JP2021525830A - デバイス - Google Patents
デバイス Download PDFInfo
- Publication number
- JP2021525830A JP2021525830A JP2020567488A JP2020567488A JP2021525830A JP 2021525830 A JP2021525830 A JP 2021525830A JP 2020567488 A JP2020567488 A JP 2020567488A JP 2020567488 A JP2020567488 A JP 2020567488A JP 2021525830 A JP2021525830 A JP 2021525830A
- Authority
- JP
- Japan
- Prior art keywords
- region
- crucible
- evaporator
- outlet
- melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 44
- 239000012768 molten material Substances 0.000 claims abstract description 26
- 239000011343 solid material Substances 0.000 claims abstract description 16
- 230000008018 melting Effects 0.000 claims description 44
- 238000002844 melting Methods 0.000 claims description 44
- 238000010438 heat treatment Methods 0.000 claims description 30
- 239000000126 substance Substances 0.000 claims description 16
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 13
- 238000000151 deposition Methods 0.000 description 11
- 238000001704 evaporation Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 230000008020 evaporation Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 238000009835 boiling Methods 0.000 description 6
- 239000000155 melt Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 230000006698 induction Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000007872 degassing Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 206010039509 Scab Diseases 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (13)
- 坩堝であって、固体物質を当該坩堝に導入する入口と、蒸発物質を当該坩堝から解放する出口と、を有する、坩堝を備え、
前記坩堝内の溶融物質からの脱ガス蒸気が、前記出口から離間するように方向付けられ、それにより、前記出口における前記溶融物質の表面は、平静であり、前記出口からの蒸発物質の流動が、一定であることを特徴とする定常蒸着蒸発器デバイス。 - 前記坩堝が、溶融領域と、蒸発器領域と、加熱領域であって、当該加熱領域を通して、溶融物質が前記溶融領域から前記蒸発器領域へ移行する、加熱領域と、を備え、
前記入口が、前記溶融領域に位置し、
前記出口が、前記蒸発器領域に位置することを特徴とする請求項1に記載のデバイス。 - 前記坩堝が、ベースを覆って延在するカバーを備えることを特徴とする請求項2に記載のデバイス。
- 前記カバーが、少なくとも部分的に、脱ガス蒸気であって前記坩堝内で発生した蒸気のための案内面を画成することを特徴とする請求項3に記載のデバイス。
- 前記案内面が、脱ガス蒸気を前記入口に向けて方向付けることを特徴とする請求項4に記載のデバイス。
- 前記案内面が、脱ガス蒸気を当該蒸発器デバイスの1以上の排気口に向けて方向付けるように構成されていることを特徴とする請求項4または5に記載のデバイス。
- 前記案内面が、前記坩堝の前記加熱領域を覆って延在しており、脱ガス蒸気を前記蒸発器領域から離間して方向付けるように形付けられていることを特徴とする請求項2から6のいずれか1項に記載のデバイス。
- 前記加熱領域が、前記溶融領域と前記蒸発器領域との間に延在することを特徴とする請求項2から7のいずれか1項に記載のデバイス。
- 当該デバイスの前記ベースが、前記加熱領域、前記溶融領域及び前記蒸発器領域に関して共通していることを特徴とする請求項8に記載のデバイス。
- 前記カバーが、前記蒸発器領域から前記溶融領域に向けて上方へ傾斜していることを特徴とする請求項3から9のいずれか1項に記載のデバイス。
- 前記ベースが、前記溶融領域から前記蒸発器領域に向けて上方へ傾斜していることを特徴とする請求項2から10のいずれか1項に記載のデバイス。
- 当該デバイスの前記ベース及び前記案内面が、前記蒸発器領域から発散していることを特徴とする請求項2から9のいずれか1項に記載のデバイス。
- 1以上の前記加熱器が、前記溶融領域を加熱するための第1加熱器と、前記蒸発器領域を加熱するための第2加熱器と、を備えることを特徴とする請求項1から12のいずれか1項に記載のデバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1809090.2 | 2018-06-04 | ||
GB1809090.2A GB2574401B (en) | 2018-06-04 | 2018-06-04 | A Device |
PCT/GB2019/051518 WO2019234395A1 (en) | 2018-06-04 | 2019-05-31 | A vapour deposition evaporator device |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2021525830A true JP2021525830A (ja) | 2021-09-27 |
Family
ID=62872815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020567488A Pending JP2021525830A (ja) | 2018-06-04 | 2019-05-31 | デバイス |
Country Status (7)
Country | Link |
---|---|
US (1) | US20210230737A1 (ja) |
EP (1) | EP3802906A1 (ja) |
JP (1) | JP2021525830A (ja) |
KR (1) | KR20210005939A (ja) |
CN (1) | CN112236543A (ja) |
GB (1) | GB2574401B (ja) |
WO (1) | WO2019234395A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1527305A (fr) * | 1967-06-13 | 1968-05-31 | Hermsdorf Keramik Veb | Dispositif pour la vaporisation de matières sous vide |
JPH06101029A (ja) * | 1992-09-18 | 1994-04-12 | Kao Corp | 磁気記録媒体の製造装置 |
JPH06136521A (ja) * | 1992-10-27 | 1994-05-17 | Matsushita Electric Ind Co Ltd | 薄膜の製造方法及び製造装置 |
JP2010144221A (ja) * | 2008-12-18 | 2010-07-01 | Tokyo Electron Ltd | 原料ガス発生装置及び成膜装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL184420B (nl) * | 1953-01-26 | Farber Sidney Cancer Inst | N-trifluoracetyladriamycinederivaten en werkwijze voor het bereiden van een farmaceutisch preparaat die ze bevatten. | |
JPS54157744A (en) * | 1978-06-01 | 1979-12-12 | Mitsubishi Heavy Ind Ltd | Vacuum galvanization using zinc dross |
JPS6233762A (ja) * | 1985-08-06 | 1987-02-13 | Hitachi Ltd | 真空蒸着装置 |
EP1760169B1 (de) * | 2005-08-03 | 2008-04-16 | Applied Materials GmbH & Co. KG | Verdampfervorrichtung zum Beschichten von Substraten |
WO2008040329A1 (de) * | 2006-09-29 | 2008-04-10 | Von Ardenne Anlagentechnik Gmbh | Vakuumbeschichtungsverfahren und anordnung zur durchführung des verfahrens |
US8628617B2 (en) * | 2008-12-03 | 2014-01-14 | First Solar, Inc. | System and method for top-down material deposition |
US20100247747A1 (en) * | 2009-03-27 | 2010-09-30 | Semiconductor Energy Laboratory Co., Ltd. | Film Deposition Apparatus, Method for Depositing Film, and Method for Manufacturing Lighting Device |
JP2013163845A (ja) * | 2012-02-10 | 2013-08-22 | Nitto Denko Corp | 蒸着用坩堝及び蒸着装置並びに蒸着方法 |
GB201206096D0 (en) * | 2012-04-05 | 2012-05-16 | Dyson Technology Ltd | Atomic layer deposition |
CN105177507B (zh) * | 2015-09-08 | 2017-08-11 | 京东方科技集团股份有限公司 | 蒸镀坩埚及蒸镀设备 |
-
2018
- 2018-06-04 GB GB1809090.2A patent/GB2574401B/en active Active
-
2019
- 2019-05-31 EP EP19730474.4A patent/EP3802906A1/en active Pending
- 2019-05-31 US US15/734,856 patent/US20210230737A1/en not_active Abandoned
- 2019-05-31 WO PCT/GB2019/051518 patent/WO2019234395A1/en unknown
- 2019-05-31 CN CN201980037830.2A patent/CN112236543A/zh active Pending
- 2019-05-31 JP JP2020567488A patent/JP2021525830A/ja active Pending
- 2019-05-31 KR KR1020207034709A patent/KR20210005939A/ko not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1527305A (fr) * | 1967-06-13 | 1968-05-31 | Hermsdorf Keramik Veb | Dispositif pour la vaporisation de matières sous vide |
JPH06101029A (ja) * | 1992-09-18 | 1994-04-12 | Kao Corp | 磁気記録媒体の製造装置 |
JPH06136521A (ja) * | 1992-10-27 | 1994-05-17 | Matsushita Electric Ind Co Ltd | 薄膜の製造方法及び製造装置 |
JP2010144221A (ja) * | 2008-12-18 | 2010-07-01 | Tokyo Electron Ltd | 原料ガス発生装置及び成膜装置 |
Also Published As
Publication number | Publication date |
---|---|
GB2574401B (en) | 2022-11-23 |
US20210230737A1 (en) | 2021-07-29 |
CN112236543A (zh) | 2021-01-15 |
GB201809090D0 (en) | 2018-07-18 |
EP3802906A1 (en) | 2021-04-14 |
GB2574401A (en) | 2019-12-11 |
KR20210005939A (ko) | 2021-01-15 |
WO2019234395A1 (en) | 2019-12-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20070141233A1 (en) | EB-PVD system with automatic melt pool height control | |
KR101530183B1 (ko) | 금속 스트립에 합금 코팅을 증착하기 위한 산업용 증기 발생기 | |
US7339139B2 (en) | Multi-layered radiant thermal evaporator and method of use | |
KR20040047585A (ko) | 기화증착장치 | |
JP2021526186A (ja) | デバイス | |
JP5013591B2 (ja) | 真空蒸着装置 | |
JP2017145507A (ja) | 直接液体堆積 | |
JP2010533790A (ja) | 固体材料のための真空蒸着装置 | |
KR100287978B1 (ko) | 증발속도를 크게 한 mg 증발방법 | |
CN101688290A (zh) | 用于固态材料的真空蒸发设备 | |
KR101846692B1 (ko) | 스피팅 방지 구조체를 구비한 증착장치용 증발원 | |
US20120052189A1 (en) | Vapor deposition system | |
JP2021525830A (ja) | デバイス | |
JP2023075126A (ja) | 真空チャンバ内で基板をコーティングするための気相堆積装置及び方法 | |
KR20040032737A (ko) | 증착장치에서의 유기재료용 증발원 및 그 증착장치 | |
JP2018119700A (ja) | 耐火物容器内部の加熱装置及び加熱方法 | |
JP5542610B2 (ja) | 真空蒸着装置 | |
EA029854B1 (ru) | Парообразующее устройство | |
JP2005048244A (ja) | 有機物薄膜堆積用分子線源 | |
KR20210001183A (ko) | 원료 공급부 및 이를 포함하는 성막 장치 | |
CN117660887A (zh) | 用于蒸发系统的自上而下的升华装置及其用途 | |
JPH08134634A (ja) | 真空蒸着装置 | |
JPH09137268A (ja) | Mg蒸発方法 | |
MXPA01000845A (en) | Plasma-enhanced vacuum vapor deposition systems including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation | |
JPH0757906B2 (ja) | 昇華性物質の蒸発方法とるつぼ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210127 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20210906 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20210910 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220126 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220208 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20220428 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220520 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220705 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220905 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230110 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20230407 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20230801 |