall 32: Through hole 32A: Arm passage 34: Accommodating recess 36: Groove 38: Notch 40: Inner chamber 42: Connector hole 44: Piezoelectric element 44A: Piezoelectric body 46: Valve body 48: Plate 50: Wiring 52: Valve seat 54: Mechanical amplifier 60: Support part 60A: Support Base 60B: First support pillar 60C: Second support pillar 62: Amp hinge 62A: Base 64: Arm 64A: Arm base 64B: Arm extension 64C: Arm base end 64R: Right edge of the arm ( Side edge of the arm located on the other end side of the piezoelectric element)
66: Displacement part 68: Balance mechanism 70: Seal member 72: Cap part 74: First axial extension part 76: Second axial extension part 80: Pseudo arm 80R: Right edge of pseudo arm (other than piezoelectric element) Side edge of pseudo-arm located on the side of the end)
82: Balance hinge portion 82A: Base end 82B: Thick portion 84: Valve portion 90: First space 92: Second space 94: Partition wall 110: Fluid control valve 126 according to the second embodiment: Upper left portion of the main body 126A: Front wall 126B: Rear wall 126C: Left wall 126D: Lower wall 127: Groove 128: Main body 130: Arm passage 170: Seal member 190: First space 192: Second space 194: Partition wall 210: Fluid control valve 248 according to the third embodiment: Plate 310: Fluid control valve according to the fourth embodiment 348: Plate 410: Fluid control valve according to the fifth embodiment 423: Ring member A: Output port C: Connector P: Supply port P0: fulcrum P1: bending point P2: bending point X: expansion / contraction axis δ: deviation

Claims (13)

An inner chamber and a case having at least two openings that communicate with the inner chamber and serve as an inlet / outlet for fluid.
Piezoelectric elements that can expand and contract along a predetermined expansion and contraction axis,
It has a mechanical amplifier that expands the displacement of the piezoelectric element and displaces the valve portion that opens and closes at least one of the openings.
The mechanical amplifier is
A support portion provided in the case and connected to one end of the expansion / contraction shaft of the piezoelectric element in the axial direction.
A displacement portion coupled to the other end of the piezoelectric element in the axial direction,
An arm that is connected to the displacement portion at one end, connected to the support portion via a deformable amplifier hinge portion at the intermediate portion, and opens and closes at least one of the openings at the other end.
A fluid control valve including a balance mechanism that applies a load in the direction opposite to the load in the direction orthogonal to the expansion / contraction axis applied to the displacement portion by extension of the piezoelectric element. The balance mechanism includes a pseudo arm coupled to the displacement portion and a balance hinge portion coupled to the pseudo arm and the support portion and deformable.
The fluid control valve according to claim 1, wherein the coupling portion of the arm and the displacement portion and the coupling portion of the pseudo arm and the displacement portion face each other via the expansion / contraction shaft. The support portion extends in the direction of the telescopic shaft and includes a first support portion and a second support portion arranged at positions facing each other via the piezoelectric element.
The amplifier hinge portion extends from the first support portion along the telescopic axis.
The balance hinge portion has a cross section having the same shape as the amplifier hinge portion, and extends from the second support portion along the expansion / contraction axis.
The displacement portion includes a cap portion coupled to the other end of the piezoelectric element, a first axial extension portion extending from the cap portion along the expansion / contraction axis and connected to the arm, and the cap portion. It has a second axial extension portion extending from the telescopic axis along the telescopic axis and connected to the pseudo arm.
The displacement portion is axisymmetric with respect to the expansion and contraction axis.
The fluid control valve according to claim 2, wherein the base end of the balance hinge portion is located closer to the one end side of the piezoelectric element than the base end of the amplifier hinge portion in the axial direction. The support portion extends in the direction of the telescopic shaft and includes a first support portion and a second support portion arranged at positions facing each other via the piezoelectric element.
The amplifier hinge portion extends from the first support portion along the telescopic axis.
The balance hinge portion has a cross section having the same shape as the amplifier hinge portion, and extends from the second support portion along the expansion / contraction axis.
The displacement portion includes a cap portion coupled to the other end of the piezoelectric element, a first axial extension portion extending from the cap portion along the expansion / contraction axis and connected to the arm, and the cap portion. It has a second axial extension portion extending from the telescopic axis along the telescopic axis and connected to the pseudo arm.
In the axial direction, the base end of the balance hinge portion is located at a position consistent with the base end of the amplifier hinge portion.
The side edge of the arm located on the other end side of the piezoelectric element is closer to the other end side of the piezoelectric element than the side edge of the pseudo arm located on the other end side of the piezoelectric element. The fluid control valve of claim 2 located. The support portion extends in the direction of the telescopic shaft and includes a first support portion and a second support portion arranged at positions facing each other via the piezoelectric element.
The amplifier hinge portion extends from the first support portion along the telescopic axis.
The balance hinge portion extends from the second support portion along the telescopic axis.
The displacement portion includes a cap portion coupled to the other end of the piezoelectric element, a first axial extension portion extending from the cap portion along the expansion / contraction axis and connected to the arm, and the cap portion. It has a second axial extension portion extending from the telescopic axis along the telescopic axis and connected to the pseudo arm.
The displacement portion is axisymmetric with respect to the expansion and contraction axis.
In the axial direction, the base end of the balance hinge portion is located at a position consistent with the base end of the amplifier hinge portion.
The fluid control valve according to claim 2, wherein the cross section of the balance hinge portion is partially different from that of other portions. The fluid control valve according to any one of claims 2 to 4, wherein the bending point of the balance hinge portion and the bending point of the amplifier hinge portion are axially symmetric with respect to the expansion / contraction axis. Claim 1 is provided with a partition wall for dividing the inner chamber into a first space for accommodating the piezoelectric element and a second space including a passage communicating with the two openings. The fluid control valve according to any one of claims 6. 7. The partition wall includes a wall body that defines at least a part of an arm passage through which the arm passes, and a sealing member that is provided between the arm and the wall surface that defines the passage and is elastically deformable. The fluid control valve described in. The wall body comprises a through hole defining the arm passage.
The fluid control valve according to claim 8, wherein the seal member is provided between the wall surface defining the through hole and the arm. The wall body cooperates with the wall surface defining the inner chamber to define the arm passage.
The fluid control valve according to claim 8, wherein the sealing member is provided between the wall surface defining the wall body and the inner chamber and the arm. The first space communicates with the outside of the case via a connector hole.
The fluid control valve according to any one of claims 7 to 10, wherein a connector for supplying a voltage to the piezoelectric element is provided at a position matching the connector hole. The fluid control valve according to any one of claims 1 to 11, wherein an elastomer valve body is integrally formed at the other end of the arm. The fluid control valve according to any one of claims 1 to 12, wherein a valve seat made of an elastomer is provided in the opening opened and closed by the arm.

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