JP2022044512A - Position determination device, board transfer device, position determination method, and board transfer method - Google Patents

Abstract

To provide a position determination device, a board transfer device, a position determination method, and a board transfer method that can realize low cost of a board processing device.SOLUTION: A board transfer device 500 includes a hand H1 holding a board W, and a support member 521, a rotating member 520, and a moving member 510 that move the hand H1 in the horizontal plane. The board transfer device 500 includes a detector SE1 with a detection area, and a transport control unit that controls the movement of the support member 521, the rotation of the rotating member 520, and the movement of the moving member 510 when the board W is transported. The transport control unit controls each of the units such that a plurality of parts of an outer peripheral end of the board W held by the hand H1 are sequentially located in the detection region of the detector SE1. Positions of the plurality of parts in the hand H1 are calculated on the basis of an output signal of the detector SE1. A position of the board W in the hand H1 is determined on the basis of the calculated positions of the plurality of parts.SELECTED DRAWING: Figure 1

Description

The present invention relates to a position determination device for determining a position of a substrate supported by a support portion in a support portion, a substrate transfer device including the position determination device, a position determination method, and a substrate transfer method using the same.

Conventionally, FPD (Flat Panel Display) substrates, semiconductor substrates, optical disk substrates, magnetic disk substrates, opto-magnetic disk substrates, photomask substrates used in liquid crystal displays or organic EL (Electro Luminescence) display devices, etc. , A substrate processing apparatus is used to perform various processing on various substrates such as a ceramic substrate or a substrate for a solar cell.

In the substrate processing apparatus, for example, one substrate is continuously processed by a plurality of processing units. Therefore, the substrate processing device is provided with a substrate transfer device for transporting the substrate between the plurality of processing units.

For example, in the substrate transfer device described in Patent Document 1, the substrate to be processed is held by the holding portion, and the substrate is conveyed by moving the holding portion. When the substrate is transported from the first position to the second position, the first to fifth outer peripheral ends of the substrate held by the holding portion while the substrate is received by the holding portion at the first position. The part is detected. Based on those detections, the positions of the first to fifth portions in the holding portion are calculated respectively. The position of the substrate in the holding portion is determined based on the calculated positions of the first to fifth portions. The movement of the holding portion is controlled based on the determined position of the substrate so that the substrate is accurately transported to the second position.

Japanese Unexamined Patent Publication No. 2018-133415

In order to reduce the cost of the substrate processing apparatus, it is desirable that the configuration for determining the position of the substrate (hereinafter referred to as the position determination apparatus) be simplified. Further, in order to reduce the cost of the substrate processing device, it is desirable to reduce the number of parts of the position determination device.

An object of the present invention is to provide a position determination device capable of reducing the cost of a substrate processing apparatus, a substrate transfer device including the position determination device, a position determination method, and a substrate transfer method using the same.

(1) The position determination device according to the first invention is a position determination device that determines the position of a substrate supported by a support portion, and includes a first detector having a first detection region and a support portion. It includes a relative moving unit configured to allow the supported substrate and the first detector to move relatively, and a control unit that controls the relative moving unit, and the control unit is the outer periphery of the substrate. A relative movement control unit that controls the relative movement unit so that a plurality of parts of the end portions are sequentially located in the first detection region, and a plurality of support units based on the detection signal of the first detector. It includes a partial position calculation unit that calculates the position of each portion, and a position determination unit that determines the position of the substrate in the support unit based on the positions of the plurality of portions calculated by the partial position calculation unit.

In the position determination device, the substrate supported by the support portion and the first detector are relatively moved so that a plurality of portions of the outer peripheral end portions of the substrate are sequentially located in the first detection region. To. Based on the detection signal of the first detector, the positions of the plurality of portions in the support portion are calculated respectively. The position of the substrate in the support portion is determined based on the calculated positions of the plurality of portions.

According to the above-mentioned position determination device, a plurality of portions of the substrate supported by the support portion are detected by the first detector. Therefore, in order to detect the positions of the plurality of parts of the board, it is not necessary to prepare a plurality of detectors corresponding to the plurality of parts of the board. Therefore, the configuration of the position determination device is simplified. In addition, the number of parts of the position determination device is reduced. As a result, the cost of the substrate processing apparatus can be reduced.

(2) The support portion includes a transport holding portion configured to be movable while holding the substrate, and the relative moving portion first moves the substrate held by the transport holding portion by moving the transport holding portion. It may be configured so that it can be moved relative to the detector of.

In this case, it is possible to grasp the position of the substrate in the transport holding portion while the substrate is held by the transport holding portion.

(3) The position determination device further includes a second detector having a second detection region, and the relative moving unit moves the transport holding unit to move the transfer holding unit to the second detector. The relative movement control unit is configured so that it can be moved relative to the detector of the above, and the first and second portions of the outer peripheral edge of the substrate are sequentially located in the first detection region. , The relative moving part is controlled so that the third and fourth parts of the outer peripheral edge of the substrate are sequentially located in the second detection region, and the partial position calculation part is the first and second detectors. The positions of the plurality of portions in the transport holding portion may be calculated based on the detection signal of.

In this case, the first detector detects the first and second parts of the substrate, and the second detector detects the third and fourth parts of the board.

(4) The first and second detectors are provided so that the first detection region and the second detection region are arranged at intervals smaller than the diameter of the substrate in the first direction, and are relative movement control units. May control the relative movement so that the substrate crosses the first and second detection regions by moving the transport holder in the second direction which intersects the first direction.

In this case, as the substrate moves in the second direction, the third and fourth portions of the substrate arrive at approximately the same timing as the first and second portions of the substrate sequentially pass through the first detection region. Pass through the second detection area in sequence. Therefore, the time required for detecting the first to fourth portions of the substrate can be shortened.

(5) The relative moving portion may be configured so that the first detector can be moved relative to the substrate supported by the supporting portion by moving the first detector. ..

In this case, by moving the first detector, it becomes possible to grasp the position of the substrate in the support portion without moving the support portion.

(6) The position determination device further includes a second detector having a second detection region, and the relative moving portion moves the second detector with respect to the substrate supported by the supporting portion. The second detector is configured to be relatively movable, and in the relative movement control unit, the first and second portions of the outer peripheral end portion of the substrate are sequentially located in the first detection region. At the same time, the relative moving portion is controlled so that the third and fourth portions of the outer peripheral end portion of the substrate are sequentially located in the second detection region, and the partial position calculation unit controls the first and second detection portions. The positions of the plurality of portions in the support portion may be calculated based on the detection signal of the device.

In this case, the first detector detects the first and second parts of the substrate, and the second detector detects the third and fourth parts of the board.

(7) The first and second detectors are provided so that the first detection region and the second detection region are arranged at intervals smaller than the diameter of the substrate in the first direction, and are relative movement control units. Controls the relative movement so that the first and second detectors move across the substrate by moving the first and second detectors in a second direction that intersects the first direction. May be good.

In this case, as the first and second detectors move in the second direction, the second detection region passes through the first and second portions of the substrate in sequence at approximately the same timing as the second detector. The detection region of is sequentially passed through the third and fourth portions of the substrate. Therefore, the time required for detecting the first to fourth portions of the substrate can be shortened.

(8) The substrate transfer device according to the second invention includes the above-mentioned position determination device.

In the board transfer device, it becomes possible to transfer the substrate based on the determination result by the position determination device. Therefore, it becomes possible to convey the substrate with high accuracy.

(9) The position determination method according to the third invention is a position determination method for determining the position of a substrate supported by a support portion, and includes a step of preparing a first detector having a first detection region. , The substrate supported by the support portion and the first detector are relatively moved so that a plurality of portions of the outer peripheral end portions of the substrate supported by the support portion are sequentially located in the first detection region. Based on the step, the step of calculating the positions of the plurality of parts in the support portion based on the detection signal of the first detector, and the positions of the plurality of parts calculated by the calculation step, the substrate of the substrate in the support portion. Includes a step to determine the position.

In the position determination method, the substrate supported by the support portion and the first detector are relatively moved so that a plurality of portions of the outer peripheral end portions of the substrate are sequentially located in the first detection region. To. Based on the detection signal of the first detector, the positions of the plurality of portions in the support portion are calculated respectively. The position of the substrate in the support portion is determined based on the calculated positions of the plurality of portions.

According to the above-mentioned position determination method, a plurality of portions of the substrate supported by the support portion are detected by the first detector. Therefore, in order to detect the positions of the plurality of parts of the board, it is not necessary to prepare a plurality of detectors corresponding to the plurality of parts of the board. Therefore, the configuration of the position determination device is simplified. In addition, the number of parts of the position determination device is reduced. As a result, the cost of the substrate processing apparatus can be reduced.

(10) The support portion includes a transport holding portion configured to be movable while holding the substrate, and the step of relatively moving the substrate supported by the support portion and the first detector is the transport holding portion. May include moving the substrate held by the transport holding unit relative to the first detector by moving the.

In this case, it is possible to grasp the position of the substrate in the transport holding portion while the substrate is held by the transport holding portion.

(11) The position determination method further includes a step of preparing a second detector having a second detection region, and moves the substrate held by the transport holding unit relative to the first detector. That is, the first and second portions of the outer peripheral edge of the substrate are sequentially located in the first detection region, and the third and fourth portions of the outer peripheral edge of the substrate are sequentially located in the second detection region. The steps of calculating the positions of the plurality of parts, respectively, including moving the substrate held by the transport holding unit relative to the first and second detectors so as to be located in the first and second detectors. It may include a step of calculating the positions of a plurality of portions in the transport holding unit based on the detection signal of the second detector.

In this case, the first detector detects the first and second parts of the substrate, and the second detector detects the third and fourth parts of the board.

(12) The first and second detectors are provided so that the first detection region and the second detection region are lined up at intervals smaller than the diameter of the substrate in the first direction, and are held by the transport holding portion. Moving the board relative to the first and second detectors is in a second direction that intersects the first direction so that the board crosses the first and second detector regions. It may include moving the transport holding unit.

In this case, as the substrate moves in the second direction, the third and fourth portions of the substrate arrive at approximately the same timing as the first and second portions of the substrate sequentially pass through the first detection region. Pass through the second detection area in sequence. Therefore, the time required for detecting the first to fourth portions of the substrate can be shortened.

(13) The step of relatively moving the substrate supported by the support portion and the first detector is a first step with respect to the substrate supported by the support portion by moving the first detector. It may include moving the detector relatively.

In this case, by moving the first detector, it becomes possible to grasp the position of the substrate in the support portion without moving the support portion.

(14) The position determination method further includes a step of preparing a second detector having a second detection region, and moves the first detector relative to the substrate supported by the support portion. The first and second portions of the outer peripheral edge of the substrate are sequentially located in the first detection region, and the third and fourth portions of the outer peripheral edge of the substrate are sequentially located in the second detection region. The steps of calculating the positions of the plurality of parts, respectively, including moving the first and second detectors relative to the substrate supported by the support so that they are located, are the first and second steps. It may include a step of calculating the position of each of a plurality of portions in the support portion based on the detection signal of the detector.

In this case, the first detector detects the first and second parts of the substrate, and the second detector detects the third and fourth parts of the board.

(15) The first and second detectors are provided so that the first detection region and the second detection region are arranged at intervals smaller than the diameter of the substrate in the first direction, and are supported by the support portion. Moving the first and second detectors relative to the substrate means that the first and second detector regions cross the substrate in a second direction that intersects the first direction. It may include moving the first and second detectors.

In this case, as the first and second detectors move in the second direction, the second detection region passes through the first and second portions of the substrate in sequence at approximately the same timing as the second detector. The detection region of is sequentially passed through the third and fourth portions of the substrate. Therefore, the time required for detecting the first to fourth portions of the substrate can be shortened.

(16) The substrate transport method according to the fourth invention includes the above-mentioned position determination method.

In the board transfer device, it becomes possible to transfer the substrate based on the determination result by the position determination device. Therefore, it becomes possible to convey the substrate with high accuracy.

According to the present invention, the cost of the substrate processing apparatus can be reduced.

It is a top view of the substrate transfer apparatus which concerns on 1st Embodiment. It is a side view of the substrate transfer apparatus of FIG. It is a front view of the substrate transfer apparatus of FIG. It is a schematic diagram which shows an example of the method of detecting a plurality of parts of the outer peripheral end portion of a substrate held by a hand. It is a block diagram which shows the structure of the control system of the substrate transfer apparatus which concerns on 1st Embodiment. It is a top view which shows an example of the XY coordinate system defined in a hand. It is a top view which shows the positional relationship between a substrate on a hand and a virtual circle when at least one of a plurality of deviation amounts exceeds a threshold value. It is a top view which shows the positional relationship between a substrate on a hand and a virtual circle when at least one of a plurality of deviation amounts exceeds a threshold value. It is a top view which shows the positional relationship between a substrate on a hand and a virtual circle when at least one of a plurality of deviation amounts exceeds a threshold value. It is a top view which shows the positional relationship between a substrate on a hand and a virtual circle when at least one of a plurality of deviation amounts exceeds a threshold value. It is a block diagram which shows the functional structure of the transport control part. It is a flowchart which shows the basic transfer operation of a board by a board transfer device. It is a flowchart which shows the basic transfer operation of a board by a board transfer device. It is a top view of the substrate transfer apparatus which concerns on 2nd Embodiment. It is a side view of the substrate transfer apparatus of FIG. It is a top view which shows the plurality of parts of the substrate detected in the substrate transfer apparatus which concerns on 2nd Embodiment. It is a top view of the substrate transfer apparatus which concerns on 3rd Embodiment. It is a block diagram which shows the structure of the control system of the substrate transfer apparatus which concerns on 3rd Embodiment. It is a schematic diagram which shows an example of the method of detecting 5 or more portions of the outer peripheral end portion of the substrate W held by a hand using two detectors. It is a side view of the substrate transfer apparatus which concerns on 4th Embodiment. It is a top view of the substrate transfer apparatus which concerns on 5th Embodiment. It is a side view of the substrate transfer apparatus of FIG. FIG. 21 is a front view of the substrate transfer device of FIG. 21. It is a schematic diagram which shows an example of the method of detecting a plurality of portions of the outer peripheral end portion of a substrate supported by a substrate support portion. It is a schematic block diagram which shows the whole structure of the substrate processing apparatus provided with the substrate transfer apparatus which concerns on one of 1st to 5th Embodiment.

Hereinafter, the position determination device, the substrate transfer device, the position determination method, and the substrate transfer method according to the embodiment of the present invention will be described with reference to the drawings. In the following description, the substrate is a substrate for FPD (Flat Panel Display), a semiconductor substrate, a substrate for an optical disk, a substrate for a magnetic disk, a substrate for a magneto-optical disk used in a liquid crystal display device, an organic EL (Electro Luminescence) display device, or the like. A substrate, a photomask substrate, a ceramic substrate, a solar cell substrate, or the like.

Further, the substrate used in the following embodiments has at least a part having a circular outer peripheral end portion. Specifically, a notch for positioning is formed on the substrate, and the outer peripheral end portion of the substrate excluding the notch has a circular shape. An orientation flat may be formed on the substrate instead of the notch.

[1] First Embodiment (1) Configuration of the Substrate Transfer Device According to the First Embodiment FIG. 1 is a plan view of the substrate transport device according to the first embodiment, and FIG. 2 is FIG. 1. It is a side view of the board transfer device 500 of FIG. 3, and FIG. 3 is a front view of the board transfer device 500 of FIG. The substrate transfer device 500 shown in FIGS. 1 to 3 includes a moving member 510 (FIGS. 2 and 3), a rotating member 520, two hands H1 and H2, and a plurality of detectors SE1 and SE2 (FIG. 1). In this embodiment, two detectors SE1 and SE2 are provided. The moving member 510 is configured to be horizontally movable along a guide rail (not shown).

On the moving member 510, a rotating member 520 having a substantially rectangular parallelepiped shape is rotatably provided around an axis in the vertical direction. Hands H1 and H2 are supported by the support members 521 and 522, respectively, on the rotating member 520. The hands H1 and H2 are configured to be able to move forward and backward in the longitudinal direction of the rotating member 520. In this embodiment, the hand H2 is located above the upper surface of the rotating member 520, and the hand H1 is located above the hand H2.

Each of the hands H1 and H2 consists of a guide portion Ha and an arm portion Hb. As shown in FIG. 1, the guide portion Ha has a substantially V-shaped flat plate shape, and the arm portion Hb has a rectangular flat plate shape extending in one direction. The guide portion Ha is provided so as to branch into two from one end of the arm portion Hb.

On the upper surface of the guide portion Ha, a plurality of (three in this example) suction portions sm are provided in a plurality of (three in this example) portions separated from each other. Each suction portion sm is connected to an intake system (not shown). The substrate W is placed on the plurality of suction portions sm. In this state, a plurality of positions of the substrate W on the plurality of suction portions sm are sucked to the plurality of suction portions sm by the intake system.

Each of the two detectors SE1 and SE2 is a transmissive photoelectric sensor composed of a light emitting unit Se and a light receiving unit Sr. The two light projecting portions Se are attached to the upper surface of the rotating member 520 at a common position in the longitudinal direction of the rotating member 520 so as to be arranged at intervals in the lateral direction (width direction) of the rotating member 520. The two light receiving portions Sr are arranged by the support member 530 (FIGS. 2 and 3) above the rotating member 520 so as to face the two light emitting portions Se, respectively. In FIG. 1, the support member 530 is not shown.

Light is emitted upward from each light projecting unit Se. Each light receiving unit Sr receives light emitted from the opposing light projecting unit Se as feedback light. As a result, in each of the detectors SE1 and SE2, as shown by hatching in FIGS. 2 and 3, a detection region DA extending in the vertical direction is formed between the light emitting portion Se and the light receiving portion Sr facing each other. To. The two detection regions DA of the detectors SE1 and SE2 are separated by a distance smaller than the diameter of the substrate W and larger than the length of the notch in the circumferential direction of the substrate W. The diameter of the substrate W according to the present embodiment is, for example, 300 mm, and the length of the notch of the substrate W in the circumferential direction is, for example, 2.73 mm.

When the substrate W is present between the light emitting unit Se and the light receiving unit Sr of each of the detectors SE1 and SE2, the light emitted from the light emitting unit Se does not enter the light receiving unit Sr. The state in which no light is incident on the light receiving portion Sr is called a non-light incident state. When the substrate W does not exist between the light emitting unit Se and the light receiving unit Sr of the detectors SE1 and S5, the light emitted from the light emitting unit Se is incident on the light receiving unit Sr. The state in which light is incident on the light receiving unit Sr is called an incoming light state. The light receiving unit Sr outputs a detection signal indicating an incoming light state and a non-light incoming state.

The limit position on the rotating member 520 in which the hands H1 and H2 can retreat in the advancing / retreating direction of the hands H1 and H2 is called an advancing / retreating initial position (home position). Further, the positions of the hands H1 and H2 when the guide portion Ha is located away from the rotating member 520 in a plan view in the advancing / retreating direction of the hands H1 and H2 are referred to as forward positions.

2 at the outer peripheral end of the substrate W based on the timing when the detection signals of the detectors SE1 and SE2 change from the incoming state to the non-lighting state when the hand H1 holding the substrate W retreats from the forward position to the initial advance / retreat position. The position of one part can be calculated. Further, when the hand H1 holding the substrate W retreats from the forward position to the initial advance / retreat position, the outer peripheral end portion of the substrate W is based on the timing when the detection signals of the detectors SE1 and SE2 change from the non-light-in state to the in-light state. The positions of the other two parts can be calculated.

Specifically, the first outer peripheral end of the substrate W with respect to the hand H1 based on the relative position between the hand H1 and the detector SE1 at the timing when the detection signal of the detector SE1 changes from the incoming state to the non-lighting state. The position of the part can be calculated. The position of the second portion of the outer peripheral end portion of the substrate W with respect to the hand H1 is calculated based on the relative position between the hand H1 and the detector SE2 at the timing when the detection signal of the detector SE2 changes from the incoming light state to the non-light incoming state. can do. The position of the third portion of the outer peripheral end of the substrate W with respect to the hand H1 is calculated based on the relative position between the hand H1 and the detector SE1 at the timing when the detection signal of the detector SE1 changes from the non-light incoming state to the incoming light state. can do. The position of the fourth portion of the outer peripheral end of the substrate W with respect to the hand H1 is calculated based on the relative position between the hand H1 and the detector SE2 at the timing when the detection signal of the detector SE2 changes from the non-light incoming state to the incoming light state. can do.

In the following description, when the outer peripheral end of the substrate W crosses the detection region DA of the detectors SE1 and SE2, the detection signal of the detectors SE1 and SE2 changes from the in-light state to the non-light-in state or the non-light-in state. It is called detection as appropriate to enter the light entering state.

FIG. 4 is a schematic diagram showing an example of a method of detecting a plurality of portions of the outer peripheral end portion of the substrate W held by the hand H1. In FIG. 4, the hand H2, the support member 522, and the support member 530 are not shown in the substrate transfer device 500 of FIG. 1. Further, in FIG. 4, the states of the substrate transfer device 500 at four time points from the forward position to the backward advance / backward initial position of the hand H1 holding the substrate W are shown in four plan views arranged from left to right.

As shown in the plan view at the left end of FIG. 4, the substrate W is located outside the rotating member 520 in a plan view at the start of the retreat of the hand H1 from the forward position to the initial forward / backward position, and the detectors SE1 and SE2 Does not overlap with. As a result, the detection signals of the detectors SE1 and SE2 indicate the incoming light state.

Next, as shown in the second plan view from the left in FIG. 4, when the hand H1 retracts by a predetermined distance, the two portions of the outer peripheral end portion of the substrate W overlap the detectors SE1 and SE2 in a plan view. Become. That is, the two portions of the outer peripheral end of the substrate W cross the two detection regions DA (FIG. 3) of the detectors SE1 and SE2. In this case, the detection signals of the detectors SE1 and SE2 change from the in-light state to the non-light-in state. As a result, the positions of the two portions of the outer peripheral end of the substrate W held by the hand H1 are calculated based on the detection timing when the detection signals of the detectors SE1 and SE2 change from the incoming state to the non-lighting state. Will be possible. At this time, the portion of the outer peripheral end of the substrate W detected based on the detection signal of the detector SE1 is referred to as a portion p1. Further, the portion of the outer peripheral end portion of the substrate W detected based on the detection signal of the detector SE2 is referred to as a portion p2.

Next, as shown in the third plan view from the left in FIG. 4, when the hand H1 is further retracted by a predetermined distance, the other two portions of the outer peripheral end portion of the substrate W are transferred to the detectors SE1 and SE2 in plan view. It will overlap. That is, the other two portions of the outer peripheral end portion of the substrate W cross the two detection regions DA (FIG. 3) of the detectors SE1 and SE2. In this case, the detection signals of the detectors SE1 and SE2 change from the non-light-in state to the in-light state. As a result, the positions of the two portions of the outer peripheral end of the substrate W held by the hand H1 are calculated based on the detection timing when the detection signals of the detectors SE1 and SE2 change from the non-light-in state to the in-light state. Will be possible. At this time, the portion of the outer peripheral end of the substrate W detected based on the detection signal of the detector SE1 is referred to as a portion p3. Further, the portion of the outer peripheral end portion of the substrate W detected based on the detection signal of the detector SE2 is referred to as a portion p4.

After that, as shown in the plan view at the right end of FIG. 4, the hand H1 reaches the initial advance / retreat position. At this time, the substrate W does not overlap the detectors SE1 and SE2 in a plan view. As a result, the detection signals of the detectors SE1 and SE2 are maintained in the incoming light state.

Instead of the above example, when the hand H1 holding the substrate W advances from the initial position of advancing / retreating on the rotating member 520, the timing and detection of the detection signals of the detectors SE1 and SE2 changing from the in-light state to the non-light-in state. It is also possible to calculate the positions of the four portions of the outer peripheral end portion of the substrate W held by the hand H1 based on the timing when the detection signals of the devices SE1 and SE2 change from the non-light-in state to the light-in state. In this case, as the state of the substrate transfer device 500 changes from the plan view at the right end to the plan view at the left end of FIG. 4, a plurality of portions p1 to p4 of the outer peripheral end portion of the substrate W are detected. With respect to the substrate W held by the hand H2, the positions of the four portions of the outer peripheral end portion of the substrate W can be detected by the same method as in the example of the hand H1.

In each hand H1 and H2, a reference position (hereinafter, referred to as a first reference position) in which the center of the held substrate W should be located is predetermined. The first reference position in each hand H1 and H2 is, for example, the center position of the three suction portions sm.

When the radius of the substrate W is known, if the positions of the four portions p1 to p4 of the substrate W held by each hand H1 and H2 can be calculated, the position of the substrate W in the hand can be determined. .. Thereby, it is possible to calculate how much the center of the substrate W actually held by each hand H1 and H2 deviates from the first reference position.

(2) Configuration of Control System of Board Transfer Device 500 FIG. 5 is a block diagram showing a configuration of a control system of the board transfer device 500 according to the first embodiment. As shown in FIG. 5, the board transfer device 500 includes a vertical drive motor 511, a vertical encoder 512, a horizontal drive motor 513, a horizontal encoder 514, a rotary drive motor 515, a rotary encoder 516, and an upper hand advance / retreat. It includes a drive motor 525, an upper hand encoder 526, a lower hand advance / retreat drive motor 527, a lower hand encoder 528, a plurality of detectors SE1 and SE2, a transfer control unit 550, and an operation unit 529.

The vertical drive motor 511 moves the moving member 510 (FIG. 2) in the vertical direction under the control of the transport control unit 550. The vertical encoder 512 outputs a signal indicating the rotation angle of the vertical drive motor 511 to the transport control unit 550. As a result, the transport control unit 550 can detect the position of the moving member 510 in the vertical direction.

The horizontal drive motor 513 moves the moving member 510 (FIG. 2) in the horizontal direction under the control of the transport control unit 550. The horizontal encoder 514 outputs a signal indicating the rotation angle of the horizontal drive motor 513 to the transport control unit 550. As a result, the transport control unit 550 can detect the horizontal position of the moving member 510.

The rotation direction drive motor 515 rotates the rotating member 520 (FIG. 1) around the vertical axis under the control of the transport control unit 550. The rotation direction encoder 516 outputs a signal indicating the rotation angle of the rotation direction drive motor 515 to the transfer control unit 550. As a result, the transport control unit 550 can detect the orientation of the rotating member 520 in the horizontal plane.

The upper hand advance / retreat drive motor 525 advances / retreats the hand H1 (FIG. 1) horizontally on the rotating member 520 under the control of the transport control unit 550. The upper hand encoder 526 outputs a signal indicating the rotation angle of the upper hand advance / retreat drive motor 525 to the transfer control unit 550. Thereby, the transport control unit 550 can detect the position of the hand H1 on the rotating member 520.

The lower hand advance / retreat drive motor 527 advances / retreats the hand H2 (FIG. 2) horizontally on the rotating member 520 under the control of the transport control unit 550. The lower hand encoder 528 outputs a signal indicating the rotation angle of the lower hand advance / retreat drive motor 527 to the transfer control unit 550. Thereby, the transport control unit 550 can detect the position of the hand H2 on the rotating member 520.

The light emitting unit Se of the detectors SE1 and SE2 emits light toward the light receiving unit Sr under the control of the transport control unit 550. The detection signal of the light receiving unit Sr is given to the transport control unit 550. As a result, the transport control unit 550 can determine whether each of the detectors SE1 and S5 is in the in-light state or in the non-light-in state. The transfer control unit 550 can calculate the positions of the portions p1 to p4 of the substrate W in the hand H1 based on the detection signals of the two detectors SE1 and SE2 and the output signals of the upper hand encoder 526. Similarly, the transfer control unit 550 can calculate the positions of the portions p1 to p4 of the substrate W in the hand H2 based on the detection signals of the two detectors SE1 and SE2 and the output signals of the lower hand encoder 528.

An operation unit 529 is connected to the transfer control unit 550. The user can give various commands and information to the transport control unit 550 by operating the operation unit 529.

(3) Determination of the position of the substrate W on the hands H1 and H2 In each of the above hands H1 and H2, an XY coordinate system having an X-axis and a Y-axis is defined. The X-axis and the Y-axis are located in a horizontal plane parallel to the substrate W held by the hands H1 and H2, and are orthogonal to each other at the first reference position of the hands H1 and H2. Therefore, the first reference position is the origin O. In this example, the Y-axis is defined parallel to the advancing / retreating direction of each hand H1 and H2.

FIG. 6 is a plan view showing an example of the XY coordinate system defined in the hand H1. In FIG. 6, the X-axis and the Y-axis of the XY coordinate system defined in the hand H1 are shown by the alternate long and short dash line. Further, the first reference position is shown as the origin O. Further, the substrate W held by the hand H1 is shown by a solid line. In the example of FIG. 6, it is assumed that the center position of the substrate W held by the hand H1 is at the origin O.

In the substrate transfer device 500, the detectors SE1 and SE2 detect the four portions p1 to p4 of the substrate W in the hand H1, and the position of the substrate W in the hand H1 is determined based on the positions of the detected portions p1 to p4. Will be done. Similarly, the detectors SE1 and SE2 detect the four portions p1 to p4 of the substrate W in the hand H2, and the position of the substrate W in the hand H2 is determined based on the positions of the detected portions p1 to p4. Based on the determined position of the substrate W, the above-mentioned vertical drive motor 511, horizontal drive motor 513, rotational drive motor 515, upper hand advance / retreat drive motor 525, and lower hand advance / retreat drive motor 527 are controlled. .. Here, a method of determining the position of the substrate W in the hand H1 will be described.

First, for example, according to the method shown in FIG. 4, the hand H1 holding the substrate W retreats from the advancing position to the advancing / retreating initial position. As a result, the detectors SE1 and SE2 detect the portions p1 to p4 of the substrate W, respectively. The positions of the portions p1 to p4 of the substrate W in the hand H1 are calculated based on the detection signals of the detectors SE1 and SE2 and the output signal of the upper hand encoder 526 of FIG. Further, in the XY coordinate system, four virtual circles passing through the positions of three different parts among the parts p1, p2, p3, and p4 are calculated, and the center positions of the four virtual circles are calculated respectively. Further, a plurality of deviation amounts between the four center positions are calculated.

In the following description, the virtual circle passing through the portions p1, p2, p3 is referred to as a virtual circle cr1, the virtual circle passing through the portions p2, p3, p4 is referred to as a virtual circle cr2, and the virtual circle passing through the portions p1, p3, p4. Is called a virtual circle cr3, and a virtual circle passing through the portions p1, p2, p4 is called a virtual circle cr4. Further, the center positions of the virtual circles cr1, cr2, cr3, and cr4 in the hand H1 are set to vp1, vp2, vp3, and vp4.

As shown by the alternate long and short dash line in FIG. 6, when all of the plurality of deviations between the center positions vp1 and vp4 are 0, the four center positions vp1 to vp4 coincide with the center position C of the substrate W in the hand H1. .. Further, even if at least one of the plurality of deviation amounts does not become 0, if all of the plurality of deviation amounts between the four center positions vp1 to vp4 are equal to or less than a predetermined threshold value, the four centers. The positions vp1 to vp4 substantially coincide with the center position C of the substrate W in the hand H1. Here, the threshold value is set to, for example, an allowable error between the actual position of the detectors SE1 and SE2 and the design mounting position (design position).

As described above, when all of the plurality of deviation amounts are equal to or less than the threshold value, the notch N does not exist in any of the portions p1 to p4 of the substrate W detected by the detectors SE1 and SE2. Therefore, since all of the four virtual circles cr1 to cr4 represent the position of the substrate W in the hand H1, the position of the substrate W in the hand H1 can be determined based on any or all of the four virtual circles cr1 to cr4. can.

7 to 10 are plan views showing the positional relationship between the substrate W on the hand H1 and the four virtual circles cr1 to cr4 when at least one of the plurality of deviation amounts exceeds the threshold value. In FIGS. 7 to 10, the hand H1 is not shown. FIG. 7 shows the positional relationship between the substrate W and the virtual circle cr2, and FIG. 8 shows the positional relationship between the substrate W and the virtual circle cr3. Further, FIG. 9 shows the positional relationship between the substrate W and the virtual circle cr1, and FIG. 10 shows the positional relationship between the substrate W and the virtual circle cr4.

When at least one of the plurality of deviation amounts exceeds the threshold value, only the center position of one of the four center positions vp1 to vp4 (in this example, the center position vp4 of the virtual circle cr4) is the substrate W in the hand H1. It coincides with or almost coincides with the center position C of (FIG. 10). On the other hand, the remaining three center positions (in this example, the center positions vp1, vp2, vp3 of the virtual circles cr1, cr2, cr3) deviate more than a certain value from the center position C of the substrate W in the hand H1 (FIGS. 7, FIG. 8 and FIG. 9).

As described above, when at least one of the plurality of deviation amounts exceeds the threshold value, a notch is formed in any of the portions p1 to p4 (part p3 in this example) of the substrate W detected by the detectors SE1 and SE2. N exists. In this case, the radii (or diameters) of the three virtual circles passing through the portion where the notch N exists will deviate relatively greatly from the radius (or diameter) of the actual substrate W. On the other hand, the radius (or diameter) of one virtual circle that does not pass through the portion where the notch N exists is equal to or substantially the same as the radius (or diameter) of the actual substrate W.

In the present embodiment, it is assumed that the radius of the substrate W to be transported by the substrate transport device 500 is known. In the following description, the design radius of the substrate W, which is known as the information of the substrate W, is referred to as a design radius. In this case, by selecting the virtual circle (virtual circle cr4 in this example) that matches or has the closest radius to the design radius among the four virtual circles cr1 to cr4, the hand is handed based on the selected virtual circle. The position of the substrate W in H1 can be determined.

(4) Functional Configuration of Transport Control Unit 550 FIG. 11 is a block diagram showing a functional configuration of the transport control unit 550. The transport control unit 550 includes a partial position calculation unit 51, a virtual circle calculation unit 52, a board position determination unit 53, a detector position storage unit 54, a threshold value storage unit 55, a movement control unit 58, a coordinate information storage unit 59, and coordinates. The information correction unit 60 and the board information storage unit 61 are included. The transfer control unit 550 is composed of a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), and a storage device. When the CPU executes a computer program stored in a storage medium such as a ROM or a storage device, the functions of each component of the transfer control unit 550 are realized. In addition, a part or all the components of the transfer control unit 550 may be realized by hardware such as an electronic circuit.

Here, the substrate transport device 500 receives and transports the substrate W at a predetermined position (hereinafter, referred to as a receiving position) of one processing unit, and transports the substrate W to a predetermined position (hereinafter, a mounting position) of another processing unit. It is assumed that the substrate W is placed on (referred to as). The receiving position and the mounting position are represented by the coordinates of a fixed coordinate system for the entire substrate transfer device 500. The coordinates of the receiving position are called the receiving coordinates, and the coordinates of the mounting position are called the mounting coordinates.

The coordinate information storage unit 59 stores in advance the receiving coordinates of the receiving position and the mounting coordinates of the mounting position as coordinate information. The movement control unit 58 rotates the vertical drive motor 511, the horizontal drive motor 513, and the rotation of FIG. 5 so as to receive the substrate W from the receiving position based on the coordinate information (receiving coordinates) stored in the coordinate information storage unit 59. It controls the directional drive motor 515 and also controls the upper hand advance / retreat drive motor 525 or the lower hand advance / retreat drive motor 527. At this time, the hand H1 or the hand H2 advances from the initial advance / retreat position to receive the substrate W at the receiving position, and then retreats to the initial advance / retreat position.

The detector position storage unit 54 stores the design positions of the plurality of detectors SE1 and SE2 as detector information. The partial position calculation unit 51 is based on the detection signals of the plurality of detectors SE1 and SE2, the output signal of the upper hand encoder 526 or the lower hand encoder 528, and the detector information stored in the detector position storage unit 54. The positions of the plurality of portions p1 to p4 of the substrate W in H1 or the hand H2 are calculated.

The virtual circle calculation unit 52 calculates four virtual circles cr1 to cr4 (FIGS. 6 to 10) from the positions of the portions p1 to p4 calculated by the partial position calculation unit 51, respectively. Further, the virtual circle calculation unit 52 calculates each of the calculated center positions vp1 to bp4 (FIGS. 6 to 10) of each of the calculated virtual circles cr1 to cr4.

The threshold value storage unit 55 stores the above threshold value. The board position determination unit 53 calculates a plurality of deviation amounts between the plurality of center positions vp1 to vp4 calculated by the virtual circle calculation unit 52. Further, the board position determination unit 53 determines whether or not all of the plurality of deviation amounts are equal to or less than the threshold value stored in the threshold value storage unit 55.

The board position determination unit 53 determines the position of the board W in the hand H1 or the hand H2 based on any or all of the four virtual circles cr1 to cr4 when all of the plurality of deviation amounts are equal to or less than the threshold value. do. At this time, the substrate position determination unit 53 may select one virtual circle to be used for determination based on the distance between the center positions vp1 to vp4 and the first reference position. For example, a virtual circle having the smallest distance between the center positions vp1 to vp4 and the first reference position (n is an integer of 1 to 4) may be selected. Alternatively, the board position determination unit 53 may determine the average position of all the virtual circles cr1 to cr4 as the position of the board W in the hand H1 or the hand H2.

The board information storage unit 61 stores the design radius of the board W to be transferred by the board transfer device 500. When at least one of the plurality of deviation amounts exceeds the threshold value, the board position determination unit 53 determines the virtual circle having a radius that matches or has the closest radius to the design radius among the four virtual circles cr1 to cr4. Select. Further, the board position determination unit 53 determines the position of the board W in the hand H1 or the hand H2 based on the selected virtual circle.

The coordinate information correction unit 60 shifts the center position C of the substrate W with respect to the first reference position of the hand H1 or the hand H2 based on the position of the substrate W in the hand H1 or the hand H2 determined by the substrate position determination unit 53. Is calculated. Further, the coordinate information correction unit 60 corrects the coordinate information (placed coordinates) stored in the coordinate information storage unit 59 based on the calculated deviation. The movement control unit 58 moves up and down in FIG. 5 so that the board W received at the receiving position is placed at the mounting position based on the coordinate information (mounting coordinates) stored and corrected in the coordinate information storage unit 59. It controls the directional drive motor 511, the horizontal drive motor 513, and the rotational direction drive motor 515, and also controls the upper hand advance / retreat drive motor 525 or the lower hand advance / retreat drive motor 527. At this time, the hand H1 or the hand H2 advances from the initial position of advancement / retreat.

(5) Operation of the Substrate Transfer Device 500 FIGS. 12 and 13 are flowcharts showing a basic transfer operation of the substrate W by the substrate transfer device 500. Hereinafter, the transfer operation of the substrate W using the hand H1 will be described. In the initial state, the hand H1 is located at the initial position of advancing / retreating on the rotating member 520. Further, it is assumed that the substrate W is not held by the hand H1 in the initial state.

The movement control unit 58 of FIG. 11 moves the hand H1 to the vicinity of the receiving position (step S1) based on the coordinate information (receipt coordinates) stored in the coordinate information storage unit 59, and advances the hand H1. The substrate W at the receiving position is received (step S2). Further, the movement control unit 58 retracts the hand H1 that has received the substrate W to the initial position of advancing / retreating (step S3). At this time, the partial position calculation unit 51 calculates the positions of the plurality of portions p1 to p4 on the outer peripheral portion of the substrate W in the hand H1 based on the detection signals of the plurality of detectors SE1 and SE2 and the output signals of the upper hand encoder 526. (Step S4).

The virtual circle calculation unit 52 calculates four virtual circles cr1 to cr4 that pass through the positions of three parts that are different from each other among the calculated positions of the portions p1 to p4 of the substrate W, and the virtual circles cr1 to cr4. The center positions vp1 to vp4 of the above are calculated respectively (step S5).

Next, the board position determination unit 53 calculates a plurality of deviation amounts between the calculated plurality of center positions vp1 to vp4 (step S6), and all of the calculated plurality of deviation amounts are threshold storage units. It is determined whether or not it is equal to or less than the threshold value stored in 55 (step S7).

When all of the plurality of deviation amounts are equal to or less than the threshold value, the board position determination unit 53 determines the position of the board W in the hand H1 based on any or all of the four virtual circles cr1 to cr4 (step). S8).

Next, the coordinate information correction unit 60 calculates the deviation of the center position C of the substrate W with respect to the first reference position based on the determined position of the substrate W, and is mounted by the hand H1 based on the calculation result. The coordinate information (mounting coordinates) stored in the coordinate information storage unit 59 is corrected so that the deviation between the position of the substrate W and the mounting position is offset (step S9).

After that, the movement control unit 58 starts transport control of the hand H1 so as to transport the substrate W to the mounting position based on the corrected coordinate information (mounting coordinates) (step S10), and is held by the hand H1. The board W is placed in the mounting position (step S11). This makes it possible to accurately mount the substrate W at the mounting position regardless of the position of the substrate W on the hand H1.

In step S7 above, when at least one of the plurality of deviation amounts exceeds the threshold value, the board position determination unit 53 determines the radius that matches or is closest to the design radius among the four virtual circles cr1 to cr4. Select one virtual circle to have (step S12). After that, the board position determination unit 53 determines the position of the board W in the hand H1 based on the selected virtual circle (step S13), and proceeds to step S9.

In the above transfer operation, the operation of step S10 may be executed after the operation of step S3 and before the operation of step S4. In this case, the partial position calculation unit 51 determines the positions of the plurality of portions p1 to p4 of the outer peripheral portion of the substrate W in the hand H1 when the hand H1 or the hand H2 holding the received substrate W advances from the initial advance / retreat position. It may be calculated. After that, the operation of steps S5 to S10 or the operation of steps S5 to S7, S12, S13, S9, and S10 may be performed in parallel with the operation of transporting the substrate W to the mounting position. Further, in the above transfer operation, the operations of steps S12 and S13 may be performed instead of the operations of steps S7 and S8. In this case, it is not necessary to set a threshold value for the amount of deviation.

(6) Effect of First Embodiment In the above-mentioned substrate transfer device 500, each of the hands H1 and H2 moves on the rotating member 520, so that a plurality of portions p1 and p3 of the substrate W are detected as one. It is detected by the device SE1. Further, a plurality of portions p2 and p4 of the substrate W are detected by one detector SE2. Therefore, in order to detect the positions of the plurality of portions p1 to p4 of the substrate W, it is not necessary to prepare a plurality of detectors corresponding to the plurality of portions p1 to p4 of the substrate W. This simplifies the configuration of the substrate transfer device 500. In addition, the number of parts of the substrate transfer device 500 is reduced. As a result, the cost of the substrate processing apparatus including the substrate transfer apparatus 500 can be reduced.

Further, in the above-mentioned substrate transfer device 500, when each of the hands H1 and H2 moves forward or backward on the rotating member 520, the portions p1 and p2 of the substrate W move forward or backward on the rotating member 520, and the detection regions of the detectors SE1 and SE2 are substantially the same. Pass through DA. Further, the portions p3 and p4 of the substrate W pass through the detection regions DA of the detectors SE1 and SE2 at substantially the same timing. Therefore, it is possible to shorten the time required for detecting the plurality of portions p1 to p4 of the substrate W.

In the above-mentioned substrate transfer device 500, the four portions p1 to p4 of the substrate W detected by the detectors SE1 and SE2 are the first to fourth parts of the XY coordinate system defined in each hand H1 and H2 in a plan view. Located in each quadrant. In this case, the accuracy of determining the position of the substrate W is improved as compared with the case where two or more portions of the portions p1 to p4 are located in one quadrant.

In the substrate transfer device 500 described above, the arm portions Hb of the hands H1 and H2 have a width smaller than the distance between the detectors SE1 and SE2 in a plan view. Further, the arm portions Hb of the hands H1 and H2 are configured so as not to cross the detection region DA of the detectors SE1 and SE2 when the hands H1 and H2 move forward and backward on the rotating member 520. Further, when the substrate W is held by the hands H1 and H2, most of the guide portion Ha is located below the substrate W. With such a configuration, it is possible to prevent a part of the hands H1 and H2 from being erroneously detected as the outer peripheral end portion of the substrate W when determining the position of the substrate W.

[2] Second Embodiment The difference between the substrate transport device 500 according to the second embodiment and the substrate transport device 500 according to the first embodiment will be described. 14 is a plan view of the substrate transfer device 500 according to the second embodiment, and FIG. 15 is a side view of the substrate transfer device 500 of FIG.

As shown in FIGS. 14 and 15, the substrate transfer device 500 according to the second embodiment is further provided with the detector SE3 in addition to the configuration of the substrate transfer device 500 according to the first embodiment.

Like the detectors SE1 and SE2, the detector SE3 is a transmissive photoelectric sensor composed of a light emitting unit Se and a light receiving unit Sr. The light projecting unit Se of the detector SE3 is located at a substantially central position in the longitudinal direction of the rotating member 520 and at a position different from the light projecting unit Se of the detectors SE1 and SE2 in the lateral direction (width direction) of the rotating member 520. It is attached. The light receiving portion Sr of the detector SE3 is arranged above the rotating member 520 by the support member 530 (FIG. 15) so as to face the light emitting portion Se of the detector SE3. In FIG. 14, the support member 530 is not shown.

In the detector SE3, as in the detectors SE1 and SE2, light is emitted upward from the light projecting unit Se, respectively. The light receiving unit Sr receives light emitted from the opposing light projecting unit Se as feedback light. As a result, in the detector SE3, as in the detectors SE1 and SE2, a detection region DA extending in the vertical direction is formed as shown by hatching in FIG.

The detector SE3 is provided so as to overlap the substrate W held by the hands H1 and H2 in a plan view when the hands H1 and H2 are in the initial positions of advancement and retreat. That is, the detector SE3 is arranged so that the detection signal is in the non-light incoming state when the hands H1 and H2 are in the forward / backward initial position, and the detection signal is in the light incoming state when the hands H1 and H2 are in the forward position. Has been done. According to such a configuration, when the detectors SE1 and SE2 detect the four portions p1 to p4 at the outer peripheral end portion of the substrate W, it becomes possible to detect further other portions at the outer peripheral end portion of the substrate W. ..

FIG. 16 is a plan view showing a plurality of parts of the substrate W detected by the substrate transport device 500 according to the second embodiment. As shown in FIG. 16, in the present embodiment, four portions p1 to p4 at the outer peripheral end portion of the substrate W are detected by the detectors SE1 and SE2, and one portion p5 at the outer peripheral end portion of the substrate W. Is detected by the detector SE3.

Here, the distance between the detectors SE1 and SE3 and the distance between the detectors SE2 and SE3 in the lateral direction (width direction) of the rotating member 520 are larger than the circumferential length of the notch N of the substrate W. In this case, the portion p5 is separated from the other portions p1 to p4 by at least the length of the notch N in the circumferential direction.

In the present embodiment, the position of the substrate W in the hands H1 and H2 is determined based on the detected positions of the five portions p1 to p5. Specifically, as in the example of the first embodiment, first, four virtual circles cr1 to cr4 passing through the positions of three different parts of the parts p1 to p4 are calculated, and four virtual circles are calculated. The center positions vp1 to vp4 of cr1 to cr4 are calculated, respectively. Further, a plurality of deviation amounts between the four center positions are calculated. As a result, if all of the plurality of deviation amounts is 0 or is equal to or less than a predetermined threshold value, the substrate in the hands H1 and H2 is based on any or all of the four virtual circles cr1 to cr4. The position of W is determined.

When at least one of the plurality of deviation amounts exceeds the threshold value, the notch N exists in any of the portions p1 to p4 of the substrate W as described above. In this case, the notch N does not exist in the portion p5 of the substrate W detected by the detector SE3. Therefore, the virtual circle indicating the position of the substrate W in the hands H1 and H2 passes through the position of the portion p5. Therefore, by selecting the virtual circle that passes through the position of the portion p5 among the four virtual circles cr1 to cr4, the position of the substrate W in the hands H1 and H2 is determined based on the selected virtual circle.

As described above, according to the substrate transfer device 500 according to the second embodiment, even when the design radius of the substrate W is unknown, the position of the substrate W in the hands H1 and H2 can be easily and accurately determined. It will be possible.

[3] Third Embodiment The board transfer device 500 according to the third embodiment will be described as being different from the substrate transfer device 500 according to the first embodiment. FIG. 17 is a plan view of the substrate transfer device 500 according to the third embodiment. The plan view of the substrate transfer device 500 of FIG. 17 corresponds to the plan view of the substrate transfer device 500 of FIG. 1 according to the first embodiment. Therefore, the substrate transfer device 500 according to the third embodiment further includes a hand H2 and a support member 530 (not shown). In the substrate transfer device 500, the hands H1 and H2 are configured to be able to advance and retreat in the longitudinal direction of the rotating member 520 and to advance and retreat in the lateral direction of the rotating member 520 as shown by a thick arrow in FIG. To.

FIG. 18 is a block diagram showing a configuration of a control system of the substrate transfer device 500 according to the third embodiment. As shown in FIG. 18, the substrate transfer device 500 according to the present embodiment has the upper hand first drive motor instead of the upper hand advance / retreat drive motor 525 in the configuration of FIG. 5 according to the first embodiment. It is equipped with a 525A and an upper hand second drive motor 525B. Further, the substrate transfer device 500 according to the present embodiment has the lower hand first drive motor 527A and the lower hand first, instead of the lower hand advance / retreat drive motor 527 in the configuration of FIG. 5 according to the first embodiment. It is equipped with a two-drive motor 527B.

The upper hand first drive motor 525A advances and retreats the hand H1 (FIG. 17) in the longitudinal direction of the rotating member 520 under the control of the transport control unit 550. The upper hand second drive motor 525B moves the hand H1 (FIG. 17) in the lateral direction of the rotating member 520 under the control of the transport control unit 550. The upper hand encoder 526 outputs a signal indicating the rotation angle of the upper hand first drive motor 525A and the upper hand second drive motor 525B to the transfer control unit 550. Thereby, the transport control unit 550 can detect the position of the hand H1 on the rotating member 520.

The lower hand first drive motor 527A advances and retreats the hand H2 (FIG. 17) in the longitudinal direction of the rotating member 520 under the control of the transport control unit 550. The lower hand second drive motor 527B moves the hand H2 (FIG. 17) in the lateral direction of the rotating member 520 under the control of the transport control unit 550. The lower hand encoder 528 outputs a signal indicating the rotation angle of the lower hand first drive motor 527A and the lower hand second drive motor 527B to the transfer control unit 550. Thereby, the transport control unit 550 can detect the position of the hand H2 on the rotating member 520.

In the substrate transfer device 500 having the above configuration, by moving the hands H1 and H2 holding the substrate W in two directions orthogonal to each other in the horizontal plane, the two detectors SE1 and SE2 are used at the outer peripheral end of the substrate W. It becomes possible to detect 5 or more parts.

FIG. 19 is a schematic diagram showing an example of a method of detecting 5 or more portions of the outer peripheral end portion of the substrate W held by the hand H1 using two detectors SE1 and SE2. In FIG. 19, only a part of the components of the substrate transfer device 500 of FIG. 17 are shown.

First, as shown by a thick arrow in the plan view on the left side of FIG. 19, the hand H1 holding the substrate W retracts from the forward position to the initial advance / retreat position on the central axis CL of the rotating member 520. Here, the central axis CL is a straight line extending in the longitudinal direction of the rotating member 520 through the center in the lateral direction of the rotating member 520. In this case, the substrate W crosses the two detection regions DA of the detectors SE1 and SE2, so that the four portions p1 to p4 at the outer peripheral end of the substrate W are detected.

In this example, when the four portions p1 to p4 of the substrate W are detected, the hand H1 stops the advancing / retreating operation so that a part of the substrate W is located between the detectors SE1 and SE2 in a plan view. .. After that, in the hand H1, as shown by a thick arrow in the plan view on the right side of FIG. 19, the portion p5 of the substrate W other than the portions p1 to p4 crosses the detection region DA of any of the detectors SE1 and SE2. , Moves in the lateral direction of the rotating member 520. Thereby, 5 or more portions of the outer peripheral end portion of the substrate W can be detected by using the two detectors SE1 and SE2. Therefore, even if the design radius of the substrate W is unknown, the substrate W in the hand H1 can be selected based on the selected virtual circle by selecting the virtual circle that passes through the position of the portion p5 among the four virtual circles cr1 to cr4. The position of is determined.

As described above, according to the substrate transfer device 500 according to the third embodiment, the position of the substrate W in the hands H1 and H2 can be easily positioned without increasing the number of detectors for detecting the outer peripheral end portion of the substrate W. It becomes possible to make an accurate judgment.

[4] Fourth Embodiment The difference between the substrate transfer device 500 according to the fourth embodiment and the substrate transfer device 500 according to the first embodiment will be described. FIG. 20 is a side view of the substrate transfer device 500 according to the fourth embodiment.

As shown in FIG. 20, in the substrate transfer device 500 according to the present embodiment, the detectors SE1 and SE2 are provided on the fixed portions 611 and 612 separate from the hands H1 and H2 and the rotating member 520. .. A substrate support portion 600 configured to support the substrate W is provided at the receiving position or the mounting position. The fixing portions 611 and 612 are provided at positions in the vicinity of the substrate support portion 600 so as not to be movable with respect to the substrate support portion 600. The detectors SE1 and SE2 are arranged so that the substrate W conveyed by the substrate transfer device 500 crosses the detection region DA of the detectors SE1 and SE2.

The substrate support portion 600 is a carrier that accommodates, for example, one or a plurality of substrate Ws. Alternatively, the substrate support portion 600 is, for example, a substrate mounting portion for transferring the substrate W between two substrate transfer devices. Alternatively, the substrate support portion 600 is provided in a processing unit for performing a predetermined processing on the substrate W. An example of the substrate support portion 600 provided in the processing unit is a hot plate or a cooling plate for heat-treating the substrate W. In addition to the above example, as an example of the substrate support portion 600 provided in the processing unit, there is a rotation holding portion (spin chuck) that rotatably holds the substrate W in a horizontal posture.

In the substrate transfer device 500 according to the present embodiment, a plurality of portions of the substrate W until the hand H1 (or the hand H2) that has received the substrate W from the substrate support portion 600 retreats from the receiving position to the initial position of advancing / retreating. p1 to p4 are detected. Alternatively, a plurality of portions p1 to p4 of the substrate W are detected during the period from the initial advance / retreat position to the advance of the hand H1 (or the hand H2) holding the substrate W to the mounting position. Thereby, the position of the substrate W in the hand H1 (or the hand H2) is determined.

According to the above configuration, the detectors SE1 and SE2 for detecting the plurality of portions p1 to p4 of the substrate W are attached to the fixed portions 611 and 612. In this case, since the mounting state of the detectors SE1 and SE2 is stable, the accuracy of determining the position of the substrate W on the hands H1 and H2 is improved.

[5] Fifth Embodiment The difference between the substrate transfer device 500 according to the fifth embodiment and the substrate transfer device 500 according to the first embodiment will be described. 21 is a plan view of the board transfer device according to the fifth embodiment, FIG. 22 is a side view of the board transfer device 500 of FIG. 21, and FIG. 23 is a front view of the board transfer device 500 of FIG. 21. be.

As shown in FIG. 21, the substrate transfer device 500 according to the present embodiment is provided with four detectors SE11, SE12, SE21, and SE22 in place of the detectors SE1 and SE2 of FIG. The detectors SE11 and SE12 are provided on the hand H1 and are located at two tip portions of the branched guide portion Ha. The detectors SE21 and SE22 are provided on the hand H2 and are located at two tip portions of the branched guide portion Ha. Therefore, the board transfer device 500 of FIGS. 21 to 22 is not provided with the support member 530 of FIG.

Each of the detectors SE11, SE12, SE21 and SE22 is a reflective photoelectric sensor. The reflective photoelectric sensor used here has, for example, a configuration in which a light emitting unit Se and a light receiving unit Sr are integrally provided in a common package. Each of the detectors SE11, SE12, SE21, and SE22 is provided so as to emit light upward from the light projecting unit Se and incident light traveling downward from above on the light receiving unit Sr. As a result, in each of the detectors SE11, SE12, SE21, and SE22, as shown by hatching in FIGS. 22 and 23, a detection region DA extending upward from the detector is formed.

In each of the detectors SE11, SE12, SE21, and SE22, when the substrate W is present in the detection region DA, the light emitted from the light projecting unit Se and reflected by the substrate W is incident on the light receiving unit Sr as feedback light. .. As a result, a detection signal indicating the incoming light state is output from the light receiving unit Sr. On the other hand, when the substrate W does not exist in the detection region DA, the light emitted from the light projecting unit Se does not return to the light receiving unit Sr. As a result, a detection signal indicating a non-light incoming state is output from the light receiving unit Sr.

As described in the fourth embodiment, the substrate support portion 600 for supporting the substrate W is provided at the receiving position, for example. In the board support portion 600, the center of the indicated board W should be located at the reference position (hereinafter referred to as the second reference position) in the same manner as the first reference position is determined for the hands H1 and H2. Call.) Is predetermined.

In the substrate transfer device 500 according to the present embodiment, when the substrate W supported by the substrate support portion 600 is received, a plurality of portions of the outer peripheral end portion of the substrate W are detected by the detectors SE11 and SE12.

FIG. 24 is a schematic diagram showing an example of a method of detecting a plurality of portions of the outer peripheral end portion of the substrate W supported by the substrate support portion 600. In FIG. 24, only the substrate support portion 600, the substrate W supported by the substrate support portion 600, and the hand H1 are shown. The substrate support portion 600 of this example is, for example, a rotation holding portion (spin chuck) that attracts and holds the central portion of the lower surface of the substrate W.

At the time of detecting a plurality of portions of the outer peripheral end portion of the substrate W, for example, the hand H1 not holding the substrate W was placed on the substrate support portion 600 as shown by a thick arrow in the plan view at the left end of FIG. 24. At a position below the substrate W, it advances toward the substrate support portion 600. At this time, since the substrate W is not located above the two detectors SE11 and SE12, the detection signals of the detectors SE11 and SE12 are in a non-lighting state.

Next, as shown by a thick arrow in the central plan view of FIG. 24, when the hand H1 advances by a predetermined distance, the detectors SE11 and SE12 overlap the two portions of the outer peripheral end portion of the substrate W in a plan view. Become. That is, the two portions of the outer peripheral end of the substrate W cross the two detection regions DA (FIG. 23) of the detectors SE11 and SE12. In this case, the detection signals of the detectors SE11 and SE12 change from the non-light-in state to the in-light state. As a result, the positions of the two outer peripheral ends of the substrate W supported by the substrate support portion 600 are detected based on the timing at which the detection signals of the detectors SE11 and SE12 change from the non-light incoming state to the incoming light state. To. At this time, the portion of the outer peripheral end of the substrate W detected based on the detection signal of the detector SE11 is referred to as a portion p11. Further, the portion of the outer peripheral end portion of the substrate W detected based on the detection signal of the detector SE12 is referred to as a portion p12.

Next, as shown by a thick arrow in the plan view at the right end of FIG. 24, when the hand H1 further advances by a predetermined distance, the detectors SE11 and SE12 move to the other two portions of the outer peripheral end portion of the substrate W in a plan view. It will overlap. That is, the other two portions of the outer peripheral end portion of the substrate W cross the two detection regions DA (FIG. 23) of the detectors SE11 and SE12. In this case, the detection signals of the detectors SE11 and SE12 change from the in-light state to the non-light-in state. As a result, the positions of the two outer peripheral ends of the substrate W supported by the substrate support portion 600 are detected based on the timing at which the detection signals of the detectors SE11 and SE12 change from the non-light incoming state to the incoming light state. To. At this time, the portion of the outer peripheral end of the substrate W detected based on the detection signal of the detector SE11 is referred to as a portion p13. Further, the portion of the outer peripheral end portion of the substrate W detected based on the detection signal of the detector SE12 is referred to as a portion p14. When the four portions p11 to p14 are detected, the hand H1 stops the forward movement with respect to the substrate support portion 600 so as not to contact the substrate support portion 600.

Instead of the above example, when the hand H1 retracts with respect to the substrate support 600 in the order from right to left in FIG. 24 from the position closest to the substrate support 600 on which the substrate W is supported, the above four Part p11 to p14 can also be detected.

Similar to the example of the hand H1, when the hand H2 is advanced or retracted with respect to the substrate support portion 600, the four portions of the outer peripheral end portion of the substrate W are based on the detection signals of the detectors SE21 and SE22. The positions of p11 to p14 can be detected.

As described above, a plurality of portions p11 to p14 of the outer peripheral end portion of the substrate W in the substrate support portion 600 are detected, and their positions are calculated. The position of the substrate W in the substrate support portion 600 is determined based on the calculated positions of the plurality of portions p11 to p14.

The substrate transfer device 500 according to the fifth embodiment has basically the same control system (FIG. 5) as the substrate transfer device 500 according to the first embodiment. In this case, in the transfer control unit 550 according to the present embodiment, the substrate position determination unit 53 determines the position of the substrate W in the substrate support unit 600 based on the detected positions of the plurality of portions p11 to p14. ..

The coordinate information correction unit 60 calculates the deviation of the center position C of the substrate W with respect to the second reference position based on the position of the substrate W in the substrate support unit 600 determined by the substrate position determination unit 53. Further, the coordinate information correction unit 60 is based on the calculated deviation so that the center position C of the substrate W coincides with the first reference position of the hands H1 and H2 after the substrate W is received by the hands H1 and H2. Correct the coordinate information of the receiving position. Alternatively, in the coordinate information correction unit 60, after the substrate W is transferred from the hands H1 and H2 to the other substrate support portion 600, the center position C of the substrate W coincides with the second reference position of the other substrate support portion 600. As described above, the coordinate information of the mounting position is corrected based on the calculated deviation. This makes it possible to convey the substrate W with high accuracy.

According to the above configuration, by moving the hand H1, the four portions p11 to p14 of the substrate W are detected by the two detectors SE11 and SE12. Further, by moving the hand H2, the four portions p11 to p14 of the substrate W are detected by the two detectors SE21 and SE22. Therefore, in order to detect the positions of the plurality of portions p11 to p14 of the substrate W, it is not necessary to prepare a plurality of detectors corresponding to the plurality of portions p11 to p14 of the substrate W. This simplifies the configuration of the substrate transfer device 500. Further, since the number of parts of the board transfer device 500 is reduced, the cost of the board processing device including the board transfer device 500 can be reduced.

[6] Sixth Embodiment FIG. 25 is a schematic block diagram showing an overall configuration of a board processing device provided with a board transfer device 500 according to any one of the first to fifth embodiments. As shown in FIG. 25, the substrate processing device 100 is provided adjacent to the exposure device 800, and is a control device 210, a substrate transfer device 500 according to any one of the first to fifth embodiments, a heat treatment unit 230, and the heat treatment unit 230. It includes a coating processing unit 240 and a developing processing unit 250.

The control device 210 includes, for example, a CPU and a memory, or a microcomputer, and controls the operations of the substrate transfer device 500, the heat treatment unit 230, the coating processing unit 240, and the development processing unit 250. Further, the control device 210 gives a command to the transfer control unit 550 for aligning the hand H1 of the substrate transfer device 500 with the board support portion of a predetermined processing unit.

The substrate transfer device 500 transfers the substrate W between the heat treatment unit 230, the coating processing unit 240, the development processing unit 250, and the exposure apparatus 800. Each of the coating processing unit 240 and the developing processing unit 250 includes a plurality of processing units PU. The processing unit PU provided in the coating processing unit 240 is provided with a spin chuck as the substrate support unit 600. Further, the processing unit PU is provided with a processing liquid nozzle 5 for supplying a processing liquid for forming a resist film on the substrate W rotated by the spin chuck. As a result, a resist film is formed on the untreated substrate W. The substrate W on which the resist film is formed is exposed by the exposure apparatus 800.

The processing unit PU provided in the developing processing unit 250 is provided with a developer nozzle 6 that supplies the developing solution to the substrate W rotated by the spin chuck. As a result, the substrate W after the exposure process by the exposure apparatus 800 is developed.

The heat treatment unit 230 includes a plurality of processing units TU that heat or cool the substrate W. In the processing unit TU, a temperature control plate is provided as a substrate support portion 600. The temperature control plate is a heating plate or a cooling plate. In the heat treatment section 230, the substrate W is heat-treated before and after the coating process by the coating process section 240, the development process by the development process section 250, and the exposure process by the exposure apparatus 800.

The substrate processing apparatus 100 is provided with the substrate transfer apparatus 500 according to any one of the first to fifth embodiments. As a result, it is not necessary to prepare a large number of detectors for determining the position of the substrate W, so that the cost can be reduced. Further, the substrate W is conveyed with high accuracy between the plurality of processing units PU and TU. As a result, in each of the processing units PU and TU, the occurrence of processing defects due to the positional deviation of the substrate W is prevented, and the processing accuracy of the substrate W is improved.

[7] Other Embodiments (1) In the substrate transfer device 500 according to the above embodiment, the hands H1 and H2 are configured to be able to move forward and backward on the rotating member 520, but the hands H1 and H2 are the rotating members. It may be configured to be able to move forward and backward and turn on the 520.

In this case, the substrate transfer device 500 is provided with a turning motor that changes the directions of the hands H1 and H2 on the rotating member 520, and a turning encoder that outputs a signal indicating the rotation angle of the turning motor. Thereby, for example, by swiveling the hands H1 and H2 so as to cross the detection region DA of the detector SE1, the outer peripheral end portion of the substrate W is based on the detection signal of the detector SE1 and the output signal of the swivel encoder. It becomes possible to calculate the position of a part. As described above, the operation of the hands H1 and H2 for detecting the plurality of portions of the outer peripheral end portion of the substrate W is not limited to the advancing / retreating operation, but may include a turning operation.

(2) In the substrate transfer device 500 according to the third embodiment, the three portions p1, p3, and p5 at the outer peripheral end of the substrate W are detected by using one detector SE1, but the present invention has the present invention. Not limited to this. In the substrate transfer device 500 according to the above embodiment, four or more portions of the outer peripheral end portion of the substrate W may be detected by using one detector SE1. In this case, the hands H1 and H2 that hold the substrate W are moved so that, for example, four or more portions of the outer peripheral end portion of the held substrate W sequentially cross the detection region DA of one detector SE1. As a result, the positions of four or more portions of the outer peripheral end of the board W are calculated based on the timing of switching the state of the output signal of the detector SE1 and the output of each encoder built in the board transfer device 500. Will be possible. According to such a configuration, the number of detectors for detecting the outer peripheral end portion of the substrate W can be further reduced. Therefore, further cost reduction of the substrate processing apparatus including the substrate transfer apparatus 500 is realized.

(3) In the above embodiment, the substrate transport device 500 receives and transports the substrate W at the receiving position of one processing unit, and mounts the substrate at the mounting position of the other processing unit. Is not limited to this. The receiving position and the mounting position of the substrate W may be set in one processing unit.

For example, a processing unit including two substrate support portions 600 (for example, a cooling plate and a hot plate) in one casing, and a substrate transfer device 500 according to any one of the first to fourth embodiments as a so-called local transfer mechanism. Can be provided. In this case, when the substrate W is conveyed from one substrate support portion 600 to another substrate support portion 600 in one processing unit, the position of the substrate W in the hands H1 and H2 is determined.

Alternatively, the substrate transfer device 500 according to the fifth embodiment can be provided as a so-called local transfer mechanism in the processing unit having two substrate support portions 600 (for example, a cooling plate and a hot plate) in one casing. In this case, the position of the substrate W in the substrate support 600 is determined before or after the substrate W is conveyed from one substrate support 600 to the other substrate support 600 in one processing unit.

(4) In the above embodiment, the guide portions Ha of the hands H1 and H2 have a substantially V-shaped flat plate shape, but the present invention is not limited thereto. The guide portions Ha of the hands H1 and H2 may have a substantially C-shaped flat plate shape extending in an arc shape. In this case, the guide portion Ha is configured so as not to overlap the outer peripheral end portion of the substrate W to be detected by the detectors SE1, SE2, SE3 in a plan view while holding the substrate W.

(5) In the above embodiment, the hands H1 and H2 of the substrate transfer device 500 abut on the outer peripheral end portion of the substrate W instead of the mechanism for adsorbing the lower surface of the substrate W to hold the outer peripheral end portion of the substrate. It may have a holding mechanism. According to the hand that holds the outer peripheral end of the substrate W, the hand with the center position C of the substrate W deviated from the first reference position due to the wear of the contact portion with the outer peripheral end of the substrate W. May be retained. Even in such a case, since the position of the substrate W in the hand is accurately determined, the substrate W can be accurately placed at the position where it should be originally placed.

(6) In the above embodiment, the light emitting units Se of the plurality of detectors SE1, SE2, and SE3 emit light so as to go upward from the position below the substrate W. Not limited to this, the light projecting unit Se of the detectors SE1, SE2, and SE3 may emit light so as to go downward from the position above the substrate W.

(7) In the substrate transfer device 500 according to the first to fourth embodiments, the transmission type photoelectric sensor is used as the detectors SE1, SE2, SE3, but the present invention is not limited thereto. In the substrate transfer device 500 according to the first to fourth embodiments, a reflection type photoelectric sensor may be used as the detectors SE1, SE2, SE3 instead of the transmission type photoelectric sensor.

(8) In the above embodiment, the plurality of portions p1 to p5 of the outer peripheral portion of the substrate W held by the hands H1 and H2 are detected by the optical detectors SE1, SE2, and SE3. Not limited to this, the plurality of portions p1 to p5 of the outer peripheral portion of the substrate W held by each hand H1 and H2 may be detected by another detector such as an ultrasonic sensor.

[8] Correspondence between Each Component of Claim and Each Element of Embodiment Hereinafter, an example of correspondence between each component of claim and each element of embodiment will be described, but the present invention is the following example. Not limited to.

In the above embodiment, the hands H1 and H2 and the substrate support portion 600 are examples of the support portions, and the configuration of the substrate transport device 500 excluding the hands H1 and H2 is an example of the position determination device, and the detector SE1 and SE1. The detection regions DA of SE11 and SE21 are examples of the first detection region, and the detectors SE1, SE11 and SE21 are examples of the first detector.

Further, the moving member 510, the vertical drive motor 511, the horizontal drive motor 513, the rotary drive motor 515, the rotary member 520, the support members 521, 522, the upper hand advance / retreat drive motor 525, the upper hand first drive motor 525A, The upper hand second drive motor 525B, the lower hand advance / retreat drive motor 527, the lower hand first drive motor 527A, and the lower hand second drive motor 527B are examples of relative moving portions.

Further, the transfer control unit 550 is an example of the control unit, the movement control unit 58 is an example of the relative movement control unit, the partial position calculation unit 51 is an example of the partial position calculation unit, and the board position determination unit 53 is an example. An example of the position determination unit, the hands H1 and H2 are examples of the transport holding unit, the detection area DA of the detectors SE2, SE12, and SE22 is an example of the second detection area, and the detectors SE2, SE12, SE22. Is an example of the second detector, portions p1 and p11 of the outer peripheral end portion of the substrate W are examples of the first portion of the outer peripheral end portion of the substrate, and portions p3 and p13 of the outer peripheral end portion of the substrate W. Is an example of the second portion of the outer peripheral edge of the substrate.

Further, the outer peripheral end portions p2 and p12 of the substrate W are examples of the third portion of the outer peripheral end portion of the substrate, and the outer peripheral end portions p4 and p14 of the substrate W are the third of the outer peripheral end portions of the substrate. It is an example of the part 4, the lateral direction of the rotating member 520 is an example of the first direction, and the longitudinal direction of the rotating member 520 is an example of the second direction.

As each component of the claim, various other components having the structure or function described in the claim can also be used.

5 ... Processing liquid nozzle, 6 ... Developing liquid nozzle, 51 ... Partial position calculation unit, 52 ... Virtual circle calculation unit, 53 ... Board position determination unit, 54 ... Detector position storage unit, 55 ... Threshold storage unit, 58 ... Movement control unit, 59 ... Coordinate information storage unit, 60 ... Coordinate information correction unit, 61 ... Board information storage unit, 100 ... Board processing device, 210 ... Control device, 230 ... Heat treatment unit, 240 ... Coating processing unit, 250 ... Development processing unit, 500 ... Substrate transfer device, 510 ... Moving member, 511 ... Vertical drive motor, 512 ... Vertical encoder, 513 ... Horizontal drive motor, 514 ... Horizontal encoder, 515 ... Rotational drive motor, 516 ... Rotation direction encoder, 520 ... Rotating member, 521, 522, 530 ... Support member, 525 ... Upper hand advance / retreat drive motor, 525A ... Upper hand first drive motor, 525B ... Upper hand second drive motor, 526 ... Upper hand encoder , 527 ... Lower hand advance / retreat drive motor, 527A ... Lower hand first drive motor, 527B ... Lower hand second drive motor, 528 ... Lower hand encoder, 529 ... Operation unit, 550 ... Transfer control unit, 600 ... Board support unit , 611, 612 ... Fixed part, 800 ... Exposure device, C ... Center position, CL ... Central axis, DA ... Detection area, W ... Board, H1, H2 ... Hand, Ha ... Guide part, Hb ... Arm part, N ... Notch, PU, TU ... Processing unit, SE1, SE2, SE3, SE11, SE12, SE21, SE22 ... Detector, Se ... Floodlight part, Sr ... Light receiving part, cr1 ~ cr4 ... Virtual circle, p1 ~ p5, p11 ~ p14 ... Part, sm ... Adsorption part, vp1 to vp4 ... Center position

Claims (16)

A position determination device that determines the position of a substrate supported by a support portion.
A first detector having a first detection area and
A relative moving portion configured to be able to relatively move the substrate supported by the supporting portion and the first detector, and a relative moving portion.
A control unit that controls the relative movement unit is provided.
The control unit
A relative movement control unit that controls the relative movement unit so that a plurality of portions of the outer peripheral end portions of the substrate are sequentially located in the first detection region.
A partial position calculation unit that calculates the positions of the plurality of portions in the support unit based on the detection signal of the first detector, and a partial position calculation unit.
A position determination device including a position determination unit for determining the position of the substrate in the support portion based on the positions of the plurality of portions calculated by the partial position calculation unit. The support portion includes a transport holding portion configured to be movable while holding the substrate.
The relative moving unit is configured to be able to move the substrate held by the transport holding unit relative to the first detector by moving the transport holding unit. The position determination device according to claim 1. Further equipped with a second detector having a second detection area,
The relative moving unit is configured to be able to move the substrate held by the transport holding unit relative to the second detector by moving the transport holding unit.
In the relative movement control unit, the first and second portions of the outer peripheral end of the substrate are sequentially located in the first detection region, and the third and fourth portions of the outer peripheral end of the substrate are sequentially located. The relative moving portion is controlled so that the portions are sequentially located in the second detection region.
The position determination device according to claim 2, wherein the partial position calculation unit calculates the positions of the plurality of parts in the transport holding unit based on the detection signals of the first and second detectors. The first and second detectors are provided so that the first detection region and the second detection region are arranged in the first direction at intervals smaller than the diameter of the substrate.
The relative movement control unit is such that the substrate moves across the first and second detection regions by moving the transport holding unit in a second direction intersecting the first direction. The position determination device according to claim 3, which controls a moving unit. The relative moving portion is configured to be able to move the first detector relative to the substrate supported by the support portion by moving the first detector. , The position determination device according to claim 1. Further equipped with a second detector having a second detection area,
The relative moving portion is configured to be able to move the second detector relative to the substrate supported by the support portion by moving the second detector.
In the relative movement control unit, the first and second portions of the outer peripheral end of the substrate are sequentially located in the first detection region, and the third and fourth portions of the outer peripheral end of the substrate are sequentially located. The relative moving portion is controlled so that the portions are sequentially located in the second detection region.
The position determination device according to claim 5, wherein the partial position calculation unit calculates the positions of the plurality of parts in the support unit based on the detection signals of the first and second detectors. The first and second detectors are provided so that the first detection region and the second detection region are arranged in the first direction at intervals smaller than the diameter of the substrate.
The relative movement control unit moves the first and second detectors in a second direction intersecting the first direction so that the first and second detection regions cross the substrate. 6. The position determination device according to claim 6, which controls the relative moving unit. A substrate transfer device comprising the position determination device according to any one of claims 1 to 7. It is a position determination method for determining the position of a substrate supported by a support portion.
A step of preparing a first detector having a first detection area,
The substrate supported by the support portion and the first detector are placed so that a plurality of portions of the outer peripheral end portions of the substrate supported by the support portion are sequentially located in the first detection region. Steps to move relatively and
A step of calculating the positions of the plurality of portions in the support portion based on the detection signal of the first detector, and a step of calculating the positions of the plurality of portions.
A position determination method including a step of determining the position of the substrate in the support portion based on the positions of the plurality of portions calculated by the calculation step. The support portion includes a transport holding portion configured to be movable while holding the substrate.
The step of relatively moving the substrate supported by the support portion and the first detector is to move the transport holding portion to move the substrate held by the transport holding portion to the first. 9. The position determination method according to claim 9, which comprises moving the detector relative to the detector. Further including the step of preparing a second detector having a second detection area,
Moving the substrate held by the transport holding portion relative to the first detector means that the first and second portions of the outer peripheral end portions of the substrate are sequentially detected by the first detector. The substrate held in the transport holding portion is held in the first and second portions so that the third and fourth portions of the outer peripheral end portions of the substrate are sequentially located in the second detection region while being located in the region. Including moving relative to the second detector
10. The step of calculating the position of each of the plurality of portions includes the step of calculating the position of the plurality of portions in the transport holding unit based on the detection signals of the first and second detectors, respectively. The described position determination method. The first and second detectors are provided so that the first detection region and the second detection region are arranged in the first direction at intervals smaller than the diameter of the substrate.
Moving the substrate held by the transport holding unit relative to the first and second detectors is such that the substrate crosses the first and second detection regions. 11. The position determination method according to claim 11, further comprising moving the transport holding unit in a second direction intersecting with one direction. The step of relatively moving the substrate supported by the support portion and the first detector is a step of moving the first detector with respect to the substrate supported by the support portion. The position determination method according to claim 9, which comprises moving the first detector relatively. Further including the step of preparing a second detector having a second detection area,
To move the first detector relative to the substrate supported by the support portion, the first and second portions of the outer peripheral end portion of the substrate are sequentially the first detection region. The first and fourth portions of the outer peripheral edge of the substrate are sequentially located in the second detection region with respect to the substrate supported by the support portion. Including moving the second detector relatively
13. The step of calculating the position of each of the plurality of portions includes the step of calculating the position of the plurality of portions in the support portion based on the detection signals of the first and second detectors, respectively. Position determination method. The first and second detectors are provided so that the first detection region and the second detection region are arranged in the first direction at intervals smaller than the diameter of the substrate.
Moving the first and second detectors relative to the substrate supported by the support is such that the first and second detection regions cross the substrate. 14. The position determination method according to claim 14, further comprising moving the first and second detectors in a second direction intersecting the direction of. A substrate transport method comprising the position determination method according to any one of claims 9 to 15.

Images