JP6755565B1 - Processing equipment and processing method - Google Patents

Processing equipment and processing method Download PDF

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JP6755565B1
JP6755565B1 JP2019209402A JP2019209402A JP6755565B1 JP 6755565 B1 JP6755565 B1 JP 6755565B1 JP 2019209402 A JP2019209402 A JP 2019209402A JP 2019209402 A JP2019209402 A JP 2019209402A JP 6755565 B1 JP6755565 B1 JP 6755565B1
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tool
workpiece
work piece
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machining
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JP2021080134A (en
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直圭 堀川
直圭 堀川
さゆり ターヴァイネン
さゆり ターヴァイネン
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AREUSE CO., LTD.
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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Abstract

【課題】 加工時の工具の押圧力が被加工物の剛性(強度)に対して大きい場合であっても、加工、特に穴開け加工の加工不良を低減するとともに加工効率を向上させることが可能な、加工装置および加工方法を提供する。【解決手段】 加工装置1は、被加工物Wを保持する治具5と、被加工物Wの一部に当接させる工具7と、工具7を被加工物Wに対して相対移動させる駆動手段9と、被加工物Wに対して工具7を所望の送り方向に移動させるべく、工具7および被加工物Wの一方を移動させる送り駆動手段25と、を有し、被加工物Wの一部を減量させて所望の形状に変化させるものであり、被加工物Wはガラス系材料であり、工具7はジルコニアにより構成される。【選択図】図1PROBLEM TO BE SOLVED: To reduce machining defects in machining, particularly drilling, and improve machining efficiency even when the pressing force of a tool during machining is large with respect to the rigidity (strength) of the workpiece. A processing device and a processing method are provided. SOLUTION: A processing apparatus 1 has a jig 5 for holding a work piece W, a tool 7 for abutting a part of the work piece W, and a drive for moving the tool 7 relative to the work piece W. The means 9 and the feed driving means 25 for moving one of the tool 7 and the workpiece W in order to move the tool 7 with respect to the workpiece W in a desired feed direction, and the workpiece W has A part of the weight is reduced to change the shape to a desired shape, the workpiece W is a glass-based material, and the tool 7 is made of zirconia. [Selection diagram] Fig. 1

Description

本発明は、例えば、ガラスなどの部材の加工装置および加工方法に関する。 The present invention relates to, for example, a processing apparatus and a processing method for a member such as glass.

従来、切削工具の材質としてはダイヤモンド、セラミックス、超硬合金など様々なものがあり、被加工物に応じて選択されている。 Conventionally, there are various materials for cutting tools such as diamond, ceramics, and cemented carbide, which are selected according to the workpiece.

例えば、ガラスの切削等の加工においては、ダイヤモンド工具が用いられることが一般的である。このダイヤモンド工具はガラスの表面において滑り易いため、加工の際にはガラスに対してダイヤモンド工具を強い力で押圧しながら切削を行なう必要がある。 For example, a diamond tool is generally used in processing such as cutting glass. Since this diamond tool is slippery on the surface of glass, it is necessary to perform cutting while pressing the diamond tool against the glass with a strong force during processing.

ところで、ガラス板の一部に貫通穴を形成する穴開け加工の場合には、ダイヤモンド工具の先端がガラス板の表面に当接するように配置して押圧しながら加工を行なうが、その押圧方向(工具が当接する面の裏側)にはガラス板の支持部材(治具)を配置することはできない場合がある。この場合は、少なくとも穴開け部分を除いて、つまり穴開け部分より外側の領域(ガラス板の周辺部分)を治具によって保持した状態で加工する必要がある。 By the way, in the case of drilling to form a through hole in a part of the glass plate, the tip of the diamond tool is arranged so as to be in contact with the surface of the glass plate and the processing is performed while pressing, but the pressing direction ( It may not be possible to place a glass plate support member (jig) on the back side of the surface that the tool comes into contact with. In this case, it is necessary to process at least excluding the drilled portion, that is, in a state where the region outside the drilled portion (the peripheral portion of the glass plate) is held by the jig.

特開2013−53019号公報Japanese Unexamined Patent Publication No. 2013-53019

しかしながら、穴開け部分が支持されていない状態では、ガラス板が薄くなるとダイヤモンド工具の押圧力によってガラス板が破損してしまう(所望の穴開け領域以外に破損が及んでしまう)問題がある。 However, when the drilling portion is not supported, there is a problem that when the glass plate becomes thin, the glass plate is damaged by the pressing force of the diamond tool (damage extends to areas other than the desired drilling region).

また、ダイヤモンド工具の押圧力をガラス板が割れない程度に維持しながら研削する方法もあるが、その場合加工には膨大な時間がかかり、実用的ではない。 There is also a method of grinding while maintaining the pressing force of the diamond tool to the extent that the glass plate does not break, but in that case, the processing takes an enormous amount of time and is not practical.

このように、ガラス板に対する穴開け加工は、その板厚が薄い場合には特に、非常に難易度が高い問題があった。 As described above, the drilling process for the glass plate has a problem that it is very difficult, especially when the plate thickness is thin.

またこれは、ガラス板をダイヤモンド工具で加工する場合に限らず、加工時の工具の押圧力が被加工物の剛性(強度)に対して大きい場合において、同様に生じる問題である。 Further, this is not limited to the case where the glass plate is machined with a diamond tool, but is also a problem that occurs when the pressing force of the tool during machining is large with respect to the rigidity (strength) of the workpiece.

本発明は、上記課題を鑑みてなされたものであり、加工時の工具の押圧力が被加工物の剛性(強度)に対して大きい場合であっても、加工、特に穴開け加工の加工不良を低減するとともに加工効率を向上させることが可能な、加工装置および加工方法を提供するものである。 The present invention has been made in view of the above problems, and even when the pressing force of the tool during machining is large with respect to the rigidity (strength) of the workpiece, machining defects, especially drilling, are performed. It is an object of the present invention to provide a processing apparatus and a processing method capable of reducing the number of items and improving the processing efficiency.

本発明は、被加工物の一部を減量させて所望の形状に変化させる加工装置であって、前記被加工物を保持する治具と、前記被加工物の一部に当接させる工具と、前記工具を前記被加工物に対して相対移動させる駆動手段と、前記被加工物に対して前記工具を所望の送り方向に移動させるべく、前記工具および前記被加工物の一方を移動させる送り駆動手段と、を有し、前記被加工物はガラス系材料であり、前記工具はジルコニアにより構成され、前記工具と前記被加工物による化学的反応を生じさせながら該被加工物の一部を減量させる、ことを特徴とする加工装置に係るものである。 The present invention is a processing device that reduces a part of a work piece to change it into a desired shape, and comprises a jig for holding the work piece and a tool for contacting a part of the work piece. , A driving means for moving the tool relative to the work piece, and a feed for moving one of the tool and the work piece in order to move the tool in a desired feed direction with respect to the work piece. It has a driving means, the work piece is a glass-based material, the tool is made of zirconia, and a part of the work piece is formed while causing a chemical reaction between the tool and the work piece. It relates to a processing apparatus characterized in that the weight is reduced .

また、本発明は、ガラス系材料の被加工物の一部を減量させて所望の形状に変化させる加工方法であって、前記被加工物を治具により保持し、ジルコニアからなる工具と前記被加工物とを相対移動させる工程と、前記被加工物に対して前記工具を所望の送り方向に移動させるべく、前記工具および前記被加工物の一方を移動させる工程と、を有し、前記工具と前記被加工物による化学的反応を生じさせながら該被加工物の一部を減量させる、
ことを特徴とする加工方法に係るものである。
Further, the present invention is a processing method for reducing a part of a work piece of a glass-based material to change it into a desired shape, in which the work piece is held by a jig, a tool made of zirconia, and the work piece. a step for relatively moving the workpiece, the order to move the tool in the desired feed direction relative to the workpiece, have a, a step of moving one of said tool and said workpiece, said tool And a part of the work piece is reduced while causing a chemical reaction with the work piece.
It relates to a processing method characterized by the above.

本発明によれば、加工時の工具の押圧力が被加工物の剛性(強度)に対して大きい場合であっても、加工、特に穴開け加工の加工不良を低減するとともに加工効率を向上させることが可能な、加工装置および加工方法を提供することが可能となる。 According to the present invention, even when the pressing force of the tool during machining is large with respect to the rigidity (strength) of the workpiece, machining defects in machining, especially drilling, are reduced and machining efficiency is improved. It becomes possible to provide a processing apparatus and a processing method capable of providing a processing device and a processing method.

本発明の実施形態の加工装置を示す概要図であり、(A)側面図、(B)一部側面図、(C)一部上面図である。It is a schematic view which shows the processing apparatus of embodiment of this invention, is (A) side view, (B) partial side view, (C) partial top view. 本発明の実施形態の工具を説明する図であり、(A)側面図、(B)側面図、(C)断面図である。It is a figure explaining the tool of embodiment of this invention, is (A) side view, (B) side view, (C) sectional view. 本発明の実施形態の加工装置を示す概要図であり、(A)側面図、(B)治具の上面図、(C)治具の側面図である。It is a schematic view which shows the processing apparatus of embodiment of this invention, is (A) side view, (B) top view of a jig, (C) side view of a jig. 本発明の実施形態に係る加工方法を説明する側面概要図である。It is a side schematic diagram explaining the processing method which concerns on embodiment of this invention.

以下、図面を参照して、本発明の実施形態に係る加工装置1および加工方法について詳細に説明する。 Hereinafter, the processing apparatus 1 and the processing method according to the embodiment of the present invention will be described in detail with reference to the drawings.

<第1実施形態>
図1は、本実施形態の加工装置1について説明する概要図であり、同図(A)が加工装置1の側面概要図であり、同図(B)は被加工物Wおよび加工対象領域WAを示す側面図、同図(C)は同図(B)の上面図である。また、図2は工具7について説明する図であり、同図(A)が工具7および駆動手段9を示す側面図、同図(B)が工具7の形状を示す側面図、同図(C)は同図(B)の断面図である。
<First Embodiment>
1A and 1B are schematic views for explaining the processing apparatus 1 of the present embodiment, FIG. 1A is a schematic side view of the processing apparatus 1, and FIG. 1B is a work piece W and a processing target area WA. A side view showing the above, and the figure (C) is a top view of the figure (B). 2A and 2B are views for explaining the tool 7, in which FIG. 2A is a side view showing the tool 7 and the driving means 9, and FIG. 2B is a side view showing the shape of the tool 7 and FIG. 2C. ) Is a cross-sectional view of the figure (B).

図1(A)に示すように、本実施形態の加工装置1は、被加工物Wを保持する治具5と、被加工物Wの一部に当接させる工具7と、駆動手段9と、送り駆動手段25を有し、被加工物Wの一部を減量させて所望の形状に変化させる加工を行なうものである。被加工物Wの一部を減量させる加工とは例えば、被加工物Wの一面側から他方の面側までを貫通させる穴開け加工、被加工物Wの一面側から他方の面までの厚みを減少させるも他方の面側まで貫通はさせない(被加工物Wの厚み方向に凹凸を形成する)刳り抜き加工、被加工物の平面視における面積を減少させる(被加工物Wの平面方向の形状を縮小する)変形(縮小)加工、削り加工などである。ここでは同図(B)、同図(C)に示すように、板状の被加工物Wの一部に、円形状に穴開け加工を施す場合を例示する。同図(B)、同図(C)では加工対象領域(穴開けされる領域)WAを大破線で示している。 As shown in FIG. 1A, the processing apparatus 1 of the present embodiment includes a jig 5 for holding the workpiece W, a tool 7 for abutting a part of the workpiece W, and a driving means 9. The feed driving means 25 is provided, and a part of the workpiece W is reduced in weight to be changed into a desired shape. The processing for reducing a part of the workpiece W is, for example, a drilling process for penetrating the workpiece W from one surface side to the other surface side, and a thickness from one surface side to the other surface of the workpiece W. Although it is reduced, it does not penetrate to the other surface side (concavities and convexities are formed in the thickness direction of the workpiece W), and the area of the workpiece W in the plan view is reduced (shape of the workpiece W in the plane direction). Deformation (reduction) processing, shaving processing, etc. Here, as shown in FIGS. (B) and (C), a case where a part of the plate-shaped workpiece W is drilled in a circular shape is illustrated. In FIGS. (B) and (C), the area to be machined (area to be drilled) WA is indicated by a large broken line.

この例では、被加工Wはガラス系材料であり、具体的には、ホウケイ酸ガラス、ソーダ石灰ガラス(ソーダライムガラス)、鉛ガラス、アルカリバリウムケイ酸ガラス、アルミノケイ酸ガラス、または、合成溶融シリカなどであり、好適にはソーダ石灰ガラス(ソーダライムガラス)である。また、工具7はジルコニア(二酸化ジルコニウム(ZrO2)により構成される。 In this example, the W to be processed is a glass-based material, and specifically, borosilicate glass, soda-lime glass (soda-lime glass), lead glass, alkali barium silicate glass, aluminosilicate glass, or synthetic molten silica. Such as, preferably soda-lime glass (soda-lime glass). Further, the tool 7 is made of zirconia (zirconium dioxide (ZrO2)).

治具5は、少なくとも加工対象領域WAを除き、その周囲の被加工物Wを保持(例えば把持)する。そして工具7は、被加工物Wの一方の面(第一の面Sf1)側に配置され、加工の際には第一の面Sf1に当接し、適宜の押圧力を付与しながら他方の面(第二の面Sf2)に向かって加工を進める。 The jig 5 holds (for example, grips) the workpiece W around the work piece W except at least the work target area WA. The tool 7 is arranged on one surface (first surface Sf1) side of the workpiece W, abuts on the first surface Sf1 during machining, and applies an appropriate pressing force to the other surface. Processing proceeds toward (second surface Sf2).

工具7は、図2(A)に示すように一例として円柱状(円筒状)あるいは、同図(B)および同図(C)に示すようにコア(カップ)形状である。具体的には、基部7Aと拡径部7Bを有し、基部7Aは円柱(円筒)状であり、拡径部7Bは基部7Aの先端(被加工物Wに当接する先端)に設けられ、基部7Aよりも拡径されるとともに先端側が開口した略円筒状である。 As an example, the tool 7 has a cylindrical shape (cylindrical shape) as shown in FIG. 2 (A), or a core (cup) shape as shown in FIGS. (B) and (C). Specifically, it has a base portion 7A and a diameter-expanded portion 7B, the base portion 7A has a cylindrical shape, and the diameter-expanded portion 7B is provided at the tip of the base portion 7A (the tip that abuts on the workpiece W). It has a substantially cylindrical shape with a diameter larger than that of the base 7A and an opening on the tip side.

なお、工具7の形状は図示のものに限らず、例えば、フラットエンドミル、ボールエンドミル、あるいはテーパエンドミルなどであってもよい。 The shape of the tool 7 is not limited to the one shown in the drawing, and may be, for example, a flat end mill, a ball end mill, a taper end mill, or the like.

駆動手段9は、工具7と被加工物Wとを物理的に相対移動させることで、工具7によって被加工物Wの一部を減量するように駆動させる手段である。この例の駆動手段9は工具7と被加工物Wを相対回転させる回転駆動手段であり、例えば、工具7あるいは工具7の主軸を回転駆動するモータである。駆動手段9により、工具7は、鉛直なZ軸を中心にスピンドル50により回転駆動される。また、スピンドル50は例えば、超音波振動手段55を備えると望ましい。超音波振動手段55は、超音波振動子56と、超音波ホーン57を有する。超音波振動子56は、軸方向に超音波振動を生じさせる。超音波ホーン57は、超音波振動子56で生じる超音波振動に共振して、当該超音波振動を増幅させる。そして、超音波ホーン57は、増幅させた軸方向の超音波振動を工具7に伝達する。つまり駆動手段9は、工具7を超音波振動させながら回転駆動させる。 The driving means 9 is a means for driving the tool 7 and the workpiece W so as to reduce the weight of a part of the workpiece W by physically moving the tool 7 and the workpiece W relative to each other. The drive means 9 in this example is a rotary drive means that rotates the tool 7 and the workpiece W relative to each other, and is, for example, a motor that rotationally drives the tool 7 or the spindle of the tool 7. By the driving means 9, the tool 7 is rotationally driven by the spindle 50 about the vertical Z axis. Further, it is desirable that the spindle 50 includes, for example, an ultrasonic vibration means 55. The ultrasonic vibration means 55 has an ultrasonic oscillator 56 and an ultrasonic horn 57. The ultrasonic vibrator 56 causes ultrasonic vibration in the axial direction. The ultrasonic horn 57 resonates with the ultrasonic vibration generated by the ultrasonic vibrator 56 and amplifies the ultrasonic vibration. Then, the ultrasonic horn 57 transmits the amplified axial ultrasonic vibration to the tool 7. That is, the driving means 9 rotationally drives the tool 7 while ultrasonically vibrating it.

この工具7が当接し、押圧されることにより被加工物Wの一部(被加工領域WA)は、この例では、工具7の回転方向(図1(A)のX軸−Y軸方向)に減量する。 When the tool 7 comes into contact with the tool 7 and is pressed, a part of the work piece W (work area WA) is, in this example, the rotation direction of the tool 7 (X-axis-Y-axis direction in FIG. 1A). Weight loss.

図1を参照して、送り駆動手段25は、工具7と被加工物Wとが互い押圧される方向に相対移動させる手段であり、工具7を送る手段あるいは被加工物Wを送る手段である。押圧する方向は、この例では、工具7の主軸の延在方向、すなわち鉛直方向(Z軸方向、第一の面Sf1から第二の面Sf2に至る方向)である。 With reference to FIG. 1, the feed driving means 25 is a means for relatively moving the tool 7 and the workpiece W in a direction in which they are pressed against each other, and is a means for feeding the tool 7 or a means for feeding the workpiece W. .. In this example, the pressing direction is the extending direction of the main shaft of the tool 7, that is, the vertical direction (Z-axis direction, the direction from the first surface Sf1 to the second surface Sf2).

つまり本実施形態の加工装置1は、工具7が被加工物Wに当接し互いに押圧した状態で、駆動手段9によって工具7と被加工物Wを工具7の回転駆動方向(X軸−Y軸方向)に相対回転しつつ工具7を超音波振動させることで被加工物Wを回転駆動方向(X軸−Y軸方向)に減量する。回転駆動方向の減量が所定量まで進むと(減量する分がなくなり)減量が進行しなくなるので、加工装置1は、工具7と被加工物Wが互いに押圧状態となるように送り駆動手段25によって工具7と被加工物WをZ軸方向に相対移動(押圧)し、鉛直方向に被加工物Wの減量を進行させる。つまり加工装置1は、工具7を回転駆動して被加工物Wを或る方向に(例えば面状に)減量しながら、工具7をさらに別の方向に送る(押出す)ことで例えば、当該別の方向(例えば、深さ(厚み)方向)に減量を進行させるものである。以下、工具7が回転駆動する方向(X軸−Y軸方向)を減量方向といい、工具7と被加工物Wの押圧方向(Z軸方向)を送り方向という。 That is, in the processing apparatus 1 of the present embodiment, the tool 7 and the workpiece W are driven by the driving means 9 in the rotational driving direction (X-axis-Y-axis) of the tool 7 in a state where the tool 7 is in contact with the workpiece W and pressed against each other. The work piece W is reduced in the rotation drive direction (X-axis-Y-axis direction) by ultrasonically vibrating the tool 7 while rotating relative to the direction). When the weight loss in the rotation drive direction progresses to a predetermined amount (the amount of weight loss disappears), the weight loss does not proceed. Therefore, the machining apparatus 1 uses the feed drive means 25 so that the tool 7 and the workpiece W are pressed against each other. The tool 7 and the workpiece W are relatively moved (pressed) in the Z-axis direction, and the weight loss of the workpiece W is advanced in the vertical direction. That is, the machining apparatus 1 rotates the tool 7 to reduce the weight of the workpiece W in a certain direction (for example, in a planar shape), and sends (extrudes) the tool 7 in a further direction, for example. Weight loss proceeds in another direction (for example, the depth (thickness) direction). Hereinafter, the direction in which the tool 7 is rotationally driven (X-axis-Y-axis direction) is referred to as a weight loss direction, and the pressing direction (Z-axis direction) between the tool 7 and the workpiece W is referred to as a feeding direction.

また、加工装置1は、緩衝機構20を有すると望ましい。緩衝機構20は、工具7が被加工物Wと当接する際に被加工物Wにかかる圧力(押圧力)を緩衝させるものである。詳細については後述するが、緩衝機構20は例えば、工具7および被加工物Wの一方を送り方向に移動し、工具7および被加工物Wの他方を送り方向と同方向に退避移動させることにより、工具7が被加工物Wを押圧する際に、当該被加工物Wにかかる過剰圧力を緩衝させる。 Further, it is desirable that the processing device 1 has a buffer mechanism 20. The buffer mechanism 20 buffers the pressure (pressing pressure) applied to the workpiece W when the tool 7 comes into contact with the workpiece W. Although the details will be described later, for example, the buffer mechanism 20 moves one of the tool 7 and the workpiece W in the feed direction, and retracts and moves the other of the tool 7 and the workpiece W in the same direction as the feed direction. When the tool 7 presses the workpiece W, the excessive pressure applied to the workpiece W is buffered.

さらに、加工装置1は、ジルコニアで形成した工具7を用いて被加工物Wであるソーダ石灰ガラスに当接させ、少なくとも一方を減量(磨耗)させながら加工を進める。すなわち、本実施形態の加工装置1は、超音波振動する工具7と被加工物Wとを適宜の圧力で物理的に押圧して加工を行うが、その際、被加工物Wにかかる過剰な圧力(押圧力)を緩衝させながら、被加工物Wの減量方向に相対移動させる。そうすることで、工具7と被加工物Wの物理的な相対移動(減量方向の移動と送り方向の移動)に加えて、工具7と被加工物Wが相互に作用を及ぼし合う接触面(及びその近傍)において主として化学的反応を生じさせながら減量するものである。これにより、被加工物Wを破損することなく加工対象領域のみを減量させて所望の形状に変化させることができる。ここで、本実施形態における「主として化学的反応を生じさせながら減量(加工)する」とは、例えば、減量(加工)の少なくとも50%以上が化学的反応に起因する事象によるものである(化学的反応による減量の程度が減量全体の50%を占める)ことをいい、100%化学的反応に起因する事象によるものであってもよいし、減量(加工)の一部(50%未満)に機械的な切削等が含まれる場合があってもよい。 Further, the processing apparatus 1 uses a tool 7 formed of zirconia to bring it into contact with the soda lime glass which is the work piece W, and proceeds with processing while reducing (wearing) at least one of them. That is, the processing apparatus 1 of the present embodiment physically presses the tool 7 that vibrates ultrasonically and the workpiece W with an appropriate pressure to perform machining, but at that time, the processing apparatus W is excessively applied to the workpiece W. While buffering the pressure (pressing pressure), the workpiece W is relatively moved in the weight loss direction. By doing so, in addition to the physical relative movement of the tool 7 and the workpiece W (movement in the weight loss direction and movement in the feed direction), the contact surface (movement in the weight loss direction and the movement in the feed direction) in which the tool 7 and the workpiece W interact with each other ( And its vicinity), the weight is reduced mainly while causing a chemical reaction. As a result, it is possible to reduce the weight of the work piece W and change it to a desired shape without damaging the work piece W. Here, "weight loss (processing) while mainly causing a chemical reaction" in the present embodiment is, for example, due to an event in which at least 50% or more of the weight loss (processing) is caused by the chemical reaction (chemistry). The degree of weight loss due to the target reaction accounts for 50% of the total weight loss), and it may be due to an event caused by a 100% chemical reaction, or it may be a part (less than 50%) of the weight loss (processing). Mechanical cutting and the like may be included.

図3を参照して、加工装置1の具体的な一例について説明する、同図は加工装置1の側面概要図である。なお、以下の実施形態では、加工装置1が、例えばドリルなどの工具7を回転駆動するフライス盤などの装置である場合を例に説明する。 A specific example of the processing apparatus 1 will be described with reference to FIG. 3, which is a side view of the processing apparatus 1. In the following embodiment, a case where the processing device 1 is a device such as a milling machine for rotationally driving a tool 7 such as a drill will be described as an example.

本実施形態の加工装置1は、テーブル3と、治具5と、退避移動機構21と、付勢機構23と、ジルコニアからなる工具(加工具)7と、工具7の駆動手段9と、送り駆動手段25と、工具7を支持する工具支持部17と制御手段などを有する。 The processing device 1 of the present embodiment includes a table 3, a jig 5, a retracting movement mechanism 21, an urging mechanism 23, a tool (machining tool) 7 made of zirconia, a driving means 9 of the tool 7, and a feed. It has a drive means 25, a tool support portion 17 for supporting the tool 7, a control means, and the like.

テーブル3は例えば、被加工物(例えば、ソーダ石灰ガラス)Wを水平なX軸−Y軸面内で移動させるX軸−Y軸テーブル(ステージ)である。 The table 3 is, for example, an X-axis-Y-axis table (stage) for moving a work piece (for example, soda-lime glass) W in a horizontal X-axis-Y-axis plane.

治具5は、テーブル3上に設けられて被加工物Wを保持(支持)する手段であり、同図(B)、同図(C)に示すように例えば、基台51と、保持部52と、支持部53などを有する。ここでは一例として被加工物Wに穴開け加工を施す場合の治具5を示しており、例えば少なくとも加工対象領域WAを除き、その周囲の被加工物Wを保持(例えば把持)可能なように、中央部分が開口した額縁形状を有している(同図(B))。なお、同図(A)では被加工物Wの保持状態を示すために治具5を同図(B)のa−a線の断面図で示している。 The jig 5 is a means for holding (supporting) the workpiece W provided on the table 3, and as shown in FIGS. (B) and (C), for example, a base 51 and a holding portion. It has 52, a support portion 53, and the like. Here, as an example, a jig 5 for drilling a work piece W is shown so that the work piece W around the work piece W can be held (for example, gripped) except at least the work target area WA. , Has a frame shape with an open central portion (Fig. (B)). In the figure (A), the jig 5 is shown in a cross-sectional view taken along the line aa in the figure (B) in order to show the holding state of the workpiece W.

また、本実施形態の治具5は一例として緩衝機構20を備える。緩衝機構20は、例えば、退避移動機構21と、付勢機構23を含む機構である。退避移動機構21は、送り駆動手段25による実際の送り量に対して、工具7と被加工物Wの間の相対的な送り量が減少するように、工具7および被加工物Wの他方を送り方向に退避移動させる機構である。また、付勢機構23は、退避移動機構21により被加工物Wまたは工具7が退避移動する際、退避移動する被加工物Wまたは工具7を復帰移動方向に付勢する機構である。緩衝機構20については後に詳述する。 Further, the jig 5 of the present embodiment includes a buffer mechanism 20 as an example. The buffer mechanism 20 is, for example, a mechanism including a retracting movement mechanism 21 and an urging mechanism 23. The retracting movement mechanism 21 uses the other of the tool 7 and the workpiece W so that the relative feed amount between the tool 7 and the workpiece W decreases with respect to the actual feed amount by the feed driving means 25. It is a mechanism that retracts and moves in the feed direction. Further, the urging mechanism 23 is a mechanism that urges the workpiece W or the tool 7 to be retracted and moved in the return moving direction when the workpiece W or the tool 7 is retracted and moved by the retracting and moving mechanism 21. The buffer mechanism 20 will be described in detail later.

基台51には例えば、適宜の位置に支持部53が立設され、支持部53の上端部には例えば平板の保持部52が設けられる。この例では、保持部52は平面視において外形が矩形状(正方形状)の額縁形状であり、支持部53は、保持部52の外周付近の四隅に対応する位置の4箇所に設けられる場合を説明する。なお、保持部52の外形状は、この例に限らず、長辺と短辺を有する長方形状や円形状であってもよい。いずれの場合も保持部52は、被加工物Wの少なくとも外縁部を全体的に(あるいは選択的に)保持できる形状を有し、その内側(内周側)で被加工物Wを当接保持(支持)する。また、以下の例では保持部52の上面側(同図(C)のZ軸方向上面側)を説明の便宜上、保持面521と称する。 For example, a support portion 53 is erected on the base 51 at an appropriate position, and a flat plate holding portion 52 is provided at the upper end portion of the support portion 53, for example. In this example, the holding portion 52 has a rectangular (square) frame shape in a plan view, and the supporting portions 53 are provided at four positions corresponding to the four corners near the outer periphery of the holding portion 52. explain. The outer shape of the holding portion 52 is not limited to this example, and may be a rectangular shape or a circular shape having a long side and a short side. In either case, the holding portion 52 has a shape capable of holding at least the outer edge portion of the workpiece W as a whole (or selectively), and holds the workpiece W in contact with the inside (inner peripheral side) thereof. (To support. Further, in the following example, the upper surface side of the holding portion 52 (the upper surface side in the Z-axis direction in FIG. 3C) is referred to as a holding surface 521 for convenience of explanation.

なお、被加工物Wの加工の態様によっては、保持部52は額縁形状でなくてもよい。例えば、被加工物Wを厚み方向(図3のZ軸方向)に貫通しない刳り貫き加工の場合には、保持部52は(開口部を有しない)平板状であってもよい。 The holding portion 52 does not have to have a frame shape depending on the processing mode of the workpiece W. For example, in the case of hollowing processing in which the workpiece W does not penetrate in the thickness direction (Z-axis direction in FIG. 3), the holding portion 52 may have a flat plate shape (having no opening).

また、支持部53の配置およびその数は、保持部52の形状に応じて、保持部52の両端に対応する2箇所でもよいし、中央に対応する1箇所でもよい。 Further, the arrangement and the number of the support portions 53 may be two locations corresponding to both ends of the holding portion 52 or one location corresponding to the center, depending on the shape of the holding portion 52.

また、後に詳述するが、本実施形態の治具5は、保持部52が基台51に対して、工具7の主軸の延在方向(この例では、鉛直方向(図示のZ軸方向)に相対的に移動可能に構成されている。 Further, as will be described in detail later, in the jig 5 of the present embodiment, the holding portion 52 is in the extending direction of the spindle of the tool 7 with respect to the base 51 (in this example, the vertical direction (Z-axis direction in the drawing)). It is configured to be relatively movable.

駆動手段9は、例えば、工具7と被加工物Wを減量方向に相対移動させる(相対回転させる回転駆動手段であり、図1および図2に示した構成と同様である。駆動手段9により、工具7は、鉛直なZ軸を中心にスピンドルにより回転駆動されるとともに、超音波振動される。 The drive means 9 is, for example, a rotary drive means for relatively moving the tool 7 and the workpiece W in the weight loss direction (relative rotation, and has the same configuration as shown in FIGS. 1 and 2.) By the drive means 9. The tool 7 is rotationally driven by a spindle about a vertical Z-axis and is ultrasonically vibrated.

送り駆動手段25は、この例では、被加工物Wに対して工具7を所望の送り方向に移動させる手段であり、例えば、工具7を支持(保持)する工具支持部17に設けられる。工具支持部17は一例として、Z軸方向に移動するZ軸送りステージであり、送り方向は、この例では、工具7の主軸の延在方向、すなわち鉛直方向(図示のZ軸方向、治具5の保持部52の面に垂直な方向)である。 In this example, the feed driving means 25 is a means for moving the tool 7 in a desired feed direction with respect to the workpiece W, and is provided on, for example, a tool support portion 17 that supports (holds) the tool 7. As an example, the tool support portion 17 is a Z-axis feed stage that moves in the Z-axis direction, and in this example, the feed direction is the extending direction of the spindle of the tool 7, that is, the vertical direction (Z-axis direction in the figure, jig). (Direction perpendicular to the surface of the holding portion 52 of 5).

また、本実施形態の加工装置1は、計測手段11を備えていると望ましい。計測手段11は例えば、退避移動機構21による退避状態を検出する退避状態検出手段111と、送り駆動手段25による実際の送り状態を検出する検出する送り状態検出手段113と、退避状態と送り状態の相対差から、工具7と被加工物Wの相対的な送り量を算出する計算手段115などを有している。計測手段11については、後に詳述する。 Further, it is desirable that the processing apparatus 1 of the present embodiment includes the measuring means 11. The measuring means 11 includes, for example, a retracted state detecting means 111 that detects a retracted state by the retracted moving mechanism 21, a feed state detecting means 113 that detects an actual feed state by the feed driving means 25, and a retracted state and a feed state. It has a calculation means 115 and the like for calculating the relative feed amount of the tool 7 and the workpiece W from the relative difference. The measuring means 11 will be described in detail later.

これら加工装置1の各部は、制御手段(不図示)によって統括的に制御される。制御手段は、CPU、RAM、及びROMなどから構成され、各種制御を実行する。CPUは、いわゆる中央演算処理装置であり、各種プログラムが実行されて各種機能を実現する。RAMは、CPUの作業領域として使用される。ROMは、CPUで実行される基本OSやプログラムを記憶する。 Each part of these processing devices 1 is collectively controlled by control means (not shown). The control means is composed of a CPU, RAM, ROM, and the like, and executes various controls. The CPU is a so-called central processing unit, and various programs are executed to realize various functions. The RAM is used as a work area of the CPU. The ROM stores the basic OS and programs executed by the CPU.

制御手段は、テーブル(X軸−Y軸テーブル)3と工具支持部(Z軸送りステージ)17とを数値制御する不図示の数値制御手段(数値制御装置)を含む。数値制御装置により、工具(砥石)7をスピンドルによりZ軸を中心に高速回転させるとともに回転トルク等が制御され、被加工物Wを水平なX−Y面内で移動させて回転する工具7に接触させることにより、被加工物Wを減量し、所望の形状に加工することができる。 The control means includes a numerical control means (numerical control device) (not shown) that numerically controls the table (X-axis-Y-axis table) 3 and the tool support portion (Z-axis feed stage) 17. The numerical control device rotates the tool (grinding stone) 7 at high speed around the Z axis by the spindle, and the rotation torque and the like are controlled to move the workpiece W in the horizontal XY plane to rotate the tool 7. By bringing them into contact with each other, the work piece W can be reduced in weight and processed into a desired shape.

本実施形態の加工装置1は、工具7が被加工物Wの被加工部位を押圧する際に当該被加工部位にかかる過剰圧力を緩衝させながら加工を進行させて、所望の形状になるまで被加工物Wを減量するものである。換言すると、工具7が被加工物Wの被加工部位を押圧する際の圧力を、加工が進行する所定範囲内に維持しながら、所望の形状になるまで被加工物Wを減量するものである。 In the processing apparatus 1 of the present embodiment, when the tool 7 presses the workpiece W to be processed, the machining proceeds while buffering the excessive pressure applied to the workpiece W until a desired shape is obtained. The weight of the work piece W is reduced. In other words, the amount of the workpiece W is reduced until the desired shape is obtained while maintaining the pressure when the tool 7 presses the workpiece W on the workpiece W within a predetermined range in which the machining proceeds. ..

より具体的には、工具7または被加工物Wのうち一方を、加工を進行させるための他方の送り方向と同方向に退避させながら加工を進行させることで工具7が被加工部位を押圧する際に被加工部位にかかる過剰圧力を緩衝させるものであり、これにより工具7と被加工部位が当接する圧力(押圧力)を加工が効率よく進行する所定範囲内に維持しながら加工を行うことができる。 More specifically, the tool 7 presses the work portion by advancing the machining while retracting one of the tool 7 or the workpiece W in the same direction as the other feed direction for advancing the machining. The excess pressure applied to the part to be machined is buffered, and the pressure (pushing pressure) at which the tool 7 and the part to be machined come into contact with each other is maintained within a predetermined range in which the machining proceeds efficiently. Can be done.

ここで、被加工物Wであるソーダ石灰ガラスは従来では、ダイヤモンド工具を用いて加工を行なっていた。しかしながら、工具がソーダ石灰ガラスの表面で滑り易く、これを防止するために、ダイヤモンド工具を相当の圧力で押し付ける必要があった。このため、ソーダ石灰ガラスが薄い場合や、穴開け加工など、工具の送り方向に支持(治具、テーブルなど)が配置できない加工においてはソーダ石灰ガラスが破損するなど加工が大変困難であった。 Here, the soda lime glass, which is the workpiece W, has conventionally been processed by using a diamond tool. However, the tool is slippery on the surface of the soda lime glass, and in order to prevent this, it was necessary to press the diamond tool with a considerable pressure. For this reason, when the soda lime glass is thin, or when the support (jig, table, etc.) cannot be arranged in the feed direction of the tool such as drilling, the soda lime glass is damaged and the processing is very difficult.

しかしながら、本願出願人は、ジルコニアを超音波振動させながら適宜の圧力で(過剰な圧力を逃がしながら)ガラス系材料(ソーダ石灰ガラスなど)に当接させることにより、少なくとも一方が減量(磨耗)することを見出した。これは、ガラスの表面が高温(600℃〜700℃)になることなどから、超音波振動するジルコニアとソーダ石灰ガラスとの間に化学的反応が生じることで、少なくとも一方(材料の一部)が減量(磨耗)するものと考えられる。より詳細には、当接した工具7と被加工物Wの材料同士(例えば、ジルコニアとソーダ石英ガラス)が分子レベル(または原子レベル)で化学的に結合し、一旦接合(接着)した状態から超音波振動によって材料同士が引き離されることで一方の材料(例えば被加工物Wの材料)の一部が他方の材料(例えば工具7の材料)に接合(接着)した状態で引き剥がされ、一方の材料が減量すると考えられる。なお、材料によっては、両者が互いに減量する(減量の程度が異なる)場合もある。このような知見から、工具7と被加工物Wは、互いに化学的な結合が可能な材料であるとともに、工具7は結合後に剥離(離脱)しにくい材料(例えば、ジルコニア)を選択し、被加工物Wは工具7に比べて結合後に剥離(離脱)しやすい材料(例えば、ガラス系材料(ソーダ石灰ガラスなど))を選択することが望ましいといえる。また、水分を加えることでより効果的に加工を進行させることができる場合もある。 However, the applicant of the present application reduces the weight (wear) of at least one of the zirconia by bringing the zirconia into contact with a glass-based material (soda-lime glass, etc.) at an appropriate pressure (while releasing excessive pressure) while ultrasonically vibrating. I found that. This is because the surface of the glass becomes hot (600 ° C to 700 ° C) and a chemical reaction occurs between the ultrasonically vibrating zirconia and soda-lime glass, which causes at least one (a part of the material). Is considered to be weight loss (wear). More specifically, from the state in which the materials of the abutting tool 7 and the work piece W (for example, zirconia and soda-lime glass) are chemically bonded at the molecular level (or atomic level) and once bonded (bonded). When the materials are separated from each other by ultrasonic vibration, a part of one material (for example, the material of the workpiece W) is peeled off in a state of being bonded (adhered) to the other material (for example, the material of the tool 7), and one of them. Material is thought to be reduced. Depending on the material, both may lose weight (the degree of weight loss differs). Based on these findings, the tool 7 and the workpiece W are materials that can be chemically bonded to each other, and the tool 7 selects a material that does not easily peel off (separate) after bonding (for example, zirconia). It can be said that it is desirable to select a material (for example, a glass-based material (soda-lime glass or the like)) that is more easily peeled (disengaged) after bonding as compared with the tool 7. In some cases, the processing can proceed more effectively by adding water.

なお、上記(化学的結合と剥離)以外の化学的反応による減量と他の化学的反応による減量とが混在していてもよい。また、これらに機械的な加工による減量(切削や研削)が含まれていてもよいが、その場合主として化学的反応によって減量が進行する(化学的反応による減量の程度が減量全体の50%を占める)ものとする。 It should be noted that the weight loss due to a chemical reaction other than the above (chemical bond and peeling) and the weight loss due to another chemical reaction may be mixed. In addition, these may include weight loss by mechanical processing (cutting or grinding), but in that case, the weight loss progresses mainly by a chemical reaction (the degree of weight loss by a chemical reaction is 50% of the total weight loss). Occupy).

また、このような化学的反応による減量は、機械的な加工(研磨や切削)が生じない程度で材料同士(工具7と被加工物W)を当接させる(機械的加工が生じず、かつ化学的な(分子レベルまたは原子レベルの)結合を生じさせる)ことで進行すると考えられ、工具7と被加工物Wを適切な圧力で当接させることが望ましいことが判った。 Further, in the weight loss due to such a chemical reaction, the materials (tool 7 and the workpiece W) are brought into contact with each other to the extent that mechanical processing (polishing or cutting) does not occur (mechanical processing does not occur and the work piece W) is brought into contact with each other. It is considered that the process proceeds by forming a chemical (molecular or atomic level) bond, and it has been found that it is desirable to bring the tool 7 and the workpiece W into contact with each other at an appropriate pressure.

そこで、本実施形態では、ジルコニア(工具7)とソーダ石灰ガラス(被加工物W)の間の押圧力を、最も効率よく加工が進行する(効率よく化学的反応による減量が生じる)所定範囲に維持すべく、工具7または被加工物Wの一方を、加工を進行させるための他方の送り方向と同方向に退避させながら加工を行う。これにより工具7が被加工部位を押圧する際に被加工領域WAにかかる過剰圧力を緩衝させながら、加工を進行させることができる。 Therefore, in the present embodiment, the pressing force between the zirconia (tool 7) and the soda lime glass (workpiece W) is set within a predetermined range in which the machining proceeds most efficiently (weight loss due to a chemical reaction occurs efficiently). In order to maintain the machining, one of the tool 7 or the workpiece W is retracted in the same direction as the other feeding direction for advancing the machining. As a result, the machining can proceed while buffering the excessive pressure applied to the workpiece area WA when the tool 7 presses the workpiece.

具体的には、図3に示すように、本発明の実施形態の加工装置1は、治具5または工具支持部17の一方が、緩衝機構20を有しており、これにより被加工物Wに加わる工具7の過剰圧力を緩衝し(吸収し)、被加工物Wおよび工具7への加工負荷を軽減させるように構成した。この緩衝機構20とは、例えば、工具7または被加工物Wを退避移動させる退避移動機構21と、工具7または被加工物Wを復帰移動方向に付勢する付勢機構23を含む機構である。 Specifically, as shown in FIG. 3, in the processing apparatus 1 of the embodiment of the present invention, one of the jig 5 and the tool support portion 17 has a shock absorber 20, whereby the workpiece W The excess pressure of the tool 7 applied to the tool 7 is buffered (absorbed), and the machining load on the workpiece W and the tool 7 is reduced. The buffer mechanism 20 is, for example, a mechanism including a retracting movement mechanism 21 for retracting and moving the tool 7 or the workpiece W, and an urging mechanism 23 for urging the tool 7 or the workpiece W in the return moving direction. ..

同図(B)、同図(C)を参照してより詳細に説明する。本実施形態では一例として、治具5が、緩衝機構20すなわち、退避移動機構21と付勢機構23とを備えている場合である。 This will be described in more detail with reference to FIGS. (B) and (C). In this embodiment, as an example, the jig 5 includes a buffer mechanism 20, that is, a retracting movement mechanism 21 and an urging mechanism 23.

退避移動機構21は、この例では、保持部52(保持面521)を基台51に対して垂直(この例では鉛直)方向上下に移動可能に保持する支持部53である。より具体的には、支持部53は、外筒531と、外筒531の内側で外筒531に対して進退可能に保持される内筒532とを有している。 In this example, the retracting movement mechanism 21 is a supporting portion 53 that holds the holding portion 52 (holding surface 521) so as to be movable up and down in the direction perpendicular to the base 51 (vertical in this example). More specifically, the support portion 53 has an outer cylinder 531 and an inner cylinder 532 that is held inside the outer cylinder 531 so as to be able to advance and retreat with respect to the outer cylinder 531.

また、付勢機構23は例えば、支持部53の例えば外周に設けられて上下両端が保持部52と基台51とに固定れた弾性部材533である。弾性部材533は例えば、外筒531の外周に巻回され、上下両端が保持部52と基台51とに固定されたばね(コイルばね)である。 Further, the urging mechanism 23 is, for example, an elastic member 533 provided on the outer periphery of the support portion 53 and whose upper and lower ends are fixed to the holding portion 52 and the base 51. The elastic member 533 is, for example, a spring (coil spring) wound around the outer circumference of the outer cylinder 531 and having both upper and lower ends fixed to the holding portion 52 and the base 51.

支持部53(退避移動機構21)は、工具7の実際の送り方向(加工を進行させる場合に送り駆動手段25によって工具7が送られる方向、この例ではZ軸の下方に向かう方向)と同方向に保持部52を退避移動可能に構成されており、これにより保持部52上の被加工物Wは工具7の実際の送り方向と同方向に退避移動可能となっている。 The support portion 53 (evacuation moving mechanism 21) is the same as the actual feed direction of the tool 7 (the direction in which the tool 7 is fed by the feed drive means 25 when the machining proceeds, in this example, the direction toward the lower side of the Z axis). The holding portion 52 is configured to be retractable and movable in the direction, whereby the workpiece W on the holding portion 52 can be retracted and moved in the same direction as the actual feed direction of the tool 7.

付勢機構23は、退避移動機構21により被加工物Wが退避移動する際、退避移動する被加工物Wを復帰移動方向に付勢する。復帰移動方向は、退避移動方向とは逆方向であり、Z軸の上方に向かう方向である。 The urging mechanism 23 urges the workpiece W to be retracted and moved in the return movement direction when the workpiece W is retracted and moved by the retracting and moving mechanism 21. The return movement direction is opposite to the evacuation movement direction, and is a direction toward the upper side of the Z axis.

また、保持部52の上面にはストッパー535が設けられる。ストッパー535は、付勢機構23(弾性部材533)によってZ方向上方へ付勢される保持部52のZ軸上方への移動が所定高さに規制する。 Further, a stopper 535 is provided on the upper surface of the holding portion 52. The stopper 535 regulates the movement of the holding portion 52, which is urged upward in the Z direction by the urging mechanism 23 (elastic member 533), to a predetermined height.

これにより、保持部52およびこれに保持される被加工物Wは、加工が行われている間は工具7によって押圧され、退避移動機構21によって付勢機構23の付勢力に抗いながら工具7の実際の送り方向(Z軸下方)に退避移動するが、被加工物Wと工具7による加工が進展するにつれて、退避移動機構21及び付勢機構23によって、退避移動した被加工物W(保持部52)が工具7に押圧されながらも初期の位置に復帰する方向に移動する。 As a result, the holding portion 52 and the workpiece W held by the holding portion 52 are pressed by the tool 7 during machining, and the evacuation moving mechanism 21 resists the urging force of the urging mechanism 23 while the tool 7 is pressed. It retracts and moves in the actual feed direction (downward on the Z axis), but as the machining by the workpiece W and the tool 7 progresses, the workpiece W (holding unit) retracted and moved by the retracting and moving mechanism 21 and the urging mechanism 23. 52) moves in the direction of returning to the initial position while being pressed by the tool 7.

なお、工具7は、超音波振動手段55によって超音波振動が付与されると望ましいが、この場合、超音波による音圧及び振動と、工具7への加圧によって加工が進行する。つまり音圧も当該圧力(押圧力)に関与するため、この音圧を考慮して送り駆動手段25、退避移動機構21および付勢機構23等の制御を行う。 It is desirable that the tool 7 is subjected to ultrasonic vibration by the ultrasonic vibration means 55, but in this case, the machining proceeds by the sound pressure and vibration by the ultrasonic waves and the pressurization of the tool 7. That is, since the sound pressure is also involved in the pressure (pushing pressure), the feed driving means 25, the retracting movement mechanism 21, the urging mechanism 23, and the like are controlled in consideration of the sound pressure.

さらに、計測手段11は例えば、退避移動機構21による退避状態を検出する退避状態検出手段111と、送り駆動手段25による実際の送り状態を検出する検出する送り状態検出手段113と、退避状態と送り状態の相対差から、工具7と被加工物Wの相対的な送り量を算出する計算手段115を有している。 Further, the measuring means 11 includes, for example, a retracted state detecting means 111 for detecting the retracted state by the retracted moving mechanism 21, a feed state detecting means 113 for detecting the actual feed state by the feed driving means 25, and a retracted state and a feed. It has a calculation means 115 for calculating the relative feed amount of the tool 7 and the workpiece W from the relative difference between the states.

ここで、退避移動機構21が検出する退避状態は、例えば、工具7に押圧されることによる退避移動の量(以下「退避量ΔN」と称する。)である。 Here, the evacuation state detected by the evacuation movement mechanism 21 is, for example, the amount of evacuation movement due to being pressed by the tool 7 (hereinafter referred to as “evacuation amount ΔN”).

また、送り駆動手段25が検出する実際の送り状態は、例えば、加工を行うための目標となる(加工を行う場合に設定する)実際の(絶対的な)送り量(以下、「絶対的な送り量ΔT1」と称する。)である。 Further, the actual feed state detected by the feed drive means 25 is, for example, an actual (absolute) feed amount (hereinafter, "absolute") that is a target (set when machining) for machining. The feed amount is referred to as “ΔT1”).

また、計算手段115が算出する相対的な送り量とは、絶対的な送り量ΔT1と退避量ΔNの差(ΔT1−ΔN)であり、以下、「相対的な送り量ΔT2」と称する。工具7と被加工物Wの相対的な送り量ΔT2(=ΔT1−ΔN)は、加工の進展量ともいえる。 Further, the relative feed amount calculated by the calculation means 115 is the difference (ΔT1-ΔN) between the absolute feed amount ΔT1 and the evacuation amount ΔN, and is hereinafter referred to as “relative feed amount ΔT2”. The relative feed amount ΔT2 (= ΔT1-ΔN) between the tool 7 and the workpiece W can be said to be the amount of progress in machining.

本実施形態の退避移動機構21は、保持部52に被加工物Wを載置すると、送り駆動手段25によって工具7を被加工物Wを押圧してはいない状態であっても被加工物Wの重量に応じた所定量で退避移動方向に移動する(付勢機構23がそのように設定されている)。しかし、本実施形態では一例として、退避状態検出手段111が検出する退避量ΔNは、送り駆動手段25によって工具7を被加工物Wを押圧する(送り出す)ことによって、被加工物WがZ軸下方に退避移動した変化量(加工開始時では保持部52に被加工物Wを載置した状態から更に工具7の押圧によって退避移動した変化量)を検出するものとする。 In the evacuation movement mechanism 21 of the present embodiment, when the workpiece W is placed on the holding portion 52, the workpiece W is not pressed by the feed driving means 25 even when the tool 7 is not pressing the workpiece W. It moves in the evacuation movement direction by a predetermined amount according to the weight of (the urging mechanism 23 is set as such). However, in the present embodiment, as an example, the evacuation amount ΔN detected by the evacuation state detecting means 111 is such that the workpiece W presses (delivers) the workpiece W by the feed driving means 25, so that the workpiece W has a Z axis. It is assumed that the amount of change that has been retracted and moved downward (the amount of change that has been retracted and moved by pressing the tool 7 from the state where the workpiece W is placed on the holding portion 52 at the start of machining) is detected.

なお、後に述べる付勢機構23の付勢力の設定によっては、保持部52に被加工物Wを載置したのみでは、保持部52はZ軸下方に移動しない場合もあり、そのように構成されていてもよい。 Depending on the setting of the urging force of the urging mechanism 23 described later, the holding portion 52 may not move downward on the Z axis only by placing the workpiece W on the holding portion 52, and is configured as such. You may be.

そして、退避移動機構21は、加工の進行中(工具7によって押圧されている間)は、付勢機構23によって付勢されることにより、送り駆動手段25による工具7の絶対的な送り量ΔT1に対して、工具7と被加工物Wの間の相対的な送り量ΔT2が減少する方向に、被加工物Wを退避移動させる。なお、本実施形態における「相対的な送り量ΔT2が減少する方向に、被加工物Wを退避移動する」とは、換言すれば、初期位置に復帰する方向への移動ではあるが、初期位置からは依然として退避しているような移動である。 Then, the retracting movement mechanism 21 is urged by the urging mechanism 23 while the machining is in progress (while being pressed by the tool 7), so that the absolute feed amount ΔT1 of the tool 7 by the feed driving means 25 On the other hand, the workpiece W is retracted and moved in the direction in which the relative feed amount ΔT2 between the tool 7 and the workpiece W decreases. In the present embodiment, "moving the workpiece W back and forth in the direction in which the relative feed amount ΔT2 decreases" is, in other words, moving in the direction of returning to the initial position, but the initial position. It is a movement that seems to be still evacuating from.

そして加工装置1は、退避移動機構21による退避量ΔNが(略)ゼロとなる際に、加工(の1ステップ)を終了させるように制御される。 Then, the processing apparatus 1 is controlled so as to end the processing (one step) when the evacuation amount ΔN by the evacuation movement mechanism 21 becomes (omitted) zero.

具体的には、例えば、2mmの加工を行う場合、送り駆動手段25による工具7の絶対的な送り量ΔT1(退避量ΔN)を2mmとし、退避量ΔN(2mm)が(略)ゼロとなる際に加工を終了する。あるいは、例えば、2mmの加工を行う場合、複数ステップの加工を行うようにしても良く、例えば1ステップ目において送り駆動手段25による工具7の絶対的な送り量ΔT1(退避量ΔN)を0.2mmとして、退避量ΔN(0.2mm)が(略)ゼロとなる際に加工の1ステップ目を終了し、次のステップ(2ステップ目)に進み、これを繰り返して加工を行うようにしてもよい。この場合10ステップ目が終了した場合に、加工が完了する。なお、ジルコニアとソーダ石灰ガラスの化学的反応によりジルコニアも減量(磨耗)するが、その量は極僅かであり、送り量ΔT1(退避量ΔN)の制御にほとんど影響はない。 Specifically, for example, when machining 2 mm, the absolute feed amount ΔT1 (evacuation amount ΔN) of the tool 7 by the feed drive means 25 is set to 2 mm, and the evacuation amount ΔN (2 mm) becomes (omitted) zero. When processing is finished. Alternatively, for example, when machining 2 mm, machining may be performed in a plurality of steps. For example, in the first step, the absolute feed amount ΔT1 (evacuation amount ΔN) of the tool 7 by the feed drive means 25 is set to 0. Assuming that it is 2 mm, when the evacuation amount ΔN (0.2 mm) becomes (omitted) zero, the first step of machining is completed, the process proceeds to the next step (second step), and this is repeated to perform machining. May be good. In this case, when the 10th step is completed, the machining is completed. The amount of zirconia is also reduced (weared) by the chemical reaction between zirconia and soda-lime glass, but the amount is extremely small and has almost no effect on the control of the feed amount ΔT1 (evacuation amount ΔN).

付勢機構23の付勢力(弾性部材533の弾性力)は、退避状態検出手段111が検出した退避量ΔNに連動するように設定され、上記のような退避移動と復帰移動が可能となるような所望量を超えない範囲に設定されている。 The urging force of the urging mechanism 23 (elastic force of the elastic member 533) is set to be linked to the evacuation amount ΔN detected by the evacuation state detecting means 111, so that the evacuation movement and the return movement as described above are possible. It is set in a range that does not exceed the desired amount.

具体的には、付勢機構23の付勢力は、送り駆動手段25が工具7を絶対的な送り量ΔT1で送り出した場合、緩衝機構20(退避移動機構21および付勢機構23)によって、工具7と被加工物Wの間の相対的な送り量ΔT2が減少する方向に退避移動することが可能となるように設定されている。より具体的な現象で説明すると、例えば、送り駆動手段25の送り動作(それによる退避移動機構21による退避量ΔN)に対応して、被加工物WのZ軸方向の位置(治具5の保持部52のZ軸方向位置)の微小な変位を許容しつつ、例えば僅かな範囲で被加工物Wが振動可能となるように、付勢機構23の付勢力が設定されている。 Specifically, when the feed driving means 25 feeds the tool 7 with an absolute feed amount ΔT1, the urging force of the urging mechanism 23 is determined by the buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). It is set so that the relative feed amount ΔT2 between 7 and the workpiece W can be retracted and moved in a decreasing direction. More specifically, for example, the position of the workpiece W in the Z-axis direction (of the jig 5) corresponds to the feed operation of the feed drive means 25 (the amount of evacuation ΔN by the retract movement mechanism 21). The urging force of the urging mechanism 23 is set so that the workpiece W can vibrate in a small range, for example, while allowing a minute displacement of the holding portion 52 (position in the Z-axis direction).

例えば、付勢機構23が弾性部材(コイルばね)533の場合、退避移動機構21による退避量ΔNに連動して伸縮が可能なばね定数が適宜選択される。弾性部材533は、送り駆動手段25による押圧力を受けて送り駆動手段25の送り方向(Z軸下方)に圧縮されながらも、当該押圧力に抗って、工具7の実際の送り量(絶対的な送り量)ΔT1に対して、工具7と被加工物Wの間の相対的な送り量ΔT2が減少する方向に被加工物W(保持部52)を移動させることが可能な程度に伸張するようなばね定数が選択される。 For example, when the urging mechanism 23 is an elastic member (coil spring) 533, a spring constant capable of expanding and contracting in conjunction with the evacuation amount ΔN by the evacuation movement mechanism 21 is appropriately selected. The elastic member 533 receives the pressing force of the feed driving means 25 and is compressed in the feeding direction (downward of the Z axis) of the feeding driving means 25, but resists the pressing force and the actual feed amount (absolute) of the tool 7. The work piece W (holding portion 52) is stretched to such an extent that the work piece W (holding portion 52) can be moved in a direction in which the relative feed amount ΔT2 between the tool 7 and the work piece W decreases with respect to the feed amount ΔT1. The spring constant is selected.

換言すると、被加工物Wと工具7による加工が進展するにつれて、Z方向下方に退避移動した被加工物W(保持部52)が復帰方向に移動するようなばね定数が選択される。 In other words, as the machining by the workpiece W and the tool 7 progresses, a spring constant is selected so that the workpiece W (holding portion 52) retracted and moved downward in the Z direction moves in the return direction.

ただし、この付勢機構23の付勢力は、工具7(ジルコニア)の形状(サイズ)と被加工物W(ソーダ石灰ガラス)の形状(厚み)等も含め、両者の化学的反応に起因する加工の進行具合により異なる。従って、付勢機構23の付勢力は、両者の化学的反応に起因する加工の進行具合に応じて、上記の退避移動と復帰移動が可能となるような所望量を超えない範囲に制御される。つまり、付勢機構23が弾性部材533の場合は、上記の退避移動と復帰移動が可能となるような所望量を超えない範囲のばね定数が適宜選択される。 However, the urging force of the urging mechanism 23, including the shape (size) of the tool 7 (zirconia) and the shape (thickness) of the work piece W (soda lime glass), is processed due to the chemical reaction between the two. It depends on the progress of. Therefore, the urging force of the urging mechanism 23 is controlled within a range not exceeding a desired amount that enables the above-mentioned evacuation movement and return movement, depending on the progress of processing caused by the chemical reaction between the two. .. That is, when the urging mechanism 23 is an elastic member 533, a spring constant within a range not exceeding a desired amount that enables the above-mentioned retract movement and return movement is appropriately selected.

また、送り駆動手段25は、被加工物W(保持部52)の退避量ΔNが所定の閾値を超えないように、絶対的な送り量ΔT1を制御する。具体的には、退避量ΔNが所定の閾値(例えば、目標とする加工量)を超える状態となった場合は、工具7の絶対的な送り量ΔT1を減少させ、退避量ΔNが所定の閾位置に満たない場合(押し込みが少なく工具7が空転状態またはそれに近い状態となる場合)は、工具7の絶対的な送り量ΔT1を増加させる制御を行う。 Further, the feed driving means 25 controls the absolute feed amount ΔT1 so that the withdrawal amount ΔN of the workpiece W (holding portion 52) does not exceed a predetermined threshold value. Specifically, when the evacuation amount ΔN exceeds a predetermined threshold value (for example, a target machining amount), the absolute feed amount ΔT1 of the tool 7 is reduced, and the evacuation amount ΔN is a predetermined threshold value. When the position is less than the position (when the pushing amount is small and the tool 7 is in an idling state or a state close to it), control is performed to increase the absolute feed amount ΔT1 of the tool 7.

なお、送り駆動手段25による加工中の送り制御は行わなくても良く、送り駆動手段25による制御に代えて、あるいはこれと併用して、工具7の駆動手段9による制御(回転制御、回転トルクの制御)などによって、退避量ΔNが所定の閾値を超えないように制御してもよい。 It is not necessary to perform the feed control during machining by the feed drive means 25, and the control by the drive means 9 of the tool 7 (rotation control, rotation torque) is performed instead of or in combination with the control by the feed drive means 25. The evacuation amount ΔN may be controlled so as not to exceed a predetermined threshold value.

また、弾性部材522は、コイルばねに限らず、例えば空気ばねや、スポンジ等であってもよく、また、付勢機構23は、磁力、油圧、空圧などにより付勢する機構(弾性力を有する機構)であってもよい。 Further, the elastic member 522 is not limited to the coil spring, and may be, for example, an air spring, a sponge, or the like, and the urging mechanism 23 is a mechanism (elastic force) for urging by magnetic force, hydraulic pressure, pneumatic pressure, or the like. It may be a mechanism having).

更に、緩衝機構20は、上記の構成に限らず、工具7および被加工物Wの一方を送り方向に移動し、工具7および被加工物Wの他方を送り方向と同方向に退避移動させる構成であればよい。あるいは、緩衝機構20は、工具7が被加工物Wを押圧する際に当該被加工物Wにかかる過剰圧力を緩衝させる構成であればよい。 Further, the shock absorbing mechanism 20 is not limited to the above configuration, and has a configuration in which one of the tool 7 and the workpiece W is moved in the feed direction, and the other of the tool 7 and the workpiece W is retracted and moved in the same direction as the feed direction. It should be. Alternatively, the cushioning mechanism 20 may be configured to buffer the excessive pressure applied to the workpiece W when the tool 7 presses the workpiece W.

また、加工装置1は、図3に示す構成に限らず、工具7(ジルコニア)によって被加工物W(ソーダ石灰ガラス)の加工が進行する構成、例えば、工具7(ジルコニア)を被加工物W(ソーダ石灰ガラス)に対して相対移動させる駆動手段9と、被加工物Wに対して工具7を所望の送り方向に移動させるべく、工具7および被加工物Wの一方を移動させる送り駆動手段25と、を少なくとも有する構成であればよい。従って、超音波振動手段55は設けなくてもよいし、緩衝機構20を設けなくてもよい。 Further, the processing apparatus 1 is not limited to the configuration shown in FIG. 3, and has a configuration in which the machining of the workpiece W (soda-lime glass) proceeds by the tool 7 (zirconia), for example, the tool 7 (zirconia) is the workpiece W. A drive means 9 for moving relative to (soda-lime glass) and a feed drive means for moving one of the tool 7 and the work piece W in order to move the tool 7 with respect to the work piece W in a desired feed direction. Any configuration may have at least 25 and 25. Therefore, the ultrasonic vibration means 55 may not be provided, and the buffer mechanism 20 may not be provided.

図4を参照して、加工装置1における加工方法について時系列に説明する。なお、同図においては、被加工物Wの状態と治具5の動作を説明する便宜上、治具5(保持部52)の上方に被加工物Wを記載しているが、実際は、図3に示すように、治具5は被加工物Wの周辺部を保持しているものとする。なお、被加工物Wを貫通しない刳り貫き加工の場合には、図3と同様の保持の構成であってもよいし、図4に示す保持の構成であってもよい(その場合被加工物Wが移動しないように固定する手段は必要である)。すなわち、治具5による被加工物Wの保持の態様は、加工の態様により適宜選択可能である。 The processing method in the processing apparatus 1 will be described in chronological order with reference to FIG. In the figure, the workpiece W is shown above the jig 5 (holding portion 52) for convenience of explaining the state of the workpiece W and the operation of the jig 5, but in reality, FIG. 3 As shown in the above, it is assumed that the jig 5 holds the peripheral portion of the workpiece W. In the case of hollowing processing that does not penetrate the workpiece W, the holding configuration may be the same as in FIG. 3, or the holding configuration shown in FIG. 4 may be used (in that case, the workpiece may be held. A means of fixing W so that it does not move is necessary). That is, the mode of holding the workpiece W by the jig 5 can be appropriately selected depending on the mode of processing.

本実施形態の加工方法は、ガラス系材料(例えば、ソーダ石灰ガラス)の被加工物Wの一部を減量させて所望の形状に変化させる加工方法であって、被加工物Wを治具5により保持し、ジルコニアからなる工具7と被加工物Wとを相対移動させる工程と、被加工物Wに対して工具7を所望の送り方向に移動させるべく、工具7および被加工物Wの一方を移動させる工程と、を有する。 The processing method of the present embodiment is a processing method in which a part of the work piece W of a glass-based material (for example, soda-lime glass) is reduced in weight to change it into a desired shape, and the work piece W is used as a jig 5 One of the tool 7 and the workpiece W in order to move the tool 7 made of zirconia and the workpiece W relative to the workpiece W in a desired feed direction. Has a step of moving the glass.

まず、同図(A)に示すように、治具5の保持部52によって被加工物W(例えば、ソーダ石灰ガラス)を保持する。この例では、被加工物Wが治具5により保持され、且つ工具7(例えば、ジルコニア)によって押圧される前の状態では、被加工物Wの重量により付勢機構23(弾性部材533)は所定量圧縮され、保持部52は、退避移動機構21と付勢機構23によって被加工物Wの保持前の位置(破線で示す)よりもZ方向下方に移動する。なお、付勢機構23の付勢力の設定によっては、保持部52に被加工物Wを保持したのみでは、保持部52はZ軸下方に移動しない場合もあり、そのように構成されていてもよい。この例では、被加工物Wの重量のみによる移動は、退避量ΔNに含まないものとする。 First, as shown in FIG. 6A, the workpiece W (for example, soda lime glass) is held by the holding portion 52 of the jig 5. In this example, in the state where the workpiece W is held by the jig 5 and before being pressed by the tool 7 (for example, zirconia), the urging mechanism 23 (elastic member 533) is caused by the weight of the workpiece W. After being compressed by a predetermined amount, the holding portion 52 is moved downward in the Z direction by the retracting movement mechanism 21 and the urging mechanism 23 from the position (indicated by the broken line) before holding the workpiece W. Depending on the setting of the urging force of the urging mechanism 23, the holding portion 52 may not move downward on the Z axis only by holding the workpiece W on the holding portion 52, and even if it is configured as such. Good. In this example, the movement due to the weight of the workpiece W alone is not included in the evacuation amount ΔN.

そしてこのときの(加工前の被加工物Wが保持(把持)された状態の)被加工物W表面(あるいは保持面521(図3(C)参照))の(床面などの基準面からの高さ)を復帰位置P0とする。 Then, from the reference surface (of the floor surface or the like) of the work piece W surface (or the holding surface 521 (see FIG. 3C)) at this time (in a state where the work piece W before processing is held (grasped)). The height of) is set to the return position P0.

次に、同図(B)に示すように、工具7および被加工物Wの一方を送り方向に移動し、工具7および被加工物Wの他方を送り方向と同方向に退避移動させることにより工具が被加工物Wを押圧する際に被加工物Wにかかる過剰圧力を緩衝させながら加工を進行させる。 Next, as shown in FIG. 3B, one of the tool 7 and the workpiece W is moved in the feed direction, and the other of the tool 7 and the workpiece W is retracted and moved in the same direction as the feed direction. When the tool presses the workpiece W, the machining proceeds while buffering the excessive pressure applied to the workpiece W.

具体的には、テーブル3を移動させて被加工領域WAを工具7の下方になるように調整し、被加工物Wに対して工具7を所望の送り方向に移動させる。すなわち、工具支持部17の送り駆動手段25によって、工具7をZ軸下方に移動させて被加工領域WAの加工開始部位に工具7を当接させる。このとき、送り駆動手段25は、加工が可能な程度の押圧力で工具7を被加工物Wに当接(押圧)させるように工具7を移動する。被加工物Wはこの押圧力を受け、退避移動機構21は、或る退避量ΔNでZ方向下方に退避移動する。退避量ΔNは例えば、目標とする最終的な形状に至るまでの減少量(総加工量)であってもよいし、当該減少量(総加工量)よりも小さい値(総加工量を複数に等分割した値)であってもよい。 Specifically, the table 3 is moved to adjust the work area WA so as to be below the tool 7, and the tool 7 is moved in a desired feed direction with respect to the work W. That is, the feed driving means 25 of the tool support portion 17 moves the tool 7 downward on the Z axis to bring the tool 7 into contact with the machining start portion of the work area WA. At this time, the feed driving means 25 moves the tool 7 so as to bring the tool 7 into contact with (press) the workpiece W with a pressing force sufficient for machining. The work piece W receives this pressing force, and the retracting movement mechanism 21 retracts and moves downward in the Z direction with a certain retracting amount ΔN. The evacuation amount ΔN may be, for example, a reduction amount (total processing amount) until the target final shape is reached, or a value smaller than the reduction amount (total processing amount) (total processing amount may be plural). It may be an equally divided value).

次に、同図(C)に示すように、工具7と被加工物Wを減量方向(この場合は、X軸−Y軸方向)に相対移動させる。このとき、工具7は駆動手段9によって回転駆動および超音波振動が付与される。また、ジルコニアとソーダ石灰ガラスの物理的な相対移動に伴い、両者の化学的反応が生じ、物理的な相対移動と化学的反応によって被加工物WAの一部が減量される。 Next, as shown in FIG. 6C, the tool 7 and the workpiece W are relatively moved in the weight loss direction (in this case, the X-axis-Y-axis direction). At this time, the tool 7 is rotationally driven and ultrasonically vibrated by the driving means 9. Further, with the physical relative movement of zirconia and soda-lime glass, a chemical reaction between the two occurs, and a part of the workpiece WA is reduced by the physical relative movement and the chemical reaction.

本実施形態ではこの加工において、送り駆動手段25が、工具7を絶対的な送り量ΔT1で送り方向(Z軸下方)に移動させて被加工物Wを押圧する一方で、付勢機構23は、退避移動する被加工物Wを復帰移動方向(復帰位置P0に向かって移動する方向)に付勢し、退避移動機構21は、工具7の実際の送り量ΔT1に対して、工具7と被加工物Wの間の相対的な送り量ΔT2が減少する方向(この場合は下方)に、被加工物W(保持部52)を退避移動させる。付勢機構23の付勢力は退避移動機構21による退避量ΔNに連動し、所望量を超えない範囲に設定されている。 In the present embodiment, in this machining, the feed driving means 25 moves the tool 7 in the feed direction (downward on the Z axis) with an absolute feed amount ΔT1 to press the workpiece W, while the urging mechanism 23 The work piece W to be retracted is urged in the return movement direction (the direction to move toward the return position P0), and the retract movement mechanism 21 receives the tool 7 and the tool 7 with respect to the actual feed amount ΔT1 of the tool 7. The workpiece W (holding portion 52) is retracted and moved in the direction in which the relative feed amount ΔT2 between the workpieces W decreases (in this case, downward). The urging force of the urging mechanism 23 is linked to the evacuation amount ΔN by the evacuation movement mechanism 21 and is set within a range not exceeding a desired amount.

具体的には、退避状態検出手段111が検出した退避移動機構21による退避状態(退避量ΔN)と、送り状態検出手段113が検出した送り駆動手段25による実際の送り状態(絶対的な送り量ΔT1)に基づき、計算手段115が両者の相対差(ΔT1−ΔN)から、工具7と被加工物Wの相対的な送り量ΔT2を算出する。また、送り駆動手段25は、退避量ΔNが所定の閾値を超えないように、絶対的な送り量ΔT1を制御する。 Specifically, the evacuation state (evacuation amount ΔN) by the evacuation movement mechanism 21 detected by the evacuation state detection means 111 and the actual feed state (absolute feed amount) by the feed drive means 25 detected by the feed state detection means 113. Based on ΔT1), the calculation means 115 calculates the relative feed amount ΔT2 between the tool 7 and the workpiece W from the relative difference (ΔT1-ΔN) between the two. Further, the feed driving means 25 controls the absolute feed amount ΔT1 so that the evacuation amount ΔN does not exceed a predetermined threshold value.

そして、同図(C)に示すように、退避移動機構21は、工具7と被加工物Wの間の相対的な送り量ΔT2が減少する方向に、被加工物Wを退避移動させる。被加工物Wと工具7による加工が進展するにつれて、退避移動機構21及び付勢機構23によって退避移動した被加工物Wが復帰位置P0方向に移動し、退避量ΔNは減少するように加工が進行する。なお、この場合は、送り駆動手段25によって工具7が送られることによる被加工物Wの減量の程度(減少量)に対して、相対的減少量が減少する方向に被加工物W(保持部52)を退避移動するともいえる。 Then, as shown in FIG. 6C, the evacuation movement mechanism 21 retracts and moves the workpiece W in the direction in which the relative feed amount ΔT2 between the tool 7 and the workpiece W decreases. As the machining by the workpiece W and the tool 7 progresses, the workpiece W retracted and moved by the retracting movement mechanism 21 and the urging mechanism 23 moves in the return position P0 direction, and the machining is performed so that the retracting amount ΔN decreases. proceed. In this case, the work piece W (holding portion) is reduced in the relative reduction amount with respect to the degree of weight loss (reduction amount) of the work piece W due to the tool 7 being fed by the feed drive means 25. It can be said that 52) is evacuated and moved.

つまり、現象的に一例を挙げると、被加工物Wはテーブル3に対してZ軸方向の位置が固定されず、Z軸方向において所定範囲内での移動(位置の変動)が許容された状態で加工が進行する。被加工物Wは工具7によってZ軸下方に押されながらも、上下に振動するようにして、治具5(被加工物W)が徐々に復帰位置P0に戻りながら加工が進行する。 That is, to give a phenomenal example, the position of the workpiece W in the Z-axis direction is not fixed with respect to the table 3, and movement (change in position) within a predetermined range is allowed in the Z-axis direction. Processing proceeds at. While the work piece W is pushed downward on the Z axis by the tool 7, the work piece W vibrates up and down, and the work progresses while the jig 5 (work piece W) gradually returns to the return position P0.

そして、同図(D)に示すように被加工領域WAの形状が所望の最終形状となり(総加工量に到達し)退避量ΔNが(略)ゼロとなった際に、加工を終了させる。 Then, as shown in FIG. 3D, when the shape of the work area WA becomes a desired final shape (reaches the total processing amount) and the evacuation amount ΔN becomes (omitted) zero, the processing is terminated.

なお、複数のステップに分割して加工を実行する場合は、1ステップの退避量ΔNが(略)ゼロとなった場合に、当該ステップの加工を終了し、次ステップの加工に進む。 When the machining is performed by dividing into a plurality of steps, when the evacuation amount ΔN of one step becomes (omitted) zero, the machining of the step is completed and the machining proceeds to the next step.

なお、加工が完了する直前において、退避量ΔNに対して相対的な送り量ΔTが不足し、目標値に僅かに満たずに工具7が空転する可能性がある場合には、それらを考慮して絶対的な送り量ΔT1,退避量ΔNおよび相対的な送り量ΔT2を適宜制御するとよい。 If the feed amount ΔT relative to the evacuation amount ΔN is insufficient immediately before the machining is completed and the tool 7 may slip slightly below the target value, take them into consideration. The absolute feed amount ΔT1, the withdrawal amount ΔN, and the relative feed amount ΔT2 may be appropriately controlled.

また、計測手段11は、最終の加工量に達し、所望の形状が得られているか否かを検出する測定手段を備え、加工の終了後に最終の加工形状を確認可能とするようにしてもよい。 Further, the measuring means 11 may include a measuring means for detecting whether or not the final machining amount is reached and a desired shape is obtained, so that the final machining shape can be confirmed after the machining is completed. ..

このような構成によれば、保持部52に保持された被加工物Wおよび工具7に対して、加工が最も効率よく進行する圧力範囲を超えるような過剰な圧力が加わった場合であってもそれを緩衝(吸収)しつつ、加工を進行させることができる。 According to such a configuration, even when an excessive pressure is applied to the workpiece W and the tool 7 held by the holding portion 52 so as to exceed the pressure range in which machining proceeds most efficiently. Processing can proceed while buffering (absorbing) it.

また、退避量ΔNを所望の値(最終加工量、あるいはそれを等分割にした値)に設定し、退避量ΔNが(略)ゼロになった場合に(1ステップ分の)加工を終了するように制御すればよいため、従来の研削や切削では困難であったミクロン単位での加工量の制御が可能となる。 Further, the evacuation amount ΔN is set to a desired value (final processing amount or a value obtained by dividing it into equal parts), and when the evacuation amount ΔN becomes (omitted) zero, processing (for one step) is completed. Therefore, it is possible to control the machining amount in micron units, which was difficult with conventional grinding and cutting.

従って、被加工物Wがソーダ石灰ガラスであり、また特に、薄い板厚に対する穴開け加工や刳り貫き加工を行なう場合であっても、被加工物Wの破損を防ぎ、また効率よく加工を行なうことができる。 Therefore, even when the workpiece W is soda-lime glass and particularly when drilling or hollowing a thin plate thickness is performed, the workpiece W is prevented from being damaged and the machining is performed efficiently. be able to.

さらに、本実施形態では、被加工物Wおよび工具7への加工負荷(加工圧)が小さい場合、その表面(加工目)は、磨き(研磨)に近い加工目となり、研磨レベルの目の細かい加工が可能となる。本実施形態の加工では、被加工物Wおよび工具7への加工負荷(加工圧)は随時変化しているが、加工処理の全体を通した被加工物Wおよび工具7への加工負荷(加工圧)は、大まかに、加工の初期は加工負荷(加工圧)が高く、加工の終期(終了直前)では加工負荷(加工圧)が低くなる。つまり、加工の終期(終了直前)において、研磨レベルの目の細かい加工によって、その表面(加工目)は、磨き(研磨)に近い加工目の加工を行うことができる。 Further, in the present embodiment, when the machining load (machining pressure) on the workpiece W and the tool 7 is small, the surface (machining grain) becomes a machining grain close to polishing (polishing), and the polishing level is fine. Processing becomes possible. In the machining of the present embodiment, the machining load (machining pressure) on the workpiece W and the tool 7 changes at any time, but the machining load (machining) on the workpiece W and the tool 7 throughout the machining process. Roughly speaking, the machining load (machining pressure) is high at the initial stage of machining, and the machining load (machining pressure) is low at the end of machining (immediately before the end). That is, at the final stage of processing (immediately before the end), the surface (processed texture) can be processed with a processed texture close to polishing (polishing) by fine processing at the polishing level.

なお、第1実施形態の加工方法は、工具7(ジルコニア)によってガラス系材料(例えば、ソーダ石灰ガラス)の被加工物Wの一部を減量させて所望の形状に変化させる加工方法、例えば、工具7(ジルコニア)と被加工物W(例えば、ソーダ石灰ガラス)とを相対移動させる工程と、被加工物Wに対して工具7を所望の送り方向に移動させるべく、工具7および被加工物Wの一方を移動させる工程と、を少なくとも有する加工方法であればよく、工具7の超音波振動は行なわなくてもよい。また、工具7が被加工物Wを押圧する際の被加工物Wにかかる過剰圧力を緩衝させなくてもよい。 The processing method of the first embodiment is a processing method in which a part of the workpiece W of the glass-based material (for example, soda-lime glass) is reduced by the tool 7 (zirconia) to change it into a desired shape, for example. The step of relatively moving the tool 7 (zirconia) and the work piece W (for example, soda-lime glass) and the tool 7 and the work piece in order to move the tool 7 with respect to the work piece W in a desired feed direction. Any processing method may be used as long as it has at least a step of moving one of W, and ultrasonic vibration of the tool 7 may not be performed. Further, it is not necessary to buffer the excessive pressure applied to the workpiece W when the tool 7 presses the workpiece W.

<第2実施形態>
次に、本発明の第2実施形態について説明する。第1実施形態は、工具7が例えばジルコニアであり、被加工物Wがガラス系材料、特にソーダ石灰ガラスである場合を例示した。しかしながら、工具7および被加工物Wの部材はこれに限らない。
<Second Embodiment>
Next, the second embodiment of the present invention will be described. The first embodiment illustrates the case where the tool 7 is, for example, zirconia, and the workpiece W is a glass-based material, particularly soda-lime glass. However, the members of the tool 7 and the workpiece W are not limited to this.

すなわち、第2実施形態の加工装置1は、治具5と、工具7と、駆動手段9と、送り駆動手段25と、緩衝機構20とを備え、工具7と被加工物Wによる化学的反応を生じさせながら被加工物Wの一部を減量させて所望の形状に変化させる装置である。この場合、被加工物Wは第一の部材からなり、工具7は第一の部材とは異なる第二の部材からなるものである。 That is, the processing apparatus 1 of the second embodiment includes a jig 5, a tool 7, a driving means 9, a feed driving means 25, and a buffering mechanism 20, and a chemical reaction between the tool 7 and the workpiece W. This is a device that reduces the weight of a part of the workpiece W to change it into a desired shape. In this case, the workpiece W is made of a first member, and the tool 7 is made of a second member different from the first member.

被加工物Wの第一の部材は、例えば、ガラス系材料や天然鉱物であり、より具体的には、石英ガラス、ホウケイ酸ガラス、ソーダ石灰ガラス(ソーダライムガラス)、鉛ガラス、アルカリバリウムケイ酸ガラス、アルミノケイ酸ガラス、合成溶融シリカまたは、水晶や瑪瑙(メノウ)等のうちいずれかであり、工具7の第二の部材は、ジルコニア、アルミナ、窒化アルミ、炭化珪素、窒化珪素など、のいずれかである。また、工具7の第二の部材は、セラミック(セラミックス)である。また、第二の部材は、ダイヤモンド(単結晶ダイヤモンド、多結晶ダイヤモンド)であってもよい。 The first member of the workpiece W is, for example, a glass-based material or a natural mineral, and more specifically, quartz glass, borosilicate glass, soda-lime glass (soda-lime glass), lead glass, alkaline barium kei. It is either acid glass, aluminosilicate glass, synthetic molten silica, crystal, amber, etc., and the second member of the tool 7 is zirconia, alumina, aluminum nitride, silicon carbide, silicon nitride, etc. It is either. The second member of the tool 7 is ceramic. Further, the second member may be diamond (single crystal diamond, polycrystalline diamond).

あるいはまた、被加工物W(第一の部材)は、ジルコニア、アルミナ、窒化アルミ、炭化珪素、窒化珪素などのいずれかであり、また被加工物Wは、セラミックである。また被加工物Wは、ダイヤモンド(単結晶ダイヤモンド、多結晶ダイヤモンド)であってもよい。工具7(第一の部材)は、ガラス系材料や天然鉱物であり、より具体的には、石英ガラス、ホウケイ酸ガラス、ソーダ石灰ガラス(ソーダライムガラス)、鉛ガラス、アルカリバリウムケイ酸ガラス、アルミノケイ酸ガラス、合成溶融シリカまたは、水晶や瑪瑙(メノウ)等などのうちいずれかであってもよい。 Alternatively, the workpiece W (first member) is any one of zirconia, alumina, aluminum nitride, silicon carbide, silicon nitride and the like, and the workpiece W is ceramic. Further, the workpiece W may be diamond (single crystal diamond, polycrystalline diamond). Tool 7 (first member) is a glass-based material or natural mineral, and more specifically, quartz glass, borosilicate glass, soda lime glass (soda lime glass), lead glass, alkali barium silicate glass, etc. It may be any of aluminosilicate glass, synthetic fused silica, crystal, amber, and the like.

治具5と、工具7と、駆動手段9と、送り駆動手段25と、緩衝機構20の構成は、第1実施形態(図1〜図3)と同様であるので、説明は省略する。ただし、付勢機構23の付勢力は、加工する被加工物Wの材質、形状、使用する工具7などの加工条件により異なる。従って、付勢機構23の付勢力は、加工条件に応じて、上記の退避移動と復帰移動が可能となるような所望量を超えない範囲に制御される。つまり、付勢機構23が弾性部材533の場合は、上記の退避移動と復帰移動が可能となるような所望量を超えない範囲のばね定数が適宜選択される。 Since the configurations of the jig 5, the tool 7, the drive means 9, the feed drive means 25, and the shock absorber 20 are the same as those in the first embodiment (FIGS. 1 to 3), the description thereof will be omitted. However, the urging force of the urging mechanism 23 differs depending on the processing conditions such as the material and shape of the workpiece W to be processed and the tool 7 to be used. Therefore, the urging force of the urging mechanism 23 is controlled in a range not exceeding a desired amount that enables the above-mentioned retracting movement and returning movement according to the processing conditions. That is, when the urging mechanism 23 is an elastic member 533, a spring constant within a range not exceeding a desired amount that enables the above-mentioned retract movement and return movement is appropriately selected.

第2実施形態においても、加工装置1は、第一の部材で形成した工具7を第二の部材である被加工物Wに当接させ、少なくとも一方を減量(磨耗)させながら加工を進める。すなわち、加工装置1は、超音波振動する工具7と被加工物Wとを適宜の圧力で物理的に押圧して加工を行うが、その際、被加工物Wにかかる過剰な圧力(押圧力)を緩衝させながら、被加工物Wの減量方向に相対移動させる。そうすることで、工具7と被加工物Wの物理的な相対移動(減量方向の移動と送り方向の移動)に加えて、工具7と被加工物Wが相互に作用を及ぼし合う接触面(及びその近傍)において化学的反応を生じさせるものである。これにより、被加工物Wを破損することなく加工対象領域のみを減量させて所望の形状に変化させることができる。 Also in the second embodiment, the processing apparatus 1 brings the tool 7 formed of the first member into contact with the workpiece W which is the second member, and proceeds with processing while reducing (wearing) at least one of them. That is, the processing apparatus 1 physically presses the tool 7 that vibrates ultrasonically and the workpiece W with an appropriate pressure to perform machining, but at that time, the excessive pressure (pressing pressure) applied to the workpiece W is applied. ) Is buffered, and the workpiece W is relatively moved in the weight loss direction. By doing so, in addition to the physical relative movement of the tool 7 and the workpiece W (movement in the weight loss direction and movement in the feed direction), the contact surface (movement in the weight loss direction and the movement in the feed direction) in which the tool 7 and the workpiece W interact with each other ( And its vicinity) to cause a chemical reaction. As a result, it is possible to reduce the weight of the work piece W and change it to a desired shape without damaging the work piece W.

また、第2実施形態の加工方法は、第一の部材からなる被加工物Wの一部を減量させて所望の形状に変化させる加工方法であって、第一の部材とは異なる第二の部材からなる工具7を超音波振動させつつ、該工具7および被加工物Wの一方を送り方向に移動し、工具7および被加工物Wの他方を送り方向と同方向に退避移動させることにより該工具7が該被加工物Wを押圧する際に被加工物Wにかかる過剰圧力を緩衝させるとともに、工具7と被加工物Wによる化学的反応を生じさせながら加工を進行させて、所望の形状になるまで被加工物の一部を減量する、ものである。 Further, the processing method of the second embodiment is a processing method of reducing a part of the workpiece W made of the first member to change it into a desired shape, and is different from the first member. By ultrasonically vibrating the tool 7 made of the member, one of the tool 7 and the workpiece W is moved in the feed direction, and the other of the tool 7 and the workpiece W is retracted and moved in the same direction as the feed direction. When the tool 7 presses the workpiece W, the excessive pressure applied to the workpiece W is buffered, and the machining proceeds while causing a chemical reaction between the tool 7 and the workpiece W to be desired. A part of the work piece is reduced until it becomes a shape.

より具体的には、被加工物Wを治具5により保持し、工具7を超音波振動させつつ該工具7と被加工物Wとを被加工物Wの(減量方向に)物理的に相対移動させる工程と、被加工物Wに対して工具7を所望の送り方向に移動させるべく、工具7および被加工物Wの一方を移動させる工程と、工具7または被加工物Wの実際の送り量に対して、工具7と被加工物Wの間の相対的な送り量が減少するように、工具7および被加工物Wの他方を送り方向に退避移動させる工程と、被加工物Wまたは工具7が退避移動する際、退避移動する被加工物Wまたは工具7を復帰移動方向に付勢する工程と、工具7と被加工物Wによる化学的反応を生じさせながら該被加工物の一部を減量させる工程と、を有する。 More specifically, the work piece W is held by the jig 5, and the tool 7 and the work piece W are physically relative to each other (in the weight loss direction) while the tool 7 is ultrasonically vibrated. The step of moving, the step of moving one of the tool 7 and the work piece W in order to move the tool 7 with respect to the work piece W in a desired feed direction, and the actual feed of the tool 7 or the work piece W. A step of retracting and moving the other side of the tool 7 and the work piece W in the feed direction so that the relative feed amount between the tool 7 and the work piece W decreases with respect to the amount, and the work piece W or When the tool 7 retracts and moves, the process of urging the workpiece W or the tool 7 to retract and move in the return movement direction, and one of the workpieces while causing a chemical reaction between the tool 7 and the workpiece W. It has a step of reducing the weight of the portion.

第2実施形態においても、超音波振動する工具7と被加工物Wの両材料の間に化学的反応を生じさせ、少なくとも一方(材料の一部)を減量(磨耗)させる。この化学的反応による減量は例えば、第1実施形態と同様に、当接した工具7と被加工物Wの材料同士を分子レベル(または原子レベル)で化学的に結合させ、一旦接合(接着)した状態から超音波振動によって材料同士を引き剥がす(引き離す)ことで、一方の材料(例えば被加工物Wの材料)の一部を他方の材料(例えば工具7の材料)に接合(接着)した状態で引き剥がし、一方の材料を減量させるものである。なお、材料によっては、両者が互いに減量する(減量の程度が異なる)場合もある。この場合、工具7と被加工物Wは、互いに化学的な結合が可能な材料であるとともに、工具7は結合後に剥離(離脱)しにくい材料を選択し、被加工物Wは工具7に比べて結合後に剥離(離脱)しやすい材料を選択することが望ましいといえる。また、水分を加えることでより効果的に加工を進行させることができる場合もある。 Also in the second embodiment, a chemical reaction is generated between both the materials of the tool 7 that vibrates ultrasonically and the work piece W, and at least one (a part of the material) is reduced (worn). The weight loss due to this chemical reaction is, for example, the same as in the first embodiment, in which the materials of the contacted tool 7 and the workpiece W are chemically bonded to each other at the molecular level (or atomic level) and once bonded (adhered). By peeling (pulling) the materials from each other by ultrasonic vibration, a part of one material (for example, the material of the workpiece W) is joined (adhered) to the other material (for example, the material of the tool 7). It is peeled off in a state to reduce the weight of one of the materials. Depending on the material, both may lose weight (the degree of weight loss differs). In this case, the tool 7 and the workpiece W are materials that can be chemically bonded to each other, and the tool 7 selects a material that does not easily peel off (separate) after bonding, and the workpiece W is compared with the tool 7. It can be said that it is desirable to select a material that easily peels off (separates) after bonding. In some cases, the processing can proceed more effectively by adding water.

また、このような化学的反応による減量は、機械的な加工(研磨や切削)が生じない程度で材料同士(工具7と被加工物W)を当接させる(機械的加工が生じず、かつ化学的な(分子レベルまたは原子レベルの)結合を生じさせる)ことで進行すると考えられ、工具7と被加工物Wを適切な圧力で当接させることが望ましい。 Further, in the weight loss due to such a chemical reaction, the materials (tool 7 and the workpiece W) are brought into contact with each other to the extent that mechanical processing (polishing or cutting) does not occur (mechanical processing does not occur and the work piece W). It is considered that the process proceeds by forming a chemical (molecular or atomic level) bond, and it is desirable to bring the tool 7 and the workpiece W into contact with each other at an appropriate pressure.

そこで、本実施形態では、ジルコニア(工具7)とソーダ石灰ガラス(被加工物W)の間の押圧力を、最も効率よく加工が進行する(効率よく化学的反応による減量が生じる)所定範囲に維持すべく、工具7または被加工物Wの一方を、加工を進行させるための他方の送り方向と同方向に退避させながら加工を行う。これにより工具7が被加工部位を押圧する際に被加工領域WAにかかる過剰圧力を緩衝させながら、加工を進行させることができる。 Therefore, in the present embodiment, the pressing force between the zirconia (tool 7) and the soda lime glass (workpiece W) is set within a predetermined range in which the machining proceeds most efficiently (weight loss due to a chemical reaction occurs efficiently). In order to maintain the machining, one of the tool 7 or the workpiece W is retracted in the same direction as the other feeding direction for advancing the machining. As a result, the machining can proceed while buffering the excessive pressure applied to the workpiece area WA when the tool 7 presses the workpiece.

なお、この場合も、水分を加えることでより効果的に加工を進行させることができる場合もある。 In this case as well, it may be possible to proceed with the processing more effectively by adding water.

また、第2実施形態においては、上記(化学的結合と剥離)以外の化学的反応による減量であってもよいし、上記の化学的反応による減量と他の化学的反応による減量とが混在していてもよい。また、これらに機械的な加工による減量(切削や研削)が含まれていてもよいが、その場合主として化学的反応によって減量が進行する(化学的反応による減量の程度が減量全体の50%を占める)ものとする。 Further, in the second embodiment, the weight loss may be due to a chemical reaction other than the above (chemical bond and exfoliation), or the weight loss due to the above chemical reaction and the weight loss due to another chemical reaction are mixed. You may be. In addition, these may include weight loss by mechanical processing (cutting or grinding), but in that case, the weight loss progresses mainly by a chemical reaction (the degree of weight loss by a chemical reaction is 50% of the total weight loss). Occupy).

<他の実施形態>
上記の例では、加工装置1がドリル型の工具7を回転駆動するフライス盤による装置の場合であって、治具5が緩衝機構20(退避移動機構21および付勢機構23)を備える例を示したが、これに限らない。
<Other embodiments>
In the above example, the processing device 1 is a device using a milling machine for rotationally driving a drill-type tool 7, and the jig 5 includes a buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). However, it is not limited to this.

例えば、加工装置1が円柱状の被加工物Wを回転させる旋盤加工等の装置の場合であって、工具支持部17が緩衝機構20(退避移動機構21および付勢機構23)を備える構成であってもよい。 For example, in the case where the processing device 1 is a device for lathe processing or the like that rotates a columnar workpiece W, the tool support portion 17 is provided with a buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). There may be.

また、加工装置1がエンドミル型の工具7を回転駆動するフライス盤による加工等の装置の場合であって、治具5を支持するテーブル3が緩衝機構20(退避移動機構21および付勢機構23)を備える構成であってもよい。 Further, in the case where the processing device 1 is a device for processing by a milling machine that rotationally drives an end mill type tool 7, the table 3 that supports the jig 5 is a buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). It may be configured to include.

また、上記の実施形態では、退避移動機構21と付勢機構23とを別の構成とする例を示したが、退避移動機構21と付勢機構23は、緩衝機構20として一体的なものであってもよい。例えば、図1に示す例において、治具5自体を緩衝機能を有する弾性体(ゴムやスポンジ状の樹脂材料など)で構成してもよいし、図3に示す例において、例えば工具7の主軸またはシャンク自体を緩衝機能を有する弾性体(ゴムやスポンジ状の樹脂材料など)で構成してもよい。 Further, in the above embodiment, an example in which the evacuation movement mechanism 21 and the urging mechanism 23 have different configurations is shown, but the evacuation movement mechanism 21 and the urging mechanism 23 are integrated as a buffer mechanism 20. There may be. For example, in the example shown in FIG. 1, the jig 5 itself may be made of an elastic body having a cushioning function (rubber, sponge-like resin material, etc.), or in the example shown in FIG. 3, for example, the spindle of the tool 7. Alternatively, the shank itself may be made of an elastic body having a cushioning function (rubber, sponge-like resin material, etc.).

また、本実施形態の加工は、例えば、切削(ミーリング)加工(マシニング加工、フライス加工)である正面フライス削り、エンドミル削り、平フライス削り、平面切削、側面切削、溝削りや、旋盤(旋削)加工(外丸削り、面削り、テーパ削り、ねじ切り、突切り等)、穴開け、中ぐり(刳り貫き)等の加工や、研削加工(平面研削、成形研削、円筒研削、ダイシング加工、スライシング加工等)などに適用可能である。 Further, the machining of the present embodiment includes, for example, front milling, end milling, flat milling, flat milling, side cutting, grooving, and lathe (turning), which are cutting (milling) machining (machining, milling). Machining (outer rounding, surface shaving, taper shaving, threading, parting, etc.), drilling, centering (cutting through), etc., and grinding (plane grinding, forming grinding, cylindrical grinding, dying, slicing, etc.) ) Etc. can be applied.

また、緩衝手段10は、コイルばねによらず他のばねであってもよいし、スポンジや樹脂などの弾性部材であってもよい。また、油圧や空圧などで緩衝させるものであってもよい。また、治具5が緩衝手段10を備える場合、治具5の材質をスポンジや樹脂などの弾性体で構成するものであってもよい。 Further, the cushioning means 10 may be another spring regardless of the coil spring, or may be an elastic member such as a sponge or a resin. Further, it may be buffered by hydraulic pressure or pneumatic pressure. Further, when the jig 5 includes the cushioning means 10, the material of the jig 5 may be made of an elastic body such as sponge or resin.

また、緩衝機構20は、工具7または被加工物Wの一方を、加工を進行させる他方の送り方向と同方向に退避させながら加工を進行させる機構であれば上記の例に限らない。 Further, the shock absorbing mechanism 20 is not limited to the above example as long as it is a mechanism for advancing machining while retracting one of the tool 7 or the workpiece W in the same direction as the other feeding direction for advancing machining.

また、例えば、被加工物Wの基準となる部位の位置を、計測手段11の測定手段(例えば、マイクロメータやダイヤルゲージなど)によって適宜のタイミング(例えば、加工開始時、加工途中、加工終了時などのタイミング)で計測することによって、加工量を適宜(随時)検出し、制御手段にフィードバックして送り駆動手段25、退避移動機構21および付勢機構23等を適宜制御することにより、当該圧力を加工が効率よく進行する所定の範囲に維持しながら加工を行うものであってもよい。 Further, for example, the position of the reference portion of the workpiece W is determined by the measuring means (for example, a micrometer, a dial gauge, etc.) of the measuring means 11 at an appropriate timing (for example, at the start of machining, during machining, or at the end of machining). The pressure is appropriately (as needed) detected by measuring at such timings) and fed back to the control means to appropriately control the feed drive means 25, the evacuation movement mechanism 21, the urging mechanism 23, and the like. May be performed while maintaining a predetermined range in which the processing proceeds efficiently.

また、工具7と被加工物Wの当接する圧力を適宜のタイミングで検出し、制御手段にフィードバックして送り駆動手段25、退避移動機構21および付勢機構23等を適宜制御することによって、当該圧力を加工が効率よく進行する所定の範囲に維持しながら加工を行うものであってもよい。 Further, the pressure at which the tool 7 and the workpiece W come into contact with each other is detected at an appropriate timing, and the pressure is fed back to the control means to appropriately control the feed drive means 25, the evacuation movement mechanism 21, the urging mechanism 23, and the like. The processing may be performed while maintaining the pressure within a predetermined range in which the processing proceeds efficiently.

本発明は、上記実施形態に限られるものではなく、その趣旨および技術思想を逸脱しない範囲で種々の変形が可能である。 The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit and technical idea.

1 加工装置
3 テーブル
5 治具
7 工具
9 駆動手段
10 緩衝手段
11 計測手段
17 工具支持部
20 緩衝機構
21 退避移動機構
23 付勢機構
25 駆動手段
51 基台
52 保持部
53 支持部
111 退避状態検出手段
113 状態検出手段
115 計算手段
521 保持面
531 外筒
532 内筒
533 弾性部材
535 ストッパー
P0 復帰位置
W 被加工物
1 Processing equipment 3 Table 5 Jig 7 Tool 9 Driving means 10 Buffering means 11 Measuring means 17 Tool supporting part 20 Buffering mechanism 21 Evacuation moving mechanism 23 Biasing mechanism 25 Driving means 51 Base 52 Holding part 53 Supporting part 111 Evacuation state detection Means 113 State detection means 115 Calculation means 521 Holding surface 531 Outer cylinder 532 Inner cylinder 533 Elastic member 535 Stopper P0 Return position W Work piece

Claims (8)

被加工物の一部を減量させて所望の形状に変化させる加工装置であって、
前記被加工物を保持する治具と、
前記被加工物の一部に当接させる工具と、
前記工具を前記被加工物に対して相対移動させる駆動手段と、
前記被加工物に対して前記工具を所望の送り方向に移動させるべく、前記工具および前記被加工物の一方を移動させる送り駆動手段と、を有し、
前記被加工物はガラス系材料であり、
前記工具はジルコニアにより構成され、
前記工具と前記被加工物による化学的反応を生じさせながら該被加工物の一部を減量させる、
ことを特徴とする加工装置。
A processing device that reduces the weight of a part of the work piece and changes it to a desired shape.
A jig for holding the work piece and
A tool that comes into contact with a part of the work piece,
A driving means for moving the tool relative to the workpiece,
It has a feed driving means for moving one of the tool and the workpiece in order to move the tool in a desired feed direction with respect to the workpiece.
The work piece is a glass-based material and is
The tool is made of zirconia
A part of the work piece is reduced while causing a chemical reaction between the tool and the work piece.
A processing device characterized by this.
前記工具および前記被加工物の一方を送り方向に移動し、前記工具および前記被加工物の他方を前記送り方向と同方向に退避移動させることにより該工具が該被加工物を押圧する際に該被加工物にかかる過剰圧力を緩衝させる緩衝機構を備える、
ことを特徴とする請求項1に記載の加工装置。
When one of the tool and the workpiece is moved in the feed direction and the other of the tool and the workpiece is retracted and moved in the same direction as the feed direction so that the tool presses the workpiece. A buffer mechanism for buffering excess pressure applied to the workpiece is provided.
The processing apparatus according to claim 1, wherein the processing apparatus is characterized in that.
前記送り駆動手段による実際の送り量に対して、前記工具と前記被加工物の間の相対的な送り量が減少するように、前記工具および前記被加工物の他方を前記送り方向に退避移動させる退避移動機構と、
前記退避移動機構により前記被加工物または前記工具が退避移動する際、退避移動する前記被加工物または前記工具を復帰移動方向に付勢する付勢機構と、を備える、
ことを特徴とする請求項1に記載の加工装置。
The other side of the tool and the workpiece is retracted and moved in the feed direction so that the relative feed amount between the tool and the workpiece is reduced with respect to the actual feed amount by the feed drive means. Evacuation movement mechanism to make
The evacuation movement mechanism includes an urging mechanism that urges the work piece or the tool to move in the return movement direction when the work piece or the tool retracts and moves.
The processing apparatus according to claim 1, wherein the processing apparatus is characterized in that.
前記駆動手段は、前記工具を超音波振動させる、
ことを特徴とする請求項1から請求項3のいずれか一項に記載の加工装置。
The driving means ultrasonically vibrates the tool.
The processing apparatus according to any one of claims 1 to 3, wherein the processing apparatus is characterized in that.
ガラス系材料の被加工物の一部を減量させて所望の形状に変化させる加工方法であって、
前記被加工物を治具により保持し、ジルコニアからなる工具と前記被加工物とを相対移動させる工程と、
前記被加工物に対して前記工具を所望の送り方向に移動させるべく、前記工具および前記被加工物の一方を移動させる工程と、を有し、
前記工具と前記被加工物による化学的反応を生じさせながら該被加工物の一部を減量させる、
ことを特徴とする加工方法
It is a processing method that reduces the weight of a part of the work piece of glass-based material to change it to a desired shape.
A process of holding the work piece with a jig and relatively moving the tool made of zirconia and the work piece.
It has a step of moving one of the tool and the work piece in order to move the tool in a desired feed direction with respect to the work piece.
A part of the work piece is reduced while causing a chemical reaction between the tool and the work piece.
A processing method characterized by that.
前記工具および前記被加工物の一方を送り方向に移動し、
記工具および前記被加工物の他方を前記送り方向と同方向に退避移動させることにより該工具が被加工物を押圧する際に該被加工物にかかる過剰圧力を緩衝させながら加工を進行させる、
ことを特徴とする請求項5に記載の加工方法
Go one in the feeding direction of the tool and the workpiece,
Advanced machining while the other pre-SL tool and the workpiece excessive pressure on the workpiece is buffered when pressing the tool the workpiece by retracting movement in the feeding direction in the same direction Let me
Processing method according toMotomeko 5, characterized in that.
前記工具または前記被加工物の実際の送り量に対して、前記工具と前記被加工物の間の相対的な送り量が減少するように、前記工具および前記被加工物の他方を前記送り方向に退避移動させる工程と、
前記被加工物または前記工具が退避移動する際、退避移動する前記被加工物または前記工具を復帰移動方向に付勢する工程と、を備える、
ことを特徴とする請求項5に記載の加工方法。
The actual amount of feed of the tool or the workpiece, the said tool as the relative feed amount between the workpiece is reduced, the feeding direction and the other of said tool and said workpiece The process of evacuating and moving to
The process includes a step of urging the workpiece or the tool to be retracted and moved in the return movement direction when the workpiece or the tool is retracted and moved.
The processing method according to claim 5, wherein the processing method is characterized by the above.
前記工具を超音波振動させる、
ことを特徴とする請求項5から請求項7のいずれか一項に記載の加工方法
The tool is ultrasonically vibrated.
The processing method according to any one of claims 5 to 7, wherein the processing method is characterized by the above.
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