JP6755565B1 - Processing equipment and processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce machining defects in machining, particularly drilling, and improve machining efficiency even when the pressing force of a tool during machining is large with respect to the rigidity (strength) of the workpiece. A processing device and a processing method are provided. SOLUTION: A processing apparatus 1 has a jig 5 for holding a work piece W, a tool 7 for abutting a part of the work piece W, and a drive for moving the tool 7 relative to the work piece W. The means 9 and the feed driving means 25 for moving one of the tool 7 and the workpiece W in order to move the tool 7 with respect to the workpiece W in a desired feed direction, and the workpiece W has A part of the weight is reduced to change the shape to a desired shape, the workpiece W is a glass-based material, and the tool 7 is made of zirconia. [Selection diagram] Fig. 1

Description

The present invention relates to, for example, a processing apparatus and a processing method for a member such as glass.

Conventionally, there are various materials for cutting tools such as diamond, ceramics, and cemented carbide, which are selected according to the workpiece.

For example, a diamond tool is generally used in processing such as cutting glass. Since this diamond tool is slippery on the surface of glass, it is necessary to perform cutting while pressing the diamond tool against the glass with a strong force during processing.

By the way, in the case of drilling to form a through hole in a part of the glass plate, the tip of the diamond tool is arranged so as to be in contact with the surface of the glass plate and the processing is performed while pressing, but the pressing direction ( It may not be possible to place a glass plate support member (jig) on the back side of the surface that the tool comes into contact with. In this case, it is necessary to process at least excluding the drilled portion, that is, in a state where the region outside the drilled portion (the peripheral portion of the glass plate) is held by the jig.

Japanese Unexamined Patent Publication No. 2013-53019

However, when the drilling portion is not supported, there is a problem that when the glass plate becomes thin, the glass plate is damaged by the pressing force of the diamond tool (damage extends to areas other than the desired drilling region).

There is also a method of grinding while maintaining the pressing force of the diamond tool to the extent that the glass plate does not break, but in that case, the processing takes an enormous amount of time and is not practical.

As described above, the drilling process for the glass plate has a problem that it is very difficult, especially when the plate thickness is thin.

Further, this is not limited to the case where the glass plate is machined with a diamond tool, but is also a problem that occurs when the pressing force of the tool during machining is large with respect to the rigidity (strength) of the workpiece.

The present invention has been made in view of the above problems, and even when the pressing force of the tool during machining is large with respect to the rigidity (strength) of the workpiece, machining defects, especially drilling, are performed. It is an object of the present invention to provide a processing apparatus and a processing method capable of reducing the number of items and improving the processing efficiency.

The present invention is a processing device that reduces a part of a work piece to change it into a desired shape, and comprises a jig for holding the work piece and a tool for contacting a part of the work piece. , A driving means for moving the tool relative to the work piece, and a feed for moving one of the tool and the work piece in order to move the tool in a desired feed direction with respect to the work piece. It has a driving means, the work piece is a glass-based material, the tool is made of zirconia, and a part of the work piece is formed while causing a chemical reaction between the tool and the work piece. It relates to a processing apparatus characterized in that the weight is reduced .

Further, the present invention is a processing method for reducing a part of a work piece of a glass-based material to change it into a desired shape, in which the work piece is held by a jig, a tool made of zirconia, and the work piece. a step for relatively moving the workpiece, the order to move the tool in the desired feed direction relative to the workpiece, have a, a step of moving one of said tool and said workpiece, said tool And a part of the work piece is reduced while causing a chemical reaction with the work piece.
It relates to a processing method characterized by the above.

According to the present invention, even when the pressing force of the tool during machining is large with respect to the rigidity (strength) of the workpiece, machining defects in machining, especially drilling, are reduced and machining efficiency is improved. It becomes possible to provide a processing apparatus and a processing method capable of providing a processing device and a processing method.

It is a schematic view which shows the processing apparatus of embodiment of this invention, is (A) side view, (B) partial side view, (C) partial top view. It is a figure explaining the tool of embodiment of this invention, is (A) side view, (B) side view, (C) sectional view. It is a schematic view which shows the processing apparatus of embodiment of this invention, is (A) side view, (B) top view of a jig, (C) side view of a jig. It is a side schematic diagram explaining the processing method which concerns on embodiment of this invention.

Hereinafter, the processing apparatus 1 and the processing method according to the embodiment of the present invention will be described in detail with reference to the drawings.

<First Embodiment>
1A and 1B are schematic views for explaining the processing apparatus 1 of the present embodiment, FIG. 1A is a schematic side view of the processing apparatus 1, and FIG. 1B is a work piece W and a processing target area WA. A side view showing the above, and the figure (C) is a top view of the figure (B). 2A and 2B are views for explaining the tool 7, in which FIG. 2A is a side view showing the tool 7 and the driving means 9, and FIG. 2B is a side view showing the shape of the tool 7 and FIG. 2C. ) Is a cross-sectional view of the figure (B).

As shown in FIG. 1A, the processing apparatus 1 of the present embodiment includes a jig 5 for holding the workpiece W, a tool 7 for abutting a part of the workpiece W, and a driving means 9. The feed driving means 25 is provided, and a part of the workpiece W is reduced in weight to be changed into a desired shape. The processing for reducing a part of the workpiece W is, for example, a drilling process for penetrating the workpiece W from one surface side to the other surface side, and a thickness from one surface side to the other surface of the workpiece W. Although it is reduced, it does not penetrate to the other surface side (concavities and convexities are formed in the thickness direction of the workpiece W), and the area of the workpiece W in the plan view is reduced (shape of the workpiece W in the plane direction). Deformation (reduction) processing, shaving processing, etc. Here, as shown in FIGS. (B) and (C), a case where a part of the plate-shaped workpiece W is drilled in a circular shape is illustrated. In FIGS. (B) and (C), the area to be machined (area to be drilled) WA is indicated by a large broken line.

In this example, the W to be processed is a glass-based material, and specifically, borosilicate glass, soda-lime glass (soda-lime glass), lead glass, alkali barium silicate glass, aluminosilicate glass, or synthetic molten silica. Such as, preferably soda-lime glass (soda-lime glass). Further, the tool 7 is made of zirconia (zirconium dioxide (ZrO2)).

The jig 5 holds (for example, grips) the workpiece W around the work piece W except at least the work target area WA. The tool 7 is arranged on one surface (first surface Sf1) side of the workpiece W, abuts on the first surface Sf1 during machining, and applies an appropriate pressing force to the other surface. Processing proceeds toward (second surface Sf2).

As an example, the tool 7 has a cylindrical shape (cylindrical shape) as shown in FIG. 2 (A), or a core (cup) shape as shown in FIGS. (B) and (C). Specifically, it has a base portion 7A and a diameter-expanded portion 7B, the base portion 7A has a cylindrical shape, and the diameter-expanded portion 7B is provided at the tip of the base portion 7A (the tip that abuts on the workpiece W). It has a substantially cylindrical shape with a diameter larger than that of the base 7A and an opening on the tip side.

The shape of the tool 7 is not limited to the one shown in the drawing, and may be, for example, a flat end mill, a ball end mill, a taper end mill, or the like.

The driving means 9 is a means for driving the tool 7 and the workpiece W so as to reduce the weight of a part of the workpiece W by physically moving the tool 7 and the workpiece W relative to each other. The drive means 9 in this example is a rotary drive means that rotates the tool 7 and the workpiece W relative to each other, and is, for example, a motor that rotationally drives the tool 7 or the spindle of the tool 7. By the driving means 9, the tool 7 is rotationally driven by the spindle 50 about the vertical Z axis. Further, it is desirable that the spindle 50 includes, for example, an ultrasonic vibration means 55. The ultrasonic vibration means 55 has an ultrasonic oscillator 56 and an ultrasonic horn 57. The ultrasonic vibrator 56 causes ultrasonic vibration in the axial direction. The ultrasonic horn 57 resonates with the ultrasonic vibration generated by the ultrasonic vibrator 56 and amplifies the ultrasonic vibration. Then, the ultrasonic horn 57 transmits the amplified axial ultrasonic vibration to the tool 7. That is, the driving means 9 rotationally drives the tool 7 while ultrasonically vibrating it.

When the tool 7 comes into contact with the tool 7 and is pressed, a part of the work piece W (work area WA) is, in this example, the rotation direction of the tool 7 (X-axis-Y-axis direction in FIG. 1A). Weight loss.

With reference to FIG. 1, the feed driving means 25 is a means for relatively moving the tool 7 and the workpiece W in a direction in which they are pressed against each other, and is a means for feeding the tool 7 or a means for feeding the workpiece W. .. In this example, the pressing direction is the extending direction of the main shaft of the tool 7, that is, the vertical direction (Z-axis direction, the direction from the first surface Sf1 to the second surface Sf2).

That is, in the processing apparatus 1 of the present embodiment, the tool 7 and the workpiece W are driven by the driving means 9 in the rotational driving direction (X-axis-Y-axis) of the tool 7 in a state where the tool 7 is in contact with the workpiece W and pressed against each other. The work piece W is reduced in the rotation drive direction (X-axis-Y-axis direction) by ultrasonically vibrating the tool 7 while rotating relative to the direction). When the weight loss in the rotation drive direction progresses to a predetermined amount (the amount of weight loss disappears), the weight loss does not proceed. Therefore, the machining apparatus 1 uses the feed drive means 25 so that the tool 7 and the workpiece W are pressed against each other. The tool 7 and the workpiece W are relatively moved (pressed) in the Z-axis direction, and the weight loss of the workpiece W is advanced in the vertical direction. That is, the machining apparatus 1 rotates the tool 7 to reduce the weight of the workpiece W in a certain direction (for example, in a planar shape), and sends (extrudes) the tool 7 in a further direction, for example. Weight loss proceeds in another direction (for example, the depth (thickness) direction). Hereinafter, the direction in which the tool 7 is rotationally driven (X-axis-Y-axis direction) is referred to as a weight loss direction, and the pressing direction (Z-axis direction) between the tool 7 and the workpiece W is referred to as a feeding direction.

Further, it is desirable that the processing device 1 has a buffer mechanism 20. The buffer mechanism 20 buffers the pressure (pressing pressure) applied to the workpiece W when the tool 7 comes into contact with the workpiece W. Although the details will be described later, for example, the buffer mechanism 20 moves one of the tool 7 and the workpiece W in the feed direction, and retracts and moves the other of the tool 7 and the workpiece W in the same direction as the feed direction. When the tool 7 presses the workpiece W, the excessive pressure applied to the workpiece W is buffered.

Further, the processing apparatus 1 uses a tool 7 formed of zirconia to bring it into contact with the soda lime glass which is the work piece W, and proceeds with processing while reducing (wearing) at least one of them. That is, the processing apparatus 1 of the present embodiment physically presses the tool 7 that vibrates ultrasonically and the workpiece W with an appropriate pressure to perform machining, but at that time, the processing apparatus W is excessively applied to the workpiece W. While buffering the pressure (pressing pressure), the workpiece W is relatively moved in the weight loss direction. By doing so, in addition to the physical relative movement of the tool 7 and the workpiece W (movement in the weight loss direction and movement in the feed direction), the contact surface (movement in the weight loss direction and the movement in the feed direction) in which the tool 7 and the workpiece W interact with each other ( And its vicinity), the weight is reduced mainly while causing a chemical reaction. As a result, it is possible to reduce the weight of the work piece W and change it to a desired shape without damaging the work piece W. Here, "weight loss (processing) while mainly causing a chemical reaction" in the present embodiment is, for example, due to an event in which at least 50% or more of the weight loss (processing) is caused by the chemical reaction (chemistry). The degree of weight loss due to the target reaction accounts for 50% of the total weight loss), and it may be due to an event caused by a 100% chemical reaction, or it may be a part (less than 50%) of the weight loss (processing). Mechanical cutting and the like may be included.

A specific example of the processing apparatus 1 will be described with reference to FIG. 3, which is a side view of the processing apparatus 1. In the following embodiment, a case where the processing device 1 is a device such as a milling machine for rotationally driving a tool 7 such as a drill will be described as an example.

The processing device 1 of the present embodiment includes a table 3, a jig 5, a retracting movement mechanism 21, an urging mechanism 23, a tool (machining tool) 7 made of zirconia, a driving means 9 of the tool 7, and a feed. It has a drive means 25, a tool support portion 17 for supporting the tool 7, a control means, and the like.

The table 3 is, for example, an X-axis-Y-axis table (stage) for moving a work piece (for example, soda-lime glass) W in a horizontal X-axis-Y-axis plane.

The jig 5 is a means for holding (supporting) the workpiece W provided on the table 3, and as shown in FIGS. (B) and (C), for example, a base 51 and a holding portion. It has 52, a support portion 53, and the like. Here, as an example, a jig 5 for drilling a work piece W is shown so that the work piece W around the work piece W can be held (for example, gripped) except at least the work target area WA. , Has a frame shape with an open central portion (Fig. (B)). In the figure (A), the jig 5 is shown in a cross-sectional view taken along the line aa in the figure (B) in order to show the holding state of the workpiece W.

Further, the jig 5 of the present embodiment includes a buffer mechanism 20 as an example. The buffer mechanism 20 is, for example, a mechanism including a retracting movement mechanism 21 and an urging mechanism 23. The retracting movement mechanism 21 uses the other of the tool 7 and the workpiece W so that the relative feed amount between the tool 7 and the workpiece W decreases with respect to the actual feed amount by the feed driving means 25. It is a mechanism that retracts and moves in the feed direction. Further, the urging mechanism 23 is a mechanism that urges the workpiece W or the tool 7 to be retracted and moved in the return moving direction when the workpiece W or the tool 7 is retracted and moved by the retracting and moving mechanism 21. The buffer mechanism 20 will be described in detail later.

For example, a support portion 53 is erected on the base 51 at an appropriate position, and a flat plate holding portion 52 is provided at the upper end portion of the support portion 53, for example. In this example, the holding portion 52 has a rectangular (square) frame shape in a plan view, and the supporting portions 53 are provided at four positions corresponding to the four corners near the outer periphery of the holding portion 52. explain. The outer shape of the holding portion 52 is not limited to this example, and may be a rectangular shape or a circular shape having a long side and a short side. In either case, the holding portion 52 has a shape capable of holding at least the outer edge portion of the workpiece W as a whole (or selectively), and holds the workpiece W in contact with the inside (inner peripheral side) thereof. (To support. Further, in the following example, the upper surface side of the holding portion 52 (the upper surface side in the Z-axis direction in FIG. 3C) is referred to as a holding surface 521 for convenience of explanation.

The holding portion 52 does not have to have a frame shape depending on the processing mode of the workpiece W. For example, in the case of hollowing processing in which the workpiece W does not penetrate in the thickness direction (Z-axis direction in FIG. 3), the holding portion 52 may have a flat plate shape (having no opening).

Further, the arrangement and the number of the support portions 53 may be two locations corresponding to both ends of the holding portion 52 or one location corresponding to the center, depending on the shape of the holding portion 52.

Further, as will be described in detail later, in the jig 5 of the present embodiment, the holding portion 52 is in the extending direction of the spindle of the tool 7 with respect to the base 51 (in this example, the vertical direction (Z-axis direction in the drawing)). It is configured to be relatively movable.

The drive means 9 is, for example, a rotary drive means for relatively moving the tool 7 and the workpiece W in the weight loss direction (relative rotation, and has the same configuration as shown in FIGS. 1 and 2.) By the drive means 9. The tool 7 is rotationally driven by a spindle about a vertical Z-axis and is ultrasonically vibrated.

In this example, the feed driving means 25 is a means for moving the tool 7 in a desired feed direction with respect to the workpiece W, and is provided on, for example, a tool support portion 17 that supports (holds) the tool 7. As an example, the tool support portion 17 is a Z-axis feed stage that moves in the Z-axis direction, and in this example, the feed direction is the extending direction of the spindle of the tool 7, that is, the vertical direction (Z-axis direction in the figure, jig). (Direction perpendicular to the surface of the holding portion 52 of 5).

Further, it is desirable that the processing apparatus 1 of the present embodiment includes the measuring means 11. The measuring means 11 includes, for example, a retracted state detecting means 111 that detects a retracted state by the retracted moving mechanism 21, a feed state detecting means 113 that detects an actual feed state by the feed driving means 25, and a retracted state and a feed state. It has a calculation means 115 and the like for calculating the relative feed amount of the tool 7 and the workpiece W from the relative difference. The measuring means 11 will be described in detail later.

Each part of these processing devices 1 is collectively controlled by control means (not shown). The control means is composed of a CPU, RAM, ROM, and the like, and executes various controls. The CPU is a so-called central processing unit, and various programs are executed to realize various functions. The RAM is used as a work area of the CPU. The ROM stores the basic OS and programs executed by the CPU.

The control means includes a numerical control means (numerical control device) (not shown) that numerically controls the table (X-axis-Y-axis table) 3 and the tool support portion (Z-axis feed stage) 17. The numerical control device rotates the tool (grinding stone) 7 at high speed around the Z axis by the spindle, and the rotation torque and the like are controlled to move the workpiece W in the horizontal XY plane to rotate the tool 7. By bringing them into contact with each other, the work piece W can be reduced in weight and processed into a desired shape.

In the processing apparatus 1 of the present embodiment, when the tool 7 presses the workpiece W to be processed, the machining proceeds while buffering the excessive pressure applied to the workpiece W until a desired shape is obtained. The weight of the work piece W is reduced. In other words, the amount of the workpiece W is reduced until the desired shape is obtained while maintaining the pressure when the tool 7 presses the workpiece W on the workpiece W within a predetermined range in which the machining proceeds. ..

More specifically, the tool 7 presses the work portion by advancing the machining while retracting one of the tool 7 or the workpiece W in the same direction as the other feed direction for advancing the machining. The excess pressure applied to the part to be machined is buffered, and the pressure (pushing pressure) at which the tool 7 and the part to be machined come into contact with each other is maintained within a predetermined range in which the machining proceeds efficiently. Can be done.

Here, the soda lime glass, which is the workpiece W, has conventionally been processed by using a diamond tool. However, the tool is slippery on the surface of the soda lime glass, and in order to prevent this, it was necessary to press the diamond tool with a considerable pressure. For this reason, when the soda lime glass is thin, or when the support (jig, table, etc.) cannot be arranged in the feed direction of the tool such as drilling, the soda lime glass is damaged and the processing is very difficult.

However, the applicant of the present application reduces the weight (wear) of at least one of the zirconia by bringing the zirconia into contact with a glass-based material (soda-lime glass, etc.) at an appropriate pressure (while releasing excessive pressure) while ultrasonically vibrating. I found that. This is because the surface of the glass becomes hot (600 ° C to 700 ° C) and a chemical reaction occurs between the ultrasonically vibrating zirconia and soda-lime glass, which causes at least one (a part of the material). Is considered to be weight loss (wear). More specifically, from the state in which the materials of the abutting tool 7 and the work piece W (for example, zirconia and soda-lime glass) are chemically bonded at the molecular level (or atomic level) and once bonded (bonded). When the materials are separated from each other by ultrasonic vibration, a part of one material (for example, the material of the workpiece W) is peeled off in a state of being bonded (adhered) to the other material (for example, the material of the tool 7), and one of them. Material is thought to be reduced. Depending on the material, both may lose weight (the degree of weight loss differs). Based on these findings, the tool 7 and the workpiece W are materials that can be chemically bonded to each other, and the tool 7 selects a material that does not easily peel off (separate) after bonding (for example, zirconia). It can be said that it is desirable to select a material (for example, a glass-based material (soda-lime glass or the like)) that is more easily peeled (disengaged) after bonding as compared with the tool 7. In some cases, the processing can proceed more effectively by adding water.

It should be noted that the weight loss due to a chemical reaction other than the above (chemical bond and peeling) and the weight loss due to another chemical reaction may be mixed. In addition, these may include weight loss by mechanical processing (cutting or grinding), but in that case, the weight loss progresses mainly by a chemical reaction (the degree of weight loss by a chemical reaction is 50% of the total weight loss). Occupy).

Further, in the weight loss due to such a chemical reaction, the materials (tool 7 and the workpiece W) are brought into contact with each other to the extent that mechanical processing (polishing or cutting) does not occur (mechanical processing does not occur and the work piece W) is brought into contact with each other. It is considered that the process proceeds by forming a chemical (molecular or atomic level) bond, and it has been found that it is desirable to bring the tool 7 and the workpiece W into contact with each other at an appropriate pressure.

Therefore, in the present embodiment, the pressing force between the zirconia (tool 7) and the soda lime glass (workpiece W) is set within a predetermined range in which the machining proceeds most efficiently (weight loss due to a chemical reaction occurs efficiently). In order to maintain the machining, one of the tool 7 or the workpiece W is retracted in the same direction as the other feeding direction for advancing the machining. As a result, the machining can proceed while buffering the excessive pressure applied to the workpiece area WA when the tool 7 presses the workpiece.

Specifically, as shown in FIG. 3, in the processing apparatus 1 of the embodiment of the present invention, one of the jig 5 and the tool support portion 17 has a shock absorber 20, whereby the workpiece W The excess pressure of the tool 7 applied to the tool 7 is buffered (absorbed), and the machining load on the workpiece W and the tool 7 is reduced. The buffer mechanism 20 is, for example, a mechanism including a retracting movement mechanism 21 for retracting and moving the tool 7 or the workpiece W, and an urging mechanism 23 for urging the tool 7 or the workpiece W in the return moving direction. ..

This will be described in more detail with reference to FIGS. (B) and (C). In this embodiment, as an example, the jig 5 includes a buffer mechanism 20, that is, a retracting movement mechanism 21 and an urging mechanism 23.

In this example, the retracting movement mechanism 21 is a supporting portion 53 that holds the holding portion 52 (holding surface 521) so as to be movable up and down in the direction perpendicular to the base 51 (vertical in this example). More specifically, the support portion 53 has an outer cylinder 531 and an inner cylinder 532 that is held inside the outer cylinder 531 so as to be able to advance and retreat with respect to the outer cylinder 531.

Further, the urging mechanism 23 is, for example, an elastic member 533 provided on the outer periphery of the support portion 53 and whose upper and lower ends are fixed to the holding portion 52 and the base 51. The elastic member 533 is, for example, a spring (coil spring) wound around the outer circumference of the outer cylinder 531 and having both upper and lower ends fixed to the holding portion 52 and the base 51.

The support portion 53 (evacuation moving mechanism 21) is the same as the actual feed direction of the tool 7 (the direction in which the tool 7 is fed by the feed drive means 25 when the machining proceeds, in this example, the direction toward the lower side of the Z axis). The holding portion 52 is configured to be retractable and movable in the direction, whereby the workpiece W on the holding portion 52 can be retracted and moved in the same direction as the actual feed direction of the tool 7.

The urging mechanism 23 urges the workpiece W to be retracted and moved in the return movement direction when the workpiece W is retracted and moved by the retracting and moving mechanism 21. The return movement direction is opposite to the evacuation movement direction, and is a direction toward the upper side of the Z axis.

Further, a stopper 535 is provided on the upper surface of the holding portion 52. The stopper 535 regulates the movement of the holding portion 52, which is urged upward in the Z direction by the urging mechanism 23 (elastic member 533), to a predetermined height.

As a result, the holding portion 52 and the workpiece W held by the holding portion 52 are pressed by the tool 7 during machining, and the evacuation moving mechanism 21 resists the urging force of the urging mechanism 23 while the tool 7 is pressed. It retracts and moves in the actual feed direction (downward on the Z axis), but as the machining by the workpiece W and the tool 7 progresses, the workpiece W (holding unit) retracted and moved by the retracting and moving mechanism 21 and the urging mechanism 23. 52) moves in the direction of returning to the initial position while being pressed by the tool 7.

It is desirable that the tool 7 is subjected to ultrasonic vibration by the ultrasonic vibration means 55, but in this case, the machining proceeds by the sound pressure and vibration by the ultrasonic waves and the pressurization of the tool 7. That is, since the sound pressure is also involved in the pressure (pushing pressure), the feed driving means 25, the retracting movement mechanism 21, the urging mechanism 23, and the like are controlled in consideration of the sound pressure.

Further, the measuring means 11 includes, for example, a retracted state detecting means 111 for detecting the retracted state by the retracted moving mechanism 21, a feed state detecting means 113 for detecting the actual feed state by the feed driving means 25, and a retracted state and a feed. It has a calculation means 115 for calculating the relative feed amount of the tool 7 and the workpiece W from the relative difference between the states.

Here, the evacuation state detected by the evacuation movement mechanism 21 is, for example, the amount of evacuation movement due to being pressed by the tool 7 (hereinafter referred to as “evacuation amount ΔN”).

Further, the actual feed state detected by the feed drive means 25 is, for example, an actual (absolute) feed amount (hereinafter, "absolute") that is a target (set when machining) for machining. The feed amount is referred to as “ΔT1”).

Further, the relative feed amount calculated by the calculation means 115 is the difference (ΔT1-ΔN) between the absolute feed amount ΔT1 and the evacuation amount ΔN, and is hereinafter referred to as “relative feed amount ΔT2”. The relative feed amount ΔT2 (= ΔT1-ΔN) between the tool 7 and the workpiece W can be said to be the amount of progress in machining.

In the evacuation movement mechanism 21 of the present embodiment, when the workpiece W is placed on the holding portion 52, the workpiece W is not pressed by the feed driving means 25 even when the tool 7 is not pressing the workpiece W. It moves in the evacuation movement direction by a predetermined amount according to the weight of (the urging mechanism 23 is set as such). However, in the present embodiment, as an example, the evacuation amount ΔN detected by the evacuation state detecting means 111 is such that the workpiece W presses (delivers) the workpiece W by the feed driving means 25, so that the workpiece W has a Z axis. It is assumed that the amount of change that has been retracted and moved downward (the amount of change that has been retracted and moved by pressing the tool 7 from the state where the workpiece W is placed on the holding portion 52 at the start of machining) is detected.

Depending on the setting of the urging force of the urging mechanism 23 described later, the holding portion 52 may not move downward on the Z axis only by placing the workpiece W on the holding portion 52, and is configured as such. You may be.

Then, the retracting movement mechanism 21 is urged by the urging mechanism 23 while the machining is in progress (while being pressed by the tool 7), so that the absolute feed amount ΔT1 of the tool 7 by the feed driving means 25 On the other hand, the workpiece W is retracted and moved in the direction in which the relative feed amount ΔT2 between the tool 7 and the workpiece W decreases. In the present embodiment, "moving the workpiece W back and forth in the direction in which the relative feed amount ΔT2 decreases" is, in other words, moving in the direction of returning to the initial position, but the initial position. It is a movement that seems to be still evacuating from.

Then, the processing apparatus 1 is controlled so as to end the processing (one step) when the evacuation amount ΔN by the evacuation movement mechanism 21 becomes (omitted) zero.

Specifically, for example, when machining 2 mm, the absolute feed amount ΔT1 (evacuation amount ΔN) of the tool 7 by the feed drive means 25 is set to 2 mm, and the evacuation amount ΔN (2 mm) becomes (omitted) zero. When processing is finished. Alternatively, for example, when machining 2 mm, machining may be performed in a plurality of steps. For example, in the first step, the absolute feed amount ΔT1 (evacuation amount ΔN) of the tool 7 by the feed drive means 25 is set to 0. Assuming that it is 2 mm, when the evacuation amount ΔN (0.2 mm) becomes (omitted) zero, the first step of machining is completed, the process proceeds to the next step (second step), and this is repeated to perform machining. May be good. In this case, when the 10th step is completed, the machining is completed. The amount of zirconia is also reduced (weared) by the chemical reaction between zirconia and soda-lime glass, but the amount is extremely small and has almost no effect on the control of the feed amount ΔT1 (evacuation amount ΔN).

The urging force of the urging mechanism 23 (elastic force of the elastic member 533) is set to be linked to the evacuation amount ΔN detected by the evacuation state detecting means 111, so that the evacuation movement and the return movement as described above are possible. It is set in a range that does not exceed the desired amount.

Specifically, when the feed driving means 25 feeds the tool 7 with an absolute feed amount ΔT1, the urging force of the urging mechanism 23 is determined by the buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). It is set so that the relative feed amount ΔT2 between 7 and the workpiece W can be retracted and moved in a decreasing direction. More specifically, for example, the position of the workpiece W in the Z-axis direction (of the jig 5) corresponds to the feed operation of the feed drive means 25 (the amount of evacuation ΔN by the retract movement mechanism 21). The urging force of the urging mechanism 23 is set so that the workpiece W can vibrate in a small range, for example, while allowing a minute displacement of the holding portion 52 (position in the Z-axis direction).

For example, when the urging mechanism 23 is an elastic member (coil spring) 533, a spring constant capable of expanding and contracting in conjunction with the evacuation amount ΔN by the evacuation movement mechanism 21 is appropriately selected. The elastic member 533 receives the pressing force of the feed driving means 25 and is compressed in the feeding direction (downward of the Z axis) of the feeding driving means 25, but resists the pressing force and the actual feed amount (absolute) of the tool 7. The work piece W (holding portion 52) is stretched to such an extent that the work piece W (holding portion 52) can be moved in a direction in which the relative feed amount ΔT2 between the tool 7 and the work piece W decreases with respect to the feed amount ΔT1. The spring constant is selected.

In other words, as the machining by the workpiece W and the tool 7 progresses, a spring constant is selected so that the workpiece W (holding portion 52) retracted and moved downward in the Z direction moves in the return direction.

However, the urging force of the urging mechanism 23, including the shape (size) of the tool 7 (zirconia) and the shape (thickness) of the work piece W (soda lime glass), is processed due to the chemical reaction between the two. It depends on the progress of. Therefore, the urging force of the urging mechanism 23 is controlled within a range not exceeding a desired amount that enables the above-mentioned evacuation movement and return movement, depending on the progress of processing caused by the chemical reaction between the two. .. That is, when the urging mechanism 23 is an elastic member 533, a spring constant within a range not exceeding a desired amount that enables the above-mentioned retract movement and return movement is appropriately selected.

Further, the feed driving means 25 controls the absolute feed amount ΔT1 so that the withdrawal amount ΔN of the workpiece W (holding portion 52) does not exceed a predetermined threshold value. Specifically, when the evacuation amount ΔN exceeds a predetermined threshold value (for example, a target machining amount), the absolute feed amount ΔT1 of the tool 7 is reduced, and the evacuation amount ΔN is a predetermined threshold value. When the position is less than the position (when the pushing amount is small and the tool 7 is in an idling state or a state close to it), control is performed to increase the absolute feed amount ΔT1 of the tool 7.

It is not necessary to perform the feed control during machining by the feed drive means 25, and the control by the drive means 9 of the tool 7 (rotation control, rotation torque) is performed instead of or in combination with the control by the feed drive means 25. The evacuation amount ΔN may be controlled so as not to exceed a predetermined threshold value.

Further, the elastic member 522 is not limited to the coil spring, and may be, for example, an air spring, a sponge, or the like, and the urging mechanism 23 is a mechanism (elastic force) for urging by magnetic force, hydraulic pressure, pneumatic pressure, or the like. It may be a mechanism having).

Further, the shock absorbing mechanism 20 is not limited to the above configuration, and has a configuration in which one of the tool 7 and the workpiece W is moved in the feed direction, and the other of the tool 7 and the workpiece W is retracted and moved in the same direction as the feed direction. It should be. Alternatively, the cushioning mechanism 20 may be configured to buffer the excessive pressure applied to the workpiece W when the tool 7 presses the workpiece W.

Further, the processing apparatus 1 is not limited to the configuration shown in FIG. 3, and has a configuration in which the machining of the workpiece W (soda-lime glass) proceeds by the tool 7 (zirconia), for example, the tool 7 (zirconia) is the workpiece W. A drive means 9 for moving relative to (soda-lime glass) and a feed drive means for moving one of the tool 7 and the work piece W in order to move the tool 7 with respect to the work piece W in a desired feed direction. Any configuration may have at least 25 and 25. Therefore, the ultrasonic vibration means 55 may not be provided, and the buffer mechanism 20 may not be provided.

The processing method in the processing apparatus 1 will be described in chronological order with reference to FIG. In the figure, the workpiece W is shown above the jig 5 (holding portion 52) for convenience of explaining the state of the workpiece W and the operation of the jig 5, but in reality, FIG. 3 As shown in the above, it is assumed that the jig 5 holds the peripheral portion of the workpiece W. In the case of hollowing processing that does not penetrate the workpiece W, the holding configuration may be the same as in FIG. 3, or the holding configuration shown in FIG. 4 may be used (in that case, the workpiece may be held. A means of fixing W so that it does not move is necessary). That is, the mode of holding the workpiece W by the jig 5 can be appropriately selected depending on the mode of processing.

The processing method of the present embodiment is a processing method in which a part of the work piece W of a glass-based material (for example, soda-lime glass) is reduced in weight to change it into a desired shape, and the work piece W is used as a jig 5 One of the tool 7 and the workpiece W in order to move the tool 7 made of zirconia and the workpiece W relative to the workpiece W in a desired feed direction. Has a step of moving the glass.

First, as shown in FIG. 6A, the workpiece W (for example, soda lime glass) is held by the holding portion 52 of the jig 5. In this example, in the state where the workpiece W is held by the jig 5 and before being pressed by the tool 7 (for example, zirconia), the urging mechanism 23 (elastic member 533) is caused by the weight of the workpiece W. After being compressed by a predetermined amount, the holding portion 52 is moved downward in the Z direction by the retracting movement mechanism 21 and the urging mechanism 23 from the position (indicated by the broken line) before holding the workpiece W. Depending on the setting of the urging force of the urging mechanism 23, the holding portion 52 may not move downward on the Z axis only by holding the workpiece W on the holding portion 52, and even if it is configured as such. Good. In this example, the movement due to the weight of the workpiece W alone is not included in the evacuation amount ΔN.

Then, from the reference surface (of the floor surface or the like) of the work piece W surface (or the holding surface 521 (see FIG. 3C)) at this time (in a state where the work piece W before processing is held (grasped)). The height of) is set to the return position P0.

Next, as shown in FIG. 3B, one of the tool 7 and the workpiece W is moved in the feed direction, and the other of the tool 7 and the workpiece W is retracted and moved in the same direction as the feed direction. When the tool presses the workpiece W, the machining proceeds while buffering the excessive pressure applied to the workpiece W.

Specifically, the table 3 is moved to adjust the work area WA so as to be below the tool 7, and the tool 7 is moved in a desired feed direction with respect to the work W. That is, the feed driving means 25 of the tool support portion 17 moves the tool 7 downward on the Z axis to bring the tool 7 into contact with the machining start portion of the work area WA. At this time, the feed driving means 25 moves the tool 7 so as to bring the tool 7 into contact with (press) the workpiece W with a pressing force sufficient for machining. The work piece W receives this pressing force, and the retracting movement mechanism 21 retracts and moves downward in the Z direction with a certain retracting amount ΔN. The evacuation amount ΔN may be, for example, a reduction amount (total processing amount) until the target final shape is reached, or a value smaller than the reduction amount (total processing amount) (total processing amount may be plural). It may be an equally divided value).

Next, as shown in FIG. 6C, the tool 7 and the workpiece W are relatively moved in the weight loss direction (in this case, the X-axis-Y-axis direction). At this time, the tool 7 is rotationally driven and ultrasonically vibrated by the driving means 9. Further, with the physical relative movement of zirconia and soda-lime glass, a chemical reaction between the two occurs, and a part of the workpiece WA is reduced by the physical relative movement and the chemical reaction.

In the present embodiment, in this machining, the feed driving means 25 moves the tool 7 in the feed direction (downward on the Z axis) with an absolute feed amount ΔT1 to press the workpiece W, while the urging mechanism 23 The work piece W to be retracted is urged in the return movement direction (the direction to move toward the return position P0), and the retract movement mechanism 21 receives the tool 7 and the tool 7 with respect to the actual feed amount ΔT1 of the tool 7. The workpiece W (holding portion 52) is retracted and moved in the direction in which the relative feed amount ΔT2 between the workpieces W decreases (in this case, downward). The urging force of the urging mechanism 23 is linked to the evacuation amount ΔN by the evacuation movement mechanism 21 and is set within a range not exceeding a desired amount.

Specifically, the evacuation state (evacuation amount ΔN) by the evacuation movement mechanism 21 detected by the evacuation state detection means 111 and the actual feed state (absolute feed amount) by the feed drive means 25 detected by the feed state detection means 113. Based on ΔT1), the calculation means 115 calculates the relative feed amount ΔT2 between the tool 7 and the workpiece W from the relative difference (ΔT1-ΔN) between the two. Further, the feed driving means 25 controls the absolute feed amount ΔT1 so that the evacuation amount ΔN does not exceed a predetermined threshold value.

Then, as shown in FIG. 6C, the evacuation movement mechanism 21 retracts and moves the workpiece W in the direction in which the relative feed amount ΔT2 between the tool 7 and the workpiece W decreases. As the machining by the workpiece W and the tool 7 progresses, the workpiece W retracted and moved by the retracting movement mechanism 21 and the urging mechanism 23 moves in the return position P0 direction, and the machining is performed so that the retracting amount ΔN decreases. proceed. In this case, the work piece W (holding portion) is reduced in the relative reduction amount with respect to the degree of weight loss (reduction amount) of the work piece W due to the tool 7 being fed by the feed drive means 25. It can be said that 52) is evacuated and moved.

That is, to give a phenomenal example, the position of the workpiece W in the Z-axis direction is not fixed with respect to the table 3, and movement (change in position) within a predetermined range is allowed in the Z-axis direction. Processing proceeds at. While the work piece W is pushed downward on the Z axis by the tool 7, the work piece W vibrates up and down, and the work progresses while the jig 5 (work piece W) gradually returns to the return position P0.

Then, as shown in FIG. 3D, when the shape of the work area WA becomes a desired final shape (reaches the total processing amount) and the evacuation amount ΔN becomes (omitted) zero, the processing is terminated.

When the machining is performed by dividing into a plurality of steps, when the evacuation amount ΔN of one step becomes (omitted) zero, the machining of the step is completed and the machining proceeds to the next step.

If the feed amount ΔT relative to the evacuation amount ΔN is insufficient immediately before the machining is completed and the tool 7 may slip slightly below the target value, take them into consideration. The absolute feed amount ΔT1, the withdrawal amount ΔN, and the relative feed amount ΔT2 may be appropriately controlled.

Further, the measuring means 11 may include a measuring means for detecting whether or not the final machining amount is reached and a desired shape is obtained, so that the final machining shape can be confirmed after the machining is completed. ..

According to such a configuration, even when an excessive pressure is applied to the workpiece W and the tool 7 held by the holding portion 52 so as to exceed the pressure range in which machining proceeds most efficiently. Processing can proceed while buffering (absorbing) it.

Further, the evacuation amount ΔN is set to a desired value (final processing amount or a value obtained by dividing it into equal parts), and when the evacuation amount ΔN becomes (omitted) zero, processing (for one step) is completed. Therefore, it is possible to control the machining amount in micron units, which was difficult with conventional grinding and cutting.

Therefore, even when the workpiece W is soda-lime glass and particularly when drilling or hollowing a thin plate thickness is performed, the workpiece W is prevented from being damaged and the machining is performed efficiently. be able to.

Further, in the present embodiment, when the machining load (machining pressure) on the workpiece W and the tool 7 is small, the surface (machining grain) becomes a machining grain close to polishing (polishing), and the polishing level is fine. Processing becomes possible. In the machining of the present embodiment, the machining load (machining pressure) on the workpiece W and the tool 7 changes at any time, but the machining load (machining) on the workpiece W and the tool 7 throughout the machining process. Roughly speaking, the machining load (machining pressure) is high at the initial stage of machining, and the machining load (machining pressure) is low at the end of machining (immediately before the end). That is, at the final stage of processing (immediately before the end), the surface (processed texture) can be processed with a processed texture close to polishing (polishing) by fine processing at the polishing level.

The processing method of the first embodiment is a processing method in which a part of the workpiece W of the glass-based material (for example, soda-lime glass) is reduced by the tool 7 (zirconia) to change it into a desired shape, for example. The step of relatively moving the tool 7 (zirconia) and the work piece W (for example, soda-lime glass) and the tool 7 and the work piece in order to move the tool 7 with respect to the work piece W in a desired feed direction. Any processing method may be used as long as it has at least a step of moving one of W, and ultrasonic vibration of the tool 7 may not be performed. Further, it is not necessary to buffer the excessive pressure applied to the workpiece W when the tool 7 presses the workpiece W.

<Second Embodiment>
Next, the second embodiment of the present invention will be described. The first embodiment illustrates the case where the tool 7 is, for example, zirconia, and the workpiece W is a glass-based material, particularly soda-lime glass. However, the members of the tool 7 and the workpiece W are not limited to this.

That is, the processing apparatus 1 of the second embodiment includes a jig 5, a tool 7, a driving means 9, a feed driving means 25, and a buffering mechanism 20, and a chemical reaction between the tool 7 and the workpiece W. This is a device that reduces the weight of a part of the workpiece W to change it into a desired shape. In this case, the workpiece W is made of a first member, and the tool 7 is made of a second member different from the first member.

The first member of the workpiece W is, for example, a glass-based material or a natural mineral, and more specifically, quartz glass, borosilicate glass, soda-lime glass (soda-lime glass), lead glass, alkaline barium kei. It is either acid glass, aluminosilicate glass, synthetic molten silica, crystal, amber, etc., and the second member of the tool 7 is zirconia, alumina, aluminum nitride, silicon carbide, silicon nitride, etc. It is either. The second member of the tool 7 is ceramic. Further, the second member may be diamond (single crystal diamond, polycrystalline diamond).

Alternatively, the workpiece W (first member) is any one of zirconia, alumina, aluminum nitride, silicon carbide, silicon nitride and the like, and the workpiece W is ceramic. Further, the workpiece W may be diamond (single crystal diamond, polycrystalline diamond). Tool 7 (first member) is a glass-based material or natural mineral, and more specifically, quartz glass, borosilicate glass, soda lime glass (soda lime glass), lead glass, alkali barium silicate glass, etc. It may be any of aluminosilicate glass, synthetic fused silica, crystal, amber, and the like.

Since the configurations of the jig 5, the tool 7, the drive means 9, the feed drive means 25, and the shock absorber 20 are the same as those in the first embodiment (FIGS. 1 to 3), the description thereof will be omitted. However, the urging force of the urging mechanism 23 differs depending on the processing conditions such as the material and shape of the workpiece W to be processed and the tool 7 to be used. Therefore, the urging force of the urging mechanism 23 is controlled in a range not exceeding a desired amount that enables the above-mentioned retracting movement and returning movement according to the processing conditions. That is, when the urging mechanism 23 is an elastic member 533, a spring constant within a range not exceeding a desired amount that enables the above-mentioned retract movement and return movement is appropriately selected.

Also in the second embodiment, the processing apparatus 1 brings the tool 7 formed of the first member into contact with the workpiece W which is the second member, and proceeds with processing while reducing (wearing) at least one of them. That is, the processing apparatus 1 physically presses the tool 7 that vibrates ultrasonically and the workpiece W with an appropriate pressure to perform machining, but at that time, the excessive pressure (pressing pressure) applied to the workpiece W is applied. ) Is buffered, and the workpiece W is relatively moved in the weight loss direction. By doing so, in addition to the physical relative movement of the tool 7 and the workpiece W (movement in the weight loss direction and movement in the feed direction), the contact surface (movement in the weight loss direction and the movement in the feed direction) in which the tool 7 and the workpiece W interact with each other ( And its vicinity) to cause a chemical reaction. As a result, it is possible to reduce the weight of the work piece W and change it to a desired shape without damaging the work piece W.

Further, the processing method of the second embodiment is a processing method of reducing a part of the workpiece W made of the first member to change it into a desired shape, and is different from the first member. By ultrasonically vibrating the tool 7 made of the member, one of the tool 7 and the workpiece W is moved in the feed direction, and the other of the tool 7 and the workpiece W is retracted and moved in the same direction as the feed direction. When the tool 7 presses the workpiece W, the excessive pressure applied to the workpiece W is buffered, and the machining proceeds while causing a chemical reaction between the tool 7 and the workpiece W to be desired. A part of the work piece is reduced until it becomes a shape.

More specifically, the work piece W is held by the jig 5, and the tool 7 and the work piece W are physically relative to each other (in the weight loss direction) while the tool 7 is ultrasonically vibrated. The step of moving, the step of moving one of the tool 7 and the work piece W in order to move the tool 7 with respect to the work piece W in a desired feed direction, and the actual feed of the tool 7 or the work piece W. A step of retracting and moving the other side of the tool 7 and the work piece W in the feed direction so that the relative feed amount between the tool 7 and the work piece W decreases with respect to the amount, and the work piece W or When the tool 7 retracts and moves, the process of urging the workpiece W or the tool 7 to retract and move in the return movement direction, and one of the workpieces while causing a chemical reaction between the tool 7 and the workpiece W. It has a step of reducing the weight of the portion.

Also in the second embodiment, a chemical reaction is generated between both the materials of the tool 7 that vibrates ultrasonically and the work piece W, and at least one (a part of the material) is reduced (worn). The weight loss due to this chemical reaction is, for example, the same as in the first embodiment, in which the materials of the contacted tool 7 and the workpiece W are chemically bonded to each other at the molecular level (or atomic level) and once bonded (adhered). By peeling (pulling) the materials from each other by ultrasonic vibration, a part of one material (for example, the material of the workpiece W) is joined (adhered) to the other material (for example, the material of the tool 7). It is peeled off in a state to reduce the weight of one of the materials. Depending on the material, both may lose weight (the degree of weight loss differs). In this case, the tool 7 and the workpiece W are materials that can be chemically bonded to each other, and the tool 7 selects a material that does not easily peel off (separate) after bonding, and the workpiece W is compared with the tool 7. It can be said that it is desirable to select a material that easily peels off (separates) after bonding. In some cases, the processing can proceed more effectively by adding water.

Further, in the weight loss due to such a chemical reaction, the materials (tool 7 and the workpiece W) are brought into contact with each other to the extent that mechanical processing (polishing or cutting) does not occur (mechanical processing does not occur and the work piece W). It is considered that the process proceeds by forming a chemical (molecular or atomic level) bond, and it is desirable to bring the tool 7 and the workpiece W into contact with each other at an appropriate pressure.

Therefore, in the present embodiment, the pressing force between the zirconia (tool 7) and the soda lime glass (workpiece W) is set within a predetermined range in which the machining proceeds most efficiently (weight loss due to a chemical reaction occurs efficiently). In order to maintain the machining, one of the tool 7 or the workpiece W is retracted in the same direction as the other feeding direction for advancing the machining. As a result, the machining can proceed while buffering the excessive pressure applied to the workpiece area WA when the tool 7 presses the workpiece.

In this case as well, it may be possible to proceed with the processing more effectively by adding water.

Further, in the second embodiment, the weight loss may be due to a chemical reaction other than the above (chemical bond and exfoliation), or the weight loss due to the above chemical reaction and the weight loss due to another chemical reaction are mixed. You may be. In addition, these may include weight loss by mechanical processing (cutting or grinding), but in that case, the weight loss progresses mainly by a chemical reaction (the degree of weight loss by a chemical reaction is 50% of the total weight loss). Occupy).

<Other embodiments>
In the above example, the processing device 1 is a device using a milling machine for rotationally driving a drill-type tool 7, and the jig 5 includes a buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). However, it is not limited to this.

For example, in the case where the processing device 1 is a device for lathe processing or the like that rotates a columnar workpiece W, the tool support portion 17 is provided with a buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). There may be.

Further, in the case where the processing device 1 is a device for processing by a milling machine that rotationally drives an end mill type tool 7, the table 3 that supports the jig 5 is a buffer mechanism 20 (evacuation movement mechanism 21 and urging mechanism 23). It may be configured to include.

Further, in the above embodiment, an example in which the evacuation movement mechanism 21 and the urging mechanism 23 have different configurations is shown, but the evacuation movement mechanism 21 and the urging mechanism 23 are integrated as a buffer mechanism 20. There may be. For example, in the example shown in FIG. 1, the jig 5 itself may be made of an elastic body having a cushioning function (rubber, sponge-like resin material, etc.), or in the example shown in FIG. 3, for example, the spindle of the tool 7. Alternatively, the shank itself may be made of an elastic body having a cushioning function (rubber, sponge-like resin material, etc.).

Further, the machining of the present embodiment includes, for example, front milling, end milling, flat milling, flat milling, side cutting, grooving, and lathe (turning), which are cutting (milling) machining (machining, milling). Machining (outer rounding, surface shaving, taper shaving, threading, parting, etc.), drilling, centering (cutting through), etc., and grinding (plane grinding, forming grinding, cylindrical grinding, dying, slicing, etc.) ) Etc. can be applied.

Further, the cushioning means 10 may be another spring regardless of the coil spring, or may be an elastic member such as a sponge or a resin. Further, it may be buffered by hydraulic pressure or pneumatic pressure. Further, when the jig 5 includes the cushioning means 10, the material of the jig 5 may be made of an elastic body such as sponge or resin.

Further, the shock absorbing mechanism 20 is not limited to the above example as long as it is a mechanism for advancing machining while retracting one of the tool 7 or the workpiece W in the same direction as the other feeding direction for advancing machining.

Further, for example, the position of the reference portion of the workpiece W is determined by the measuring means (for example, a micrometer, a dial gauge, etc.) of the measuring means 11 at an appropriate timing (for example, at the start of machining, during machining, or at the end of machining). The pressure is appropriately (as needed) detected by measuring at such timings) and fed back to the control means to appropriately control the feed drive means 25, the evacuation movement mechanism 21, the urging mechanism 23, and the like. May be performed while maintaining a predetermined range in which the processing proceeds efficiently.

Further, the pressure at which the tool 7 and the workpiece W come into contact with each other is detected at an appropriate timing, and the pressure is fed back to the control means to appropriately control the feed drive means 25, the evacuation movement mechanism 21, the urging mechanism 23, and the like. The processing may be performed while maintaining the pressure within a predetermined range in which the processing proceeds efficiently.

The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit and technical idea.

1 Processing equipment 3 Table 5 Jig 7 Tool 9 Driving means 10 Buffering means 11 Measuring means 17 Tool supporting part 20 Buffering mechanism 21 Evacuation moving mechanism 23 Biasing mechanism 25 Driving means 51 Base 52 Holding part 53 Supporting part 111 Evacuation state detection Means 113 State detection means 115 Calculation means 521 Holding surface 531 Outer cylinder 532 Inner cylinder 533 Elastic member 535 Stopper P0 Return position W Work piece

Claims (8)

A processing device that reduces the weight of a part of the work piece and changes it to a desired shape.
A jig for holding the work piece and
A tool that comes into contact with a part of the work piece,
A driving means for moving the tool relative to the workpiece,
It has a feed driving means for moving one of the tool and the workpiece in order to move the tool in a desired feed direction with respect to the workpiece.
The work piece is a glass-based material and is
The tool is made of zirconia
A part of the work piece is reduced while causing a chemical reaction between the tool and the work piece.
A processing device characterized by this. When one of the tool and the workpiece is moved in the feed direction and the other of the tool and the workpiece is retracted and moved in the same direction as the feed direction so that the tool presses the workpiece. A buffer mechanism for buffering excess pressure applied to the workpiece is provided.
The processing apparatus according to claim 1, wherein the processing apparatus is characterized in that. The other side of the tool and the workpiece is retracted and moved in the feed direction so that the relative feed amount between the tool and the workpiece is reduced with respect to the actual feed amount by the feed drive means. Evacuation movement mechanism to make
The evacuation movement mechanism includes an urging mechanism that urges the work piece or the tool to move in the return movement direction when the work piece or the tool retracts and moves.
The processing apparatus according to claim 1, wherein the processing apparatus is characterized in that. The driving means ultrasonically vibrates the tool.
The processing apparatus according to any one of claims 1 to 3, wherein the processing apparatus is characterized in that. It is a processing method that reduces the weight of a part of the work piece of glass-based material to change it to a desired shape.
A process of holding the work piece with a jig and relatively moving the tool made of zirconia and the work piece.
It has a step of moving one of the tool and the work piece in order to move the tool in a desired feed direction with respect to the work piece.
A part of the work piece is reduced while causing a chemical reaction between the tool and the work piece.
A processing method characterized by that. Go one in the feeding direction of the tool and the workpiece,
Advanced machining while the other pre-SL tool and the workpiece excessive pressure on the workpiece is buffered when pressing the tool the workpiece by retracting movement in the feeding direction in the same direction Let me
Processing method according to請Motomeko 5, characterized in that. The actual amount of feed of the tool or the workpiece, the said tool as the relative feed amount between the workpiece is reduced, the feeding direction and the other of said tool and said workpiece The process of evacuating and moving to
The process includes a step of urging the workpiece or the tool to be retracted and moved in the return movement direction when the workpiece or the tool is retracted and moved.
The processing method according to claim 5, wherein the processing method is characterized by the above. The tool is ultrasonically vibrated.
The processing method according to any one of claims 5 to 7, wherein the processing method is characterized by the above.

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