JP7108509B2 - SUBSTRATE PROCESSING APPARATUS, ALIGNMENT APPARATUS, AND ALIGNMENT METHOD - Google Patents

Description

The present invention relates to a substrate processing apparatus for processing a substrate, an alignment apparatus and an alignment method for aligning a movable member with respect to a fixed member.

Substrate processing equipment is used to perform various types of processing on substrates such as semiconductor substrates, liquid crystal display device substrates, plasma display substrates, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, and photomask substrates. used.

In such a substrate processing apparatus, generally one substrate is continuously processed in a plurality of processing units. Therefore, the substrate processing apparatus is provided with a substrate transfer device that transfers substrates between a plurality of processing units. Teaching of the substrate transfer apparatus is performed in advance in order to accurately transfer and load the substrate into a predetermined processing unit.

U.S. Pat. No. 6,200,000 describes a processing system including multiple processing chambers and a vision system for calibrating the position of an end effector (substrate holder) of a robot (substrate transporter). In a vision system, the camera assembly, including the camera, power supply, transmitter and locating plate, is carried by the robot's end effector (substrate holder). A position of the end effector of the robot is calibrated based on images acquired by the cameras of the camera assembly.

Japanese Patent Publication No. 2006-522476

The camera assembly described above is made lightweight and compact so that the end effector does not deform while the camera assembly is held by the end effector. As such, the camera assembly is expensive.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a substrate processing apparatus, an alignment apparatus, and an alignment method that are simple in structure and capable of aligning a movable member with respect to a fixed member at low cost.

(1) A substrate processing apparatus according to a first aspect of the invention is a substrate processing apparatus that processes a substrate, and includes a fixed portion, a movable portion that is relatively movable with respect to the fixed portion, and the fixed portion and the movable portion. and an optical sensor having a first light emitting portion and a first light receiving portion, and an optical sensor provided in the other portion of the fixed portion and the movable portion and corresponding to the first light emitting portion and a second light emitting portion corresponding to the first light receiving portion. A first emitted light control section for advancing light in a first direction and a second direction, and a second light receiving section for guiding light traveling in a third direction and a fourth direction predetermined for the other portion to a second light receiving section. and a second emitted light controller for causing the light emitted from the second light emitting portion to travel in predetermined fifth and sixth directions with respect to the other portion; a first received light control section for guiding light traveling in predetermined seventh and eighth directions with respect to the portion of (1) to the first light receiving section, wherein the movable section is predetermined with respect to the fixed section; In the first positional relationship and the second positional relationship, the light emitted from the first light emitting portion is received by the second light receiving portion and emitted from the second light emitting portion The first light emitting portion, the first light receiving portion, the second light emitting portion, and the second light receiving portion are arranged such that the light received by the first light receiving portion is received by the first light receiving portion, and the first positional relationship is established. in the second positional relationship, the first and third directions coincide and the fifth and seventh directions coincide, and in the second positional relationship, the second and fourth directions coincide and the sixth and eighth directions matches.

In the substrate processing apparatus, when the movable portion is in the predetermined first positional relationship with respect to the fixed portion, the light emitted from the first light emitting portion and traveling in the first direction is the second light. is guided to the light-receiving part of The light guided to the second light receiving section is guided to the second light emitting section by the light guide member. Light emitted from the second light emitting portion and traveling in the fifth direction is guided to the first light receiving portion and received by the first light receiving portion. Thereby, it is possible to determine whether or not the movable portion is in the predetermined first positional relationship with respect to the fixed portion based on the output signal of the optical sensor. Therefore, the movable member can be accurately aligned with the fixed member in the direction perpendicular to the first direction.

Further, when the movable portion is in a predetermined second positional relationship with respect to the fixed portion, the light emitted from the first light emitting portion and traveling in the second direction is guided to the second light receiving portion. be killed. The light guided to the second light receiving section is guided to the second light emitting section by the light guide member. Light emitted from the second light emitting portion and traveling in the sixth direction is guided to the first light receiving portion and received by the first light receiving portion. Thereby, it is possible to determine whether or not the movable portion is in the predetermined second positional relationship with respect to the fixed portion based on the output signal of the optical sensor. Therefore, the movable member can be accurately aligned with the fixed member in the direction orthogonal to the second direction.

Moreover, according to the above configuration, since the optical sensor is electrically independent from the light guide member, wiring between the fixed portion and the movable portion is unnecessary. Therefore, the configuration for detecting the position of the movable portion with respect to the fixed portion does not become complicated. Also, the position of the movable portion relative to the fixed portion can be detected at low cost.

As a result, it is possible to align the movable member with respect to the fixed member with a simple structure and at low cost.

(2) The substrate processing apparatus further includes a substrate support for supporting the substrate, the fixed portion includes a fixed member having a fixed positional relationship with the substrate support, and the movable portion holds the substrate and holds the substrate. It may also include a transport holder for transporting to.

With such a configuration, when the substrate is transported to the substrate supporting part by the transporting/holding part, it is possible to align the transporting/holding part with the fixing member with a simple configuration and at low cost. In this case, since the fixing member has a fixed positional relationship with respect to the substrate supporting portion, it is possible to align the transport holding portion with the substrate supporting portion with a simple configuration and at low cost.

(3) The substrate processing apparatus further includes a processing unit that processes the substrate, the substrate support includes a rotation holder that holds and rotates the substrate, and the fixed member is positioned at a fixed position with respect to the rotation holder. may have a relationship.

In this case, it is possible to align the transfer holder with the rotary holder in the processing unit with a simple configuration and at low cost.

(4) The substrate processing apparatus further includes a plurality of substrate supports for supporting the substrate, the fixed portion includes a plurality of fixed members having a fixed positional relationship with the plurality of substrate supports, and the movable portion supports the substrate. A transport holder that holds and transports the substrate to the plurality of substrate supports may be included, the optical sensor may be provided in the transport holder, and the light guide member may be provided in each of the plurality of fixing members.

In this case, the light guide member is cheaper than the optical sensor. In the above configuration, the optical sensor is provided in the conveying/holding portion, and the light guide member is provided in each of the plurality of fixed members. Therefore, even when the number of fixed members is large, the increase in cost is suppressed.

(5) Based on the output signal of the optical sensor, the substrate processing apparatus determines whether or not the movable portion is in a predetermined first positional relationship with respect to the fixed portion and whether they are in a second positional relationship. You may further provide the determination part which determines.

In this case, it is possible to align the movable member with respect to the fixed member based on the determination result of the determination unit.

(6) The substrate processing apparatus controls the drive unit that moves the movable portion relative to the fixed portion, and the drive unit that moves the movable portion within a predetermined area including the fixed portion during the alignment operation. an acquisition unit that acquires the position of the movable part as current position information during the alignment operation, and based on the current position information acquired by the acquisition unit and the determination result of the determination unit during the alignment operation a generation unit for generating, as target position information, information indicating a position where the movable part has a predetermined positional relationship with respect to the fixed part; A movement control unit for controlling the drive unit to move the portion may also be provided.

In this case, target position information is generated by the alignment operation, and movement of the movable portion relative to the fixed portion is controlled based on the target position information during the substrate processing operation. This makes it possible to easily align the movable portion with respect to the fixed portion during the substrate processing operation.

(7) The substrate processing apparatus may be set to a substrate processing mode and a teaching mode, the alignment operation may be performed in the teaching mode, and the substrate processing operation may be performed in the substrate processing mode.

In this case, the movable member can be taught with respect to the fixed member with a simple structure and at low cost.

(8) An alignment device according to a second aspect of the present invention includes a fixed portion, a movable portion that is relatively movable with respect to the fixed portion, and one of the fixed portion and the movable portion, the first An optical sensor having a light emitting portion and a first light receiving portion, and a second light receiving portion and a first light receiving portion provided in the other portion of the fixed portion and the movable portion and corresponding to the first light emitting portion and a second light emitting portion corresponding to the light guide member, and the light emitted from the first light emitting portion travels in a first direction and a second direction predetermined with respect to one portion 1 emitted light control section, a second received light control section for guiding light incident on the other portion in predetermined third and fourth directions to the second light receiving section; a second emitted light control section for causing the light emitted from the light emitting section to travel in predetermined fifth and sixth directions with respect to the other portion; and a seventh direction predetermined with respect to the one portion and a first received light control section for guiding the light traveling in the eighth direction to the first light receiving section; and a determination unit for determining whether or not the movable portion is in either one of the second positional relationships, and when the movable portion is in the predetermined first positional relationship with respect to the fixed portion and when the second positional relationship is in the second positional relationship. In the positional relationship, light emitted from the first light emitting portion is received by the second light receiving portion, and light emitted from the second light emitting portion is received by the first light receiving portion. and the first light emitting portion, the first light receiving portion, the second light emitting portion, and the second light receiving portion are arranged as follows, and in the first positional relationship, the first and third directions match and The fifth and seventh directions match, and in a second positional relationship the second and fourth directions match and the sixth and eighth directions match.

In the alignment device, when the movable portion is in the predetermined first positional relationship with respect to the fixed portion, the light emitted from the first light emitting portion and traveling in the first direction is the second beam. is guided to the light-receiving part of The light guided to the second light receiving section is guided to the second light emitting section by the light guide member. Light emitted from the second light emitting portion and traveling in the fifth direction is guided to the first light receiving portion and received by the first light receiving portion. Thereby, it is possible to determine whether or not the movable portion is in the predetermined first positional relationship with respect to the fixed portion based on the output signal of the optical sensor. Therefore, the movable member can be accurately aligned with the fixed member in the direction perpendicular to the first direction.

Further, when the movable portion is in a predetermined second positional relationship with respect to the fixed portion, the light emitted from the first light emitting portion and traveling in the second direction is guided to the second light receiving portion. be killed. The light guided to the second light receiving section is guided to the second light emitting section by the light guide member. Light emitted from the second light emitting portion and traveling in the sixth direction is guided to the first light receiving portion and received by the first light receiving portion. Thereby, it is possible to determine whether or not the movable portion is in the predetermined second positional relationship with respect to the fixed portion based on the output signal of the optical sensor. Therefore, the movable member can be accurately aligned with the fixed member in the direction perpendicular to the second direction.

Moreover, according to the above configuration, since the optical sensor is electrically independent from the light guide member, wiring between the fixed portion and the movable portion is unnecessary. Therefore, the configuration for detecting the position of the movable portion with respect to the fixed portion does not become complicated. Also, the position of the movable portion relative to the fixed portion can be detected at low cost.

As a result, it is possible to align the movable member with respect to the fixed member with a simple structure and at low cost.

(9) A positioning method according to a third invention is a method for positioning a movable portion with respect to a fixed portion, wherein an optical sensor having a first light emitting portion and a first light receiving portion is activated during a first operation. one of the fixed portion and the movable portion provided and the other portion of the fixed portion and the movable portion provided with the light guide member having the second light receiving portion and the second light emitting portion are relatively and moving the light emitted from the first light emitting portion of the optical sensor in the first and second directions predetermined with respect to one portion by the first emitted light control portion during the first operation. light traveling in the first direction and the light traveling in the third direction out of the third and fourth directions predetermined for the other portion is guided to the second light receiving portion by the second light receiving light control portion. , the light received by the second light receiving portion and emitted from the second light emitting portion is directed by the second emitted light control portion in the fifth direction out of the fifth and sixth directions predetermined with respect to the other portion. light traveling in the seventh direction out of the seventh and eighth directions predetermined for one portion is guided to the first light receiving portion by the first light receiving light control portion, and the first light receiving portion a step of receiving light with a light receiving portion; and a step of determining whether or not the movable portion has a predetermined first positional relationship with respect to the fixed portion based on the output signal of the optical sensor during the first operation. a step of relatively moving the one portion and the other portion during the second operation; Light traveling in the second direction by the control section is guided to the second light receiving section by the second received light control section, light is received by the second light receiving section, and the second light is emitted. The second emitted light control section guides the light emitted from the section in the sixth direction, the first received light control section guides the light traveling in the eighth direction to the first light receiving section, and the first light receiving section guides the light traveling in the eighth direction to the first light receiving section. and determining whether the movable portion has a predetermined second positional relationship with respect to the fixed portion based on the output signal of the optical sensor during the second operation. including.

In the alignment method, during the first operation, when the movable portion is in a predetermined first positional relationship with respect to the fixed portion, the light is emitted from the first light emitting portion and directed in the first direction. The traveling light is guided to the second light receiving section. The light guided to the second light receiving section is guided to the second light emitting section by the light guide member. Light emitted from the second light emitting portion and traveling in the fifth direction is guided to the first light receiving portion and received by the first light receiving portion. Thereby, it is determined whether or not the movable portion is in the predetermined first positional relationship with respect to the fixed portion based on the output signal of the optical sensor. Therefore, the movable member can be accurately aligned with the fixed member in the direction perpendicular to the first direction.

Further, during the second operation, when the movable portion is in the predetermined second positional relationship with respect to the fixed portion, the light emitted from the first light emitting portion and traveling in the second direction is the second light emitting portion. 2 is guided to the light receiving portion. The light guided to the second light receiving section is guided to the second light emitting section by the light guide member. Light emitted from the second light emitting portion and traveling in the sixth direction is guided to the first light receiving portion and received by the first light receiving portion. Thereby, it is determined whether or not the movable portion is in the predetermined second positional relationship with respect to the fixed portion based on the output signal of the optical sensor. Therefore, the movable member can be accurately aligned with the fixed member in the direction perpendicular to the second direction.

Also, the optical sensor used in the above alignment method is electrically independent of the light guide member. Therefore, no wiring is required between the fixed part and the movable part. Therefore, the configuration for detecting the position of the movable portion with respect to the fixed portion does not become complicated. Also, the position of the movable portion relative to the fixed portion can be detected at low cost.

As a result, it is possible to align the movable member with respect to the fixed member with a simple structure and at low cost.

According to the present invention, it is possible to align the movable member with respect to the fixed member with a simple configuration and at low cost.

It is a figure which shows a part of structure of the substrate processing apparatus which concerns on one embodiment of this invention. 2 is a perspective view for explaining the function of each of a plurality of light control units in FIG. 1; FIG. 2 is a diagram for explaining a specific example of alignment of a hand with respect to the spin chuck of FIG. 1; FIG. 2 is a diagram for explaining a specific example of alignment of a hand with respect to the spin chuck of FIG. 1; FIG. 2 is a diagram for explaining a specific example of alignment of a hand with respect to the spin chuck of FIG. 1; FIG. 2 is a block diagram showing a functional configuration of a control unit in FIG. 1; FIG. 4 is a flow chart showing the operation of the substrate processing apparatus in teaching mode; 4 is a flow chart showing the operation of the substrate processing apparatus in teaching mode; 2 is a schematic block diagram showing the overall configuration of a substrate processing apparatus including the substrate transfer apparatus and processing units of FIG. 1; FIG.

A substrate processing apparatus, an alignment apparatus, and an alignment method according to an embodiment of the present invention will be described below with reference to the drawings. In the following description, the substrate means a semiconductor substrate, a substrate for an FPD (Flat Panel Display) such as a liquid crystal display device or an organic EL (Electro Luminescence) display device, an optical disk substrate, a magnetic disk substrate, a magneto-optical disk substrate, A photomask substrate, a ceramic substrate, a solar cell substrate, or the like.

[1] Basic Configuration of Substrate Processing Apparatus A substrate processing apparatus according to the present embodiment includes a processing unit that processes a substrate and a substrate transfer apparatus that transfers the substrate. The processing unit includes a substrate support for supporting the substrate, and the substrate transport device holds and transports the substrate to the substrate support of the processing unit.

In the present embodiment, the substrate supporting part supports, for example, a spin chuck that sucks and holds the back surface (lower surface) of the substrate, a spin chuck that holds the outer peripheral edge of the substrate W, and a plurality of portions of the back surface of the substrate W. A plurality of support pins or a plate on which the substrate W is mounted.

FIG. 1 is a diagram showing part of the configuration of a substrate processing apparatus according to one embodiment of the present invention. FIG. 1 shows a configuration of the substrate transfer apparatus WT and a part of the configuration of the processing unit PU as part of the configuration of the substrate processing apparatus 100 according to the present embodiment.

As shown in FIG. 1, the substrate transfer apparatus WT includes a hand H1 that holds the substrate W, an optical sensor 20, a controller 51, a driver 52, a position detector 53, and two light controllers ma1 and ma2.

The hand H1 has a holding portion ha and an arm portion hb. The holding portion ha has a substantially arc shape, and the arm portion hb has a rectangular shape extending in one direction. The holding portion ha is provided at one end of the arm portion hb. A plurality of (three in this example) protrusions are formed on the inner peripheral portion of the holding portion ha so as to extend toward the inside of the holding portion ha. When the substrate W is transported by the substrate transport apparatus WT, the substrate W is placed on the plurality of protrusions formed on the holding part ha. In the following description, the central axis extending in the longitudinal direction of the arm portion hb is defined as the central axis ax1 of the hand H1. Also, the direction from the arm portion hb to the holding portion ha passing through the central axis ax1 is called the front of the hand H1, and the opposite direction is called the rear of the holding portion ha.

The drive unit 52 includes a plurality of motors, and moves the hand H1 vertically (vertical direction in this example) and horizontally and rotates (revolves) around a vertical axis under the control of the control unit 51 . The position detection unit 53 is composed of a plurality of encoders corresponding to a plurality of motors of the drive unit 52, and controls a signal representing the current position of the hand H1 and the orientation (rotation angle) of the hand H1 based on the operation of the drive unit 52. Output to unit 51 . Thereby, the control part 51 can acquire the position of the hand H1 in the substrate processing apparatus 100 as current position information. Further, the control unit 51 can acquire the orientation of the hand H1 in the substrate processing apparatus 100 as the current orientation information.

The optical sensor 20 is, for example, a photoelectric sensor, and includes a first light emitting portion 21, a first light receiving portion 22, a sensor body portion 23, and two optical fibers 28 and 29. FIG. The optical sensor 20 is attached to the lower surface of the hand H1. Two optical fibers 28 and 29 are provided so as to extend from the sensor body 23 . The first light emitting portion 21 is composed of one end surface (light emitting surface) of one optical fiber 28 , and the first light receiving portion 22 is composed of one end surface (light incident surface) of the other optical fiber 29 . The sensor main body 23 includes a light source, a light receiving element, and a control circuit. The light source is, for example, an LED (light emitting diode) and supplies light to the first light emitting section 21 . Note that a laser diode or other light emitting device may be used as the light source. The light-receiving element generates a light-receiving signal according to the amount of light received by the first light-receiving section 22 . The control circuit controls the light source and outputs a light receiving signal generated by the light receiving element to the control unit 51 .

The light control unit ma1 is attached to the hand H1 while being connected to the first light emitting unit 21 , and the light control unit ma2 is attached to the hand H1 while being connected to the first light receiving unit 22 . Functions of the light control units ma1 and ma2 will be described later.

The processing unit PU includes a spin chuck 1 that holds and rotates the substrate W. As shown in FIG. The spin chuck 1 is rotatably supported by a rotation drive unit 2 around a rotation shaft 1C extending in the vertical direction. The processing unit PU is provided with a fixed member 4 fixed so as to have a fixed positional relationship with the spin chuck 1 . An optical fiber 30 is provided on the fixed member 4 .

The optical fiber 30 has a second light receiving portion 31 and a second light emitting portion 32 . The second light receiving portion 31 is composed of one end surface (light incident surface) of the optical fiber 30 , and the second light emitting portion 32 is composed of the other end surface (light emitting surface) of the optical fiber 30 .

The second light receiving portion 31 corresponds to the first light emitting portion 21 of the optical sensor 20 , and the second light emitting portion 32 corresponds to the first light receiving portion 22 of the optical sensor 20 . The distance between the first light emitting portion 21 and the first light receiving portion 22 is equal to the distance between the second light receiving portion 31 and the second light emitting portion 32 .

Attached to the fixed member 4 are light control units mb1 and mb2 corresponding to the light control units ma1 and ma2, respectively. The light control section mb1 and the light control section mb2 are connected to the second light receiving section 31 and the second light emitting section 32, respectively. Functions of the light control units mb1 and mb2 will be described later.

[2] Functions of light control units ma1, ma2, mb1, and mb2 In the following description, an axis that passes through the center 4C of the upper end of the fixing member 4 and is orthogonal to the rotation axis 1C is defined as the central axis ax2 of the processing unit PU. . Also, the direction from the spin chuck 1 to the fixed member 4 passing through the central axis ax2 is called the front of the processing unit PU, and the opposite direction is called the rear of the processing unit PU.

FIG. 2 is a perspective view for explaining the function of each of the plurality of light controllers ma1, ma2, mb1, and mb2 in FIG. In FIG. 2, part of the hand H1 of FIG. 1 is indicated by dotted lines, and part of the fixing member 4 of FIG. 1 is indicated by dotted lines. On the other hand, in FIG. 2, the configurations provided in the hand H1 and the fixed member 4 are indicated by solid lines.

The light control unit ma1 causes the light emitted from the first light emitting unit 21 to travel forward of the hand H1 in parallel with the central axis ax1, as indicated by a thick dashed-dotted arrow a01 in FIG. 2, the light control unit ma1 directs the light emitted from the first light emitting unit 21 toward the lower side of the hand H1 in a direction perpendicular to the central axis ax1. proceed to In the present embodiment, the direction of the arrow a01 pointing forward of the hand H1 from the light control unit ma1 corresponds to the first direction, and the direction of the arrow a02 pointing downward of the hand H1 from the light control unit ma1 corresponds to the second direction. corresponds to

The light control unit mb1 guides the light traveling rearward of the fixing member 4 in parallel with the central axis ax2 to the second light receiving unit 31, as indicated by a thick dashed-dotted arrow a03 in FIG. Further, the light control section mb1 guides the light traveling downward from the fixing member 4 to the second light receiving section 31, as indicated by the thick two-dot chain line arrow a04 in FIG. In this embodiment, the direction of the arrow a03 pointing backward of the fixing member 4 corresponds to the third direction, and the direction of the arrow a04 pointing downward of the fixing member 4 corresponds to the fourth direction.

The light control part mb2 causes the light emitted from the second light emitting part 32 to travel forward of the fixed member 4 in parallel with the central axis ax2, as indicated by the thick dashed-dotted arrow a05 in FIG. 2, the light control section mb2 directs the light emitted from the second light emitting section 32 upwardly of the fixing member 4 in a direction perpendicular to the central axis ax2. proceed in the direction In the present embodiment, the direction of arrow a05 from the light control portion mb2 toward the front of the fixing member 4 corresponds to the fifth direction, and the direction of the arrow a06 from the light control portion mb2 to the top of the fixing member 4 corresponds to the sixth direction. corresponds to the direction of

The light control unit ma2 guides the light traveling rearward of the hand H1 in parallel with the central axis ax1 to the first light receiving unit 22, as indicated by a thick dashed-dotted arrow a07 in FIG. In addition, the light control unit ma2 guides the light traveling upward from the hand H1 to the first light receiving unit 22, as indicated by a thick two-dot chain line arrow a08 in FIG. In the present embodiment, the direction of arrow a07 pointing backward of hand H1 corresponds to the seventh direction, and the direction of arrow a08 pointing upward of hand H1 corresponds to the eighth direction.

Optical members are used as the light controllers ma1, ma2, mb1, and mb2. The optical member may be, for example, a beam splitter or a mirror having an opening such as a slit. If a mirror is used as the optical member, the mirror preferably has an aperture through which approximately half of the incident light passes.

In the above configuration, the central axes ax1 and ax2 are parallel to each other, the light control units ma1, ma2, mb1 and mb2 are positioned on the same horizontal plane, the light control units ma1 and mb1 face each other, and the light control units ma2 and mb2 Assume that they face each other. In this case, the directions indicated by arrows a01 and a03 in FIG. 2 match, and the directions indicated by arrows a05 and a07 in FIG. 2 match. As a result, the light traveling from the light controller ma1 toward the front of the hand H1 enters the light controller ma2 through the light controller mb1, the optical fiber 30, and the light controller mb2. The positional relationship between the hand H1 and the fixing member 4 at this time is called a first positional relationship.

In the above configuration, the central axes ax1 and ax2 are parallel to each other, the light control units ma1, ma2, mb1 and mb2 are positioned on the same vertical plane, the light control units ma1 and mb1 face each other, and the light control unit ma2 , mb2 face each other. In this case, the directions indicated by arrows a02 and a04 in FIG. 2 match, and the directions indicated by arrows a06 and a08 in FIG. 2 match. As a result, the light traveling downward from the light control unit ma1 enters the light control unit ma2 through the light control unit mb1, the optical fiber 30, and the light control unit mb2. The positional relationship between the hand H1 and the fixing member 4 at this time is called a second positional relationship.

In the following description, the position on the hand H1 where the center of the substrate W held by the hand H1 should be positioned is called a reference position r1 (FIG. 1). When transferring the substrate W to the spin chuck 1 of the processing unit PU, the hand H1 is moved forward and backward with respect to the spin chuck 1 while facing the processing unit PU. It is necessary to match the position r1 with the rotation axis 1C of the spin chuck 1 in FIG.

Therefore, in the present embodiment, the light controllers ma1 and ma2 are provided in the hand H1 so that the first positional relationship is satisfied when the hand H1 faces the processing unit PU, and the light controllers mb1 and mb2 is provided in the processing unit PU. The hand H1 facing the processing unit PU means that the central axis ax1 of the hand H1 coincides with the central axis ax2 of the processing unit PU when the hand H1 and the processing unit PU, which are arranged to face each other, are viewed from above. Say.

Furthermore, in the present embodiment, the hand H1 is provided with the light control units ma1 and ma2 so that the second positional relationship is satisfied with the reference position r1 of the hand H1 aligned with the rotation axis 1C of the spin chuck 1. , light controllers mb1 and mb2 are provided in the processing unit PU.

[3] Specific Example of Alignment of Hand H1 FIGS. 3, 4 and 5 are diagrams for explaining a specific example of alignment of the hand H1 with respect to the spin chuck 1 of FIG. When aligning the reference position r1 of the hand H1 with the rotation axis 1C of the spin chuck 1 in FIG. 1, the first operation is to move the hand H1 to a position substantially facing the processing unit PU. In this state, as a first operation, while supplying light from the light source of the sensor body 23 to the first light emitting unit 21, the hand H1 is moved vertically and horizontally, and the hand H1 is moved vertically. Rotate (swirl) around the axis of In this case, as shown in FIG. 3, the hand H1 faces the processing unit PU and the first positional relationship is satisfied, so that the level of the received light signal output from the optical sensor 20 becomes the highest. Therefore, the current position information of the hand H1 when the level of the received light signal output from the optical sensor 20 is the highest is acquired as the facing position information, and the current posture information of the hand H1 is acquired as the target posture information.

A vertical distance (hereinafter referred to as a vertical offset distance) between the light control portions mb1 and mb2 provided on the fixed member 4 and the spin chuck 1 is known. Therefore, when the first positional relationship is satisfied, as a second operation, the hand H1 is vertically offset based on the obtained facing position information and the vertical offset distance, as indicated by the white arrow in FIG. It is moved vertically by the distance (raised in this example).

A horizontal distance (hereinafter referred to as a horizontal offset distance) between the light control portions mb1 and mb2 provided on the fixed member 4 and the spin chuck 1 is known as well as the above vertical offset distance. Therefore, after the hand H1 has moved by the vertical offset distance, the hand H1 is moved (advanced) toward the front of the hand H1 based on the horizontal offset distance, as indicated by the white arrow in FIG. In this case, the hand H1 faces the spin chuck 1 (substrate support) of the processing unit PU. 1) approach.

From this state, while supplying light from the light source of the sensor body 23 to the first light emitting unit 21, the hand H1 is moved in the horizontal direction, and the hand H1 is rotated (turned) around the vertical axis. Let After that, the reference position r1 of the hand H1 coincides with the rotation axis 1C of the spin chuck 1 and the second positional relationship is satisfied, so that the level of the received light signal output from the optical sensor 20 becomes the highest. Therefore, the current position information of the hand H1 when the level of the received light signal output from the optical sensor 20 is the highest is acquired as the target position information, and the current posture information of the hand H1 is acquired as the target posture information.

As a result, the hand H1 is aligned with the spin chuck 1 based on the acquired target position information and target orientation information so that the reference position r1 of the hand H1 coincides with the rotation axis 1C of the spin chuck 1 in FIG. becomes possible.

[4] Transport Mode and Teaching Mode The substrate processing apparatus 100 according to the present embodiment is configured to be able to be set to a substrate processing mode and a teaching mode. In the substrate processing mode, the substrate transport apparatus WT of FIG. 1 receives, for example, a substrate W on the substrate support of one processing unit by the hand H1, transports it, and places it on the substrate support of another processing unit. Further, each processing unit performs a predetermined process on the substrate W supported by the substrate support.

The designed receiving position for the hand H1 to receive the substrate W on the predetermined substrate supporting portion and the designed placement position for the hand H1 to place the substrate W on the predetermined substrate supporting portion are the initial It is stored in advance in the control unit 51 of FIG. 1 as target position information. Furthermore, the designed orientation of the hand H1 when the hand H1 receives the substrate W on the predetermined substrate support, and the designed orientation of the hand H1 for placing the substrate W on the predetermined substrate support. The orientation is stored in advance in the control unit 51 of FIG. 1 as initial target orientation information.

The actual receiving position, the actual placement position, and the actual orientation of the hand H1 may vary depending on the designed receiving position, the actual placement position, and the actual orientation of the hand H1 due to the effects of assembly errors of the processing units in the substrate processing apparatus 100, wear of parts of the substrate transfer apparatus WT, and the like. It may deviate from the above mounting position and the designed orientation of the hand H1.

Therefore, in the teaching mode, the substrate supporting portion of the processing unit and the hand H1 have a predetermined positional relationship suitable for transferring the substrate W, and the hand H1 is oriented in a direction suitable for transferring the substrate W. The above alignment is performed as follows.

In this case, the controller 51 can generate the actual position of the hand H1 when the substrate supporter and the hand H1 have a predetermined positional relationship as the target position information. Further, the control unit 51 can generate the actual orientation of the hand H1 when the substrate support unit and the hand H1 have a predetermined positional relationship as the target posture information.

In this embodiment, in the teaching mode, the position of the hand H1 when the center of the substrate W held by the hand H1 coincides with the rotation axis 1C of the spin chuck 1 is generated as the target position information. Also, the orientation of the hand H1 when the hand H1 faces the substrate support portion of the processing unit is generated as the target attitude information.

The initial target position information and target orientation information are updated to the generated target position information and target orientation information. In the substrate processing mode, the substrate W is transported based on the updated target position information and target orientation information. As a result, defective transport and defective processing of the substrate W are prevented.

[5] Functional Configuration of Control Unit 51 In the following description, the receiving position and placement position of the hand H1 with respect to a predetermined substrate supporting portion are collectively referred to as transfer positions as appropriate. FIG. 6 is a block diagram showing the functional configuration of the controller 51 of FIG. 1. As shown in FIG. The control unit 51 includes an operation mode setting unit 511, a current position acquisition unit 512, an alignment control unit 513, a light receiving amount acquisition unit 514, a positional relationship determination unit 515, a target position generation unit 516, a movement control unit 517, and position/orientation information storage. 518 , a position/orientation information updater 519 , a current orientation acquisition unit 520 , and a target orientation generation unit 521 .

The control unit 51 is composed of a CPU (Central Processing Unit), a RAM (Random Access Memory) and a ROM (Read Only Memory). The function of each component of the control unit 51 is realized by the CPU executing a computer program stored in the ROM or other storage medium. A part or all of the components of the control unit 51 may be realized by hardware such as an electronic circuit.

The operation mode setting unit 511 sets the substrate processing apparatus 100 to the substrate processing mode or the teaching mode, for example, based on the user's operation of the operation unit (not shown). The position/orientation information storage unit 518 stores, as initial target position information, the designed transfer position for each of the plurality of substrate support units to which the substrate transfer apparatus WT transfers the substrates W. FIG. In addition, the position/orientation information storage unit 518 stores, as initial target orientation information, the designed orientation of the hand H1 at the time of delivery of the substrate W for each of the plurality of substrate support units. Further, the position/orientation information storage unit 518 stores a predetermined design facing position of the hand H1 for each of the plurality of substrate support units.

In the teaching mode, the alignment control unit 513 aligns the hand H1 based on the information stored in the position/orientation information storage unit 518 during the first operation for causing the hand H1 to face one substrate support unit. It is moved to a position directly facing one substrate supporting portion. Further, the alignment control unit 513 moves the hand H1 within a predetermined area including the facing position to change the direction of the hand H1.

Further, in the teaching mode, the alignment control unit 513 first moves the hand H1 to the height of the one substrate support portion during the second operation for finally aligning the hand H1 with respect to the one substrate support portion. up or down. Also, the alignment control unit 513 advances the hand H1 toward the one substrate support unit.

In the teaching mode, the received light amount acquisition unit 514 acquires the level of the received light signal output from the optical sensor 20 at predetermined sampling intervals.

The positional relationship determination unit 515 determines whether or not a predetermined movement of the hand H1 and a change in the orientation of the hand H1 have been performed during the first operation in the teaching mode. Furthermore, the positional relationship determination unit 515 determines the maximum level of the received light signal acquired by the received light amount acquisition unit 514 during the first operation in the teaching mode.

Further, the positional relationship determination unit 515 determines whether or not a predetermined movement of the hand H1 and a change in the direction of the hand H1 have been performed during the second operation in the teaching mode. Furthermore, the positional relationship determination unit 515 determines the maximum level of the received light signal acquired by the received light amount acquisition unit 514 during the second operation in the teaching mode.

Current position acquisition section 512 acquires current position information based on the output signal of position detection section 53 in FIG. 1 during the first and second operations in the teaching mode. Current posture acquisition section 520 acquires current posture information based on the output signal of position detection section 53 in FIG. 1 during the first and second operations in the teaching mode.

The target posture generation unit 521 generates current posture information corresponding to the maximum level of the received light signal determined by the positional relationship determination unit 515 as target posture information during the first operation in the teaching mode.

Further, the target posture generation unit 521 generates current posture information corresponding to the maximum level of the received light signal determined by the positional relationship determination unit 515 as target posture information during the second operation in the teaching mode.

The target position generation unit 516 generates current position information corresponding to the maximum level of the received light signal determined by the positional relationship determination unit 515 as facing position information during the first operation in the teaching mode.

In addition, the target position generation unit 516 generates current position information corresponding to the maximum level of the received light signal determined by the positional relationship determination unit 515 as target position information during the second operation in the teaching mode.

The position/orientation information updating unit 519 updates the initial values stored in the position/orientation information storage unit 518 according to the target orientation information generated by the target orientation generation unit 521 during the first operation and the second operation in the teaching mode. Update the target posture information of .

Further, the position/orientation information update unit 519 updates the initial orientation stored in the position/orientation information storage unit 518 based on the orientation information generated by the target position generation unit 516 during the first operation in the teaching mode. Update your location.

Further, the position/orientation information updating unit 519 updates the initial target position information stored in the position/orientation information storage unit 518 based on the target position information generated by the target position generation unit 516 during the second operation in the teaching mode. Update.

The movement control unit 517 controls the driving unit 52 in FIG. 1 based on the target position information stored in the position/orientation information storage unit 518 in the substrate processing mode. As a result, the substrate W is transferred with high accuracy between the substrate supporting portion and the hand H1 that have been aligned in the teaching mode.

[6] Operation of Substrate Processing Apparatus 100 in Teaching Mode FIGS. 7 and 8 are flowcharts showing operations of the substrate processing apparatus 100 in the teaching mode. Here, teaching of the hand H1 with respect to one substrate supporting portion will be described. Assume that the substrate processing apparatus 100 is set to the teaching mode in the initial state. Further, initial target position information and initial target posture information for one substrate supporting portion are stored in advance in the position/posture information storage unit 518 of FIG. Further, the position/orientation information storage unit 518 in FIG. 6 stores in advance the initial facing position information for one substrate supporting portion.

First, the alignment control unit 513 moves the hand H1 to the directly facing position corresponding to one substrate support based on the directly facing position information stored in the position/orientation information storage unit 518 (step S11).

Next, the alignment control unit 513 moves the hand H1 within a predetermined area including the facing position to change the direction of the hand H1 (step S12). Further, the received light amount acquisition unit 514 acquires the level of the received light signal output from the optical sensor 20 at a predetermined sampling period (step S13). Furthermore, the current position acquisition unit 512 and the current posture acquisition unit 520 acquire current position information and current posture information based on the output signal of the position detection unit 53 in FIG. 1 (step S14).

Next, the positional relationship determination unit 515 determines whether a predetermined movement of the hand H1 and a change in the direction of the hand H1 have been performed (step S15). When the predetermined movement of the hand H1 and the change in the direction of the hand H1 are not performed, the positional relationship determination unit 515 returns to the process of step S12.

When the predetermined movement of the hand H1 and the change in the orientation of the hand H1 are completed in step S15, the positional relationship determination unit 515 determines the maximum level of the light reception signal acquired by the light reception amount acquisition unit 514 (step S16).

Next, the target posture generation unit 521 generates current posture information corresponding to the maximum level of the received light signal determined by the positional relationship determination unit 515 as target posture information. At this time, the target position generator 516 also generates the current position information corresponding to the maximum level of the received light signal determined by the positional relationship determination unit 515 as facing position information (step S17).

Next, the position/orientation information updating unit 519 updates the initial target orientation information stored in the position/orientation information storage unit 518 with the target orientation information generated by the target orientation generation unit 521 , and updates the initial target orientation information stored in the position/orientation information storage unit 518 . The initial facing position information stored in the position/orientation information storage unit 518 is updated with the facing position information generated by (step S18).

Next, the alignment control unit 513 moves the hand H1 to the height of the mounting position of the substrate W on one substrate supporting unit based on the facing position information generated in step S17 and the vertical offset distance. (step S19). After that, the alignment control section 513 moves the hand H1 toward the one substrate supporting section based on the horizontal offset distance, and changes the direction of the hand H1 (step S20).

Next, the received light amount acquisition unit 514 acquires the level of the received light signal output from the optical sensor 20 at a predetermined sampling period (step S21). Furthermore, the current position acquisition unit 512 and the current posture acquisition unit 520 respectively acquire current position information and current posture information based on the output signal of the position detection unit 53 in FIG. 1 (step S22).

Next, the positional relationship determination unit 515 determines whether or not a predetermined movement of the hand H1 and a change in the direction of the hand H1 have been performed (step S23). If the predetermined movement of the hand H1 and the change in the direction of the hand H1 are not performed, the positional relationship determination unit 515 returns to the process of step S20.

When the predetermined movement of the hand H1 and the change in the orientation of the hand H1 are completed in step S23, the positional relationship determination unit 515 determines the maximum level of the light reception signal acquired by the light reception amount acquisition unit 514 (step S24).

Next, the target posture generation unit 521 generates current posture information corresponding to the maximum level of the received light signal determined by the positional relationship determination unit 515 as target posture information. At this time, the target position generator 516 also generates the current position information corresponding to the maximum level of the received light signal determined by the positional relationship determiner 515 as the target position information (step S25). Finally, the position/orientation information updating unit 519 updates the target orientation information stored in the target orientation generation unit 521 with the target orientation information generated by the target orientation generation unit 521 , and updates the target orientation information generated by the target position generation unit 516 . The initial target position information stored in the position/orientation information storage unit 518 is updated with the target position information (step S26).

Regarding the above series of processes, the operation of the substrate processing apparatus 100 corresponding to the processes from step S11 to step S18 corresponds to the first operation in teaching. Also, the operation of the substrate processing apparatus 100 corresponding to the processing from step S19 to step S26 corresponds to the second operation in teaching.

[7] Overall Configuration of Substrate Processing Apparatus 100 FIG. 9 is a schematic block diagram showing the overall configuration of the substrate processing apparatus 100 including the substrate transfer apparatus WT and the processing units PU of FIG. As shown in FIG. 9, the substrate processing apparatus 100 is provided adjacent to the exposure apparatus 500 and includes a control device 210, the substrate transfer apparatus WT of FIG. .

The control device 210 includes, for example, a CPU and memory or a microcomputer, and controls operations of the substrate transport device WT, the thermal processing section 230 , the coating processing section 240 and the development processing section 250 . Further, the control device 210 gives a command to the control section 51 to align the hand H1 of the substrate transfer device WT of FIG. 1 with the substrate supporting section of a predetermined processing unit.

The substrate transport apparatus WT transports the substrate W between the thermal processing section 230, the coating processing section 240, the developing processing section 250 and the exposure device 500 in the substrate processing mode.

Each of coating processing section 240 and development processing section 250 includes a plurality of processing units PU. The processing unit PU provided in the coating processing section 240 is provided with, in addition to the configuration shown in FIG. . Thereby, a resist film is formed on the unprocessed substrate W. As shown in FIG. The substrate W on which the resist film is formed is subjected to exposure processing in the exposure device 500 .

A processing unit PU provided in the development processing section 250 is provided with a developer nozzle 6 for supplying a developer to the substrate W rotated by the spin chuck 1 . Thereby, the substrate W after exposure processing by the exposure device 500 is developed.

The thermal processing section 230 includes a plurality of processing units TU for heating or cooling the substrate W. FIG. A temperature control plate 7 is provided as a substrate support in the processing unit TU. The temperature control plate 7 is a heating plate or a cooling plate. In the thermal processing section 230 , thermal processing of the substrate W is performed before and after the coating processing by the coating processing section 240 , the development processing by the development processing section 250 , and the exposure processing by the exposure device 500 .

Here, as shown in FIG. 9, in the plurality of processing units PU provided in the coating processing section 240 and the development processing section 250, as in the example of FIG. 4, the optical fiber 30 and the light controllers mb1 and mb2 of FIG. 1 are attached. Further, in a plurality of processing units TU provided in the thermal processing section 230, the optical fiber 30 and the light control sections mb1 and mb2 of FIG.

Accordingly, in the teaching mode of the substrate processing apparatus 100, the hand H1 (FIG. 1) of the substrate transfer apparatus WT is accurately aligned with the spin chucks 1 of the plurality of processing units PU and the temperature adjustment plates 7 of the plurality of processing units TU. be able to.

According to the above configuration, the optical fiber 30 is less expensive than the optical sensor 20, so even if there are many substrate support portions to which the hand H1 should be aligned, an increase in cost required for alignment is suppressed. .

In the substrate processing apparatus 100 described above, the coating processing section 240 may be provided with a processing unit PU for forming an antireflection film on the substrate W. FIG. In this case, the thermal processing section 230 may be provided with a processing unit TU for performing adhesion strengthening processing for improving adhesion between the substrate W and the antireflection film. Further, the coating processing section 240 may be provided with a processing unit PU for forming a resist cover film for protecting the resist film formed on the substrate W. FIG.

[8] Effect (a) In the substrate processing apparatus 100 described above, when the hand H1 is in the predetermined first positional relationship with respect to the fixing member 4, the light control unit ma1 provided in the hand H1 The light that is emitted and travels forward of the hand H1 is guided to the second light receiving section 31 through the light control section mb1 provided on the fixed member 4 . The light guided to the second light receiving section 31 is guided to the second light emitting section 32 by the optical fiber 30 . The light emitted from the second light emitting portion 32 and traveling forward of the fixing member 4 is guided to the first light receiving portion 22 through the light control portion ma2 and received by the first light receiving portion 22 . Thereby, it is possible to determine whether or not the hand H1 is in the predetermined first positional relationship with respect to the fixed member 4 based on the output signal of the optical sensor 20 . Therefore, the hand H1 can be accurately aligned with the fixed member 4 in the direction (in the vertical plane) orthogonal to the central axis ax1 of the hand H1.

Further, when the hand H1 is in a predetermined second positional relationship with respect to the fixing member 4, the light emitted from the light control unit ma1 provided in the hand H1 and traveling downward of the hand H1 is light-controlled. It is guided to the second light receiving portion 31 through the portion mb2. The light guided to the second light receiving section 31 is guided to the second light emitting section 32 by the optical fiber 30 . The light emitted from the second light emitting portion 32 and traveling above the fixing member 4 is guided to the first light receiving portion 22 through the light control portion ma2 and received by the first light receiving portion 22 . Thereby, based on the output signal of the optical sensor 20, it can be determined whether or not the hand H1 is in the predetermined second positional relationship with respect to the fixed member 4. As shown in FIG. Therefore, the hand H1 can be accurately aligned with the fixing member 4 in the direction (within the horizontal plane) orthogonal to the vertical direction of the hand H1.

Further, according to the above configuration, since the optical sensor 20 is electrically independent from the optical fiber 30, wiring between the fixing member 4 and the hand H1 is unnecessary. Therefore, the configuration for detecting the position of the hand H1 with respect to the fixed member 4 is not complicated. Moreover, the position of the hand H1 with respect to the fixed member 4 can be detected at low cost.

As a result, it is possible to align the hand H1 with respect to the fixed member 4 with a simple configuration and at low cost.

(b) In the substrate processing apparatus 100 described above, the positioning of the hand H1 using the optical sensor 20 and the optical fiber 30 is performed in the teaching mode. In this case, target position information is generated for the target substrate support portion, and initial target position information stored in the position/orientation information storage unit 518 is updated based on the generated target position information. In the substrate processing mode, movement of the hand H1 is controlled based on the target position information updated in the teaching mode. Thereby, in the substrate processing mode, it is possible to easily align the hand H1 with respect to the substrate supporting portion.

[9] Other Embodiments (a) In the above embodiment, when the hand H1 is in the second positional relationship with respect to the fixed member 4, the light control units ma1 and ma2 provided in the hand H1 , but the present invention is not limited to this. For example, when the fixing member 4 is positioned above the substrate supporting portion such as the spin chuck 1, the vertical positional relationship between the light control portions ma1 and ma2 and the light control portions mb1 and mb2 is opposite to the above example. may be set to be

(b) In the above embodiment, the light control unit ma1 is composed of a beam splitter or a mirror, and splits the light emitted from the first light emitting unit 21 so as to travel in two directions. is not limited to this. The light control unit ma1 may be configured to selectively cause the light emitted from the first light emitting unit 21 to travel in one of two directions by driving an optical member, for example.

The light control section mb2 may also be configured to selectively cause the light emitted from the second light emitting section 32 to travel in one of two directions by, for example, driving an optical member.

(c) One of the optical sensor 20 and the optical fiber 30 is a film thickness measuring device for measuring the thickness of the film on the substrate W held by the spin chuck 1 in the predetermined processing unit PU, the peripheral edge of the substrate W A removal nozzle for removing the resist film formed on a partial region in the circumferential direction of the substrate W, or a peripheral edge exposure device for exposing the resist film formed on a partial region in the circumferential direction of the peripheral edge of the substrate W It may be provided in the light emitting portion. In this case, by providing the other of the optical sensor 20 and the optical fiber 30 to the fixed member 4 in the processing unit PU, it is possible to align the film thickness measuring device, the removing nozzle, or the light emitting part with respect to the spin chuck 1. becomes.

(d) In the above embodiment, the optical fiber 30 is used as a configuration for emitting the light emitted from the first light emitting portion 21 of the optical sensor 20 to the first light receiving portion 22 when aligning the hand H1. used, but the invention is not so limited. Instead of the optical fiber 30, an optical member such as a reflecting member or a prism may be used, or a light guide other than the optical fiber may be used.

(e) In the substrate processing apparatus 100 according to the above embodiment, the hand H1 that transports the substrate W to the processing units PU and TU is provided with the optical sensor 20, and the substrate support section in the processing units PU and TU is provided with the optical sensor 20. The optical fiber 30 is provided on the fixed member 4 or the rotary drive unit 2 having a positional relationship, but the optical fiber 30 may be provided on the hand H1 and the optical sensor 20 may be provided on the fixed member 4 or the rotary drive unit 2 .

[10] Correspondence between each constituent element of the claims and each element of the embodiment An example of correspondence between each constituent element of the claim and each element of the embodiment will be described below. is not limited to

In the above embodiments, the substrate processing apparatus 100 is an example of the substrate processing apparatus, and the fixing member 4 is an example of the fixing portion and the fixing member. The hand H1 is an example of a movable part, the first light emitting part 21 is an example of a first light emitting part, the first light receiving part 22 is an example of a first light receiving part, and the optical sensor 20 is It is an example of an optical sensor, the second light receiving portion 31 is an example of a second light receiving portion, the second light emitting portion 32 is an example of a second light emitting portion, and the optical fiber 30 is a light guide member. is an example of

The light controller ma1 is an example of a first emitted light controller, the light controller mb1 is an example of a second received light controller, and the light controller mb2 is an example of a second emitted light controller. , the light control unit ma2 is an example of a first received light control unit, the spin chuck 1 and the temperature adjustment plate 7 are examples of a substrate support unit, and the fixing member 4 and the rotation driving unit 2 are fixed portions and fixed These are examples of members, the hand H1 is an example of a carrier holding section, the processing unit PU is an example of a processing unit, and the spin chuck 1 is an example of a rotation holding section.

Further, the positional relationship determination unit 515 is an example of the determination unit, the driving unit 52 is an example of the driving unit, the alignment control unit 513 is an example of the alignment control unit, and the current position acquisition unit 512 is an acquisition unit. The target position generation unit 516 is an example of the generation unit, the movement control unit 517 is an example of the movement control unit, the positional relationship determination unit 515, the optical fiber 30, the optical sensor 20, the hand H1, the fixing member 4 , light control units ma1, ma2, mb1, and mb2 are examples of the alignment device.

Various other elements having the structure or function described in the claims can be used as each component of the claims.

DESCRIPTION OF SYMBOLS 1... Spin chuck, 1C... Rotating shaft, 2... Rotation drive part, 4... Fixed member, 5... Processing liquid nozzle, 6... Developing solution nozzle, 7... Temperature control plate, 20... Optical sensor, 21... First light Emitting part 22... First light receiving part 23... Sensor body part 28, 29, 30... Optical fiber 31... Second light receiving part 32... Second light emitting part 51... Control part 52... Drive unit 53 Position detection unit 100 Substrate processing device 210 Control device 230 Heat treatment unit 240 Coating processing unit 250 Development processing unit 500 Exposure device 511 Operation mode setting unit 512 Current position acquisition unit 513 Alignment control unit 514 Received light amount acquisition unit 515 Positional relationship determination unit 516 Target position generation unit 517 Movement control unit 518 Position/orientation information storage unit 519 Position/orientation information update unit 520 Current orientation acquisition unit 521 Target orientation generation unit H1 Hand PU, TU Processing unit W Substrate WT Substrate transport device ha Holding unit hb Arm , ma1, ma2, mb1, mb2 . . . light control unit, r1 .

Claims (9)

A substrate processing apparatus for processing a substrate,
a fixed part;
a movable portion that is movable relative to the fixed portion;
an optical sensor provided on one of the fixed portion and the movable portion and having a first light emitting portion and a first light receiving portion;
A guide provided in the other portion of the fixed portion and the movable portion and having a second light receiving portion corresponding to the first light emitting portion and a second light emitting portion corresponding to the first light receiving portion. an optical member;
a first emitted light control section for causing the light emitted from the first light emitting section to travel in a first direction and a second direction predetermined with respect to the one portion;
a second received light control section for guiding light traveling in third and fourth directions predetermined with respect to the other portion to the second light receiving section;
a second emitted light control section for causing the light emitted from the second light emitting section to travel in predetermined fifth and sixth directions with respect to the other portion;
a first received light control section for guiding light traveling in seventh and eighth directions predetermined with respect to the one portion to the first light receiving section;
When the movable portion is in a predetermined first positional relationship and in a second positional relationship with respect to the fixed portion, the light emitted from the first light emitting portion is in the second positional relationship. The first light emitting portion, the first light receiving portion, the first 2 light emitting portions and the second light receiving portion are arranged,
in the first positional relationship, the first and third directions match and the fifth and seventh directions match;
The substrate processing apparatus, wherein in the second positional relationship, the second and fourth directions match and the sixth and eighth directions match. further comprising a substrate support for supporting the substrate;
the fixing portion includes a fixing member having a fixed positional relationship with the substrate supporting portion;
2. The substrate processing apparatus according to claim 1, wherein said movable portion includes a transfer holder that holds said substrate and transfers it to said substrate supporter. further comprising a processing unit for processing the substrate,
The substrate support includes a rotation holder that holds and rotates the substrate,
3. The substrate processing apparatus according to claim 2, wherein said fixed member has a fixed positional relationship with respect to said rotary holder. further comprising a plurality of substrate supports that support the substrate;
the fixing portion includes a plurality of fixing members having a fixed positional relationship with the plurality of substrate supporting portions;
the movable portion includes a transfer holder that holds the substrate and transfers it to the plurality of substrate supports;
The optical sensor is provided on the transport holder,
2. The substrate processing apparatus according to claim 1, wherein said light guide member is provided on each of said plurality of fixing members. Determination for determining whether or not the movable portion is in the predetermined first positional relationship and whether or not the fixed portion is in the second positional relationship based on the output signal of the optical sensor. 5. The substrate processing apparatus according to claim 1, further comprising a unit. a drive unit that moves the movable portion relative to the fixed portion;
an alignment control unit that controls the driving unit to move the movable part within a predetermined area including the fixed part during alignment operation;
an acquisition unit that acquires information indicating the position of the movable part as current position information during an alignment operation;
At the time of alignment operation, based on the current position information acquired by the acquisition unit and the determination result of the determination unit, a position where the movable part has a predetermined positional relationship with respect to the fixed part is acquired as target position information. a generator that generates as
6. The substrate processing apparatus according to claim 5, further comprising a movement control section that controls said driving section to move said movable portion based on the target position information generated by said generating section during substrate processing operation. The substrate processing apparatus can be set to a substrate processing mode and a teaching mode,
7. The substrate processing apparatus according to claim 6, wherein said alignment operation is performed during said teaching mode, and said substrate processing operation is performed during said substrate processing mode. a fixed part;
a movable portion that is movable relative to the fixed portion;
an optical sensor provided on one of the fixed portion and the movable portion and having a first light emitting portion and a first light receiving portion;
A guide provided in the other portion of the fixed portion and the movable portion and having a second light receiving portion corresponding to the first light emitting portion and a second light emitting portion corresponding to the first light receiving portion. an optical member;
a first emitted light control section for causing the light emitted from the first light emitting section to travel in a first direction and a second direction predetermined with respect to the one portion;
a second received light control section for guiding light traveling and incident in a third direction and a fourth direction predetermined with respect to the other portion to the second light receiving section;
a second emitted light control section for causing the light emitted from the second light emitting section to travel in predetermined fifth and sixth directions with respect to the other portion;
a first received light control section for guiding light traveling in seventh and eighth directions predetermined with respect to the one portion to the first light receiving section;
a determination unit that determines whether or not the movable portion is in one of a predetermined first and second positional relationship with respect to the fixed portion based on the output signal of the optical sensor; with
When the movable portion is in the predetermined first positional relationship and in the second positional relationship with respect to the fixed portion, the light emitted from the first light emitting portion is in the second positional relationship. The first light emitting portion, the first light receiving portion, the A second light emitting unit and the second light receiving unit are arranged,
in the first positional relationship, the first and third directions match and the fifth and seventh directions match;
Alignment device, wherein in said second positional relationship, said second and fourth directions are coincident and said sixth and eighth directions are coincident. A method of aligning a movable part with respect to a fixed part, comprising:
At the time of the first operation, one of the fixed portion and the movable portion provided with an optical sensor having a first light emitting portion and a first light receiving portion, the second light receiving portion and the second light emitting portion relatively moving the fixed portion provided with the light guide member having a portion and the other portion of the movable portion;
During the first operation, the light emitted from the first light emitting portion of the optical sensor is directed by the first emitted light control portion in one of the first and second directions predetermined with respect to the one portion. Light traveling in a first direction and traveling in a third direction out of third and fourth directions predetermined with respect to the other portion is sent to the second light receiving portion by a second light receiving light control portion. The light received by the second light receiving section and emitted from the second light emitting section is directed by the second emitted light control section in the fifth and sixth directions predetermined with respect to the other portion. The light traveling in the fifth direction and the light traveling in the seventh direction out of the seventh and eighth directions predetermined for the one portion is transmitted to the first light receiving portion by the first light receiving light control portion. and receiving light by the first light receiving unit;
determining whether the movable portion has a predetermined first positional relationship with respect to the fixed portion based on the output signal of the optical sensor during the first operation;
relatively moving the one portion and the other portion during a second operation;
During the second operation, the light emitted from the first light emitting portion of the optical sensor is caused to travel in the second direction by the first emitted light control portion, and the light traveling in the fourth direction. is guided to the second light receiving portion by the second received light control portion, and the light received by the second light receiving portion and emitted from the second light emitting portion is transmitted by the second emitted light control portion to the a step of guiding light traveling in a sixth direction and traveling in the eighth direction to the first light receiving section by a first received light control section and receiving the light by the first light receiving section;
determining whether the movable portion has a predetermined second positional relationship with respect to the fixed portion based on the output signal of the optical sensor during the second operation. alignment method.

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