JP2022007368A - Temperature sensor - Google Patents

Abstract

To provide a temperature sensor having favorable responsibility and having improved corrosion resistance.SOLUTION: A temperature sensor includes: a temperature-sensitive element 10; a cable 11 having a plurality of lead wires 12 with insulation coating, each end being connected to the temperature-sensitive element 10, and an insulating tube 13 collectively coating the plurality of lead wires 12; a metal protective tube 14 in which the temperature-sensitive element 10 is arranged in an inside of a bottomed cylindrical bottom whose tip end is sealed, and one end of the cable 11 connected to the temperature-sensitive element 10 is inserted into the inside; and a fluorine resin tube 15 into which the metal protective tube 14 and the cable 11 are inserted, with an end on a tip end side of the metal protective tube 14 being sealed. The fluorine resin tube 15 is in close contact with an outer surface of the metal protective tube 14.SELECTED DRAWING: Figure 1

Description

Application for application of Article 30, Paragraph 2 of the Patent Law Business negotiation date June 9, 2020 Business negotiation location SCREEN Holdings Hikone Office (480-1 Takamiya-cho, Hikone City, Shiga Prefecture)

The present invention relates to a temperature sensor used for measuring the temperature of a liquid such as a cleaning liquid for cleaning a wafer in a manufacturing process of a semiconductor device.

In the manufacturing process of semiconductor devices, in order to improve the product yield, the wafer is sufficiently washed with various chemicals and cleaning liquids such as pure water before and after each processing process so as to eliminate the adhesion of dust to the wafer. I am doing it. When cleaning this wafer, it is important to control the temperature of the cleaning liquid, and a temperature sensor is used to detect the temperature of the cleaning liquid. Generally, a temperature sensor using a resistance temperature detector or a thermoelectric pair is known.

For example, Patent Document 1 describes a temperature sensor that detects the temperature of a liquid such as a chemical solution in the manufacturing process of a semiconductor device. In Patent Document 1, a temperature measuring unit having a temperature measuring element and a lead wire for outputting a measurement signal from the temperature measuring unit, a cable connected to the lead wire of the temperature measuring unit, and a connecting portion of the temperature measuring unit and the cable are described. A configuration comprising a synthetic resin tube to be coated and an outer coating portion welded to the entire synthetic resin tube and the end portion of the cable to be covered is described.

Japanese Unexamined Patent Publication No. 2010-175257

In Patent Document 1, by interposing a synthetic resin tube between the temperature measuring portion and the like and the outer coating portion, static electricity charged in the outer coating portion is less likely to be discharged between the lead wire and the core wire of the cable. It is described that pinholes are less likely to occur in the outer covering portion, and corrosion of lead wires and core wires of cables is less likely to occur, but there is room for improvement in this respect.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a temperature sensor having good responsiveness and capable of improving corrosion resistance.

In order to achieve the above object, the temperature sensor according to an embodiment of the present invention includes a temperature sensitive element, a plurality of lead wires having an insulating coating having one end connected to the temperature sensitive element, and the plurality of lead wires. The temperature-sensitive element is arranged inside a cable having an insulating tube that collectively covers it, and the bottom of the bottom of the bottom having a sealed tubular shape, and one end of the cable connected to the temperature-sensitive element is The fluororesin is provided with a metal protective tube inserted inside, a fluororesin tube into which the metal protective tube and the cable are inserted, and the end end of the metal protective tube sealed on the tip end side. The made tube is in close contact with the outer surface of the metal protective tube.

According to this configuration, since one end of the temperature-sensitive element and the cable connected to the temperature-sensitive element is inserted in the metal protective tube, corrosion of lead wires and the like can be prevented and corrosion resistance is improved. Can be done. Further, since the fluororesin tube is in close contact with the outer surface of the metal protective tube, the response speed of the temperature sensor to a temperature change can be improved and good responsiveness can be realized. Further, by covering the metal protective tube and the cable with the fluororesin tube, it is possible to improve the chemical resistance (chemical resistance).

In the temperature sensor, even if the fluororesin tube is welded to the insulating tube in the vicinity of the metal protective tube of the cable pulled out from the metal protective tube to the side opposite to the tip thereof. good.

According to this configuration, it is possible to prevent the temperature sensitive element and the lead wire from moving in the metal protective tube.

In the temperature sensor, the temperature sensitive element may be a thin film type resistance temperature detector element. Since the thin film type resistance temperature detector element is small and inexpensive, it is possible to reduce the size and cost of the temperature sensor.

INDUSTRIAL APPLICABILITY The present invention has the effect of being able to provide a temperature sensor having the configuration described above, having good responsiveness, and capable of improving corrosion resistance.

1 (A) is a schematic view showing an example of a temperature sensor according to an embodiment of the present invention, and FIG. 1 (B) is a cross-sectional view of a lead wire portion of the temperature sensor shown in FIG. 1 (A).

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In addition, in order to make it easy to understand, the drawings schematically show each component, and the shape, dimensional ratio, etc. may not be accurately displayed. Further, the present invention is not limited to the following embodiments.

(Embodiment)
1 (A) is a schematic view showing an example of a temperature sensor according to an embodiment of the present invention, and FIG. 1 (B) is a cross-sectional view of a lead wire portion of the temperature sensor shown in FIG. 1 (A).

The temperature sensor 1 includes a temperature-sensitive element 10, a cable 11, a stainless metal protective tube 14, and a fluororesin tube 15.

The temperature-sensitive element 10 has an element main body portion 10a whose electrical physical quantity changes according to a change in temperature, and two connection terminals (conductors) 10b. As the temperature sensitive element 10 (element body 10a), in this example, a thin film resistance temperature detector element using platinum as a resistor is used, but a thermocouple can also be used.

As shown in FIG. 1 (B), the cable 11 is insulated by inserting three lead wires 12 having an insulating coating and the three lead wires 12 into the cable 11 so as to collectively cover the three lead wires 12. It has a sex tube 13. Each lead wire 12 is composed of, for example, a conductor wire 12a made of a copper wire and an insulating coating material 12b made of, for example, a fluororesin that covers the conductor wire 12a. The insulating tube 13 is made of a fluororesin such as PFA.

One of the two connection terminals 10b of the temperature sensitive element 10 is connected (joined) to one end of the lead wire 12a of one of the three lead wires 12 by brazing using, for example, silver brazing 16. ), And the other connection terminal 10b is connected (bonded) to one end of the lead wire 12a of the remaining two lead wires 12 by brazing using, for example, silver brazing 16. In addition, in FIG. 1A, three lead wires 12 are shown side by side in order to make it easy to understand the connection relationship between the two connection terminals 10b of the temperature sensitive element 10 and the like, but in reality, FIG. 1 (A) shows. As shown in B), three lead wires 12 are arranged.

The other end of the lead wire 12a of each of the three lead wires 12 is connected to a measuring instrument (not shown). The measuring instrument is configured so that a current can be passed through the temperature sensitive element 10 via the lead wire 12 to measure the voltage, and the temperature can be calculated from the voltage. Although the three-lead wire system using the three lead wires 12 is illustrated here, the present invention is not limited to this, and a four-lead wire system may be used, for example. There is also a two-conductor type, but the three-conductor type is often used from the viewpoint of accuracy and the like.

The temperature sensing element 10 connected to the cable 11 as described above is arranged inside the bottom portion 14a of the bottomed tubular metal protective tube 14. In the bottomed tubular metal protective tube 14, one end (tip) of the cylindrical stainless steel metal tube is sealed by a sealing welding process to form a bottom portion 14a.

Although not shown, heat resistance is provided to each lead wire 12, the lead wire 12a, and each connection terminal 10b of the temperature sensitive element 10 in the range S1 inside the metal protective tube 14 in the portion exposed from the insulating tube 13. An insulating tape (for example, a polyimide tape) to be provided is wound so that the electrical insulation between the lead wires 12 is maintained and the air layer inside the metal protective tube 14 is reduced.

The manufacturing procedure of the above configuration excluding the fluororesin tube 15 is performed after the two connection terminals 10b of the temperature sensitive element 10 and the conductors 12a of the three lead wires 12 of the cable 11 are connected by brazing ( That is, after the cable 11 is connected to the temperature sensitive element 10), the insulating tape is wound in the range S1. After that, by inserting the temperature sensitive element 10 to which the cable 11 is connected into the bottomed tubular metal protective tube 14, the temperature sensitive element 10 is arranged inside the bottom 14a of the metal protective tube 14. At the same time, one end side (temperature sensitive element 10 side) of the cable 11 is inserted into the metal protective tube 14, and the other end side of the cable 11 is pulled out from the metal protective tube 14. After this, a fluororesin tube 15 is provided.

The fluororesin tube 15 is made of a fluororesin such as PFA and covers the metal protective tube 14 and the cable 11. Here, the fluororesin tube 15 is in close contact with the entire outer surface (range S2 portion) of the outer surface of the metal protective tube 14. Further, the fluororesin tube 15 is welded to the insulating tube 13 of the outer surface portion (range S3 portion) in the vicinity of the metal protective tube 14 of the cable 11 of the portion drawn out from the metal protective tube 14. There is.

The fluororesin tube 15 before covering the metal protective tube 14 and the cable 11 has an elongated cylindrical shape, and its inner diameter φB is slightly larger than the outer diameter φA of the metal protective tube 14. A metal protective tube 14 and a cable 11 are inserted into the fluororesin tube 15, and in this state, the range S3 and the portion on the tip side of the range S3 (the left portion in FIG. 1A) are heated and pressurized, etc. By performing the above treatment, the tip portion 15a of the fluororesin tube 15 is sealed, the fluororesin tube 15 is brought into close contact with the entire outer surface of the metal protective tube 14, and the fluororesin tube 15 is brought into close contact with the entire outer surface. Is welded to the insulating tube 13 on the outer surface portion of the cable 11 in the vicinity of the metal protective tube 14 of the portion drawn out from the metal protective tube 14.

This temperature sensor 1 is used, for example, in a wafer cleaning device in the manufacturing process of a semiconductor device. In such a cleaning device, a cleaning liquid (chemical solution, pure water, etc.) is pumped and supplied to the cleaning tank by a pump or the like. The temperature sensor 1 is used to measure the temperature of the cleaning liquid in the cleaning tank. At this time, in the temperature sensor 1, the temperature sensing element 10 is located in the cleaning liquid with the tip portion 15a of the fluororesin tube 15 facing downward, and the upper end portion of the metal protective tube 14 (in FIG. 1A). The right end portion of the metal protective tube 14) is installed so as to come out above the liquid level of the cleaning liquid.

In the present embodiment, since the temperature-sensitive element 10 and one end of the cable 11 connected to the temperature-sensitive element 10 are inserted in the metal protective tube 14, corrosion of the lead wire 12 and the like can be prevented, and corrosion resistance can be prevented. It is possible to improve the sex. Further, since the fluororesin tube 15 is in close contact with the outer surface of the metal protective tube 14, the response speed of the temperature sensor 1 to a temperature change can be improved and good responsiveness can be realized. Further, since the metal protective tube 14 and the cable 11 are covered with the fluororesin tube 15, the chemical resistance (chemical liquid resistance) can be improved.

Further, the fluororesin tube 15 is welded to the outer surface portion of the cable 11 in the vicinity of the metal protective tube 14, so that the temperature sensitive element 10 and the lead wire 12 can be prevented from moving in the metal protective tube 14.

Further, in the present embodiment, a thin film type resistance temperature detector element is used for the temperature sensitive element 10. Since the thin film type resistance temperature detector element is smaller and cheaper than the winding type one, it is possible to reduce the size and cost of the temperature sensor 1.

From the above description, many improvements and other embodiments of the present invention will be apparent to those skilled in the art. Therefore, the above description should be construed as an example only and is provided for the purpose of teaching those skilled in the art the best aspects of carrying out the present invention. The details of its structure and / or function can be substantially changed without departing from the spirit of the present invention.

INDUSTRIAL APPLICABILITY The present invention is useful as a temperature sensor or the like having good responsiveness and capable of improving corrosion resistance.

1 Temperature sensor 10 Temperature sensitive element 11 Cable 12 Lead wire 13 Insulation tube 14 Metal protective tube 15 Fluororesin tube

Claims (3)

With a temperature sensitive element,
A cable having a plurality of lead wires having an insulating coating, one end of which is connected to the temperature-sensitive element, and an insulating tube that collectively covers the plurality of lead wires.
A metal protective tube in which the temperature-sensitive element is arranged inside a bottom of a bottom with a sealed cylindrical shape and one end of the cable connected to the temperature-sensitive element is inserted inside.
A fluororesin tube into which the metal protective tube and the cable are inserted and whose end end on the tip end side of the metal protective tube is sealed.
Equipped with
The fluororesin tube is in close contact with the outer surface of the metal protective tube.
Temperature sensor. The fluororesin tube is welded to the insulating tube in the vicinity of the metal protective tube of the cable, which is pulled out from the metal protective tube on the side opposite to the tip thereof.
The temperature sensor according to claim 1. The temperature sensitive element is a thin film type resistance temperature detector element.
The temperature sensor according to claim 1 or 2.

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