JP2022012798A - jig - Google Patents

Abstract

To enable a load applying mechanism to be inserted between the upper surface of a table and the lower surface of an abrasive pad when a load value detected by a load sensor is corrected.SOLUTION: A jig 6 used in a processing device including: means 4 that applies a load to a workpiece and processes the workpiece; and load sensors 81 to 83 each of which is disposed on the processing means 4 and detects a reaction force of the load received by the workpiece. The jig includes: a plate 60 that is placed on hold means 50; an air cylinder 62 disposed on an upper surface of the plate 60; and a regulator 64 that adjusts a pressure of air to be supplied to the air cylinder 62. The air cylinder 62 includes: a piston 622 in which air is supplied into a cylinder tube 620 and a lower surface thereof is pushed by air to slide within the cylinder tube 620; and a rod 624 connected to the piston 622. The processing means 4 is pushed up with a force whose value is determined by a pressure of air supplied to the cylinder tube 620 and an area of the lower surface of the piston 622, and a value of the load detected by the load sensors 81 to 83 is measured.SELECTED DRAWING: Figure 2

Description

The present invention relates to a jig for measuring a load value detected by a load sensor.

For example, a polishing device that polishes a wafer while applying a load to the wafer by rotating a chuck table holding the wafer and pressing a rotating polishing pad against the wafer (see, for example, Patent Document 1) is a load applied to the wafer. It is equipped with a load sensor to measure.

In the polishing process, a load having a preset value is continuously applied to the wafer for a predetermined time. The load sensor is, for example, located at the apex of a virtual equilateral triangle centered on the axis of the spindle between the polishing means having the polishing pad attached to the tip of the spindle and the support case supporting the polishing means. Have been placed. Then, the polishing pad receives the reaction force from the chuck table side corresponding to the load applied to the wafer being polished, and the total value of the load values (reaction force values) detected by the three load sensors is applied to the wafer during polishing. It is the applied load value.

Japanese Unexamined Patent Publication No. 2017-140658

It is necessary to replace the load sensor when the load sensor fails. Then, after replacing the load sensor, the actual load value applied to the three load sensors at the time of polishing may not match the load value detected by the three load sensors. Therefore, it is necessary to correct the load value detected by the load sensor after replacement.

Here, in order to correct the load value detected by the load sensor, it is necessary to sequentially apply load values having different values to the polishing pad a plurality of times. The load applying mechanism that applies different load values to the load sensor in this way is the polishing pad located above the chuck table, or the rod of the elevating cylinder arranged on the upper surface of the chuck table toward the mount on which the polishing pad is mounted. Can be measured on the lifting cylinder side by the load sensor by the force that the lifting cylinder tries to expand between the upper surface of the chuck table and the polished surface of the polishing pad or the lower surface of the mount on which the polishing pad is mounted by extending in the vertical direction. A predetermined load is applied. Then, correction is performed so that the applied load value and the value detected by the load sensor match.

However, the distance between the upper surface of the chuck table and the polishing surface of the polishing pad, or the distance between the upper surface of the chuck table and the lower surface of the mount may be smaller than the total length of the shortened elevating cylinder, and the elevating between them may occur. There is a problem that the cylinder cannot be inserted and arranged.
Therefore, when correcting the load value detected by the load sensor, a load that can easily enter between the upper surface of the chuck table and the polished surface of the polishing pad, or between the upper surface of the chuck table and the lower surface of the mount. A granting mechanism is required

The present invention for solving the above problems includes a holding means for holding a work piece on a holding surface, a processing means for applying a load to the work piece from above the holding means, and a processing means for processing the work piece. A moving means that moves the processing means and the holding means relatively in a direction perpendicular to the holding surface, and a workpiece that is arranged in the processing means and moves the processing means in a direction approaching the holding surface. A jig for measuring the value of the load detected by the load sensor in a processing device including a load sensor that detects the reaction force of the received load, and a plate placed on the holding surface and the plate. The air cylinder is provided with an air cylinder arranged on the upper surface of the air cylinder and a regulator for adjusting the pressure of the air supplied to the air cylinder, and the air cylinder is supplied with a cylinder tube and air having a predetermined pressure in the cylinder tube. A piston that slides in the cylinder tube when the lower surface of a predetermined area is pushed by the air and a rod connected to the piston are provided, and the pressure of the air supplied to the cylinder tube and the pressure of the piston are provided. It is a jig that measures the value of the load detected by the load sensor by pushing up the processing means with a force whose value is determined by the area of the lower surface.

In the jig according to the present invention, at least three air cylinders are arranged on the plate, and the center of the polygonal center formed by the at least three air cylinders is aligned with the center of the lower surface of the processing means. It is preferable to push up the processing means with at least three of the air cylinders.

The regulators are placed in the cylinder tube so that at least three of the air cylinders are evenly spaced on a circle formed on the plate so that each air cylinder has the same force to push up the processing means. It is preferable to adjust the pressure of the supplied air.

It is preferable that the jig according to the present invention includes at least three outer peripheral contact portions arranged on the lower surface of the plate and in contact with the outer periphery of the holding surface.

Further, the present invention for solving the above problems includes a holding means for holding the work piece on the holding surface and a processing means for processing the work piece by applying a load to the work piece from above the holding means. A moving means that moves the processing means and the holding means relatively in a direction perpendicular to the holding surface, and a moving means that is arranged in the processing means and moves the processing means in a direction approaching the holding surface to be processed. A mounting plate that is a jig for measuring the value of the load detected by the load sensor in a processing device including a load sensor that detects the reaction force of the load received by the object, and is mounted on the lower surface of the processing means. The air cylinder is provided with an air cylinder arranged on the lower surface of the mounting plate and a regulator for adjusting the pressure of the air supplied to the air cylinder. The air cylinder has a cylinder tube and air having a predetermined pressure is the cylinder. A piston supplied into the tube and sliding in the cylinder tube when the upper surface of a predetermined area is pushed by air, a rod connected to the piston, a ball joint attached to the lower end of the rod, and the like. The air supplied to the cylinder tube is provided with a contact plate that is in contact with the holding surface and whose angle can be changed according to the inclination of the holding surface by the ball joint, and the contact plate is in contact with the holding surface. A jig that measures the value of the load detected by the load sensor by pushing the holding surface downward with a force whose value is determined by the pressure of the piston and the area of the upper surface of the piston and pushing up the processing means relatively. Is.

The jig according to the present invention includes a plate placed on the holding surface of the holding means, an air cylinder arranged on the upper surface of the plate, and a regulator for adjusting the pressure of the air supplied to the air cylinder. Includes a cylinder tube, a piston that slides in the cylinder tube when air of a predetermined pressure is supplied into the cylinder tube and the lower surface of a predetermined area is pushed by the air, and a rod connected to the piston. As a result, it is possible to easily enter between the holding surface of the holding means and the lower surface of the processing means, and the pressure of the air supplied to the cylinder tube and the area of the lower surface of the piston in the inserted state make it possible to easily enter the space. By pushing up the processing means with a force that determines the value, it is possible to measure the value of the load detected by the load sensor.

In the jig according to the present invention, at least three air cylinders are arranged on a plate, and at least three air cylinders are aligned with the center of the polygonal center formed by the at least three air cylinders and the center of the lower surface of the processing means. By pushing up the machining means with a cylinder, a load (reaction force of the load received by the workpiece during polishing) is applied to the machining means by multiple air cylinders unlike the conventional one, so for example, the holding surface of the holding means and the machining means Even if the distance from the lower surface is small due to the device configuration, the jig can be easily inserted between them. That is, when correcting the load value detected by the load sensor, it is necessary to sequentially apply large and small loads to the lower surface of the processing means, but in the past, it was necessary to apply, for example, a large load with one elevating cylinder. Therefore, the size of the elevating cylinder may become large, and if the distance between the holding surface of the holding means and the lower surface of the processing means is small, the elevating cylinder may not be able to enter. rice field. On the other hand, since the jig according to the present invention includes a plurality of air cylinders having a reduced size in the extending direction (vertical direction), the distance between the holding surface of the holding means and the lower surface of the processing means is the device configuration. Even if the size is small, the jig can be easily inserted between the two, and the load required for correcting the load value can be dispersed and applied to the lower surface of the processing means, so that each one can be applied. Even if the value of the load that can be applied by the miniaturized air cylinder is smaller than that of the conventional large lifting cylinder, the large load required for correction can be generated by multiple air cylinders, so the load can be increased. It is possible to appropriately correct the load value detected by the sensor.

In the jig according to the present invention, at least three air cylinders are arranged at equal intervals on a virtual circle formed on the upper surface of the plate so that each air cylinder has the same force to push up the processing means. In addition, by adjusting the pressure of the air supplied to the cylinder tube by the regulator, the load required for proper correction can be applied to the lower surface of the processing means. That is, it is possible to apply the resultant force of the loads of at least three air cylinders of the jig to the center of the lower surface of the processing means.

The jig according to the present invention is provided with at least three outer peripheral contact portions arranged on the lower surface of the plate and in contact with the outer periphery of the holding surface, so that the jig can be installed on the holding means without damaging the holding surface. ..

Further, the jig according to the present invention includes a mounting plate mounted on the lower surface of the processing means, an air cylinder arranged on the lower surface of the mounting plate, and a regulator for adjusting the pressure of the air supplied to the air cylinder. The air cylinder includes a cylinder tube, a piston that slides in the cylinder tube when air of a predetermined pressure is supplied into the cylinder tube and the upper surface of a predetermined area is pushed by the air, and a rod connected to the piston. By providing a ball joint attached to the lower end of the rod and a contact plate that is in contact with the holding surface and whose angle can be changed according to the inclination of the holding surface by the ball joint, the contact plate is in contact with the holding surface. , The value of the load detected by the load sensor is determined by pushing the holding surface downward with a force whose value is determined by the pressure of the air supplied to the cylinder tube and the area of the upper surface of the piston and pushing up the machining means relatively. It becomes possible to measure.

It is a perspective view which shows an example of a processing apparatus. It is sectional drawing which shows the structure of the processing means, the jig, and the holding means. It is a perspective view which shows an example of a jig. It is a top view explaining the case where a load is applied to the polishing pad of a processing means using a jig, and the load detected by the load sensor is measured. It is sectional drawing explaining the case where the load is applied to the polishing pad of a processing means using a jig, and the load detected by the load sensor is measured. It is sectional drawing explaining the case where the load is applied to the processing means, and the load detected by the load sensor is measured by using the jig attached to the mounter of the processing means, as viewed from the X-axis direction side. It is sectional drawing explaining the case where the load is applied to the processing means, and the load detected by the load sensor is measured by using the jig attached to the mounter of the processing means, as viewed from the Y-axis direction side.

The processing device 1 shown in FIG. 1 includes, for example, a rough grinding means 30, a finishing grinding means 31, and a processing means 4, and finishes the workpiece 90 held on any of the holding means 50 with the rough grinding means 30 and finishing. It is a grinding and polishing device that grinds by the grinding means 31 and further grinds by the processing means 4.
The processing device 1 is configured by connecting a second device base 11 to the rear (+ Y direction side) of the first device base 10, for example. On the second device base 11, a machining area 110 in which the workpiece 90 held by the holding means 50 by the rough grinding means 30, the finish grinding means 31, or the machining means 4 is machined is a part thereof. However, the workpiece loading / unloading area 160 for loading / unloading the workpiece 90 to the holding means 50 is provided.

The workpiece 90 shown in FIG. 1 is, for example, a circular plate-shaped semiconductor wafer made of a silicon base material or the like, and the surface 901 of the workpiece 90 facing downward in FIG. 1 is formed by a plurality of devices. It is protected by a protective tape (not shown). The back surface 902 facing the upper side of the workpiece 90 is a surface to be ground or polished.

A first cassette mounting portion 150 and a second cassette mounting portion 151 are provided on the front side (-Y direction side) of the first device base 10, and the first cassette mounting portion 150 is provided. The first cassette 1500 in which the workpiece 90 before processing is housed is placed, and the second cassette 1510 in which the workpiece 90 after processing is housed is placed in the second cassette mounting portion 151. Placed.

Behind the opening of the first cassette 1500, a robot 155 that carries out the work piece 90 before processing from the first cassette 1500 and carries the work piece 90 after processing into the second cassette 1510 is arranged. Has been done.

A temporary placement area 152 is provided at a position adjacent to the robot 155, and an alignment means 153 is arranged in the temporary placement area 152. The alignment means 153 aligns (centers) the workpiece 90, which has been carried out from the first cassette 1500 and placed on the temporary placement region 152, at a predetermined position with a diameter-reducing alignment pin, and is processed. Determine the center position of the object 90.

In the example shown in FIG. 1, a loading arm 1540 that swivels while holding the workpiece 90 is arranged at a position adjacent to the alignment means 153. The loading arm 1540 holds the workpiece 90 aligned by the alignment means 153 and conveys it to the holding means 50 positioned in the workpiece loading / unloading area 160. Next to the loading arm 1540, an unloading arm 1541 that swivels while holding the processed workpiece 90 is provided. Within the movable range of the unloading arm 1541, a single-wafer cleaning means 156 for cleaning the processed workpiece 90 conveyed by the unloading arm 1541 is arranged. The workpiece 90 washed by the cleaning means 156 is carried into the second cassette 1510 by the robot 155.

As shown in FIG. 1, a first column 12 is erected behind (+ Y direction side) on the second apparatus base 11, and a rough grinding feed means 20 is provided on the front surface of the first column 12. It is arranged. The coarse grinding feed means 20 is connected to a ball screw 200 having an axial center in the vertical direction (Z-axis direction), a pair of guide rails 201 arranged in parallel with the ball screw 200, and the ball screw 200 to rotate the ball screw 200. The motor 202 is composed of an elevating plate 203 in which an internal nut is screwed into the ball screw 200 and the side portion is in sliding contact with the guide rail 201, and a holder 204 connected to the elevating plate 203 to hold the rough grinding means 30. When the ball screw 200 is rotated, the elevating plate 203 is guided by the guide rail 201 and reciprocates in the Z-axis direction, and the rough grinding means 30 supported by the holder 204 also reciprocates in the Z-axis direction.

The rough grinding means 30 is connected to a spindle 300 whose axial direction is vertical (Z-axis direction), a housing 301 that rotatably supports the spindle 300, a motor 302 that rotationally drives the spindle 300, and a lower end of the spindle 300. A grinding wheel (not shown) detachably connected to the lower surface of the circular mount 303 is provided. The grinding wheel includes a wheel base and a plurality of coarsely ground grindstones having a substantially rectangular parallelepiped shape mounted on the bottom surface of the wheel base in an annular shape. The rough grinding wheel is, for example, a grindstone in which the abrasive grains contained in the grindstone are relatively large.

For example, a grinding water flow path extending in the Z-axis direction is formed inside the spindle 300, and a grinding water supply means (not shown) communicates with the grinding water flow path. The grinding water supplied from the grinding water supply means to the spindle 300 is ejected downward from the opening at the lower end of the grinding water flow path toward the rough grinding wheel and reaches the contact portion between the rough grinding wheel and the workpiece 90. do.

Further, behind the second apparatus base 11 shown in FIG. 1, a second column 13 stands side by side in the X-axis direction on the first column 12, and is placed on the front surface of the second column 13. Is provided with a finish grinding feed means 21. The finish grinding feed means 21 is configured in the same manner as the rough grinding feed means 20, and the finish grinding means 31 can be grounded and fed in the Z-axis direction. The finish grinding means 31 includes a finish grinding wheel in which the abrasive grains contained in the grindstone are relatively small, and other configurations are substantially the same as those of the rough grinding means 30.

A third column 14 is erected on one side (-X direction side) on the second device base 11, and the processing means 4 and the holding means 50 are relative to each other on the front surface of the third column 14. A moving means 25 for moving in the direction perpendicular to the holding surface 502 (Z-axis direction) is provided. The moving means 25 includes a ball screw 250 having a vertical axis, a pair of guide rails 251 arranged in parallel with the ball screw 250, a motor 252 connected to the ball screw 250 to rotate the ball screw 250, and an internal portion. The nut is screwed into the ball screw 250 and the side portion is in sliding contact with the guide rail 251. When the motor 252 rotates the ball screw 250, the elevating plate 253 is guided by the guide rail 251 in the Z-axis direction. The processing means 4 that moves and is supported by the elevating plate 253 also moves in the Z-axis direction.

The processing means 4 includes, for example, a spindle 40 whose axial direction is vertical, a housing 41 that rotatably supports the spindle 40, a motor (not shown) that rotationally drives the spindle 40, and a circle fixed to the lower end of the spindle 40. Supports and moves the plate-shaped mount 43, the circular polishing pad 44 (see FIG. 2) detachably attached to the lower surface of the mount 43 via the circular plate-shaped platen 47 (see FIG. 2), and the housing 41. A holder 48 fixed to the elevating plate 253 of the means 25 is provided. The polishing pad 44 is made of, for example, a non-woven fabric such as felt. The diameter of the polishing pad 44 is, for example, larger than the diameter of the holding means 50. In the present embodiment, the polishing pad 44 is for polishing the workpiece 90, for example, by a dry method.
The polishing pad 44 may have abrasive grains adhered to it with an adhesive, or may be for CMP (chemical mechanical polishing) using a polishing liquid.

The processing means 4 may be configured to be movable in the surface direction (Y-axis direction) of the workpiece 90 during the polishing process. This is because, during the polishing process (during the dry polishing process in the present embodiment), a striped pattern may be formed on the back surface 902 which is the surface to be polished of the workpiece 90, which is the resistance of the workpiece 90. It becomes a factor to reduce the folding strength. Therefore, for example, during the polishing process, the processing means 4 is reciprocated in the Y-axis direction, and the polishing pad 44 is slid on the back surface 902 of the workpiece 90 in the Y-axis direction to resist the workpiece 90. It may be used to prevent a decrease in folding strength.
The processing means 4 may be a grinding means in which an annular grinding wheel is arranged on the lower surface of the grinding wheel.

For example, as shown in FIGS. 1 and 2, the processing means 4 moves the processing means 4 so as to approach the holding surface 502 holding the workpiece 90 of the holding means 50 in the −Z direction, and the polishing pad. To detect the reaction force applied to the machining means 4 from the holding means 50 side with respect to the load received by the workpiece 90 from the machining means 4 when the 44 is brought into contact with the back surface 902 of the workpiece 90. For example, three load sensors are arranged.

In the present embodiment, the first load sensor 81, the second load sensor 82, and the third load sensor 83 (shown only in FIG. 1) shown in FIG. 2 have a bottom plate 480 of the holder 48 and a substantially cylindrical side plate 481. In between, they are arranged at intervals of 120 degrees in the circumferential direction of the polishing pad 44, that is, at positions that are the vertices of a virtual equilateral triangle. The first load sensor 81 to the third load sensor 83 are action points on which a reaction force applied to the processing means 4 from the holding means 50 side in the + Z direction acts during polishing. For example, titanium acid. It is composed of a thin force sensor manufactured by Kistler Co., Ltd. using a piezoelectric element such as lead zirconate (PZT). The processing apparatus 1 recognizes that the total value of the reaction force detected by the first load sensor 81 to the third load sensor 83 is the value of the load received by the workpiece 90 during polishing.

For example, when the processing means 4 has a configuration capable of performing CMP polishing, a polishing liquid (not shown) extending in the Z-axis direction from the inside of the spindle 40 shown in FIG. 1 to the inside of the platen 47 shown in FIG. 2 A flow path is formed, and a polishing liquid supply source capable of delivering the polishing liquid communicates with the polishing liquid flow path. The polishing liquid delivered from the polishing liquid supply source to the spindle 40 is supplied to the polishing pad 44 from the opening at the lower end of the polishing liquid flow path (not shown). On the lower surface of the polishing pad 44 in contact with the workpiece 90, for example, a circular opening is formed in the center, and a grid-like groove (not shown) connected to the opening is formed, and the polishing supplied to the polishing pad 44 is performed. The liquid mainly flows in the grid-like grooves and spreads over the entire lower surface of the polishing pad 44.
The polishing liquid may be directly injected from the nozzle to the contact portion between the polishing pad 44 and the workpiece 90 from the radial outside of the polishing pad 44.

As shown in FIG. 1, a circular turntable 17 in a plan view is arranged on the second device base 11, and the circumference of the turntable 17 is centered on the center of the turntable 17 on the upper surface of the turntable 17. A plurality (for example, four) holding means 50 having holding surfaces 502 arranged at equal intervals in the direction and holding the workpiece 90 are arranged.

A rotating shaft 179 for rotating the turntable 17 is connected to the center of the turntable 17, and the rotating shaft 179 whose axial direction is the Z-axis direction can be rotated by a motor (not shown). Then, by rotating the turntable 17 around the center of the turntable 17 by the rotating shaft 179 and the motor, a plurality of (for example, four) holding means 50 holding the workpiece 90 are revolved, and the temporary placement area 152 is used. The holding means 50 can be sequentially positioned below the rough grinding means 30, the bottom of the finish grinding means 31, and the bottom of the processing means 4 from the vicinity of the above. For example, the turntable 17 floats on the lower surface of the second device base 11 with air blown to the lower surface, and is in a rotatable state as described above.
A partition wall is formed on the turntable 17 in a plane-viewing cross, and the partition wall partitions the four holding means 50.

As shown in FIGS. 1 and 2, the holding means 50 includes, for example, a porous plate 500 having a circular plate-like outer shape, and a frame 501 having a recess for exposing the upper surface of the porous plate 500 and accommodating the porous plate 500. Is equipped with. A suction source (not shown) communicates with the porous plate 500, and the suction force generated by the suction source is transmitted. Further, the holding means 50 can rotate about a rotation axis whose axial direction is the Z-axis direction. The holding surface 502 composed of the upper surface of the porous plate 500 and the upper surface of the frame 501 is an extremely gentle conical slope whose apex is the center of rotation of the holding means 50 and cannot be determined by the naked eye.

As shown in FIG. 1, the turntable 17 and the holding means 50 are substantially entirely covered with the case cover 16. One corner of the case cover 16 is cut out, for example, into a rectangular shape in a plan view, and in the cutout portion, the holding surface 502 of the holding means 50 is exposed to the outside from the case cover 16 so that the workpiece 90 can be carried in and out. ing. In the cutout portion of the case cover 16, the loading arm 1540 can carry the workpiece 90 into the holding means 50, and the unloading arm 1541 carries out the workpiece 90 from the holding means 50. It becomes 160.

The top plate 166 of the case cover 16 shown in FIG. 1 is allowed to enter the case cover 16 by passing through the grinding wheel of the rough grinding means 30, the grinding wheel of the finish grinding means 31, or the polishing pad 44 of the processing means 4. Three openings (not shown) are formed through.

In the present embodiment, the processing apparatus 1 includes a control means 19 for controlling the entire apparatus.
The control means 19 includes a processor, a storage medium such as a memory, and the like that perform arithmetic processing according to a control program, and is electrically connected to, for example, the processing means 4 and the moving means 25 via a wired or wireless communication path (not shown). The control means 19 controls the rotational movement of the polishing pad 44 in the machining means 4, or the moving means 25 controls the vertical movement of the machining means 4.
Further, information about the reaction force detected by the first load sensor 81 to the third load sensor 83 during the polishing process is sent to the control means 19.

For example, the processing device 1 is provided with a touch panel 199 as an input / output means, and an input screen and a display screen are projected on the touch panel 199, and an operator inputs various information of processing conditions to the processing device 1 on the input screen. The display screen displays various information on machining conditions, processing by the control means 19, and the status of each part of the device.

FIG. 3 shows the value of the load detected by the first load sensor 81, the second load sensor 82, and the third load sensor 83 in the processing apparatus 1 shown in FIG. 1 (the reaction force received from the holding means 50 side during polishing). It is a perspective view which shows an example of the jig 6 for measuring a value).

The jig 6 includes, for example, a plate 60 having a circular plate shape having an outer shape made of an alloy, general-purpose plastic, or the like. From the region on the outer peripheral side of the lower surface of the plate 60 in the present embodiment, an outer peripheral contact portion 602 that hangs down in the −Z direction side is formed. Three columnar outer peripheral contact portions 602 are formed, for example, at intervals of 120 degrees in the circumferential direction of the plate 60, and the lower surface 603 thereof is a stepped surface having a step.
In addition, four or more outer peripheral contact portions 602 may be formed.

The jig 6 includes an air cylinder 62 arranged on the upper surface of the plate 60 and a regulator 64 for adjusting the pressure of the air supplied to the air cylinder 62.
The air cylinder 62 has a smaller overall length in the extending direction (Z-axis direction) than the conventional air cylinder, and has a bottomed cylindrical cylinder tube 620 and an air having a predetermined pressure in the cylinder tube 620. A piston 622 (see FIG. 2) that is supplied inside and slides in the cylinder tube 620 in the Z-axis direction when the lower surface of a predetermined area is pushed by air, and a flat upper end surface connected to the piston 622, for example, are formed. A rod 624 that comes into contact with the lower surface of the polishing pad 44 or the lower surface of the mount 43 shown in FIG. 2 is provided.

An air introduction port 6203 is formed through the lower side of the side wall of the cylinder tube 620, and an air source 69 made of a compressor or the like communicates with the air introduction port 6203 via each air pipe 690. A regulator 64 is provided in each air pipe 690. Each regulator 64 can steplessly adjust the pressure of the air supplied to each air cylinder 62 in proportion to the electric power supplied from a power supply source (not shown).
In this embodiment, the upstream side of each air pipe 690 joins one pipe by a branch portion 694 such as a four-way pipe and communicates with the air source 69, and the Z axis of the entire jig 6 is used. The size of the jig 6 is reduced in the direction and the jig 6 is simplified, and the operator can easily handle the jig 6.

In the present embodiment, at least three air cylinders 62 are arranged on the plate 60, and further, at equal intervals (120 degree intervals) on the circle indicated by the virtual alternate long and short dash line formed on the plate 60. It is arranged. That is, in the present embodiment, the three air cylinders 62 are arranged at positions that are the vertices of the equilateral triangles formed in the horizontal plane (in the X-axis and Y-axis planes).
The number of air cylinders 62 may be four or more, or may be arranged on the plate 60 at different intervals.
For example, when six air cylinders 62 are arranged on the plate 60, they may be arranged at equal intervals (120 degree intervals) on two concentric circles formed on the plate 60. As a result, the size of the air cylinder 62 in the extending direction may be further reduced to reduce the size of the entire jig 6 in the Z-axis direction.

Hereinafter, a case where the workpiece 90 is ground and then polished by using the processing apparatus 1 shown in FIG. 1 will be briefly described.
First, by rotating the turntable 17 shown in FIG. 1, the holding means 50 in a state where the workpiece 90 is not placed rotates in the counterclockwise direction when viewed from the + Z direction side, and the workpiece is carried in and out. It is located in area 160. Then, the robot 155 moves the workpiece 90 pulled out from the first cassette 1500 to the temporary placement area 152. Next, the workpiece 90 centered by the alignment means 153 is conveyed onto the holding means 50, and the holding surface is such that the center of the holding surface 502 of the holding means 50 and the center of the workpiece 90 substantially coincide with each other. At 502, the workpiece 90 is sucked and held.

Next, the holding means 50 holding the workpiece 90 by the turntable 17 is positioned below the rough grinding means 30. In this positioning, the center of rotation of the rough grinding wheel of the rough grinding means 30 shifts horizontally by a predetermined distance with respect to the center of rotation of the workpiece 90, and the rotation locus of the rough grinding wheel passes through the center of rotation of the workpiece 90. It will be done like this.

The rough grinding means 30 is sent in the −Z direction by the rough grinding feed means 20, and the rotating rough grinding wheel abuts on the back surface 902 of the workpiece 90 to perform the grinding process. During grinding, the workpiece 90 also rotates as the holding means 50 rotates, so the rough grinding wheel grinds the entire surface of the back surface 902 of the workpiece 90. When the rough grinding process is completed, the turntable 17 positions the holding means 50 holding the work piece 90 subjected to the rough grinding process at a position below the finish grinding means 31, and further, it is substantially the same as the rough grinding process. The workpiece 90 is ground to the finished thickness by the procedure.

After that, the finish grinding means 31 is separated from the workpiece 90, the turntable 17 is rotated, and the holding means 50 holding the workpiece 90 having the finished thickness is positioned below the machining means 4. Will be done. The positioning is such that, for example, during the polishing process, the polishing pad 44 always covers the back surface 902 so that the polishing pad 44 abuts on the entire back surface 902 of the workpiece 90. Then, the processing means 4 is polished and fed in the −Z direction by the moving means 25, and the rotating polishing pad 44 comes into contact with the back surface 902 of the rotating workpiece 90 to perform the polishing process. Monitoring whether a load of a preset value is applied to the workpiece 90 is monitored by the reaction force from the holding means 50 side by the first load sensor 81, the second load sensor 82, and the third load sensor 83. While being detected and controlled by the control means 19, the back surface 902 of the workpiece 90 is polished and mirrored for a predetermined time to increase the bending strength of the workpiece 90, and then the machining means 4 is raised by the moving means 25. The polishing pad 44 is separated from the workpiece 90.

Next, the turntable 17 rotates, and the holding means 50 holding the work piece 90 after the polishing process exits from the case cover 16 and is positioned in the work piece loading / unloading area 160. Then, the workpiece 90 that has been polished is carried out from the holding means 50, and a new workpiece 90 is carried into the holding means 50.

For example, when the first load sensor 81 to the third load sensor 83 fails, the operator replaces the first load sensor 81 to the third load sensor 83 with a new one. Here, the first load sensor 81 to the third load sensor 83 are arranged in the processing means 4 in a state where a predetermined compression pressure (pressurization) is applied to the piezoelectric element and the piezoelectric element is compressed to some extent. Then, when the first load sensor 81 to the third load sensor 83 are compressed by receiving a reaction force from the holding means 50 side during the polishing process described above, a positive voltage is generated. This voltage signal indicates a load and is transmitted to the control means 19, and the control means 19 recognizes the load applied to the workpiece 90 (the total value of the detected values of the first load sensor 81 to the third load sensor 83). Can be done.

In performing the above exchange, regarding the output values of the first load sensor 81 to the third load sensor 83, for example, the processing means 4 is applied with uniform pressurization so as to be zero when no load is applied to the three load sensors. However, it is a difficult task to complete the replacement work while applying evenly desired pressurization. Therefore, the replaced new first load sensor 81 to third load sensor 83 actually apply the actual load value (holding means 50 side) to the first load sensor 81 to the third load sensor 83 during the polishing process performed after the replacement. The reaction force from) may not match the load value detected by the first load sensor 81 to the third load sensor 83, and as a result, the total value of the three actual load values and the control means 19 are sent. The total value of the three detected values of the first load sensor 81 to the third load sensor 83 is different, and the value of the reaction force applied to the processing means 4 recognized by the control means 19 during polishing, that is, the value to be processed. The value of the load recognized to be applied to the object 90 and the value of the load actually applied to the workpiece 90 may differ, and the workpiece 90 may not be appropriately polished. ..
In order to prevent such a situation from occurring, the jigs 6 shown in FIGS. 2 to 5 are used to correct the load values detected by the first load sensors 81 to the third load sensors 83. The correction using the jig 6 will be described below.

First, as shown in FIG. 2, the jig 6 is placed on the holding surface 502 of the holding means 50 by an operator. That is, in the present embodiment, the jig 6 is displaced in the horizontal direction by bringing the lower surface 603, which is the stepped surface of the outer peripheral contact portion 602, into contact with the upper surface of the frame body 501 constituting the region on the outer peripheral side of the holding surface 502. It is placed on the holding surface 502 in a state where it does not occur. Further, the outer peripheral contact portion 602 provides a space between both sides so that the lower surface of the jig 6 does not come into contact with the upper surface of the porous plate 500 of the holding means 50, so that the upper surface of the porous plate 500 is damaged by the jig 6. It will not be stored.
A robot or the like that automatically mounts the jig 6 on the holding means 50 may be arranged in the processing apparatus 1.

Next, the holding means 50 on which the jig 6 is placed is positioned below the processing means 4 by the turntable 17 shown in FIG. As shown in FIG. 4, the positioning is defined as the center of gravity P1 of a polygonal triangle virtually formed on the upper surface of the plate 60 by the three air cylinders 62 and the center of the lower surface of the polishing pad 44 of the processing means 4. Is done to match. In particular, in the present embodiment, the three air cylinders 62 are arranged at intervals of 120 degrees on a circle represented by a virtual one-point chain line formed on the plate 60, and are the vertices of an equilateral triangle in the horizontal plane. The center of gravity P1 is the center which is the outer center and the inner center of the virtual equilateral triangle formed by the three air cylinders 62.
Note that FIG. 2 shows a state in which the jig 6, the processing means 4, and the holding means 50 shown in FIG. 4 are viewed from the + X direction side. Further, FIG. 5 shows a state in which the jig 6, the processing means 4, and the holding means 50 shown in FIG. 4 are viewed from the + Y direction side.

Next, the processing means 4 shown in FIGS. 2 and 5 descends in the −Z direction by the moving means 25, is positioned at a predetermined height position, and then stops the descent. Air is sent from the air source 69 shown in FIGS. 2 and 5, and the sent air is diverted by a branch portion 694 (not shown in FIGS. 2 and 5), and then pressure is adjusted by each regulator 64. It is supplied into the cylinder tube 620 of each air cylinder 62 through the air pipe 690. Then, each piston 622 receives the pressure of the air supplied into each cylinder tube 620 on its lower surface and rises in the + Z direction, and each rod 624 also rises accordingly.

For example, in the present embodiment, one circular plate-shaped pad protection member 626 is arranged so as to be sandwiched between the upper end surface of the three rods 624 and the lower surface of the polishing pad 44, but the pad protection is provided. The member 626 may be omitted.
Further, in the present embodiment, the pressure of the air supplied to each air cylinder 62 by each regulator 64 is a predetermined value (for example, so that the force for pushing up the processing means 4 of each of the three air cylinders 62 is the same. Equivalent). The control of the regulator 64 is performed by the control means 19 electrically connected to the regulator 64. For example, when the pressure of the air supplied to each air cylinder 62 is the pressure V1 and the area of the lower surface of the piston 622 of each air cylinder 62 is the area S1, each air cylinder 62 pushes up the processing means 4 in the + Z direction. The force, that is, the thrust F1 of each air cylinder 62 = area S1 × pressure V1.
The pressure of the air supplied to each air cylinder 62 may be different due to the pressure adjustment of the air by each regulator 64, and the processing means 4 of each of the three air cylinders 62 is pushed up. The forces may have different values.

For example, the total value of the thrusts F1 of the three air cylinders 62 = 3 × F1, and the total value 3 × F1 is the actual load value applied to the processing means 4 from the air cylinder 62. It is displayed on the touch panel 199 shown in.
On the other hand, the first load sensor 81 to the third load sensor 83 of the processing means 4 pushed up in the + Z direction by the three air cylinders 62 each detect the load, and the voltage signals indicating the detected load are respectively controlled by the control means 19. Send to. In the control means 19, the total value = Fa of the loads detected by the first load sensor 81 to the third load sensor 83 is calculated and displayed on the touch panel 199. For example, the operator is the total value of the thrusts F1 of the three air cylinders 62 displayed on the touch panel 199, and the load value actually applied to the processing means 4 = 3 × F1, and the first load sensors 81 to No. 1 3 The total value of the loads detected by the load sensor 83 = Fa is compared with the load value actually applied to the processing means 4 = 3 × F1, and the first load sensor 81 to the third load sensor 83 are detected. The total value of the load = the deviation amount of Fa is recognized, and the deviation amount is set as the correction amount in the control means 19. The correction amount may be set automatically by the control means 19 itself, regardless of the operator.

The setting of the correction amount for the load value detected by the first load sensor 81 to the third load sensor 83 as described above causes the regulator 64 to sequentially increase the pressure of the air supplied to each air cylinder 62, that is, for example. By changing the magnitude of the load value applied to the processing means 4 by the three air cylinders 62, the correction amount is set to the control means 19 a plurality of times, and the first load sensors 81 to the third are set. The load value correction work for matching the total value of the loads detected by the load sensor 83 with the load value actually applied to the processing means 4 is completed. After that, the operator carries out the jig 6 from the holding means 50, and the processing apparatus 1 is in a state where the workpiece 90 can be processed again.
In order to set the correction amount for the control means 19 a plurality of times, a valve for opening the three air cylinders 62 to the atmosphere is provided, the air cylinder 62 is opened to the atmosphere to eliminate the air pressure, and the first load sensor 81, the first load sensor 81, is provided. After the values of the two load sensors 82 and the third load sensor 83 are set to zero, the pressure of the air may be adjusted to a predetermined pressure by the regulator 64 so that the air is supplied to the three air cylinders 62.

As described above, the jig 6 according to the present invention includes a plate 60 placed on the holding surface 502 of the holding means 50, an air cylinder 62 arranged on the upper surface of the plate 60, and air supplied to the air cylinder 62. The air cylinder 62 includes a regulator 64 for adjusting the pressure, and the air cylinder 62 has the cylinder tube 620 and the inside of the cylinder tube 620 by supplying air of a predetermined pressure into the cylinder tube 620 and pushing the lower surface of a predetermined area to the air. By providing a piston 622 that slides on the piston 622 and a rod 624 that is connected to the piston 622, it is possible to easily enter between the holding surface 502 of the holding means 50 and the lower surface of the processing means 4. The first load sensor 81 to the third load sensor 83 are pushed up by the processing means 4 with a force whose value is determined by the pressure of the air supplied to the cylinder tube 620 and the area of the lower surface of the piston 622 in the state of being inserted. It is possible to measure the detected load value.

In the jig 6 according to the present invention, at least three air cylinders 62 are arranged on the plate 60, and the center of gravity of the polygon formed by at least three air cylinders 62 is aligned with the center of the lower surface of the processing means 4. By pushing up the machining means 4 with at least three air cylinders 62, a load (reaction force of the load received by the workpiece 90 during polishing) is applied to the machining means 4 by a plurality of air cylinders 62 unlike the conventional case. For example, even if the distance between the holding surface 502 of the holding means 50 and the lower surface of the processing means 4 is small due to the device configuration, the jig 6 can be easily inserted between them. That is, when correcting the load value detected by the first load sensor 81 to the third load sensor, it is necessary to sequentially apply large and small loads to the lower surface of the processing means 4, but conventionally, one is used. For example, since it is necessary to apply a large load to the elevating cylinder, the size of the elevating cylinder may become large, and when the distance between the holding surface 502 of the holding means 50 and the lower surface of the processing means 4 is small, In some cases, the elevating cylinder could not be inserted. On the other hand, since the jig 6 according to the present invention includes a plurality (three) air cylinders 62 having a reduced size in the extending direction (vertical direction), the holding surface 502 of the holding means 50 and the processing means 4 Even if the distance from the lower surface is small due to the device configuration, the jig 6 can be easily inserted between the two, and the load required for correcting the load value is distributed to distribute the lower surface of the processing means 4. Therefore, even if the value of the load that can be applied to each miniaturized air cylinder 62 is smaller than that of the conventional large elevating cylinder, the large load required for correction can be applied. Since it can be generated by a plurality of air cylinders 62, it is possible to appropriately correct the load value detected by the first load sensor 81 to the third load sensor 83.
The plate 60 can be positioned when placed on the holding surface 502 so that the center of gravity of the polygon formed by at least three air cylinders 62 and the center of the lower surface of the processing means 4 coincide with each other. It has a protruding pin on the bottom surface.
The outer peripheral contact portion 602 may be used for positioning.
Further, the number of air cylinders 62 may be one or two, which is less than three. When there are two air cylinders 62, it is preferable that the center of the lower surface of the processing means 4 is positioned on the line connecting the two air cylinders 62.
Further, the plate 60 and the air cylinder 62 may not be connected to each other. The upper surface of the plate 60 may be provided with a frame surrounding the air cylinder 62 so that the air cylinder 62 is placed in a predetermined position.

In the jig 6 according to the present invention, at least three air cylinders 62 are arranged at equal intervals on a virtual circle formed on the upper surface of the plate 60, and each air cylinder 62 pushes up the processing means 4. By adjusting the pressure of the air supplied to the cylinder tube 620 by the regulator 64 so that the pressure is the same, the load required for more appropriate correction can be applied to the lower surface of the processing means 4. That is, it is possible to apply the resultant force of the loads of the three air cylinders 62 of the jig 6 to the center of the lower surface of the processing means 4.
It is measured in advance that the load applied to the processing means 4 by the three air cylinders 62 is a predetermined load. Further, after installing the jig 6 on the holding surface 502 of the holding means 50, a load measuring device capable of measuring a load is interposed between the rod 624 and the lower surface of the mount 43, and three air cylinders 62 are processing means. It may be possible to measure that the load applied to 4 is a predetermined load. Further, it may be measured that the load applied in advance by this load measuring device is a predetermined load.

The jig 6 according to the present invention is not limited to the above embodiment, and the shape and the like of each configuration of the processing apparatus 1 shown in the attached drawings are not limited to this, and the present invention is not limited to this. It can be changed as appropriate within the range where the effect of can be exhibited.
For example, in the above embodiment, the rod 624 of the jig 6 is brought into contact with the polishing pad 44 of the processing means 4 to correct the load value, but the polishing pad 44 and the platen 47 of the processing means 4 shown in FIG. 2 are corrected. May be removed from the lower surface of the mount 43 and the rising rod 624 may be brought into contact with the lower surface of the mount 43 to correct the load value.

The jig used together with the processing apparatus 1 shown in FIG. 1 may be the jig 7 shown in FIGS. 6 and 7 described below.
The jig 7 shown in FIGS. 6 and 7 includes a mounting plate 70 having a circular plate shape, which is made of, for example, an alloy or general-purpose plastic. The flat upper surface of the mounting plate 70 serves as a mounting surface for the mount 43 of the processing means 4. Bolt holes 701 are formed on the mounting surface at equal intervals in a plurality of circumferential directions. Then, the plurality of insertion holes 433 formed in the mount 43 and the plurality of bolt holes 701 provided in the mounting plate 70 are aligned so as to overlap each other, and the fastening bolts 439 shown in FIG. 6 are inserted from the insertion holes 433 and bolted. By screwing into the hole 701, the mounting plate 70 can be mounted on the lower surface of the mount 43 of the processing means 4.

The jig 7 includes an air cylinder 72 arranged on the lower surface of the mounting plate 70, and a regulator 74 for adjusting the pressure of air supplied to the air cylinder 72.
The air cylinder 72 has a smaller overall length in the extending direction (Z-axis direction) than the conventional air cylinder, and has a bottomed cylindrical cylinder tube 720 and an air having a predetermined pressure in the cylinder tube 720. It includes a piston 722 that is supplied inside and slides in the cylinder tube 720 in the Z-axis direction when the upper surface of a predetermined area is pushed by air, and a rod 724 whose upper end is connected to the piston 722.

An air introduction port 7203 is formed through the lower side of the side wall of the cylinder tube 720, and the air source 79 communicates with the air introduction port 7203 via each air pipe 790. A regulator 74 is arranged in each air pipe 790. Each regulator 74 can steplessly adjust the pressure of the air supplied to each air cylinder 72 in proportion to the electric power supplied from the control means 19.

A ball joint 76 is attached to the lower end of the rod 724, and a contact plate 77 having a circular shape in a plan view is attached to the lower end of the ball joint 76, for example. The angle of the contact plate 77 having a flat lower surface can be changed by the ball joint 76.

In the present embodiment, at least three air cylinders 72 are arranged on the lower surface of the mounting plate 70, and further, the air cylinders 72 are evenly spaced (120 degree intervals) on a virtual circle formed on the lower surface of the mounting plate 70. Is arranged. That is, in the present embodiment, the three air cylinders 72 are arranged at positions that are the vertices of the equilateral triangles formed in the horizontal plane (in the X-axis and Y-axis planes). Further, in the present embodiment, for example, the center of the equilateral triangle and the center of the lower surface of the mount 43 on which the mounting plate 70 is mounted are aligned with each other.
The number of air cylinders 72 may be four or more and may be arranged so as to be located at the apex of a virtual square in the horizontal plane, or may be arranged at different intervals on the lower surface of the mounting plate 70. It may have been done. Alternatively, a total of six may be arranged, three on each of two virtual concentric circles formed on the lower surface of the mounting plate 70.

When replacing the first load sensor 81 to the third load sensor 83 shown in FIG. 1, for example, regarding the output values of the first load sensor 81 to the third load sensor 83, the platen 47 and the platen 47 shown in FIG. 2 are mounted on the mount 43. In the processing means 4 with the polishing pad 44 attached (a state in which the workpiece 90 can be polished), the processing means while applying even pressure to the three load sensors so as to be zero when no load is applied. Although the assembly of No. 4 is performed, the combined weight of the platen 47 and the polishing pad 44 is different from the weight of the jig 7 shown in FIGS. This is the corrected weight difference considered when the jig 7 is mounted on the mount 43 and the load value detected by the first load sensor 81 to the third load sensor 83 is corrected. The corrected weight difference is shown in the mount 43, for example, when the weight of the jig 7 is larger than the total weight of the platen 47 and the polishing pad 44, as compared with the state where the jig 7 is attached to the mount 43. Because the pressure applied to the first load sensor 81 to the third load sensor 83 in the processing means 4 in the state where the platen 47 and the polishing pad 44 shown in 2 are attached (the state in which the workpiece 90 can be polished) becomes small. This is a corrected weight difference to be considered when setting the deviation amount of the total value of the loads detected by the first load sensor 81 to the third load sensor 83 with respect to the load value actually applied to the processing means 4. Then, the corrected weight difference is stored in the storage unit of the control means 19 that can recognize the total weight of the platen 47 and the polishing pad 44 and the weight of the jig 7 in advance.

The correction of the load value detected by the first load sensor 81 to the third load sensor 83 using the jig 7 will be described below.
First, as shown in FIGS. 6 and 7, the jig 7 is attached to the lower surface of the mount 43 of the processing means 4 by the operator.
Next, the holding means 50 holding nothing by the turntable 17 shown in FIG. 1 is positioned below the processing means 4. The positioning is, for example, the same as the positioning when the processing means 4 grinds the workpiece 90 held by the holding means 50.

Next, the processing means 4 shown in FIGS. 6 and 7 descends in the −Z direction by the moving means 25, and the contact plate 77 comes into contact with the holding surface 502, which is an extremely gentle conical slope of the holding means 50, and each contact plate is contacted. The angle of 77 is changed by the ball joint 76, each lower surface becomes parallel to the holding surface 502, and the descent of the processing means 4 is stopped. In this state, no load is applied to the holding surface 502 from the processing means 4 side.
The holding surface 502 may be tilted by the tilting means arranged on the holding means 50 side.

Air is sent out from the air source 79 shown in FIGS. 6 and 7, pressure is adjusted by each regulator 74, passes through the air pipe 790, and is supplied into the cylinder tube 720 of each air cylinder 72. Then, each piston 722 receives the pressure of the air supplied into each cylinder tube 720 on its upper surface and descends in the −Z direction, and each rod 724 also descends accordingly. Then, with the contact plate 77 in contact with the holding surface 502, the holding surface 502 is a force (thrust of the air cylinder 72) whose value is determined by the pressure of the air supplied to the cylinder tube 720 and the area of the upper surface of the piston 722. By pushing downward, the processing means 4 is relatively pushed up by the reaction force from the holding means 50 side.

For example, the pressure of the air supplied to each air cylinder 72 by each regulator 74 is adjusted to a predetermined value (for example, the same value) so that the force for pushing up the processing means 4 of each of the three air cylinders 72 is the same. .. The control of the regulator 74 is performed by the control means 19 electrically connected to the regulator 74. The calculation of the thrust of the air cylinder 72 and the like are the same as in the case of the jig 6 shown in FIG. 5 described above.
The pressure of the air supplied to each air cylinder 72 may be different due to the pressure adjustment of the air by each regulator 74, and the processing means 4 of each of the three air cylinders 72 is pushed up. The forces may have different values.

For example, the control means 19 is displayed on the touch panel 199 shown in FIG. 1 as an actual load value in which the total value of the thrusts of the three air cylinders 72 is applied from the air cylinder 72 to the processing means 4.
On the other hand, the first load sensor 81 to the third load sensor 83 of the processing means 4, which are pushed up in the + Z direction by the reaction force from the holding means 50 side to the thrust of the three air cylinders 72, detect the load, respectively. A voltage signal indicating the detected load is transmitted to the control means 19, respectively. The control means 19 calculates the total value of the loads detected by the first load sensor 81 to the third load sensor 83, and displays the total value on the touch panel 199. Then, for example, the control means 19 is the total value of the thrusts of the three air cylinders 72 displayed on the touch panel 199, the load value actually applied to the processing means 4, and the first load sensors 81 to the third load. By comparing with the total value of the load detected by the sensor 83, the deviation amount of the total value of the loads detected by the first load sensor 81 to the third load sensor 83 with respect to the load value actually applied to the processing means 4 is calculated. Recognizing, further, the correction weight difference between the total weight of the platen 47 and the polishing pad 44 and the weight of the jig 7 is taken into consideration, and an appropriate correction amount is set.
The correction amount may be set by an operator who has seen the display on the touch panel 199.

The setting of the correction amount for the load value detected by the first load sensor 81 to the third load sensor 83 as described above causes the regulator 74 to sequentially increase the pressure of the air supplied to each air cylinder 72, that is, for example. By changing the magnitude of the load value applied to the processing means 4 by the three air cylinders 72, the correction amount is set to the control means 19 a plurality of times, and the first load sensors 81 to the third are set. The load value correction work for matching the total value of the loads detected by the load sensor 83 with the load value actually applied to the processing means 4 is completed. After that, the operator carries out the jig 7 from the holding means 50, and the processing apparatus 1 is in a state where the workpiece 90 can be processed again.
In order to set the correction amount for the control means 19 a plurality of times, a valve for opening the three air cylinders 72 to the atmosphere is provided, the air cylinders 72 are opened to the atmosphere to eliminate the air pressure, and the first load sensor 81 and the first load sensor 81 are provided. After setting the values of the two load sensors 82 and the third load sensor 83 to zero, the pressure of the air may be adjusted to a predetermined pressure by the regulator 74 so that the air is supplied to the three air cylinders 72.

The jig 7 according to the present invention adjusts the pressure of the mounting plate 70 mounted on the lower surface of the mount 43 of the processing means 4, the air cylinder 72 arranged on the lower surface of the mounting plate 70, and the air supplied to the air cylinder 72. The air cylinder 72 slides in the cylinder tube 720 by supplying air of a predetermined pressure into the cylinder tube 720 and pushing the upper surface of a predetermined area by the air. The piston 722, the rod 724 connected to the piston 722, the ball joint 76 attached to the lower end of the rod 724, and the holding surface 502 are in contact with each other, and the angle can be changed according to the inclination of the holding surface 502 by the ball joint 76. By providing the contact plate 77, the holding surface is provided with a force whose value is determined by the pressure of the air supplied to the cylinder tube 720 and the area of the upper surface of the piston 722 in a state where the contact plate 77 is in contact with the holding surface 502. The load detected by the first load sensor 81, the second load sensor 82, and the third load sensor 83 by pushing the 502 downward and pushing up the machining means 4 relatively by the reaction force from the holding means 50 side. It becomes possible to measure the value of.

90: Work piece 902: Back surface 901: Front surface 1: Processing device 10: First device base 11: Second device base 110: Processing area 150: First cassette mounting portion 1500: First cassette 151: Second cassette mounting part 1510: Second cassette 155: Robot 1550: Articulated arm 1551: Robot hand 1556: Electric slider
1540: Loading arm 1541: Unloading arm 153: Alignment means 152: Temporary placement area 156: Cleaning means 12: First column 20: Rough grinding feeding means 30: Rough grinding means 300: Spindle 301: Housing 302: Motor 304 : Grinding wheel
13: Second column 21: Finish grinding feed means 31: Finish grinding means
14: Third column 25: Lifting means 250: Ball screw 252: Motor 4: Processing means 40: Spindle 43: Mount 47: Platen 44: Polishing pad 48: Holder 480: Bottom plate 481: Side plates 81 to 83: First load sensor ~ Third load sensor 50: Holding means 500: Porous plate 502: Holding surface 501: Frame body 17: Turntable
6: Jig 60: Plate 602: Outer peripheral contact part 603: Lower surface of outer peripheral contact part 62: Air cylinder 620: Cylinder tube 6203: Air inlet 622: Piston 624: Rod 64: Regulator 69: Air source 690: Air piping 694 : Branch 19: Control means 199: Touch panel 7: Jig 70: Plate 701: Bolt hole 72: Air cylinder 720: Cylinder tube 7203: Air inlet 722: Piston 724: Rod 76: Ball joint 77: Contact plate 74: Regulator 79: Air source 790: Air piping

Claims (5)

A holding means for holding the workpiece on the holding surface, a machining means for processing the workpiece by applying a load to the workpiece from above the holding means, and the machining means and the holding means relative to each other. A moving means that moves in a direction perpendicular to the holding surface, and a load sensor that is placed in the machining means and moves the machining means in a direction approaching the holding surface to detect the reaction force of the load received by the workpiece. A jig for measuring the value of the load detected by the load sensor in the processing apparatus provided with.
A plate placed on the holding surface, an air cylinder arranged on the upper surface of the plate, and a regulator for adjusting the pressure of air supplied to the air cylinder are provided.
The air cylinder is connected to the cylinder tube, a piston that slides in the cylinder tube by supplying air of a predetermined pressure into the cylinder tube and pushing the lower surface of a predetermined area to the air, and the piston. With a rod,
A jig that measures the value of the load detected by the load sensor by pushing up the processing means with a force whose value is determined by the pressure of the air supplied to the cylinder tube and the area of the lower surface of the piston. At least three air cylinders are arranged on the plate, and the center of gravity of the polygon formed by the at least three air cylinders is aligned with the center of the lower surface of the processing means, and the air cylinders are at least three. The jig according to claim 1, which pushes up the processing means. The regulators are placed in the cylinder tube so that at least three of the air cylinders are evenly spaced on a circle formed on the plate so that each air cylinder has the same force to push up the machining means. The jig according to claim 2, wherein the pressure of the supplied air is adjusted. The jig according to claim 1, claim 2, or claim 3, further comprising at least three outer peripheral contact portions arranged on the lower surface of the plate and in contact with the outer periphery of the holding surface. A holding means for holding the workpiece on the holding surface, a machining means for processing the workpiece by applying a load to the workpiece from above the holding means, and the machining means and the holding means relative to each other. A moving means that moves in a direction perpendicular to the holding surface, and a load sensor that is placed in the machining means and moves the machining means in a direction approaching the holding surface to detect the reaction force of the load received by the workpiece. A jig for measuring the value of the load detected by the load sensor in the processing apparatus provided with.
A mounting plate mounted on the lower surface of the processing means, an air cylinder arranged on the lower surface of the mounting plate, and a regulator for adjusting the pressure of air supplied to the air cylinder are provided.
The air cylinder is connected to the cylinder tube, a piston that slides in the cylinder tube by supplying air of a predetermined pressure into the cylinder tube and pushing the upper surface of a predetermined area by the air, and the piston. A rod, a ball joint attached to the lower end of the rod, and a contact plate that is in contact with the holding surface and whose angle can be changed according to the inclination of the holding surface by the ball joint.
With the contact plate in contact with the holding surface, the holding surface is pushed downward with a force whose value is determined by the pressure of the air supplied to the cylinder tube and the area of the upper surface of the piston, and relatively. A jig that measures the value of the load detected by the load sensor by pushing up the processing means.

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