JP2022034671A - Processing device and processing method - Google Patents

Abstract

To provide a processing device and a processing method, upon processing of diamond (or a diamond-containing material), even in processing such as piercing or cutting in particular, capable of inexpensively and easily processing the same.SOLUTION: A processing device 1 comprises: fixtures 5 holding a workpiece W: a tool 7 abutted against a part of the workpiece W; a driving means 9 relatively moving the tool 7 to the workpiece W; and a feed driving means 25 moving either the tool 7 or the workpiece W so as to move the tool 7 to a desired feed direction to the workpiece W, and in which a part of the workpiece W is reduced and is changed into a desired shape, and the workpiece W is a diamond-based material and the tool 7 is composed of an aluminum-based material.SELECTED DRAWING: Figure 1

Description

The present invention relates to a diamond processing apparatus and processing method.

Conventionally, when diamond is processed, it is generally processed (mainly polished) with diamond powder or a tool using the same (see, for example, Patent Document 1).

Specifically, when the work is industrial diamond, the surface is polished using diamond abrasive grains. If the work is diamond for jewelry, a method of applying diamond slurry (abrasive containing micron-sized diamond) to a disk-shaped cast iron tool, rotating it to press the diamond, and polishing it (Skyf polishing) is used. Often done. This skyf polishing may also be used to process precision industrial diamonds.

Further, as a processing method that does not use powdered diamond, a special processing method such as laser (beam) processing or ion beam processing will be used.

Laser (beam) processing irradiates diamond with a laser (eg, YAG laser). Diamond is locally heated by laser irradiation and reacts with oxygen in the atmosphere to become carbon dioxide and disappears. This reaction is used to process diamond. Laser machining is commonly used for drilling and cutting diamonds.
In ion beam processing, the diamond surface is irradiated with argon ions having a kinetic energy of several tens of ev (electron volt). As a result, the argon ion and the carbon atom constituting the diamond collide with each other, the kinetic energy is exchanged, and the carbon atom on the diamond surface is ejected (sputtering). This sputtering is used to gradually remove the diamond surface.

Japanese Unexamined Patent Publication No. 2020-21824

However, in processing using diamond powder (mainly polishing), it is possible to confirm the crystal plane of diamond (mainly single crystal diamond) in the workpiece (work) and determine the direction in which polishing is possible (easy). It becomes important and requires skill. In addition, it is not practical to perform processing such as drilling and cutting by polishing.

In addition, laser machining and ion beam machining can be used for drilling and cutting diamonds, and machining with positive (large) deformation, but these devices are expensive due to the special machining method, and by extension, machining. There is a limit to cost reduction.

As described above, it is difficult to process diamond (particularly drilling and cutting, processing with positive (large) deformation) inexpensively and easily.

The present invention has been made in view of the above problems, and is a processing apparatus capable of inexpensively and easily processing diamond (or a diamond-containing material), especially in the case of drilling or cutting. And provides a processing method.

The present invention is a processing device that reduces a part of a work piece to change it into a desired shape, and includes a jig for holding the work piece and a tool for contacting a part of the work piece. , A driving means for moving the tool relative to the work piece, and a feed for moving one of the tool and the work piece in order to move the tool in a desired feed direction with respect to the work piece. The present invention relates to a processing apparatus having a driving means, wherein the workpiece is a diamond-based material, and the tool is made of an aluminum-based material.

Further, the present invention is a processing method for reducing a part of a work piece of a diamond-based material to change it into a desired shape, wherein the work piece is held by a jig and a tool made of an aluminum-based material is used. It has a step of relatively moving the work piece and a step of moving one of the tool and the work piece in order to move the tool in a desired feed direction with respect to the work piece. It relates to a processing method characterized by.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a processing apparatus and a processing method capable of processing diamond (or a diamond-containing material) at low cost and easily even in processing such as drilling or cutting. Will be.

It is a schematic diagram which shows the processing apparatus of embodiment of this invention, is (A) side view, (B) partial side view, (C) partial top view. It is a figure explaining the tool of embodiment of this invention, (A) side view, (B) side view, (C) sectional view. It is a schematic diagram which shows the processing apparatus of embodiment of this invention, is (A) side view, (B) the top view of the jig, (C) the side view of the jig. It is a side schematic diagram explaining the processing method which concerns on embodiment of this invention. It is an image which photographed the state of processing by the processing apparatus and processing method which concerns on embodiment of this invention. It is a figure which shows the result of having analyzed about the deposit of the tool by the processing which concerns on embodiment of this invention, and is the image which photographed the tool after processing. It is a figure which shows the result of analysis about the deposit of the tool by the processing which concerns on embodiment of this invention, and is the table which shows the semi-quantitative analysis result. It is a figure which shows the result of having analyzed about the deposit of the tool by the processing which concerns on embodiment of this invention, is an EPMA / WDS correction analysis chart.

Hereinafter, the processing apparatus 1 and the processing method according to the embodiment of the present invention will be described in detail with reference to the drawings.

<Processing equipment>
1A and 1B are schematic views for explaining the processing apparatus 1 of the present embodiment, FIG. 1A is a schematic side view of the processing apparatus 1, and FIG. 1B is a work piece W and a processing target area WA. A side view showing the above, and the figure (C) is a top view of the figure (B). 2A and 2B are views for explaining the tool 7, in which FIG. 2A is a side view showing the tool 7 and the driving means 9, and FIG. 2B is a side view showing the shape of the tool 7 and FIG. 2C. ) Is a cross-sectional view of the figure (B).

As shown in FIG. 1A, the processing apparatus 1 of the present embodiment includes a jig 5 for holding the workpiece W, a tool 7 for contacting a part of the workpiece W, and a driving means 9. The feed driving means 25 is provided, and a part of the workpiece W is reduced in weight to change it into a desired shape. "Processing to reduce the weight of a part of the workpiece W" is, for example, a drilling process for penetrating the workpiece W from one surface side to the other surface side, and from one surface side to the other surface of the workpiece W. The thickness is reduced but not penetrated to the other surface side (concavities and convexities are formed in the thickness direction of the workpiece W), and the area in the plan view of the workpiece is reduced (plane direction of the workpiece W). Deformation (reduction) processing (reducing the shape of), shaving processing to deform (reduce) to an arbitrary shape, etc. Here, as shown in FIGS. (B) and (C), a case where a part of the plate-shaped workpiece W is drilled in a circular shape is illustrated. In the figure (B) and the figure (C), the area to be machined (the area to be drilled) WA is shown by a large broken line.

The workpiece (work) W in the present embodiment is a diamond-based material. Here, the diamond-based material is diamond or a diamond-containing material. Specifically, diamond is, for example, natural diamond (produced inside the earth) (diamond with 100% purity, or diamond containing a very small amount of non-crystalline carbon or non-diamond crystals), high-temperature high-pressure synthetic method, or chemical vapor deposition. Synthetic diamond (artificial diamond) synthesized by the vapor phase growth method or the like. Further, the use may be an industrial diamond containing a binder or other components, or a diamond for jewelry (jewelry). Further, the crystal structure may be a single crystal diamond or a polycrystalline diamond.

Further, the diamond-containing material in the present embodiment is a material containing the above-mentioned diamond as a main component, and "containing the above-mentioned diamond as a main component" means, for example, that the content of the above-mentioned diamond is 50% or more of the whole. When it occupies or contains a plurality of components other than diamond (referred to as sub-components), it means that the content of diamond is larger than the content of any of the sub-components.

Further, the tool 7 of the present embodiment is made of an aluminum-based material. Here, the aluminum-based material in the present embodiment includes aluminum (pure aluminum), an aluminum alloy (aluminum with copper (Cu) manganese (Mn), silicon (Si), magnesium (Mg), zinc (Zn) nickel, and the like. (Alloy to which one or more kinds of metals are added) or a metal containing aluminum as a main component. Further, "containing aluminum as a main component" means that, for example, the content of aluminum or an aluminum alloy occupies 50% or more of the whole, or a plurality of components (referred to as sub-components) other than aluminum or an aluminum alloy are contained. In the case, it means that the content of aluminum or an aluminum alloy is larger than the content of any of the subcomponents. The sub-component may be, for example, aluminum oxide, aluminum nitride, other ceramics, or other components. When the tool 7 is composed of aluminum oxide, it is preferable that the content of aluminum oxide is small. Specifically, the content of aluminum oxide is preferably less than 30% of the whole (aluminum-based material), preferably less than 20%, and more preferably less than 10%.

The jig 5 holds (for example, grips) the workpiece W around the workpiece W except at least the machining target region WA. The tool 7 is arranged on one surface (first surface Sf1) of the workpiece W, and is in contact with the first surface Sf1 during machining, and the tool 7 is applied with an appropriate pressing force. And the workpiece W are relatively moved in the surface direction, and the processing proceeds toward the other surface (second surface Sf2). Here, the machining target region WA is a region in which machining is progressed by the tool 7 and finally machining is completed in a desired shape. That is, when the tool 7 and the workpiece W are relatively moved in the plane direction, the area to be machined (the area machined in contact (contact) with the tool 7) in the machining target area WA is the tool at the start of machining. Gradually expand from the size equivalent to the area of the tip of 7. In this way, the area of the area to be machined WA (area to be machined) is larger than the area of the tip of the tool 7.

The tool 7 has a cylindrical shape (cylindrical shape) as shown in FIG. 2 (A), or a core (cup) shape as shown in FIGS. (B) and (C). Specifically, it has a base portion 7A and a diameter-expanded portion 7B, the base portion 7A has a cylindrical shape, and the diameter-expanded portion 7B is provided at the tip of the base portion 7A (the tip that abuts on the workpiece W). It has a substantially cylindrical shape with a diameter larger than that of the base 7A and an opening on the tip side.

The shape of the tool 7 is not limited to the one shown in the figure, and may be, for example, a flat end mill, a ball end mill, a taper end mill, or the like.

The driving means 9 is a means for driving the tool 7 to reduce a part of the workpiece W by physically moving the tool 7 and the workpiece W relative to each other. The drive means 9 in this example is a rotary drive means for rotating the tool 7 and the workpiece W relative to each other, and is, for example, a motor for rotationally driving the spindle of the tool 7 or the tool 7. By the driving means 9, the tool 7 is rotationally driven by the spindle 50 about the vertical Z axis. Further, it is desirable that the spindle 50 is provided with, for example, an ultrasonic vibration means 55. The ultrasonic vibration means 55 has an ultrasonic vibrator 56 and an ultrasonic horn 57. The ultrasonic vibrator 56 causes ultrasonic vibration in the axial direction. The ultrasonic horn 57 resonates with the ultrasonic vibration generated by the ultrasonic vibrator 56 and amplifies the ultrasonic vibration. Then, the ultrasonic horn 57 transmits the amplified axial ultrasonic vibration to the tool 7. That is, the driving means 9 rotationally drives the tool 7 while ultrasonically vibrating it.

When the tool 7 abuts and is pressed, a part of the workpiece W (work area WA) is, in this example, the rotation direction of the tool 7 (X-axis-Y-axis direction in FIG. 1A). To reduce the weight.

With reference to FIG. 1, the feed driving means 25 is a means for relatively moving the tool 7 and the workpiece W in a direction in which they are pressed against each other, and is a means for feeding the tool 7 or a means for feeding the workpiece W. .. In this example, the pressing direction is the extending direction of the spindle of the tool 7, that is, the vertical direction (Z-axis direction, the direction from the first surface Sf1 to the second surface Sf2).

That is, in the machining apparatus 1 of the present embodiment, in a state where the tool 7 is in contact with the workpiece W and pressed against each other, the tool 7 and the workpiece W are driven by the drive means 9 in the rotational drive direction (X-axis-Y-axis) of the tool 7. The work piece W is reduced in the rotation drive direction (X-axis-Y-axis direction) by ultrasonically vibrating the tool 7 while rotating relative to the direction). When the weight loss in the rotation drive direction progresses to a predetermined amount (there is no amount to be reduced), the weight loss does not proceed. Therefore, the machining apparatus 1 uses the feed drive means 25 so that the tool 7 and the workpiece W are pressed against each other. The tool 7 and the workpiece W are relatively moved (pressed) in the Z-axis direction, and the weight of the workpiece W is reduced in the vertical direction. That is, the machining apparatus 1 rotates the tool 7 to reduce the weight of the workpiece W in a certain direction (for example, in a planar shape), and feeds (extrudes) the tool 7 in a further direction, for example. Weight loss proceeds in another direction (for example, the depth (thickness) direction). Hereinafter, the direction in which the tool 7 is rotationally driven (X-axis-Y-axis direction) is referred to as a weight loss direction, and the pressing direction (Z-axis direction) between the tool 7 and the workpiece W is referred to as a feeding direction.

Further, it is desirable that the processing device 1 has a shock absorber 20. The cushioning mechanism 20 cushions the pressure (pushing pressure) applied to the workpiece W when the tool 7 comes into contact with the workpiece W. Although the details will be described later, for example, the shock absorber 20 moves one of the tool 7 and the workpiece W in the feed direction, and retracts and moves the other of the tool 7 and the workpiece W in the same direction as the feed direction. When the tool 7 presses the workpiece W, the excessive pressure applied to the workpiece W is buffered.

Further, the processing apparatus 1 uses a tool 7 formed of an aluminum-based material to bring it into contact with a diamond-based material which is a workpiece W, and at least reduces the weight of the workpiece W (diamond-based material) (wear, wear, and peeling). , Separation, etc.) while proceeding with processing. That is, the machining apparatus 1 of the present embodiment physically presses the tool 7 that vibrates ultrasonically and the workpiece W with an appropriate pressure to perform machining, but at that time, the machining apparatus W is excessively applied to the workpiece W. While buffering the pressure (pressing pressure), the workpiece W is relatively moved in the weight loss direction. By doing so, in addition to the physical relative movement of the tool 7 and the workpiece W (movement in the weight loss direction and movement in the feed direction), the contact surface (movement in the weight loss direction and the movement in the feed direction) in which the tool 7 and the workpiece W interact with each other ( And in the vicinity of it), the weight is reduced while causing at least a chemical reaction. .. As a result, it is possible to reduce the weight of the work piece W and change it to a desired shape without damaging the work piece W. Here, "reducing the weight while causing at least a chemical reaction" in the present embodiment means that the tool 7 is an aluminum-based material and a workpiece in the process (from the start to the end) of processing (weight reduction) of a certain part. It means that some kind of chemical reaction has occurred with the diamond-based material which is W, and physical machining by pressing the tool 7 (may include conventionally known mechanical cutting and polishing). However, it may not be included) and processing by a chemical reaction may be mixed. For example, the degree of physical processing and the degree of processing by a chemical reaction may be the same, and more preferably. It mainly refers to weight loss (processing) while causing a chemical reaction. Here, "reducing weight (processing) mainly while causing a chemical reaction" is, for example, due to an event in which at least 50% or more of the weight loss (processing) is caused by a chemical reaction (weight loss due to a chemical reaction). The degree accounts for more than 50% of the total weight loss), which may be due to an event caused by a 100% chemical reaction, or physical processing to a part (less than 50%) of the weight loss (processing). (Especially mechanical cutting, polishing, etc.) may be included.

A specific example of the processing apparatus 1 will be described with reference to FIG. 3, which is a side view of the processing apparatus 1. In the following embodiment, the case where the processing apparatus 1 is an apparatus such as a milling machine for rotationally driving a tool 7 such as a drill will be described as an example.

The processing device 1 of the present embodiment includes a table 3, a jig 5, a retracting movement mechanism 21, an urging mechanism 23, a tool (machining tool) 7 made of an aluminum-based material (for example, an aluminum alloy), and a tool 7. It has a drive means 9, a feed drive means 25, a tool support portion 17 for supporting the tool 7, a control means, and the like.

The table 3 is, for example, an X-axis-Y-axis table (stage) for moving a workpiece (for example, polycrystalline diamond (industrial diamond)) W in a horizontal X-axis-Y-axis plane.

The jig 5 is a means for holding (supporting) the workpiece W provided on the table 3, and as shown in FIGS. (B) and (C), for example, a base 51 and a holding portion. It has a 52, a support portion 53, and the like. Here, as an example, a jig 5 for drilling a work piece W is shown so that the work piece W around the work piece W can be held (for example, gripped) except at least the work target area WA. , Has a frame shape with an open central portion (Fig. (B)). In the figure (A), the jig 5 is shown in a cross-sectional view taken along the line aa in the figure (B) in order to show the holding state of the workpiece W.

Further, the jig 5 of the present embodiment includes a shock absorber 20 as an example. The cushioning mechanism 20 is, for example, a mechanism including a retracting movement mechanism 21 and an urging mechanism 23. The retracting movement mechanism 21 uses the other of the tool 7 and the workpiece W so that the relative feed amount between the tool 7 and the workpiece W decreases with respect to the actual feed amount by the feed driving means 25. It is a mechanism to evacuate and move in the feed direction. Further, the urging mechanism 23 is a mechanism that urges the workpiece W or the tool 7 to be retracted and moved in the return movement direction when the workpiece W or the tool 7 is retracted and moved by the retracting and moving mechanism 21. The buffer mechanism 20 will be described in detail later.

For example, a support portion 53 is erected on the base 51 at an appropriate position, and a flat plate holding portion 52 is provided on the upper end portion of the support portion 53, for example. In this example, the holding portion 52 has a rectangular (square) frame shape in a plan view, and the supporting portions 53 are provided at four positions corresponding to the four corners near the outer periphery of the holding portion 52. explain. The outer shape of the holding portion 52 is not limited to this example, and may be a rectangular shape or a circular shape having a long side and a short side. In either case, the holding portion 52 has a shape capable of holding at least the outer edge portion of the workpiece W as a whole (or selectively), and the workpiece W is abutted and held inside (inner peripheral side) thereof. (To support. Further, in the following example, the upper surface side of the holding portion 52 (the upper surface side in the Z-axis direction in the figure (C)) is referred to as a holding surface 521 for convenience of explanation.

The holding portion 52 may not have a frame shape depending on the processing mode of the workpiece W. For example, in the case of hollowing work that does not penetrate the workpiece W in the thickness direction (Z-axis direction in FIG. 3), the holding portion 52 may be in the shape of a flat plate (having no opening).

Further, the arrangement and the number of the support portions 53 may be two locations corresponding to both ends of the holding portion 52 or one location corresponding to the center, depending on the shape of the holding portion 52.

Further, as will be described in detail later, in the jig 5 of the present embodiment, the holding portion 52 extends in the extending direction of the spindle of the tool 7 with respect to the base 51 (in this example, the vertical direction (Z-axis direction in the figure)). It is configured to be relatively movable.

The drive means 9 is, for example, a rotary drive means for relatively moving the tool 7 and the workpiece W in the weight loss direction (relative rotation, and has the same configuration as shown in FIGS. 1 and 2). The tool 7 is rotationally driven by a spindle about a vertical Z-axis and is ultrasonically vibrated.

In this example, the feed drive means 25 is a means for moving the tool 7 in a desired feed direction with respect to the workpiece W, and is provided, for example, in the tool support portion 17 that supports (holds) the tool 7. As an example, the tool support portion 17 is a Z-axis feed stage that moves in the Z-axis direction, and in this example, the feed direction is the extending direction of the spindle of the tool 7, that is, the vertical direction (Z-axis direction in the figure, jig). (Direction perpendicular to the surface of the holding portion 52 of 5).

Further, it is desirable that the processing apparatus 1 of the present embodiment includes the measuring means 11. The measuring means 11 is, for example, an evacuation state detecting means 111 for detecting the evacuation state by the evacuation moving mechanism 21, a feed state detecting means 113 for detecting the actual feed state by the feed drive means 25, and an evacuation state and a feed state. It has a calculation means 115 for calculating the relative feed amount of the tool 7 and the workpiece W from the relative difference. The measuring means 11 will be described in detail later.

Each part of these processing devices 1 is collectively controlled by a control means (not shown). The control means is composed of a CPU, RAM, ROM, and the like, and executes various controls. The CPU is a so-called central processing unit, and various programs are executed to realize various functions. The RAM is used as a work area for the CPU. The ROM stores the basic OS and programs executed by the CPU.

The control means includes a numerical control means (numerical control device) (not shown) that numerically controls the table (X-axis-Y-axis table) 3 and the tool support portion (Z-axis feed stage) 17. The numerical control device rotates the tool (grinding stone) 7 at high speed around the Z axis by the spindle, and the rotation torque and the like are controlled, and the workpiece W is moved in the horizontal XY plane to rotate the tool 7. By contacting them, the work piece W can be reduced in weight and processed into a desired shape.

In the processing apparatus 1 of the present embodiment, when the tool 7 presses the workpiece W on the workpiece W, the machining proceeds while buffering the excessive pressure applied to the workpiece W until the desired shape is obtained. The weight of the work piece W is reduced. In other words, the work piece W is reduced until the desired shape is obtained while maintaining the pressure at which the tool 7 presses the work piece W on the work piece W within a predetermined range in which the work proceeds. ..

More specifically, the tool 7 presses the workpiece portion by advancing the machining while retracting one of the tool 7 or the workpiece W in the same direction as the feed direction of the other for advancing the machining. The excess pressure applied to the work piece is buffered at this time, and the work is performed while maintaining the pressure (pushing pressure) at which the tool 7 and the work part come into contact within a predetermined range in which the work proceeds efficiently. Can be done.

Here, the diamond-based material to be the workpiece W has conventionally been processed by using a diamond tool, diamond powder (abrasive grains) or the like (mainly polishing processing), laser processing, or ion beam processing. However, in processing using diamond powder (mainly polishing processing), the crystal plane of diamond (mainly in the case of single crystal diamond) of the workpiece (work) is confirmed, and the direction in which polishing is possible (easy) is determined. It became important, and there was a problem that required skill. In addition, it was not practical to perform processing such as drilling and cutting by polishing.

In the case of laser processing and ion beam processing, it is possible to drill and cut diamond (industrial diamond) and process with positive (large) deformation, but these devices are expensive due to the special processing method. Therefore, there is a limit to the reduction of processing cost.

As described above, it has been difficult to process diamonds (particularly drilling and cutting, processing with positive (large) deformation) inexpensively and easily.

However, the applicant of the present application has at least by bringing the tool 7 made of an aluminum-based material into contact with the diamond-based material which is the workpiece W at an appropriate pressure (while releasing excessive pressure) while ultrasonically vibrating. It has been found that the workpiece W is reduced in weight (wear, wear, peeling, etc.). This is because the aluminum-based material is softer than the diamond-based material, and the contact surface between the two becomes high temperature (for example, 600 ° C to 700 ° C), so that the aluminum-based material and the diamond-based material vibrate ultrasonically. It is considered that at least the diamond-based material loses weight (wears, wears, and falls off) due to a chemical reaction with the material. More specifically, the materials of the abutting tool 7 and the workpiece W are chemically bonded at the molecular level (or atomic level), and the materials are separated from each other by ultrasonic vibration from the state where they are once bonded (bonded). As a result, it is considered that a part of the material of the workpiece W is peeled off in a state of being bonded (adhered) to the material of the tool 7, and a part of the material of the workpiece W is reduced in weight. Specifically, for example, the crystal structure of diamond (carbon), which is at least the workpiece W, is formed by an event caused by at least a chemical reaction, such as carbon dioxide being generated by high-temperature contact between an aluminum-based material and a diamond-based material. It is considered that the weight loss (processing) of the diamond-based material progresses due to alteration and / or destruction, and a part thereof falling off (peeling, separation, consumption).

Depending on the material, both the tool 7 and the workpiece W may lose weight (the degree of weight loss differs). In some cases, the processing can proceed more effectively by adding water.

In addition, in the weight loss by a chemical reaction of this embodiment, the weight loss by a chemical reaction other than the above (chemical bond and peeling) and the weight loss by another chemical reaction may be mixed. Further, these may include weight loss (cutting or grinding) by mechanical processing, but in that case, at least a part of the processing is assumed to proceed by a chemical reaction, and preferably chemical. It is assumed that the degree of weight loss due to the reaction accounts for 50% of the total weight loss, and more preferably, the weight loss proceeds mainly by the chemical reaction (the degree of weight loss due to the chemical reaction exceeds 50% of the total weight loss).

Further, in the weight loss due to such a chemical reaction, the materials (tool 7 and the workpiece W) are brought into contact with each other (for example, mechanical processing) to the extent that mechanical processing (polishing or cutting) does not positively occur. It is considered that the degree of progress is low (preferably little mechanical machining occurs) and chemical (molecular or atomic level) bonds are formed, and the tool 7 and the workpiece W are suitable. It was found that it is desirable to make the contact with a gentle pressure.

Therefore, in the present embodiment, in order to maintain the pressing force between the tool 7 and the workpiece W within a predetermined range in which machining proceeds most efficiently (weight loss due to a chemical reaction occurs efficiently), the tool 7 or the workpiece W is used. Machining is performed while retracting one of the workpieces W in the same direction as the other feed direction for advancing the machining. As a result, the machining can proceed while buffering the excessive pressure applied to the workpiece region WA when the tool 7 presses the workpiece.

Specifically, as shown in FIG. 3, in the processing apparatus 1 of the embodiment of the present invention, one of the jig 5 and the tool support portion 17 has a cushioning mechanism 20, whereby the workpiece W It is configured to buffer (absorb) the excessive pressure of the tool 7 applied to the workpiece W and reduce the machining load on the work piece W and the tool 7. The shock absorber 20 is a mechanism including, for example, a retracting movement mechanism 21 for retracting and moving the tool 7 or the workpiece W, and an urging mechanism 23 for urging the tool 7 or the workpiece W in the return moving direction. ..

It will be described in more detail with reference to FIGS. (B) and (C). In this embodiment, as an example, the jig 5 is provided with a cushioning mechanism 20, that is, a retracting movement mechanism 21 and an urging mechanism 23.

In this example, the evacuation movement mechanism 21 is a support portion 53 that holds the holding portion 52 (holding surface 521) so as to be movable up and down in the direction perpendicular to the base 51 (vertical in this example). More specifically, the support portion 53 has an outer cylinder 531 and an inner cylinder 532 that is held inside the outer cylinder 531 so as to be able to advance and retreat with respect to the outer cylinder 531.

Further, the urging mechanism 23 is, for example, an elastic member 533 provided on the outer periphery of the support portion 53 and whose upper and lower ends are fixed to the holding portion 52 and the base 51. The elastic member 533 is, for example, a spring (coil spring) wound around the outer circumference of the outer cylinder 531 and having both upper and lower ends fixed to the holding portion 52 and the base 51.

The support portion 53 (evacuation movement mechanism 21) is the same as the actual feed direction of the tool 7 (the direction in which the tool 7 is fed by the feed drive means 25 when the machining is advanced, in this example, the direction toward the lower side of the Z axis). The holding portion 52 is configured to be retractable and movable in the direction, whereby the workpiece W on the holding portion 52 can be retracted and moved in the same direction as the actual feed direction of the tool 7.

The urging mechanism 23 urges the workpiece W to be retracted and moved in the return movement direction when the workpiece W is retracted and moved by the retracting and moving mechanism 21. The return movement direction is opposite to the evacuation movement direction, and is a direction toward the upper side of the Z axis.

Further, a stopper 535 is provided on the upper surface of the holding portion 52. The stopper 535 restricts the movement of the holding portion 52, which is urged upward in the Z direction by the urging mechanism 23 (elastic member 533), to a predetermined height.

As a result, the holding portion 52 and the workpiece W held by the holding portion 52 are pressed by the tool 7 during machining, and the evacuation movement mechanism 21 resists the urging force of the urging mechanism 23 while the tool 7 is pressed. The workpiece W (holding portion) retracted and moved by the retracting movement mechanism 21 and the urging mechanism 23 as the machining progressed by the workpiece W and the tool 7, although the workpiece W was retracted and moved in the actual feed direction (downward on the Z axis). 52) moves in the direction of returning to the initial position while being pressed by the tool 7.

It is desirable that the tool 7 is subjected to ultrasonic vibration by the ultrasonic vibration means 55, but in this case, the machining proceeds by the sound pressure and vibration by the ultrasonic waves and the pressurization of the tool 7. That is, since the sound pressure is also involved in the pressure (pushing pressure), the feed driving means 25, the retracting movement mechanism 21, the urging mechanism 23, and the like are controlled in consideration of this sound pressure.

Further, the measuring means 11 includes, for example, an evacuation state detecting means 111 that detects an evacuation state by the evacuation moving mechanism 21, a feed state detecting means 113 that detects an actual feed state by the feed drive means 25, and an evacuation state and a feed. It has a calculation means 115 for calculating the relative feed amount of the tool 7 and the workpiece W from the relative difference between the states.

Here, the evacuation state detected by the evacuation movement mechanism 21 is, for example, the amount of evacuation movement due to being pressed by the tool 7 (hereinafter referred to as “evacuation amount ΔN”).

Further, the actual feed state detected by the feed drive means 25 is, for example, an actual (absolute) feed amount (hereinafter, "absolute") that is a target (set when machining) for machining. The feed amount is referred to as “ΔT1”).

Further, the relative feed amount calculated by the calculation means 115 is the difference (ΔT1-ΔN) between the absolute feed amount ΔT1 and the withdrawal amount ΔN, and is hereinafter referred to as “relative feed amount ΔT2”. The relative feed amount ΔT2 (= ΔT1-ΔN) between the tool 7 and the workpiece W can be said to be the amount of progress in machining.

In the evacuation movement mechanism 21 of the present embodiment, when the workpiece W is placed on the holding portion 52, the workpiece W is not pressed by the feed driving means 25 even when the tool 7 is not pressing the workpiece W. It moves in the evacuation movement direction by a predetermined amount according to the weight of (the urging mechanism 23 is set as such). However, in the present embodiment, as an example, the evacuation amount ΔN detected by the evacuation state detecting means 111 is such that the workpiece W presses (delivers) the workpiece W by the feed driving means 25, so that the workpiece W is on the Z axis. It is assumed that the amount of change that has been retracted and moved downward (the amount of change that has been retracted and moved by pressing the tool 7 from the state where the workpiece W is placed on the holding portion 52 at the start of machining) is detected.

Depending on the setting of the urging force of the urging mechanism 23 described later, the holding portion 52 may not move downward on the Z axis only by placing the workpiece W on the holding portion 52, and is configured as such. May be.

Then, while the machining is in progress (while being pressed by the tool 7), the evacuation movement mechanism 21 is urged by the urging mechanism 23, so that the absolute feed amount ΔT1 of the tool 7 by the feed drive means 25 On the other hand, the workpiece W is retracted and moved in the direction in which the relative feed amount ΔT2 between the tool 7 and the workpiece W decreases. In the present embodiment, "moving the workpiece W back and forth in the direction in which the relative feed amount ΔT2 decreases" is, in other words, moving in the direction of returning to the initial position, but the initial position. It is a movement that seems to be still evacuating from.

Then, the processing apparatus 1 is controlled to end the processing (one step) when the evacuation amount ΔN by the evacuation movement mechanism 21 becomes (omitted) zero.

Specifically, for example, when machining 2 mm, the absolute feed amount ΔT1 (evacuation amount ΔN) of the tool 7 by the feed drive means 25 is set to 2 mm, and the evacuation amount ΔN (2 mm) becomes (omitted) zero. When processing is finished. Alternatively, for example, when machining 2 mm, machining may be performed in a plurality of steps. For example, in the first step, the absolute feed amount ΔT1 (evacuation amount ΔN) of the tool 7 by the feed drive means 25 is set to 0. Assuming that it is 2 mm, when the withdrawal amount ΔN (0.2 mm) becomes (omitted) zero, the first step of machining is completed, the process proceeds to the next step (second step), and this is repeated to perform machining. May be good. In this case, when the 10th step is completed, the processing is completed. The weight of the tool 7 may be reduced (weared) due to the chemical reaction between the tool 7 and the workpiece W, but the feed amount ΔT1 (evacuation) is taken into consideration so that the machining proceeds. The amount ΔN) is controlled.

The urging force of the urging mechanism 23 (elastic force of the elastic member 533) is set to be linked to the evacuation amount ΔN detected by the evacuation state detecting means 111, so that the evacuation movement and the return movement as described above are possible. It is set in a range that does not exceed a desired amount.

Specifically, when the feed driving means 25 feeds the tool 7 with an absolute feed amount ΔT1, the urging force of the urging mechanism 23 is determined by the buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). It is set so that the relative feed amount ΔT2 between 7 and the workpiece W can be retracted and moved in a decreasing direction. More specifically, for example, the position of the workpiece W in the Z-axis direction (of the jig 5) corresponds to the feed operation of the feed drive means 25 (resulting amount ΔN by the retract movement mechanism 21). The urging force of the urging mechanism 23 is set so that the workpiece W can vibrate, for example, in a small range while allowing a minute displacement of the holding portion 52 (position in the Z-axis direction).

For example, when the urging mechanism 23 is an elastic member (coil spring) 533, a spring constant that can be expanded and contracted in conjunction with the evacuation amount ΔN by the evacuation movement mechanism 21 is appropriately selected. The elastic member 533 receives the pressing force of the feeding driving means 25 and is compressed in the feeding direction (downward of the Z axis) of the feeding driving means 25, but resists the pressing force and the actual feed amount (absolute) of the tool 7. The workpiece W (holding portion 52) is stretched to such an extent that the workpiece W (holding portion 52) can be moved in a direction in which the relative feed amount ΔT2 between the tool 7 and the workpiece W decreases with respect to the feed amount ΔT1. The spring constant is selected.

In other words, as the machining by the workpiece W and the tool 7 progresses, a spring constant is selected so that the workpiece W (holding portion 52) retracted and moved downward in the Z direction moves in the return direction.

However, the urging force of the urging mechanism 23 differs depending on the progress of processing due to the chemical reaction between the two, including the shape (size) of the tool 7 and the shape (thickness) of the workpiece W. Therefore, the urging force of the urging mechanism 23 is controlled within a range not exceeding a desired amount that enables the above-mentioned evacuation movement and return movement according to the progress of processing due to the chemical reaction between the two. .. That is, when the urging mechanism 23 is an elastic member 533, a spring constant within a range not exceeding a desired amount that enables the above-mentioned retracting movement and returning movement is appropriately selected.

Further, the feed driving means 25 controls the absolute feed amount ΔT1 so that the withdrawal amount ΔN of the workpiece W (holding portion 52) does not exceed a predetermined threshold value. Specifically, when the evacuation amount ΔN exceeds a predetermined threshold value (for example, a target machining amount), the absolute feed amount ΔT1 of the tool 7 is reduced, and the evacuation amount ΔN is a predetermined threshold value. When the position is not reached (when there is little pushing and the tool 7 is in an idling state or a state close to it), control is performed to increase the absolute feed amount ΔT1 of the tool 7.

It should be noted that the feed control during machining by the feed drive means 25 does not have to be performed, and the control by the drive means 9 of the tool 7 is performed instead of or in combination with the control by the feed drive means 25 (rotation control, rotation torque). The evacuation amount ΔN may be controlled so as not to exceed a predetermined threshold value.

Further, the elastic member 522 is not limited to a coil spring, and may be, for example, an air spring, a sponge, or the like, and the urging mechanism 23 is a mechanism (elastic force) for urging by magnetic force, hydraulic pressure, pneumatic pressure, or the like. It may be a mechanism having).

Further, the shock absorber 20 is not limited to the above configuration, and is configured to move one of the tool 7 and the workpiece W in the feed direction and retract and move the other of the tool 7 and the workpiece W in the same direction as the feed direction. It should be. Alternatively, the cushioning mechanism 20 may be configured to buffer the excessive pressure applied to the workpiece W when the tool 7 presses the workpiece W.

Further, the processing apparatus 1 is not limited to the configuration shown in FIG. 3, and the processing of the workpiece W (diamond-based material) is progressed by the tool 7 (aluminum-based material), for example, the tool 7 is used as the workpiece W. It has at least a drive means 9 for relative movement with respect to the work piece W and a feed drive means 25 for moving one of the tool 7 and the work piece W so as to move the tool 7 with respect to the work piece W in a desired feed direction. It may be configured. Therefore, the ultrasonic vibration means 55 may not be provided, and the cushioning mechanism 20 may not be provided.

With reference to FIG. 4, the processing method in the processing apparatus 1 will be described in chronological order. In the figure, the workpiece W is shown above the jig 5 (holding portion 52) for convenience of explaining the state of the workpiece W and the operation of the jig 5, but in reality, FIG. 3 As shown in the above, it is assumed that the jig 5 holds the peripheral portion of the workpiece W. In the case of hollowing processing that does not penetrate the workpiece W, the holding configuration may be the same as in FIG. 3, or the holding configuration shown in FIG. 4 may be used (in that case, the workpiece may be held. A means to fix W so that it does not move is necessary). That is, the mode of holding the workpiece W by the jig 5 can be appropriately selected depending on the mode of processing.

The processing method of the present embodiment is a processing method of reducing a part of the workpiece W of a diamond-based material (for example, diamond) to change it into a desired shape, and the workpiece W is held by a jig 5. Then, one of the tool 7 and the workpiece W is used to move the tool 7 made of an aluminum-based material and the workpiece W relative to each other and to move the tool 7 in a desired feed direction with respect to the workpiece W. Has a step of moving.

First, as shown in FIG. 6A, the workpiece W is held by the holding portion 52 of the jig 5. In this example, in the state where the workpiece W is held by the jig 5 and before being pressed by the tool 7, the urging mechanism 23 (elastic member 533) is compressed by a predetermined amount due to the weight of the workpiece W. The holding portion 52 is moved downward in the Z direction from the position (indicated by the broken line) before holding the workpiece W by the retracting movement mechanism 21 and the urging mechanism 23. Depending on the setting of the urging force of the urging mechanism 23, the holding portion 52 may not move downward on the Z axis only by holding the workpiece W on the holding portion 52, and even if it is configured as such. good. In this example, the movement due to the weight of the workpiece W alone is not included in the evacuation amount ΔN.

Then, from the reference surface (floor surface or the like) of the work piece W surface (or the holding surface 521 (see FIG. 3C)) at this time (in a state where the work piece W before processing is held (held)). (Height) is set to the return position P0.

Next, as shown in FIG. 3B, one of the tool 7 and the workpiece W is moved in the feed direction, and the other of the tool 7 and the workpiece W is retracted and moved in the same direction as the feed direction. When the tool presses the workpiece W, the machining proceeds while buffering the excessive pressure applied to the workpiece W.

Specifically, the table 3 is moved to adjust the workpiece area WA so as to be below the tool 7, and the tool 7 is moved with respect to the workpiece W in a desired feed direction. That is, the feed driving means 25 of the tool support portion 17 moves the tool 7 downward on the Z axis to bring the tool 7 into contact with the machining start portion of the workpiece region WA. At this time, the feed driving means 25 moves the tool 7 so as to bring the tool 7 into contact with (press) the workpiece W with a pressing force sufficient for machining. The workpiece W receives this pressing force, and the retracting movement mechanism 21 retracts and moves downward in the Z direction with a certain retracting amount ΔN. The evacuation amount ΔN may be, for example, a reduction amount (total processing amount) until the target final shape is reached, or a value smaller than the reduction amount (total processing amount) (total processing amount may be plural). It may be an equally divided value).

Next, as shown in FIG. 6C, the tool 7 and the workpiece W are relatively moved in the weight loss direction (in this case, the X-axis-Y-axis direction). At this time, the tool 7 is rotationally driven and ultrasonically vibrated by the driving means 9. Further, with the physical relative movement of the tool 7 and the workpiece W, a chemical reaction between the two occurs, and a part of the workpiece W is reduced by the physical relative movement and the chemical reaction.

In the present embodiment, in this machining, the feed driving means 25 moves the tool 7 in the feed direction (downward on the Z axis) with an absolute feed amount ΔT1 to press the workpiece W, while the urging mechanism 23 The work piece W to be retracted and moved is urged in the return movement direction (direction to move toward the return position P0), and the evacuation movement mechanism 21 is covered with the tool 7 with respect to the actual feed amount ΔT1 of the tool 7. The workpiece W (holding portion 52) is retracted and moved in the direction in which the relative feed amount ΔT2 between the workpieces W decreases (in this case, downward). The urging force of the urging mechanism 23 is linked to the evacuation amount ΔN by the evacuation movement mechanism 21 and is set within a range not exceeding a desired amount.

Specifically, the evacuation state (evacuation amount ΔN) by the evacuation movement mechanism 21 detected by the evacuation state detection means 111 and the actual feed state (absolute feed amount) by the feed drive means 25 detected by the feed state detection means 113. Based on ΔT1), the calculation means 115 calculates the relative feed amount ΔT2 between the tool 7 and the workpiece W from the relative difference (ΔT1-ΔN) between the two. Further, the feed driving means 25 controls the absolute feed amount ΔT1 so that the evacuation amount ΔN does not exceed a predetermined threshold value.

Then, as shown in FIG. 3C, the retracting movement mechanism 21 retracts and moves the workpiece W in the direction in which the relative feed amount ΔT2 between the tool 7 and the workpiece W decreases. As the machining by the workpiece W and the tool 7 progresses, the workpiece W retracted and moved by the retracting movement mechanism 21 and the urging mechanism 23 moves in the return position P0 direction, and the machining is performed so that the retracting amount ΔN decreases. proceed. In this case, the workpiece W (holding portion) is reduced in relative reduction with respect to the degree of reduction (decrease) of the workpiece W due to the tool 7 being fed by the feed drive means 25. It can be said that 52) is evacuated and moved.

That is, to give a phenomenal example, the position of the workpiece W in the Z-axis direction is not fixed with respect to the table 3, and movement (change in position) within a predetermined range is allowed in the Z-axis direction. Processing proceeds at. While the workpiece W is pushed downward on the Z axis by the tool 7, it vibrates up and down, and the jig 5 (workpiece W) gradually returns to the return position P0 to proceed with machining.

Then, as shown in FIG. 3D, when the shape of the work area WA becomes a desired final shape (reaches the total processing amount) and the withdrawal amount ΔN becomes (omitted) zero, the processing is terminated.

When the machining is executed by dividing into a plurality of steps, when the evacuation amount ΔN of one step becomes (omitted) zero, the machining of the step is completed and the machining proceeds to the next step.

If the feed amount ΔT relative to the evacuation amount ΔN is insufficient immediately before the machining is completed and the tool 7 may slip slightly below the target value, it should be taken into consideration. The absolute feed amount ΔT1, the withdrawal amount ΔN, and the relative feed amount ΔT2 may be appropriately controlled.

Further, the measuring means 11 may include a measuring means for detecting whether or not the final machining amount is reached and a desired shape is obtained, so that the final machining shape can be confirmed after the machining is completed. ..

According to such a configuration, even when an excessive pressure is applied to the workpiece W and the tool 7 held by the holding portion 52 so as to exceed the pressure range in which machining proceeds most efficiently. Processing can proceed while buffering (absorbing) it.

Further, the evacuation amount ΔN is set to a desired value (final processing amount or a value obtained by dividing it into equal parts), and when the evacuation amount ΔN becomes (omitted) zero, the processing (for one step) is completed. Therefore, it is possible to control the machining amount in micron units, which was difficult with conventional grinding and cutting.

Therefore, even if the workpiece W is, for example, an industrial diamond, and in particular, even when drilling or hollowing is performed, a special device (special method) such as a laser machining device or an ion beam machining device is used. It is possible to carry out processing inexpensively and easily without using the above.

Further, in the present embodiment, when the machining load (machining pressure) on the workpiece W and the tool 7 is small, the surface (machining grain) becomes a machining grain close to polishing (polishing), and the polishing level is fine. Processing becomes possible. In the machining of the present embodiment, the machining load (machining pressure) on the workpiece W and the tool 7 changes from time to time, but the machining load (machining) on the workpiece W and the tool 7 throughout the machining process. Roughly speaking, the machining load (machining pressure) is high at the initial stage of machining, and the machining load (machining pressure) is low at the end of machining (immediately before the end). That is, at the end of processing (immediately before the end), the surface (processed grain) can be processed with a grain that is close to polishing (polishing) by fine-grained processing at the polishing level.

The machining method of the present embodiment is a machining method in which a part of the work piece W, which is a diamond-based material, is reduced by a tool 7 made of an aluminum-based material to change it into a desired shape, for example, the tool 7 and the work piece. The machining method may include at least a step of moving the tool 7 relative to the work piece W and a step of moving one of the tool 7 and the work piece W in order to move the tool 7 with respect to the work piece W in a desired feed direction. It suffices to do so, and the ultrasonic vibration of the tool 7 does not have to be performed. Further, it is not necessary to buffer the excessive pressure applied to the workpiece W when the tool 7 presses the workpiece W.

<Other embodiments>
In the above example, the processing device 1 is a device using a milling machine for rotationally driving a drill-type tool 7, and the jig 5 is provided with a shock absorber mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). However, it is not limited to this.

For example, in the case where the processing device 1 is a device such as a lathe that rotates a columnar workpiece W, the tool support portion 17 is provided with a shock absorber mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). There may be.

Further, in the case where the processing device 1 is a device for processing by a milling machine that rotationally drives an end mill type tool 7, the table 3 that supports the jig 5 is a shock absorber mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). It may be configured to include.

Further, in the above embodiment, an example in which the evacuation movement mechanism 21 and the urging mechanism 23 have different configurations is shown, but the evacuation movement mechanism 21 and the urging mechanism 23 are integrated as a buffer mechanism 20. There may be. For example, in the example shown in FIG. 1, the jig 5 itself may be made of an elastic body having a cushioning function (rubber, sponge-like resin material, etc.), or in the example shown in FIG. 3, for example, the spindle of the tool 7. Alternatively, the shank itself may be made of an elastic body having a cushioning function (rubber, sponge-like resin material, or the like).

Further, the processing of the present embodiment is, for example, front milling, end milling, flat milling, plane cutting, side cutting, grooving, lathe (turning), which is cutting (milling) processing (machining processing, milling). Processing (outer rounding, surface cutting, taper cutting, thread cutting, parting off, etc.), drilling, centering (cutting through), etc., and grinding processing (plane grinding, forming grinding, cylindrical grinding, dicing processing, slicing processing, etc.) ) Etc. can be applied.

Further, the cushioning means 10 may be another spring regardless of the coil spring, or may be an elastic member such as a sponge or a resin. Further, it may be buffered by hydraulic pressure or pneumatic pressure. Further, when the jig 5 includes the cushioning means 10, the material of the jig 5 may be made of an elastic body such as a sponge or a resin.

Further, the shock absorber mechanism 20 is not limited to the above example as long as it is a mechanism for advancing machining while retracting one of the tool 7 or the workpiece W in the same direction as the other feeding direction for advancing machining.

Further, for example, the position of the reference portion of the workpiece W is determined by the measuring means (for example, a micrometer, a dial gauge, etc.) of the measuring means 11 at an appropriate timing (for example, at the start of machining, during machining, or at the end of machining). The pressure is appropriately (as needed) detected by measuring at such timings) and fed back to the control means to appropriately control the feed drive means 25, the evacuation movement mechanism 21, the urging mechanism 23, and the like. The processing may be performed while maintaining a predetermined range in which the processing proceeds efficiently.

Further, the pressure at which the tool 7 and the workpiece W come into contact with each other is detected at an appropriate timing and fed back to the control means to appropriately control the feed drive means 25, the evacuation movement mechanism 21, the urging mechanism 23, and the like. The processing may be performed while maintaining the pressure within a predetermined range in which the processing proceeds efficiently.

Further, in the present embodiment, as "processing for reducing a part of the workpiece W", for example, drilling, hollowing out, and reducing the area of the workpiece W in a plan view (shape of the workpiece W in the plane direction). Processing other than polishing processing, such as deformation (reduction) processing (reduction) and shaving processing to deform (reduce) to an arbitrary shape, was exemplified. However, the present invention is not limited to this, and the "processing for reducing the weight of a part of the workpiece W" may include a polishing process for a part or the whole thereof.

Further, the tool 7 is not limited to the single-layer structure made of the above-mentioned aluminum-based material, and may have a laminated structure in which the surface of a base material such as metal or diamond is coated with the above-mentioned aluminum-based material having a desired thickness. Since the aluminum-based material may decrease as the processing progresses, a thickness sufficient for processing is appropriately selected.

Further, the tool 7 contains the above-mentioned aluminum-based material as a main component, and may contain components other than the aluminum-based material. It is desirable that the content of the aluminum-based material is larger than the content of other components (in the case of a plurality of components, any of the other components) as the main component of the aluminum-based material. It is assumed that the content of the aluminum-based material is larger than the content of any of the components of.

Further, in the present embodiment, a part of the workpiece W is reduced while causing a chemical reaction between the tool 7 and the workpiece W, and the tool 7 is also partially reduced in weight with machining. The tool 7 may have a lower hardness than the workpiece W, or may have a higher hardness.

FIG. 5 is a photograph showing a state of processing by the processing apparatus 1 and the processing method of the present embodiment. The tool 7 is an aluminum alloy, and the workpiece W is an industrial diamond (polycrystalline diamond) that has been ground by a conventionally known diamond tool. FIG. 6A is an image of the appearance of the vicinity of the tip of the tool 7 before machining, and FIG. 3B is an image of the surface of the workpiece W before machining. FIG. 3C is an image of a state during machining, and FIG. 3D is an image of a machined surface (contact surface with a workpiece W) taken from the axial direction of the tool 7 after machining. be. As shown in FIG. 3B, the surface of the workpiece W has fine scratches during grinding, but as shown in FIG. CC, the aluminum alloy of the present embodiment is machined by the tool 7. It can be confirmed that the weight loss in the machining thickness direction (axial direction of the tool 7) has progressed in the machining area WA, and the scratches have disappeared. Further, in this example, as shown in FIG. 3D, a part of the tool 7 is also reduced in weight.

<Examination of deposits on tools>
As shown in FIG. 5, when the workpiece W is machined by the machining apparatus 1 (machining method) of the present embodiment, deposits remain on the tool 7. From this, it is considered that a chemical reaction between the tool 7 and the workpiece W occurs in the processing process. Elemental analysis was performed to examine this deposit. The examination results are shown in FIGS. 6 to 8. Here, an aluminum alloy was used as the tool 7, and as the workpiece W, industrial diamond in which diamond powder and tungsten were bonded with cobalt as a binder was used.

First, FIG. 6 is a photograph of the appearance of the tool 7 after machining, FIG. 6A is an image taken from the side surface, and FIG. 6B is a machined surface (workpiece W) from the axial direction. It is an image taken of the contact surface). Then, in FIG. 3B, elemental analysis was performed on the site where black deposits (foreign substances) were present by using an electron probe microanalyzer / Wavelength Dispersive X-ray Spectrometer (EPMA / WDS). FIG. 3C is a secondary electron image of the deposit.

When a substance is irradiated with an electron beam in a vacuum, characteristic X-rays peculiar to the types of secondary electrons and constituent elements are generated. The elemental analysis method using an electron probe microanalyzer is a method for measuring the types and content ratios of constituent elements by measuring the wavelength and intensity of the obtained characteristic X-rays. The measuring device and analysis conditions used in this test are as follows.

Equipment: JXA-8230 manufactured by JEOL, Acceleration voltage: 15 kV, Probe current: 4 x ^10-8 A, Analysis range: ₅ B to ₉₂ U, X-ray spectroscope: Wavelength dispersive type (WDS), Pretreatment: Gold Evaporation (spatter coating)

FIG. 7 is a table showing EPMA semi-quantitative analysis results based on characteristic X-ray intensity at the time of qualitative analysis of deposits, and FIG. 8 is a chart (EPMA / WDS elemental analysis chart) showing measurement results.

As shown in FIG. 7, since aluminum (Al) and oxygen (O) were strongly detected from the portion where the deposit was visually recognized, the main component of the deposit was considered to be an oxide of aluminum. In addition, carbon (C), cobalt (Co) and the like were detected.

The applicant of the present application inferred these results as described in (8) based on the following findings (1) to (7).
(1) Aluminum produces a carbide (aluminum carbide (Al ₄ C ₃ )) with diamond.
(2) While diamond can be worn by the formation of carbide (aluminum carbide), aluminum oxide (alumina) is not reduced by carbon and it is difficult to wear diamond.
(3) Although aluminum carbide is a transparent crystal, it gradually reacts with water, oxygen, and carbon dioxide, so it must be stored in an inert atmosphere such as nitrogen.
(4) Aluminum carbide gradually reacts with moisture (water vapor in the air, etc.) and decomposes while releasing methane (CH ₄ ) to become aluminum hydroxide (Al (OH) ₃ ).
(5) Aluminum carbide gradually reacts with oxygen (O) in the air and releases carbon monoxide (CO) to become aluminum oxide (alumina, Al ₂ O ₃ ).
(6) Aluminum carbide gradually reacts with carbon dioxide in the air and precipitates carbon (C) to become aluminum oxide.
(7) Aluminum carbide gradually reacts with carbon monoxide and precipitates carbon (C) to become aluminum oxide.
(8) According to the present embodiment, when the tool (for example, aluminum alloy) 7 presses the workpiece (for example, industrial diamond) W, the excessive pressure applied to the workpiece W is buffered (low load). By processing, for example, it is considered that the generation of heat due to friction is appropriately suppressed, and the state in which aluminum carbide is produced can be maintained while suppressing (delaying) the production of aluminum oxide as much as possible. It is considered that the processing of diamond-based materials has progressed due to the efficient production (and continuation of production) of aluminum carbide. The generated aluminum carbide reacts with moisture in the air, oxygen, carbon dioxide, carbon monoxide, and cutting oil for cooling (with moisture) during processing, and part of the carbon is gas (methane, carbon monoxide). Etc.), and the balance is believed to be deposited on the tool 7 side as aluminum oxide and / or aluminum hydroxide (as elements, aluminum (Al) and oxygen) and carbon, which is the analysis of the deposits described above. It is consistent with the result.

That is, if this carbon is a component derived from a diamond-based material, it is considered that carbon is deposited as an deposit via aluminum carbide by a chemical reaction between the tool 7 and the workpiece W. As another possibility, the aluminum alloy of the tool 7 may contain carbon, but even if it is, the amount of carbon in that case is usually less than 1%, which is a very small amount. Therefore, it is considered that the amount of carbon (9.7%) in the above analysis result is mainly derived from the diamond-based material.

The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit and technical idea.

1 Machining device 3 Table 5 Jig 7 Tool 9 Driving means 10 Buffering means 11 Measuring means 17 Tool support 20 Buffering mechanism 21 Evacuation movement mechanism 23 Encouragement mechanism 25 Driving means 51 Base 52 Holding part 53 Supporting part 111 Evacuation state detection Means 113 State detection means 115 Calculation means 521 Holding surface 531 Outer cylinder 532 Inner cylinder 533 Elastic member 535 Stopper P0 Return position W Work piece

Claims (10)

A processing device that reduces the weight of a part of the work piece and changes it to a desired shape.
A jig for holding the work piece and
A tool that comes into contact with a part of the workpiece and
A driving means for moving the tool relative to the workpiece,
It has a feed driving means for moving one of the tool and the workpiece in order to move the tool in a desired feed direction with respect to the workpiece.
The work piece is a diamond-based material and is
The tool is made of an aluminum-based material.
A processing device characterized by that. A part of the workpiece is reduced while causing a chemical reaction between the tool and the workpiece.
The processing apparatus according to claim 1. When one of the tool and the workpiece is moved in the feed direction and the other of the tool and the workpiece is retracted and moved in the same direction as the feed direction so that the tool presses the workpiece. A buffer mechanism for cushioning the excess pressure applied to the workpiece is provided.
The processing apparatus according to claim 1 or 2, wherein the processing apparatus is characterized in that. The other side of the tool and the workpiece is retracted and moved in the feed direction so that the relative feed amount between the tool and the workpiece is reduced with respect to the actual feed amount by the feed drive means. Evacuation movement mechanism to make
When the work piece or the tool is moved back and forth by the evacuation movement mechanism, the work piece or the tool that is moved back and forth is provided with an urging mechanism that urges the work piece or the tool in the return movement direction.
The processing apparatus according to claim 1 or 2, wherein the processing apparatus is characterized in that. The driving means ultrasonically vibrates the tool.
The processing apparatus according to any one of claims 1 to 4, wherein the processing apparatus is characterized in that. It is a processing method that reduces the weight of a part of the workpiece made of diamond-based material and changes it to a desired shape.
A process of holding the work piece with a jig and relatively moving the tool made of an aluminum-based material and the work piece.
It comprises a step of moving one of the tool and the work piece in order to move the tool in a desired feed direction with respect to the work piece.
A processing method characterized by that. A part of the workpiece is reduced while causing a chemical reaction between the tool and the workpiece.
The processing method according to claim 6, wherein the processing method is characterized by the above. Move one of the tool and the workpiece in the feed direction to
By retracting and moving the other side of the tool and the workpiece in the same direction as the feed direction, the machining proceeds while buffering the excessive pressure applied to the workpiece when the tool presses the workpiece. ,
The processing method according to claim 6 or 7, wherein the processing method is characterized by the above. The other side of the tool and the work piece is in the feed direction so that the relative feed amount between the tool and the work piece is reduced with respect to the actual feed amount of the tool or the work piece. The process of evacuating and moving to
It comprises a step of urging the workpiece or the tool to be retracted and moved in the return moving direction when the workpiece or the tool is retracted and moved.
The processing method according to claim 6 or 7, wherein the processing method is characterized by the above. The tool is ultrasonically vibrated.
The processing method according to any one of claims 6 to 9, wherein the processing method is characterized by that.

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