JP2022026877A - Photosensitive composition for fingerprint authentication sensor, optical filter, fingerprint authentication sensor and image display device - Google Patents
Photosensitive composition for fingerprint authentication sensor, optical filter, fingerprint authentication sensor and image display device Download PDFInfo
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- JP2022026877A JP2022026877A JP2020130548A JP2020130548A JP2022026877A JP 2022026877 A JP2022026877 A JP 2022026877A JP 2020130548 A JP2020130548 A JP 2020130548A JP 2020130548 A JP2020130548 A JP 2020130548A JP 2022026877 A JP2022026877 A JP 2022026877A
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- fingerprint authentication
- pigment
- meth
- photosensitive composition
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- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- QHCNTMCHBZHBDY-UHFFFAOYSA-N trihydroxy-(6-methylheptyl)-phenyl-lambda5-phosphane Chemical compound CC(C)CCCCCP(O)(O)(O)C1=CC=CC=C1 QHCNTMCHBZHBDY-UHFFFAOYSA-N 0.000 description 1
- SFESXIFARCRODZ-UHFFFAOYSA-N trihydroxy-(8-methylnonyl)-phenyl-$l^{5}-phosphane Chemical compound CC(C)CCCCCCCP(O)(O)(O)C1=CC=CC=C1 SFESXIFARCRODZ-UHFFFAOYSA-N 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- RMZAYIKUYWXQPB-UHFFFAOYSA-N trioctylphosphane Chemical compound CCCCCCCCP(CCCCCCCC)CCCCCCCC RMZAYIKUYWXQPB-UHFFFAOYSA-N 0.000 description 1
- ZMBHCYHQLYEYDV-UHFFFAOYSA-N trioctylphosphine oxide Chemical compound CCCCCCCCP(=O)(CCCCCCCC)CCCCCCCC ZMBHCYHQLYEYDV-UHFFFAOYSA-N 0.000 description 1
- FIQMHBFVRAXMOP-UHFFFAOYSA-N triphenylphosphane oxide Chemical compound C=1C=CC=CC=1P(C=1C=CC=CC=1)(=O)C1=CC=CC=C1 FIQMHBFVRAXMOP-UHFFFAOYSA-N 0.000 description 1
- WGKLOLBTFWFKOD-UHFFFAOYSA-N tris(2-nonylphenyl) phosphite Chemical compound CCCCCCCCCC1=CC=CC=C1OP(OC=1C(=CC=CC=1)CCCCCCCCC)OC1=CC=CC=C1CCCCCCCCC WGKLOLBTFWFKOD-UHFFFAOYSA-N 0.000 description 1
- QEDNBHNWMHJNAB-UHFFFAOYSA-N tris(8-methylnonyl) phosphite Chemical compound CC(C)CCCCCCCOP(OCCCCCCCC(C)C)OCCCCCCCC(C)C QEDNBHNWMHJNAB-UHFFFAOYSA-N 0.000 description 1
- PEXOFOFLXOCMDX-UHFFFAOYSA-N tritridecyl phosphite Chemical compound CCCCCCCCCCCCCOP(OCCCCCCCCCCCCC)OCCCCCCCCCCCCC PEXOFOFLXOCMDX-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 235000021122 unsaturated fatty acids Nutrition 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical class [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
- 150000003732 xanthenes Chemical class 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
Images
Landscapes
- Optical Filters (AREA)
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Abstract
Description
本発明は、指紋認証センサに用いる感光性組成物に関する。 The present invention relates to a photosensitive composition used in a fingerprint authentication sensor.
近年、スマートフォンやタブレット端末などのモバイル端末を中心に、指紋や顔、虹彩、音声等の生体情報を利用したユーザー認証機能が搭載されている。特に、指紋認証は指を置くだけでロックを解除できるという優れた利便性を持ち、小型で安価にセキュリティを強化できることから、スマートフォンで指紋認証センサの採用が拡大している。 In recent years, mainly mobile terminals such as smartphones and tablet terminals have been equipped with a user authentication function using biometric information such as fingerprints, faces, irises, and voices. In particular, fingerprint authentication has the excellent convenience of being able to unlock by simply placing a finger on it, and because it is compact and inexpensive, the use of fingerprint authentication sensors is expanding in smartphones.
従来、スマートフォンでは、ベゼル部分(画像表示ディスプレイの外側)に静電容量タイプの指紋認証センサを配置することが一般的であったが、ディスプレイの大型化のトレンドとともに、ベゼル部分がなくなり全面ディスプレイが主流となってきた。そのため、指紋認証センサは、ディスプレイ内部に設置する必要が出てきた。しかし、静電容量タイプの指紋認証センサは、直接センサ部分に指を置く必要があるため、ディスプレイ内部に静電容量タイプの指紋認証センサを配置しても動作しない。ディスプレイ内部に設置することができる指紋認証センサには、光学式タイプと超音波タイプが挙げられ、特に、安価で配置が容易な光学式タイプが多く検討されている。 In the past, it was common for smartphones to place a capacitive fingerprint authentication sensor on the bezel (outside the image display), but with the trend toward larger displays, the bezel has disappeared and the entire display has become available. It has become mainstream. Therefore, it has become necessary to install the fingerprint authentication sensor inside the display. However, since the capacitance type fingerprint authentication sensor requires the finger to be placed directly on the sensor portion, the capacitance type fingerprint authentication sensor does not operate even if the capacitance type fingerprint authentication sensor is arranged inside the display. Examples of the fingerprint authentication sensor that can be installed inside the display include an optical type and an ultrasonic type, and in particular, an optical type that is inexpensive and easy to arrange is being studied.
特許文献1には、波長570nm付近の光を照射し、指から反射した光をもとに撮像画像を生成することで指紋認証を行う光学式の指紋認証センサが開示されている。 Patent Document 1 discloses an optical fingerprint authentication sensor that performs fingerprint authentication by irradiating light having a wavelength of around 570 nm and generating an image captured image based on the light reflected from a finger.
しかし、身体組織は、波長660nm付近の光に対して透過性がある程度高いため、特許文献1の指紋認証センサは、照射した光の一部が指を透過してしまい正しく指紋を認識できない場合があった。 However, since the body tissue has a high transparency to light having a wavelength of around 660 nm, the fingerprint authentication sensor of Patent Document 1 may not be able to correctly recognize the fingerprint because a part of the irradiated light passes through the finger. there were.
本発明は、波長660nm付近の光の透過を抑制し、波長570nmより低波長側で幅広い波長域の光を透過させ、かつ高透過率の光学フィルタを形成可能な指紋認証センサ用感光性組成物の提供を目的とする。 The present invention is a photosensitive composition for a fingerprint authentication sensor capable of suppressing the transmission of light in the vicinity of a wavelength of 660 nm, transmitting light in a wide wavelength range on the wavelength side lower than the wavelength of 570 nm, and forming an optical filter having a high transmittance. The purpose is to provide.
本発明は、膜厚1.0μmにおいて波長420~520nmにおける透過率が50%以上の被膜を形成できる指紋認証センサ用感光性組成物であって、
顔料(A)として、下記化学式(1)で表される顔料(A-1)、アルカリ可溶性樹脂(B)、重合性化合物(C)、および光重合開始剤(D)を含む、指紋認証センサ用感光性組成物に関する。
The present invention is a photosensitive composition for a fingerprint authentication sensor capable of forming a film having a transmittance of 50% or more at a wavelength of 420 to 520 nm at a film thickness of 1.0 μm.
A fingerprint authentication sensor containing the pigment (A) represented by the following chemical formula (1), an alkali-soluble resin (B), a polymerizable compound (C), and a photopolymerization initiator (D). For photosensitive compositions.
化学式(1)
上記の本発明によれば、波長660nm付近の光の透過を抑制し、波長570nmより低波長側で幅広い波長域の光を透過させ、かつ高透過率の光学フィルタを形成可能な指紋認証センサ用感光性組成物、光学フィルタ、指紋認証センサ、および画像表示装置を提供できる。 According to the above invention, for a fingerprint authentication sensor capable of suppressing the transmission of light near a wavelength of 660 nm, transmitting light in a wide wavelength range on the wavelength side lower than the wavelength of 570 nm, and forming an optical filter having a high transmittance. A photosensitive composition, an optical filter, a fingerprint authentication sensor, and an image display device can be provided.
以下、本発明の紋認証センサ用感光性組成物(以後、単に「感光性組成物」とも称する)を実施するための形態について詳細に説明する。なお、本発明は、以下の実施形態に制限されるものではなく、その要旨の範囲内で種々変形して実施することができる。 Hereinafter, a mode for carrying out the photosensitive composition for a crest authentication sensor of the present invention (hereinafter, also simply referred to as “photosensitive composition”) will be described in detail. The present invention is not limited to the following embodiments, and can be variously modified and implemented within the scope of the gist thereof.
本明細書では、「(メタ)アクリロイル」、「(メタ)アクリル」、「(メタ)アクリル酸」、「(メタ)アクリレート」、又は「(メタ)アクリルアミド」とは、特に説明がない限り、それぞれ、「アクリロイル及び/又はメタアクリロイル」、「アクリル及び/又はメタアクリル」、「アクリル酸及び/又はメタアクリル酸」、「アクリレート及び/又はメタクリレート」、又は「アクリルアミド及び/又はメタアクリルアミド」を意味する。また、「C.I.」は、カラーインデックス(C.I.;The Society of Dyers and Colourists 発行)を意味する。重合性不飽和基は、エチレン性不飽和二重結合をいう。 In the present specification, "(meth) acryloyl", "(meth) acrylic", "(meth) acrylic acid", "(meth) acrylate", or "(meth) acrylamide" are referred to as "(meth) acrylamide" unless otherwise specified. Means "acrylic and / or methacryloyl", "acrylic and / or methacrylic acid", "acrylic acid and / or methacrylic acid", "acrylate and / or methacrylate", or "acrylamide and / or metaacrylamide", respectively. do. Further, "CI" means a color index (CI; The Society of Dyers and Colorists). The polymerizable unsaturated group refers to an ethylenically unsaturated double bond.
<指紋認証センサ用感光性組成物>
本発明は、膜厚1.0μmにおいて波長420~520nmにおける透過率が50%以上の被膜を形成できる指紋認証センサ用感光性組成物であって、
顔料(A)として、下記化学式(1)で表される顔料(A-1)、アルカリ可溶性樹脂(B)、重合性化合物(C)、および光重合開始剤(D)を含む、指紋認証センサ用感光性組成物である。
<Photosensitive composition for fingerprint authentication sensor>
The present invention is a photosensitive composition for a fingerprint authentication sensor capable of forming a film having a transmittance of 50% or more at a wavelength of 420 to 520 nm at a film thickness of 1.0 μm.
A fingerprint authentication sensor containing the pigment (A) represented by the following chemical formula (1), an alkali-soluble resin (B), a polymerizable compound (C), and a photopolymerization initiator (D). It is a photosensitive composition for use.
化学式(1)
本発明の組成物から形成する被膜は、指紋認証センサを構成する部材として使用することが好ましい。指紋認証センサは、例えば、光学式指紋認証センサ等が挙げられる。本発明の組成物は、化学式(1)で表される顔料(A-1)を含むことで、波長660nm付近の光の透過を抑制し、波長570nmより低波長側で幅広い波長域の光を透過させ、かつ高透過率の被膜を形成できる。 The coating film formed from the composition of the present invention is preferably used as a member constituting the fingerprint authentication sensor. Examples of the fingerprint authentication sensor include an optical fingerprint authentication sensor and the like. The composition of the present invention contains the pigment (A-1) represented by the chemical formula (1) to suppress the transmission of light in the vicinity of the wavelength of 660 nm, and to emit light in a wide wavelength range on the wavelength side lower than the wavelength of 570 nm. It can be made transparent and can form a film with high transmittance.
[顔料(A)]
(顔料(A-1))
本発明の感光性組成物は、顔料(A)として、下記化学式(1)で表される顔料(A-1)を含む。
[Pigment (A)]
(Pigment (A-1))
The photosensitive composition of the present invention contains the pigment (A-1) represented by the following chemical formula (1) as the pigment (A).
化学式(1)
顔料(A-1)は、結晶構造の違いによりα型、β型、γ型、δ型、ε型、π型等が存在する。α型は、C.I.ピグメントブルー15:1,15:2、β型は、C.I.ピグメントブルー15:3,15:4、γ型は、C.I.ピグメントブルー15:5、ε型は、C.I.ピグメントブルー15:6が挙げられる。これらの中でも、波長570nmより低波長側で幅広い波長域の光を透過させ、かつ高透過率にする観点から、顔料(A-1)として、α型、β型、およびε型の群から選択される少なくとも1種を含むことが好ましく、α型、および/またはβ型含むことがより好ましく、β型を含むことがさらに好ましい。 The pigment (A-1) includes α-type, β-type, γ-type, δ-type, ε-type, π-type and the like depending on the difference in crystal structure. The α type is C.I. I. Pigment Blue 15: 1, 15: 2, β type is C.I. I. Pigment Blue 15: 3, 15: 4, γ type is C.I. I. Pigment blue 15: 5, ε type is C.I. I. Pigment Blue 15: 6. Among these, the pigment (A-1) is selected from the α-type, β-type, and ε-type groups from the viewpoint of transmitting light in a wide wavelength range on the wavelength side lower than the wavelength of 570 nm and achieving high transmittance. It is preferable to contain at least one of the above, more preferably α-type and / or β-type, and even more preferably β-type.
さらに、顔料(A-1)は、波長570~730nmの光の透過を抑制できる観点から、β型、および/またはε型を含むことが好ましく、β型を含むことがより好ましい。 Further, the pigment (A-1) preferably contains β-type and / or ε-type, and more preferably β-type, from the viewpoint of suppressing the transmission of light having a wavelength of 570 to 730 nm.
顔料(A-1)は、単独または2種類以上を併用して使用できる。 The pigment (A-1) can be used alone or in combination of two or more.
本明細書で顔料(A-1)の結晶構造は、β型が好ましい。β型を使用すると波長660nm付近(570~730nm)の光の透過を高度に抑制し、波長570nmより低波長側で幅広い波長域の光を透過させ、かつ高透過率を有する被膜を形成できる。 In the present specification, the crystal structure of the pigment (A-1) is preferably β-type. When the β type is used, it is possible to highly suppress the transmission of light in the vicinity of the wavelength of 660 nm (570 to 730 nm), transmit light in a wide wavelength range on the wavelength side lower than the wavelength of 570 nm, and form a film having high transmittance.
顔料(A-1)の含有量は、顔料(A)100質量%中、95質量部以上が好ましく、99質量部以上がより好ましく、100質量部がさらに好ましい。適量を含有すると波長570nmより低波長側で幅広い波長域の光を透過させ、かつ高透過率を有する被膜を形成できる。 The content of the pigment (A-1) is preferably 95 parts by mass or more, more preferably 99 parts by mass or more, still more preferably 100 parts by mass, based on 100% by mass of the pigment (A). When an appropriate amount is contained, it is possible to transmit light in a wide wavelength range on the wavelength side lower than the wavelength of 570 nm and to form a film having a high transmittance.
顔料(A-1)は、指紋認証精度の向上の観点から、遊離の銅をできる限り含まないことが好ましい。遊離の銅は、例えば、特開2008-308605号公報に記載の方法によって減らすことができる。 The pigment (A-1) preferably contains as little free copper as possible from the viewpoint of improving fingerprint authentication accuracy. Free copper can be reduced, for example, by the method described in JP-A-2008-308605.
感光性組成物中の遊離の銅イオン濃度は、500ppm以下が好ましく、300ppm以下がより好ましく、200ppm以下であることがさらに好ましい。これにより指紋認証精度を向上できる。 The concentration of free copper ions in the photosensitive composition is preferably 500 ppm or less, more preferably 300 ppm or less, still more preferably 200 ppm or less. This can improve the fingerprint authentication accuracy.
(その他顔料(A-2))
顔料(A)は、顔料(A-1)以外のその他顔料(A-2)を含有できる。その他顔料(A-2)は、特に制限がなく、公知の顔料を使用できる。
(Other pigments (A-2))
The pigment (A) can contain other pigments (A-2) other than the pigment (A-1). The other pigment (A-2) is not particularly limited, and known pigments can be used.
その他顔料(A-2)は、例えば、C.I.ピグメントイエロー1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35:1,36,36:1,37,37:1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97,98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,139,147,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,198,199,213,214,218,219,220,221、特開2012-226110号公報、特許第6432077号公報に記載の黄色顔料;
C.I.ピグメントレッド1,2,3,4,5,6,7,8,9,12,14,15,16,17,21,22,23,31,32,37,38,41,47,48,48:1,48:2,48:3,48:4,49,49:1,49:2,50:1,52:1,52:2,53,53:1,53:2,53:3,57,57:1,57:2,58:4,60,63,63:1,63:2,64,64:1,68,69,81,81:1,81:2,81:3,81:4,83,88,90:1,101,101:1,104,108,108:1,109,112,113,114,122,123,144,146,147,149,151,166,168,169,170,172,173,174,175,176,177,178,179,181,184,185,187,188,190,193,194,200,202,206,207,208,209,210,214,216,220,221,224,230,231,232,233,235,236,237,238,239,242,243,245,247,249,250,251,253,254,255,256,257,258,259,260,262,263,264,265,266,267,268,269,270,271,272,273,274,275,276,277,278,279,280,281,282,283,284,285,286,287,291,295,296、特開2014-134712号公報に記載された顔料、特許第6368844号公報に記載された赤色顔料;
C.I.ピグメントグリーン1,2,4,7,8,10,13,14,15,17,18,19,26,36,37,45,48,50,51,54,55,58,59,62,63等の緑色顔料;
C.I.ピグメントブルー1,1:2,9,14,16,17,19,25,27,28,29,33,35,36,56,56:1,60,61,61:1,62,63,66,67,68,71,72,73,74,75,76,78,79等の青色顔料;
C.I.ピグメントバイオレット1,1:1,2,2:2,3,3:1,3:3,5,5:1,14,15,16,19,23,25,27,29,31,32,37,39,42,44,47,49,50等の紫色顔料;
C.I.ピグメントオレンジ36,38,43,64,71、73等の橙色顔料が挙げられる。
Other pigments (A-2) are, for example, C.I. I. Pigment Yellow 1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35: 1,36, 36: 1,37,37: 1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97, 98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,139,147, 150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,1733,174,175,176,177,179,180,1811 182,185,187,188,193,194,198,199,213,214,218,219,220,221, Japanese Patent Application Laid-Open No. 2012-226110, Japanese Patent No. 6432077;
C. I.
C. I.
C. I. Pigment Blue 1,1: 2,9,14,16,17,19,25,27,28,29,33,35,36,56,56: 1,60,61,61: 1,62,63, Blue pigments such as 66, 67, 68, 71, 72, 73, 74, 75, 76, 78, 79;
C. I. Pigment Violet 1,1: 1,2,2: 2,3,3: 1,3: 3,5,5: 1,14,15,16,19,23,25,27,29,31,32, Purple pigments such as 37, 39, 42, 44, 47, 49, 50;
C. I. Pigment Orange 36, 38, 43, 64, 71, 73 and other orange pigments can be mentioned.
顔料(A)の含有量は、感光性組成物の不揮発分100質量%中、5~70質量%が好ましく、10~60質量%がより好ましい。 The content of the pigment (A) is preferably 5 to 70% by mass, more preferably 10 to 60% by mass, based on 100% by mass of the non-volatile content of the photosensitive composition.
(顔料(A)の微細化)
顔料(A)は、微細化して用いることが好ましい。微細化方法は、特に限定されるものではなく、例えば、湿式磨砕、乾式磨砕、溶解析出法いずれも使用できる。これらの中でも湿式磨砕の1種であるニーダー法によるソルトミリング処理が好ましい。微細化顔料のTEM(透過型電子顕微鏡)により求められる平均一次粒子径は、5~90nmが好ましい。なお、分散性、コントラスト比の観点から、平均一次粒子径は10~70nmがより好ましい。
(Miniaturization of pigment (A))
The pigment (A) is preferably used in a finely divided form. The miniaturization method is not particularly limited, and for example, wet grinding, dry grinding, and dissolution precipitation method can be used. Among these, the salt milling treatment by the kneader method, which is one of the wet grinding methods, is preferable. The average primary particle size determined by the TEM (transmission electron microscope) of the finely divided pigment is preferably 5 to 90 nm. From the viewpoint of dispersibility and contrast ratio, the average primary particle size is more preferably 10 to 70 nm.
ソルトミリング処理とは、顔料と水溶性無機塩と水溶性有機溶剤との混合物を、ニーダー、2本ロールミル、3本ロールミル、ボールミル、アトライター、サンドミル等の混練機を用いて、加熱しながら機械的に混練した後、水洗により水溶性無機塩と水溶性有機溶剤を除去する処理である。水溶性無機塩は、破砕助剤として働くものであり、ソルトミリング時に無機塩の硬度の高さを利用して顔料が破砕される。顔料をソルトミリング処理する際の条件を最適化することにより、一次粒子径が非常に微細であり、また、分布の幅がせまく、シャープな粒度分布をもつ顔料を得ることができる。 Salt milling is a machine that heats a mixture of a pigment, a water-soluble inorganic salt, and a water-soluble organic solvent using a kneader such as a kneader, a 2-roll mill, a 3-roll mill, a ball mill, an attritor, and a sand mill. After kneading, the water-soluble inorganic salt and the water-soluble organic solvent are removed by washing with water. The water-soluble inorganic salt acts as a crushing aid, and the pigment is crushed by utilizing the high hardness of the inorganic salt during salt milling. By optimizing the conditions for the salt milling treatment of the pigment, it is possible to obtain a pigment having a very fine primary particle size, a narrow distribution width, and a sharp particle size distribution.
水溶性無機塩は、塩化ナトリウム、塩化カリウム、硫酸ナトリウム等が挙げられ、価格の点から塩化ナトリウム(食塩)が好ましい。水溶性無機塩の使用量は、処理効率と生産効率の両面から、顔料(A)100質量部に対して、50~2,000質量部が好ましく、300~1,000質量部がより好ましい。 Examples of the water-soluble inorganic salt include sodium chloride, potassium chloride, sodium sulfate and the like, and sodium chloride (salt) is preferable from the viewpoint of price. The amount of the water-soluble inorganic salt used is preferably 50 to 2,000 parts by mass, more preferably 300 to 1,000 parts by mass with respect to 100 parts by mass of the pigment (A) from the viewpoint of both treatment efficiency and production efficiency.
水溶性有機溶剤は、顔料および水溶性無機塩を湿潤する働きをするものであり、水に溶解(混和)し、かつ用いる無機塩を実質的に溶解しないものであれば特に限定されない。ただし、ソルトミリング時に温度が上昇し、溶剤が蒸発し易い状態になるため、安全性の点から、沸点120℃以上の高沸点溶剤が好ましい。例えば、2-メトキシエタノール、2-ブトキシエタノール、2-(イソペンチルオキシ)エタノール、2-(ヘキシルオキシ)エタノール、ジエチレングリコール、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノブチルエーテル、トリエチレングリコール、トリエチレングリコールモノメチルエーテル、液状のポリエチレングリコール、1-メトキシ-2-プロパノール、1-エトキシ-2-プロパノール、ジプロピレングリコール、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、液状のポリプロピレングリコール等が用いられる。水溶性有機溶剤の使用量は、顔料100質量部に対して、5~1,000質量部が好ましく、50~500質量部がより好ましい。 The water-soluble organic solvent has a function of wetting the pigment and the water-soluble inorganic salt, and is not particularly limited as long as it dissolves (mixes) in water and does not substantially dissolve the inorganic salt used. However, since the temperature rises during salt milling and the solvent easily evaporates, a high boiling point solvent having a boiling point of 120 ° C. or higher is preferable from the viewpoint of safety. For example, 2-methoxyethanol, 2-butoxyethanol, 2- (isopentyloxy) ethanol, 2- (hexyloxy) ethanol, diethylene glycol, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, triethylene glycol, triethylene glycol monomethyl ether, Liquid polyethylene glycol, 1-methoxy-2-propanol, 1-ethoxy-2-propanol, dipropylene glycol, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, liquid polypropylene glycol and the like are used. The amount of the water-soluble organic solvent used is preferably 5 to 1,000 parts by mass, more preferably 50 to 500 parts by mass with respect to 100 parts by mass of the pigment.
ソルトミリング処理には、必要に応じて樹脂を変化してもよい。前記樹脂の種類は特に限定されず、天然樹脂、変性天然樹脂、合成樹脂、天然樹脂で変性された合成樹脂等が挙げられる。これらの中でも、室温で固体であり、水不溶性であることが好ましく、かつ上記有機溶剤に一部可溶であることが好ましい。樹脂の使用量は、顔料100質量部に対して、2~200質量部が好ましい。 For the salt milling treatment, the resin may be changed if necessary. The type of the resin is not particularly limited, and examples thereof include a natural resin, a modified natural resin, a synthetic resin, and a synthetic resin modified with a natural resin. Among these, it is preferable that it is solid at room temperature, is insoluble in water, and is partially soluble in the above organic solvent. The amount of the resin used is preferably 2 to 200 parts by mass with respect to 100 parts by mass of the pigment.
(染料)
本発明の感光性組成物は、染料を含有できる。染料は、公知の化合物を含有できる。
(dye)
The photosensitive composition of the present invention can contain a dye. The dye can contain known compounds.
染料は、例えば、酸性染料、直接染料、塩基性染料、造塩染料、油溶性染料、分散染料、反応染料、媒染染料、建染染料、硫化染料等が挙げられる。また、染料の誘導体や、染料をレーキ化したレーキ顔料も挙げられる。 Examples of the dye include acid dyes, direct dyes, basic dyes, salt-forming dyes, oil-soluble dyes, disperse dyes, reactive dyes, medium-dye dyes, building dyes, sulfide dyes and the like. Further, a derivative of a dye and a lake pigment obtained by converting a dye into a lake can also be mentioned.
染料は、造塩化合物として使用することが好ましい。造塩化合物は、酸性染料と、四級アンモニウム塩化合物、三級アミン化合物、二級アミン化合物、または一級アミン化合物との造塩化合物;アミノ基を有する樹脂成分と酸性染料等の造塩化合物;酸性染料とオニウム塩基を有する化合物との造塩化合物;塩基性染料と、有機酸、過塩素酸、またはこれらの金属塩との造塩化合物等が挙げられる。これらの中でも塩基性染料の造塩化合物は、各種耐性、顔料との相溶性に優れているために好ましい。なお、オニウム塩基を有する化合物は、側鎖にカチオン性基を有する樹脂が好ましい。 The dye is preferably used as a salt-forming compound. The salt-forming compound is a salt-forming compound of an acidic dye and a quaternary ammonium salt compound, a tertiary amine compound, a secondary amine compound, or a primary amine compound; a resin component having an amino group and a salt-forming compound such as an acidic dye; Salt-forming compounds of acidic dyes and compounds having onium bases; salt-forming compounds of basic dyes with organic acids, perchloric acids, or metal salts thereof. Among these, salt-forming compounds of basic dyes are preferable because they are excellent in various resistances and compatibility with pigments. The compound having an onium base is preferably a resin having a cationic group in the side chain.
染料の化学構造は、例えば、アゾ系染料、ジスアゾ系染料、アゾメチン系染料(インドアニリン系染料、インドフェノール系染料など)、ジピロメテン系染料、キノーン系染料(ベンゾキノーン系染料、ナフトキノーン系染料、アントラキノーン系染料、アントラピリドン系染料など)、カルボニウム系染料(ジフェニルメタン系染料、トリフェニルメタン系染料、キサンテン系染料、アクリジン系染料など)、キノーンイミン系染料(オキサジン系染料、チアジン系染料など)、アジン系染料、ポリメチン系染料(オキソノール系染料、メロシアニン系染料、アリーリデン系染料、スチリル系染料、シアニン系染料、スクアリリウム系染料、クロコニウム系染料など)、キノフタロン系染料、フタロシアニン系染料、サブフタロシアニン系染料、ペリノーン系染料、インジゴ系染料、チオインジゴ系染料、キノリン系染料、ニトロ系染料、ニトロソ系染料、ローダミン系染料、及びそれらの金属錯体系染料等から選ばれる染料に由来する色素構造が挙げられる。 The chemical structure of the dye is, for example, azo dye, disazo dye, azomethin dye (Indoaniline dye, Indophenol dye, etc.), Dipyrromethene dye, Kinone dye (Benzoquinone dye, Naftkinone dye, Anthracone). Dyes, anthrapyridone dyes, etc.), carbonium dyes (diphenylmethane dyes, triphenylmethane dyes, xanthene dyes, acridin dyes, etc.), quinoneimine dyes (oxazine dyes, thiazine dyes, etc.), azines. Dyes, polymethine dyes (oxonol dyes, merocyanine dyes, allylidene dyes, styryl dyes, cyanine dyes, squarylium dyes, croconium dyes, etc.), quinophthalone dyes, phthalocyanine dyes, subphthalocyanine dyes, Examples thereof include dye structures derived from dyes selected from perinone dyes, indigo dyes, thioindigo dyes, quinoline dyes, nitro dyes, nitroso dyes, rhodamine dyes, and their metal complex dyes.
これらの色素構造の中でも、色相、色分離性、色むらなどの色特性の観点から、アゾ系染料、キサンテン系染料、シアニン系染料、トリフェニルメタン系染料、アントラキノーン系染料、ジピロメテン系染料、スクアリリウム系染料、キノフタロン系染料、フタロシアニン系染料、サブフタロシアニン系染料から選ばれる色素に由来する色素構造が好ましく、キサンテン系染料、シアニン系染料、トリフェニルメタン系染料、アントラキノーン系染料、ジピロメテン系染料、フタロシアニン系染料から選ばれる色素に由来する色素構造がより好ましい。 Among these dye structures, azo dyes, xanthene dyes, cyanine dyes, triphenylmethane dyes, anthracinone dyes, dipyrromethene dyes from the viewpoint of color characteristics such as hue, color separability, and color unevenness. , Squalylium dyes, quinophthalone dyes, phthalocyanine dyes, subphthalocyanine dyes, and dyes selected from dyes are preferable. A dye structure derived from a dye selected from the dyes and phthalocyanine dyes is more preferable.
[色素誘導体(E)]
本発明の感光性組成物は、必要に応じて色素誘導体(E)を含有できる。
[Dye derivative (E)]
The photosensitive composition of the present invention can contain the dye derivative (E), if necessary.
色素誘導体(E)は、特に制限はなく、有機色素残基に酸性基、塩基性基、中性基などを有する色素誘導体が挙げられる。色素誘導体(E)は、例えば、スルホ基、カルボキシ基、リン酸基などの酸性置換基を有する化合物、およびこれらのアミン塩や、スルホンアミド基や末端に3級アミノ基などの塩基性置換基を有する化合物、フェニル基やフタルイミドアルキル基などの中性置換基を有する化合物が挙げられる。
有機色素は、例えばジケトピロロピロール系顔料、アントラキノーン系顔料、キナクリドン系顔料、ジオキサジン系顔料、ペリノーン系顔料、ペリレン系顔料、チアジンインジゴ系顔料、トリアジン系顔料、ベンズイミダゾロン系顔料、ベンゾイソインドール等のインドール系顔料、イソインドリン系顔料、イソインドリノーン系顔料、キノフタロン系顔料、ナフトール系顔料、スレン系顔料、金属錯体系顔料、アゾ、ジスアゾ、ポリアゾ等のアゾ系顔料等が挙げられる。
The dye derivative (E) is not particularly limited, and examples thereof include a dye derivative having an acidic group, a basic group, a neutral group, or the like as an organic dye residue. The dye derivative (E) is, for example, a compound having an acidic substituent such as a sulfo group, a carboxy group or a phosphate group, an amine salt thereof, or a basic substituent such as a sulfonamide group or a tertiary amino group at the terminal. Examples thereof include compounds having a neutral substituent such as a phenyl group and a phthalimidealkyl group.
Organic pigments include, for example, diketopyrrolopyrrole pigments, anthracinone pigments, quinacridone pigments, dioxazine pigments, perinone pigments, perylene pigments, thiazineindigo pigments, triazine pigments, benzimidazolone pigments, etc. Examples include indol pigments such as benzoisoindole, isoindolin pigments, isoindolinone pigments, quinophthalone pigments, naphthol pigments, slene pigments, metal complex pigments, azo, disazo, polyazo and other azo pigments. Be done.
具体的には、ジケトピロロピロール系色素誘導体としては、特開2001-220520号公報、国際公開第2009/081930号、国際公開第2011/052617号、国際公開第2012/102399号、特開2017-156397号公報、フタロシアニン系色素誘導体としては、特開2007-226161号公報、国際公開第2016/163351号、特開2017-165820号公報、特許第5753266号公報、アントラキノーン系色素誘導体としては、特開昭63-264674号公報、特開平09-272812号公報、特開平10-245501号公報、特開平10-265697号公報、特開2007-079094号公報、国際公開第2009/025325号、キナクリドン系色素誘導体としては、特開昭48-54128号公報、特開平03-9961号公報、特開2000-273383号公報、ジオキサジン系色素誘導体としては、特開2011-162662号公報、チアジンインジゴ系色素誘導体としては、特開2007-314785号公報、トリアジン系色素誘導体としては、特開昭61-246261号公報、特開平11-199796号公報、特開2003-165922号公報、特開2003-168208号公報、特開2004-217842号公報、特開2007-314681号公報、ベンゾイソインドール系色素誘導体としては、特開2009-57478号公報、キノフタロン系色素誘導体としては、特開2003-167112号公報、特開2006-291194号公報、特開2008-31281号公報、特開2012-226110号公報、ナフトール系色素誘導体としては、特開2012-208329号公報、特開2014-5439号公報、アゾ系色素誘導体としては、特開2001-172520号公報、特開2012-172092号公報、酸性置換基としては、特開2004-307854号公報、塩基性置換基としては、特開2002-201377号公報、特開2003-171594号公報、特開2005-181383号公報、特開2005-213404号公報、などに記載の公知の色素誘導体が挙げられる。なお、これらの文献には、色素誘導体を誘導体、顔料誘導体、分散剤、顔料分散剤若しくは単に化合物などと記載している場合があるが、前記した有機色素残基に酸性基、塩基性基、中性基などの置換基を有する化合物は、色素誘導体と同義である。 Specifically, as the diketopyrrolopyrrole dye derivative, JP-A-2001-22520, International Publication No. 2009/081930, International Publication No. 2011/0526117, International Publication No. 2012/102399, JP-A-2017 -156397, as phthalocyanine dye derivatives, JP-A-2007-226161, International Publication No. 2016/163351, JP-A-2017-165820, Patent No. 5735266, as anthracinone dye derivatives. , JP-A-63-264674, JP-A-09-272812, JP-A-10-245501, JP-A-10-265679, JP-A-2007-079094, International Publication No. 2009/025325, As the quinacridone-based dye derivative, JP-A-48-54128, JP-A-03-9961 and JP-A-2000-273383, and as the dioxazine-based dye derivative, JP-A-2011-162662, JP-A-2011-162662, Tiadine indigo. As the dye derivative, JP-A-2007-314785, and as the triazine-based dye derivative, JP-A-61-246261, JP-A-11-19976, JP-A-2003-165922, JP-A-2003- 168208, JP-A-2004-217842, JP-A-2007-314681, JP-A-2009-57478 as a benzoisoindole-based dye derivative, and JP-A-2003-167112 as a quinophthalone-based dye derivative. JP-A-2006-291194, JP-A-2008-31281, JP-A-2012-226110, and as naphthol-based dye derivatives, JP-A-2012-208329, JP-A-2014-5439, Azo JP-A-2001-172520 and JP-A-2012-1722092 are used as dye derivatives, JP-A-2004-307854 is used as an acidic substituent, and JP-A-2002-201377 is used as a basic substituent. , JP-A-2003-171594, JP-A-2005-181383, JP-A-2005-213404, and the like. In these documents, the dye derivative may be described as a derivative, a pigment derivative, a dispersant, a pigment dispersant, or simply a compound, but the above-mentioned organic dye residue includes an acidic group, a basic group, and the like. A compound having a substituent such as a neutral group is synonymous with a dye derivative.
色素誘導体(E)は、単独または2種類以上を併用して使用できる。 The dye derivative (E) can be used alone or in combination of two or more.
色素誘導体(E)の含有量は、顔料(A)100質量部に対して、1~15質量部が好ましく、2~10質量部がより好ましい。 The content of the dye derivative (E) is preferably 1 to 15 parts by mass, more preferably 2 to 10 parts by mass with respect to 100 parts by mass of the pigment (A).
[分散樹脂(F)]
本発明の感光性組成物は、必要に応じて分散樹脂(F)を含有できる。
分散樹脂(F)は、顔料に親和性が高い吸着基を有している。吸着基は、カチオン性基、およびアニオン性基のうち1種以上が好ましい。
[Dispersed resin (F)]
The photosensitive composition of the present invention may contain a dispersion resin (F), if necessary.
The dispersed resin (F) has an adsorbing group having a high affinity for the pigment. The adsorbing group is preferably one or more of a cationic group and an anionic group.
カチオン性基を有する樹脂は、例えば、カチオン性基として、1級アミノ基、2級アミノ基、3級アミノ基、4級アンモニア塩基、および含窒素複素環など窒素原子を含有する基等が挙げられる。 Examples of the resin having a cationic group include a primary amino group, a secondary amino group, a tertiary amino group, a quaternary ammonia base, and a group containing a nitrogen atom such as a nitrogen-containing heterocycle as the cationic group. Be done.
アニオン性基を有する樹脂は、例えば、アニオン性基として、カルボキシル基、リン酸基、スルホン酸基等が挙げられる。なかでも、顔料への吸着性の観点からカルボキシル基、リン酸基であることが好ましい。 Examples of the resin having an anionic group include a carboxyl group, a phosphoric acid group, a sulfonic acid group and the like as the anionic group. Of these, carboxyl groups and phosphoric acid groups are preferable from the viewpoint of adsorptivity to pigments.
分散樹脂(F)の樹脂種は、例えば、ウレタン樹脂、ポリアクリレート等のポリカルボン酸エステル、不飽和ポリアミド、ポリカルボン酸、ポリカルボン酸(部分)アミン塩、ポリカルボン酸アンモニウム塩、ポリカルボン酸アルキルアミン塩、ポリシロキサン、長鎖ポリアミノアマイドリン酸塩、水酸基含有ポリカルボン酸エステルや、これらの変性物、ポリ(低級アルキレンイミン)と遊離のカルボキシル基を有するポリエステルとの反応により形成されたアミドやその塩等、(メタ)アクリル酸-スチレン共重合体、(メタ)アクリル酸-(メタ)アクリル酸エステル共重合体、スチレン-マレイン酸共重合体、ポリビニルアルコ-ル、ポリビニルピロリドン等の水溶性樹脂や水溶性高分子化合物、ポリエステル系、変性ポリアクリレート系、エチレンオキサイド/プロピレンオキサイド付加化合物、リン酸エステル系等が挙げられる。 The resin type of the dispersed resin (F) is, for example, a urethane resin, a polycarboxylic acid ester such as polyacrylate, an unsaturated polyamide, a polycarboxylic acid, a polycarboxylic acid (partial) amine salt, a polycarboxylic acid ammonium salt, or a polycarboxylic acid. Alkylamine salts, polysiloxanes, long-chain polyaminoamidophosphates, hydroxyl group-containing polycarboxylic acid esters and modified products thereof, amides formed by the reaction of poly (lower alkyleneimine) with polyesters having free carboxyl groups. Water-soluble such as (meth) acrylic acid-styrene copolymer, (meth) acrylic acid- (meth) acrylic acid ester copolymer, styrene-maleic acid copolymer, polyvinyl alcohol, polyvinylpyrrolidone, etc. Examples thereof include sex resins, water-soluble polymer compounds, polyester-based materials, modified polyacrylate-based compounds, ethylene oxide / propylene oxide-added compounds, and phosphoric acid ester-based compounds.
分散樹脂(F)の構造は、例えば、ランダム構造、ブロック構造、グラフト構造、くし型構造、および星型構造等が挙げられる。これらの中でも、分散安定性の観点から、ブロック構造、またはくし型構造が好ましい。 Examples of the structure of the dispersed resin (F) include a random structure, a block structure, a graft structure, a comb-shaped structure, and a star-shaped structure. Among these, a block structure or a comb-shaped structure is preferable from the viewpoint of dispersion stability.
分散樹脂(F)の市販品は、例えば、ビックケミー・ジャパン社製のDisperbyk-101, 103, 107, 108, 110,111,116,130,140,154,161,162,163,164,165,166,167,168,170,171,174,180,181,182,183,184,185,190,2000,2001,2009,2010,2020,2025,2050,2070,2095,2150,2155,2163,2164、またはAnti-Terra-U203,204、またはBYK-P104,P104S,220S、またはLactimon、Lactimon-WS、またはBykumen等、日本ルーブリゾール社製のSOLSPERSE-3000,9000,13000,13240,13650,13940,16000,17000,18000,20000,21000,24000,26000,27000,28000,31845,32000,32500,32550,33500,32600,34750,35100,36600,38500,41000,41090,53095,55000,56000,76500等、BASF社製のEFKA-46,47,48,452,4008,4009,4010,4015,4020,4047,4050,4055,4060,4080,4400,4401,4402,4403,4406,4408,4300,4310,4320,4330,4340,450,451,453,4540,4550,4560,4800,5010,5065,5066,5070,7500,7554,1101,120,150,1501,1502,1503等、味の素ファインテクノ社製のアジスーパーPA111,PB711,PB821,PB822,PB824等、特開2008-029901号公報、特開2009-155406号公報、特開2010-185934号公報、特開2011-157416号公報等に記載の樹脂が挙げられる。 Commercially available products of the dispersed resin (F) include, for example, Disperbyk-101, 103, 107, 108, 110, 111, 116, 130, 140, 154, 161, 162, 163, 164, 165, manufactured by Big Chemie Japan. 166,167,168,170,171,174,180,181,182,183,184,185,190,2000,2001,2009,2010,2020,2025,205,2070,2095,2150,2155,2163 2164, or Anti-Terra-U203,204, or BYK-P104, P104S, 220S, or Lactimon, Lactimon-WS, or Bykuman, etc. , 16000, 17000, 18000, 20000, 21000, 24000, 26000, 27000, 28000, 31845, 32000, 32500, 32550, 33500, 32600, 34750, 35100, 36600, 38500, 41000, 41090, 53095, 55000, 56000, 76500 Etc., EFKA-46, 47, 48, 452, 4008, 4009, 4010, 4015, 4020, 4047, 4050, 4055, 4060, 4080, 4400, 4401, 4402, 4403, 4406, 4408, 4300, manufactured by BASF, etc. 4310, 4320, 4330, 4340, 450, 451, 453, 4540, 4550, 4560, 4800, 5010, 5065, 5066, 5070, 7500, 7554, 1101, 120, 150, 1501, 1502, 1503, etc. Described in JP-A-2008-029901, JP-A-2009-155406, JP-A-2010-185934, JP-A-2011-157416, etc. Resin is mentioned.
分散樹脂(F)は、単独または2種類以上を併用して使用できる。 The dispersed resin (F) can be used alone or in combination of two or more.
分散樹脂(F)の含有量は、分散安定性の観点から、顔料(A)100質量部に対して、3~200質量部が好ましく、5~100質量部がより好ましい。 The content of the dispersed resin (F) is preferably 3 to 200 parts by mass, more preferably 5 to 100 parts by mass with respect to 100 parts by mass of the pigment (A) from the viewpoint of dispersion stability.
[アルカリ可溶性樹脂(B)]
本発明の感光性組成物は、アルカリ可溶性樹脂(B)を含む。
[Alkali-soluble resin (B)]
The photosensitive composition of the present invention contains an alkali-soluble resin (B).
アルカリ可溶性樹脂(B)は、アルカリ現像液に溶解する樹脂であり、厚さ2μmの被膜形成時に400~700nmの全波長領域において透過率が80%以上の樹脂が好ましい。なお、透過率は、95%以上が好ましい。
アルカリ可溶性樹脂(B)は、非感光性のアルカリ可溶性樹脂、感光性アルカリ可溶性樹脂に分類できる。アルカリ可溶性基は、例えば、カルボキシル基、リン酸基、スルホン酸基、ヒドロキシル基、フェノール性ヒドロキシル基などが挙げられる。これらの中でも、カルボキシル基が好ましい。また、アルカリ可溶性樹脂(B)は、エポキシ基やオキセタニル基等の熱硬化性基を含有できる。
The alkali-soluble resin (B) is a resin that dissolves in an alkaline developer, and a resin having a transmittance of 80% or more in the entire wavelength region of 400 to 700 nm when a film having a thickness of 2 μm is formed is preferable. The transmittance is preferably 95% or more.
The alkali-soluble resin (B) can be classified into a non-photosensitive alkali-soluble resin and a photosensitive alkali-soluble resin. Examples of the alkali-soluble group include a carboxyl group, a phosphoric acid group, a sulfonic acid group, a hydroxyl group, and a phenolic hydroxyl group. Among these, a carboxyl group is preferable. Further, the alkali-soluble resin (B) can contain a thermosetting group such as an epoxy group or an oxetanyl group.
(非感光性のアルカリ可溶性樹脂)
非感光性のアルカリ可溶性樹脂は、例えば、酸性基を有するアクリル樹脂、α-オレフィン/(無水)マレイン酸共重合体、スチレン/スチレンスルホン酸共重合体、エチレン/(メタ)アクリル酸共重合体、又はイソブチレン/(無水)マレイン酸共重合体等が挙げられる。これらの中でも、酸性基を有するアクリル樹脂、スチレン/スチレンスルホン酸共重合体が好ましい。
(Non-photosensitive alkali-soluble resin)
The non-photosensitive alkali-soluble resin is, for example, an acrylic resin having an acidic group, an α-olefin / (anhydrous) maleic acid copolymer, a styrene / styrene sulfonic acid copolymer, or an ethylene / (meth) acrylic acid copolymer. , Or isobutylene / (anhydrous) maleic acid copolymer and the like. Among these, an acrylic resin having an acidic group and a styrene / styrene sulfonic acid copolymer are preferable.
(感光性アルカリ可溶性樹脂)
感光性アルカリ可溶性樹脂は、重合性不飽和基を有するアルカリ可溶性樹脂である。感光性アルカリ可溶性樹脂は、例えば、以下に示す(i)または(ii)の方法で合成する樹脂が好ましい。活性エネルギー線による硬化で樹脂は、3次元架橋して架橋密度が向上し薬品耐性が向上する。
(Photosensitive alkali-soluble resin)
The photosensitive alkali-soluble resin is an alkali-soluble resin having a polymerizable unsaturated group. As the photosensitive alkali-soluble resin, for example, a resin synthesized by the method (i) or (ii) shown below is preferable. By curing with active energy rays, the resin is three-dimensionally crosslinked to improve the crosslink density and chemical resistance.
[方法(i)]
方法(i)は、例えば、まず、エポキシ基含有単量体、およびその他単量体の重合体を合成する。次いで、前記重合体のエポキシ基に、モノカルボキシル基含有単量体を付加し、生成した水酸基に、多塩基酸無水物を反応させて感光性アルカリ可溶性樹脂を得る方法が挙げられる。
[Method (i)]
In method (i), for example, first, an epoxy group-containing monomer and a polymer of other monomers are synthesized. Next, a method of adding a monocarboxyl group-containing monomer to the epoxy group of the polymer and reacting the generated hydroxyl group with a polybasic acid anhydride to obtain a photosensitive alkali-soluble resin can be mentioned.
エポキシ基含有単量体は、例えば、グリシジル(メタ)アクリレート、メチルグリシジル(メタ)アクリレート、2-グリシドキシエチル(メタ)アクリレート、3,4-エポキシブチル(メタ)アクリレート、及び3,4-エポキシシクロヘキシル(メタ)アクリレートが挙げられる。これらの中でも、反応性の観点で、グリシジル(メタ)アクリレートが好ましい。 Epoxy group-containing monomers include, for example, glycidyl (meth) acrylate, methylglycidyl (meth) acrylate, 2-glycidoxyethyl (meth) acrylate, 3,4-epoxybutyl (meth) acrylate, and 3,4-. Epoxycyclohexyl (meth) acrylate can be mentioned. Among these, glycidyl (meth) acrylate is preferable from the viewpoint of reactivity.
モノカルボキシル基含有単量体は、例えば、(メタ)アクリル酸、クロトン酸、o-、m-、p-ビニル安息香酸、(メタ)アクリル酸のα位ハロアルキル、アルコキシル、ハロゲン、ニトロ、シアノ置換体等のモノカルボン酸等が挙げられる。 The monocarboxyl group-containing monomer is, for example, (meth) acrylic acid, crotonic acid, o-, m-, p-vinylbenzoic acid, α-position haloalkyl of (meth) acrylic acid, alkoxyl, halogen, nitro, cyano substituted. Examples thereof include monocarboxylic acids such as the body.
多塩基酸無水物は、例えば、テトラヒドロ無水フタル酸、無水フタル酸、ヘキサヒドロ無水フタル酸、無水コハク酸、無水マレイン酸等が挙げられる。 Examples of the polybasic acid anhydride include tetrahydrophthalic anhydride, phthalic anhydride, hexahydrophthalic anhydride, succinic anhydride, maleic anhydride and the like.
単量体および多塩基酸無水物は、それぞれ単独または2種類以上を併用して使用できる。 The monomer and polybasic acid anhydride can be used alone or in combination of two or more.
また、方法(i)に似た方法として、例えば、カルボキシル基含有単量体、およびそれ以外に単量体を合成し重合体を作製する。次いで、前記重合体のカルボキシル基の一部にエポキシ基含有単量体を付加し、感光性アルカリ可溶性樹脂を得る方法が挙げられる。 Further, as a method similar to the method (i), for example, a carboxyl group-containing monomer and a monomer other than the above are synthesized to prepare a polymer. Next, a method of adding an epoxy group-containing monomer to a part of the carboxyl group of the polymer to obtain a photosensitive alkali-soluble resin can be mentioned.
[方法(ii)]
方法(ii)は、例えば、(メタ)アクリル酸エステル、水酸基含有単量体、およびその他単量体の重合体を合成する。次いで、前記重合体の水酸基に、イソシアネート基含有単量体のイソシアネート基を反応させる方法が挙げられる。
[Method (ii)]
Method (ii) synthesizes, for example, polymers of (meth) acrylic acid esters, hydroxyl group-containing monomers, and other monomers. Next, a method of reacting the hydroxyl group of the polymer with the isocyanate group of the isocyanate group-containing monomer can be mentioned.
(メタ)アクリル酸エステルは、例えば、メチル(メタ)アクリレート、エチル(メタ)アクリレート、n-プロピル(メタ)アクリレート、イソプロピル(メタ)アクリレート、n-ブチル(メタ)アクリレート、イソブチル(メタ)アクリレート、t-ブチル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、ステアリル(メタ)アクリレート、ラウリル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、イソボルニル(メタ)アクリレート、フェニル(メタ)アクリレート、ベンジル(メタ)アクリレート、フェノキシエチル(メタ)アクリレート、フェノキシジエチレングリコール(メタ)アクリレート、メトキシポリプロピレングリコール(メタ)アクリレート、又はエトキシポリエチレングリコール(メタ)アクリレート等が挙げられる。 Examples of the (meth) acrylic acid ester include methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, n-butyl (meth) acrylate, and isobutyl (meth) acrylate. t-butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, cyclohexyl (meth) acrylate, stearyl (meth) acrylate, lauryl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, isobornyl (meth) acrylate, phenyl ( Examples thereof include meth) acrylate, benzyl (meth) acrylate, phenoxyethyl (meth) acrylate, phenoxydiethylene glycol (meth) acrylate, methoxypolypropylene glycol (meth) acrylate, and ethoxypolyethylene glycol (meth) acrylate.
水酸基含有単量体は、例えば、2-ヒドロキシエチル(メタ)アクリレート、2-若しくは3-ヒドロキシプロピル(メタ)アクリレート、2-若しくは3-若しくは4-ヒドロキシブチル(メタ)アクリレート、グリセロールモノ(メタ)アクリレート、又はシクロヘキサンジメタノールモノ(メタ)アクリレート等のヒドロキシアルキルメタクリレート類が挙げられる。また、ヒドロキシアルキル(メタ)アクリレートに、エチレンオキシド、プロピレンオキシド、及び/又はブチレンオキシド等を付加重合させたポリエーテルモノ(メタ)アクリレートや、ポリγ-バレロラクトン、ポリε-カプロラクトン、及び/又はポリ12-ヒドロキシステアリン酸等を付加したポリエステルモノ(メタ)アクリレートも挙げられる。これらの中でも被膜中に異物が生じ難い面で2-ヒドロキシエチルメタクリレート、グリセロールモノ(メタ)アクリレートが好ましい。また、光感度の面でグリセロールモノ(メタ)アクリレートが好ましい。 The hydroxyl group-containing monomer is, for example, 2-hydroxyethyl (meth) acrylate, 2- or 3-hydroxypropyl (meth) acrylate, 2- or 3- or 4-hydroxybutyl (meth) acrylate, glycerol mono (meth). Examples thereof include hydroxyalkyl methacrylates such as acrylate or cyclohexanedimethanol mono (meth) acrylate. Further, a polyether mono (meth) acrylate obtained by superpolymerizing hydroxyalkyl (meth) acrylate with ethylene oxide, propylene oxide, and / or butylene oxide, poly γ-valerolactone, poly ε-caprolactone, and / or poly. Polyester mono (meth) acrylate to which 12-hydroxystearic acid or the like is added can also be mentioned. Among these, 2-hydroxyethyl methacrylate and glycerol mono (meth) acrylate are preferable in terms of preventing foreign substances from being generated in the coating film. Further, glycerol mono (meth) acrylate is preferable in terms of light sensitivity.
イソシアネート基含有単量体は、2-(メタ)アクリロイルエチルイソシアネート、2-(メタ)アクリロイルオキシエチルイソシアネート、又は1,1-ビス〔メタアクリロイルオキシ〕エチルイソシアネート等が挙げられる。 Examples of the isocyanate group-containing monomer include 2- (meth) acryloylethyl isocyanate, 2- (meth) acryloyloxyethyl isocyanate, and 1,1-bis [methacryloyloxy] ethyl isocyanate.
その他単量体は、N-置換マレイミド類、アルキレンオキシ基含有単量体、リン酸エステル基含有エチレン性不飽和単量体、カルボキシル基含有単量体等が挙げられる。
N-置換マレイミド類は、例えば、シクロヘキシルマレイミド、フェニルマレイミド、メチルマレイミド、エチルマレイミド、1,2-ビスマレイミドエタン1,6-ビスマレイミドヘキサン、3-マレイミドプロピオン酸、6,7-メチレンジオキシ-4-メチル-3-マレイミドクマリン、4,4’-ビスマレイミドジフェニルメタン、ビス(3-エチル-5-メチル-4-マレイミドフェニル)メタン、N,N’-1,3-フェニレンジマレイミド、N,N’-1,4-フェニレンジマレイミド、N-(1-ピレニル)マレイミド、N-(2,4,6-トリクロロフェニル)マレイミド、N-(4-アミノフェニル)マレイミド、N-(4-ニトロフェニル)マレイミド、N-ベンジルマレイミド、N-ブロモメチル-2,3-ジクロロマレイミド、N-スクシンイミジル-3-マレイミドベンゾエ-ト、N-スクシンイミジル-3-マレイミドプロピオナ-ト、N-スクシンイミジル-4-マレイミドブチラ-ト、N-スクシンイミジル-6-マレイミドヘキサノア-ト、N-[4-(2-ベンゾイミダゾリル)フェニル]マレイミド、9-マレイミドアクリジン等が挙げられる。
アルキレンオキシ基含有単量体は、例えば、EO変性クレゾールアクリレート、n-ノニルフェノキシポリエチレングリコールアクリレート、フェノキシエチルアクリレート、エトキシ化フェニルアクリレート、フェノールのエチレンオキサイド(EO)変性(メタ)アクリレート、パラクミルフェノールのEO又はプロピレンオキサイド(PO)変性(メタ)アクリレート、ノニルフェノールのEO変性(メタ)アクリレート、ノニルフェノールのPO変性(メタ)アクリレート等が挙げられる。
Examples of other monomers include N-substituted maleimides, alkyleneoxy group-containing monomers, phosphoric acid ester group-containing ethylenically unsaturated monomers, and carboxyl group-containing monomers.
N-substituted maleimides include, for example, cyclohexylmaleimide, phenylmaleimide, methylmaleimide, ethylmaleimide, 1,2-bismaleimideethane 1,6-bismaleimidehexane, 3-maleimidepropionic acid, 6,7-methylenedioxy-. 4-Methyl-3-maleimidecoumarin, 4,4'-bismaleimidediphenylmethane, bis (3-ethyl-5-methyl-4-maleimidephenyl) methane, N, N'-1,3-phenylenedimaleimide, N, N'-1,4-phenylenedi maleimide, N- (1-pyrenyl) maleimide, N- (2,4,6-trichlorophenyl) maleimide, N- (4-aminophenyl) maleimide, N- (4-nitro) Phenyl) Maleimide, N-benzylmaleimide, N-bromomethyl-2,3-dichloromaleimide, N-succinimidyl-3-maleimidebenzoate, N-succinimidyl-3-maleimidepropionate, N-succinimidyl-4- Maleimide butyrate, N-succinimidyl-6-maleimide hexanoate, N- [4- (2-benzoimidazolyl) phenyl] maleimide, 9-maleimide acrydin and the like can be mentioned.
Examples of the alkyleneoxy group-containing monomer include EO-modified cresol acrylate, n-nonylphenoxypolyethylene glycol acrylate, phenoxyethyl acrylate, ethoxylated phenylacrylate, ethylene oxide (EO) -modified (meth) acrylate of phenol, and paracumylphenol. Examples thereof include EO or propylene oxide (PO) modified (meth) acrylate, EO-modified (meth) acrylate of nonylphenol, and PO-modified (meth) acrylate of nonylphenol.
モノカルボキシル基含有単量体は、既に説明した単量体を使用できる。 As the monocarboxyl group-containing monomer, the monomer already described can be used.
リン酸エステル基含有エチレン性不飽和単量体は、例えば、上記水酸基含有エチレン性不飽和単量体の水酸基に、たとえば5酸化リンやポリリン酸等のリン酸エステル化剤を反応させた化合物である。 The phosphoric acid ester group-containing ethylenically unsaturated monomer is, for example, a compound obtained by reacting the hydroxyl group of the hydroxyl group-containing ethylenically unsaturated monomer with a phosphoric acid esterifying agent such as phosphorus pentoxide or polyphosphoric acid. be.
アルカリ可溶性樹脂(B)は、単独または2種類以上を併用して使用できる。 The alkali-soluble resin (B) can be used alone or in combination of two or more.
アルカリ可溶性樹脂(B)の重量平均分子量(Mw)は、現像性の観点から、2,000~40,000であり、3,000~300,00が好ましく、4,000~20,000がより好ましい。また、Mw/Mnの値は10以下が好ましい。適度な重量平均分子量(Mw)により基板に対する密着性、およびアルカリ現像溶解性が向上する。 The weight average molecular weight (Mw) of the alkali-soluble resin (B) is 2,000 to 40,000, preferably 3,000 to 3,000, and more preferably 4,000 to 20,000 from the viewpoint of developability. preferable. Further, the value of Mw / Mn is preferably 10 or less. The appropriate weight average molecular weight (Mw) improves the adhesion to the substrate and the alkali development solubility.
アルカリ可溶性樹脂(B)の酸価は、50~200mgKOH/gが好ましく、70~180mgKOH/gがより好ましく、90~170mgKOH/gがさらに好ましい。適度な酸価により基板に対する密着性、およびアルカリ現像溶解性が向上する。 The acid value of the alkali-soluble resin (B) is preferably 50 to 200 mgKOH / g, more preferably 70 to 180 mgKOH / g, and even more preferably 90 to 170 mgKOH / g. Adhesion to the substrate and alkali development solubility are improved by an appropriate acid value.
アルカリ可溶性樹脂(B)の含有量は、顔料(A)100質量部に対して、20~400質量部が好ましく、50~250質量部がより好ましい。 The content of the alkali-soluble resin (B) is preferably 20 to 400 parts by mass, more preferably 50 to 250 parts by mass with respect to 100 parts by mass of the pigment (A).
[重合性化合物(C)]
本発明の感光性組成物は、重合性化合物(C)を含む。重合性化合物(C)は、重合性不飽和基を含有するモノマー(単量体)、2量体、3量体、およびオリゴマーである。重合性不飽和基は、例えば、ビニル基、(メタ)アリル基、(メタ)アクリロイル基、(メタ)アクリロイルオキシ基等が挙げられる。重合性化合物(C)は、例えば、酸基を有する重合性化合物(C-1)、ウレタン結合および酸基を有する重合性化合物(C-2)(ただし、(C-1)を除く)、その他重合性化合物(C-3)が挙げられる。
[Polymerizable compound (C)]
The photosensitive composition of the present invention contains the polymerizable compound (C). The polymerizable compound (C) is a monomer (monomer) containing a polymerizable unsaturated group, a dimer, a trimer, and an oligomer. Examples of the polymerizable unsaturated group include a vinyl group, a (meth) allyl group, a (meth) acryloyl group, a (meth) acryloyloxy group and the like. The polymerizable compound (C) is, for example, a polymerizable compound having an acid group (C-1), a polymerizable compound having a urethane bond and an acid group (C-2) (excluding (C-1)), and the like. Other examples include a polymerizable compound (C-3).
(酸基を有する重合性化合物(C-1))
本発明の感光性組成物は、酸基を有する重合性化合物(C-1)を含むことが好ましい。これにより、フォトリソグラフィー法でパターン形成する際に現像残渣を抑制できるため指紋認証精度が向上する。酸基を有する重合性化合物(C-1)の酸基は、例えば、スルホン酸基、カルボキシル基、リン酸基等を挙げられる。なかでも、カルボキシル基が好ましい。
(Polymerizable compound having an acid group (C-1))
The photosensitive composition of the present invention preferably contains a polymerizable compound (C-1) having an acid group. As a result, the development residue can be suppressed when forming a pattern by the photolithography method, so that the fingerprint authentication accuracy is improved. Examples of the acid group of the polymerizable compound (C-1) having an acid group include a sulfonic acid group, a carboxyl group, and a phosphoric acid group. Of these, a carboxyl group is preferable.
酸基を有する重合性化合物(C-1)は、例えば、多価アルコールと(メタ)アクリル酸との遊離水酸基含有ポリ(メタ)アクリレート類と、ジカルボン酸類とのエステル化物;多価カルボン酸と、モノヒドロキシアルキル(メタ)アクリレート類とのエステル化物等を挙げられる。
多価アルコールは、例えば、エチレングリコール、プロピレングリコール、ポリエチレングリコール、ポリプロピレングリコール、グリセリン、トリメチロールプロパン、ジトリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール等が挙げられる。
ジカルボン酸類は、例えば、マロン酸、コハク酸、マレイン酸、グルタル酸、フタル酸イタコン酸等が挙げられる。
多価カルボン酸は、例えば、トリメリット酸、ピロメリット酸等が挙げられる。
モノヒドロキシアルキル(メタ)アクリレート類は、例えば、2-ヒドロキシエチル(メタ)アクリレート、2-ヒドロキシプロピル(メタ)アクリレート、2-ヒドロキシブチル(メタ)アクリレート、4-ヒドロキシブチル(メタ)アクリレート、ペンタエリスリトールトリアクリレート、2-ヒドロキシ-3-アクリロイロキシプロピルメタクリレート等が挙げられる。
The polymerizable compound (C-1) having an acid group is, for example, an esterified product of a polyhydric alcohol, a free hydroxyl group-containing poly (meth) acrylate of (meth) acrylic acid, and a dicarboxylic acid; , Esterized products with monohydroxyalkyl (meth) acrylates and the like.
Examples of the polyhydric alcohol include ethylene glycol, propylene glycol, polyethylene glycol, polypropylene glycol, glycerin, trimethylolpropane, dimethylolpropane, pentaerythritol, dipentaerythritol and the like.
Examples of dicarboxylic acids include malonic acid, succinic acid, maleic acid, glutaric acid, itaconic phthalate and the like.
Examples of the polyvalent carboxylic acid include trimellitic acid and pyromellitic acid.
Examples of monohydroxyalkyl (meth) acrylates include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, and pentaerythritol. Examples thereof include triacrylate and 2-hydroxy-3-acryloyloxypropyl methacrylate.
酸基を有する重合性化合物(C-1)の市販品は、大阪有機社製のビスコート#2500P、東亜合成社製アロニックスM-5300,M-5400,M-5700,M-510,M-520,M-521等が挙げられる。 Commercially available products of the polymerizable compound (C-1) having an acid group are Viscoat # 2500P manufactured by Osaka Organic Co., Ltd. and Aronix M-5300, M-5400, M-5700, M-510, M-520 manufactured by Toagosei Co., Ltd. , M-521 and the like.
酸基を有する重合性化合物(C-1)の含有量は、パターン形成時の現像残渣の観点から、前記重合性化合物(C)100質量%中、5~80質量%が好ましく、25~60質量部%であることがより好ましい。 The content of the polymerizable compound (C-1) having an acid group is preferably 5 to 80% by mass, preferably 25 to 60% by mass, based on 100% by mass of the polymerizable compound (C) from the viewpoint of the development residue at the time of pattern formation. More preferably, it is by mass%.
(ウレタン結合および酸基を有する重合性化合物(C-2))
本発明の感光性組成物は、下記一般式(2)で表されるウレタン結合および酸基を有する重合性化合物(C-2)を含むことがより好ましい。
一般式(2)(H2C=C(R1)COO)m-X-(OCOCH(R1)CH2S(R2)COOH)n
一般式(2)中、R1は、水素原子又はメチル基、R2は、炭素数1~12の炭化水素基、Xは、(m+n)価の炭素数3~60のウレタン結合を有する有機基、mは2~18の整数、nは1~3の整数を示す。
(Polymerizable compound having urethane bond and acid group (C-2))
It is more preferable that the photosensitive composition of the present invention contains a polymerizable compound (C-2) having a urethane bond and an acid group represented by the following general formula (2).
General formula (2) (H 2 C = C (R 1 ) COO) m -X- (OCOCH (R 1 ) CH 2 S (R 2 ) COOH) n
In the general formula (2), R 1 is a hydrogen atom or a methyl group, R 2 is a hydrocarbon group having 1 to 12 carbon atoms, and X is an organic having a (m + n) -valent urethane bond having 3 to 60 carbon atoms. The group, m is an integer of 2 to 18, and n is an integer of 1 to 3.
一般式(2)で表される化合物は、例えば、まず、多官能イソシアネート化合物と水酸基含有(メタ)アクリレートとを反応させる。次いで、生成物にカルボキシル基を有するメルカプト化合物を付加させる方法で合成できる。 For the compound represented by the general formula (2), for example, first, a polyfunctional isocyanate compound is first reacted with a hydroxyl group-containing (meth) acrylate. Then, it can be synthesized by a method of adding a mercapto compound having a carboxyl group to the product.
前記多官能イソシアネートは、例えば、トリレンジイソシアネート、ヘキサメチレンジイソシアネート、ジフェニルメチレンジイソシアネート、イソホロンジイソシアネート、ポリイソシアネート等が挙げられる。 Examples of the polyfunctional isocyanate include tolylene diisocyanate, hexamethylene diisocyanate, diphenylmethylene diisocyanate, isophorone diisocyanate, polyisocyanate and the like.
前記水酸基を有する(メタ)アクリレートは、例えば、2-ヒドロキシエチル(メタ)アクリレート、4-ヒドロキシブチル(メタ)アクリレート、トリメチロ-ルプロパンジ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ジトリメチロ-ルプロパントリ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールエチレンオキサイド変性ペンタ(メタ)アクリレート、ジペンタエリスリトールプロピレンオキサイド変性ペンタ(メタ)アクリレート、ジペンタエリスリトールカプロラクトン変性ペンタ(メタ)アクリレート、グリセロ-ルアクリレートメタクリレート、グリセロ-ルジメタクリレート、2-ヒドロキシ-3-アクリロイルプロピルメタクリレート、エポキシ基含有化合物とカルボキシ(メタ)アクリレートの反応物、水酸基含有ポリオ-ルポリアクリレート等が挙げられる。 The (meth) acrylate having a hydroxyl group is, for example, 2-hydroxyethyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, trimethylol propandi (meth) acrylate, pentaerythritol tri (meth) acrylate, ditrimethylol propanthryl (meth). Meta) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol ethylene oxide-modified penta (meth) acrylate, dipentaerythritol propylene oxide-modified penta (meth) acrylate, dipentaerythritol caprolactone-modified penta (meth) acrylate, glycero- Examples thereof include luacrylate methacrylate, glycero-ludimethacrylate, 2-hydroxy-3-acryloylpropyl methacrylate, a reaction product of an epoxy group-containing compound and a carboxy (meth) acrylate, and a hydroxyl group-containing polyol polyacrylate.
前記カルボキシル基を有するメルカプト化合物は、例えば、メルカプト酢酸、2-メルカプトプロピオン酸、3-メルカプトプロピオン酸、o-メルカプト安息香酸、2-メルカプトニコチン酸、メルカプトコハク酸等が挙げられる。 Examples of the mercapto compound having a carboxyl group include mercaptoacetic acid, 2-mercaptopropionic acid, 3-mercaptopropionic acid, o-mercaptobenzoic acid, 2-mercaptonicotinic acid, and mercaptosuccinic acid.
ウレタン結合および酸基を有する重合性化合物(C-2)の含有量は、パターン形成時の現像残渣の観点から、重合性化合物(C)100質量%中、5~80質量%が好ましく、25~60質量%であることがより好ましい。 The content of the polymerizable compound (C-2) having a urethane bond and an acid group is preferably 5 to 80% by mass, preferably 5 to 80% by mass, based on 100% by mass of the polymerizable compound (C) from the viewpoint of the development residue at the time of pattern formation. More preferably, it is ~ 60% by mass.
(その他重合性化合物(C-3))
その他重合性化合物(C-3)は、例えば、メチル(メタ)アクリレート、エチル(メタ)アクリレート、2-ヒドロキシエチル(メタ)アクリレート、2-ヒドロキシプロピル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、β-カルボキシエチル(メタ)アクリレート、ポリエチレングリコールジ(メタ)アクリレート、1,6-ヘキサンジオ-ルジ(メタ)アクリレート、トリエチレングリコールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、トリメチロ-ルプロパントリ(メタ)アクリレート、フェノキシテトラエチレングリコール(メタ)アクリレート、フェノキシヘキサエチレングリコール(メタ)アクリレート、トリメチロ-ルプロパンPO変性トリ(メタ)アクリレート、トリメチロ-ルプロパンEO変性トリ(メタ)アクリレート、イソシアヌル酸EO変性ジ(メタ)アクリレート、イソシアヌル酸EO変性トリ(メタ)アクリレート、ジトリメチロ-ルプロパンテトラ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、1,6-ヘキサンジオ-ルジグリシジルエーテルジ(メタ)アクリレート、ビスフェノールAジグリシジルエーテルジ(メタ)アクリレート、ネオペンチルグリコールジグリシジルエーテルジ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、トリシクロデカニル(メタ)アクリレート、メチロ-ル化メラミンの(メタ)アクリル酸エステル、エポキシ(メタ)アクリレート、ウレタンアクリレート等の各種アクリル酸エステル及びメタクリル酸エステル、スチレン、酢酸ビニル、ヒドロキシエチルビニルエーテル、エチレングリコールジビニルエーテル、ペンタエリスリトールトリビニルエーテル、(メタ)アクリルアミド、N-ヒドロキシメチル(メタ)アクリルアミド、N-ビニルホルムアミド、アクリロニトリル等が挙げられる。
(Other polymerizable compounds (C-3))
Other polymerizable compounds (C-3) include, for example, methyl (meth) acrylate, ethyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, cyclohexyl (meth) acrylate, β. -Carboxyethyl (meth) acrylate, polyethylene glycol di (meth) acrylate, 1,6-hexanedioldi (meth) acrylate, triethylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, trimethyl propantri (meth). ) Acrylate, Phenoxytetraethylene glycol (meth) acrylate, Phenoxyhexaethylene glycol (meth) acrylate, Trimethylolpropane PO-modified tri (meth) acrylate, Trimethylolpropane EO-modified tri (meth) acrylate, Isocyanuric acid EO-modified di (meth) acrylate ) Acrylate, isocyanuric acid EO-modified tri (meth) acrylate, ditrimethylol propanetetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, 1,6-hexanedio-ldiglycidyl ether di ( Meta) acrylate, bisphenol A diglycidyl ether di (meth) acrylate, neopentyl glycol diglycidyl ether di (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, tricyclodecanyl (meth) Various acrylic acid esters such as meth) acrylate, (meth) acrylic acid ester of methylolated melamine, epoxy (meth) acrylate, urethane acrylate, and methacrylic acid ester, styrene, vinyl acetate, hydroxyethyl vinyl ether, ethylene glycol divinyl ether, Examples thereof include pentaerythritol trivinyl ether, (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, N-vinylformamide, and acrylonitrile.
その他重合性化合物(C-3)の市販品は、例えば、日本化薬社製のKAYARAD R-128H、R526、PEG400DA、MAND、NPGDA、R-167、HX-220、R-551、R712、R-604、R-684、GPO-303、TMPTA、DPHA、DPEA-12、DPHA-2C、D-310、D-330、DPCA-20、DPCA-30、DPCA-60、DPCA-120、及び東亜合成社製のアロニックスM-303、M-305、M-306、M-309、M-310、M-321、M-325、M-350、M-360、M-313、M-315、M-400、M-402、M-403、M-404、M-405、M-406、M-450、M-452、M-408、M-211B、M-101A、大阪有機社製のビスコート#310HP、#335HP、#700、#295、#330、#360、#GPT、#400、#405、UV-4108F、UV-4117F、新中村化学社製のNKエステルA-9300、UA-160TM、共栄社化学社製のAH-600、AT-600、UA-306H、UA-306T、UA-306I、UA-510H、UF-8001G、DAUA-167等が挙げられる。 Other commercially available products of the polymerizable compound (C-3) include, for example, KAYARAD R-128H, R526, PEG400DA, MAND, NPGDA, R-167, HX-220, R-551, R712, R manufactured by Nippon Kayaku Co., Ltd. -604, R-684, GPO-303, TMPTA, DPHA, DPEA-12, DPHA-2C, D-310, D-330, DPCA-20, DPCA-30, DPCA-60, DPCA-120, and Toagosei Aronix M-303, M-305, M-306, M-309, M-310, M-321, M-325, M-350, M-360, M-313, M-315, M- 400, M-402, M-403, M-404, M-405, M-406, M-450, M-452, M-408, M-211B, M-101A, Viscoat # 310HP manufactured by Osaka Organic Co., Ltd. , # 335HP, # 700, # 295, # 330, # 360, #GPT, # 400, # 405, UV-4108F, UV-4117F, NK Ester A-9300, UA-160TM, Kyoeisha, manufactured by Shin-Nakamura Chemical Co., Ltd. Examples thereof include AH-600, AT-600, UA-306H, UA-306T, UA-306I, UA-510H, UF-8001G, DAUA-167 manufactured by Kagaku Co., Ltd.
重合性化合物(C)は、単独または2種類以上を併用して使用できる。 The polymerizable compound (C) can be used alone or in combination of two or more.
重合性化合物(C)の含有量は、感光性組成物の不揮発分100質量%中、1~60質量%が好ましく、2~50質量%がより好ましい。 The content of the polymerizable compound (C) is preferably 1 to 60% by mass, more preferably 2 to 50% by mass, based on 100% by mass of the non-volatile content of the photosensitive composition.
[光重合開始剤(D)]
本発明の感光性組成物は、光重合開始剤(D)を含む。光重合開始剤(D)を含むことで、感光性組成物を紫外線照射により硬化させ、フォトリソグラフィー法により光学フィルタを形成することができる。
[Photopolymerization Initiator (D)]
The photosensitive composition of the present invention contains a photopolymerization initiator (D). By containing the photopolymerization initiator (D), the photosensitive composition can be cured by ultraviolet irradiation, and an optical filter can be formed by a photolithography method.
光重合開始剤(D)は、例えば、4-フェノキシジクロロアセトフェノーン、4-t-ブチル-ジクロロアセトフェノーン、ジエトキシアセトフェノーン、1-(4-イソプロピルフェニル)-2-ヒドロキシ-2-メチルプロパン-1-オン、1-ヒドロキシシクロヘキシルフェニルケトン、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノプロパン-1-オン、2-(ジメチルアミノ)-1-[4-(4-モルホリノ)フェニル]-2-(フェニルメチル)-1-ブタノーン、又は2-(ジメチルアミノ)-2-[(4-メチルフェニル)メチル]-1-[4-(4-モルホリニル)フェニル]-1-ブタノーン等のアセトフェノーン系化合物;
ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、又はベンジルジメチルケタ-ル等のベンゾイン系化合物;
ベンゾフェノーン、ベンゾイル安息香酸、ベンゾイル安息香酸メチル、4-フェニルベンゾフェノーン、ヒドロキシベンゾフェノーン、アクリル化ベンゾフェノーン、4-ベンゾイル-4’-メチルジフェニルサルファイド、又は3,3’,4,4’-テトラ(t-ブチルパーオキシカルボニル)ベンゾフェノーン等のベンゾフェノーン系化合物;
チオキサントン、2-クロルチオキサントン、2-メチルチオキサントン、イソプロピルチオキサントン、2,4-ジイソプロピルチオキサントン、又は2,4-ジエチルチオキサントン等のチオキサントン系化合物;
2,4,6-トリクロロ-s-トリアジン、2-フェニル-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(p-メトキシフェニル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(p-トリル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-ピペロニル-4,6-ビス(トリクロロメチル)-s-トリアジン、2,4-ビス(トリクロロメチル)-6-スチリル-s-トリアジン、2-(ナフト-1-イル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(4-メトキシ-ナフト-1-イル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2,4-トリクロロメチル-(ピペロニル)-6-トリアジン、又は2,4-トリクロロメチル-(4’-メトキシスチリル)-6-トリアジン等のトリアジン系化合物;
1,2-オクタンジオン,1-〔4-(フェニルチオ)フェニル-,2-(O-ベンゾイルオキシム)〕、又はエタノーン,1-〔9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール3-イル〕-,1-(O-アセチルオキシム)等のオキシムエステル系化合物;
ビス(2,4,6-トリメチルベンゾイル)フェニルホスフィンオキサイド、又はジフェニル-2,4,6-トリメチルベンゾイルホスフィンオキサイド等のホスフィン系化合物;
9,10-フェナンスレンキノーン、カンファ-キノーン、エチルアントラキノーン等のキノーン系化合物;ボレート系化合物;カルバゾール系化合物;イミダゾール系化合物;あるいは、チタノセン系化合物等が挙げられる。
The photopolymerization initiator (D) is, for example, 4-phenoxydichloroacetophenone, 4-t-butyl-dichloroacetophenone, diethoxyacetophenone, 1- (4-isopropylphenyl) -2-hydroxy-2. -Methylpropane-1-one, 1-hydroxycyclohexylphenylketone, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropane-1-one, 2- (dimethylamino) -1-[ 4- (4-Molholino) phenyl] -2- (phenylmethyl) -1-butanone, or 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) ) Phenyl] -1-butanone and other acetophenone compounds;
Benzoin compounds such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, or benzyl dimethyl ketal;
Benzophenone, benzoylbenzoic acid, methyl benzoylbenzoate, 4-phenylbenzophenone, hydroxybenzophenone, acrylicized benzophenone, 4-benzoyl-4'-methyldiphenylsulfide, or 3,3', 4, Benzophenone compounds such as 4'-tetra (t-butylperoxycarbonyl) benzophenone;
Thioxanthone compounds such as thioxanthone, 2-chlorthioxanthone, 2-methylthioxanthone, isopropylthioxanthone, 2,4-diisopropylthioxanthone, or 2,4-diethylthioxanthone;
2,4,6-Trichloro-s-triazine, 2-phenyl-4,6-bis (trichloromethyl) -s-triazine, 2- (p-methoxyphenyl) -4,6-bis (trichloromethyl) -s -Triazine, 2- (p-tolyl) -4,6-bis (trichloromethyl) -s-triazine, 2-piperonyl-4,6-bis (trichloromethyl) -s-triazine, 2,4-bis (trichloromethyl) Methyl) -6-styryl-s-triazine, 2- (naphtho-1-yl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxy-naphtho-1-yl) -4 , 6-Bis (trichloromethyl) -s-triazine, 2,4-trichloromethyl- (piperonyl) -6-triazine, or 2,4-trichloromethyl- (4'-methoxystyryl) -6-triazine. System compounds;
1,2-octanedione, 1- [4- (phenylthio) phenyl-, 2- (O-benzoyloxime)], or ester, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazole 3-Il]-, 1- (O-acetyloxime) and other oxime ester compounds;
Phosphine compounds such as bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide or diphenyl-2,4,6-trimethylbenzoylphosphine oxide;
Examples thereof include quinone compounds such as 9,10-phenanslenquinone, camphor-quinone, and ethylanthraquinone; borate compounds; carbazole compounds; imidazole compounds; and titanosen compounds.
市販品では、アセトフェノーン系化合物として、IGM Resins社製で「Omnirad 907」(2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノプロパン-1-オン)、「Omnirad 369E」(2-(ジメチルアミノ)-1-[4-(4-モルホリノ)フェニル]-2-(フェニルメチル)-1-ブタノーン)、「Omnirad 379EG」(2-(ジメチルアミノ)-2-[(4-メチルフェニル)メチル]-1-[4-(4-モルホリニル)フェニル]-1-ブタノーン)、ホスフィン系化合物として、IGM Resins社製で「Omnirad 819」(ビス(2,4,6-トリメチルベンゾイル)-フェニルホスフィンオキサイド)、「Omnirad TPO」(ジフェニル-2,4,6-トリメチルベンゾイルホスフィンオキサイド)、オキシム系化合物として、1,2-オクタンジオン,1-[4-(フェニルチオ)フェニル-,2-(O-ベンゾイルオキシム)](IRGACURE OXE-01)、エタノーン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール3-イル]-,1-(O-アセチルオキシム)(IRGACURE OXE 02)、IRGACURE OXE 04(いずれもBASF社製)、N-1919、NCI-730、NCI-831、NCI-930(いずれもADEKA社製)、TRONLY TR-PBG-304、TRONLY TR-PBG-305、TRONLY TR-PBG-309、TRONLY TR-PBG-3054(いずれも常州強力新材料社製)等が挙げられる。また、特開2007-210991号公報、特開2009-179619号公報、特開2010-037223号公報、特開2010-215575号公報、特開2011-020998号公報等に記載のオキシムエステル系光重合開始剤も挙げられる。 Commercially available products include "Omnirad 907" (2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropane-1-one) and "Omnirad 369E" manufactured by IGM Resins as acetphenone compounds. (2- (Dimethylamino) -1- [4- (4-morpholino) phenyl] -2- (phenylmethyl) -1-butanone), "Omnirad 379EG" (2- (dimethylamino) -2-[((dimethylamino) -2-[() 4-Methylphenyl) Methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone), as a phosphine compound, manufactured by IGM Resins, "Omnirad 819" (bis (2,4,6-trimethyl) Benzoyl) -phenylphosphinoxide), "Omnirad TPO" (diphenyl-2,4,6-trimethylbenzoylphosphinoxide), 1,2-octanedione, 1- [4- (phenylthio) phenyl-, as an oxime compound, 2- (O-benzoyloxime)] (IRGACURE OXE-01), Ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazole 3-yl]-, 1- (O-acetyloxime) ) (IRGACURE OXE 02), IRGACURE OXE 04 (all manufactured by BASF), N-1919, NCI-730, NCI-831, NCI-930 (all manufactured by ADEKA), TRONLY TR-PBG-304, TRONLY TR -PBG-305, TRONLY TR-PBG-309, TRONLY TR-PBG-3054 (all manufactured by Joshu Strong New Materials Co., Ltd.) and the like can be mentioned. Further, the oxime ester-based photopolymerization described in JP-A-2007-210991, JP-A-2009-179619, JP-A-2010-037223, JP-A-2010-215575, JP-A-2011-02998, etc. Initiators can also be mentioned.
光重合開始剤(D)は、単独または2種類以上を併用して使用できる。 The photopolymerization initiator (D) can be used alone or in combination of two or more.
光重合開始剤(D)の含有量は、顔料(A)100質量部に対して、光硬化性、現像性の観点から、2~50質量部が好ましく、2~30質量部がより好ましい。 The content of the photopolymerization initiator (D) is preferably 2 to 50 parts by mass, more preferably 2 to 30 parts by mass, with respect to 100 parts by mass of the pigment (A) from the viewpoint of photocurability and developability.
[近赤外線吸収剤(G)]
本発明の感光性組成物は、近赤外線吸収剤(G)を含有できる。これにより身体組織に対して、透過性が高い近赤外光を遮断できるため指紋認証の精度が向上する。近赤外線吸収剤(G)は、波長750~1200nmの光を吸収する化合物である。
[Near infrared absorber (G)]
The photosensitive composition of the present invention can contain a near-infrared absorber (G). As a result, near-infrared light having high transparency can be blocked from the body tissue, so that the accuracy of fingerprint authentication is improved. The near-infrared absorber (G) is a compound that absorbs light having a wavelength of 750 to 1200 nm.
ここから
近赤外線吸収剤(G)は、例えば、シアニン化合物、フタロシアニン化合物、ナフタロシアニン化合物、インモニウム化合物、ピロロピロ-ル化合物、スクアリリウム化合物、クロコニウム化合物等が挙げられる。これらの中でも、シアニン化合物、ピロロピロ-ル化合物、スクアリリウム化合物が好ましい。
From this, examples of the near-infrared absorber (G) include a cyanine compound, a phthalocyanine compound, a naphthalocyanine compound, an immonium compound, a pyrolopyrrole compound, a squarylium compound, and a croconium compound. Among these, a cyanine compound, a pyrolopyrrole compound, and a squarylium compound are preferable.
近赤外線吸収剤(G)の中でシアニン化合物は、国際公開第WO2006/006573号、国際公開第WO2010/073857号、特開2013-241598号公報、特開2016-113501号公報、特開2016-113504号公報;フタロシアニン化合物は、特開平4-23868号公報、特開平06-192584号公報、特開2000-63691号公報、国際公開第WO2014/208514号;ナフタロシアニン化合物は、特開平11-152414号公報、特開2000-86919号公報、特開2009-29955号公報、国際公開第WO2018/186490号;インモニウム化合物は、特開2005-336150号公報、特開2007-197492号公報、特開2008-88426号公報;ピロロピロ-ル化合物は、特開2009-263614号公報、特開2010-90313号公報、特開2011-068731号公報;スクアリリウム化合物は、特開2011-132361号公報、特開2016-142891号公報、国際公開第WO2017/135359号、国際公開第WO2018/225837号、特開2019-001987号公報、国際公開第WO2020/054718号;クロコニウム化合物は、国際公開第WO2019/021767号などに記載の化合物が挙げられる。 Among the near-infrared absorbers (G), the cyanine compounds are International Publication No. WO2006 / 006573, International Publication No. WO2010 / 073857, JP2013-241598A, JP-A-2016-11351, JP-A-2016-. 113504; The phthalocyanine compound is JP-A-4-23868, JP-A-06-192584, JP-A-2000-63691, International Publication No. WO2014 / 208514; The naphthalocyanine compound is JP-A-11-152414. No., JP-A-2000-86919, JP-A-2009-29955, International Publication No. WO2018 / 186490; For immonium compounds, JP-A-2005-336150, JP-A-2007-197492, JP-A. 2008-88426; Pyrrolopyrrol compounds are JP-A-2009-263614, JP-A-2010-90313, JP-A-2011-066731; for squarylium compounds, JP-A-2011-132361, JP-A. 2016-142891, International Publication No. WO2017 / 135359, International Publication No. WO2018 / 2258337, Japanese Patent Laid-Open No. 2019-001987, International Publication No. WO2020 / 054718; Croconium compounds, International Publication No. WO2019 / 021767, etc. The compounds described in the above are mentioned.
近赤外線吸収剤(G)は、単独または2種類以上を併用して使用できる。 The near-infrared absorber (G) can be used alone or in combination of two or more.
[増感剤(H)]
本発明の感光性組成物は、増感剤(H)を含有できる。
増感剤(H)は、例えば、カルコン誘導体、ジベンザルアセトン等に代表される不飽和ケトン類、ベンジルやカンファ-キノーン等に代表される1,2-ジケトン誘導体、ベンゾイン誘導体、フルオレン誘導体、ナフトキノーン誘導体、アントラキノーン誘導体、キサンテン誘導体、チオキサンテン誘導体、キサントン誘導体、チオキサントン誘導体、クマリン誘導体、ケトクマリン誘導体、シアニン誘導体、メロシアニン誘導体、オキソノール誘導体等のポリメチン色素、アクリジン誘導体、アジン誘導体、チアジン誘導体、オキサジン誘導体、インドリン誘導体、アズレン誘導体、アズレニウム誘導体、スクアリリウム誘導体、ポルフィリン誘導体、テトラフェニルポルフィリン誘導体、トリアリ-ルメタン誘導体、テトラベンゾポルフィリン誘導体、テトラピラジノポルフィラジン誘導体、フタロシアニン誘導体、テトラアザポルフィラジン誘導体、テトラキノキサリロポルフィラジン誘導体、ナフタロシアニン誘導体、サブフタロシアニン誘導体、ピリリウム誘導体、チオピリリウム誘導体、テトラフィリン誘導体、アヌレン誘導体、スピロピラン誘導体、スピロオキサジン誘導体、チオスピロピラン誘導体、金属アレ-ン錯体、有機ルテニウム錯体、又はミヒラ-ケトン誘導体、α-アシロキシエステル、アシルオキサイド、メチルフェニルグリオキシレート、ベンジル、9,10-フェナンスレンキノーン、カンファ-キノーン、エチルアンスラキノーン、4,4’-ジエチルイソフタロフェノーン、3,3’又は4,4’-テトラ(t-ブチルパーオキシカルボニル)ベンゾフェノーン、4,4’-ビス(ジエチルアミノ)ベンゾフェノーン等が挙げられる。
[Sensitizer (H)]
The photosensitive composition of the present invention can contain a sensitizer (H).
The sensitizer (H) includes, for example, chalcone derivatives, unsaturated ketones typified by dibenzalacetone, 1,2-diketone derivatives typified by benzyl and camphorquinone, benzoin derivatives, fluorene derivatives, and the like. Polymethine dyes such as naphthoquinone derivatives, anthraquinone derivatives, xanthene derivatives, thioxanthene derivatives, xanthone derivatives, thioxanthone derivatives, coumarin derivatives, ketocoumarin derivatives, cyanine derivatives, merocyanine derivatives, oxonol derivatives, acridin derivatives, azine derivatives, thiazine derivatives, oxadins. Derivatives, indolin derivatives, azulene derivatives, azurenium derivatives, squarylium derivatives, porphyrin derivatives, tetraphenylporphyrin derivatives, triallylmethane derivatives, tetrabenzoporphyrin derivatives, tetrapyrazinoporphyrazine derivatives, phthalocyanine derivatives, tetraazaporphyrazine derivatives, tetraquino Xalilloporphyrazine derivative, naphthalocyanine derivative, subphthalocyanine derivative, pyrylium derivative, thiopyrilium derivative, tetraphyllin derivative, anurene derivative, spiropyran derivative, spiroxazine derivative, thiospiropyrane derivative, metal allene complex, organic ruthenium complex, or Mihira -Ketone derivatives, α-acyloxyesters, acyloxides, methylphenylglycilate, benzyls, 9,10-phenanthrenquinones, kanfa-quinones, ethyl anthracinones, 4,4'-diethylisophthalofenone, Examples thereof include 3,3'or 4,4'-tetra (t-butylperoxycarbonyl) benzophenone, and 4,4'-bis (diethylamino) benzophenone.
増感剤(H)の中で、チオキサントン誘導体、ミヒラ-ケトン誘導体、カルバゾール誘導体が好ましい。具体的な化合物は、2,4-ジエチルチオキサントン、2-クロロチオキサントン、2,4-ジクロロチオキサントン、2-イソプロピルチオキサントン、4-イソプロピルチオキサントン、1-クロロ-4-プロポキシチオキサントン、4,4’-ビス(ジメチルアミノ)ベンゾフェノーン、4,4’-ビス(ジエチルアミノ)ベンゾフェノーン、4,4’-ビス(エチルメチルアミノ)ベンゾフェノーン、N-エチルカルバゾール、3-ベンゾイル-N-エチルカルバゾール、3,6-ジベンゾイル-N-エチルカルバゾール等が好ましい。 Among the sensitizers (H), thioxanthone derivatives, Mihira-ketone derivatives, and carbazole derivatives are preferable. Specific compounds include 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-dichlorothioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, 1-chloro-4-propoxythioxanthone, 4,4'-bis. (Dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone, 4,4'-bis (ethylmethylamino) benzophenone, N-ethylcarbazole, 3-benzoyl-N-ethylcarbazole, 3,6-Dibenzoyl-N-ethylcarbazole and the like are preferable.
増感剤(H)は、単独または2種類以上を併用して使用できる。 The sensitizer (H) can be used alone or in combination of two or more.
増感剤(H)の含有量は、光重合開始剤(D)100質量部に対し、3~60質量部が好ましく、5~50質量部がより好ましい。適量含有すると光硬化性、現像性が向上する。 The content of the sensitizer (H) is preferably 3 to 60 parts by mass, more preferably 5 to 50 parts by mass with respect to 100 parts by mass of the photopolymerization initiator (D). When an appropriate amount is contained, photocurability and developability are improved.
[熱硬化性化合物(I)]
本発明の感光性組成物は、熱硬化性化合物(I)を含有できる。これにより被膜形成後の加熱工程で熱硬化性化合物(I)反応し架橋密度が高まるため耐熱性が向上する。
[Thermosetting compound (I)]
The photosensitive composition of the present invention can contain a thermosetting compound (I). As a result, the thermosetting compound (I) reacts in the heating step after the film is formed, and the crosslink density is increased, so that the heat resistance is improved.
熱硬化性化合物(I)は、低分子化合物や、樹脂のような高分子量化合物でもよい。熱硬化性化合物(I)は、例えば、エポキシ化合物、オキセタン化合物、ベンゾグアナミン化合物、ロジン変性マレイン酸化合物、ロジン変性フマル酸化合物、メラミン化合物、尿素化合物、およびフェノール化合物が挙げられる。これらの中でもエポキシ化合物およびオキセタン化合物が好ましい。 The thermosetting compound (I) may be a low molecular weight compound or a high molecular weight compound such as a resin. Examples of the thermosetting compound (I) include an epoxy compound, an oxetane compound, a benzoguanamine compound, a rosin-modified maleic acid compound, a rosin-modified fumaric acid compound, a melamine compound, a urea compound, and a phenol compound. Among these, epoxy compounds and oxetane compounds are preferable.
(エポキシ化合物(I-1))
エポキシ化合物は、例えば、ビスフェノール類(ビスフェノールA、ビスフェノールF、ビスフェノールS、ビフェノール、ビスフェノールAD等)、フェノール類(フェノール、アルキル置換フェノール、芳香族置換フェノール、ナフトール、アルキル置換ナフトール、ジヒドロキシベンゼン、アルキル置換ジヒドロキシベンゼン、ジヒドロキシナフタレン等)と各種アルデヒド(ホルムアルデヒド、アセトアルデヒド、アルキルアルデヒド、ベンズアルデヒド、アルキル置換ベンズアルデヒド、ヒドロキシベンズアルデヒド、ナフトアルデヒド、グルタルアルデヒド、フタルアルデヒド、クロトンアルデヒド、シンナムアルデヒド等)との重縮合物、フェノール類と各種ジエン化合物(ジシクロペンタジエン、テルペン類、ビニルシクロヘキセン、ノールボルナジエン、ビニルノールボルネン、テトラヒドロインデン、ジビニルベンゼン、ジビニルビフェニル、ジイソプロペニルビフェニル、ブタジエン、イソプレン等)との重合物、フェノール類とケトン類(アセトン、メチルエチルケトン、メチルイソブチルケトン、アセトフェノーン、ベンゾフェノーン等)との重縮合物、フェノール類と芳香族ジメタノール類(ベンゼンジメタノール、α,α,α’,α’-ベンゼンジメタノール、ビフェニルジメタノール、α,α,α’,α’-ビフェニルジメタノール等)との重縮合物、フェノール類と芳香族ジクロロメチル類(α,α’-ジクロロキシレン、ビスクロロメチルビフェニル等)との重縮合物、ビスフェノール類と各種アルデヒドの重縮合物、アルコール類等をグリシジル化したグリシジルエーテル系エポキシ樹脂、脂環式エポキシ樹脂、複素環式エポキシ樹脂、脂肪族エポキシ樹脂、グリシジルアミン系エポキシ樹脂、グリシジルエステル系エポキシ樹脂等が挙げられる。
(Epoxy compound (I-1))
Examples of the epoxy compound include bisphenols (bisphenol A, bisphenol F, bisphenol S, biphenol, bisphenol AD, etc.) and phenols (phenol, alkyl-substituted phenol, aromatic-substituted phenol, naphthol, alkyl-substituted naphthol, dihydroxybenzene, alkyl-substituted). Dihydroxybenzene, dihydroxynaphthalene, etc.) and various aldehydes (formaldehyde, acetaldehyde, alkylaldehyde, benzaldehyde, alkyl-substituted benzaldehyde, hydroxybenzaldehyde, naphthoaldehyde, glutaaldehyde, phthalaldehyde, crotonaldehyde, cinnamaldehyde, etc.) Phenols and polymers of various diene compounds (dicyclopentadiene, terpenes, vinylcyclohexene, noorbornadiene, vinylnolbornene, tetrahydroinden, divinylbenzene, divinylbiphenyl, diisopropenylbiphenyl, butadiene, isoprene, etc.) Polycondensates of s and ketones (acetones, methyl ethyl ketones, methylisobutylketones, acetophenones, benzophenones, etc.), phenols and aromatic dimethanols (benzenedimethanol, α, α, α', α' -Polycondensate with benzenedimethanol, biphenyldimethanol, α, α, α', α'-biphenyldimethanol, etc.), phenols and aromatic dichloromethyls (α, α'-dichloroxylene, bischloromethyl, etc.) Polycondensate with biphenyl, etc.), polycondensate of bisphenols and various aldehydes, glycidyl ether-based epoxy resin obtained by glycidylizing alcohols, alicyclic epoxy resin, heterocyclic epoxy resin, aliphatic epoxy resin, glycidyl Examples thereof include an amine-based epoxy resin and a glycidyl ester-based epoxy resin.
市販品は、例えば、エピコート807,815,825,827,828,190P,191P(以上は商品名;油化シェルエポキシ社製)、エピコート1004,1256(以上は商品名;ジャパンエポキシレジン社製)、TECHMORE VG3101L(商品名;三井化学社製)、EPPN-501H、502H(商品名;日本化薬社製)、JER 1032H60(商品名;ジャパンエポキシレジン社製)、JER 157S65,157S70(商品名;ジャパンエポキシレジン社製)、EPPN-201(商品名;日本化薬社製)、JER152,154(以上は商品名;ジャパンエポキシレジン社製)、EOCN-102S,103S,104S,1020(以上は商品名;日本化薬社製)、セロキサイド2021、EHPE-3150(以上商品名;ダイセル化学工業社製)、デナコールEX-211,212,252,313,314,321,411,421,512,521,611,612,614,614B,622,711,721(以上は商品名;ナガセケムテックス社製)、TEPIC-L,H,S(日産化学工業社製)等が挙げられる。 Commercially available products include, for example, Epicoat 807,815,825,827,828,190P, 191P (trade name; manufactured by Yuka Shell Epoxy), Epicoat 1004, 1256 (trade name; manufactured by Japan Epoxy Resin). , TECHMORE VG3101L (trade name; manufactured by Mitsui Chemicals, Inc.), EPPN-501H, 502H (trade name; manufactured by Nippon Kayaku Co., Ltd.), JER 1032H60 (trade name; manufactured by Japan Epoxy Resin), JER 157S65, 157S70 (trade name; Japan Epoxy Resin Co., Ltd.), EPPN-201 (trade name; manufactured by Nippon Kayaku Co., Ltd.), JER152, 154 (the above are product names; manufactured by Japan Epoxy Resin Co., Ltd.), EOCN-102S, 103S, 104S, 1020 (the above are products). Name; manufactured by Nippon Kayaku Co., Ltd.), Serokiside 2021, EHPE-3150 (trade name; manufactured by Daicel Chemical Industry Co., Ltd.), Denacol EX-21,212,252,313,314,321,411,421,512,5211 611, 612, 614, 614B, 622, 711,721 (the above are trade names; manufactured by Nagase ChemteX Corporation), TEPIC-L, H, S (manufactured by Nissan Chemical Industry Co., Ltd.) and the like can be mentioned.
エポキシ化合物(I-1)の含有量は、被膜の耐熱性の観点から、顔料(A)100質量部に対して、0.5~300質量部が好ましく、1.0~50質量部がより好ましい。 The content of the epoxy compound (I-1) is preferably 0.5 to 300 parts by mass, more preferably 1.0 to 50 parts by mass with respect to 100 parts by mass of the pigment (A) from the viewpoint of heat resistance of the coating film. preferable.
(オキセタン化合物(I-2))
オキセタン化合物(I-2)は、オキセタン基を有する公知の化合物である。オキセタン化合物は、1官能オキセタン化合物、2官能オキセタン化合物、3官能以上のオキセタン化合物が挙げられる。
(Oxetane compound (I-2))
The oxetane compound (I-2) is a known compound having an oxetane group. Examples of the oxetane compound include a monofunctional oxetane compound, a bifunctional oxetane compound, and a trifunctional or higher functional oxetane compound.
1官能オキセタン化合物は、例えば、(3-エチルオキセタン-3-イル)メチルアクリレート、 (3-エチルオキセタン-3-イル)メチルメタクリレート、3-エチル-3-ヒドロキシメチルオキセタン、3-エチル-3-(2-エチルヘキシロキシメチル)オキセタン、3-エチル-3-(フェノキシメチル)オキセタン、3-エチル-3-(2-メタクリロキシメチル)オキセタン、3-エチル-3-{[3-(トリエトキシシリル)プロポキシ]メチル}オキセタン等が挙げられる。
具体例としては、大阪有機化学工業社製OXE-10,30、東亞合成社製OXT-101,212等が挙げられる。
The monofunctional oxetane compound is, for example, (3-ethyloxetane-3-yl) methyl acrylate, (3-ethyloxetane-3-yl) methylmethacrylate, 3-ethyl-3-hydroxymethyloxetane, 3-ethyl-3-. (2-Ethylhexyloxymethyl) oxetane, 3-ethyl-3- (phenoxymethyl) oxetane, 3-ethyl-3- (2-methacryloxymethyl) oxetane, 3-ethyl-3-{[3- (triethoxy) Cyril) propoxy] methyl} oxetane and the like.
Specific examples include OXE-10,30 manufactured by Osaka Organic Chemical Industry Co., Ltd., OXT-101,212 manufactured by Toagosei Co., Ltd., and the like.
2官能オキセタン化合物は、例えば、4,4’-ビス[(3-エチル-3-オキセタニル)メトキシメチル]ビフェニル)、1,4-ビス[(3-エチル-3-オキセタニル)メトキシメチル]ベンゼン、1,4-ビス{[(3-エチル-3-オキセタニル)メトキシ]メチル}ベンゼン、ジ[1-エチル(3-オキセタニル)]メチルエーテル、ジ[1-エチル(3-オキセタニル)]メチルエーテル3-エチル-3-ヒドロキシメチルオキセタン、3-エチル-3-(2-エチルヘキシロキシメチル)オキセタン、3-エチル-3-(2-フェノキシメチル)オキセタン、3,7-ビス(3-オキセタニル)-5-オキサ-ノナン、1,2-ビス[(3-エチル-3-オキセタニルメトキシ)メチル]エタン、1,3-ビス[(3-エチル-3-オキセタニルメトキシ)メチル]プロパン、エチレングリコ-スビス(3-エチル-3-オキセタニルメチル)エーテル、ジシクロペンテニルビス(3-エチル-3-オキセタニルメチル)エーテル、トリエチレングリコールビス(3-エチル-3-オキセタニルメチル)エーテル、テトラエチレングリコールビス(3-エチル-3-オキセタニルメチル)エーテル、1,4-ビス(3-エチル-3-オキセタニルメトキシ)ブタン、1,6-ビス(3-エチル-3-オキセタニルメトキシ)ヘキサン、ポリエチレングリコールビス(3-エチル-3-オキセタニルメチル)エーテル、エチレンオキシド(EO)変性ビスフェノールAビス(3-エチル-3-オキセタニルメチル)エーテル、プロピレンオキシド(PO)変性ビスフェノールAビス(3-エチル-3-オキセタニルメチル)エーテル、EO変性水添ビスフェノールAビス(3-エチル-3-オキセタニルメチル)エーテル、PO変性水添ビスフェノールAビス(3-エチル-3-オキセタニルメチル)エーテル、EO変性ビスフェノールF(3-エチル-3-オキセタニルメチル)エーテル等が挙げられる。
具体例としては、宇部興産社製、OXBP、OXTP、東亞合成社製OXT-121,221等が挙げられる。
Bifunctional oxetane compounds include, for example, 4,4'-bis [(3-ethyl-3-oxetanyl) methoxymethyl] biphenyl), 1,4-bis [(3-ethyl-3-oxetanyl) methoxymethyl] benzene, 1,4-Bis {[(3-ethyl-3-oxetanyl) methoxy] methyl} benzene, di [1-ethyl (3-oxetanyl)] methyl ether, di [1-ethyl (3-oxetanyl)] methyl ether 3 -Ethyl-3-hydroxymethyloxetane, 3-ethyl-3- (2-ethylhexyloxymethyl) oxetane, 3-ethyl-3- (2-phenoxymethyl) oxetane, 3,7-bis (3-oxetanyl)- 5-oxa-nonane, 1,2-bis [(3-ethyl-3-oxetanylmethoxy) methyl] ethane, 1,3-bis [(3-ethyl-3-oxetanylmethoxy) methyl] propane, ethylene glyco-subis (3-Ethyl-3-oxetanylmethyl) ether, dicyclopentenylbis (3-ethyl-3-oxetanylmethyl) ether, triethylene glycol bis (3-ethyl-3-oxetanylmethyl) ether, tetraethyleneglycolbis (3) -Ethyl-3-oxetanylmethyl) ether, 1,4-bis (3-ethyl-3-oxetanylmethoxy) butane, 1,6-bis (3-ethyl-3-oxetanylmethoxy) hexane, polyethylene glycol bis (3-) Ethyl-3-oxetanylmethyl) ether, ethylene oxide (EO) modified bisphenol A bis (3-ethyl-3-oxetanylmethyl) ether, propylene oxide (PO) modified bisphenol A bis (3-ethyl-3-oxetanylmethyl) ether, EO-modified hydrogenated bisphenol A bis (3-ethyl-3-oxetanylmethyl) ether, PO-modified hydrogenated bisphenol A-bis (3-ethyl-3-oxetanylmethyl) ether, EO-modified bisphenol F (3-ethyl-3-oxetanyl) Methyl) ether and the like can be mentioned.
Specific examples include OXBP, OXTP manufactured by Ube Industries, Ltd., OXT-121,221 manufactured by Toagosei Co., Ltd., and the like.
3官能以上のオキセタン化合物は、例えば、ペンタエリスリトールトリス(3-エチル-3-オキセタニルメチル)エーテル、ペンタエリスリトールテトラキス(3-エチル-3-オキセタニルメチル)エーテル、ジペンタエリスリトールヘキサ(3-エチル-3-オキセタニルメチル)エーテル、ジペンタエリスリトールペンタキス(3-エチル-3-オキセタニルメチル)エーテル、ジペンタエリスリトールテトラキス(3-エチル-3-オキセタニルメチル)エーテル、カプロラクトン変性ジペンタエリスリトールヘキサ(3-エチル-3-オキセタニルメチル)エーテル、カプロラクトン変性ジペンタエリスリトールペンタキス(3-エチル-3-オキセタニルメチル)エーテル、ジトリメチロ-ルプロパンテトラキス(3-エチル-3-オキセタニルメチル)エーテル、オキセタン基を含有する樹脂(例えば、特許第3783462号記載のオキセタン変性フェノールノボラック樹脂等)や前述のOXE-30のような(メタ)アクリルモノマーをラジカル重合させて得られる重合体が挙げられる。 Examples of the trifunctional or higher functional oxetane compound include pentaerythritol tris (3-ethyl-3-oxetanylmethyl) ether, pentaerythritol tetrakis (3-ethyl-3-oxetanylmethyl) ether, and dipentaerythritol hexa (3-ethyl-3). -Oxetanylmethyl) ether, dipentaerythritol pentax (3-ethyl-3-oxetanylmethyl) ether, dipentaerythritol tetrakis (3-ethyl-3-oxetanylmethyl) ether, caprolactone-modified dipentaerythritol hexa (3-ethyl-) 3-Oxetanylmethyl) ether, caprolactone-modified dipentaerythritol pentaxe (3-ethyl-3-oxetanylmethyl) ether, ditrimethylolpropanetetrakis (3-ethyl-3-oxetanylmethyl) ether, resin containing oxetane group (3-ethyl-3-oxetanylmethyl) ether For example, a polymer obtained by radically polymerizing a (meth) acrylic monomer such as the oxetane-modified phenol novolac resin described in Patent No. 3783462 and the above-mentioned OXE-30 can be mentioned.
オキセタン化合物(I-2)の含有量は、感光性組成物の不揮発分100質量%中、0.5~50質量%が好ましく、1~40質量%がより好ましい。 The content of the oxetane compound (I-2) is preferably 0.5 to 50% by mass, more preferably 1 to 40% by mass, based on 100% by mass of the non-volatile content of the photosensitive composition.
メラミン化合物は、メラミン環構造を有する化合物である。メラミン化合物は、メチロ-ル型やエーテル型の化合物が好ましく、メラミン環1個当たりのメチロ-ル基および/またはエーテル基数が平均5.0以上のメラミン化合物がより好ましい。適度にメチロ-ル基やエーテル基数を有すると過不足ない耐熱性が得やすい。 The melamine compound is a compound having a melamine ring structure. The melamine compound is preferably a methylol-type or ether-type compound, and more preferably a melamine compound having an average number of methylol groups and / or ether groups of 5.0 or more per melamine ring. If it has an appropriate number of methylol groups and ether groups, it is easy to obtain heat resistance that is not excessive or insufficient.
市販品は、例えば、二カラックMW-30HM、MW-390、MW-100LM、MX-750LM、MW-30M、MW-30、MW-22、MS-21、MS-11、MW-24X、MS-001、MX-002、MX-730、MX-750、MX-708、MX-706、MX-042、MX-45、MX-500、MX-520、MX-43、MX-417、MX-410(三和ケミカル社製)、サイメル232,235,236,238,285,300,301,303,350,370(日本サイテックインダストリ-ズ社製)等が挙げられる。 Commercially available products include, for example, Nikarak MW-30HM, MW-390, MW-100LM, MX-750LM, MW-30M, MW-30, MW-22, MS-21, MS-11, MW-24X, MS- 001, MX-002, MX-730, MX-750, MX-708, MX-706, MX-042, MX-45, MX-500, MX-520, MX-43, MX-417, MX-410 ( Sanwa Chemical Co., Ltd.), Cymel 223, 235, 236,238, 285, 300, 301, 303, 350, 370 (manufactured by Nippon Cytec Industries Co., Ltd.) and the like.
これらの中でもメラミン環1個当たりのメチロ-ル基および/またはエーテル基数が平均5.0以上である、二カラックMW-30HM、MW-390、MW-100LM、MX-750LM、MW-30M、MW-30、MW-22、MS-21、MS-11、MW-24X、MX-45(三和ケミカル社製)サイメル232,235,236,238,300,301,303,350(日本サイテックインダストリ-ズ社製)等は、架橋密度を高められる面で好ましい。 Among these, Nikarak MW-30HM, MW-390, MW-100LM, MX-750LM, MW-30M, MW, which have an average number of methylol groups and / or ether groups of 5.0 or more per melamine ring. -30, MW-22, MS-21, MS-11, MW-24X, MX-45 (manufactured by Sanwa Chemical Co., Ltd.) Cymel 232,235,236,238,300,301,303,350 (Nippon Cytec Industry) -Z) and the like are preferable in terms of increasing the crosslink density.
熱硬化性化合物(I)は、単独または2種類以上を併用して使用できる。 The thermosetting compound (I) can be used alone or in combination of two or more.
本発明の感光性組成物は、熱硬化性化合物の硬化を補助するため、硬化剤(硬化促進剤)を併用できる。硬化剤は、例えば、アミン系化合物、酸無水物、活性エステル、カルボン酸系化合物、スルホン酸系化合物等が挙げられる。硬化剤は、例えば、アミン化合物(例えば、ジシアンジアミド、ベンジルジメチルアミン、4-(ジメチルアミノ)-N,N-ジメチルベンジルアミン、4-メトキシ-N,N-ジメチルベンジルアミン、4-メチル-N,N-ジメチルベンジルアミン等)、4級アンモニウム塩化合物(例えば、トリエチルベンジルアンモニウムクロリド等)、ブロックイソシアネート化合物(例えば、ジメチルアミン等)、イミダゾール誘導体二環式アミジン化合物及びその塩(例えば、イミダゾール、2-メチルイミダゾール、2-エチルイミダゾール、2-エチル-4-メチルイミダゾール、2-フェニルイミダゾール、4-フェニルイミダゾール、1-シアノエチル-2-フェニルイミダゾール、1-(2-シアノエチル)-2-エチル-4-メチルイミダゾール等)、リン化合物(例えば、トリフェニルホスフィン等)、S-トリアジン誘導体(例えば、2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン、2-ビニル-2,4-ジアミノ-S-トリアジン、2-ビニル-4,6-ジアミノ-S-トリアジン・イソシアヌル酸付加物、2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン・イソシアヌル酸付加物等)等が挙げられる。 In the photosensitive composition of the present invention, a curing agent (curing accelerator) can be used in combination to assist the curing of the thermosetting compound. Examples of the curing agent include amine compounds, acid anhydrides, active esters, carboxylic acid compounds, sulfonic acid compounds and the like. The curing agent is, for example, an amine compound (for example, dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4-methyl-N, N-dimethylbenzylamine, etc.), quaternary ammonium salt compounds (eg, triethylbenzylammonium chloride, etc.), blocked isocyanate compounds (eg, dimethylamine, etc.), imidazole derivative bicyclic amidin compounds and salts thereof (eg, imidazole, 2). -Methyl imidazole, 2-ethyl imidazole, 2-ethyl-4-methyl imidazole, 2-phenyl imidazole, 4-phenyl imidazole, 1-cyanoethyl-2-phenyl imidazole, 1- (2-cyanoethyl) -2-ethyl-4 -Methylimidazole, etc.), phosphorus compounds (eg, triphenylphosphine, etc.), S-triazine derivatives (eg, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-2,4-diamino- Examples thereof include S-triazine, 2-vinyl-4,6-diamino-S-triazine / isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-triazine / isocyanuric acid adduct, etc.).
硬化剤は、単独または2種類以上を併用して使用できる。 The curing agent can be used alone or in combination of two or more.
硬化剤の含有量は、熱硬化性化合物100質量部に対して、0.01~15質量部が好ましい。 The content of the curing agent is preferably 0.01 to 15 parts by mass with respect to 100 parts by mass of the thermosetting compound.
[チオール系連鎖移動剤(J)]
本発明の感光性組成物は、チオール系連鎖移動剤(J)を含有できる。チオール系連鎖移動剤(J)は、光重合開始剤(D)と併用すると光照射後のラジカル重合の際、酸素による重合阻害を受けにくいチイルラジカルが発生し、感光性組成物の光感度が向上する。
[Thiol chain transfer agent (J)]
The photosensitive composition of the present invention can contain a thiol-based chain transfer agent (J). When the thiol-based chain transfer agent (J) is used in combination with the photopolymerization initiator (D), a chile radical that is less susceptible to polymerization inhibition by oxygen is generated during radical polymerization after light irradiation, and the photosensitivity of the photosensitive composition is improved. do.
チオール系連鎖移動剤(J)は、チオール基(SH基)2以上有る多官能チオールが好ましい。なお、チオール系連鎖移動剤は、SH基を4以上有することがより好ましい。官能基数が増えると被膜の表面から最深部まで光硬化し易くなる。 The thiol-based chain transfer agent (J) is preferably a polyfunctional thiol having two or more thiol groups (SH groups). It is more preferable that the thiol-based chain transfer agent has 4 or more SH groups. As the number of functional groups increases, it becomes easier to photo-cure from the surface of the film to the deepest part.
多官能チオールは、例えば、ヘキサンジチオール、デカンジチオール、1,4-ブタンジオ-ルビスチオプロピオネート、1,4-ブタンジオ-ルビスチオグリコレート、エチレングリコールビスチオグリコレート、エチレングリコールビスチオプロピオネート、トリメチロ-ルプロパントリスチオグリコレート、トリメチロ-ルプロパントリスチオプロピオネート、トリメチロ-ルプロパントリス(3-メルカプトブチレート)、ペンタエリスリトールテトラキスチオグリコレート、ペンタエリスリトールテトラキスチオプロピオネート、トリメルカプトプロピオン酸トリス(2-ヒドロキシエチル)イソシアヌレート、1,4-ジメチルメルカプトベンゼン、2、4、6-トリメルカプト-s-トリアジン、2-(N,N-ジブチルアミノ)-4,6-ジメルカプト-s-トリアジンなどが挙げられ、好ましくは、エチレングリコールビスチオプロピオネート、トリメチロ-ルプロパントリスチオプロピオネート、ペンタエリスリトールテトラキスチオプロピオネート等が挙げられる。 Polyfunctional thiols include, for example, hexanedithiol, decandithiol, 1,4-butandio-rubistiopropionate, 1,4-butandio-rubistioglycolate, ethylene glycol bisthioglycolate, ethylene glycol bisthiopropionate. , Trimethylol Propanetristhioglycolate, Trimethylol Propanetristhiopropionate, Trimethylol Propantris (3-mercaptobutyrate), Pentaerythritol Tetrakissthioglycolate, Pentaerythritol Tetrakissthiopropionate, Trimercapto Tris (2-hydroxyethyl) propionate isocyanurate, 1,4-dimethylmercaptobenzene, 2,4,6-trimercapto-s-triazine, 2- (N, N-dibutylamino) -4,6-dimercapto- Examples thereof include s-triazine, and preferred examples include ethylene glycol bisthiopropionate, trimethylol propanthithiopropionate, pentaerythritol tetrakisthiopropionate and the like.
チオール系連鎖移動剤(J)は、単独または2種類以上を併用して使用できる。 The thiol-based chain transfer agent (J) can be used alone or in combination of two or more.
チオール系連鎖移動剤(J)の含有量は、感光性組成物の不揮発分100質量部に対して、1~10質量部が好ましく、2~8質量部がより好ましい。適量含有すると光感度が向上し、被膜表面にシワが発生し難くなる。 The content of the thiol-based chain transfer agent (J) is preferably 1 to 10 parts by mass, more preferably 2 to 8 parts by mass, based on 100 parts by mass of the non-volatile content of the photosensitive composition. When an appropriate amount is contained, the light sensitivity is improved and wrinkles are less likely to occur on the surface of the coating film.
[重合禁止剤(K)]
本発明の感光性組成物は、重合禁止剤(K)を含有できる。
[Polymerization inhibitor (K)]
The photosensitive composition of the present invention can contain a polymerization inhibitor (K).
重合禁止剤(K)は、例えば、カテコール、レゾールシノール、1,4-ヒドロキノーン、2-メチルカテコール、3-メチルカテコール、4-メチルカテコール、2-エチルカテコール、3-エチルカテコール、4-エチルカテコール、2-プロピルカテコール、3-プロピルカテコール、4-プロピルカテコール、2-n-ブチルカテコール、3-n-ブチルカテコール、4-n-ブチルカテコール、2-t-ブチルカテコール、3-t-ブチルカテコール、4-t-ブチルカテコール、3,5-ジ-t-ブチルカテコール等のアルキルカテコール系化合物、2-メチルレゾールシノール、4-メチルレゾールシノール、2-エチルレゾールシノール、4-エチルレゾールシノール、2-プロピルレゾールシノール、4-プロピルレゾールシノール、2-n-ブチルレゾールシノール、4-n-ブチルレゾールシノール、2-t-ブチルレゾールシノール、4-t-ブチルレゾールシノール等のアルキルレゾールシノール系化合物、メチルヒドロキノーン、エチルヒドロキノーン、プロピルヒドロキノーン、t-ブチルヒドロキノーン、2,5-ジ-t-ブチルヒドロキノーン等のアルキルヒドロキノーン系化合物、トリブチルホスフィン、トリオクチルホスフィン、トリシクロヘキシルホスフィン、トリフェニルホスフィン、トリベンジルホスフィン等のホスフィン化合物、トリオクチルホスフィンオキサイド、トリフェニルホスフィンオキサイドなどのホスフィンオキサイド化合物、トリフェニルホスファイト、トリスノニルフェニルホスファイト等のホスファイト化合物、ピロガロ-ル、フロログルシン等が挙げられる。 The polymerization inhibitor (K) is, for example, catechol, resorcinol, 1,4-hydroquinone, 2-methylcatechol, 3-methylcatechol, 4-methylcatechol, 2-ethylcatechol, 3-ethylcatechol, 4-ethylcatechol. , 2-propyl catechol, 3-propyl catechol, 4-propyl catechol, 2-n-butyl catechol, 3-n-butyl catechol, 4-n-butyl catechol, 2-t-butyl catechol, 3-t-butyl catechol , 4-t-butylcatechol, alkylcatechol compounds such as 3,5-di-t-butylcatechol, 2-methylresorcinol, 4-methylresorcinol, 2-ethylresorsinol, 4-ethylresorsinol, 2 -Alkylresolsinol compounds such as propylresorsinol, 4-propylresorsinol, 2-n-butylresorsinol, 4-n-butylresorsinol, 2-t-butylresorsinol, 4-t-butylresorsinol, etc. Alkylhydroquinone compounds such as methylhydroquinone, ethylhydroquinone, propylhydroquinone, t-butylhydroquinone, 2,5-di-t-butylhydroquinone, tributylphosphine, trioctylphosphine, tricyclohexylphosphine, triphenyl Examples thereof include phosphine compounds such as phosphine and tribenzylphosphine, phosphine oxide compounds such as trioctylphosphine oxide and triphenylphosphine oxide, phosphite compounds such as triphenylphosphite and trisnonylphenylphosphite, pyrogallol and fluoroglucin. ..
重合禁止剤(K)の含有量は、感光性組成物の不揮発分100質量%中、0.01~0.4質量中が好ましい。 The content of the polymerization inhibitor (K) is preferably 0.01 to 0.4% by mass in 100% by mass of the non-volatile content of the photosensitive composition.
[紫外線吸収剤(L)]
本発明の感光性組成物は、紫外線吸収剤(L)を含有できる。紫外線吸収剤(L)は、紫外線吸収機能を有する有機化合物であり、ベンゾトリアゾール系有機化合物、トリアジン系有機化合物、ベンゾフェノーン系有機化合物、サリチル酸エステル系有機化合物、シアノアクリレート系有機化合物、及びサリシレート系有機化合物等が挙げられる。
[Ultraviolet absorber (L)]
The photosensitive composition of the present invention can contain an ultraviolet absorber (L). The ultraviolet absorber (L) is an organic compound having an ultraviolet absorbing function, and is a benzotriazole-based organic compound, a triazine-based organic compound, a benzophenone-based organic compound, a salicylic acid ester-based organic compound, a cyanoacrylate-based organic compound, and salicylate. Examples include system organic compounds.
ベンゾトリアゾール系化合物は、例えば、2-(5メチル-2-ヒドロキシフェニル)ベンゾトリアゾール、2-(2-ヒドロキシ-5-t-ブチルフェニル)-2H-ベンゾトリアゾール、2-[2-ヒドロキシ-3,5-ビス(α, α-ジメチルベンジル)フェニル]-2H-ベンゾトリアゾール、2-(3-tブチル-5-メチル-2-ヒドロキシフェニル)-5-クロロベンゾトリアゾール、2-(2'-ヒドロキシ-5'-t-オクチルフェニル)ベンゾトリアゾール、5%の2-メトキシ-1-メチルエチルアセテートと95%のベンゼンプロパン酸,3-(2H-ベンゾトリアゾール2-イル)-(1,1-ジメチルエチル)-4-ヒドロキシ,C7-9側鎖及び直鎖アルキルエステルの混合物、2-(2H-ベンゾトリアゾール2-イル)-4,6-ビス(1-メチル-1-フェニルエチル)フェノール、2-(2H-ベンゾトリアゾール2-イル)-6-(1-メチル-1-フェニルエチル)-4-(1,1,3,3-テトラメチルブチル)フェノール、メチル 3-(3-(2H-ベンゾトリアゾール2-イル)-5-t-ブチル-4-ヒドロキシフェニル)プロピオネート/ポリエチレングリコール300の反応生成物、2-(2H-ベンゾトリアゾール2-イル)-4-(1,1,3,3-テトラメチルブチル)フェノール、2,2’-メチレンビス[6-(2H-ベンゾトリアゾール2-イル)-4-(1,1,3,3-テトラメチルブチル)フェノール]、2-(2H-ベンゾトリアゾール2-イル)-p-クレゾール、2-(5-クロロ-2H-ベンゾトリアゾール2-イル)-6-t-ブチル-4-メチルフェノール、2-(3,5-ジ-t-アミル-2-ヒドロキシフェニル)ベンゾトリアゾール、2-[2-ヒドロキシ-5-[2-(メタクリロイルオキシ)エチル]フェニル]-2H-ベンゾトリアゾール、オクチル-3-[3-tert-ブチル-4-ヒドロキシ-5-(5-クロロ-2H-ベンゾトリアゾール2-イル)フェニル]プロピオネート、2-エチルヘキシル-3-[3-tert-ブチル-4-ヒドロキシ-5-(5-クロロ-2H-ベンゾトリアゾール2-イル)フェニル]プロピオネートが挙げられる。 Benzotriazole compounds include, for example, 2- (5-methyl-2-hydroxyphenyl) benzotriazole, 2- (2-hydroxy-5-t-butylphenyl) -2H-benzotriazole, 2- [2-hydroxy-3. , 5-bis (α, α-dimethylbenzyl) phenyl] -2H-benzotriazole, 2- (3-t butyl-5-methyl-2-hydroxyphenyl) -5-chlorobenzotriazole, 2- (2'- Hydroxy-5'-t-octylphenyl) benzotriazole, 5% 2-methoxy-1-methylethyl acetate and 95% benzenepropanoic acid, 3- (2H-benzotriazole 2-yl)-(1,1- Dimethylethyl) -4-hydroxy, C7-9 side chain and linear alkyl ester mixture, 2- (2H-benzotriazole 2-yl) -4,6-bis (1-methyl-1-phenylethyl) phenol, 2- (2H-benzotriazole 2-yl) -6- (1-methyl-1-phenylethyl) -4- (1,1,3,3-tetramethylbutyl) phenol, methyl 3- (3- (2H) -Reaction product of -benzotriazole 2-yl) -5-t-butyl-4-hydroxyphenyl) propionate / polyethylene glycol 300, 2- (2H-benzotriazole 2-yl) -4- (1,1,3) 3-Tetramethylbutyl) Phenol, 2,2'-Methylenebis [6- (2H-benzotriazole2-yl) -4- (1,1,3,3-tetramethylbutyl) phenol], 2- (2H-) Benzotriazole 2-yl) -p-cresol, 2- (5-chloro-2H-benzotriazole 2-yl) -6-t-butyl-4-methylphenol, 2- (3,5-di-t-amyl) -2-Hydroxyphenyl) benzotriazole, 2- [2-hydroxy-5- [2- (methacryloyloxy) ethyl] phenyl] -2H-benzotriazole, octyl-3- [3-tert-butyl-4-hydroxy- 5- (5-Chloro-2H-benzotriazole2-yl) phenyl] propionate, 2-ethylhexyl-3- [3-tert-butyl-4-hydroxy-5- (5-chloro-2H-benzotriazole2-yl) ) Phenol] propionate.
市販品は、BASFジャパン社製TINUVIN P、PS、234、326、329、384-2、900、928、99-2、1130、ADEKA社製アデカスタブLA-29、LA-31RG、LA-32、LA-36、ケミプロ化成社製KEMISORB71、73、74、79、279、大塚化学社製RUVA-93等が挙げられる。 Commercially available products are BASF Japan's TINUVIN P, PS, 234, 326, 329, 384-2, 900, 928, 99-2, 1130, ADEKA's ADEKA STAB LA-29, LA-31RG, LA-32, LA. -36, KEMIROSB71, 73, 74, 79, 279 manufactured by Chemipro Kasei Co., Ltd., RUVA-93 manufactured by Otsuka Chemical Co., Ltd., and the like.
トリアジン系化合物は、例えば、2,4-ビス(2,4-ジメチルフェニル)-6-(2-ヒドロキシ-4-n-オクチルオキシフェニル)-1,3,5-トリアジン、2-[4,6-ビス(2,4-ジメチルフェニル)-1,3,5-トリアジン-2-イル]-5-[3-(ドデシルオキシ)-2-ヒドロキシプロポキシ]フェノール、2-(2,4-ジヒドロキシフェニル)-4,6-ビス(2,4-ジメチルフェニル)-1,3,5-トリアジンと(2-エチルヘキシル)-グリシド酸エステルの反応生成物、2,4-ビス「2-ヒドロキシ-4-ブトキシフェニル」-6-(2,4-ジブトキシフェニル)-1,3,5-トリアジン、2-(4,6-ジフェニル-1,3,5-トリアジン-2-イル)-5-(ヘキシルオキシ)フェノール、2-(4,6-ジフェニル-1,3,5-トリアジン-2-イル)-5-[2-(2-エチルヘキサノイルオキシ)エトキシ]フェノール、2,4,6-トリス(2-ヒドロキシ-4-ヘキシルオキシ-3-メチルフェニル)-1,3,5-トリアジン等が挙げられる。 The triazine compounds include, for example, 2,4-bis (2,4-dimethylphenyl) -6- (2-hydroxy-4-n-octyloxyphenyl) -1,3,5-triazine, 2- [4. 6-bis (2,4-dimethylphenyl) -1,3,5-triazine-2-yl] -5- [3- (dodecyloxy) -2-hydroxypropoxy] phenol, 2- (2,4-dihydroxy) Phenyl) -4,6-bis (2,4-dimethylphenyl) -1,3,5-triazine and (2-ethylhexyl) -glycidate ester reaction product, 2,4-bis "2-hydroxy-4 -Butoxyphenyl "-6- (2,4-dibutoxyphenyl) -1,3,5-triazine, 2- (4,6-diphenyl-1,3,5-triazine-2-yl) -5-( Hexyloxy) phenol, 2- (4,6-diphenyl-1,3,5-triazine-2-yl) -5- [2- (2-ethylhexanoyloxy) ethoxy] phenol, 2,4,6- Examples thereof include tris (2-hydroxy-4-hexyloxy-3-methylphenyl) -1,3,5-triazine.
市販品は、ケミプロ化成社製KEMISORB 102、BASFジャパン社製TINUVIN 400、405、460、477、479、1577ED、ADEKA社アデカスタブLA-46、LA-F70、サンケミカル社製CYASORB UV-1164等が挙げられる。 Examples of commercially available products include KEMIPROB 102 manufactured by Chemipro Kasei Co., Ltd., TINUVIN 400, 405, 460, 477, 479, 1577ED manufactured by BASF Japan, ADEKA Adecaster LA-46, LA-F70 manufactured by ADEKA, and CYASORB UV-1164 manufactured by Sun Chemical Co., Ltd. Be done.
ベンゾフェノーン系化合物は、例えば、2,4-ジ-ヒドロキシベンゾフェノーン、2-ヒドロキシ-4-メトキシベンゾフェノーン、2-ヒドロキシ-4-メトキシベンゾフェノーン5-スルホン酸-3水温、2-ヒドロキシ-4-n-オクトキシベンゾフェノーン、2,2’-ジ-ヒドロキシ-4-メトキシベンゾフェノーン、2,2’-ジヒドロキシ-4,4’-ジメトキシベンゾフェノーン、4-ドデシロキシ-2-ヒドロキシベンゾフェノーン、2-ヒドロキシ-4-オクタデシロキシベンゾフェノーン、2,2’ジヒドロキシ-4,4’-ジメトキシベンゾフェノーン、2,2’,4,4’-テトラヒドロキシベンゾフェノーン、2-ヒドロキシ-4-メトキシ-2’-カルボキシベンゾフェノーン等が挙げられる。 Examples of the benzophenone compound include 2,4-di-hydroxybenzophenone, 2-hydroxy-4-methoxybenzophenone, 2-hydroxy-4-methoxybenzophenone 5-sulfonic acid-3 water temperature, 2 -Hydroxy-4-n-octoxybenzophenone, 2,2'-di-hydroxy-4-methoxybenzophenone, 2,2'-dihydroxy-4,4'-dimethoxybenzophenone, 4-dodecyloxy- 2-Hydroxybenzophenone, 2-hydroxy-4-octadecyloxybenzophenone, 2,2'dihydroxy-4,4'-dimethoxybenzophenone, 2,2', 4,4'-tetrahydroxybenzopheno , 2-Hydroxy-4-methoxy-2'-carboxybenzophenone and the like.
市販品は、ケミプロ化成社製KEMISORB 10、11、11S、12、111、シプロ化成社製SEESORB 101、107、ADEKA社製アデカスタブ1413、サンケミカル社製UV-12等が挙げられる。 Examples of commercially available products include KEMIPROB 10, 11, 11S, 12, 111 manufactured by Chemipro Kasei Co., Ltd., SEESORB 101, 107 manufactured by Sipro Kasei Co., Ltd., ADEKA STAB 1413 manufactured by ADEKA Co., Ltd., UV-12 manufactured by Sun Chemical Co., Ltd. and the like.
サリチル酸エステル系化合物は、例えば、サリチル酸フェニル、サリチル酸p-オクチルフェニル、サリチル酸p-tertブチルフェニル等が挙げられる。 Examples of the salicylic acid ester compound include phenyl salicylate, p-octylphenyl salicylate, and p-tert-butyl phenyl salicylate.
紫外線吸収剤(L)の含有量は、光重合開始剤と紫外線吸収剤との合計100質量%中、5~70質量%が好ましい。 The content of the ultraviolet absorber (L) is preferably 5 to 70% by mass based on 100% by mass of the total of the photopolymerization initiator and the ultraviolet absorber.
[酸化防止剤(M)]
本発明の感光性組成物は、酸化防止剤(M)を含有できる。酸化防止剤(M)は、感光性組成物に含まれる光重合開始剤や熱硬化性化合物が、熱硬化やITOアニ-ル時の熱工程によって酸化による黄変を防ぎ、被膜の透過率の低下を抑制できる。特に、感光性組成物の顔料濃度が高い場合、相対的に光重合性化合物の含有量が減少するため、光重合開始剤の増量や、熱硬化性化合物の配合で対応すると被膜が黄変し易い。そのため、酸化防止剤を含むことで、加熱工程時の酸化による黄変を防止し、被膜の透過率の低下を抑制できる。
[Antioxidant (M)]
The photosensitive composition of the present invention may contain an antioxidant (M). As the antioxidant (M), the photopolymerization initiator and the thermosetting compound contained in the photosensitive composition prevent yellowing due to oxidation by the thermosetting and the thermal process at the time of ITO annealing, and the transmittance of the film is increased. The decrease can be suppressed. In particular, when the pigment concentration of the photosensitive composition is high, the content of the photopolymerizable compound decreases relatively, so if the amount of the photopolymerization initiator is increased or the thermosetting compound is added, the film will turn yellow. easy. Therefore, by including an antioxidant, it is possible to prevent yellowing due to oxidation during the heating step and suppress a decrease in the transmittance of the coating film.
酸化防止剤(M)は、例えば、ヒンダ-ドフェノール系、ヒンダ-ドアミン系、リン系、イオウ系、およびヒドロキシルアミン系の化合物が挙げられる。なお、本明細書で酸化防止剤は、ハロゲン原子を含有しない化合物が好ましい。 Examples of the antioxidant (M) include hydride-based phenol-based, hydride-based amine-based, phosphorus-based, sulfur-based, and hydroxylamine-based compounds. In the present specification, the antioxidant is preferably a compound containing no halogen atom.
これらの中でも、塗膜の透過率と感度の両立の観点から、ヒンダ-ドフェノール系酸化防止剤、ヒンダ-ドアミン系酸化防止剤、リン系酸化防止剤、イオウ系酸化防止剤が好ましい。 Among these, from the viewpoint of achieving both the transmittance and the sensitivity of the coating film, a hydride-based phenol-based antioxidant, a hydride-based amine-based antioxidant, a phosphorus-based antioxidant, and a sulfur-based antioxidant are preferable.
ヒンダ-ドフェノール系酸化防止剤は、例えば、1,3,5-トリス(3,5-ジ-t-ブチル-4-ヒドロキシベンジル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン、1,1,3-トリス-(2’-メチル-4’-ヒドロキシ-5’-t-ブチルフェニル)-ブタン、4,4’-ブチリデン-ビス-(2-t-ブチル-5-メチルフェノール)、3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオン酸ステアリル、ペンタエリスリトールテトラキス[3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート、3,9-ビス[2-[3-(3-t-ブチル-4-ヒドロキシ-5-メチルフェニル)プロピオニルオキシ]-1,1-ジメチルエチル]-2,4,8,10-テトラオキサスピロ[5.5]ウンデカン、1,3,5-トリス(3,5-ジ-t-ブチル-4-ヒドロキシフェニルメチル)-2,4,6-トリメチルベンゼン、1,3,5-トリス(3-ヒドロキシ-4-t-ブチル-2,6-ジメチルベンジル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン、2,2’-メチレンビス(6-t-ブチル-4-エチルフェノール)、2,2’-チオジエチルビス-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)-プロピオネート、N,N-ヘキサメチレンビス(3,5-ジ-t-ブチル-4-ヒドロキシ-ヒドロシンナムアミド)、i-オクチル-3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート、4,6-ビス(ドデシルチオメチル)-o-クレゾール、3,5-ジ-t-ブチル-4-ヒドロキシベンジルホスホン酸モノエチルエステルのカルシウム塩、4,6-ビス(オクチルチオメチル)-o-クレゾール、ビス[3-(3-メチル-4-ヒドロキシ-5-t-ブチルフェニル)プロピオン酸]エチレンビスオキシビスエチレン、1,6-ヘキサンジオ-ルビス[3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート、2,4-ビス-(n-オクチルチオ)-6-(4-ヒドロキシ-3,5-ジ-t-ブチルアニリノ)-1,3,5-トリアジン、2,2’-チオ-ビス-(6-t-ブチル-4-メチルフェノール)、2,5-ジ-t-アミル-ヒドロキノーン、2,6-ジ-t-ブチル-4-ノニルフェノール、2,2’-イソブチリデン-ビス-(4,6-ジメチル-フェノール)、2,2’-メチレン-ビス-(6-(1-メチル-シクロヘキシル)-p-クレゾール)、2,4-ジメチル-6-(1-メチル-シクロヘキシル)-フェノール等が挙げられる。 The hydride phenolic antioxidant is, for example, 1,3,5-tris (3,5-di-t-butyl-4-hydroxybenzyl) -1,3,5-triazine-2,4,6 ( 1H, 3H, 5H) -trion, 1,1,3-tris- (2'-methyl-4'-hydroxy-5'-t-butylphenyl) -butane, 4,4'-butylidene-bis- (2' -T-butyl-5-methylphenol), 3- (3,5-di-t-butyl-4-hydroxyphenyl) stearyl propionate, pentaerythritol tetrakis [3- (3,5-di-t-butyl-) 4-Hydroxyphenyl) propionate, 3,9-bis [2- [3- (3-t-butyl-4-hydroxy-5-methylphenyl) propionyloxy] -1,1-dimethylethyl] -2,4 8,10-Tetraoxaspiro [5.5] undecane, 1,3,5-tris (3,5-di-t-butyl-4-hydroxyphenylmethyl) -2,4,6-trimethylbenzene, 1, 3,5-Tris (3-hydroxy-4-t-butyl-2,6-dimethylbenzyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione, 2,2 '-Methylenebis (6-t-butyl-4-ethylphenol), 2,2'-thiodiethylbis- (3,5-di-t-butyl-4-hydroxyphenyl) -propionate, N, N-hexamethylene Bis (3,5-di-t-butyl-4-hydroxy-hydrocinnamamide), i-octyl-3- (3,5-di-t-butyl-4-hydroxyphenyl) propionate, 4,6- Bis (dodecylthiomethyl) -o-cresol, calcium salt of 3,5-di-t-butyl-4-hydroxybenzylphosphonic acid monoethyl ester, 4,6-bis (octylthiomethyl) -o-cresol, bis [3- (3-Methyl-4-hydroxy-5-t-butylphenyl) propionic acid] ethylenebisoxybisethylene, 1,6-hexanediolbis [3- (3,5-di-t-butyl-4) -Hydroxyphenyl) propionate, 2,4-bis- (n-octylthio) -6- (4-hydroxy-3,5-di-t-butylanilino) -1,3,5-triazine, 2,2'-thio -Bis- (6-t-butyl-4-methylphenol), 2,5-di-t-amyl-hydroquinone, 2,6-di-t-butyl-4-nonylphenol, 2,2'-isobutylidene-bis -(4) , 6-dimethyl-phenol), 2,2'-methylene-bis- (6- (1-methyl-cyclohexyl) -p-cresol), 2,4-dimethyl-6- (1-methyl-cyclohexyl) -phenol And so on.
市販品は、ADEKA社製アデカスタブAO-20、AO-30、AO-40,AO-50、AO-60、AO-80、AO-330、ケミプロ社製KEMINOX101、179、76、9425、BASFジャパン社製IRGANOX1010,1035,1076,1098,1135,1330,1726,1425WL,1520L,245,259,3114,5057,565、サンケミカル社製サイアノックスCY-1790、CY-2777等が挙げられる。 Commercially available products are ADEKA's ADEKA STUB AO-20, AO-30, AO-40, AO-50, AO-60, AO-80, AO-330, Chemipro's KEMINOX 101, 179, 76, 9425, BASF Japan. Examples thereof include IRGANOX 1010, 1035, 1076, 1098, 1135, 1330, 1726, 1425WL, 1520L, 245, 259, 3114, 5057, 565, and Sianox CY-1790 and CY-2777 manufactured by Sun Chemical.
ヒンダ-ドアミン系酸化防止剤は、例えば、テトラキス(1,2,2,6,6-ペンタメチル-4-ピペリジル)-1,2,3,4-ブタンテトラカルボキシレート、テトラキス(2,2,6,6-テトラメチル-4-ピペリジル)1,2,3,4-ブタンテトラカルボキシレート、ビス(1,2,2,6,6-ペンタメチル-4-ピペリジル)セバケート、ビス(2,2,6,6-テトラメチル-4-ピペリジル)セバケート、ビス(1-ウンデカノキシ-2,2,6,6-テトラメチルピペリジン-4-イル)カルボネート、1,2,2,6,6-ペンタメチル-4-ピペリジルメタクリレート、2,2,6,6-テトラメチル-4-ピペリジルメタクリレート、コハク酸ジメチルと1-(2-ヒドロキシエチル)-4-ヒドロキシ-2,2,6,6-テトラメチルピペリジンとの重縮合物、ポリ[[6-[(1,1,3,3-テトラメチルブチル)アミノ]-s-トリアジン-2,4-ジイル]-[(2,2,6,6-テトラメチル-4-ピペリジル)イミノ]-ヘキサメチレン-[(2,2,6,6-テトラメチル-4-ピペリジル)イミノ]]、4-ヒドロキシ-2,2,6,6-テトラメチル-1-ピペリジンエタノールと3,5,5-トリメチルヘキサン酸のエステル、N,N’-4,7-テトラキス〔4,6-ビス{N-ブチル-N-(1,2,2,6,6-ペンタメチル-4-ピペリジル)アミノ}-1,3,5-トリアジン-2-イル〕-4,7-ジアザデカン-1,10-ジアミン、デカン二酸ビス(2,2,6,6-テトラメチル-1-(オクチルオキシ)-4-ピペリジニル)エステル,1,1-ジメチルエチルヒドロペルオキシドとオクタンの反応生成物、ビス(1,2,2,6,6-ペンタメチル-4-ピリペリジル)[[3,5-ビス(1,1ジメチルエチル)-4-ヒドロキシフェニル]メチル]ブチルマロネートメチル1,2,2,6,6-ペンタメチル-4-ピリペリジルセバケート、ポリ[[6-モルホリノ-s-トリアジン-2,4-ジイル]-[(2,2,6,6-テトラメチル-4-ピペリジル)イミノ]-ヘキサメチレン-[(2,2,6,6-テトラメチル-4-ピペリジル)イミノ]]、2,2,6,6-テトラメチル-4-ピペリジル-C12-21およびC18不飽和脂肪酸エステル、N,N’-ビス(2,2,6,6-テトラメチル-4-ピペリジル)-1,6-ヘキサメチレンジアミン、2-メチル-2-(2,2,6,6-テトラメチル-4-ピペリジル)アミノ-N-(2,2,6,6-テトラメチル-4-ピペリジル)プロピオンアミド等が挙げられる。 Examples of the hindered amine antioxidants include tetrakis (1,2,2,6,6-pentamethyl-4-piperidyl) -1,2,3,4-butanetetracarboxylate and tetrakis (2,2,6). , 6-Tetramethyl-4-piperidyl) 1,2,3,4-butanetetracarboxylate, bis (1,2,2,6,6-pentamethyl-4-piperidyl) sebacate, bis (2,2,6) , 6-Tetramethyl-4-piperidyl) sebacate, bis (1-undecanoxy-2,2,6,6-tetramethylpiperidine-4-yl) carbonate, 1,2,2,6,6-pentamethyl-4-yl Weights of piperidyl methacrylate, 2,2,6,6-tetramethyl-4-piperidylmethacrylate, dimethyl succinate and 1- (2-hydroxyethyl) -4-hydroxy-2,2,6,6-tetramethylpiperidine Condensate, poly [[6-[(1,1,3,3-tetramethylbutyl) amino] -s-triazine-2,4-diyl]-[(2,2,6,6-tetramethyl-4) -Piperidyl) imino] -hexamethylene-[(2,2,6,6-tetramethyl-4-piperidyl) imino]], 4-hydroxy-2,2,6,6-tetramethyl-1-piperidinethanol Ester of 3,5,5-trimethylhexanoic acid, N, N'-4,7-tetrakis [4,6-bis {N-butyl-N- (1,2,2,6,6-pentamethyl-4-) Piperidine) amino} -1,3,5-triazine-2-yl] -4,7-diazadecan-1,10-diamine, bisdecanediate (2,2,6,6-tetramethyl-1- (octyl) Oxy) -4-piperidinyl) ester, reaction product of 1,1-dimethylethylhydroperoxide and octane, bis (1,2,2,6,6-pentamethyl-4-piperidyl) [[3,5-bis (3,5-bis (3,5-bis) 1,1 dimethylethyl) -4-hydroxyphenyl] methyl] butyl malonate methyl 1,2,2,6,6-pentamethyl-4-piperidylsevakate, poly [[6-morpholino-s-triazine-2 , 4-Diyl]-[(2,2,6,6-tetramethyl-4-piperidyl) imino] -hexamethylene-[(2,2,6,6-tetramethyl-4-piperidyl) imino]], 2,2,6,6-tetramethyl-4-piperidyl-C12-21 and C18 unsaturated fatty acid ester, N, N'-bis (2,2,6,6-tetramethyl-4-piperidyl) -1, 6-Hexamethylenediamine, 2-methyl-2- (2,2,6,6-tetramethyl-4-piperidyl) amino-N- (2,2,6,6-tetramethyl-4-piperidyl) propionamide And so on.
市販品は、ADEKA社製アデカスタブLA-52、LA-57、LA-63P、LA-68、LA-72、LA-77Y、LA-77G、LA-81、LA-82、LA-87、LA-402F、LA-502XP、ケミプロ化成社製KAMISTAB29、62、77、94、BASFジャパン社製Tinuvin249、TINUVIN111FDL、123、144、292、5100、サンケミカル社製サイアソ-ブUV-3346、UV-3529、UV-3853等が挙げられる。 Commercially available products are ADEKA's ADEKA STAB LA-52, LA-57, LA-63P, LA-68, LA-72, LA-77Y, LA-77G, LA-81, LA-82, LA-87, LA- 402F, LA-502XP, KAMISTAB29, 62, 77, 94 manufactured by Chemipro Kasei Co., Ltd., Tinuvin249 manufactured by BASF Japan, TINUVIN111FDL, 123, 144, 292, 5100, Siasorb UV-3346, UV-3546 manufactured by Sun Chemical Co., Ltd., UV -3853 and the like can be mentioned.
リン系酸化防止剤は、例えば、ジ(2,6-ジ-t-ブチル-4-メチルフェニル)ペンタエリスリトールジホスファイト、ジステアリルペンタエリスリトールジホスファイト、2,2’-メチレンビス(4,6-ジ-t-ブチルフェニル)2-エチルヘキシルホスファイト、トリス(2,4-ジ-t-ブチルフェニル)ホスファイト、トリス(ノニルフェニル)ホスファイト、テトラ(C12~C15アルキル)-4,4’-イソプロピリデンジフェニルジホスファイト、ジフェニルモノ(2-エチルヘキシル)ホスファイト、ジフェニルイソデシルホスファイト、トリス(イソデシル)ホスファイト、トリフェニルホスファイト、テトラキス(2,4-ジ-t-ブチルフェニル)-4,4-ビフェニルジフォスホニト、トリス(トリデシル)ホスファイト、フェニルイソオクチルホスファイト、フェニルイソデシルホスファイト、フェニルジ(トリデシル)ホスファイト、ジフェニルイソオクチルホスファイト、ジフェニルトリデシルホスファイト、4,4’-イソプロピリデンジフェノールアルキルホスファイト、トリスノニルフェニルホスファイト、トリスジノニルフェニルホスファイト、トリス(ビフェニル)ホスファイト、ジ(2,4-ジ-t-ブチルフェニル)ペンタエリスリトールジホスファイト、ジ(ノニルフェニル)ペンタエリスリトールジホスファイト、フェニルビスフェノールAペンタエリスリトールジホスファイト、テトラトリデシル4,4’-ブチリデンビス(3-メチル-6-t-ブチルフェノール)ジホスファイト、ヘキサトリデシル1,1,3-トリス(2-メチル-4-ヒドロキシ-5-t-ブチルフェニル)ブタントリホスファイト、3,5-ジ-t-ブチル-4-ヒドロキシベンジルホスファイトジエチルエステル、ソジウムビス(4-t-ブチルフェニル)ホスファイト、ソジウム-2,2-メチレン-ビス(4,6-ジ-t-ブチルフェニル)-ホスファイト、1,3-ビス(ジフェノキシフォスフォニロキシ)-ベンゼン、亜リン酸エチルビス(2,4-ジt-ブチル-6-メチルフェニル)等が挙げられる。 Phylline antioxidants include, for example, di (2,6-di-t-butyl-4-methylphenyl) pentaerythritol diphosphite, distearyl pentaerythritol diphosphite, 2,2'-methylenebis (4,6). -Di-t-butylphenyl) 2-ethylhexyl phosphite, tris (2,4-di-t-butylphenyl) phosphite, tris (nonylphenyl) phosphite, tetra (C12-C15 alkyl) -4,4' -Isopropyridene diphenyl diphosphite, diphenylmono (2-ethylhexyl) phosphite, diphenylisodecylphosphite, tris (isodecyl) phosphite, triphenylphosphite, tetrakis (2,4-di-t-butylphenyl)- 4,4-Biphenyldiphoshonito, Tris (tridecyl) phosphite, phenylisooctylphosphite, phenylisodecylphosphite, phenyldi (tridecyl) phosphite, diphenylisooctylphosphite, diphenyltridecylphosphite, 4,4 '-Isopropyridene diphenol alkyl phosphite, trisnonylphenyl phosphite, trisdinonylphenyl phosphite, tris (biphenyl) phosphite, di (2,4-di-t-butylphenyl) pentaerythritol diphosphite, di (Nonylphenyl) Pentaerythritol diphosphite, Phenylbisphenol A Pentaerythritol diphosphite, tetratridecyl 4,4'-butylidenebis (3-methyl-6-t-butylphenol) diphosphite, hexatridecyl 1,1,3- Tris (2-methyl-4-hydroxy-5-t-butylphenyl) butanetriphosphite, 3,5-di-t-butyl-4-hydroxybenzylphosphite diethyl ester, sodiumbis (4-t-butylphenyl) phos Fight, Sodium-2,2-Methylene-bis (4,6-di-t-butylphenyl) -phosphite, 1,3-bis (diphenoxyphosphonyloxy) -benzene, ethylbis phosphite (2,4) -Dit-butyl-6-methylphenyl) and the like.
市販品は、ADEKA社製アデカスタブPEP-36、PEP-8、HP-10、2112、1178、1500、C、135A、3010、TPP、BASFジャパン社製IRGAFOS168、クラリアントケミカルズ社製HostanoxP-EPQ等が挙げられる。 Examples of commercially available products include ADEKA's ADEKA STAB PEP-36, PEP-8, HP-10, 2112, 1178, 1500, C, 135A, 3010, TPP, BASF Japan's IRGAFOS168, and Clariant Chemicals' HostanoxP-EPQ. Be done.
イオウ系酸化防止剤は、例えば、2,2-ビス{〔3-(ドデシルチオ)-1-オキソプロポキシ〕メチル}プロパン-1,3-ジイルビス〔3-(ドデシルチオ)プロピオネート〕、3,3’-チオビスプロピオン酸ジトリデシル、2,2-チオ-ジエチレンビス〔3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート〕、2,4-ビス〔(オクチルチオ)メチル〕-o-クレゾール、2,4-ビス〔(ラウリルチオ)メチル〕-o-クレゾール等が挙げられる。 Sulfur-based antioxidants include, for example, 2,2-bis {[3- (dodecylthio) -1-oxopropoxy] methyl} propane-1,3-diylbis [3- (dodecylthio) propionate], 3,3'-. Ditridecyl thiobispropionate, 2,2-thio-diethylenebis [3- (3,5-di-t-butyl-4-hydroxyphenyl) propionate], 2,4-bis [(octylthio) methyl] -o- Cresol, 2,4-bis [(laurylthio) methyl] -o-cresol and the like can be mentioned.
市販品は、ADEKA社製アデカスタブAO-412S、AO-503、ケミプロ化成社製KEMINOXPLS等が挙げられる。 Examples of commercially available products include ADEKA Stab AO-412S and AO-503 manufactured by ADEKA, and KEMINOXPLS manufactured by Chemipro Kasei Co., Ltd.
酸化防止剤(M)は、単独または2種類以上を併用して使用できる。 The antioxidant (M) can be used alone or in combination of two or more.
酸化防止剤(M)の含有量は、感光性組成物の不揮発分100質量%中、0.5~5.0質量%が好ましい。適量含有すると透過率、分光特性、および感度が向上する。 The content of the antioxidant (M) is preferably 0.5 to 5.0% by mass based on 100% by mass of the non-volatile content of the photosensitive composition. Appropriate amounts improve transmittance, spectral characteristics, and sensitivity.
[レベリング剤(N)]
本発明の感光性組成物は、レベリング剤(N)を含有できる。これにより、被膜形成時の基板に対する濡れ性および被膜の乾燥性がより向上する。レベリング剤(N)は、例えば、シリコ-ン系界面活性剤、フッ素系界面活性剤、ノニオン性界面活性剤、カチオン性界面活性剤、アニオン性界面活性剤等が挙げられる。
[Leveling agent (N)]
The photosensitive composition of the present invention can contain a leveling agent (N). As a result, the wettability to the substrate and the dryness of the film at the time of film formation are further improved. Examples of the leveling agent (N) include a silicone-based surfactant, a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant and the like.
シリコ-ン系界面活性剤は、例えば、シロキサン結合からなる直鎖状ポリマ-や、側鎖や末端に有機基を導入した変性シロキサンポリマ-が挙げられる。 Examples of the silicone-based surfactant include a linear polymer composed of a siloxane bond and a modified siloxane polymer having an organic group introduced into a side chain or a terminal.
市販品は、ビックケミー社製BYK-300,306,310,313,315N,320,322,323,330,331,333,342,345,346,347,348,349,370,377,378,3455,UV3510,3570、東レ・ダウコ-ニング社製FZ-7002,2110,2122,2123,2191,5609、信越化学工業社製X-22-4952、X-22-4272、X-22-6266、KF-351A、KF-354L、KF-355A、KF-945、KF-640、KF-642、KF-643、X-22-4515、KF-6004、KP-341等が挙げられる。 Commercially available products are BYK-300, 306, 310, 313,315N, 320,322,323,330,331,333,342,345,346,347,348,349,370,377,378,3455 manufactured by Big Chemie. , UV3510, 3570, FZ-7002, 2110, 2122, 2123, 2191, 5609, manufactured by Toray Industries, Inc., X-22-4952, X-22-4272, X-22-6266, KF manufactured by Shin-Etsu Chemical Co., Ltd. Examples thereof include -351A, KF-354L, KF-355A, KF-945, KF-640, KF-642, KF-643, X-22-4515, KF-6004, KP-341 and the like.
フッ素系界面活性剤は、例えば、フルオロカーボン鎖を有する界面活性剤又はレベリング剤が挙げられる。 Examples of the fluorine-based surfactant include a surfactant having a fluorocarbon chain or a leveling agent.
市販品は、AGCセイミケミカル社製サーフロンS-242、S-243、S-420、S-611、S-651、S-386、DIC社製メガファックF-253、F-477、F-551、F-552、F-555、F-558、F-560、F-570、F-575,F-576、R-40-LM、R-41、RS-72-K、DS-21、住友スリーエム社製FC-4430、FC-4432、三菱マテリアル電子化成社製EF-PP31N09、EF-PP33G1、EF-PP32C1、ネオス社製フタージェント602A等が挙げられる。 Commercially available products are AGC Seimi Chemical's Surflon S-242, S-243, S-420, S-611, S-651, S-386, DIC's Megafuck F-253, F-477, F-551. , F-552, F-555, F-558, F-560, F-570, F-575, F-576, R-40-LM, R-41, RS-72-K, DS-21, Sumitomo Examples thereof include FC-4430 and FC-4432 manufactured by 3M, EF-PP31N09, EF-PP33G1, EF-PP32C1 manufactured by Mitsubishi Materials Electronics Chemicals, and Futagent 602A manufactured by Neos.
ノニオン性界面活性剤は、例えば、ポリオキシエチレンラウリルエーテル、ポリオキシエチレンセチルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンオレイルエーテル、ポリオキシエチレンアルキルエーテル、ポリオキシエチレンミリステルエーテル、ポリオキシエチレンオクチルドデシルエーテル、ポリオキシアルキレンアルキルエーテル、ポリオキシフェニレンジスチレン化フェニルエーテル、ポリオキシエチレントリベンジルフェニルエーテル、ポリオキシエチレンポリオキシプロピレングリコール、ポリオキシアルキレンアルケニルエーテル、ポリオキシエチレンノニルフェニルエーテル、ポリオキシエチレンアルキルエーテルリン酸エステル、ソルビタンモノラウレート、ソルビタンモノパルミテ-ト、ソルビタンモノステアレート、ソルビタンジステアレート、ソルビタントリステアレート、ソルビタンモノオレート、ソルビタントリオレート、ソルビタンセスキオレート、ポリオキシエチレンソルビタンモノラウレート、ポリオキシエチレンソルビタンモノパルミテ-ト、ポリオキシエチレンソルビタンモノステアレート、ポリオキシエチレンソルビタントリステアレート、ポリオキシエチレンソルビタンモノオレート、ポリオキシエチレンソルビタントリイソステアレート、テトラオレイン酸ポリオキシエチレンソルビット、グリセロ-ルモノステアレート、グリセロ-ルモノオレート、ポリエチレングリコールモノラウレート、ポリエチレングリコールモノステアレート、ポリエチレングリコールジステアレート、ポリエチレングリコールモノオレート、ポリオキシエチレン硬化ヒマシ油、ポリオキシエチレンアルキルアミン、アルキルアルカノールアミド、アルキルイミダゾリン等が挙げられる。 Nonionic surfactants include, for example, polyoxyethylene lauryl ether, polyoxyethylene cetyl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene alkyl ether, polyoxyethylene myristel ether, and polyoxyethylene octyl. Dodecyl ether, polyoxyalkylene alkyl ether, polyoxyphenylenedistyrene phenyl ether, polyoxyethylene tribenzylphenyl ether, polyoxyethylene polyoxypropylene glycol, polyoxyalkylene alkenyl ether, polyoxyethylene nonylphenyl ether, polyoxyethylene Alkyl ether phosphate ester, sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan distearate, sorbitan tristearate, sorbitan monoolate, sorbitan triolate, sorbitan sesquiolate, polyoxyethylene sorbitan mono Laurate, Polyoxyethylene sorbitan monopalmitate, Polyoxyethylene sorbitan monostearate, Polyoxyethylene sorbitan tristearate, Polyoxyethylene sorbitan monoolate, Polyoxyethylene sorbitan triisostearate, Polyoxytetraoleate Ethylene sorbit, glycerol monostearate, glycerol monooleate, polyethylene glycol monolaurate, polyethylene glycol monostearate, polyethylene glycol distearate, polyethylene glycol monostearate, polyoxyethylene hydrogenated castor oil, polyoxyethylene alkylamine, alkyl Examples thereof include alkanolamide and alkylimidazolin.
市販品は、花王社製エマルゲン103,104P,106,108,109P,120,123P,130K,147,150,210P,220,306P,320P,350,404,408,409PV,420,430,705,707,709,1108,1118S-70,1135S-70,1150S-60,2020G-HA,2025G,LS-106,LS-110,LS-114,MS-110,A-60,A-90,B-66,PP-290、ラテムルPD-420,PD-430,PD-430S,PD-450、レオドールSP-L10,SP-P10,SP-S10V,SP-S20,SP-S30V,SP-O10V,SP-O30V、スーパーSP-L10,AS-10V,AO-10V,AO-15V,TW-L120,TW-L106,TW-P120,TW-S120V,TW-S320V,TW-O120V,TW-O106V,TW-IS399C、スーパーTW-L120,430V,440V,460V,MS-50,MS-60,MO-60,MS-165V、エマノーン1112,3199V,3299V,3299RV,4110,CH-25,CH-40,CH-60(K),アミ-ト102,105,105A,302,320、アミノーンPK-02S、L-02、ホモゲノールL-95、ADEKA社製アデカプルロニック(登録商標)L-23,31,44,61,62,64,71,72,101,121、TR-701,702,704,913R、共栄社化学社製(メタ)アクリル酸系(共)重合体ポリフロ-No.75,No.90,No.95等が挙げられる。 Commercially available products are Emargen 103, 104P, 106, 108, 109P, 120, 123P, 130K, 147, 150, 210P, 220, 306P, 320P, 350, 404, 408, 409PV, 420, 430, 705, manufactured by Kao. 707, 709, 1108, 1118S-70, 1135S-70, 1150S-60, 2020G-HA, 2025G, LS-106, LS-110, LS-114, MS-110, A-60, A-90, B- 66, PP-290, Latemul PD-420, PD-430, PD-430S, PD-450, Leodor SP-L10, SP-P10, SP-S10V, SP-S20, SP-S30V, SP-O10V, SP- O30V, Super SP-L10, AS-10V, AO-10V, AO-15V, TW-L120, TW-L106, TW-P120, TW-S120V, TW-S320V, TW-O120V, TW-O106V, TW-IS399C , Super TW-L120, 430V, 440V, 460V, MS-50, MS-60, MO-60, MS-165V, Emmanon 1112, 3199V, 3299V, 3299RV, 4110, CH-25, CH-40, CH-60 (K), Amit 102, 105, 105A, 302, 320, Aminone PK-02S, L-02, Homogenol L-95, ADEKA ADEKA PLRONIC® L-23, 31, 44, 61, 62,64,71,72,101,121, TR-701,702,704,913R, Kyoeisha Chemical Co., Ltd. (meth) acrylic acid-based (co) polymer polyflo-No. 75, No. 90, No. 95 and the like can be mentioned.
カチオン性界面活性剤は、例えばアルキルアミン塩やラウリルトリメチルアンモニウムクロライド、ステアリルトリメチルアンモニウムクロライド、セチルトリメチルアンモニウムクロライドなどのアルキル4級アンモニウム塩やそれらのエチレンオキサイド付加物が挙げられる。 Examples of the cationic surfactant include alkylquaternary ammonium salts such as alkylamine salts, lauryltrimethylammonium chlorides, stearyltrimethylammonium chlorides, and cetyltrimethylammonium chlorides, and ethylene oxide adducts thereof.
市販品は、花王社製アセタミン24、コータミン24P、60W、86Pコンク等が挙げられる。 Examples of commercially available products include acetamine 24, coatamine 24P, 60W, 86P conch piercing manufactured by Kao Corporation.
アニオン性界面活性剤は、例えば、ポリオキシエチレンアルキルエーテル硫酸塩、ドデシルベンゼンスルホン酸ナトリウム、スチレン-アクリル酸共重合体のアルカリ塩、アルキルナフタレンスルホン酸ナトリウム、アルキルジフェニルエーテルジスルホン酸ナトリウム、ラウリル硫酸モノエタノールアミン、ラウリル硫酸トリエタノールアミン、ラウリル硫酸アンモニウム、ステアリン酸モノエタノールアミン、ステアリン酸ナトリウム、ラウリル硫酸ナトリウム、スチレン-アクリル酸共重合体のモノエタノールアミン、ポリオキシエチレンアルキルエーテルリン酸エステル等が挙げられる。 Anionic surfactants include, for example, polyoxyethylene alkyl ether sulfate, sodium dodecylbenzene sulfonate, alkali salt of styrene-acrylic acid copolymer, sodium alkylnaphthalene sulfonate, sodium alkyldiphenyl ether disulfonate, monoethanol lauryl sulfate. Examples thereof include amine, triethanolamine lauryl sulfate, ammonium lauryl sulfate, monoethanolamine stearate, sodium stearate, sodium lauryl sulfate, monoethanolamine of styrene-acrylic acid copolymer, polyoxyethylene alkyl ether phosphate and the like.
市販品は、ネオス社製フタージェント100,150、ADEKA社製アデカホープYES-25、アデカコールTS-230E,PS-440E,EC-8600等が挙げられる。
Examples of commercially available products include
両性界面活性剤は、例えばラウリン酸アミドプロピルベタイン、ラウリルベタイン、コカミドプロピルベタイン、ステアリルベタイン、アルキルジメチルアミノ酢酸ベタイン等のアルキルベタイン、ラウリルジメチルアミンオキサイド等のアルキルアミンオキサイド等が挙げられる。 Examples of the amphoteric tenside include alkyl betaines such as lauric acid amidopropyl betaine, lauryl betaine, cocamidopropyl betaine, stearyl betaine and alkyldimethylaminoacetic acid betaine, and alkylamine oxides such as lauryldimethylamine oxide.
市販品は、花王社製アンヒトール20AB,20BS,24B,55AB,86B,20Y-B,20N等が挙げられる。 Examples of commercially available products include Anhitor 20AB, 20BS, 24B, 55AB, 86B, 20Y-B, and 20N manufactured by Kao Corporation.
レベリング剤(N)は、単独または2種類以上を併用して使用できる。 The leveling agent (N) can be used alone or in combination of two or more.
レベリング剤(N)の含有量は、感光性組成物の不揮発分100質量%中、0.001~2.0質量%が好ましく、0.005~1.0質量%がより好ましい。この範囲内であることで、感光性組成物の塗布性とパターン密着性、透過率のバランスがより向上する。 The content of the leveling agent (N) is preferably 0.001 to 2.0% by mass, more preferably 0.005 to 1.0% by mass, based on 100% by mass of the non-volatile content of the photosensitive composition. Within this range, the balance between the coatability of the photosensitive composition, the pattern adhesion, and the transmittance is further improved.
[貯蔵安定剤(O)]
本発明の感光性組成物は、貯蔵安定剤(O)を含有できる。これにより、感光性組成物の経時粘度が安定化する。貯蔵安定剤(O)は、例えば、ベンジルトリメチルクロライド、ジエチルヒドロキシアミンなどの4級アンモニウムクロライド、乳酸、シュウ酸などの有機酸およびそのメチルエーテル、t-ブチルピロカテコール、テトラエチルホスフィン、テトラフェニルなどの有機ホスフィン、亜リン酸塩等が挙げられる。
[Storage stabilizer (O)]
The photosensitive composition of the present invention can contain a storage stabilizer (O). This stabilizes the viscosity of the photosensitive composition over time. The storage stabilizer (O) includes, for example, quaternary ammonium chloride such as benzyltrimethyl chloride and diethylhydroxyamine, organic acids such as lactic acid and phosphorous acid and their methyl ethers, t-butylpyrocatechol, tetraethylphosphin and tetraphenyl. Examples thereof include organic phosphine and phosphite.
貯蔵安定剤(O)の含有量は、顔料(A)100質量部に対して、0.1~10質量部が好ましい。 The content of the storage stabilizer (O) is preferably 0.1 to 10 parts by mass with respect to 100 parts by mass of the pigment (A).
[密着向上剤(P)]
本発明の感光性組成物は、密着向上剤(P)を含有できる。これにより被膜と基材の密着性が向上する。また、フォトリソグラフィー法で幅が狭いパターンを形成し易くなる。
[Adhesion improver (P)]
The photosensitive composition of the present invention can contain an adhesion improver (P). This improves the adhesion between the coating and the base material. In addition, the photolithography method facilitates the formation of narrow patterns.
密着向上剤(P)は、例えば、シランカップリング剤等が挙げられる。シランカップリング剤は、例えば、ビニルトリメトキシシラン、ビニルトリエトキシシラン等のビニルシラン類、3-メタクリロキシプロピルメチルジメトキシシラン、3-メタクリロキシプロピルトリメトキシシラン、3-メタクリロキシプロピルメチルジエトキシシラン、3-メタクリロキシプロピルトリエトキシシラン、3-アクリロキシプロピルトリメトキシシラン等の(メタ)アクリルシラン類、2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン、3-グリシドキシプロピルメチルジメトキシシラン、3-グリシドキシプロピルトリメトキシシラン、3-グリシドキシプロピルメチルジエトキシシラン、3-グリシドキシプロピルトリエトキシシラン等のエポキシシラン類、N-2-(アミノエチル)-3-アミノプロピルメチルジメトキシシラン、N-2-(アミノエチル)-3-アミノプロピルトリメトキシシラン、3-アミノプロピルトリメトキシシラン、3-アミノプロピルトリエトキシシラン、3-トリエトキシシリル-N-(1,3-ジメチル-ブチリデン)プロピルアミン、N-フェニル-3-アミノプロピルトリメトキシシラン、N-(ビニルベンジル)-2-アミノエチル-3-アミノプロピルトリメトキシシランの塩酸塩等のアミノシラン類、3-メルカプトプロピルメチルジメトキシシラン、3-メルカプトプロピルトリメトキシシラン等のメルカプト類、p-スチリルトリメトキシシラン等のスチリル類、3-ウレイドプロピルトリエトキシシラン等のウレイド類、ビス(トリエトキシシリルプロピル)テトラスルフィド等のスルフィド類、3-イソシアネートプロピルトリエトキシシラン等のイソシアネート類などのシランカップリング剤が挙げられる。 Examples of the adhesion improver (P) include a silane coupling agent and the like. Examples of the silane coupling agent include vinylsilanes such as vinyltrimethoxysilane and vinyltriethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, and 3-methacryloxypropylmethyldiethoxysilane. (Meta) acrylic silanes such as 3-methacryloxypropyltriethoxysilane, 3-acryloxypropyltrimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane , 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, 3-glycidoxypropyltriethoxysilane and other epoxysilanes, N-2- (aminoethyl) -3-aminopropyl Methyldimethoxysilane, N-2- (aminoethyl) -3-aminopropyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-triethoxysilyl-N- (1,3-) Aminosilanes such as dimethyl-butylidene) propylamine, N-phenyl-3-aminopropyltrimethoxysilane, N- (vinylbenzyl) -2-aminoethyl-3-aminopropyltrimethoxysilane hydrochloride, 3-mercaptopropyl Melcaptos such as methyldimethoxysilane and 3-mercaptopropyltrimethoxysilane, styryls such as p-styryltrimethoxysilane, ureids such as 3-ureidopropyltriethoxysilane, bis (triethoxysilylpropyl) tetrasulfide and the like. Examples thereof include silane coupling agents such as sulfides and isocyanates such as 3-isocyanuspropyltriethoxysilane.
密着向上剤(P)は、単独または2種類以上を併用して使用できる。 The adhesion improver (P) can be used alone or in combination of two or more.
密着向上剤(P)の含有量は、顔料(A)100質量部に対して、0.01~10質量部が好ましく、0.05~5質量部がより好ましい。 The content of the adhesion improver (P) is preferably 0.01 to 10 parts by mass, more preferably 0.05 to 5 parts by mass with respect to 100 parts by mass of the pigment (A).
[有機溶剤(Q)]
本発明の感光性組成物は、有機溶剤(Q)を含有できる。
[Organic solvent (Q)]
The photosensitive composition of the present invention can contain an organic solvent (Q).
有機溶剤(Q)は、例えば、1,2,3-トリクロロプロパン、1-メトキシ-2-プロパノール、乳酸エチル、1,3-ブタンジオ-ル、1,3-ブチレングリコール、1,3-ブチレングリコールジアセテート、1,4-ジオキサン、2-ヘプタノーン、2-メチル-1,3-プロパンジオ-ル、3,5,5-トリメチル-2-シクロヘキセン-1-オン、3,3,5-トリメチルシクロヘキサノン、3-エトキシプロピオン酸エチル、3-メチル-1,3-ブタンジオ-ル、3-メトキシ-3-メチル-1-ブタノール、3-メトキシ-3-メチルブチルアセテート、3-メトキシブタノール、3-メトキシブチルアセテート、4-ヘプタノーン、m-キシレン、m-ジエチルベンゼン、m-ジクロロベンゼン、N,N-ジメチルアセトアミド、N,N-ジメチルホルムアミド、n-ブチルアルコール、n-ブチルベンゼン、n-プロピルアセテート、N-メチルピロリドン、o-キシレン、o-クロロトールエン、o-ジエチルベンゼン、o-ジクロロベンゼン、p-クロロトールエン、p-ジエチルベンゼン、sec-ブチルベンゼン、tert-ブチルベンゼン、γ-ブチロラクトン、イソブチルアルコール、イソホロン、エチレングリコールジエチルエーテル、エチレングリコールジブチルエーテル、エチレングリコールモノイソプロピルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールモノエチルエーテルアセテート、エチレングリコールモノタ-シャリ-ブチルエーテル、エチレングリコールモノブチルエーテル、エチレングリコールモノブチルエーテルアセテート、エチレングリコールモノプロピルエーテル、エチレングリコールモノヘキシルエーテル、エチレングリコールモノメチルエーテル、エチレングリコールモノメチルエーテルアセテート、ジイソブチルケトン、ジエチレングリコールジエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールモノイソプロピルエーテル、ジエチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノブチルエーテル、ジエチレングリコールモノブチルエーテルアセテート、ジエチレングリコールモノメチルエーテル、シクロヘキサノール、シクロヘキサノールアセテート、シクロヘキサノン、ジプロピレングリコールジメチルエーテル、ジプロピレングリコールメチルエーテルアセテート、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールモノブチルエーテル、ジプロピレングリコールモノプロピルエーテル、ジプロピレングリコールモノメチルエーテル、ダイアセトンアルコール、トリアセチン、トリプロピレングリコールモノブチルエーテル、トリプロピレングリコールモノメチルエーテル、プロピレングリコールジアセテート、プロピレングリコールフェニルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールモノブチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテルプロピオネート、ベンジルアルコール、メチルイソブチルケトン、メチルシクロヘキサノール、酢酸n-アミル、酢酸n-ブチル、酢酸イソアミル、酢酸イソブチル、酢酸プロピル、二塩基酸エステル等が挙げられる。これらの中でも、顔料の分散性、アルカリ可溶樹脂の溶解性の観点から、乳酸エチル、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート等のグリコールアセテート類、ベンジルアルコール、ダイアセトンアルコール等のアルコール類やシクロヘキサノン等のケトン類が好ましい。 The organic solvent (Q) is, for example, 1,2,3-trichloropropane, 1-methoxy-2-propanol, ethyl lactate, 1,3-butanjiol, 1,3-butylene glycol, 1,3-butylene glycol. Diacetate, 1,4-dioxane, 2-heptanone, 2-methyl-1,3-propanediol, 3,5,5-trimethyl-2-cyclohexene-1-one, 3,3,5-trimethylcyclohexanone , 3-ethoxypropionate ethyl, 3-methyl-1,3-butanjiol, 3-methoxy-3-methyl-1-butanol, 3-methoxy-3-methylbutylacetate, 3-methoxybutanol, 3-methoxy Butyl acetate, 4-heptanone, m-xylene, m-diethylbenzene, m-dichlorobenzene, N, N-dimethylacetamide, N, N-dimethylformamide, n-butyl alcohol, n-butylbenzene, n-propylacetate, N -Methylpyrrolidone, o-xylene, o-chlorotoluene, o-diethylbenzene, o-dichlorobenzene, p-chlorotoluene, p-diethylbenzene, sec-butylbenzene, tert-butylbenzene, γ-butyrolactone, isobutyl alcohol, Isophoron, ethylene glycol diethyl ether, ethylene glycol dibutyl ether, ethylene glycol monoisopropyl ether, ethylene glycol monoethyl ether, ethylene glycol monoethyl ether acetate, ethylene glycol monother-shari-butyl ether, ethylene glycol monobutyl ether, ethylene glycol monobutyl ether acetate , Ethylene glycol monopropyl ether, ethylene glycol monohexyl ether, ethylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, diisobutyl ketone, diethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol monoisopropyl ether, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether, diethylene glycol Monobutyl ether acetate, diethylene glycol monomethyl ether, cyclohexanol, cyclohexanol acetate, cyclohexanone, dipropylene glycol dimethyl ether, dipropylene glycol methyl ether acetylate G, Dipropylene Glycol Monoethyl Ether, Dipropylene Glycol Monobutyl Ether, Dipropylene Glycol Monopropyl Ether, Dipropylene Glycol Monomethyl Ether, Diacetone Alcohol, Triacetin, Tripropylene Glycol Monobutyl Ether, Tripropylene Glycol Monomethyl Ether, Propylene Glycol Diacetate , Propylene glycol phenyl ether, propylene glycol monoethyl ether, propylene glycol monoethyl ether acetate, propylene glycol monobutyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether propionate, benzyl Examples thereof include alcohol, methylisobutylketone, methylcyclohexanol, n-amyl acetate, n-butyl acetate, isoamyl acetate, isobutyl acetate, propyl acetate, dibasic acid ester and the like. Among these, from the viewpoint of dispersibility of pigments and solubility of alkali-soluble resins, ethyl lactate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate and the like Alcohols such as glycol acetates, benzyl alcohols and diacetone alcohols and ketones such as cyclohexanone are preferable.
有機溶剤(Q)は、単独または2種類以上を併用して使用できる。 The organic solvent (Q) can be used alone or in combination of two or more.
<指紋認証センサ用感光性組成物の製造方法>
本発明の感光性組成物は、例えば、顔料(A)、アルカリ可溶樹脂(B)、および必要に応じて色素誘導体(E)、分散樹脂(F)、有機溶剤(Q)等を加えて分散処理を行うことで、分散体を製造する。その後、前記分散体に、重合性化合物(C)、光重合開始剤(D)を配合し混合することで製造できる。なお、各材料を配合するタイミングは、任意である。また、分散工程を複数回行うこともできる。
<Manufacturing method of photosensitive composition for fingerprint authentication sensor>
To the photosensitive composition of the present invention, for example, a pigment (A), an alkali-soluble resin (B), and if necessary, a dye derivative (E), a dispersed resin (F), an organic solvent (Q) and the like are added. A dispersion is produced by performing a dispersion treatment. Then, it can be produced by blending the polymerizable compound (C) and the photopolymerization initiator (D) with the dispersion and mixing them. The timing of blending each material is arbitrary. Further, the dispersion step can be performed a plurality of times.
分散処理を行う分散機は、例えば、2本ロ-ルミル、3本ロールミル、ボ-ルミル、横型サンドミル、縦型サンドミル、アニュラー型ビ-ズミル、又はアトライター等が挙げられる。 Examples of the disperser for performing the dispersion treatment include a two-roll mill, a three-roll mill, a ball mill, a horizontal sand mill, a vertical sand mill, an annual bead mill, and an attritor.
分散体中の顔料(A)の平均分散粒子径(二次粒子径)は、30~200nmが好ましく、40~200nmがより好ましい。適度な粒子径を有すると分散安定性が高い感光性組成物が得やすい。 The average dispersed particle size (secondary particle size) of the pigment (A) in the dispersion is preferably 30 to 200 nm, more preferably 40 to 200 nm. When the particle size is appropriate, it is easy to obtain a photosensitive composition having high dispersion stability.
平均分散粒子径(二次粒子径)の測定方法は、例えば、動的光散乱法(FFTパワ-スペクトール法)を採用した日機装社のマイクロトラックUPA-EX150を用い、粒子透過性を吸収モ-ド、粒子形状を非球形とし、D50粒子径を平均径とする。測定用の希釈溶剤は分散に使用した有機溶剤をそれぞれ用い、超音波で処理したサンプルについてサンプル調整直後に測定するとバラツキが少ない結果が得られやすく好ましい。 As a method for measuring the average dispersed particle size (secondary particle size), for example, Nikkiso's Microtrack UPA-EX150, which employs a dynamic light scattering method (FFT power-spector method), is used to absorb particle permeability. The particle shape is non-spherical, and the D50 particle diameter is the average diameter. As the diluting solvent for measurement, the organic solvent used for dispersion is used, and it is preferable to measure the sample treated by ultrasonic waves immediately after sample preparation because it is easy to obtain results with little variation.
感光性組成物は、遠心分離、焼結フィルタやメンブレンフィルタによる濾過等の手段にて、5μm以上の粗大粒子、好ましくは1μm以上の粗大粒子、さらに好ましくは0.5μm以上の粗大粒子、および混入した塵の除去を行うことが好ましい。本発明の紋認証センサ用感光性組成物は、実質的に0.5μm以上の粒子を含まないことが好ましく、0.3μm以下の粒子を含まないことがより好ましい。 The photosensitive composition is mixed with coarse particles of 5 μm or more, preferably coarse particles of 1 μm or more, more preferably 0.5 μm or more, by means such as centrifugation, filtration with a sintering filter or a membrane filter. It is preferable to remove the dust. The photosensitive composition for a crest authentication sensor of the present invention preferably contains substantially no particles of 0.5 μm or more, and more preferably does not contain particles of 0.3 μm or less.
<光学フィルタ>
本発明の光学フィルタは、基板、および指紋認証センサ用感光性組成物を用いて形成されてなる被膜を備える。前記被膜は、フォトリソグラフィー法でパターンを形成することが好ましい。
<Optical filter>
The optical filter of the present invention includes a substrate and a coating formed by using a photosensitive composition for a fingerprint authentication sensor. It is preferable that the film is patterned by a photolithography method.
[光学フィルタの製造方法]
光学フィルタは、例えば、基板上に感光性組成物を塗布し被膜を形成する工程(1)、前記被膜に、マスクを介してパターン状に露光する工程(2)、未露光部分を現像除去しパターンを形成する工程(3)を行い作製できる。
さらに、必要に応じて、前記被膜を乾燥する工程(プリベーク工程)、および前記パターンを熱硬化させる工程(ポストベーク)を行うことができる。
[Manufacturing method of optical filter]
The optical filter is, for example, a step of applying a photosensitive composition on a substrate to form a film (1), a step of exposing the film in a pattern through a mask (2), and developing and removing an unexposed portion. It can be produced by performing the step (3) of forming a pattern.
Further, if necessary, a step of drying the coating film (pre-baking step) and a step of thermosetting the pattern (post-baking step) can be performed.
以下、光学フィルタの製造方法を詳細に説明する。 Hereinafter, a method for manufacturing an optical filter will be described in detail.
(工程(1))
被膜を形成する工程(1)は、感光性組成物を基板上に、回転塗布、ロ-ル塗布、スリット塗布、流延塗布、またはインクジェット塗布等の方法で塗布し、必要に応じてオーブン、ホットプレート等を用いて、50~120℃の温度で10~120秒乾燥(プリベーク)する。
前記基板は、例えば、ガラス基板、シリコン基板等が挙げられる。シリコン基板は、例えば、表面にCCD、CMOS等の撮像素子が形成されていてもよい。また、基板上には、必要に応じて、上部との層との密着改良、物質の拡散防止、基板表面の平坦化のために下塗り層を設けてもよい。
被膜厚さは、乾燥後0.05~2.0μmになるように塗布することが好ましい。
(Step (1))
In the step (1) of forming the film, the photosensitive composition is applied onto the substrate by a method such as rotary coating, roll coating, slit coating, cast coating, or inkjet coating, and if necessary, an oven. Using a hot plate or the like, dry (pre-bake) at a temperature of 50 to 120 ° C. for 10 to 120 seconds.
Examples of the substrate include a glass substrate and a silicon substrate. For example, an image pickup element such as a CCD or CMOS may be formed on the surface of the silicon substrate. Further, if necessary, an undercoat layer may be provided on the substrate for improving the adhesion with the layer from the upper part, preventing the diffusion of substances, and flattening the surface of the substrate.
It is preferable to apply the film so that the film thickness is 0.05 to 2.0 μm after drying.
(工程(2))
露光工程は、工程(1)で得られた被膜を、例えば、ステッパ-等の露光装置を用い、マスクを介して特定のパターンを露光する。これにより硬化した被膜が得られる。
露光に用いる放射線は、例えば、g線、h線、i線等の紫外線が挙げられる。
(Step (2))
In the exposure step, the film obtained in the step (1) is exposed to a specific pattern via a mask using, for example, an exposure device such as a stepper. This gives a cured film.
Examples of the radiation used for exposure include ultraviolet rays such as g-line, h-line, and i-line.
(工程(3))
工程(2)で得られた硬化被膜は、アルカリ現像処理を行うことで、未露光部分の被膜がアルカリ水溶液に溶出し、硬化部分のみが残る。
現像液は、例えば、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム, 硅酸ナトリウム、メタ硅酸ナトリウム、アンモニア水、エチルアミン、ジエチルアミン、ジメチルエタノールアミン、テトラメチルアンモニウムヒドロキシド、テトラエチルアンモニウムヒドロキシド、コリン、ピロ-ル、ピペリジン、1 ,8-ジアザビシクロ-〔5 .4 .0 〕-7-ウンデセン等のアルカリ性化合物が挙げられる。
現像液の濃度は、0.001~10質量%が好ましく、0.01~1質量%がより好ましい。
アルカリ現像液のpHは、11~13が好ましく、11.5~12.5がより好ましい。適度なpHで使用するとパターンの荒れや剥離を抑制し、現像後の残膜率が向上する。
(Step (3))
The cured film obtained in step (2) is subjected to an alkaline development treatment, so that the film in the unexposed portion is eluted in the alkaline aqueous solution, and only the cured portion remains.
The developing solution is, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, aqueous ammonia, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, etc. Pyrrol, piperidine, 1,8-diazabicyclo- [5. 4. 0] -7-Alkaline compounds such as undecene can be mentioned.
The concentration of the developer is preferably 0.001 to 10% by mass, more preferably 0.01 to 1% by mass.
The pH of the alkaline developer is preferably 11 to 13, more preferably 11.5 to 12.5. When used at an appropriate pH, roughening and peeling of the pattern are suppressed, and the residual film ratio after development is improved.
現像方法は、例えば、ディップ法、スプレー法、パドール法等が挙げられる。現像温度は15~40℃ が好ましい。なお、アルカリ現像後は、純水で洗浄することが好ましい。 Examples of the developing method include a dip method, a spray method, a paddle method and the like. The development temperature is preferably 15 to 40 ° C. After alkaline development, it is preferable to wash with pure water.
現像後の被膜は、乾燥後、被膜を十分に硬化させるために加熱処理(ポストベーク)を行うことが好ましい。ポストベークの加熱温度は、100~300℃が好ましく、150~250℃がより好ましい。また、加熱時間は、2分間~ 1時間程度が好ましく、3分間~30分間程度がより好ましい。 After drying, the developed film is preferably heat-treated (post-baked) in order to sufficiently cure the film. The heating temperature of the postbake is preferably 100 to 300 ° C, more preferably 150 to 250 ° C. The heating time is preferably about 2 minutes to 1 hour, more preferably about 3 minutes to 30 minutes.
次に、本発明の感光性組成物により形成される被膜の各波長領域における透過率について説明する。 Next, the transmittance in each wavelength region of the coating film formed by the photosensitive composition of the present invention will be described.
[透過率が50%以上である波長]
本発明の感光性組成物は、膜厚1.0μmの被膜を形成した際に、波長420~520nmにおける透過率が50%以上である。
指紋認証精度の観点から、波長420~530nmにおける透過率が50%以上であることが好ましく、波長420~540nmにおける透過率が50%以上であることがより好ましい。波長570nmより低波長側で幅広い波長域の光を透過させることで、指紋認証精度が向上する。
[Wavelength with transmittance of 50% or more]
The photosensitive composition of the present invention has a transmittance of 50% or more at a wavelength of 420 to 520 nm when a film having a film thickness of 1.0 μm is formed.
From the viewpoint of fingerprint authentication accuracy, the transmittance at a wavelength of 420 to 530 nm is preferably 50% or more, and more preferably 50% or more at a wavelength of 420 to 540 nm. Fingerprint authentication accuracy is improved by transmitting light in a wide wavelength range on the wavelength side lower than the wavelength of 570 nm.
前記被膜の分光特性、膜厚の測定方法を以下に示す。 The spectral characteristics of the coating and the method for measuring the film thickness are shown below.
(膜厚の測定)
本発明の感光性組成物をスピンコート法により、乾燥後の膜厚が1.0μmとなるようにガラス基板上に塗布し、90℃2分間ホットプレートで乾燥後、超高圧水銀ランプを用い、100μm角の正方形パターンのフォトマスクを介して50mJ/cm2の露光量の違う基板をそれぞれ作成した。その後、この基板を23℃の0.04質量%水酸化カリウム水溶液を用いてスプレー現像した後、イオン交換水で洗浄、風乾し、クリーンオーブン中230℃で30分間加熱して基板上に正方形のパターンを形成した。スプレー現像は、それぞれの感光性組成物での被膜について、スプレー現像は、現像残りがなくなるパターン形成可能な最短時間で行った。その後、Dektak 3030(日本真空技術社製)を用いて、任意の場所5点を測定しその平均値を膜厚とした。
なお、上記膜厚1.0μmとは、本発明が属する技術分野において許容される誤差の範囲を含むものとする。具体的には、膜厚1.0μm±0.1μmの範囲であることを意味する。
(Measurement of film thickness)
The photosensitive composition of the present invention was applied onto a glass substrate by a spin coating method so that the film thickness after drying was 1.0 μm, dried on a hot plate at 90 ° C. for 2 minutes, and then used with an ultrahigh pressure mercury lamp. Substrates with different exposures of 50 mJ / cm 2 were prepared through a photomask having a square pattern of 100 μm square. Then, this substrate was spray-developed with a 0.04 mass% potassium hydroxide aqueous solution at 23 ° C., washed with ion-exchanged water, air-dried, and heated in a clean oven at 230 ° C. for 30 minutes to form a square on the substrate. Formed a pattern. The spray development was performed on the coating film of each photosensitive composition in the shortest time during which a pattern could be formed with no development residue. Then, using Dektak 3030 (manufactured by Nippon Vacuum Technology Co., Ltd.), 5 points at arbitrary locations were measured, and the average value was taken as the film thickness.
The film thickness of 1.0 μm includes a range of errors allowed in the technical field to which the present invention belongs. Specifically, it means that the film thickness is in the range of 1.0 μm ± 0.1 μm.
(透過率の測定)
膜厚を測定した被膜を、OSP-SP100(オリンパス社製)を用いて、各波長における被膜の厚み方向の透過率を測定した。
(Measurement of transmittance)
For the film whose film thickness was measured, the transmittance in the thickness direction of the film at each wavelength was measured using OSP-SP100 (manufactured by Olympus Corporation).
[透過率が80%以上である波長]
本発明の感光性組成物は、指紋認証精度の観点から、膜厚1.0μmの被膜を形成した際に、波長450~490nmの透過率が80%以上であることが好ましく、波長450~500nmにおける透過率が80%以上であることがより好ましく、波長450~510nmにおける透過率が80%以上であることがさらに好ましい。波長570nmより低波長側で幅広い波長域の光を透過させ、かつ高透過率にすることで指紋認証精度が向上する。
[Wavelength with transmittance of 80% or more]
From the viewpoint of fingerprint authentication accuracy, the photosensitive composition of the present invention preferably has a transmittance of 80% or more at a wavelength of 450 to 490 nm and a wavelength of 450 to 500 nm when a film having a film thickness of 1.0 μm is formed. It is more preferable that the transmittance in the above is 80% or more, and it is further preferable that the transmittance at a wavelength of 450 to 510 nm is 80% or more. Fingerprint authentication accuracy is improved by transmitting light in a wide wavelength range on the wavelength side lower than the wavelength of 570 nm and increasing the transmittance.
[波長570~730nmの透過率]
本発明の感光性組成物は、膜厚1.0μmの被膜を形成した際に、波長570~730nmの光を透過しないことが好ましい。身体組織に対して、透過性がある程度高い波長660nm付近の光の透過を抑制することで、指紋認証の精度が向上する。
[Transmittance with wavelength of 570 to 730 nm]
It is preferable that the photosensitive composition of the present invention does not transmit light having a wavelength of 570 to 730 nm when a film having a film thickness of 1.0 μm is formed. The accuracy of fingerprint authentication is improved by suppressing the transmission of light having a wavelength of around 660 nm, which has a high transparency to some extent, to the body tissue.
[波長730nmより長波長領域の透過率]
本発明の感光性組成物は、膜厚1.0μmの被膜を形成した際に、波長730nmより長波長領域の光を遮断することが好ましい。身体組織に対して、透過性が高い近赤外光を遮断することで、ノイズの発生を抑制し指紋認証の精度が向上する。
波長730nmより長波長領域の光を遮断するには、上述の近赤外線吸収剤を用いることで達成できる。
[Transmittance in the wavelength region longer than the wavelength of 730 nm]
The photosensitive composition of the present invention preferably blocks light in a wavelength region longer than the wavelength of 730 nm when a film having a film thickness of 1.0 μm is formed. By blocking near-infrared light with high transparency to body tissues, the generation of noise is suppressed and the accuracy of fingerprint authentication is improved.
Blocking light in a wavelength region longer than 730 nm can be achieved by using the above-mentioned near-infrared absorber.
<指紋認証センサ>
本発明の指紋認証センサは、本発明の光学フィルタを備える。
本発明の指紋認証センサの構成としては、本発明の光学フィルタを備えられた構成であり、指紋認証センサとして機能する構成であれば特に限定されない。例えば、以下のような構成が挙げられる。
<Fingerprint authentication sensor>
The fingerprint authentication sensor of the present invention includes the optical filter of the present invention.
The configuration of the fingerprint authentication sensor of the present invention is not particularly limited as long as it is a configuration provided with the optical filter of the present invention and functions as a fingerprint authentication sensor. For example, the following configuration can be mentioned.
基板上に、CCDイメ-ジセンサ、CMOSイメ-ジセンサ、または有機CMOSイメ-ジセンサ等の受光エリアを構成する複数のフォトダイオ-ド、およびポリシリコン等からなる転送電極を有し、前記フォトダイオ-ド、及び前記転送電極上にフォトダイオ-ドの受光部のみ開口したタングステン等からなる遮光膜を有し、遮光膜上に遮光膜全面およびフォトダイオ-ド受光部を覆うように形成された窒化シリコン等からなるデバイス保護膜を有し、前記デバイス保護膜上に、本発明の光学フィルタを有する構成である。
さらに、上記デバイス保護層上であって光学フィルタの下(基板上に近い側)に集光手段(例えば、マイクロレンズ等。以下同じ)を有する構成や、光学フィルタ上に集光手段を有する構成等であってもよい。また、特開2015-196465号公報、特開2017-194676号公報、特表2019-512762号公報を参酌することができる。
The substrate has a plurality of photodiodes constituting a light receiving area such as a CCD image sensor, a CMOS image sensor, or an organic CMOS image sensor, and a transfer electrode made of polysilicon or the like. A light-shielding film made of tungsten or the like with only the light-receiving part of the photodiode opened on the transfer electrode, and nitrided on the light-shielding film so as to cover the entire surface of the light-shielding film and the light-receiving part of the photodiode. It has a device protective film made of silicon or the like, and has an optical filter of the present invention on the device protective film.
Further, a configuration having a condensing means (for example, a microlens or the like; the same applies hereinafter) on the device protective layer under the optical filter (the side closer to the substrate), or a configuration having a condensing means on the optical filter. And so on. Further, Japanese Patent Application Laid-Open No. 2015-196465, Japanese Patent Application Laid-Open No. 2017-194676, and Japanese Patent Application Laid-Open No. 2019-512762 can be referred to.
なお、前記有機CMOSイメ-ジセンサは、光電変換層として薄膜のパンクロ感光性有機光電変換膜とCMOS信号読み出し基板を含んで構成され、光を捕捉しそれを電気信号に変換する役割を有機材料が担い、電気信号を外部に取り出す役割を無機材料が担う2層構成のハイブリット構造であり、原理的には入射光に対して開口率を100%にすることができる。有機光電変換膜は、構造フリ-の連続膜でCMOS信号読み出し基板上に敷設できるため、高価な微細加工を必要とせず、画素の微細化に適している。 The organic CMOS image sensor includes a thin-film panchromatic photosensitive organic photoelectric conversion film and a CMOS signal readout substrate as a photoelectric conversion layer, and the organic material plays a role of capturing light and converting it into an electric signal. It is a two-layer hybrid structure in which an inorganic material plays a role of taking out an electric signal to the outside, and in principle, the aperture ratio can be set to 100% with respect to incident light. Since the organic photoelectric conversion film is a continuous film of structural free and can be laid on a CMOS signal readout substrate, it does not require expensive microfabrication and is suitable for pixel miniaturization.
<画像表示装置>
本発明の画像表示装置は、本発明の指紋認証センサを画像表示ディスプレイ内部に備える。
本発明の画像表示装置の構成は、画像表示ディスプレイ上で指紋認証を行うことができれば、特に限定されない。例えば、特開2015-196465号公報、特開2020-35327号公報、特開2020-92080号公報を参酌することができる。図1は、本発明の指紋認証センサを画像表示ディスプレイ内部に備えた画像表示装置の模式的断面図である。ディスプレイパネル100は、基板11、駆動層10、指紋認証センサ層20、OLED(有機発光ダイオード)発光層30、カバーガラス層40を含む。
<Image display device>
The image display device of the present invention includes the fingerprint authentication sensor of the present invention inside the image display display.
The configuration of the image display device of the present invention is not particularly limited as long as fingerprint authentication can be performed on the image display display. For example, Japanese Patent Application Laid-Open No. 2015-196465, Japanese Patent Application Laid-Open No. 2020-35527, and Japanese Patent Application Laid-Open No. 2020-92080 can be referred to. FIG. 1 is a schematic cross-sectional view of an image display device provided with the fingerprint authentication sensor of the present invention inside an image display display. The
基板11は、ガラス、またはプラスチック等が挙げられる。
Examples of the
駆動層10は、OLED発光層30および指紋認証センサ層20の発光および受光の機能を損なわないように基板11と指紋認証センサ層20との間に設けられ、指紋認証センサ層20およびOLED発光層30の電気信号を入出力するための多用なトランジスタアレイ及び多層配線が設けられた層間絶縁膜を含む。
The
OLED発光層30は、光33を発光するひとつ以上のOLED31を含み、画像を表示するための領域であると同時に指紋認証のための光を発光する領域である。OLED31は、有機発光部とその上下部にそれぞれ電極を有している。
The OLED
指紋認証センサ層20は、少なくともひとつ以上の指紋認証センサ21を含み、指紋認証センサ21が、OLED31で発光された光33の少なくとも一部のうち認証ターゲットである指によって反射された光23の少なくとも一部を感知する。
The fingerprint
OLED発光層30の上面には、カバーガラス層40が配置され下部構造を保護し、ディスプレイ表面を形成する。
A
本発明の画像表示装置は、例えば、スマートフォン、タブレット端末、ノートPC等指紋認証を必要とする機器に制限無く使用できる。 The image display device of the present invention can be used without limitation for devices that require fingerprint authentication, such as smartphones, tablet terminals, and notebook PCs.
以下、実施例で本発明をより具体的に説明する。ただし、本発明はこれらに限定されない。なお、「部」は「質量部」、「%」は「質量%」である。 Hereinafter, the present invention will be described in more detail with reference to Examples. However, the present invention is not limited to these. In addition, "part" is "mass part", and "%" is "mass%".
実施例に先立ち、各測定方法について説明する。 Prior to the embodiment, each measurement method will be described.
樹脂の重量平均分子量(Mw)、数平均分子量(Mn)、酸価(mgKOH/g)、アミン価(mgKOH/g)は以下の通りである。 The weight average molecular weight (Mw), number average molecular weight (Mn), acid value (mgKOH / g), and amine value (mgKOH / g) of the resin are as follows.
(アルカリ可溶性樹脂、および分散樹脂の平均分子量)
アルカリ可溶性樹脂、および分散樹脂の数平均分子量(Mn)、重量平均分子量(Mw)は、RI検出器を装備したゲルパーミエーションクロマトグラフィー(GPC)で測定した。装置としてHLC-8220GPC(東ソー社製)を用い、分離カラムを2本直列に繋ぎ、両方の充填剤には「TSK-GEL SUPER HZM-N」を2連でつなげて使用し、オーブン温度40℃、溶離液としてテトラヒドロフラン(THF)溶液を用い、流速0.35ml/minで測定した。サンプルは1wt%の上記溶離液からなる溶剤に溶解し、20マイクロリットル注入した。分子量は、ポリスチレン換算値である。
(Average molecular weight of alkali-soluble resin and dispersed resin)
The number average molecular weight (Mn) and weight average molecular weight (Mw) of the alkali-soluble resin and the dispersed resin were measured by gel permeation chromatography (GPC) equipped with an RI detector. Using HLC-8220GPC (manufactured by Tosoh Co., Ltd.) as an apparatus, two separation columns are connected in series, and "TSK-GEL SUPER HZM-N" is connected in two for both fillers, and the oven temperature is 40 ° C. , Tetrahydrofuran (THF) solution was used as an eluent, and the measurement was performed at a flow rate of 0.35 ml / min. The sample was dissolved in a solvent consisting of 1 wt% of the above eluent and injected in 20 microliters. The molecular weight is a polystyrene-equivalent value.
(アルカリ可溶性樹脂、および分散樹脂の酸価)
アルカリ可溶性樹脂、および分散樹脂溶液0.5~1gに、アセトン80ml及び水10mlを加えて攪拌して均一に溶解させ、0.1mol/LのKOH水溶液を滴定液として、自動滴定装置(「COM-555」平沼産業社製)を用いて滴定し、酸価(mgKOH/g)を測定した。そして、樹脂溶液の酸価と樹脂溶液の不揮発分濃度から、樹脂の不揮発分あたりの酸価を算出した。
(Acid value of alkali-soluble resin and dispersed resin)
80 ml of acetone and 10 ml of water are added to 0.5 to 1 g of an alkali-soluble resin and a dispersed resin solution, and the mixture is stirred to uniformly dissolve the solution. -555 ”manufactured by Hiranuma Sangyo Co., Ltd.) was used for titration, and the acid value (mgKOH / g) was measured. Then, the acid value per non-volatile component of the resin was calculated from the acid value of the resin solution and the non-volatile content concentration of the resin solution.
<化学式(1)で表される顔料(A-1)の製造例>
(微細化した顔料(A-1-1))
化学式(1)で表される結晶構造がα型のC.I.Pigment Blue15:2(トーヨーカラー社製「リオノールブルー7255-PS」)100部、粉砕した塩化ナトリウム1,000部、およびジエチレングリコール100部をステンレス製1ガロンニーダー(井上製作所社製)に仕込み、50℃で12時間混練した。この混合物を温水3,000部に投入し、約70℃に加熱しながらハイスピードミキサーで約1時間攪拌してスラリー状とし、濾過、水洗をくりかえして塩化ナトリウムおよび溶剤を除いた後、80℃で24時間乾燥し、微細化した顔料(A-1-1)を得た。
<Production example of pigment (A-1) represented by chemical formula (1)>
(Miniaturized pigment (A-1-1))
The crystal structure represented by the chemical formula (1) is α-type C.I. I. 100 parts of Pigment Blue 15: 2 (Toyo Color Co., Ltd. "Rionol Blue 7255-PS"), 1,000 parts of crushed sodium chloride, and 100 parts of diethylene glycol were charged into a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho), and 50 parts were charged. Kneaded at ° C for 12 hours. This mixture is poured into 3,000 parts of warm water, stirred with a high speed mixer for about 1 hour while heating to about 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and solvent, and then 80 ° C. The mixture was dried for 24 hours to obtain a finely divided pigment (A-1-1).
(微細化した顔料(A-1-2))
化学式(1)で表される結晶構造がβ型のC.I.Pigment Blue15:3(トーヨーカラー株式会社製「リオノールブルーFG7351」)100部、粉砕した塩化ナトリウム1,000部、およびジエチレングリコール100部をステンレス製1ガロンニーダー(井上製作所社製)に仕込み、50℃で12時間混練した。この混合物を温水3,000部に投入し、約70℃に加熱しながらハイスピードミキサーで約1時間攪拌してスラリー状とし、濾過、水洗をくりかえして塩化ナトリウムおよび溶剤を除いた後、80℃で24時間乾燥し、微細化した顔料(A-1-2)を得た。
(Miniaturized pigment (A-1-2))
The crystal structure represented by the chemical formula (1) is β-type C.I. I. Pigment Blue 15: 3 (“Rionol Blue FG7351” manufactured by Toyo Color Co., Ltd.), 1,000 parts of crushed sodium chloride, and 100 parts of diethylene glycol were charged in a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho) at 50 ° C. Kneaded for 12 hours. This mixture is poured into 3,000 parts of warm water, stirred with a high speed mixer for about 1 hour while heating to about 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and solvent, and then 80 ° C. The mixture was dried for 24 hours to obtain a finely divided pigment (A-1-2).
(微細化した顔料(A-1-3))
化学式(1)で表される結晶構造がβ型のC.I.Pigment Blue15:4(トーヨーカラー株式会社製「リオノールブルーFG-7400-G」)100部、粉砕した塩化ナトリウム1,000部、およびジエチレングリコール100部をステンレス製1ガロンニーダー(井上製作所社製)に仕込み、50℃で12時間混練した。この混合物を温水3,000部に投入し、約70℃に加熱しながらハイスピードミキサーで約1時間攪拌してスラリー状とし、濾過、水洗をくりかえして塩化ナトリウムおよび溶剤を除いた後、80℃で24時間乾燥し、微細化した顔料(A-1-3)を得た。
(Miniaturized pigment (A-1-3))
The crystal structure represented by the chemical formula (1) is β-type C.I. I. Pigment Blue 15: 4 ("Rionol Blue FG-7400-G" manufactured by Toyo Color Co., Ltd.), 1,000 parts of crushed sodium chloride, and 100 parts of diethylene glycol in a 1-gallon kneader made of stainless steel (manufactured by Inoue Seisakusho). It was charged and kneaded at 50 ° C. for 12 hours. This mixture is poured into 3,000 parts of warm water, stirred with a high speed mixer for about 1 hour while heating to about 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and solvent, and then 80 ° C. The mixture was dried for 24 hours to obtain a finely divided pigment (A-1-3).
(微細化した顔料(A-1-4))
化学式(1)で表される結晶構造がε型のC.I.Pigment Blue15:6(トーヨーカラー株式会社製「リオノールブルーES」)100部、粉砕した塩化ナトリウム1,000部、およびジエチレングリコール100部をステンレス製1ガロンニーダー(井上製作所社製)に仕込み、50℃で12時間混練した。この混合物を温水3,000部に投入し、約70℃に加熱しながらハイスピードミキサーで約1時間攪拌してスラリー状とし、濾過、水洗をくりかえして塩化ナトリウムおよび溶剤を除いた後、80℃で24時間乾燥し、微細化した顔料(A-1-4)を得た。
(Miniaturized pigment (A-1-4))
C.I., whose crystal structure represented by the chemical formula (1) is ε-type. I. Pigment Blue 15: 6 (“Rionol Blue ES” manufactured by Toyo Color Co., Ltd.), 1,000 parts of crushed sodium chloride, and 100 parts of diethylene glycol are charged in a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho) at 50 ° C. Kneaded for 12 hours. This mixture is poured into 3,000 parts of warm water, stirred with a high speed mixer for about 1 hour while heating to about 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and solvent, and then 80 ° C. The mixture was dried for 24 hours to obtain a finely divided pigment (A-1-4).
<その他顔料(A-2)の製造例>
(微細化した顔料(A-2-1))
C.I.Pigment Yellow150(ランクセス社製「Yellow Pigment E4GN」)100部、粉砕した塩化ナトリウム1,000部、およびジエチレングリコール100部をステンレス製1ガロンニーダー(井上製作所社製)に仕込み、50℃で12時間混練した。この混合物を温水3,000部に投入し、約70℃に加熱しながらハイスピードミキサーで約1時間攪拌してスラリー状とし、濾過、水洗をくりかえして塩化ナトリウムおよび溶剤を除いた後、80℃で24時間乾燥し、微細化した顔料(A-2-1)を得た。
<Production example of other pigment (A-2)>
(Miniaturized pigment (A-2-1))
C. I. 100 parts of Pigment Yellow 150 (“Yellou Pigment E4GN” manufactured by LANXESS), 1,000 parts of crushed sodium chloride, and 100 parts of diethylene glycol were placed in a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho) and kneaded at 50 ° C. for 12 hours. .. This mixture is poured into 3,000 parts of warm water, stirred with a high speed mixer for about 1 hour while heating to about 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and solvent, and then 80 ° C. The mixture was dried for 24 hours to obtain a finely divided pigment (A-2-1).
(微細化した顔料(A-2-2))
C.I.Pigment Red177(シニック社製「シニックスレッドSR3C」)100部、粉砕した塩化ナトリウム1,000部、およびジエチレングリコール100部をステンレス製1ガロンニーダー(井上製作所社製)に仕込み、50℃で12時間混練した。この混合物を温水3,000部に投入し、約70℃に加熱しながらハイスピードミキサーで約1時間攪拌してスラリー状とし、濾過、水洗をくりかえして塩化ナトリウムおよび溶剤を除いた後、80℃で24時間乾燥し、微細化した顔料(A-2-2)を得た。
(Miniaturized pigment (A-2-2))
C. I. 100 parts of Pigment Red 177 (Synic's "Sinic Thread SR3C"), 1,000 parts of crushed sodium chloride, and 100 parts of diethylene glycol were placed in a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho) and kneaded at 50 ° C. for 12 hours. .. This mixture is poured into 3,000 parts of warm water, stirred with a high speed mixer for about 1 hour while heating to about 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and solvent, and then 80 ° C. The mixture was dried for 24 hours to obtain a finely divided pigment (A-2-2).
(微細化した顔料(A-2-3))
C.I.Pigmen Green7(トーヨーカラー株式会社製「リオノールグリーン8390」)100部、粉砕した塩化ナトリウム1,000部、およびジエチレングリコール100部をステンレス製1ガロンニーダー(井上製作所社製)に仕込み、50℃で12時間混練した。この混合物を温水3,000部に投入し、約70℃に加熱しながらハイスピードミキサーで約1時間攪拌してスラリー状とし、濾過、水洗をくりかえして塩化ナトリウムおよび溶剤を除いた後、80℃で24時間乾燥し、微細化した顔料(A-2-3)を得た。
(Miniaturized pigment (A-2-3))
C. I. 100 parts of Pigment Green7 (“Rionol Green 8390” manufactured by Toyo Color Co., Ltd.), 1,000 parts of crushed sodium chloride, and 100 parts of diethylene glycol are charged in a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho) and 12 at 50 ° C. Time kneaded. This mixture is poured into 3,000 parts of warm water, stirred with a high speed mixer for about 1 hour while heating to about 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and solvent, and then 80 ° C. The mixture was dried for 24 hours to obtain a finely divided pigment (A-2-3).
(微細化した顔料(A-2-4))
C.I.Pigmen Green36(トーヨーカラー株式会社製「リオノールグリーン6YK」)100部、粉砕した塩化ナトリウム1,000部、およびジエチレングリコール100部をステンレス製1ガロンニーダー(井上製作所社製)に仕込み、50℃で12時間混練した。この混合物を温水3,000部に投入し、約70℃に加熱しながらハイスピードミキサーで約1時間攪拌してスラリー状とし、濾過、水洗をくりかえして塩化ナトリウムおよび溶剤を除いた後、80℃で24時間乾燥し、微細化した顔料(A-2-4)を得た。
(Miniaturized pigment (A-2-4))
C. I. 100 parts of Pigmen Green36 (“Rionol Green 6YK” manufactured by Toyo Color Co., Ltd.), 1,000 parts of crushed sodium chloride, and 100 parts of diethylene glycol are charged in a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho) and 12 at 50 ° C. Time kneaded. This mixture is poured into 3,000 parts of warm water, stirred with a high speed mixer for about 1 hour while heating to about 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and solvent, and then 80 ° C. The mixture was dried for 24 hours to obtain a finely divided pigment (A-2-4).
(微細化した顔料(A-2-5))
C.I.Pigmen Green58(DIC社製「FASTGEN GREEN A110」)100部、塩化ナトリウム1,200部、およびジエチレングリコール120部をステンレス製1ガロンニーダー(井上製作所製)に仕込み、70℃で6時間混練した。この混練物を3,000部の温水に投入し、70℃に加熱しながら1時間撹拌してスラリー状とし、濾過、水洗を繰り返して塩化ナトリウムおよびジエチレングリコールを除いた後、80℃で一昼夜乾燥し、微細化した微細化した顔料(A-2-5)を得た。
(Miniaturized pigment (A-2-5))
C. I. 100 parts of Pigment Green 58 (“FASTGEN GREEN A110” manufactured by DIC Corporation), 1,200 parts of sodium chloride, and 120 parts of diethylene glycol were charged in a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho) and kneaded at 70 ° C. for 6 hours. This kneaded product was put into 3,000 parts of warm water, stirred for 1 hour while heating at 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and diethylene glycol, and then dried at 80 ° C. for 24 hours. , A finely divided pigment (A-2-5) was obtained.
(微細化した顔料(A-2-6))
C.I.Pigmen Green59(DIC社製)100部、塩化ナトリウム1,200部、およびジエチレングリコール120部をステンレス製1ガロンニーダー(井上製作所製)に仕込み、70℃で6時間混練した。この混練物を3,000部の温水に投入し、70℃に加熱しながら1時間撹拌してスラリー状とし、濾過、水洗を繰り返して塩化ナトリウムおよびジエチレングリコールを除いた後、80℃で一昼夜乾燥し、微細化した微細化した顔料(A-2-6)を得た。
(Miniaturized pigment (A-2-6))
C. I. 100 parts of Pigmen Green 59 (manufactured by DIC), 1,200 parts of sodium chloride, and 120 parts of diethylene glycol were charged in a stainless steel 1-gallon kneader (manufactured by Inoue Seisakusho) and kneaded at 70 ° C. for 6 hours. This kneaded product was put into 3,000 parts of warm water, stirred for 1 hour while heating at 70 ° C. to form a slurry, filtered and washed with water repeatedly to remove sodium chloride and diethylene glycol, and then dried at 80 ° C. for 24 hours. , A finely divided pigment (A-2-6) was obtained.
(微細化した顔料(A-2-7))
特開2017-111398号公報の実施例に記載された方法により、下記化学式(2)で表される微細化した顔料(A-2-7)を作製した。
(Miniaturized pigment (A-2-7))
A finely divided pigment (A-2-7) represented by the following chemical formula (2) was produced by the method described in Examples of JP-A-2017-1111398.
化学式(2)
(微細化した顔料(A-2-8))
特開2017-111398号公報の実施例に記載された方法により、下記化学式(3)で表される微細化した顔料(A-2-8)を作製した。
(Miniaturized pigment (A-2-8))
A finely divided pigment (A-2-8) represented by the following chemical formula (3) was produced by the method described in Examples of JP-A-2017-1111398.
化学式(3)
<アルカリ可溶性樹脂(B)の製造例>
(アルカリ可溶性樹脂(B-1)溶液)
セパラブル4口フラスコに温度計、冷却管、窒素ガス導入管、滴下管および撹拌装置を取り付けた反応容器にシクロヘキサノーン196部を仕込み、80℃に昇温し、反応容器内を窒素置換した後、滴下管より、n-ブチルメタクリレート37.2部、2-ヒドロキシエチルメタクリレート12.9部、メタクリル酸12.0部、パラクミルフェノールエチレンオキサイド変性アクリレート(東亞合成社製「アロニックスM110」)20.7部、2,2’-アゾビスイソブチロニトリル1.1部の混合物を2時間かけて滴下した。滴下終了後、更に3時間反応を継続し、アクリル樹脂の溶液を得た。室温まで冷却した後、樹脂溶液約2部をサンプリングして180℃、20分間加熱乾燥して不揮発分を測定し、先に合成した樹脂溶液に不揮発分が20%になるようにPGMAcを添加してアルカリ可溶性樹脂(B-1)溶液を調製した。重量平均分子量(Mw)は26,000であった。
<Production example of alkali-soluble resin (B)>
(Alkali-soluble resin (B-1) solution)
196 parts of cyclohexanone was placed in a reaction vessel equipped with a thermometer, a cooling tube, a nitrogen gas introduction tube, a dropping tube and a stirrer in a separable 4-necked flask, the temperature was raised to 80 ° C., and the inside of the reaction vessel was replaced with nitrogen. , 37.2 parts of n-butyl methacrylate, 12.9 parts of 2-hydroxyethyl methacrylate, 12.0 parts of methacrylic acid, paracumylphenol ethylene oxide-modified acrylate (“Aronix M110” manufactured by Toa Synthetic Co., Ltd.) 20. A mixture of 7 parts and 1.1 parts of 2,2'-azobisisobutyronitrile was added dropwise over 2 hours. After completion of the dropping, the reaction was continued for another 3 hours to obtain a solution of acrylic resin. After cooling to room temperature, about 2 parts of the resin solution is sampled and dried by heating at 180 ° C. for 20 minutes to measure the non-volatile content, and PGMAc is added to the previously synthesized resin solution so that the non-volatile content becomes 20%. Prepared an alkali-soluble resin (B-1) solution. The weight average molecular weight (Mw) was 26,000.
(アルカリ可溶性樹脂(B-2)溶液)
セパラブル4口フラスコに温度計、冷却管、窒素ガス導入管、滴下管および撹拌装置を取り付けた反応容器にシクロヘキサノン207部を仕込み、80℃に昇温し、反応容器内を窒素置換した後、滴下管より、メタクリル酸20部、パラクミルフェノールエチレンオキサイド変性アクリレート(東亜合成社製アロニックスM110)20部、メタクリル酸メチル45部、2-ヒドロキシエチルメタクリレート8.5部、及び2,2'-アゾビスイソブチロニトリル1.33部の混合物を2時間かけて滴下した。滴下終了後、更に3時間反応を継続し、共重合体樹脂溶液を得た。次に得られた共重合体溶液全量に対して、窒素ガスを停止し乾燥空気を1時間注入しながら攪拌したのちに、室温まで冷却した後、2-メタクリロイルオキシエチルイソシアネート(昭和電工社製カレンズMOI)6.5部、ラウリン酸ジブチル錫0.08部、シクロヘキサノン26部の混合物を70℃で3時間かけて滴下した。滴下終了後、更に1時間反応を継続し、アクリル樹脂の溶液を得た。室温まで冷却した後、樹脂溶液約2部をサンプリングして180℃、20分間加熱乾燥して不揮発分を測定し、先に合成した樹脂溶液に不揮発分が20%になるようにシクロヘキサノンを添加してアルカリ可溶性樹脂(B-2)溶液を調製した。重量平均分子量(Mw)は18,000であった。
(Alkali-soluble resin (B-2) solution)
207 parts of cyclohexanone was charged in a reaction vessel equipped with a thermometer, a cooling tube, a nitrogen gas introduction tube, a dropping tube and a stirrer in a separable 4-neck flask, the temperature was raised to 80 ° C., the inside of the reaction vessel was replaced with nitrogen, and then dropped. From the tube, 20 parts of methacrylic acid, 20 parts of paracumylphenol ethylene oxide modified acrylate (Aronix M110 manufactured by Toa Synthetic Co., Ltd.), 45 parts of methyl methacrylate, 8.5 parts of 2-hydroxyethyl methacrylate, and 2,2'-azobis. A mixture of 1.33 parts of isobutyronitrile was added dropwise over 2 hours. After completion of the dropping, the reaction was continued for another 3 hours to obtain a copolymer resin solution. Next, for the entire amount of the obtained copolymer solution, nitrogen gas was stopped, dry air was injected for 1 hour, and the mixture was stirred, cooled to room temperature, and then 2-methacryloyloxyethyl isocyanate (Showa Denko's Karenz). A mixture of 6.5 parts of MOI), 0.08 part of dibutyltin laurate and 26 parts of cyclohexanone was added dropwise at 70 ° C. over 3 hours. After completion of the dropping, the reaction was continued for another 1 hour to obtain a solution of acrylic resin. After cooling to room temperature, about 2 parts of the resin solution is sampled and dried by heating at 180 ° C. for 20 minutes to measure the non-volatile content, and cyclohexanone is added to the previously synthesized resin solution so that the non-volatile content becomes 20%. Prepared an alkali-soluble resin (B-2) solution. The weight average molecular weight (Mw) was 18,000.
(アルカリ可溶性樹脂(B-3)溶液)
温度計、冷却管、窒素ガス導入管、滴下管及び撹拌装置を備えたセパラブル4口フラスコにシクロヘキサノン370部を仕込み、80℃に昇温し、フラスコ内を窒素置換した後、滴下管より、パラクミルフェノールエチレンオキサイド変性アクリレート(東亜合成社製アロニックスM110)18部、ベンジルメタクリレート10部、グリシジルメタクリレート18.2部、メタクリル酸メチル25部、及び2,2'-アゾビスイソブチロニトリル2.0部の混合物を2時間かけて滴下した。滴下後、更に100℃で3時間反応させた後、アゾビスイソブチロニトリル1.0部をシクロヘキサノン50部で溶解させたものを添加し、更に100℃で1時間反応を続けた。次に、容器内を空気置換に替エアークリル酸9.3部(グリシジル基の100%)にトリスジメチルアミノフェノール0.5部及びハイドロキノーン0.1部を上記容器内に投入し、120℃で6時間反応を続け不揮発分酸価0.5となったところで反応を終了し、アクリル樹脂の溶液を得た。更に、引き続きテトラヒドロ無水フタル酸19.5部(生成した水酸基の100%)、トリエチルアミン0.5部を加え120℃で3.5時間反応させアクリル樹脂の溶液を得た。室温まで冷却した後、樹脂溶液約2gをサンプリングして180℃、20分加熱乾燥して不揮発分を測定し、先に合成した樹脂溶液に不揮発分が20質量%になるようにPGMAcを添加してアルカリ可溶性樹脂(B-3)溶液を調製した。重量平均分子量(Mw)は19,000であった。
(Alkali-soluble resin (B-3) solution)
370 parts of cyclohexanone was placed in a separable 4-necked flask equipped with a thermometer, a cooling tube, a nitrogen gas introduction tube, a dropping tube and a stirrer, the temperature was raised to 80 ° C. 18 parts of Milphenol ethylene oxide modified acrylate (Aronix M110 manufactured by Toa Synthetic Co., Ltd.), 10 parts of benzyl methacrylate, 18.2 parts of glycidyl methacrylate, 25 parts of methyl methacrylate, and 2,2'-azobisisobutyronitrile 2.0. The mixture of parts was added dropwise over 2 hours. After the dropping, the reaction was further carried out at 100 ° C. for 3 hours, 1.0 part of azobisisobutyronitrile dissolved in 50 parts of cyclohexanone was added, and the reaction was further continued at 100 ° C. for 1 hour. Next, the inside of the container was replaced with air, and 0.5 part of trisdimethylaminophenol and 0.1 part of hydroquinone were added to 9.3 parts of air crilic acid (100% of glycidyl group) into the above container, and the temperature was 120 ° C. The reaction was continued for 6 hours, and when the non-volatile acid value reached 0.5, the reaction was terminated to obtain a solution of acrylic resin. Further, 19.5 parts of tetrahydrophthalic anhydride (100% of the generated hydroxyl group) and 0.5 part of triethylamine were subsequently added and reacted at 120 ° C. for 3.5 hours to obtain an acrylic resin solution. After cooling to room temperature, about 2 g of the resin solution is sampled, heated and dried at 180 ° C. for 20 minutes to measure the non-volatile content, and PGM Ac is added to the previously synthesized resin solution so that the non-volatile content is 20% by mass. Prepared an alkali-soluble resin (B-3) solution. The weight average molecular weight (Mw) was 19,000.
(アルカリ可溶性樹脂(B-4)溶液)
反応槽として冷却管を付けたセパラブルフラスコを準備し、他方、モノマー滴下槽として、ジメチル-2,2’-[オキシビス(メチレン)]ビス-2-プロペノエート40部、メタクリル酸40部、メタクリル酸メチル120部、t-ブチルパーオキシ2-エチルヘキサノエート( 日本油脂製「パーブチルO」)4部、PGMAc40部をよく攪拌混合したものを準備し、連鎖移動剤滴下槽として、n-ドデカンチオール8部、PGMAc32部をよく攪拌混合したものを準備した。
反応槽にPGMAc395部を仕込み、窒素置換した後、攪拌しながらオイルバスで加熱して反応槽の温度を90℃ まで昇温した。反応槽の温度が90℃ に安定してから、モノマー滴下槽および連鎖移動剤滴下槽から滴下を開始した。滴下は、温度を90℃ に保ちながら、それぞれ135分間かけて行った。滴下が終了してから60分後に昇温を開始して反応槽を110 ℃ にした。3時間110℃を維持した後、セパラブルフラスコにガス導入管を付け、酸素/窒素=5/95(体積比)混合ガスのバブリングを開始した。次いで、反応槽に、メタクリル酸グリシジル7 0 部、2,2’-メチレンビス(4-メチル-6-t-ブチルフェノール)0.4部、トリエチルアミン0.8部を仕込み、そのまま110℃ で12時間反応させた。その後、PGMAc150部を加えて室温まで冷却し、樹脂溶液約2gをサンプリングして180℃、20分加熱乾燥して不揮発分を測定し、先に合成した樹脂溶液に不揮発分が20質量%になるようにPGMAcを添加してアルカリ可溶性樹脂(B-4)溶液を得た。樹脂の重量平均分子量は18,000 、不揮発分当たりの酸価は2mgKOH/gであった。
(Alkali-soluble resin (B-4) solution)
A separable flask with a cooling tube was prepared as a reaction tank, while 40 parts of dimethyl-2,2'-[oxybis (methylene)] bis-2-propenoate, 40 parts of methacrylic acid, and methacrylic acid were prepared as a monomer dropping tank. Prepare a well-stirred mixture of 120 parts of methyl, 4 parts of t-butylperoxy2-ethylhexanoate (“Perbutyl O” manufactured by Nippon Oil & Fats), and 40 parts of PGMAc. Eight parts and 32 parts of PGMAc were well mixed and mixed.
After charging 395 parts of PGMAc in the reaction vessel and substituting with nitrogen, the temperature of the reaction vessel was raised to 90 ° C. by heating with an oil bath while stirring. After the temperature of the reaction tank became stable at 90 ° C., dropping was started from the monomer dropping tank and the chain transfer agent dropping tank. The dropping was carried out over 135 minutes while keeping the temperature at 90 ° C. 60 minutes after the dropping was completed, the temperature was raised to 110 ° C. in the reaction vessel. After maintaining 110 ° C. for 3 hours, a gas introduction tube was attached to the separable flask, and bubbling of the oxygen / nitrogen = 5/95 (volume ratio) mixed gas was started. Next, 70 parts of glycidyl methacrylate, 0.4 parts of 2,2'-methylenebis (4-methyl-6-t-butylphenol), and 0.8 part of triethylamine were charged in the reaction vessel, and the reaction was carried out at 110 ° C. for 12 hours. I let you. After that, 150 parts of PGMAc is added and cooled to room temperature, about 2 g of the resin solution is sampled and dried by heating at 180 ° C. for 20 minutes to measure the non-volatile content, and the non-volatile content becomes 20% by mass in the previously synthesized resin solution. As described above, PGMAc was added to obtain an alkali-soluble resin (B-4) solution. The weight average molecular weight of the resin was 18,000, and the acid value per non-volatile component was 2 mgKOH / g.
(アルカリ可溶性樹脂(B-5)溶液)
撹拌機、温度計、還流冷却管、滴下ロ-トおよび窒素導入管を備えたフラスコに、PGMAc333部を導入し、フラスコ内雰囲気を空気から窒素にした後、100℃に昇温後、ベンジルメタクリレート70.5部(0.40モル)、グリシジルメタクリレート71.1部(0.50モル)、トリシクロデカン骨格のモノメタクリレート(日立化成社製FA-513M)22.0部(0.10モル)および、PGMAc164部からなる混合物にアゾビスイソブチロニトリル3.6部を添加した溶液を滴下ロ-トから2時間かけてフラスコに滴下し、さらに100℃で5時間撹拌し続けた。次に、フラスコ内雰囲気を窒素から空気にし、メタクリル酸43.0部[0.5モル、(本反応に用いたグリシジルメタクリレートのグリシジル基に対して100モル%)]、トリスジメチルアミノメチルフェノール0.9部およびハイドロキノン0.145部をフラスコ内に投入し、110℃で6時間反応を続け不揮発分酸価が1mgKOH/gとなったところで反応を終了した。次に、テトラヒドロフタル無水フタル酸60.9部(0.40モル)、トリエチルアミン0.8部を加え、120℃で3.5時間反応させ酸価80mgKOH/gの感光性透明樹脂溶液を得た。室温まで冷却した後、感光性透明樹脂溶液約2部をサンプリングして180℃、20分加熱乾燥して不揮発分を測定し、先に合成した感光性透明樹脂溶液に不揮発分が20質量%になるようにPGMAcを添加してアルカリ可溶性樹脂(B-5)溶液を調製した。質量平均分子量(Mw)は12,000であった。
(Alkali-soluble resin (B-5) solution)
Introduce 333 parts of PGMAc into a flask equipped with a stirrer, thermometer, reflux condenser, dropping rotor and nitrogen introduction tube, change the atmosphere inside the flask from air to nitrogen, raise the temperature to 100 ° C, and then benzyl methacrylate. 70.5 parts (0.40 mol), 71.1 parts (0.50 mol) of glycidyl methacrylate, monomethacrylate of tricyclodecane skeleton (FA-513M manufactured by Hitachi Chemical Co., Ltd.) 22.0 parts (0.10 mol) A solution prepared by adding 3.6 parts of azobisisobutyronitrile to a mixture consisting of 164 parts of PGMAc was added dropwise to the flask over 2 hours from the dropping rotor, and stirring was continued at 100 ° C. for 5 hours. Next, the atmosphere in the flask was changed from nitrogen to air, and 43.0 parts of methacrylic acid [0.5 mol, (100 mol% with respect to the glycidyl group of glycidyl methacrylate used in this reaction)], trisdimethylaminomethylphenol 0. 9. 9 parts and 0.145 parts of hydroquinone were put into a flask, and the reaction was continued at 110 ° C. for 6 hours, and the reaction was terminated when the non-volatile acid value reached 1 mgKOH / g. Next, 60.9 parts (0.40 mol) of tetrahydrophthalic anhydride and 0.8 parts of triethylamine were added and reacted at 120 ° C. for 3.5 hours to obtain a photosensitive transparent resin solution having an acid value of 80 mgKOH / g. .. After cooling to room temperature, about 2 parts of the photosensitive transparent resin solution was sampled and dried by heating at 180 ° C. for 20 minutes to measure the non-volatile content. PGMAc was added so as to prepare an alkali-soluble resin (B-5) solution. The mass average molecular weight (Mw) was 12,000.
(アルカリ可溶性樹脂(B-6)溶液)
撹拌機、温度計、還流冷却管、滴下ロ-トおよび窒素導入管を備えたフラスコに、PGMAc182部を導入し、フラスコ内雰囲気を空気から窒素にした後、100℃に昇温後、ベンジルメタクリレート70.5部(0.40モル)、メタクリル酸43.0部(0.5モル)、トリシクロデカン骨格のモノメタクリレート(日立化成社製FA-513M)22.0部(0.10モル)およびPGMAc136部からなる混合物にアゾビスイソブチロニトリル3.6部を添加した溶液を滴下ロ-トから2時間かけてフラスコに滴下し、さらに100℃で5時間撹拌し続けた。次に、フラスコ内雰囲気を窒素から空気にし、グリシジルメタクリレート35.5部[0.25モル、(本反応に用いたメタクリル酸のカルボキシル基に対して50モル%)]、トリスジメチルアミノメチルフェノール0.9部およびハイドロキノン0.145部をフラスコ内に投入し、110℃で6時間反応を続け、酸価が79mgKOH/gの感光性透明樹脂溶液を得た。室温まで冷却した後、感光性透明樹脂溶液約2部をサンプリングして180℃、20分加熱乾燥して不揮発分を測定し、先に合成した感光性透明樹脂溶液に不揮発分が20質量%になるようにPGMAcを添加してアルカリ可溶性樹脂(B-6)溶液を調製した。質量平均分子量(Mw)は13,000であった。
(Alkali-soluble resin (B-6) solution)
Introduce 182 parts of PGMAc into a flask equipped with a stirrer, thermometer, reflux condenser, dropping rotor and nitrogen introduction tube, change the atmosphere inside the flask from air to nitrogen, raise the temperature to 100 ° C, and then benzyl methacrylate. 70.5 parts (0.40 mol), 43.0 parts of methacrylic acid (0.5 mol), monomethacrylate of tricyclodecane skeleton (FA-513M manufactured by Hitachi Kasei Co., Ltd.) 22.0 parts (0.10 mol) A solution prepared by adding 3.6 parts of azobisisobutyronitrile to a mixture consisting of 136 parts of PGMac was added dropwise to the flask over 2 hours from the dropping rotor, and stirring was continued at 100 ° C. for 5 hours. Next, the atmosphere in the flask was changed from nitrogen to air, and 35.5 parts of glycidyl methacrylate [0.25 mol, (50 mol% with respect to the carboxyl group of methacrylic acid used in this reaction)], trisdimethylaminomethylphenol 0. 9. 9 parts and 0.145 parts of hydroquinone were put into a flask, and the reaction was continued at 110 ° C. for 6 hours to obtain a photosensitive transparent resin solution having an acid value of 79 mgKOH / g. After cooling to room temperature, about 2 parts of the photosensitive transparent resin solution was sampled and dried by heating at 180 ° C. for 20 minutes to measure the non-volatile content. PGMAc was added so as to prepare an alkali-soluble resin (B-6) solution. The mass average molecular weight (Mw) was 13,000.
<重合性化合物(C-2)の製造例>
(重合性化合物(C-2-1))
四つ口フラスコ内に、ジペンタエリスリトールペンタアクリレート210部、ヘキサメチレンジイソシアネート34部、N,N-ジメチルベンジルアミン0.5部を仕込み、50~70℃の温度で8時間反応させ、IRにより2180cm-1のイソシアネートの吸収の消失を確認した。ついで、メルカプトプロピオン酸21部、4-メトキシフェノール0.6部を仕込み、50~60℃の温度で6時間反応を行い、一般式(1)で表される重合性化合物として、下記化学式(4)で表される重合性化合物(C-2-1)を得た。
<Production example of polymerizable compound (C-2)>
(Polymerizable compound (C-2-1))
In a four-necked flask, 210 parts of dipentaerythritol pentaacrylate, 34 parts of hexamethylene diisocyanate, and 0.5 part of N, N-dimethylbenzylamine were charged, reacted at a temperature of 50 to 70 ° C. for 8 hours, and 2180 cm by IR. It was confirmed that the absorption of isocyanate of -1 disappeared. Then, 21 parts of mercaptopropionic acid and 0.6 part of 4-methoxyphenol were charged and reacted at a temperature of 50 to 60 ° C. for 6 hours, and the following chemical formula (4) was used as the polymerizable compound represented by the general formula (1). ) Was obtained as a polymerizable compound (C-2-1).
化学式(4)
<分散樹脂(F)の製造例>
(分散樹脂(F-1)溶液)
ガス導入管、温度、コンデンサー、攪拌機を備えた反応容器に、メタクリル酸10部、メチルメタクリレート100部、i-ブチルメタクリレート70部、ベンジルメタクリレート20部、PGMAc50部を仕込み、窒素ガスで置換した。反応容器内を50℃に加熱撹拌し、3-メルカプト-1,2-プロパンジオ-ル12部を添加した。90℃に昇温し、2,2’-アゾビスイソブチロニトリル0.1部をPGMAc90部に加えた溶液を添加しながら7時間反応した。不揮発分測定により95%が反応したことを確認した。ピロメリット酸無水物19部、PGMAc50部、シクロヘキサノン50部、触媒として1,8-ジアザビシクロ-[5.4.0]-7-ウンデセン0.4部を追加し、100℃で7時間反応させた。酸価の測定で98%以上の酸無水物がハーフエステル化していることを確認し反応を終了し、不揮発分測定で不揮発分30%となるようPGMAcを加えて希釈し、酸価70mgKOH/g、重量平均分子量8,500の分散樹脂(F-1)溶液を得た。
<Production example of dispersed resin (F)>
(Dispersed resin (F-1) solution)
A reaction vessel equipped with a gas introduction tube, a temperature, a condenser, and a stirrer was charged with 10 parts of methacrylic acid, 100 parts of methyl methacrylate, 70 parts of i-butyl methacrylate, 20 parts of benzyl methacrylate, and 50 parts of PGMAc, and replaced with nitrogen gas. The inside of the reaction vessel was heated and stirred at 50 ° C., and 12 parts of 3-mercapto-1,2-propanediol was added. The temperature was raised to 90 ° C., and the reaction was carried out for 7 hours while adding a solution in which 0.1 part of 2,2'-azobisisobutyronitrile was added to 90 parts of PGMAc. It was confirmed that 95% of the reaction occurred by measuring the non-volatile content. 19 parts of pyromellitic anhydride, 50 parts of PGMAc, 50 parts of cyclohexanone, and 0.4 part of 1,8-diazabicyclo- [5.4.0] -7-undecene were added as a catalyst, and the mixture was reacted at 100 ° C. for 7 hours. .. After confirming that 98% or more of the acid anhydride was half-esterified by measuring the acid value, the reaction was terminated, and PGMAc was added and diluted so that the non-volatile content was 30% by measuring the non-volatile content, and the acid value was 70 mgKOH / g. , A dispersion resin (F-1) solution having a weight average molecular weight of 8,500 was obtained.
<分散体の製造>
(分散体1)
下記の原料を均一になるように攪拌混合した後、直径0.5mmのジルコニアビ-ズを用いて、アイガーミル(アイガージャパン社製「ミニモデルM-250 MKII」)で3時間分散した後、孔径1.0μmのフィルタで濾過し、分散体1を作製した。
微細化した顔料(A-1-1) :12.0部
色素誘導体(E-1) :1.0部
分散樹脂(F-1)溶液 :2.0部
アルカリ可溶樹脂(B-1)溶液 :20.0部
有機溶剤(Q-1) :65.0部
<Manufacturing of dispersion>
(Dispersion 1)
The following raw materials are stirred and mixed so as to be uniform, and then dispersed with an Eiger mill (“Mini Model M-250 MKII” manufactured by Eiger Japan Co., Ltd.) using a zirconia bead having a diameter of 0.5 mm for 3 hours, and then the pore diameter is changed. The dispersion 1 was prepared by filtering with a 1.0 μm filter.
Finely divided pigment (A-1-1): 12.0 parts Dye derivative (E-1): 1.0 part Dispersed resin (F-1) solution: 2.0 parts Alkaline-soluble resin (B-1) Solution: 20.0 parts Organic solvent (Q-1): 65.0 parts
色素誘導体(E-1):下記構造
pcは、フタロシアニン骨格を表す。
有機溶剤(Q-1)は、PGMAc
Dye derivative (E-1): The following structure
pc represents the phthalocyanine skeleton.
The organic solvent (Q-1) is PGMAc.
(分散体2~18)
表1に記載した原料、量を変えた以外は、分散体1と同様にして分散体2~18を作製した。
(Dispersions 2-18)
Dispersions 2 to 18 were prepared in the same manner as in Dispersion 1 except that the raw materials and amounts shown in Table 1 were changed.
<指紋認証センサ用感光性組成物の製造>
[実施例1]
(感光性組成物1)
以下の原料を混合、攪拌し、孔径1.0μmのフィルタで濾過して感光性組成物1を得た。
分散体1 :27.0部
アルカリ可溶性樹脂(B)溶液 :25.0部
重合性化合物(C-2-1) :3.15部
重合性化合物(C-3-1) :2.15部
光重合開始剤(D-1) :0.5部
光重合開始剤(D-2) :0.5部
増感剤(H) :0.2部
エポキシ化合物(I-1) :1.0部
オキセタン化合物(I-2) :1.0部
チオール系連鎖移動剤(J) :0.4部
重合性禁止剤(K) :0.01部
紫外線吸収剤(L) :0.1部
酸化防止剤(M) :0.1部
レベリング剤(N) :1.0部
貯蔵安定剤(O) :0.2部
有機溶剤(Q-1) :36.69部
<Manufacturing of photosensitive compositions for fingerprint authentication sensors>
[Example 1]
(Photosensitive composition 1)
The following raw materials were mixed and stirred, and filtered through a filter having a pore size of 1.0 μm to obtain a photosensitive composition 1.
Dispersion 1: 27.0 parts Alkali-soluble resin (B) solution: 25.0 parts Polymerizable compound (C-2-1): 3.15 parts Polymerizable compound (C-3-1): 2.15 parts Photopolymerization Initiator (D-1): 0.5 Part Photopolymerization Initiator (D-2): 0.5 Part Sensitizer (H): 0.2 Part Epoxy Compound (I-1): 1.0 Part Oxetane compound (I-2): 1.0 part Thiol-based chain transfer agent (J): 0.4 part Polymerization initiator (K): 0.01 part UV absorber (L): 0.1 part Oxidation Initiator (M): 0.1 part Leveling agent (N): 1.0 part Storage stabilizer (O): 0.2 part Organic solvent (Q-1): 36.69 parts
[実施例2~23、比較例1~3]
(感光性組成物2~26)
実施例1の感光性組成物1を表2-1および表2-2に記載した原料、量に変えた以外は、実施例1と同様にして感光性組成物2~26を作製した。
[Examples 2 to 23, Comparative Examples 1 to 3]
(Photosensitive Compositions 2-26)
Photosensitive compositions 2 to 26 were prepared in the same manner as in Example 1 except that the photosensitive composition 1 of Example 1 was changed to the raw materials and amounts shown in Table 2-1 and Table 2-2.
なお、それぞれの原料については、以下の通りである。 The raw materials are as follows.
[アルカリ可溶性樹脂(B)溶液]
アルカリ可溶性樹脂(B-2)~(B-6)溶液をそれぞれ同量にて混合し、アルカリ可溶性樹脂(B)溶液とした。
[Alkali-soluble resin (B) solution]
Alkali-soluble resin (B-2) to (B-6) solutions were mixed in equal amounts to obtain an alkali-soluble resin (B) solution.
[重合性化合物(C)]
(酸基を有する重合性化合物(C-1))
C-1-1:アロニックスM-510(東亞合成社製)
C-1-2:アロニックスM-520(東亞合成社製)
C-1-3:アロニックスM-521(東亞合成社製)
(ウレタン結合と酸基を有する重合性化合物(C-2))
C-2-1:上述の化学式(4)の化合物
(その他重合性化合物(C-3))
C-3-1:アロニックスM-402(東亞合成社製)
[Polymerizable compound (C)]
(Polymerizable compound having an acid group (C-1))
C-1-1: Aronix M-510 (manufactured by Toagosei Co., Ltd.)
C-1-2: Aronix M-520 (manufactured by Toagosei Co., Ltd.)
C-1-3: Aronix M-521 (manufactured by Toagosei Co., Ltd.)
(Polymerizable compound having urethane bond and acid group (C-2))
C-2-1: The compound of the above chemical formula (4) (other polymerizable compound (C-3))
C-3-1: Aronix M-402 (manufactured by Toagosei Co., Ltd.)
[光重合開始剤(D)]
D-1:イルガキュア907(BASFジャパン社製)
D-2:イルガキュア379(BASFジャパン社製)
D-3:イルガキュアOXE01(BASFジャパン社製)
D-4:イルガキュアOXE02(BASFジャパン社製)
D-5:イルガキュアOXE04(BASFジャパン社製)
[Photopolymerization Initiator (D)]
D-1: Irga Cure 907 (manufactured by BASF Japan Ltd.)
D-2: Irga Cure 379 (manufactured by BASF Japan Ltd.)
D-3: Irga Cure OXE01 (manufactured by BASF Japan)
D-4: Irga Cure OXE02 (manufactured by BASF Japan)
D-5: Irga Cure OXE04 (manufactured by BASF Japan)
[増感剤(H)]
H-1:カヤキュアDETX-S(日本化薬社製)
H-2:4,4CHEMARK DEABP(Chemark Chemical社製)
以上、(H-1)、(H-2)をそれぞれ同量にて混合し、増感剤(H)とした。
[Sensitizer (H)]
H-1: Kayacure DETX-S (manufactured by Nippon Kayaku Co., Ltd.)
H-2: 4,4 CHEMARK DEABP (manufactured by Chemark Chemical)
As described above, (H-1) and (H-2) were mixed in the same amount to obtain a sensitizer (H).
[エポキシ化合物(I-1)]
I-1-1:EHPE-3150(ダイセル社製)
I-1-2: デナコールEX611(ナガセケムテックス社製)
I-1-3:イソシアヌル酸トリグリシジル
以上、(I-1-1)~(I-1-3)をそれぞれ同量混合し、エポキシ化合物(I-1)とした。
[Epoxy compound (I-1)]
I-1-1: EHPE-3150 (manufactured by Daicel)
I-1-2: Denacol EX611 (manufactured by Nagase ChemteX)
I-1-3: Triglycidyl isocyanurate The above and above, (I-1-1) to (I-1-3) were mixed in the same amount to prepare an epoxy compound (I-1).
[オキセタン化合物(I-2)]
I-2-1:アロンオキセタンOXT-221(東亞合成社製)
[Oxetane compound (I-2)]
I-2-1: Aron Oxetane OXT-221 (manufactured by Toagosei Co., Ltd.)
[チオール系連鎖移動剤(J)]
J-1:トリメチロ-ルエタントリス(3-メルカプトブチレート)
J-2:トリメチロ-ルプロパントリス(3-メルカプトブチレート)
J-3:ペンタエリスリトールテトラキス(3-メルカプトプロピオネート)
J-4:トリメチロ-ルプロパントリス(3-メルカプトプロピオネート)
J-5:トリス[(3-メルカプトプロピオニルオキシ)-エチル]-イソシアヌレート
以上、(J-1)~(J-5)をそれぞれ同量にて混合し、チオール系連鎖移動剤(J)とした。
[Thiol chain transfer agent (J)]
J-1: Trimethylol etanthris (3-mercaptobutyrate)
J-2: Trimethylol propanthris (3-mercaptobutyrate)
J-3: Pentaerythritol tetrakis (3-mercaptopropionate)
J-4: Trimethylol propanthris (3-mercaptopropionate)
J-5: Tris [(3-mercaptopropionyloxy) -ethyl] -isocyanurate or more, (J-1) to (J-5) are mixed in the same amount, respectively, and combined with the thiol chain transfer agent (J). did.
[重合禁止剤(K)]
K-1:3-メチルカテコール
K-2:メチルヒドロキノーン
K-3:t-ブチルヒドロキノーン
以上、(K-1)~(K-3)をそれぞれ同量にて混合し、重合禁止剤(K)とした。
[Polymerization inhibitor (K)]
K-1: 3-Methylcatechol K-2: Methylhydroquinone K-3: t-butylhydroquinone The above, (K-1) to (K-3) are mixed in the same amount, and a polymerization inhibitor ( K).
[紫外線吸収剤(L)]
L-1:TINUVIN400(BASFジャパン社製)
L-2: TINUVIN900(BASFジャパン社製)
以上、(L-1)、(L-2)をそれぞれ同量にて混合し、紫外線吸収剤(L)とした。
[Ultraviolet absorber (L)]
L-1: TINUVIN400 (manufactured by BASF Japan)
L-2: TINUVIN900 (manufactured by BASF Japan)
As described above, (L-1) and (L-2) were mixed in the same amount to obtain an ultraviolet absorber (L).
[酸化防止剤(M)]
M-1:ペンタエリスリトールテトラキス[3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート
M-2:3,3'-チオジプロパン酸ジオクタデシル
M-3:トリス[2,4-ジ-(t)-ブチルフェニル]ホスフィン
M-4:ビス(2,2,6,6-テトラメチル-4-ピペリジル)セバケート
M-5:サリチル酸p-オクチルフェニル
以上、(M-1)~(M-5)をそれぞれ同量にて混合し、酸化防止剤(M)とした。
[Antioxidant (M)]
M-1: Pentaerythritol tetrakis [3- (3,5-di-t-butyl-4-hydroxyphenyl) propionate M-2: 3,3'-dioctadecylthiodipropanoate M-3: Tris [2,4- Di- (t) -Butylphenyl] Phenyl M-4: Bis (2,2,6,6-Tetramethyl-4-piperidyl) Sevacate M-5: P-octylphenyl salicylate or higher, (M-1) to ( M-5) was mixed in the same amount to prepare an antioxidant (M).
[レベリング剤(N)]
N-1:BYK-330(ビックケミー社製)
N-2:メガファックF-551(DIC社製)
以上、(N-1)、(N-2)をそれぞれ1部混合し、PGMAc98部に溶解させた混合溶液をレベリング剤(N)とした。
[Leveling agent (N)]
N-1: BYK-330 (manufactured by Big Chemie)
N-2: Megafuck F-551 (manufactured by DIC Corporation)
As described above, 1 part each of (N-1) and (N-2) was mixed, and the mixed solution dissolved in 98 parts of PGMAc was used as the leveling agent (N).
[貯蔵安定剤(O)]
O-1:2,6-ビス(1,1-ジメチルエチル)-4-メチルフェノール
O-2:トリフェニルホスフィン
以上、(O-1)、(O-2)をそれぞれ同量にて混合し、貯蔵安定剤(O)とした。
[Storage stabilizer (O)]
O-1: 2,6-bis (1,1-dimethylethyl) -4-methylphenol O-2: triphenylphosphine The above, (O-1) and (O-2) are mixed in the same amount. , Storage stabilizer (O).
[有機溶剤(Q) ]
Q-1:プロピレングリコールモノメチルエーテルアセテート 30部
Q-2:シクロヘキサノン 30部
Q-3:3-エトキシプロピオン酸エチル 10部
Q-4:プロピレングリコールモノメチルエーテル 10部
Q-5:シクロヘキサノールアセテート 10部
Q-6:ジプロプレングリコールメチルエーテルアセテート 10部
以上、(Q-1)~(Q-6)をそれぞれ上記質量部にて混合し、有機溶剤(Q)とした。
[Organic solvent (Q)]
Q-1: Propylene glycol monomethyl
<感光性組成物の評価>
得られた感光性組成物について、現像残渣、分光特性、および指紋認証評価を下記の方法で行った。評価結果を表3に示す。
<Evaluation of photosensitive composition>
The obtained photosensitive composition was evaluated for development residue, spectral characteristics, and fingerprint authentication by the following methods. The evaluation results are shown in Table 3.
[現像残渣の評価]
得られた感光性組成物を、縦100mm×横100mm、0.7mm厚のTFT方式液晶駆動用基板上に、スピンコータを用いて乾燥膜厚が2.0μmとなるように塗工し、90℃で120秒間プリベークを行った。次いで、超高圧水銀ランプを用い、積算光量30mJ/cm2で紫外線露光を行い、100μm幅ストライプパターンのフォトマスクを介して紫外線を露光した。さらに、この基板を室温に冷却後、23℃の0.04%水酸化カリウム水溶液を用いて現像時間2水準(40秒、70秒)でスプレー現像し、イオン交換水で洗浄して風乾した。得られた基板をクリーンオーブン中で、230℃で30分間ポストベークを行い、基板上にストライプ状のパターンを形成した。パターンを光学顕微鏡にて観察し、未露光部の現像残渣、および欠けの有無を評価した。以下の通りであり、2以上が実用可能である。
3:現像時間70秒において、未露光部の現像残渣が無く、パターン欠けがなかった
2:現像時間70秒において、未露光部に現像残渣が発生またはパターン欠けが発生した
1:現像時間40秒において、未露光部に現像残渣が発生またはパターン欠けが発生した
[Evaluation of development residue]
The obtained photosensitive composition was coated on a TFT liquid crystal display driving substrate having a length of 100 mm, a width of 100 mm, and a thickness of 0.7 mm using a spin coater so that the dry film thickness was 2.0 μm, and the temperature was 90 ° C. Was prebaked for 120 seconds. Next, using an ultra-high pressure mercury lamp, ultraviolet exposure was performed with an integrated light intensity of 30 mJ / cm 2 , and ultraviolet rays were exposed through a photomask having a 100 μm wide stripe pattern. Further, after cooling the substrate to room temperature, the substrate was spray-developed with a 0.04% potassium hydroxide aqueous solution at 23 ° C. for a development time of 2 levels (40 seconds, 70 seconds), washed with ion-exchanged water, and air-dried. The obtained substrate was post-baked at 230 ° C. for 30 minutes in a clean oven to form a striped pattern on the substrate. The pattern was observed with an optical microscope, and the presence or absence of development residue and chipping in the unexposed portion was evaluated. It is as follows, and two or more are practical.
3: At the development time of 70 seconds, there was no development residue in the unexposed area and there was no pattern chipping. 2: At the development time of 70 seconds, the development residue was generated or the pattern was chipped in the unexposed area 1: Development time was 40 seconds. In the unexposed area, a development residue was generated or a pattern was chipped.
<分光特性評価用基板の作製>
得られた感光性組成物を、縦100mm×横100mm、0.7mm厚のガラス基板(コ-ニング社製イ-グル2000)上に、スピンコート法により、ポストベーク後の膜厚が1.0μmとなるように塗布した。次に、90℃2分間ホットプレートで乾燥後、超高圧水銀ランプを用い、100μm角の正方形パターンのフォトマスクを介して50mJ/cm2の露光を行い基板を作製した。その後、この基板を23℃の0.04質量%水酸化カリウム水溶液を用いてスプレー現像した後、イオン交換水で洗浄、風乾し、クリーンオーブン中230℃で30分間加熱した。スプレー現像は、現像残りがなくなるパターン形成可能な最短時間で行った。
<Manufacturing of substrate for spectral characterization>
The obtained photosensitive composition was placed on a glass substrate (Eagle 2000 manufactured by Conning Co., Ltd.) having a thickness of 100 mm in length × 100 mm in width and 0.7 mm in thickness by a spin coating method to obtain a film thickness after post-baking. It was applied so as to be 0 μm. Next, after drying on a hot plate at 90 ° C. for 2 minutes, a substrate was prepared by exposing to 50 mJ / cm 2 through a 100 μm square square pattern photomask using an ultrahigh pressure mercury lamp. Then, this substrate was spray-developed with a 0.04 mass% potassium hydroxide aqueous solution at 23 ° C., washed with ion-exchanged water, air-dried, and heated in a clean oven at 230 ° C. for 30 minutes. The spray development was performed in the shortest time during which a pattern could be formed with no development residue.
[透過率が50%以上である波長域の測定]
得られた分光特性評価用基板を、OSP-SP100(オリンパス社製)を用いて、被膜の厚み方向で、透過率が50%以上である波長を測定した。評価基準は、以下の通りであり、2以上が実用可能である。
4:波長420~540nmで透過率が50%以上である
3:波長420~530nmで透過率が50%以上である
2:波長420~520nmで透過率が50%以上である
1:波長420~520nmで透過率が50%未満の部分がある。
[Measurement of wavelength range where transmittance is 50% or more]
Using OSP-SP100 (manufactured by Olympus Corporation), the obtained spectral characteristic evaluation substrate was measured at a wavelength having a transmittance of 50% or more in the thickness direction of the coating film. The evaluation criteria are as follows, and two or more are practical.
4: Transmittance is 50% or more at a wavelength of 420 to 540 nm 3: Transmittance is 50% or more at a wavelength of 420 to 530 nm 2: Transmittance is 50% or more at a wavelength of 420 to 520 nm 1: Wavelength 420 to There is a portion where the transmittance is less than 50% at 520 nm.
[透過率が80%以上である波長域の測定]
得られた分光特性評価用基板を、OSP-SP100(オリンパス社製)を用いて、被膜の厚み方向で、透過率が80%以上である波長を測定した。評価基準は、以下の通りである。
4:波長450~510nmで透過率が80%以上である
3:波長450~500nmで透過率が80%以上である
2:波長450~490nmで透過率が80%以上である
1:波長450~490nmで透過率が80%未満の部分がある。
[Measurement of wavelength range where transmittance is 80% or more]
Using OSP-SP100 (manufactured by Olympus Corporation), the obtained spectral characteristic evaluation substrate was measured at a wavelength having a transmittance of 80% or more in the thickness direction of the coating film. The evaluation criteria are as follows.
4: Transmittance is 80% or more at a wavelength of 450 to 510 nm 3: Transmittance is 80% or more at a wavelength of 450 to 500 nm 2: Transmittance is 80% or more at a wavelength of 450 to 490 nm 1: Wavelength 450 to There is a portion where the transmittance is less than 80% at 490 nm.
[波長570~730nmの最大透過率の測定]
得られた分光特性評価用基板を、OSP-SP100(オリンパス社製)を用いて、被膜の厚み方向で、波長570~730nmの最大透過率を測定した。
[Measurement of maximum transmittance at wavelengths of 570 to 730 nm]
The obtained spectral characteristic evaluation substrate was measured for maximum transmittance at a wavelength of 570 to 730 nm in the thickness direction of the coating film using OSP-SP100 (manufactured by Olympus Corporation).
<指紋認証評価用光学フィルタの作成>
6インチシリコンウェハ上に、平坦化膜用レジスト液(新日鉄化学社製「HL-18s」をスピンコート法により塗布し、100℃のホットプレートで6分加熱後、230℃のオーブンにて1時間加熱して、塗膜を硬化させ平坦膜付きシリコンウェハを得た。
次に、得られた感光性組成物を、平坦化膜上に乾燥後の膜厚が1.0μmとなるようにスピンコート法により塗布し、100℃のホットプレートで1分間プリベークし、i線ステッパ-露光装置FPA-3000i5+(Canon社製)を使用して、365nmの波長で1.0μm四方のパターンを形成するためのフォトマスクを通して露光量150mJ/cm2にてパターン露光を行った。露光後の塗膜を有機アルカリ現像液でパドール現像を行った。パドール現像後、20秒スピンシャワ-にて純水で洗浄を行い、ウェハ上に残った水滴を高圧のエアーで飛ばした。
さらに、200℃のホットプレートで5分間加熱処理(ポストベーク)を行い、光学フィルタとしてのパターンを有するシリコンウェハを得た。
<Creation of optical filter for fingerprint authentication evaluation>
A resist solution for a flattening film (“HL-18s” manufactured by Nippon Steel Chemical Co., Ltd. “” is applied on a 6-inch silicon wafer by the spin coating method, heated on a hot plate at 100 ° C for 6 minutes, and then placed in an oven at 230 ° C for 1 hour. The coating film was cured by heating to obtain a silicon wafer with a flat film.
Next, the obtained photosensitive composition was applied onto the flattening film by a spin coating method so that the film thickness after drying was 1.0 μm, prebaked on a hot plate at 100 ° C. for 1 minute, and i-ray. Using a stepper-exposure device FPA-3000i5 + (manufactured by Canon), pattern exposure was performed at an exposure rate of 150 mJ / cm 2 through a photomask for forming a 1.0 μm square pattern at a wavelength of 365 nm. The coating film after exposure was paddle-developed with an organic alkaline developer. After the paddle was developed, it was washed with pure water using a spin shower for 20 seconds, and the water droplets remaining on the wafer were blown off with high-pressure air.
Further, heat treatment (post-baking) was performed on a hot plate at 200 ° C. for 5 minutes to obtain a silicon wafer having a pattern as an optical filter.
[指紋認証評価]
得られた光学フィルタを、特開2020-92080号公報に従い指紋認証センサに組み込んだ。得られた指紋認証センサにて、発光波長470nmの光を照射し指紋画像の取り込みを行い、画像性能を評価した。評価基準は、以下の通りであり、2以上が実用可能である。
3:指紋がはっきりと認識できる。
2:指紋が認識できる。
1:指紋が認識できない。
[Fingerprint authentication evaluation]
The obtained optical filter was incorporated into a fingerprint authentication sensor in accordance with Japanese Patent Application Laid-Open No. 2020-92080. The obtained fingerprint authentication sensor was irradiated with light having an emission wavelength of 470 nm to capture a fingerprint image, and the image performance was evaluated. The evaluation criteria are as follows, and two or more are practical.
3: Fingerprints can be clearly recognized.
2: Fingerprints can be recognized.
1: Fingerprint cannot be recognized.
10 駆動層
11 基板
20 指紋認証センサ層
21 指紋認証センサ
23 反射された光
30 OLED発光層
31 OLED
33 光
40 カバーガラス
50 指
100 ディスプレイパネル
10
33
Claims (7)
顔料(A)として、下記化学式(1)で表される顔料(A-1)、アルカリ可溶性樹脂(B)、重合性化合物(C)、および光重合開始剤(D)を含む、指紋認証センサ用感光性組成物。
化学式(1)
A fingerprint authentication sensor containing the pigment (A) represented by the following chemical formula (1), an alkali-soluble resin (B), a polymerizable compound (C), and a photopolymerization initiator (D). Photosensitive composition for use.
Chemical formula (1)
An image display device including the fingerprint authentication sensor according to claim 6 inside an image display display.
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2020
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